JP2003244979A - Actuator and actuator system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator and an actuator system applicable to a variable characteristic device such as a variable focus mirror, which can vary its focus along an arbitrary axis other than its center axis and also can form a plurality of focuses. <P>SOLUTION: A large number of linear actuators 7 are distributively arranged on the rear surface side of the reflective surface of a mirror and connected with the rear surface side. By controlling the driving of the linear actuators 7, the reflective surface is controlled as an active curved surface 5a to have an arbitrary shape, so that the focus position of the mirror and the number of focuses can be varied. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator and an actuator system, and more particularly, to a variable characteristic element capable of varying the transmission characteristics and reception characteristics of electromagnetic waves such as light waves and sound waves, for example, characteristics of a variable focus mirror. The present invention relates to an actuator and an actuator system suitable for being variable.

[0002]

2. Description of the Related Art Conventionally, as a variable characteristic element of this kind, for example, there is a variable focus mirror which is an optical element using Si semiconductor fine processing technology. As this varifocal mirror, for example, as shown in FIG. 21, an electrostatic force is applied between a very thin circular diaphragm 20 obtained by anisotropic etching on a single crystal Si substrate and a counter electrode 21. There is one that uses a concave surface that is sometimes formed as a mirror.
In this variable focus mirror, the focus 22 is changed by changing the curvature of the circular diaphragm 20 by the applied electrostatic force.

[0003]

The conventional variable focus mirror as described above deforms the entire surface of the circular diaphragm 20, and therefore the focal point 22 is located at the center axis (optical axis) of the mirror. It is not possible to vary the focal point along any axis that is different from the central axis 23 of the mirror, but only in that case, in such a case,
It is necessary to move the varifocal mirror to perform alignment, and it is necessary to separately provide a mechanism for that purpose.

Further, it was not possible to partially deform the diaphragm 22 to form a plurality of focal points at the same time.

As described above, in the conventional variable characteristic element, there is a limitation in changing the characteristic, and there is a drawback that the characteristic may not be easily changed.

The present invention has been made in view of the above points, and an object thereof is to provide an actuator and an actuator system suitable for easily changing the characteristics of a variable characteristic element or the like. .

[0007]

In order to achieve the above-mentioned object, the present invention is constructed as follows.

That is, the actuator of the present invention has a state in which a plurality of moving elements that can move in one direction, a stator that holds each of the moving elements in a fixed position, and a state in which the holding by the stator is released. Then, it comprises a carrier for holding each of the movers and carrying it along the one direction, and a piezoelectric element for displacing the carrier along the one direction by a stretching operation.

According to the present invention, since the moving element can be moved in the forward and reverse directions along one direction by utilizing the expansion or contraction operation of the piezoelectric element, the moving object is connected to the moving element and moved. By repeating the above, it is possible to drive an object to be driven with high accuracy and a sufficient movement distance, and it is possible to realize a small actuator using semiconductor manufacturing technology.

In one embodiment of the present invention, a plurality of movers movable along one direction, a stator having an electrode for attracting the movers, and an electrode for attracting the movers. And a carrier element that is displaceable along the one direction and a piezoelectric element that displaces the carrier element by an expansion / contraction operation, and the stator attracts and holds the mover at a fixed position by electrostatic attraction. The carrier is
In a state in which the suction holding by the stator is released, the moving element is sucked and conveyed along the one direction.

According to the present invention, the moving element can be moved in the forward and reverse directions along one direction by adsorbing and releasing the moving element by the carrier and the stator in accordance with the expansion and contraction operation of the piezoelectric element. Therefore, it is possible to drive the drive target with high accuracy and a sufficient movement distance by connecting the drive target to this mover and repeating the movement, and also to realize a small actuator using semiconductor manufacturing technology. it can.

In another embodiment of the present invention, a plurality of moving elements movable in one direction are arranged side by side in an array, and a single stator having an electrode for adsorbing the moving elements is provided. And a single carrier having an electrode for attracting the mover is arranged so as to face the mover, and the carrier is expanded and contracted along the one direction. A single piezoelectric element for displacing is provided side by side, the stator can individually attract and hold the plurality of moving elements at a fixed position by electrostatic attraction, and the carrier is released from the attraction and holding by the stator. In this state, the plurality of moving elements can be individually adsorbed and conveyed along the one direction.

