JP2003259597A - Motor for vacuum - Google Patents
Motor for vacuumInfo
- Publication number
- JP2003259597A JP2003259597A JP2002057316A JP2002057316A JP2003259597A JP 2003259597 A JP2003259597 A JP 2003259597A JP 2002057316 A JP2002057316 A JP 2002057316A JP 2002057316 A JP2002057316 A JP 2002057316A JP 2003259597 A JP2003259597 A JP 2003259597A
- Authority
- JP
- Japan
- Prior art keywords
- motor
- vacuum
- ring
- mounting
- mounting flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Motor Or Generator Frames (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、基板搬送用ロボッ
トなどに用いられ、真空チャンバー内で使用される真空
用モータに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum motor used in a robot for transferring substrates and used in a vacuum chamber.
【０００２】[0002]
【従来の技術】従来の真空用モータは、駆動部全体を、
真空チャンバーで構成される真空環境内に入れて使用し
ている。または、回転軸と、ハウジングなどの固定部と
の隙間を磁性流体など高価な部品を用いて塞ぐようにし
ている。2. Description of the Related Art In a conventional vacuum motor, the entire drive section is
It is used by being placed in a vacuum environment composed of a vacuum chamber. Alternatively, the gap between the rotary shaft and the fixed portion such as the housing is closed by using an expensive component such as magnetic fluid.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな従来の真空用モータにおいては、次のような問題が
ある。
(1)大気、真空の隔壁を兼ねたモータケースとなるた
め、必要とする機械的強度以上にケ ースを丈夫にす
る必要がある。そのため、モータが全体的に大きく、ま
た重いものに なってしまう。
(2)駆動部に使用する材料等も、真空環境に適したもの
しか使用できないので、コストが かかる。また、特
注品になるので、製造に時間がかかる。
本発明は、このような問題を解決するためになされたも
ので、小形、軽量で、製造コストが低い真空用モータを
提供することを目的とするものである。However, such a conventional vacuum motor has the following problems. (1) Since the motor case doubles as a partition wall for air and vacuum, it is necessary to make the case stronger than the required mechanical strength. Therefore, the motor becomes large and heavy as a whole. (2) Only materials suitable for the vacuum environment can be used as the material for the driving unit, which is costly. In addition, since it is a custom-made product, it takes time to manufacture. The present invention has been made to solve such a problem, and an object of the present invention is to provide a vacuum motor that is small in size, lightweight, and low in manufacturing cost.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は、真空チャンバー内で使用される真空用モ
ータにおいて、モータの先端部に、負荷側に取付フラン
ジを有する減速機を取り付け、前記取付フランジに、前
記真空チャンバーに設けたモータ取付穴の周縁に、Ｏリ
ングを挟むようにして締め付け固定する取付リングを固
定し、前記取付フランジまたは取付リングに、樹脂で構
成され、減速機の出力軸に接触して、減速機およびモー
タの内部空間と、真空チャンバーの内部空間とを仕切る
真空シールを固定するようにしたものである。In order to solve the above problems, the present invention relates to a vacuum motor used in a vacuum chamber, in which a reducer having a mounting flange on the load side is attached to the tip of the motor. The mounting flange is fixed to a mounting hole around the motor mounting hole provided in the vacuum chamber so that the O-ring is sandwiched between the mounting flange and the mounting ring. The vacuum seal that separates the internal space of the speed reducer and the motor from the internal space of the vacuum chamber is fixed by contacting with.
