JP2003254670A - Continuous heat treating furnace - Google Patents
Continuous heat treating furnaceInfo
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- JP2003254670A JP2003254670A JP2002053465A JP2002053465A JP2003254670A JP 2003254670 A JP2003254670 A JP 2003254670A JP 2002053465 A JP2002053465 A JP 2002053465A JP 2002053465 A JP2002053465 A JP 2002053465A JP 2003254670 A JP2003254670 A JP 2003254670A
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- Prior art keywords
- furnace
- heat treatment
- continuous heat
- treatment furnace
- exhaust pipe
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、セラミック積層部
材を焼成するための連続式熱処理炉の改良に関する。TECHNICAL FIELD The present invention relates to an improvement in a continuous heat treatment furnace for firing a ceramic laminated member.
【０００２】[0002]
【従来の技術】従来、ローラーハース方式あるいはプッ
シャーキルン方式などの被加熱物を連続式に移動させ加
熱する連続式熱処理炉において、炉内は、予熱帯、焼成
帯、冷却帯の順に所定のヒートカーブの温度に設定され
ている。そして、予熱帯および焼成帯などでは、炉長に
沿って複数のヒータ回路など加熱手段が配設され、所定
のヒートカーブが得られるよう、温度調節がなされてい
る。また、冷却帯では、出口側に雰囲気ガスを打ち込
み、それを焼成帯の方へ流動させて被焼成物の顕熱と熱
交換して、被焼成物を冷却するよう設定してあるのが通
例である。2. Description of the Related Art Conventionally, in a continuous heat treatment furnace, such as a roller hearth system or a pusher kiln system, in which an object to be heated is continuously moved and heated, the inside of the furnace is heated in a predetermined temperature in the order of a preheating zone, a firing zone and a cooling zone. It is set to the temperature of the curve. In the pre-tropical zone and the firing zone, heating means such as a plurality of heater circuits are arranged along the length of the furnace, and the temperature is adjusted so that a predetermined heat curve can be obtained. In addition, in the cooling zone, it is customary to drive the atmosphere gas into the outlet side, flow it toward the firing zone, and exchange heat with the sensible heat of the object to be fired to cool the object to be fired. Is.
【０００３】このような熱処理炉において、アクリル系
バインダ成分を含むセラミックグリーンシートを多数
枚、積層したセラミック積層部材を熱処理するには、バ
インダ成分が揮発する２００〜３００℃の温度域では、
炉内に大気を導入し、または積層枚数が多い場合にはＮ
2＋Ｈ2ガスを導入し、それらの通風により揮発したバイ
ンダ成分を排出するようにして、脱バインダを行ってい
る。In such a heat treatment furnace, in order to heat-treat a ceramic laminated member obtained by laminating a large number of ceramic green sheets containing an acrylic binder component, in a temperature range of 200 to 300 ° C. where the binder component volatilizes,
N is introduced when the atmosphere is introduced into the furnace or the number of laminated layers is large.
The binder removal is performed by introducing 2 + H 2 gas and discharging the binder component volatilized by the ventilation.
【０００４】この場合、揮発したバインダ成分が炉内天
井部分に付着、結露し、ついには液滴となって落下する
現象が発生するようになる。この結果、この液滴は被処
理物の表面に落下することになり、次いで最高温度領域
ではガス化するものの、そのガス化跡が着色跡となって
残るので、品質不良の原因となった。In this case, the volatilized binder component adheres to the ceiling portion in the furnace to form dew, and eventually drops into droplets. As a result, the droplets drop onto the surface of the object to be treated, and then gasify in the maximum temperature region, but the gasification traces remain as colored traces, which is a cause of poor quality.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、上記の問題
点を解決するためになされたものであり、前記したよう
なバインダ成分を含むセラミックグリーンシートを積層
したセラミック積層部材を熱処理する際に発生したバイ
ンダ滴下不良を解消することができる連続式熱処理炉を
提供する。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and when heat-treating a ceramic laminated member obtained by laminating ceramic green sheets containing a binder component as described above. Provided is a continuous heat treatment furnace capable of eliminating a binder deficiency that has occurred.