According to the present invention, since a plurality of moving elements arranged side by side in an array are moved by a single stator, a carrier and a piezoelectric element, the stators corresponding to the respective moving elements,
The structure is simplified as compared with the case where the carrier element and the piezoelectric element are provided.

In still another embodiment of the present invention, an upper substrate and a lower substrate which are vertically stacked are provided, and the movable member movable in the horizontal direction with respect to the upper substrate is provided on the upper substrate. It is supported by a mover support structure via a support spring, the lower substrate is provided with the stator, and the carrier is supported by the carrier support structure via a support spring. The mover support structure, the carrier support structure, and the stator are mechanically connected.

According to the present invention, the mover can be moved in the horizontal direction with respect to the two substrates so that the two substrates are superposed on each other.

In a preferred embodiment of the present invention, there is provided a moving element movable along one direction, a stator having an electrode for adsorbing the moving element, and an electrode for adsorbing the moving element. At the same time, a carrier that is displaceable along the one direction and a piezoelectric element that displaces the carrier by an expansion / contraction operation are provided on one substrate, and the stator fixes the mover at a fixed position by electrostatic attraction. Is held by suction, and the carrier is adapted to suck and move the mover along the one direction in a state where the holding and holding by the stator is released, and the substrate is the substrate. The moving element movable in the vertical direction with respect to the moving element is supported by the moving element support structure via the support spring, and the carrier is supported by the carrier support structure via the supporting spring. Mechanical support structure It has been linked.

According to the present invention, the mover can be moved in the direction perpendicular to the substrate and can be integrated on one substrate.

The actuator system of the present invention comprises an actuator for driving the drive target surface and a control means for controlling the drive of the actuator, wherein the actuators are dispersedly arranged on the back surface side of the drive target surface and the back surface thereof is provided. A plurality of moving elements that are connected to the side and are movable along one direction, a stator that holds each of the moving elements in a fixed position, and a state in which the holding by the stator is released, A carrier that holds the mover and conveys the mover along the one direction; and a piezoelectric element that displaces the conveyer along the one direction by an expansion and contraction operation. By controlling the movement, the surface to be driven is used as an active curved surface to deform its shape.

According to the present invention, the movement of the plurality of movers connected to the back surface side of the drive target surface is controlled by the control means to deform the shape of the drive target surface as an active curved surface. A curved surface can be formed approximately. For example, by using an active curved surface as a transmitting surface or a receiving surface, it becomes possible to easily change the transmission characteristics and reception characteristics of electromagnetic waves.

In another embodiment of the present invention, an actuator for driving the drive target surface and a plurality of control means for controlling the drive of the actuator are provided, and the actuator is dispersed on the back surface side of the drive target surface. A plurality of moving elements that are arranged and connected to the back surface side and that can move in one direction, a stator that holds each of the moving elements in a fixed position, and holding by the stator are released. In a state, each of the control means has a carrier that holds each of the movers and carries the carrier along the one direction, and a piezoelectric element that displaces the carrier along the one direction by an expansion / contraction operation. In addition to performing information communication with other control means, the movement of the corresponding moving element is controlled to change the shape of the driven surface as an active curved surface.

According to the present invention, since each of the plurality of control means performs so-called autonomous decentralized control in which information is communicated with the other control means to control the movement of the corresponding mover, a single control means can be used. It is possible to reduce the number of wires and the amount of communication between the outside and the element as compared with the centralized control that controls all the movers.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic configuration diagram of an optical device 1 including an actuator system according to an embodiment of the present invention.

The optical device 1 comprises a light source 2, a beam expander 14, a beam splitter 3, and an actuator system 4 according to the present invention. The actuator system 4 is a variable characteristic element as will be described later. Which can change the position of the focal point 3 in three dimensions and can form a plurality of focal points by driving the varifocal mirror 5 as shown in FIG. Is.

FIG. 2 is an explanatory view showing the principle of shape control of the active curved surface 5a which is the reflecting surface of the variable focus mirror 5.

The varifocal mirror 5 is, for example, a flexible organic film such as silicon rubber formed with a metal film such as aluminum by vapor deposition or the like to form an active curved surface 5a which is a reflecting surface. 5a is virtually divided into a plurality of areas, for example, a rectangular area, and linear actuators 7 to be described later are arranged in an array in a two-dimensional direction on the back surface side of the active curved surface 5a at each vertex position of the rectangular area. It was set up.