【０００５】[0005]
【発明の実施の形態】以下、本発明の実施例を図に基づ
いて説明する。図１は本発明の実施例を示す真空用モー
タの側断面図で、真空チャンバーに取り付けた状態を示
している。図において、１は真空チャンバー、２は前記
真空チャンバーの床部、３は前記床部２に設けたモータ
取付穴、４は真空用モータで、検出器５を有するモータ
６と、前記モータ６の先端部に取り付けた減速機７とか
らなっている。前記減速機７は、負荷側に取付フランジ
８を有し、前記取付フランジ８の外周部に、断面がＬ字
状の取付リング９を固定している。前記取付リング９
は、前記真空チャンバー１のモータ取付穴３の周縁３ａ
に、図示しないボルト等によって締付け固定される。前
記取付リング９をモータ取付穴３の周縁３ａに締付ける
ときは、前記周縁３ａに設けたリング状の溝３ｂにＯリ
ング１０を挿入して、周縁３ａと取付リング９間に隙間
が生じないようにしている。１１は前記取付フランジ８
の内周部を軸方向に延ばして形成したシール保持部で、
先端部の内周面に真空シール１２を固定している。前記
真空シール１２は、樹脂で構成され内周面が減速機７の
出力軸７ａに接触しており、モータ６と減速機７の内部
空間と真空チャンバー１の内部空間とを仕切っている。
１３は前記シール保持部１１に取付けたシールカバーで
ある。このような構成において、真空モータ４を駆動す
ると真空モータ４内部に塵埃等が発生するが、真空シー
ル１２によって、モータ６と減速機７の内部空間と真空
チャンバー１の内部空間とを仕切っているので、モータ
６と減速機７の内部から真空チャンバー１内に塵埃等が
入り込むことはない。また、真空モータ４の外部におい
ては、前記周縁３ａと取付リング９間にＯリング１０が
介在しているので、周縁３ａと取付リング９間に隙間は
なく、真空チャンバー１外の大気が、周縁３ａの部分か
ら真空チャンバー１内に入り込むことはない。なお、本
発明においては、シール保持部１１は取付フランジ８で
はなく取付リング９に設けるようにしてもよい。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a side sectional view of a vacuum motor showing an embodiment of the present invention, showing a state in which it is attached to a vacuum chamber. In the figure, 1 is a vacuum chamber, 2 is a floor of the vacuum chamber, 3 is a motor mounting hole provided in the floor 2, 4 is a vacuum motor, and a motor 6 having a detector 5 and a motor 6 are provided. It consists of a speed reducer 7 attached to the tip. The speed reducer 7 has a mounting flange 8 on the load side, and a mounting ring 9 having an L-shaped cross section is fixed to the outer peripheral portion of the mounting flange 8. The mounting ring 9
Is a peripheral edge 3a of the motor mounting hole 3 of the vacuum chamber 1.
Then, it is fastened and fixed by a bolt or the like not shown. When tightening the mounting ring 9 on the peripheral edge 3a of the motor mounting hole 3, the O-ring 10 is inserted into the ring-shaped groove 3b provided on the peripheral edge 3a so that no gap is created between the peripheral edge 3a and the mounting ring 9. I have to. 11 is the mounting flange 8
A seal holding part formed by extending the inner peripheral part of the in the axial direction,
The vacuum seal 12 is fixed to the inner peripheral surface of the tip portion. The vacuum seal 12 is made of resin and has an inner peripheral surface in contact with the output shaft 7a of the speed reducer 7, and partitions the internal space of the motor 6 and the speed reducer 7 from the internal space of the vacuum chamber 1.
Reference numeral 13 is a seal cover attached to the seal holder 11. In such a configuration, when the vacuum motor 4 is driven, dust or the like is generated inside the vacuum motor 4, but the vacuum seal 12 partitions the internal space of the motor 6 and the speed reducer 7 from the internal space of the vacuum chamber 1. Therefore, dust or the like does not enter the vacuum chamber 1 from the inside of the motor 6 and the speed reducer 7. Further, outside the vacuum motor 4, since the O-ring 10 is interposed between the peripheral edge 3a and the mounting ring 9, there is no gap between the peripheral edge 3a and the mounting ring 9, and the atmosphere outside the vacuum chamber 1 is the peripheral edge. The vacuum chamber 1 does not enter from the portion 3a. In addition, in the present invention, the seal holding portion 11 may be provided not on the mounting flange 8 but on the mounting ring 9.
