JP2003231095A - Micro substance fixing device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily fix a micro substance while suppressing damage, etc. <P>SOLUTION: This micro substance fixing device is provided with a prescribed- length body member 2 having its one end part 4 fixed to a substrate 1 to make it approximately parallel to the surface of the substrate on the substrate 1, and formed with a light receiving part 6 moving to a light focus position by receiving the condensed light in a part except for one end part 4 of the body member, and a deformation part 7 allowing the movement of the light receiving part 6, at least, in a part between the light receiving part 6 and one end part 4 out of the body member 2. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro object fixing device and method, and more particularly to a micro object fixing device and method for fixing the position of a micro object on a predetermined substrate.

[0002]

2. Description of the Related Art Conventionally, the following methods have been known as a method for manipulating a minute object having a size of micron order or less. As one of them, there is an optical tweezers technique that realizes an operation without directly touching an object (US Pat. No. 4,893,886). The optical tweezers technique operates an object by utilizing the force (optical trapping force) of capturing an object at the focal point of a light beam focused by a lens having a high NA value that represents the brightness of a condenser lens. It is a technology.

Here, the principle of the optical tweezers technique will be briefly described with reference to FIG. FIG. 8 is an explanatory diagram illustrating the principle of the optical tweezers technique. First, when a laser is focused using an objective lens and focused on cells or fine particles, which are minute objects, the laser refracts due to the difference in medium, and the momentum of light changes by a. The sum of these momentums is b (see FIG. 8A). At this time, since the particles try to conserve momentum, a force in the opposite direction to b is generated, and as a result, the particles are moved to the focal point (FIG. 8).
(See (b)).

In addition to the optical tweezers technique described above, as a method for manipulating a minute object, a technique is disclosed in which a fine tweezers-like structure is manufactured and an object is sandwiched between the structures. Has been done. For example, a technique of opening and closing two carbon nanotubes like tweezers (Japanese Unexamined Patent Publication No. 2001-252900), and a technique of similarly using a semiconductor fine wire crystal (Japanese Unexamined Patent Publication No. Hei 7-156082).
Etc. The former carbon nanotube tweezers
2 fixed on the tip of the probe of atomic force microscope (AFM)
A lead wire is connected to the carbon nanotubes of the book, and a voltage is applied between them to open and close like tweezers. In the latter method using a semiconductor thin wire crystal, the same operation is caused by bending a self-formed thin wire crystal by thermal expansion of a portion irradiated with light.

By using the above-mentioned technique, the position of a minute object can be fixed, and it is possible to easily perform a predetermined process and observe the object, which is convenient for the user. The property is improved.

[0006]

However, the above conventional example has the following inconveniences. First, the first problem with the optical tweezers technique is that the object must be continuously irradiated with a high-intensity laser in order to capture the object. In particular, when treating a sample in a liquid, continuous irradiation with a laser is indispensable because Brownian motion becomes more remarkable as the sample size becomes smaller. As a result, it is necessary to select the laser wavelength that matches the sample in order to prevent damage to the sample due to light absorption, and even if the optimum wavelength is selected, the laser will continue to be applied for a long time, resulting in damage to the sample. The problem arises. The second problem is that basically, in order to operate one object, one set of a laser optical system including a light source, a mirror for focus position control, and a lens must be used. In order to operate an object at the same time, it is necessary to form the same number of engineering systems as the object. Therefore,
There is a problem that a large-scale system is required and the device costs a lot.

The above-mentioned conventional mechanical tweezers also have various problems. First, in the case of carbon nanotube tweezers, since the diameter of the nanotube itself is as small as about 100 nm or less, there arises a problem that the step of adhering the nanotube to a support base such as an AFM short needle is very difficult. Further, since the semiconductor thin wire crystal is produced by self-forming, there arises a problem that it is difficult to control the position where the crystal is grown and the shape of the crystal.

