JP2003238121A - Apparatus for producing high-pressure nitrogen - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To produce a high-pressure nitrogen gas from air by using a simple combination of devices. <P>SOLUTION: The apparatus for producing the high-pressure nitrogen gas is equipped with a nitrogen separating means 2 which separates a low-pressure nitrogen gas from air by a membrane separation, a pressurizing means 3 to obtain the high-pressure nitrogen gas by pressurizing the low-pressure nitrogen obtained by the nitrogen separating means 2 using a reciprocal pressurizing cylinder 7, a liquid supplying means 4 which supplies a driving liquid to the pressurizing cylinder 7, a changeover means 5 to change the supply of the liquid from the liquid supplying means 4 to the pressurizing cylinder 7 and the return of the liquid from the pressurizing cylinder 7 to the liquid supplying means 4, a first check valve 10 which checks a backward flow of the high-pressure nitrogen from the pressurizing means 3 to the nitrogen separating means 2, and a second check valve 11 which checks a backward flow of the high-pressure nitrogen from load facilities to the pressurizing means 3. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing high-pressure nitrogen, and more particularly to an apparatus for producing high-pressure nitrogen from air with high efficiency with a simple structure.

[0002]

2. Description of the Related Art Generally, nitrogen gas (hereinafter simply referred to as "nitrogen") is used in a wide variety of fields such as carrier gas for chemical equipment, atmosphere gas for metal heat treatment, storage gas for fruits and vegetables, and explosion-proof / rust-proof gas. There is. When a large amount of high-purity nitrogen is used, a cryogenic separation method, 300 to 500 Nm3 /
In the case of the range of h, the PSA method (adsorption method) is often used. However, when using a small amount of less than that, it is common to purchase and use a commercially available high-pressure nitrogen cylinder.

All of the above methods are characterized in that high-purity nitrogen can be obtained. However, if the load equipment does not require nitrogen of such high purity, such as for explosion protection, nitrogen can be obtained using a separation membrane device that separates nitrogen from the air using a nitrogen separation membrane. The separation membrane device has an advantage that it is substantially maintenance-free and easy to operate because the device is smaller than other methods and the whole system is simple. However, the nitrogen obtained by such a device is at a low pressure level, and is not suitable when a certain high pressure is required, for example, when supplying it to a load facility through a long piping path. Therefore, it is often the case that a commercially available nitrogen cylinder filled with high-pressure nitrogen is purchased and used.

[0004]

However, when a commercially available nitrogen cylinder is purchased and used, there are the following problems. (1) In a facility that uses a large amount of nitrogen, it is necessary to purchase and store a large amount of nitrogen cylinders, which requires a large storage space. (2) It takes some time to purchase and replace a nitrogen cylinder, and it is not possible to respond in an emergency. (3) Nitrogen cylinders may not be available for a long period of time when they are installed in places where transportation is difficult. Therefore, an object of the present invention is to solve the problem associated with the purchase of such a high-pressure cylinder, and an object thereof is to provide an apparatus capable of producing high-pressure nitrogen with high efficiency with a simple configuration.

[0005]

The present invention for solving the above-mentioned problems is a high-pressure nitrogen production apparatus for producing high-pressure nitrogen from air. The present apparatus is provided with a nitrogen separating means for separating low-pressure nitrogen from the air, a boosting means for boosting the low-pressure nitrogen obtained by the nitrogen separating means by a boosting cylinder for reciprocating to obtain high-pressure nitrogen, and a boosting cylinder. Fluid supply means for supplying a driving fluid, switching means for switching between fluid supply means and fluid return to the boost cylinder and fluid return from the boost cylinder to the fluid supply means, and high pressure nitrogen from the boost means to the nitrogen separation means And a second check valve for preventing a backflow from the load equipment to the pressurizing means (claim 1).

In the above apparatus, a separation membrane device configured to separate nitrogen from air by a nitrogen separation membrane can be used as the nitrogen separation means (claim 2).

In any one of the above devices, the boost cylinder has a cylinder body and a piston reciprocally movable in the cylinder body, and a pipe from the switching means is connected to the primary side of the piston. First check valve and second on the secondary side
It is possible to connect a pipe line between the check valves and to form a sealing means in the gap between the cylinder body and the piston to prevent mixing between nitrogen and fluid (claim 3).