One end of each linear actuator 7 is bonded to the apex position of the flexible organic film on the back surface side of the active curved surface 5a using an adhesive or the like, and this apex position is used as a control point 15 in FIG. As indicated by an arrow A in the partially enlarged view, the linear actuator 7 is displaced in a direction perpendicular to the active curved surface 5a before being deformed, thereby deforming the shape of the active curved surface 5a. As shown in FIG. 3, 7 is displaced downward by a required amount, so that the reflecting surface which is the active curved surface 5a can be deformed into a concave shape. The linear actuator 7 is manufactured in a precise and small size by using, for example, micromachine technology.

The rigidity of the flexible organic film may be controlled in order to deform the active curved surface 5a more smoothly. That is, control points 15 and 1 are formed on the back surface of the flexible organic film, for example, by forming a cut pattern.
The flexible organic film does not stretch (or droop) linearly between 5 and 5, but naturally becomes a curved surface (fitting)
You may do it.

Various methods can be considered for the virtual dividing method of the active curved surface 5a. For example, the square matrix pattern shown in FIGS. 4 (a) and 4 (b) or the honeycomb shown in FIG. 4 (c). There are patterns or concentric patterns.

Further, as shown in FIG. 5 (a), each vertex position of the diamond-shaped division pattern can be set as a control point 15, and this structure has a honeycomb structure as shown in FIG. 5 (b). It can also be understood as a configuration in which each vertex position of the pattern and the central position of each honeycomb are used as the control points 15.

In this way, the control points 1 connected to the linear actuator 7 and the virtual division of the active curved surface 5a are formed.
The position of 5 can also take various forms, but by providing a large number of control points 15 as finer virtual divided areas, the active curved surface 5a can be transformed into a smooth curved surface that is closer to the desired curved surface. .

Next, the structure of the linear actuator of this embodiment will be described with reference to FIG.

The linear actuator 7 includes a plurality of moving elements 8 arranged side by side in an array, conveying elements 9 arranged below the moving elements 8 to face the moving elements 8, and moving elements 8 of the moving elements 8. The stator 10 arranged to face downward and the carrier 9 displaced by the expansion / contraction operation along the arrow A direction P
It is provided with a laminated piezoelectric element 11 such as ZT and is manufactured in a small size and precisely using a semiconductor manufacturing technique.

In the following drawings, the mover 8 is shown as S, the carrier is shown as CS1, the stator is shown as CS2, and the laminated piezoelectric element is shown as PZT.

The end 8c of each moving element 8 on the side of the stator 10 is connected to the control point 15 of the active curved surface 5a and moves along the arrow A direction perpendicular to the active curved surface 5a. In the above-mentioned FIG. 2, the principle has been described assuming that the linear actuator 7 is connected to the control point 15 of the active curved surface 5a, but in this embodiment, specifically, each of the plurality of movers 8 of the linear actuator 7 is connected. Is connected to each control point 15.

As shown in FIG. 7, each of the plurality of moving elements 8 has an insulating layer 8a formed on the lower surface and a conductive layer 8b formed on the insulating layer 8a, which is perpendicular to the active curved surface 5a. It is supported by a support spring (not shown) so as to be movable in the A direction, for example, at two places on each of the left and right sides. One end 8c of the moving element 8 is connected to the back side of the active curved surface 5a, and the movement of the moving element 8 in the direction of the arrow A causes the active curved surface 5a to be deformed in a direction perpendicular to the active curved surface 5a. . The support spring restricts the movement of the mover 8 in a straight line direction and enables the return to the initial position. Also,
An active curved surface can also be used as a support spring for the moving element 8. As a result, the area occupied by the support springs in the actuator system can be reduced, and downsizing can be achieved.

The laminated piezoelectric element 11 has one end fixed and the other end connected to the carrier 9, and performs expansion and contraction in the direction of arrow A perpendicular to the active curved surface 5a. The carrier 9 has an attraction electrode 9a for attracting the mover 8 by electrostatic attraction on the upper surface facing the mover 8, and the mover 8 is attracted to the attraction electrode 9a. The mover 8 is conveyed in the direction of arrow A according to the displacement of the laminated piezoelectric element 11. The stator 10 has an attraction electrode 10a for attracting and holding the moving element 8 by electrostatic attraction on the upper surface facing the moving element 8, and is provided at a fixed position.