【０００６】[0006]
【発明の効果】以上述べたように、本発明によれば次の
ような効果がある。
(1)モータ全体と減速機の本体は、大気中に配置し、減
速機の回転軸のみ真空環境内に配 置しているので、モ
ータと減速機の外枠部分から塵埃等が真空環境中に排出
されるおそ れがない。したがって、外枠部分を必要と
する機械的強度以上に丈夫にする必要がなく 、モータ
と減速機を小形、軽量にすることができる。
(2)駆動部に使用する材料等も、真空環境に適したもの
にする必要がないので、、低コス トで、かつ製造にか
かる時間も短縮することができる。As described above, the present invention has the following effects. (1) The entire motor and reducer body are placed in the atmosphere, and only the reducer's rotating shaft is placed in a vacuum environment. Is not discharged to Therefore, it is not necessary to make the outer frame part stronger than the required mechanical strength, and the motor and speed reducer can be made compact and lightweight. (2) The material used for the drive unit does not need to be suitable for the vacuum environment, so that the cost can be reduced and the manufacturing time can be shortened.
【図面の簡単な説明】[Brief description of drawings]
【図１】 本発明の実施例を示す真空用モータの側断面
図で、真空チャンバーに取り付けた状態を示している。
ある。FIG. 1 is a side sectional view of a vacuum motor showing an embodiment of the present invention, showing a state where the motor is attached to a vacuum chamber.
is there.
１ 真空チャンバー、 ２ 床部、 ３ モータ取付穴、 ３ａ 周縁、 ３ｂ 溝、 ４ 真空用モータ、 ５ 検出器、 ６ モータ、 ７ 減速機、 ７ａ 出力軸、 ８ 取付フランジ、 ９ 取付リング、 １０ Ｏリング １１ シール保持部、 １２ 真空シール、 １３ シールカバー 1 vacuum chamber, 2 floors, 3 motor mounting holes, 3a peripheral edge, 3b groove, 4 vacuum motor, 5 detectors, 6 motors, 7 reducer, 7a output shaft, 8 mounting flange, 9 mounting ring, 10 O-ring 11 seal holder, 12 vacuum seal, 13 seal cover
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 5H605 AA03 AA07 BB05 CC02 CC03 CC05 DD05 DD09 DD32 EA19 GG06 5H607 AA06 AA12 BB01 CC03 DD03 DD19 EE21 JJ05 ─────────────────────────────────────────────────── ─── Continued front page F term (reference) 5H605 AA03 AA07 BB05 CC02 CC03 CC05 DD05 DD09 DD32 EA19 GG06 5H607 AA06 AA12 BB01 CC03 DD03 DD19 EE21 JJ05
Claims (2)
ータにおいて、モータの先端部に、負荷側に取付フラン
ジを有する減速機を取り付け、前記取付フランジに、前
記真空チャンバーに設けたモータ取付穴の周縁に、Ｏリ
ングを挟むようにして締め付け固定する取付リングを固
定し、前記取付フランジまたは取付リングに、樹脂で構
成され、減速機の出力軸に接触して、減速機およびモー
タの内部空間と、真空チャンバーの内部空間とを仕切る
真空シールを固定したことを特徴とする真空用モータ。1. In a vacuum motor used in a vacuum chamber, a speed reducer having a mounting flange on a load side is attached to a tip portion of the motor, and a motor mounting hole provided in the vacuum chamber is attached to the mounting flange. An O-ring is sandwiched between the O-rings and an attachment ring is fixed to the periphery, and the attachment flange or the attachment ring is made of resin and comes into contact with the output shaft of the reduction gear to reduce the internal space of the reduction gear and the motor to a vacuum. A vacuum motor characterized in that a vacuum seal that separates the interior space of the chamber is fixed.