In any of the above devices, a fluid pressure detector for detecting the fluid pressure from the fluid supply means and a controller are provided, and the controller detects the fluid pressure detected by the fluid pressure detector. It is possible to control the switching means so that the fluid is supplied to the pressure increasing cylinder until the pressure reaches a predetermined value, and when the preset value is reached, the fluid supplied to the pressure increasing cylinder is returned to the fluid supply means (claim 4). .

In any one of the above devices, a manual operation means for manually switching the switching means can be provided (Claim 5).

In any one of the above-mentioned devices, the control device uses the fluid supplied to the pressure-increasing cylinder when the pressure of the high-pressure nitrogen obtained by the pressure-increasing means, or any of the pressure and the temperature rises to a critical region. The switching means can be controlled to return to the supply means (claim 6).

In any one of the above devices, it is possible to provide a filling means for filling the high-pressure nitrogen obtained by the pressure increasing means into one or a plurality of nitrogen cylinders (claim 7).

In any of the above devices, the high-pressure nitrogen manufacturing device can be housed in a movable device carriage (claim 8).

In any of the above devices, the filling means and one or more nitrogen cylinders can be housed in a filling carriage (claim 9).

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a process flow diagram showing an embodiment of a high-pressure nitrogen production apparatus according to the present invention. In the figure, 1 is an air supply means, 2 is a nitrogen separation means, 3 is a pressure increasing means, 4 is a fluid supplying means, 5 is a switching means, 6 is a control device, 7 is a pressure increasing cylinder, 8 is a cylinder body, 9 is a piston, 10 is a first check valve, 11 is a second check valve, 12 and 13 are safety valves, 14 and 15 and 16 are release valves, 17 and 18 are filters, 19 is a fluid pressure detector, and 20 is high pressure nitrogen. Pressure detector, 2
Reference numeral 1 is a high-pressure nitrogen temperature detector, and a to h are pipelines such as piping.

The air supply means 1 is an air compressor which supplies low-pressure level air suitable for the nitrogen separation means 2, and the nitrogen separation means 2 is a separation membrane device using a nitrogen separation membrane.
As the separation membrane installed in the separation membrane device, a separation membrane module formed by bundling a large number of hollow fiber separation membranes for nitrogen separation is used, and such a separation membrane module is, for example, a model NM commercially available from Ube Industries. -C10A and the like.

A pipe 17 for connecting the air supply means 1 and the nitrogen separating means 2 is provided with a filter 17 for removing dust and oil mist in the air, and a pipe connecting the nitrogen separating means 2 and the boosting means 3. On the path b, a safety valve 13 that releases high-pressure nitrogen into the atmosphere should the high-pressure nitrogen flow backward from the pressure-up means 3.
Is provided.

The pressure increasing means 3 increases the pressure of the low pressure nitrogen supplied from the nitrogen separating means 2 by the operation of the pressure increasing cylinder 7, the first check valve 10 and the second check valve 11 to obtain high pressure nitrogen. is there. The pressurizing means 3 is provided with a high-pressure pipe c that is branched into three lines, and the first part is provided at the branch portion on the nitrogen separating means 2 side.
The check valve 10 is provided, the second check valve 11 is provided at the branch portion on the load side, and the safety valve 12 is provided at the branch portion on the boost cylinder 7 side. The safety valve 12 is opened when the pressure in the pipe line c reaches a preset dangerous upper limit pressure and releases high-pressure nitrogen into the atmosphere.

The boost cylinder 7 is a closed cylinder body 8.
The piston 9 is reciprocally movable in the cylinder body 8, and the high-pressure fluid supplied from the fluid supply means 4 drives the piston 9 to reciprocate to pressurize the nitrogen in the conduit c. Then, at a portion where the piston 9 is in contact with the inner peripheral surface of the cylinder body 8, sealing means (not shown) made of, for example, an O-ring is arranged. This sealing means is an important part for effectively preventing the mixing of the fluid on the primary side of the piston 9 and the nitrogen on the secondary side. For example, if the fluid on the primary side leaks to the secondary side, the fluid as impurities may be mixed in the high-pressure nitrogen, and the load equipment may be seriously damaged.
It can also cause a fire if the fluid is oil.

The fluid supply means 4 supplies a high pressure fluid for driving to the pressure increasing cylinder 7. The fluid may be a gas such as air or a liquid such as oil or water.
The fluid supply means 4 pressurizes the fluid into a high-pressure fluid by a compression mechanism such as a reciprocating piston. The high-pressure fluid is supplied to the switching means 5 via the pipe line e, and then supplied from the switching means 5 to the primary side of the piston 9 in the pressure increasing means 3 via the pipe line f. Also, the return fluid from the switching means 5 is recovered to the primary side of the compression mechanism by the conduit g or conduit h.