The driving of the linear actuator 7 is controlled by the control signal shown in FIG. The laminated piezoelectric element 11 repeats the expansion / contraction operation according to the control signal shown in FIG. Hereinafter, description will be made according to the moving direction of the moving element 8 connected to the active curved surface 5a.

(I) Move the moving element 8 in the forward direction (leftward in FIG. 7)
8B, a voltage for attracting the mover 8 is applied to the carrier (CS1) 9 in synchronization with the extension operation of the laminated piezoelectric element 11 as shown in FIG. 8B. On the other hand, the stator (CS2) 10 is set to 0 potential as shown in FIG. 8 (c) so as not to adsorb the mover 8, and the mover 8 is also set to 0 potential as shown in FIG. 8 (f). To be done.

As a result, the mover 8 moves as shown in FIG.
As shown in (b), the laminated piezoelectric element 11 is attracted to the carrier element 9 which is displaced in the positive direction by the expansion operation and is moved in the positive direction.

When the expansion operation of the laminated piezoelectric element 11 is completed, the carrier 9 is prevented from returning to its original position.
As shown in FIG. 8B, the voltage application is stopped to release the adsorption of the moving element 8, while the stator 10 is
As shown in (c), a voltage is applied so that the moving element 8 is attracted and fixed in synchronization with the reduction operation of the laminated piezoelectric element. As a result, the mover 8 is moved to the position shown in FIG.
As shown in (c) and (d), the carrier 9 is attracted and held by the stator 10, and the carrier 9 is displaced in the negative (reverse) direction by the contraction operation of the laminated piezoelectric element 11.

By repeating the above operation, the moving element 8 is sequentially moved in the positive direction each time the laminated piezoelectric element 11 is extended.

In this way, the movable element 8 can be displaced with high accuracy by the laminated piezoelectric element 11, and a sufficient movement distance can be secured by the repeated operation.

(Ii) Move the moving element 8 in the negative direction (to the right in FIG. 7).
In the case of moving the carrier 8, a voltage for attracting the mover 8 is applied to the carrier 9 in synchronization with the reduction operation of the laminated piezoelectric element 11 as shown in FIG. The child 10 is set to 0 potential as shown in FIG. 8E so as not to adsorb the moving element 8, and the moving element 8 is also set to 0 potential as shown in FIG. 8F. As a result, the mover 8
Is attracted to the carrier 9 that is displaced in the negative direction by the contraction operation of the laminated piezoelectric element 11, and moves in the negative direction.

When the contraction operation of the laminated piezoelectric element 11 is completed, the carrier 9 is moved so that the mover 8 does not return to its original position.
8 (d), the voltage application is stopped to release the adsorption of the moving element 8, while the stator 10 is
As shown in (e), a voltage is applied so as to attract and fix the moving element 8 in synchronization with the extension operation of the laminated piezoelectric element 11.

By repeating the above operation, the mover 8 is sequentially moved in the negative direction each time the laminated piezoelectric element 11 is contracted.

As shown in (i) and (ii), the electric potential of the moving element 8 is set to 0.
By this, the moving element 8 can be moved in the positive or negative direction. However, in this embodiment, as shown in FIG. The number of the piezoelectric elements 11 is one, but a plurality of moving elements 8 are provided, and for the moving elements 8 which are desired to be held in a fixed position among the plurality of moving elements 8, The voltage shown in FIG. 8 (g) or FIG. 8 (h) is applied.

That is, the carrier 9 and the stator 10 are
When the mover 8 is being moved in the forward direction, the same voltage as that applied to the carrier 9 is applied as shown in FIG. not,
It suffices if it is sucked and held by the stator 10 at the fixed position, and in the case where the carrier 9 and the stator 10 are performing the operation of moving the mover 8 in the negative direction,
As shown in (h), the same voltage as that applied to the carrier element 9 may be applied so that the carrier element 9 is not attracted but is attracted and held by the stator 10 at the fixed position.

By controlling the voltages applied to the carrier 9, the stator 10 and the mover 8 in this way, only the desired mover 8 of the plurality of movers 8 is individually moved in the positive or negative direction. The desired control point 15 of the active curved surface 5a can be displaced in the vertical direction to the active curved surface 5a by moving the corresponding moving element 8, whereby the active curved surface 5a can be moved. It can be transformed.

The control signal is a partially overlapped signal as shown in FIG. 10 so that the moving element 8 can be smoothly transferred to and from the carrier element 9 and the stator 10. Inside is a laminated piezoelectric element 1
The operation of 1 is stopped. Note that FIG.
8H corresponds to FIGS. 8A to 8H, respectively.