Furthermore, there is a problem with the operating mechanism of each of the tweezers. First, in the carbon nanotube tweezers, the electrostatic force that acts between the nanotubes by applying a voltage and the deformation of the piezoelectric substance installed in the part that supports the nanotubes opens and closes the tweezers. There is a problem that the structure becomes complicated, such as the production of a different lead wire, the securement of electrical contact with the nanotube portion, and the production of a piezoelectric body. When used in an electrolyte, it is necessary to apply an insulating coating to the portion to which a voltage is applied, which further complicates the device itself. In the case of semiconductor fine-wire crystal tweezers, light is emitted to open and close the tweezers, and the tweezers are thermally expanded to open and close, so that the tweezers themselves are heated, so that a sample that is a minute object is heated. Occur. Therefore, depending on the sample that is not preferable to be heated, there is a problem that an appropriate subsequent treatment cannot be performed.

[0009]

An object of the present invention is to improve the inconvenience of the above-mentioned conventional example, and in particular, it is possible to easily fix an object to be fixed while suppressing damage to a minute object, which is convenient for the user. It is an object of the present invention to provide a minute object fixing device and method capable of improving the manufacturing cost, simplifying the configuration, and reducing the manufacturing cost.

[0010]

In view of the above, according to the present invention, a main body member, which is arranged substantially parallel to the surface of a predetermined substrate and has one end fixed on the substrate, has a predetermined length. The trapping force, that is, the force that moves the focused object to the focal position of the light by receiving the focused light, is deformed to capture the minute object between the main body member and the substrate. Then, the structure is adopted in which they are fixed (claims 1 and 2).

With such a configuration, the main body member is irradiated with the condensed light from the predetermined irradiation means, and the predetermined position of the main body member is moved so as to be separated from the substrate by the optical trapping force at the focal position of the condensed light. To do. Then, the main body member is deformed so as to be separated from the substrate by using the fixed one end as a fulcrum, but by positioning the minute object under the deformed main body member and returning the main body member to the original state, A minute object can be captured and fixed between the main body member and the substrate.

Further, according to the present invention, a main body member having a predetermined length is provided on the substrate, one end portion of which is fixed to the substrate and is substantially parallel to the surface on the substrate, and other than the one end portion of the main body member. A light receiving section that moves to the focal position of the light by receiving the collected light is formed at the position of, and the light receiving section is moved to at least a part of the main body member between the light receiving section and one end. Is adopted to form a deformable portion (claim 3).

With such a structure, when the light-receiving unit is focused and irradiated by the irradiation unit, the light-receiving unit moves to its focal position. At this time, the main body member is deformed in the vicinity of the deformed portion to enable the movement of the light receiving portion.
Then, the light receiving portion moves, and the other end side of the main body member moves in a direction in which it is separated from the substrate. After that, the position of the light receiving portion is moved by using the irradiation means so as to cover a part of the main body member from above the micro object so as to cover the micro object, and the micro object is captured by the main body member and the space between the substrate and the substrate. Can be fixed to.

By the way, when the minute object is moved between the main body member and the substrate by irradiating the condensed light and moving to the focal position of the light, the minute object can be easily fixed. Yes (claim 15). That is, the irradiation means for irradiating a minute object, which is provided separately from the irradiation means for irradiating the light-receiving portion with light, irradiates the condensed light on the minute object and moves the position of the minute object. Then, by moving the main body member so as to be separated from the substrate by the optical trapping force, by moving the minute object directly below the main body portion,
You can capture and fix minute objects with a simple operation,
The convenience of the user can be improved.

In the above case, it is desirable that the deformable portion formed on the main body member is formed of an elastic member (claim 4). As a result, when a part of the main body member is deformed to be separated from the substrate by the optical trapping force, the main body portion is elastically deformed. Therefore, when the light irradiation is interrupted and the light trapping force stops working, the restoring force of the elastic member returns the shape of the main body member to the initial state, and a part of the main body member separated from the substrate approaches the substrate. So that it will be moved automatically. Thereby, the minute object can be easily fixed between the substrate and the main body.

Further, it is desirable that the portion of the main body member formed of the elastic member is formed of a member that can be deformed in any direction (claim 5). As a result, the moving range near the other end of the main body member is widened, and a minute object can be easily captured and fixed.

Further, it is desirable that the light receiving portion is located between one end and the other end of the main body member (claim 6). This suppresses the formation of the light receiving portion at the other end, and the minute object can be fixed at the tip that is the other end, so that operability can be improved.

It is desirable that the main body member be formed with an acting portion for holding the micro object between the main body member and the substrate and fixing the position of the micro object (claim 7). Accordingly, since the minute object can be fixed by the action portion formed to fix the minute object, the minute object can be easily and surely fixed.