The switching means 5 automatically switches to each of the pipes by remote control from the control device 6, and a generally used multi-port type flow path switching valve can be used. it can. The multi-port type switching valve has a plurality of drive coils, and by driving any one of them, the pipelines e, f, g as shown in the figure are blocked, and the pipelines e, f, g It is possible to perform switching in three ways: a state in which h is in communication and a state in which pipelines e and f and f and g are in communication.

A fluid pressure detector 19 is provided in the conduit e on the discharge side of the fluid supply means 4. The fluid pressure detector 19 may be, for example, one having contacts that operate when the fluid pressure in the conduit e exceeds a preset upper limit pressure, and the detection signals of these contacts are transmitted to the control device 6.

A high pressure nitrogen pressure detector 20 is provided in the conduit c of the boosting means 3. As the high-pressure nitrogen pressure detector 20, a high-pressure nitrogen pressure detector 20 may be used which has a contact which is activated when the pressure of the high-pressure nitrogen in the conduit c rises to reach a dangerous area for some reason, and the detection signal of the contact is transmitted to the control device 6. To be done.

Further, a high pressure nitrogen temperature detector 21 is provided in the conduit c of the boosting means 3. High pressure nitrogen temperature detector 20
Can have a contact which is activated when the temperature of the high-pressure nitrogen in the conduit c rises to reach the dangerous area for some reason, and the detection signal of the contact is transmitted to the control device 6.

The control device 6 is composed of, for example, a microcomputer device. The microcomputer device includes a central control unit (CPU), a storage unit, an input / output unit, etc.
The CPU outputs a control signal to the switching unit 5 in accordance with an external signal input to the input / output unit according to a control program stored in the storage unit in advance.

In order to manually switch the switching means 5, the control device 6 may be provided with a manual operation means such as a changeover switch. With such a manual operation means, it is possible to confirm the operation at the time of device maintenance and finely adjust the target pressure of high-pressure nitrogen.

Next, a method for producing high pressure nitrogen by the above apparatus will be described. First, the air supply means 1 is activated to supply low pressure air to the nitrogen separation means 2 which is a membrane separation device. The low-pressure nitrogen separated from the air by the nitrogen separating means 2 is supplied to the pressurizing means 3. On the other hand, by activating the fluid supply means 4, the fluid pressure in the conduit e increases. At the time of start-up, the control means 6 brings the conduits e and f, and g and h into communication with each other.
Is controlled so that the fluid in the conduit e is supplied to the primary side of the piston 8 in the boosting cylinder 7 via the conduit f.

When the fluid is supplied to the primary side of the piston 9, the piston 9 moves upward in the drawing by the pressure in the cylinder body 8, so that the pressure in the pipe line c increases. When the pressure in the pipeline c becomes higher than the pressure in the pipeline b, the first check valve 1
0 closes and prevents high pressure nitrogen from flowing back into line b. As the piston 9 moves upward in the cylinder body 8, the nitrogen pressure in the pipe line c gradually increases, and its reaction force is transmitted to the primary side of the piston 9, whereby the fluid pressure in the pipe line e also gradually increases. To do. When the fluid pressure in the conduit e rises above a preset upper limit, the contact point of the fluid pressure detector 19 is activated, and the detection signal is transmitted to the control device 6.

Controller 6 which receives the detection signal of the fluid pressure upper limit
Controls the switching means 6 so that the pipelines e and h and the pipelines f and g communicate with each other. Then, the fluid on the primary side of the piston 9 in the pressurizing cylinder 7 returns through the conduits f to g and is recovered by the fluid supply means 4, so that the piston 9 is pushed by the nitrogen pressure on the secondary side and moves downward in the drawing. Moving. On the other hand, since the conduits e and h communicate with each other, the fluid in the conduit e is
Is collected by the fluid supply means 4 via the
The fluid pressure of is reduced.

When a time for the piston 9 to reach the lower limit of the cylinder body 8 elapses by the control of a timer or a counter (not shown), the control device 6 controls the switching means 5 so that the conduits e and f communicate with each other. As a result, the pressurizing cylinder 7 again moves upward in the drawing to pressurize the nitrogen in the conduit c.
Further, as a method of detecting that the piston 9 has reached the lower limit of the cylinder body 8, a sensor, a limit switch or the like may be used. Hereinafter, the above operation is repeated to continuously pressurize the low-pressure nitrogen supplied from the nitrogen separating means 2 to the pressurizing means 3, and continuously supply the high-pressure nitrogen to the load facility (not shown) from the pipe line d.