【０００６】[0006]
【課題を解決するための手段】上記の問題は、バインダ
成分を含む被焼成物を連続的に熱処理する熱処理炉であ
って、炉内において、複数のガス孔を長さ方向に透設し
た排気パイプと同じく給気パイプとを対向させて配設
し、給気パイプから炉内ガスを供給し排気パイプから吸
引するようにしたことを特徴とする本発明の連続式熱処
理炉によって、解決することができる。The above problem is a heat treatment furnace for continuously heat-treating a material to be fired containing a binder component, and an exhaust gas in which a plurality of gas holes are provided in a longitudinal direction in the furnace. A continuous heat treatment furnace of the present invention is characterized in that a pipe and an air supply pipe are arranged so as to face each other, and a gas in the furnace is supplied from the air supply pipe and sucked from an exhaust pipe. You can
【０００７】そして、本発明は第１実施形態である、前
記給気パイプと排気パイプとを、炉内において被焼成物
の上方に、炉幅方向に配設し、被焼成物の上方空間に一
方向のガス流を形成可能とした前記の連続式熱処理炉と
して具体化される。この場合、前記給気パイプと排気パ
イプのうち、少なくとも一方のパイプの下方に結露滴下
物の捕集手段を設けるのが好ましい。The present invention is the first embodiment. The air supply pipe and the exhaust pipe are arranged in the furnace in the width direction of the furnace, above the article to be fired, and in the space above the article to be fired. It is embodied as the continuous heat treatment furnace capable of forming a unidirectional gas flow. In this case, it is preferable to provide a means for collecting condensed dew drops below at least one of the air supply pipe and the exhaust pipe.
【０００８】また、本発明は第２実施形態である、前記
給気パイプと排気パイプとを、炉内の長さ方向の中間部
分で一方を上部に、他方を下部に、それぞれ炉幅方向に
配設し、下方から上方に、または上方から下方に流動す
るガス流からなるガスカーテンを設けて、このガスカー
テンの前方と後方との炉内雰囲気を異ならせるようにし
た形態の前記した連続式熱処理炉として具体化される。In the second embodiment of the present invention, one of the air supply pipe and the exhaust pipe is located at an intermediate portion in the lengthwise direction in the furnace, one is located at the upper part and the other is located at the lower part in the furnace width direction. A continuous type of the above-mentioned continuous type in which a gas curtain composed of a gas flow flowing from the lower side to the upper side or from the upper side to the lower side is provided, and the atmosphere inside the furnace is different between the front side and the rear side of the gas curtain. It is embodied as a heat treatment furnace.
【０００９】この場合、炉内の上方に配設された前記給
気パイプまたは排気パイプの下方に結露滴下物の捕集手
段を設けるのが好ましく、さらに前記ガスカーテンの前
後には、そのガスカーテンを挟むように天井から被処理
物近傍まで垂下する隔壁を配設するのがよい。また、前
記ガスカーテンの上部近傍および下部近傍の少なくとも
一方にガス流を加熱するためのヒータを設けるのがよ
い。さらに、本発明では、前記給気パイプと排気パイプ
のうち少なくとも排気パイプ、あるいは前記隔壁をセラ
ミック製の材料で形成するのがよく、特にＳｉＣ系耐火
物、そのうちでもＳｉ−ＳｉＣを主成分とした耐火物と
するのが好適である。In this case, it is preferable that a means for collecting condensed dewdrops is provided below the air supply pipe or the exhaust pipe arranged above the furnace, and the gas curtain is provided before and after the gas curtain. It is preferable to dispose a partition wall that hangs from the ceiling to the vicinity of the object to be processed so as to sandwich it. Further, it is preferable to provide a heater for heating the gas flow in at least one of the upper portion and the lower portion of the gas curtain. Further, in the present invention, at least the exhaust pipe among the air supply pipe and the exhaust pipe, or the partition wall is preferably formed of a ceramic material, and particularly, a SiC refractory, of which Si-SiC is the main component. A refractory material is preferable.