It should be noted that the control signal is transferred to the carrier 9 and the stators 9 and 10 of the mover 8 during the transfer period so that the expansion / contraction operation is stopped so that the transfer can be smoothly performed.
Preferably, the signals are partially overlapped, as shown in FIG. 10A to 10H are shown in FIG. 8A.
To (h), respectively.

In this embodiment, the mover 8 is set to 0 potential, and a voltage corresponding to the positive or negative direction is applied to the carrier 9 and the stator 10 to move the mover 8 in the positive or negative direction. However, as another embodiment of the present invention, as shown in FIGS. 11 and 12, the carrier 9 and the stator 10 are shown in FIGS. By applying a voltage corresponding to the positive direction as shown in FIG. 4 and setting the moving element 8 to 0 potential as shown in each of FIGS. (D) and (e), or by applying a voltage to the moving element 8, The mover 8 may be moved in the positive direction or the negative direction.

Linear actuator 7 for performing the above operation
In order to control the shape of the active curved surface 5a at a large number of control points 15, a plurality of are arranged in an array in a two-dimensional direction as shown in FIG.

In this embodiment, by using the Si semiconductor microfabrication technique, the area occupied by one moving element 8 on the active curved surface 5a is, for example, 1 mm ² or less,
The operating range of the mover 8 is determined by the design specifications of the support spring that supports the mover 8, and is, for example, 0.5 mm.
It is a degree. In addition, the accuracy of the laminated piezoelectric element 11 is 0.0.
It is 1 μm or less.

Next, the shape control of the active curved surface 5a by the linear actuator 7 as described above will be described with reference to FIG. 14 by taking a paraboloid (rotational quadric surface) as an example.

FIG. 7A shows a parabola formed by controlling the shape of the active curved surface, FIG. 8B shows a parabola in the xz plane, and FIG. 7C shows a control point 15 of the active curved surface.
It is a top view which shows the position of.

In FIG. 14, the xy plane corresponds to the active curved surface 5a which is the reflecting surface in the undeformed state, and the z axis corresponds to the direction perpendicular to the active curved surface 5a.

In this example, x, at the position of the focus 6 of the paraboloid,
The y, z coordinates are (0, 0, f), and the x, y coordinates of the central control point 15, that is, the normal line passing through the focal point 6 is xy.
The x and y coordinates of the point intersecting the plane are approximately the center position (0,0) of the active curved surface 5a. This paraboloid is indicated by a parabola z = 4f · x ² for the xz plane and z = 4f · y ² for the yz plane.

For each of the peripheral control points 15 which are sequentially separated from each other by the distance d from the central control point 15, the Z coordinate is determined according to the parabolic equation Z = 4fD ² according to the distance D from the central control point 15. It That is, as shown in (b) and (c) of the figure, when the central control point 15 to which "0" is attached is determined, "2" and "3", which are separated from each other by a distance d.
The displacement amount of each control point 15 marked with "4" or the like is determined. Therefore, by moving the mover 8 corresponding to each control point 15 in the positive direction by the determined displacement amount, the active curved surface 5a can be deformed by approximating a parabolic surface.

Note that FIG. 14C shows an example in which the active curved surface 5a is virtually divided into honeycomb patterns, and the vertex positions and the centers of the honeycombs are used as the control points 15.

In this example, the focal point 6 is located on the z-axis at the center of the active curved surface 5a, but it may be located off the z-axis as shown in FIG. 15 (a). The active curved surface 5a may be deformed so as to form a plurality of focal points 6 as shown in FIG. In this embodiment, the focal point 6 can be located at any three-dimensional position.

The active curved surface 5a of the present invention is not limited to a parabolic surface, but it is needless to say that it can be deformed to approximate a hemispherical surface or other various curved surfaces.

FIG. 16 is a schematic configuration diagram of the actuator system 4 of this embodiment. The actuator system 4 is arranged in a two-dimensional array on the back surface side of the active curved surface 5a which is the reflecting surface of the varifocal mirror 5. And a plurality of linear actuators 7 arranged in the CPU, and a CPU as a control means for controlling the above-mentioned laminated piezoelectric element 11, the carrier 9, the stator 10 and the mover 8 of the linear actuator 7.
12 and 12.