On the other hand, when the pressure of the high pressure nitrogen in the pipeline c rises to reach the dangerous area for some reason, the high pressure nitrogen pressure detector 20 is activated. Receiving the detection signal, the control device 6 controls the switching means 5 so that the conduits e and h communicate with each other and the conduits f and g communicate with each other. This prevents the line c and its associated equipment from being damaged by excessive pressure buildup.

Further, when the temperature of the high-pressure nitrogen in the pipeline c rises to a dangerous area for some reason, the high-pressure nitrogen temperature detector 21 is activated, and the control device 6 receiving the detection signal causes the pipeline e to operate. And h are communicated with each other, and the switching means 5 is controlled so that the conduits f and g are communicated with each other. This prevents the conduit c and its associated equipment from being damaged by an excessive temperature rise.

It should be noted that the above-mentioned protective means against the pressure increase of high-pressure nitrogen and the protective means against the temperature increase of high-pressure nitrogen in the pipeline c can be omitted in some cases, and only one of the protective means can be omitted. It can also be provided.

FIG. 2 is a process flow chart showing another embodiment of the high-pressure nitrogen manufacturing apparatus according to the present invention. 1 in the figure
Is an air supply means, 2 is a nitrogen separation means, 3 is a pressure increasing means, 4
Is a fluid supply means, 5 is a switching means, 6 is a control device, 7 is a boost cylinder, 8 is a cylinder body, 9 is a piston, 10 is a first check valve, 11 is a second check valve, 12, 13 Is a safety valve, 14, 15 and 16 are release valves, 17 and 18 are filters, 19 is a fluid pressure detector, 20 is a high pressure nitrogen pressure detector, 2
1 is a high-pressure nitrogen temperature detector, 22 is a filling means, 23 is a connecting means, 24 is a check valve, 25 is a pressure gauge, 26 is a nitrogen cylinder, and a to j are pipelines such as piping.

The embodiment of this embodiment is an example in which a high-pressure nitrogen production apparatus and a filling means 22 are connected, and the main body of the high-pressure nitrogen production apparatus is shown in FIG.
The configuration is similar to that of the embodiment shown in FIG. Therefore, redundant description will be omitted. In the present embodiment, the filling means 22 is connected to the output side of the high-pressure nitrogen obtained by the pressure increasing means 3 via the connecting means 23. The connecting means 23 has a flexible pipe and connecting portions provided on both sides thereof, and the connecting portion can be connected to and separated from the pipe line d on the pressure increasing means 3 side and the pipe line i on the filling means 22 side with one touch, respectively. It is said that.

The pipe line i of the filling means 22 in the present embodiment is branched into four branch pipe lines j, and the check valve 24, the pressure gauge 25, and the nitrogen cylinder 26 are detachably attached to each branch pipe line j with one touch. Possible connections are provided. Then, by connecting the nitrogen cylinders 26 to the respective connecting portions, it is possible to fill the nitrogen cylinders 26 with the high-pressure nitrogen supplied from the booster 3.

FIG. 3 is a front view showing an embodiment in which the high-pressure nitrogen production apparatus shown in FIG. 1 is housed in a movable device carriage 30 to form a mobile high-pressure nitrogen production apparatus, and FIG. 4 is a left side view of FIG. 5 and 5 are plan views of FIG.

A wheel device 31 for movement is attached to the bottom of the device carriage 30. Further, a pipeline connecting portion 32 communicating with the secondary side of the second check valve 11 (see FIG. 1) and a pipeline connecting portion communicating with the primary side of the first check valve 10 (see FIG. 1). 33
1 are respectively projected from the side surfaces of the apparatus carriage 30, the pipe line d to the load equipment shown in FIG. 1 is connected to the pipe line connection part 32, and the discharge pipe of the air supply means 1 shown in FIG. 1 is connected to the pipe line connection part 33. The road is connected.