【００１０】[0010]
【発明の実施の形態】次に、本発明の連続式熱処理炉に
係る実施形態について、図１、２を参照しながら説明す
る。
（第１実施形態）本発明の連続式熱処理炉は、従来から
知られているローラーハース方式あるいはプッシャーキ
ルン方式などの被加熱物を連続式に移動させ加熱する形
式の連続式熱処理炉、特に、バインダ成分を含むセラミ
ックグリーンシートを積層したセラミック積層部材を熱
処理する連続式熱処理炉に適用される。図１では、ロー
ラーハース炉の場合を例示しており、多数の送りローラ
１１、１１を備えたローラーハース炉の天井部分、床部
分、右側炉壁部分などの記載を省略した略斜視図であ
り、被焼成物（図示せず）は、送りローラ１１上を整列
して移動するセッター１２に載置され、入口（図示せ
ず）から出口（図示せず）に向かって移動して所定のヒ
ートカーブの熱処理を受けるよう設定されている。BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of a continuous heat treatment furnace of the present invention will be described with reference to FIGS. (First Embodiment) A continuous heat treatment furnace of the present invention is a continuous heat treatment furnace of a conventionally known type in which a heated object such as a roller hearth method or a pusher kiln method is continuously moved and heated, It is applied to a continuous heat treatment furnace for heat-treating a ceramic laminated member in which ceramic green sheets containing a binder component are laminated. FIG. 1 illustrates the case of a roller hearth furnace, and is a schematic perspective view in which the description of the ceiling portion, the floor portion, the right furnace wall portion, etc. of the roller hearth furnace including a large number of feed rollers 11 is omitted. The object to be fired (not shown) is placed on the setter 12 that moves in line on the feed roller 11, moves from the inlet (not shown) toward the outlet (not shown), and has a predetermined heat. It is set to undergo the heat treatment of the curve.
【００１１】そして、本発明の特徴とするところは、例
えば、バインダ成分を含む被焼成物を連続的に熱処理す
る熱処理炉における、少なくともバインダの揮発温度域
である炉内において、排気パイプ３と給気パイプ２とを
対向させて配設し、給気パイプ２に透設した複数のガス
孔２ａ（図では、隠れている）から炉内ガスを供給し排
気パイプ３に透設した複数のガス孔３ａから吸引するよ
うにした点にある。このガス孔２ａ、３ａは、円孔、角
孔、スリットなど適宜に選択され得る。A feature of the present invention is that, for example, in a heat treatment furnace for continuously heat-treating an object to be fired containing a binder component, the exhaust pipe 3 and the exhaust pipe 3 are supplied in the furnace at least in the binder volatilization temperature range. A plurality of gas holes 2a (which are hidden in the figure) that are provided to face the air supply pipe 2 and that are provided in the air supply pipe 2 so that the in-furnace gas is supplied to the exhaust pipe 3. The point is that suction is performed from the hole 3a. The gas holes 2a and 3a can be appropriately selected from circular holes, square holes, slits and the like.
【００１２】図２の事例では、その給気パイプ２と排気
パイプ３との２組を前後させて、炉内において被焼成物
の上方の、被焼成物の移動に支障のない高さに、内炉内
を横断するように炉幅方向に配設し、被焼成物の上方空
間に給気パイプ２から排気パイプ３に向かう一方向のガ
ス流４を、被焼成物の移動方向に対向する方向に形成可
能としたものとして具体化している。In the case of FIG. 2, the two sets of the air supply pipe 2 and the exhaust pipe 3 are moved back and forth so that the height above the article to be fired in the furnace does not hinder the movement of the article to be fired. Arranged in the furnace width direction so as to traverse the inside of the inner furnace, a gas flow 4 in one direction from the air supply pipe 2 to the exhaust pipe 3 in the upper space of the object to be fired is opposed to the moving direction of the object to be fired. It is embodied as a material that can be formed in any direction.
【００１３】この実施形態によれば、給気パイプ２と排
気パイプ３とも炉内に露出しているので、温度むらがな
くバインダ成分の結露が防止できる。また、このガス流
４は、炉内空間を比較的整然と流れるので、部分的な滞
留もなくなるのから被焼成物の脱バインダも均一、円滑
に行われるうえ、炉なき壁内壁にバインダ成分が結露す
るのを防止できる利点が得られる。According to this embodiment, since both the air supply pipe 2 and the exhaust pipe 3 are exposed in the furnace, there is no temperature unevenness and the dew condensation of the binder component can be prevented. Moreover, since this gas flow 4 flows relatively regularly in the furnace space, partial retention is eliminated, so that the binder to be burned can be uniformly and smoothly removed, and the binder component is condensed on the inner wall of the furnace-less wall. There is an advantage that it can be prevented.
【００１４】なお、この場合、前記給気パイプ２と排気
パイプ３のうち、少なくとも一方のパイプの下方に結露
滴下物の捕集できる樋部材３１を設けて、結露した場合
のバインダ成分の滴下を完全に防止できるようにするの
もよい。In this case, a gutter member 31 capable of collecting condensed dew drops is provided below at least one of the air supply pipe 2 and the exhaust pipe 3 to drop the binder component when dew is condensed. It may be possible to prevent it completely.