Addresses are assigned in advance to the respective control points of the active curved surface 5a, and when the focus position is input from the input means (not shown), the CPU 12 determines the central control point so as to reach the focus position. In addition, the displacement amount of each control point is calculated as described above and the movement control of the corresponding moving element 8 of the linear actuator 7 is performed by the address circuit 1.
6 and 17, the active curved surface 5a is approximated to a desired curved surface and deformed. That is, it is a centralized control in which all the linear actuators 7 are controlled by a single CPU 12.

As another embodiment of the present invention, as shown in FIG. 17, the CPU 13 as the control means is made to correspond to each moving element 8 of the linear actuator 7, that is, each control point. A large number of CPUs are arranged in an array so that information can be communicated between the CPUs 13.
3 may be an autonomous decentralized control in which the moving elements 8 corresponding to the linear actuators 7 are individually controlled.

In this autonomous decentralized control system, for example, by giving the data of the focal length to the CPU 13 corresponding to the central control point, the CPU 13 corresponding to the central control point can control the adjacent CPU 13 from the central control point. Data of the distance and the focal length are given, and each adjacent CPU 13 calculates the displacement amount of the corresponding moving element 8 from the given information as described above to move the moving element 8. On the other hand, it provides data on the distance from the central control point and the focal length. In this way, by sequentially giving data of the distance from the central control point and the focal length to the CPU 13 around the central control point from the central control point, each CP
U13 is for calculating the displacement amount of the moving element 8 from the given data and moving the moving element 8.

According to this autonomous distributed control, each CPU 1
By integrating 3 on one substrate, it is possible to reduce the number of wires and the amount of communication between the outside and the element as compared with the centralized control. Each CPU 13 operates only the first received data as valid data.

In the above embodiment, the single CPU 12
Alternatively, a large number of CPUs 13 individually corresponding to respective control points
Although the linear actuator 7 is controlled by means of the above, as another embodiment of the present invention, a CPU may be provided for each of a plurality of control points, and each CPU may control a plurality of control points.

Next, a more detailed structure of the linear actuator 7 of this embodiment is shown in FIG. The same figure (a)
Is a plan view of an upper structure, FIG. 7B is a plan view of a lower structure thereunder, FIG. 7C is a side view, and is a view corresponding to FIG. 7 described above. .

The moving board 8 of the upper board is constructed by stacking the upper board of the array of moving elements 8 which moves horizontally on the board on the lower board of the driving structure such as the stator 10 and the carrier 9. Is supported by the moving element support structure 30 by the support spring 31, the carrier 9 of the lower substrate is supported by the carrier support structure 32 by the support spring 33, and the laminated piezoelectric element 11 is laminated. The piezoelectric element fixing base 34 is fixed. Moving element support structure 30, carrier element support structure 3
2, the stator 10 and the laminated piezoelectric element 11 are electrically insulated but mechanically connected.

FIG. 19 is a configuration diagram of a linear actuator of another embodiment of the present invention, FIG. 19 (a) is a plan view, and FIGS. 19 (b) and 19 (c) are side views. In the above-described embodiment, the mover 8 is configured to move in the horizontal direction on the substrate, whereas in this embodiment, the mover 8 is moved in the direction perpendicular to the substrate.

The mover 8 is supported by the mover support base structure 30 by the support springs 31, and the carrier 9 is supported by the carrier mover support base structure 32 by the support springs 33. The expansion / contraction motion of is transmitted to the carrier 9 via the motion transmission plate 35. The mover support base structure 30, the carrier support base structure 32, the stator 10 and the laminated piezoelectric element 11 are electrically insulated but mechanically connected.

In this actuator, unlike the horizontal type, the moving element structure and the driving structure can be integrated on one substrate. The moving direction of the mover is the substrate vertical direction (thickness direction).

FIG. 20 shows an example of the array structure of the linear actuator of FIG. In FIG. 20, elements are arranged in an 8 × 8 array, and a large number of such actuators can be integrated on a single substrate, and the elements are arranged in a two-dimensional array. So you don't need to stack like horizontal type.

The carrier 9 is connected to the common laminated piezoelectric element 11 via the motion transmitting plate 35, and
The stator 10 is also branched so that its tip individually corresponds to each of the movers 8, but is also common to the root, and has a single carrier 9, a single stator 10 and a single stator 10. A large number of moving elements 8 are moved by one laminated piezoelectric element 11.

As described above, the variable focus mirror 5 using the actuator system of the present invention can form a focus at any three-dimensional position by controlling the shape of the active curved surface 5a. Also, multiple focal points can be formed at the same time.