FIG. 6 is a front view showing an embodiment in which the filling means 22 shown in FIG. 2 is accommodated in a movable filling trolley 40 to form a moving type filling device, and FIG. 7 is a left side view of FIG. 8 is a plan view of FIG. A wheel device 41 for movement is attached to the bottom of the filling cart 40. Further, the second check valve 11
(Refer to FIG. 2) Pipe line connecting portion 42 for connecting to the secondary side
, And a plurality of (four in this example) conduit connection portions 43 communicating with each branch conduit j (see FIG. 2) are projected from the side surface of the filling carriage 40. The pipe line connecting portion 43 is for preliminary connection, and is closed by a cap when not necessary.

[0039]

As described above, the high-pressure nitrogen producing apparatus according to the present invention comprises the nitrogen separating means for separating low-pressure nitrogen from the air and the boosting cylinder for reciprocating the low-pressure nitrogen obtained by the nitrogen separating means. By combining the pressurizing means for increasing the pressure to obtain high-pressure nitrogen, the high-pressure nitrogen can be efficiently produced with a simple device configuration.

In the above device, a separation membrane device configured to separate nitrogen from air by a nitrogen separation membrane can be used as the nitrogen separation means. By constructing the device with such a separation membrane device, further simplification, downsizing and high efficiency of the device can be achieved.

In any one of the above devices, the boost cylinder has a cylinder body and a piston reciprocally movable within the cylinder body, and a seal between nitrogen and fluid is provided in a gap between the cylinder body and the piston. Means can be formed. By providing such sealing means, it is possible to prevent the high-pressure nitrogen produced from being mixed with the fluid for driving the booster cylinder.

In any one of the above devices, a fluid supply means for supplying a fluid for driving the boost cylinder, a fluid pressure detector for detecting the fluid pressure from the fluid supply means, and a control device are provided, and the control device is a fluid The fluid is supplied to the boost cylinder until the fluid pressure detected by the pressure detector reaches a preset value, and when the preset pressure is reached, the fluid supplied to the boost cylinder is returned to the fluid supply means. The switching means can be controlled. With this configuration, the pressure of the nitrogen can be continuously and efficiently increased by the pressure increasing cylinder.

In any of the above devices, a manual operation means for manually switching the switching means can be provided. By providing such a manual operation means, it is possible to confirm the operation at the time of maintenance of the apparatus and finely adjust the target pressure of high-pressure nitrogen.

In any one of the above devices, the control device controls the fluid supplied to the pressurizing cylinder when the pressure of the high-pressure nitrogen obtained by the pressurizing means, or any one of the pressure and the temperature rises to a dangerous region. The switching means can be controlled to return to the fluid supply means. By providing such pressure protection means or temperature protection means,
The device can be operated safely.

In any of the above devices, a filling means for filling the high pressure nitrogen obtained by the pressurizing means into one or a plurality of nitrogen cylinders can be provided. By providing such a filling means, it is not necessary to purchase a commercially available nitrogen cylinder, and high-pressure nitrogen can be stably supplied to the load facility even in an emergency or in a place where transportation is difficult.

In any of the above-mentioned devices, the high-pressure nitrogen manufacturing device can be housed in a movable device carriage to form a mobile high-pressure nitrogen manufacturing device. By adopting such a mobile type, the apparatus can be moved to a place where high-pressure nitrogen is needed, where high-pressure nitrogen can be produced and supplied to load equipment.

In any of the above devices, the filling means and one or more nitrogen cylinders can be housed in a filling carriage. By making the filling means mobile as described above, it is possible to use them in a more efficient form in combination with the mobile high-pressure nitrogen production apparatus.

[Brief description of drawings]

FIG. 1 is a process flow diagram showing an embodiment of a high-pressure nitrogen manufacturing apparatus according to the present invention.

FIG. 2 is a process flow chart showing another embodiment of the high-pressure nitrogen manufacturing apparatus according to the present invention.

FIG. 3 is a front view showing an embodiment in which the high-pressure nitrogen manufacturing apparatus shown in FIG. 1 is housed in a movable device carriage 30 to form a mobile high-pressure nitrogen manufacturing apparatus.

FIG. 4 is a left side view of FIG.

5 is a plan view of FIG.

FIG. 6 is a front view showing an embodiment in which the filling means 22 shown in FIG. 2 is housed in a movable filling carriage 40 to form a movable filling device.

FIG. 7 is a left side view of FIG.

FIG. 8 is a plan view of FIG.