【００１５】（第２実施形態）次ぎに、本発明は第２実
施形態を図２によって説明すると、前記のガス孔を有す
る給気パイプ５と排気パイプ６とを、炉内の長さ方向の
中間部分で下部と上部に垂直方向に、それぞれ炉幅方向
に配設し、下方から上方に流動するガス流からなるガス
カーテン７を設けて、このガスカーテン７の前方と後方
との炉内雰囲気を遮断し、必要に応じて、前後で異種の
雰囲気とすることができるようにしたものである。(Second Embodiment) Next, the second embodiment of the present invention will be described with reference to FIG. 2. The air supply pipe 5 and the exhaust pipe 6 having the gas holes are arranged in the lengthwise direction in the furnace. A gas curtain 7 composed of a gas flow flowing from the lower part to the upper part is provided vertically in the lower part and the upper part in the middle part, respectively, in the furnace width direction, and the atmosphere inside the furnace in front of and behind the gas curtain 7 is provided. Is shut off so that different atmospheres can be created before and after, if necessary.
【００１６】例えば、炉出口側（図２の右側）高温域で
は、被焼成物を酸化させないＮ2＋Ｈ2ガスの非酸化雰囲
気とし、一方、炉入口側（図２の左側）の２００℃以下
の乾燥域では、低コストの大気雰囲気とすることができ
る。この場合、ガスカーテン７は、下方から上方へ向か
う上方流だけでなく、上方から下方に流動する下方流と
することも可能である。また、ガスカーテン７は、１対
に限らず図示のごとく２対、あるいはそれ以上の数とす
ることができる。非酸化雰囲気を遮断する場合には、少
なくとも２対設けるのがよい。For example, in a high temperature region on the furnace outlet side (right side in FIG. 2), a non-oxidizing atmosphere of N 2 + H 2 gas that does not oxidize the material to be fired is set, while on the other hand, 200 ° C. or less on the furnace inlet side (left side in FIG. 2). In the dry area, the air atmosphere can be made at a low cost. In this case, the gas curtain 7 can be not only an upward flow from the lower side to the upper side but also a downward flow flowing from the upper side to the lower side. The number of gas curtains 7 is not limited to one, but may be two or more as shown. When shutting off the non-oxidizing atmosphere, it is preferable to provide at least two pairs.
【００１７】また、この実施形態でも、炉内の上方に配
設された前記排気パイプ６の下方に結露滴下物の捕集手
段として、先に説明したのと同様な樋部材（図示せず）
を設けるのが好ましく、さらに前記ガスカーテン７の前
後には、そのガスカーテン７を挟むように天井から被処
理物近傍まで垂下する隔壁８、８を配設すれば、ガスカ
ーテン７の遮断効果を高めることができる。また、前記
ガスカーテン７の上部近傍および下部近傍の少なくとも
一方にガス流を加熱するためのヒータ（図示せず）を設
けて、結露防止や被焼成物の温度低下を防止するのがよ
い。Also in this embodiment, a gutter member (not shown) similar to the one described above is used as a means for collecting the condensed dew drops below the exhaust pipe 6 arranged above the furnace.
It is preferable to provide a partition wall 8 disposed between the ceiling and the vicinity of the object to be processed so as to sandwich the gas curtain 7 in front of and behind the gas curtain 7. Can be increased. Further, a heater (not shown) for heating the gas flow is preferably provided in at least one of the upper part and the lower part of the gas curtain 7 to prevent dew condensation and prevent the temperature of the object to be burned from lowering.
【００１８】この実施形態によれば、第１実施形態の場
合に同じく給気パイプ２と排気パイプ３による温度むら
がなくバインダ成分の結露が防止できる。また、仮に結
露しても被焼成物に滴下するのを防止できる利点が得ら
れる。さらに、第１、第２実施形態において、前記給気
パイプと排気パイプのうち少なくとも排気パイプ３、６
や、天井から垂下させる前記隔壁８、または樋部材３１
など材質は、セラミック製がよく、特にＳｉＣ系耐火
物、そのうちでもＳｉ−ＳｉＣを主成分とした耐火物と
すれば、耐久性に優れるうえ、熱伝導がよいので炉内の
温度むらが生じにくいという利点も得られる。According to this embodiment, similarly to the case of the first embodiment, there is no temperature unevenness due to the air supply pipe 2 and the exhaust pipe 3, and dew condensation of the binder component can be prevented. Further, even if dew condensation occurs, there is an advantage that it can be prevented from dripping on the material to be fired. Further, in the first and second embodiments, at least the exhaust pipes 3 and 6 of the air supply pipe and the exhaust pipe are used.