Therefore, for example, it can be suitably used as a device for imaging a three-dimensional object with different depths of focus or for forming a plurality of focal points at the same time.

Also, it can be used as a device for adjusting the depth of focus of a reading optical system for both CD and DVD.

Further, it can be applied to laser manipulation using the radiation pressure exerted by light on a substance. In the laser manipulation, the fine particles can be attracted to the focus and the fine particles can be moved in a non-contact manner by moving the focus. By using the variable focus mirror of the present invention capable of forming a plurality of focus points at the same time, for example, two It is also possible to perform cell fusion by bringing two cells that are attracted to a focal point closer to each other.

The light propagating in the medium causes phase distortion due to the nonuniformity of the medium and the temporal fluctuation. However, the present invention is used as a phase modulation element using a separating mirror method or a deforming mirror method for correcting such phase distortion. A variable focus mirror using an actuator system can also be applied.

Further, as a development of the concept of this phase modulation element, the gap between the semi-transmissive mirror surface and the active curved surface (or the separation mirror array surface) which are arranged in parallel directly above the active curved surface (or the separation mirror array surface). Control at each control point. Electromagnetic waves of wavelength λ incident on the surface have a gap of λ / 4
When controlled to (integral multiple of), reflection does not occur. If two modes of reflection / non-reflection utilizing this property are realized, it is also possible to realize a display in which one control point corresponds to one pixel.

(Other Embodiments) The driving of the active curved surface is not limited to the actuator according to the present invention, but a contact type conventional laminated piezoelectric actuator or a selective drive type shape memory whose shape is changed by partial heating control. Alloy film,
Alternatively, a non-contact electromagnetic actuator or electrostatic actuator may be used.

The actuator system of the present invention can be used not only for light waves but also for electromagnetic waves such as sound waves,
It can also be used for a reflector for passive (indirect) transmission, a speaker having a horn as an active curved surface or an antenna having an active curved surface as a receiving surface, a sound collecting structure for a telephoto boundary or a sound collecting microphone.

Furthermore, by utilizing one moving element as the piston of the pump, it can be applied to the ejection mechanism of the ink jet printer head section.

[0085]

As described above, according to the actuator of the present invention, the moving element can be moved in the forward and reverse directions along one direction by utilizing the expansion or contraction operation of the piezoelectric element. By connecting the drive target to the child, the drive target can be driven with high accuracy and sufficient movement secured, and a small actuator can be realized using semiconductor manufacturing technology.

According to the actuator system of the present invention, the movement of the plurality of movers connected to the rear surface side of the drive target surface is controlled by the control means to deform the shape of the drive target surface as an active curved surface. Therefore, a desired curved surface can be formed approximately, and, for example, the transmission characteristics and reception characteristics of electromagnetic waves can be easily changed, and the present invention can be used in various applications for transmitting and receiving electromagnetic waves.

In particular, each of the plurality of control means performs information communication with the other control means to control the movement of the corresponding moving element,
By performing so-called autonomous decentralized control, it is possible to reduce the number of wires and the amount of communication between the outside and the element as compared with centralized control.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an optical device according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing the principle of shape control of the active curved surface of FIG.

FIG. 3 is a diagram showing a state in which an active curved surface is deformed into a concave shape.

FIG. 4 is a diagram showing a pattern of virtual division of an active curved surface.

FIG. 5 is a diagram showing another virtual division pattern and control points of the active curved surface.

FIG. 6 is a schematic configuration diagram of a linear actuator.

FIG. 7 is a side view of a linear actuator.

FIG. 8 is a waveform diagram of a control signal of a linear actuator.

FIG. 9 is an operation explanatory diagram of the linear actuator.

FIG. 10 is a waveform diagram of a practical control signal of the linear actuator.

FIG. 11 is a waveform diagram corresponding to FIG. 8 of another embodiment of the present invention.

FIG. 12 is a waveform diagram corresponding to FIG. 10 of another embodiment of the present invention.

FIG. 13 is a diagram showing an arrangement state of linear actuators.

FIG. 14 is an explanatory diagram in the case of controlling the shape of an active curved surface into a parabolic surface.

FIG. 15 is a diagram showing an example of another shape control of the active curved surface.

FIG. 16 is a schematic configuration diagram of an actuator system of the present invention.