[Explanation of symbols]

1 Air supply means 2 Nitrogen separation means 3 boosting means 4 Fluid supply means 5 Switching means 6 control device 7 Booster cylinder 8 cylinder body 9 pistons 10 First check valve 11 Second check valve 12,13 Safety valve 14,15,16 Release valve 17,18 filter 19 Fluid pressure detector 20 High pressure nitrogen pressure detector 21 High pressure nitrogen temperature detector 22 Filling means 23 Connection means 24 Check valve 25 pressure gauge 26 Nitrogen cylinder 30 device trolley 31 wheel device 32,33 Pipe connection 40 filling cart 41 wheel device 42,43 Pipe connection a to j conduit

Continued front page    (72) Inventor Takeshi Kagawa             5-37 Kamata, Ota-ku, Tokyo             Runt Construction Co., Ltd. (72) Inventor Toshifumi Wakamatsu             5-37 Kamata, Ota-ku, Tokyo             Runt Construction Co., Ltd. (72) Inventor Hiroaki Kato             5-37 Kamata, Ota-ku, Tokyo             Runt Construction Co., Ltd. (72) Inventor Takehiko Ogasawara             2068-3 Ooka, Numazu City, Shizuoka Prefecture Toshiba Machine Co., Ltd.             In the company F-term (reference) 4D006 GA41 HA15 KA02 KB14 PA04                       PB17 PB63 PC11 PC38 PC80

Claims (9)

[Claims] 1. A high-pressure nitrogen production apparatus for producing high-pressure nitrogen from air, comprising: a nitrogen separating means 2 for separating low-pressure nitrogen from the air; and a boosting cylinder for reciprocally driving the low-pressure nitrogen obtained by the nitrogen separating means 2. Pressure increasing means 3 for increasing pressure by 7 to obtain high pressure nitrogen
And a fluid supply means 4 for supplying a driving fluid to the pressure increasing cylinder 7, and a switching means 5 for switching between fluid supply from the fluid supplying means 4 to the pressure increasing cylinder 7 and fluid return from the pressure increasing cylinder 7 to the fluid supplying means 4. And a first check valve 10 for preventing backflow of high-pressure nitrogen from the pressure increasing means 3 to the nitrogen separating means 2, and a second check valve 11 for preventing backflow from the load facility to the pressure increasing means 3. High-pressure nitrogen production equipment characterized by 2. The high-pressure nitrogen production apparatus according to claim 1, wherein the nitrogen separation means 2 is a separation membrane device configured to separate nitrogen from air by a nitrogen separation membrane. 3. The boost cylinder 7 has a cylinder body 8 and a piston 9 which can freely reciprocate in the cylinder body 8, and a conduit f from the switching means 5 is connected to the primary side of the piston 9. First check valve 10 and second check valve 1 on the secondary side
3. A pipe line c from between 1 is connected, and a sealing means for preventing mixing between nitrogen and fluid is formed in a gap between the cylinder body 8 and the piston 9, 3. High pressure nitrogen production equipment. 4. A fluid pressure detector 19 for detecting the fluid pressure from the fluid supply means 4 and a control device 6 are provided, and the control device 6 has a fluid pressure detection value by the fluid pressure detector 19 which is a preset value. Fluid is supplied to the pressurizing cylinder 7 until reaching a predetermined value, and the switching means 5 is controlled so that the fluid supplied to the pressurizing cylinder 7 is returned to the fluid supplying means 4 when the preset value is reached. Claims 1 to 3
The high-pressure nitrogen production device according to any one of 1. 5. A manual operation means for manually switching the switching means 5 is provided.
The high-pressure nitrogen production device according to any one of 1. 6. The control device 6 supplies the fluid supplied to the pressurizing cylinder 7 with the fluid supplied to the pressurizing cylinder 7 when either the pressure of the high-pressure nitrogen obtained by the pressurizing device 3 or the pressure and the temperature rise to a dangerous region. 6. The high-pressure nitrogen production apparatus according to claim 4 or 5, wherein the switching means 5 is controlled so as to return to the. 7. The filling means 22 for filling one or a plurality of nitrogen cylinders 26 with the high-pressure nitrogen obtained by the pressurizing means 3 is provided. High pressure nitrogen production equipment. 8. A high-pressure nitrogen production apparatus, characterized in that the high-pressure nitrogen production apparatus according to any one of claims 1 to 6 is housed in a movable device carriage 30. 9. Filling means 22 and 1 according to claim 7.
7. The high-pressure nitrogen manufacturing apparatus according to claim 1, wherein one or a plurality of nitrogen cylinders 26 are housed in a filling cart 40.