面Ｌ字状の取付リングを固定し、前記取付リングの内周
部に、取付フランジを軸方向に延ばして形成したシール
保持部を設け、前記シール保持部に前記真空シールを固
定したことを特徴とする請求項１に記載の真空用モー
タ。2. A mounting ring having an L-shaped cross section is fixed to an outer peripheral portion of a mounting flange of the speed reducer, and a seal holding portion formed by axially extending the mounting flange is provided on an inner peripheral portion of the mounting ring. The motor for vacuum according to claim 1, wherein the vacuum seal is fixed to the seal holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002057316A JP4412878B2 (en) | 2002-03-04 | 2002-03-04 | Vacuum motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002057316A JP4412878B2 (en) | 2002-03-04 | 2002-03-04 | Vacuum motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003259597A true JP2003259597A (en) | 2003-09-12 |
| JP4412878B2 JP4412878B2 (en) | 2010-02-10 |
Family
ID=28667611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002057316A Expired - Fee Related JP4412878B2 (en) | 2002-03-04 | 2002-03-04 | Vacuum motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4412878B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109088500A (en) * | 2018-09-12 | 2018-12-25 | 珠海格力电器股份有限公司 | A kind of motor protection structure, motor, air-conditioning and installation method |
| KR102088914B1 (en) * | 2019-07-22 | 2020-03-13 | 국방과학연구소 | Horizontal type motor |
| DE102020101215A1 (en) | 2019-01-23 | 2020-07-23 | Fanuc Corporation | Robot seal structure and robot |
| JP7441728B2 (en) | 2020-05-29 | 2024-03-01 | 株式会社安川電機 | Transfer robots and transfer systems |
-
2002
- 2002-03-04 JP JP2002057316A patent/JP4412878B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109088500A (en) * | 2018-09-12 | 2018-12-25 | 珠海格力电器股份有限公司 | A kind of motor protection structure, motor, air-conditioning and installation method |
| CN109088500B (en) * | 2018-09-12 | 2023-11-07 | 珠海格力电器股份有限公司 | Motor protection structure, motor, air conditioner and installation method |
| DE102020101215A1 (en) | 2019-01-23 | 2020-07-23 | Fanuc Corporation | Robot seal structure and robot |
| US11072081B2 (en) | 2019-01-23 | 2021-07-27 | Fanuc Corporation | Robot sealing structure and robot |
| KR102088914B1 (en) * | 2019-07-22 | 2020-03-13 | 국방과학연구소 | Horizontal type motor |
| JP7441728B2 (en) | 2020-05-29 | 2024-03-01 | 株式会社安川電機 | Transfer robots and transfer systems |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4412878B2 (en) | 2010-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100338327C (en) | Opening/closing system for vehicle | |
| JP5685113B2 (en) | Electric vehicle drive | |
| CA2440871A1 (en) | Methods and apparatus for materials processing | |
| JP5685112B2 (en) | Electric vehicle drive | |
| EP1408307A3 (en) | Magnetic sensor wheel | |
| JP5676314B2 (en) | Electric vehicle drive | |
| JP2003259597A (en) | Motor for vacuum | |
| JP2015023659A (en) | Motor with speed reducer and driving device | |
| JP3972195B2 (en) | Vacuum motor | |
| JPH10205519A (en) | Suction device | |
| JP5956552B2 (en) | Electric vehicle drive | |
| JP2005014104A (en) | End effector for industrial robot | |
| JP2007104764A (en) | Drive apparatus in hybrid vehicle | |
| JP2006254570A (en) | Hybrid drive device | |
| CN219250047U (en) | Cleaning device and driving device | |
| US11865710B2 (en) | Vertical articulated robot, single-axis robot, and motor unit | |
| JPH0615481Y2 (en) | Motor unit | |
| NL1041132B1 (en) | Motor of electric bicycle for working with cassette. | |
| JP2568731Y2 (en) | Vacuum chamber dustproof device | |
| CN115816508B (en) | Joint module and robot | |
| JPH036568Y2 (en) | ||
| JPH04347070A (en) | Multistage magnetic fluid sealing device for vacuum | |
| WO2004059660A3 (en) | Packaging for the transport/storage of radioactive material | |
| US20220063047A1 (en) | Retention flange for power tool | |
| JPH09254075A (en) | Working robot |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050228 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070830 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080124 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080321 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080613 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091117 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121127 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4412878 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121127 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131127 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141127 Year of fee payment: 5 |
|
| LAPS | Cancellation because of no payment of annual fees |