Further, it is desirable that the acting portion is located with a predetermined gap between the acting portion and the substrate (claim 8). Accordingly, since the action portion has a predetermined gap with the substrate in advance, it is possible to suppress a problem that a minute object fixed during such a period is sandwiched between the action portion and the substrate and crushed.

Further, it is desirable that a recessed portion which is recessed in a direction opposite to the substrate that allows a micro object is formed in a portion of the acting portion facing the substrate (claim 9), or a through hole that allows a micro object is formed. (Claim 10). As a result, when the minute object is fixed in the action portion, the minute object is positioned in the concave portion formed in the action portion or the hollow portion of the through hole, so that the minute object is reliably fixed and the minute object acts. It is possible to further suppress damage to the minute object, such as being crushed by the portion.

Further, in addition to the above structure, it is desirable to provide a protrusion projecting toward the substrate in the vicinity of the action portion of the main body member (claim 11). As a result, when the action part is moved in the direction away from the substrate and then moved by the optical trapping force or automatically toward the substrate by the elastic restoring force, the protrusion provided on the main body member By making contact with the substrate, it is possible to prevent the action portion from making contact with the substrate. Therefore, it is possible to prevent the minute object from being sandwiched between the acting portion and the substrate, and to suppress damage to the minute object.

In addition to the above structure, it is preferable that a predetermined position on the substrate facing the periphery of the acting portion is provided with a suction projection portion that projects toward the main body member and sucks the main body member (claim 12). . Thereby, when the action part is moved by the irradiation means so as to come into contact with the adsorption protrusion, the intermolecular force, the electrostatic force of the residual charge, and the chemical adsorption force are generated between the periphery of the action part and the adsorption protrusion. Etc. work on the contact surface. Therefore, by holding the action portion in contact with the suction protrusion,
It is possible to more securely fix the minute object captured by the action portion.

Further, when the main body member is provided with a light receiving portion, it is desirable that the light receiving portion is formed of a member through which light is transmitted and is formed into a substantially spherical shape.
3). Furthermore, it is more preferable that the light receiving portion is configured by a through hole formed in the main body member and a sphere that is a member that transmits light and has a diameter larger than that of the through hole, and the sphere is fitted into the through hole. (Claim 14). As a result, the light trapping force due to the focused irradiation is easily generated in the light receiving unit, and the position of the light receiving unit can be operated with high accuracy, so that the minute object can be efficiently captured and fixed. In such a case, the light trapping force can be generated and the position of the acting portion can be easily manipulated no matter which direction the light is applied to the light receiving portion.

In the present invention, a main body member having a predetermined length is provided on the substrate, one end of which is fixed to the substrate so as to be substantially parallel to the surface on the substrate, and the other end of the main body member is provided. , Forming an action portion that holds a micro object between the other end portion and the substrate and fixes the position of the micro object, and at least part of the main body member between the action portion and the one end portion is elastic. It is said that a minute object formed of a member is an object that is fixed between the acting portion and the substrate by being irradiated with condensed light and moved to the focal position of the light. A micro-object fixing device having a structure is also provided (claim 16).
That is, a configuration is adopted in which the light receiving portion is not formed on the main body member. In this case, it is more desirable to form an inclined portion around the portion of the acting portion facing the substrate so that the gap with the substrate becomes larger toward the outer edge (claim 17).

With such a structure, when the minute object is focused and irradiated, the minute object is captured at the focal position, and the minute object also moves as the focus moves. And by moving the focal position of the irradiation light,
By moving a minute object from the outer periphery of the action portion of the main body member to almost the center of the action portion, the portion formed by the elastic member of the main body member elastically deforms so as to warp upward, and the action portion moves upward. Small objects slide into the bottom of the working area. Therefore, it is possible to fix the minute object at the action portion, and in such a case, since the minute object itself is irradiated only when moving to the lower part of the action portion, the irradiation time of the light to the minute object is shortened. It is possible to reduce the damage to the minute object due to irradiation. When the outer periphery of the action portion is provided with an inclination, the minute object can easily be dipped into the action portion, and the minute object can be easily fixed.

Further, in the above structure, a recessed portion or a through hole which is recessed in a direction opposite to the substrate allowing the minute object is formed at a portion of the acting portion facing the substrate (claim 1).
8, 19), damage to the minute object can be suppressed as described above.