FIG. 17 is a schematic configuration diagram of an actuator system according to another embodiment of the present invention.

FIG. 18 is a configuration diagram of a linear actuator of the present invention.

FIG. 19 is a configuration diagram of a linear actuator according to another embodiment of the present invention.

20 is a diagram showing an array configuration of the linear actuator of FIG.

FIG. 21 is a diagram showing a conventional example.

[Explanation of symbols]

4 Actuator system 5 Variable focus mirror 5a Active curved surface 7 Linear actuator 8 movers 9 Carrier 10 Stator 11 Multilayer piezoelectric element 12, 13 CPU 15 control points

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H041 AA12 AB14 AB38 AC06 AC08                       AZ05 AZ08                 2H042 DD01 DD11 DD13 DE00                 5H680 BB02 BB13 BB19 BB20 DD01                       DD12 DD23 DD34 DD65 DD73                       DD83 FF33 FF38 GG02

Claims (7)

[Claims] 1. A plurality of movers that can move in one direction, a stator that holds each mover in a fixed position, and each mover in a state in which holding by the stator is released. An actuator comprising: a carrier that holds the carrier and conveys the carrier along the one direction; and a piezoelectric element that displaces the carrier along the one direction by a stretching operation. 2. A plurality of movers movable along one direction, a stator having an electrode for attracting the mover, an electrode for attracting the mover, and the one direction. And a piezoelectric element that displaces the carrier by expansion and contraction operation, the stator holds the mover by suction at a fixed position by electrostatic attraction, and the carrier is An actuator, wherein the moving element is sucked and conveyed along the one direction in a state in which the suction holding by the stator is released. 3. A single stator having an electrode for adsorbing the mover and a plurality of movers that can move in one direction are arranged side by side, and the mover is adsorbed. A single carrier having electrodes is disposed so as to face the mover, and the carrier has a single piezoelectric element that displaces the carrier along the one direction by expansion and contraction. Side by side, the stator is capable of adsorbing and holding the plurality of movers individually at a fixed position by electrostatic attraction, and the carrier is the plurality of movers in a state in which the suction and hold by the stator is released. An actuator which is capable of adsorbing each of the moving elements individually and transporting the moving elements along the one direction. 4. The actuator according to claim 3, further comprising: an upper substrate and a lower substrate that are vertically stacked, the upper substrate being provided with the movable element that is movable in a horizontal direction with respect to the upper substrate. Is supported by a mover support structure via a support spring, and the lower substrate is provided with the stator,
The carrier is supported by a carrier support base structure via a support spring, and the mover support base structure, the carrier support base structure, and the stator are mechanically connected. Actuator. 5. A mover movable along one direction, a stator having an electrode for attracting the mover, an electrode for attracting the mover, and And a piezoelectric element that displaces the carrier by expansion and contraction operation are provided on a single substrate, and the stator holds the mover at a fixed position by electrostatic attraction, and transfers the carrier. The child sucks the moving element and conveys the moving element along the one direction in a state where the suction holding by the stator is released, and the child moves in a direction perpendicular to the substrate. The possible mover is supported by the mover support structure via a support spring, and the carrier is supported by the carrier support structure via a support spring, and the both support structures are mechanical. Is connected to Quutator. 6. An actuator for driving a surface to be driven, and a control means for controlling driving of the actuator, wherein the actuators are dispersedly arranged on the back surface side of the driving target surface and connected to the back surface side. At the same time, a plurality of moving elements that can move in one direction, a stator that holds each of the moving elements in a fixed position, and a state in which each of the moving elements is held in a state where the holding by the stator is released. And a piezoelectric element that displaces the carrier along the one direction by an expansion / contraction operation, and the controller controls the movement of each of the movers. An actuator system, wherein the surface to be driven is an active curved surface to deform its shape. 7. An actuator for driving a drive target surface, and a plurality of control means for controlling the drive of the actuator, wherein the actuators are dispersedly arranged on the back surface side of the drive target surface and connected to the back surface side. In addition, a plurality of movers that can move along one direction, a stator that holds each of the movers in a fixed position, and a state where holding by the stator is released, And a piezoelectric element that holds and conveys the carrier along the one direction, and a piezoelectric element that displaces the conveyer along the one direction by an expansion and contraction operation, and each control unit communicates with another control unit. In addition, the actuator system is characterized in that the movement of the corresponding moving element is controlled and the surface to be driven is used as an active curved surface to deform its shape.