Alternatively, the partition wall 8 that is hung from the ceiling or the gutter member 31.
The material is preferably made of ceramics, especially if it is made of SiC-based refractory, and if it is a refractory having Si-SiC as its main component, it has excellent durability and good thermal conductivity, so that uneven temperature in the furnace hardly occurs. There is also an advantage.
【００１９】[0019]
【発明の効果】本発明の連続式熱処理炉は、以上説明し
たように構成されているので、セラミック積層部材など
被焼成物の脱バインダを均一に行えるうえ、熱処理する
際に発生したバインダ再凝縮物の滴下不良を解消するこ
とが可能となる。また、炉内の雰囲気をガスカーテンで
区切って、非酸化雰囲気ガスの循環利用や低コストの大
気雰囲気の利用が可能となるなどという優れた効果があ
る。よって本発明は、従来の問題点を解消した連続式熱
処理炉として、技術的価値はきわめて大なるものがあ
る。Since the continuous heat treatment furnace of the present invention is constructed as described above, it is possible to uniformly remove the binder of the material to be fired such as the ceramic laminated member and to recondensate the binder generated during the heat treatment. It is possible to eliminate the defective product dropping. Further, there is an excellent effect that the atmosphere in the furnace is divided by the gas curtain, and the non-oxidizing atmosphere gas can be circulated and the low-cost atmosphere can be utilized. Therefore, the present invention has an extremely great technical value as a continuous heat treatment furnace which solves the conventional problems.
【図１】本発明の連続式熱処理炉を説明するための炉内
要部斜視略図。FIG. 1 is a schematic perspective view of a main part in a furnace for explaining a continuous heat treatment furnace of the present invention.
【図２】実施形態を説明するため要部を誇張した炉内縦
断面略図。FIG. 2 is a schematic vertical cross-sectional view of the interior of the furnace in which an essential part is exaggerated for explaining the embodiment.
１１ 送りローラ、１２ セッター、２ 給気パイプ、
２ａ ガス孔、３ 排気パイプ、３ａ ガス孔、３１
樋部材、４ ガス流、５ 給気パイプ、６ 排気パイ
プ、７ ガスカーテン。11 feed rollers, 12 setters, 2 air supply pipes,
2a gas hole, 3 exhaust pipe, 3a gas hole, 31
Gutter member, 4 gas flow, 5 air supply pipe, 6 exhaust pipe, 7 gas curtain.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 大西 雅也 愛知県名古屋市瑞穂区須田町２番56号 エ ヌジーケイ・キルンテック株式会社内 Ｆターム(参考） 4K050 AA04 BA07 CC07 CC10 4K063 AA06 AA12 AA15 BA04 CA01 CA03 DA13 DA15 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Masaya Onishi 2-56 Suda-cho, Mizuho-ku, Nagoya-shi, Aichi Nusy Kei Kirntech Co., Ltd. F-term (reference) 4K050 AA04 BA07 CC07 CC10 4K063 AA06 AA12 AA15 BA04 CA01 CA03 DA13 DA15
Claims (11)
熱処理する熱処理炉であって、炉内において、複数のガ
ス孔を長さ方向に透設した排気パイプと同じく給気パイ
プとを対向させて配設し、給気パイプから炉内ガスを供
給し排気パイプから吸引するようにしたことを特徴とす
る連続式熱処理炉。1. A heat treatment furnace for continuously heat-treating a material to be fired containing a binder component, wherein an exhaust pipe having a plurality of gas holes extending in the longitudinal direction faces an air supply pipe in the furnace. A continuous heat treatment furnace, characterized in that the furnace gas is supplied from an air supply pipe and sucked from an exhaust pipe.
おいて被焼成物の上方に、炉幅方向に配設し、被焼成物
の上方空間に一方向のガス流を形成可能とした請求項１
に記載の連続式熱処理炉。2. The air supply pipe and the exhaust pipe are arranged in the furnace in the furnace width direction above the article to be fired so that a unidirectional gas flow can be formed in the space above the article to be fired. Claim 1
The continuous heat treatment furnace described in.