Further, it is desirable that the main body member is made of a gold or silicon-based material (claims 20 and 21). This makes it possible to manufacture a main body member having a high Young's modulus and a high elastic force, and it is possible to improve the mobility when capturing a minute object.

Further, it is desirable that the main body member is made of amorphous carbon by using an amorphous carbon deposition method by exciting a focused ion beam (claim 22). With this, by controlling the beam irradiation position, the shape of the amorphous carbon that is the deposit can be arbitrarily formed, so that the main body member corresponding to the minute object to be fixed can be easily manufactured. In addition, since the Young's modulus of amorphous carbon can be set arbitrarily by controlling the growth rate of deposits, appropriate elastic force that emphasizes fixing force and mobility according to the minute object to be fixed is set. It is possible to obtain a body member having

Further, according to the present invention, a main body member having one end fixed to the substrate and provided substantially parallel to the surface on the substrate is provided at a position other than the one end of the main body member. By receiving the light focused on the formed light receiving portion, the light receiving portion is moved to the focal position of the light to deform the main body member, and a part of the main body member is kept away from the substrate, A body member separated from the substrate by irradiating light condensed on a minute object to a gap between the body member and the body member to move the minute object to a focal position of the light, releasing the deformed state of the body member. There is also provided a method for fixing a minute object, which comprises moving a part of the object so as to be close to the substrate and fixing the minute object between the substrate and the main body member (claim 23).

The substrate is provided with a main body member having one end fixed and provided substantially parallel to the surface on the substrate, and having a predetermined length, and the other end of the main body member is Between the other end and the substrate, there is formed an action part that holds the minute object and fixes the position of the minute object, and at least a part of the body member between the action part and the one end is formed. It is formed by an elastic member and irradiates the condensed light on a minute object, and moves the minute object to the focal position of the light so as to insert the minute object between the action part of the main body member and the substrate. And a method of fixing a micro object between the substrate and the acting portion of the body member by deforming the body member so that the acting portion of the body member is separated from the substrate (claim 24). . Even in this case, the same operation as described above and the same effect can be obtained.

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION <First Embodiment> A first embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a schematic diagram showing the configuration of the first embodiment of the present invention. 2 to 4 are configuration diagrams showing a specific configuration of the present invention. FIG. 5 is an explanatory diagram for explaining the operation in this embodiment.

(Structure) As shown in FIG. 1, the micro object fixing device of the present invention comprises a main body member 2 which is arranged on a predetermined substrate 1 and has a predetermined length. The other end portion 3 of the main body member 2 is an open end, and one end portion 4 thereof is fixed to the substrate 1, and the main body member 2 is
It is a cantilever. Then, an action portion 31 is formed on the substrate 1 side of the other end portion 3, and the minute object 5 is held in the gap formed between the action portion 31 and the substrate 1. Hereinafter, this will be described in detail.

(Micro Object) The micro object 5 fixed on a predetermined substrate by the micro object fixing device of the present invention is, for example,
It is a micron (one millionth of a meter) order object such as cells and particles. These minute objects 5 are
As will be described later, by focusing and irradiating the laser, it is moved to the focal point (optical trapping force). Further, not limited to this, by irradiating light, it is also moved by the light pressure applied to the minute object 5. The minute object 5 is an object of a predetermined experiment or observation, and its movement is required to be fixed. In the present invention, as described later in detail, the substrate 1
And the action portion 31 are fixed.

(Substrate) The substrate 1 has a substantially rectangular parallelepiped shape, and the main body member 2 is fixed to the upper surface thereof. Further, the upper surface is a flat surface, and particularly near the other end portion 3 of the main body member 2, a flat surface portion 11 for fixing a minute object is formed. The material is glass, for example. However,
The material of the substrate is not limited to glass, but a transparent member is preferable.

In the present application, since it is made of glass, the main body member 2 and the minute object 5 can be operated from the lower side of the substrate 1 when operated by the irradiation means as described later. Therefore, since the operation from above the substrate 1 is suppressed, the irradiation of the light by the irradiation unit is suppressed from being blocked by the main body member 2 or the like.