くとも一方のパイプの下方に結露滴下物の捕集手段を設
けた請求項１または２に記載の連続式熱処理炉。3. The continuous heat treatment furnace according to claim 1, further comprising a means for collecting condensed dew drops below at least one of the air supply pipe and the exhaust pipe.
長さ方向の中間部分で一方を上部に、他方を下部に、そ
れぞれ炉幅方向に配設し、下方から上方に、または上方
から下方に流動するガス流からなるガスカーテンを設け
て、このガスカーテンの前方と後方との炉内雰囲気を異
ならせるようにした請求項１に記載の連続式熱処理炉。4. The air supply pipe and the exhaust pipe are arranged in the furnace width direction, one in the middle in the lengthwise direction in the furnace, the other in the upper part, and the other in the lower part. 2. The continuous heat treatment furnace according to claim 1, wherein a gas curtain composed of a gas flow flowing from the upper side to the lower side is provided so that the atmosphere inside the furnace is different between the front side and the rear side of the gas curtain.
たは排気パイプの下方に結露滴下物の捕集手段を設けた
請求項４に記載の連続式熱処理炉。5. The continuous heat treatment furnace according to claim 4, wherein a means for collecting the condensed dewdrops is provided below the air supply pipe or the exhaust pipe arranged above the furnace.
ーテンを挟むように天井から被処理物近傍まで垂下する
隔壁を配設した請求項４または５に記載の連続式熱処理
炉。6. The continuous heat treatment furnace according to claim 4, wherein partition walls are provided in front of and behind the gas curtain so as to sandwich the gas curtain from the ceiling to the vicinity of the object to be processed.
らなるものである請求項１〜６のいずれかに記載の連続
式熱処理炉。7. The continuous heat treatment furnace according to claim 1, wherein at least the exhaust pipe is made of ceramic.
請求項６に記載の連続式熱処理炉。8. The continuous heat treatment furnace according to claim 6, wherein the partition wall is made of ceramic.
求項７または８に記載の連続式熱処理炉。9. The continuous heat treatment furnace according to claim 7, wherein the ceramic is a SiC-based refractory material.
成分とした耐火物である請求項９に記載の連続式熱処理
炉。10. The continuous heat treatment furnace according to claim 9, wherein the SiC refractory material is a refractory material containing Si-SiC as a main component.
近傍の少なくとも一方にガス流を加熱するヒータを設け
た請求項４または５または６に記載の連続式熱処理炉。11. The continuous heat treatment furnace according to claim 4, wherein a heater for heating a gas flow is provided in at least one of an upper portion and a lower portion of the gas curtain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053465A JP2003254670A (en) | 2002-02-28 | 2002-02-28 | Continuous heat treating furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002053465A JP2003254670A (en) | 2002-02-28 | 2002-02-28 | Continuous heat treating furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003254670A true JP2003254670A (en) | 2003-09-10 |
Family
ID=28664890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002053465A Pending JP2003254670A (en) | 2002-02-28 | 2002-02-28 | Continuous heat treating furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003254670A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212029A (en) * | 2006-02-08 | 2007-08-23 | Koyo Thermo System Kk | Heat treatment device |
| CN105258500A (en) * | 2015-11-03 | 2016-01-20 | 佛山市顺德区奥利焙食品机械有限公司 | Hot-air circulating systems for fully-automatic fuel gas tunnel furnace and proportional controlling method of hot-air circulating systems |
| KR20180074127A (en) * | 2016-12-23 | 2018-07-03 | 주식회사 포스코 | Gasinlet method of furnace for secondary battery cathode and this apparatus |
-
2002
- 2002-02-28 JP JP2002053465A patent/JP2003254670A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007212029A (en) * | 2006-02-08 | 2007-08-23 | Koyo Thermo System Kk | Heat treatment device |
| CN105258500A (en) * | 2015-11-03 | 2016-01-20 | 佛山市顺德区奥利焙食品机械有限公司 | Hot-air circulating systems for fully-automatic fuel gas tunnel furnace and proportional controlling method of hot-air circulating systems |
| KR20180074127A (en) * | 2016-12-23 | 2018-07-03 | 주식회사 포스코 | Gasinlet method of furnace for secondary battery cathode and this apparatus |
| KR101901314B1 (en) * | 2016-12-23 | 2018-09-21 | 주식회사 포스코 | Gasinlet method of furnace for secondary battery cathode and this apparatus |
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