(Main Body Member) As described above, the main body member 2 has one end 4 fixed to the substrate 1. At this time, the one end portion 4 is fixed and is in a cantilevered state with a portion other than the one end portion 4 of the main body member 2 having a predetermined distance from the substrate 1. However, it suffices that at least an action portion 31 of the main body member 2 which will be described later is separated from the substrate 1. That is, almost all of the main body member 2 except the one end portion 4 may not be separated from the substrate.

The distance between the acting portion 31 and the substrate 1 is formed to be shorter than the height of the minute object 5, for example. As a result, the minute object 5 is prevented from being easily separated from between the acting portion 31 and the substrate 1, and can be reliably fixed.

By the way, the main body member 2 is not always in the above-mentioned state, that is, there is a gap with the substrate 1,
Need not be prepared for. It may be provided in a state where the entire main body member 2 is in contact with the substrate 1. In this case, as will be described later, the minute object 5 to be fixed is sandwiched between the substrate 1 and the main body member 2, and the minute object 5 may be crushed. However, for example, when the minute object 5 is not granular and is in the shape of a string such as DNA, by fixing both ends thereof with two minute member fixing devices, the central portion to be observed can be protected. When observing light with low brightness such as fluorescence of the fluorescent substance adsorbed on the specific portion in such a manner as described above, the specific portion is not irradiated with the laser beam, and thus the minute The protective effect of the substance and the fluorescent substance is remarkable.

(Operating part) Then, at the other end 3 of the main body member 2, a minute object 5 is provided in the gap between the other end 3 and the substrate 1.
A working portion 31 for accommodating the object and fixing the position of the minute object 5
Are formed. Further, a light receiving unit 6 that moves to the focal position of the light by receiving the collected light is formed between the action unit 31 of the main body member 2 and the one end 4.

In the action portion 31, a concave portion 32 is formed in a portion of the action portion 31 facing the substrate 1 so as to be recessed in a direction opposite to the substrate 1 which allows the minute object 5. That is, the action portion 31 has a bowl shape having an opening portion on the lower side. The concave portion 32 has a size that can accommodate the minute object 5 that is an object, and the crushing of the minute object 5 is suppressed. At this time,
By forming the shape of the concave portion 32 to be larger than the shape of the minute object 5, it is possible to prevent the minute object 5 from being further crushed. However, the shape of the action portion 31 is not limited to the above shape. Here, the action part 31
Is not limited to being formed on the other end 3 of the body member 2. The acting portion 31 includes the other end portion 3 and a light receiving portion 6 which will be described later.
May be formed between the one end portion 4 and the light receiving portion 6.

(Light-Receiving Section) The light-receiving section 6 is located between the action section 31 and the one end section 4, and more specifically, it is provided closer to the action section 31 than the center of the main body member 2. There is. The light receiving section 6 is formed of a member that allows light to pass therethrough, and is formed in a substantially spherical shape. By forming in this way, the light receiving unit 6 which is a sphere is irradiated with the light condensed from the irradiation means (not shown) described later, so that the light receiving unit 6 is focused by the light trapping force. Move to position.

The optical trapping force mentioned here is a force used in the optical tweezers technique described above. When the laser light is condensed using a condensing means such as a lens and the non-irradiated object is irradiated with this condensed light, the laser light entering the non-irradiated object changes its momentum due to the difference in refractive index. , A force is generated on the irradiated object to save the momentum. This force is the optical trapping force (see FIG. 8). The optical trapping force largely changes depending on various parameters such as the wavelength of the light to be radiated, the size, shape, and refractive index of the non-condensed object, but here it is suitable depending on the magnitude of the required force. It can be set to various conditions.

Further, a projection 61 projecting toward the substrate 1 is formed at a portion of the light receiving portion 6 facing the substrate 1. However, the lower side of the light receiving portion 6 which is a substantially spherical body plays the role of the projection in FIG. 1, and is in contact with the substrate 1. As a result, it is possible to prevent the action portion 31 of the main body member 2 located on the tip side of the light receiving portion 6 from hanging down toward the substrate due to its own weight, and to prevent the action portion 31 from crushing a minute object.

Here, the protrusion 61 is not limited to being formed by the light receiving portion 6. By providing the main body member 2 at a position facing the substrate 1 in the vicinity of the acting portion 31, the above-described effects can be obtained. For example, the protrusion 61 may be formed between the light receiving portion 6 and the acting portion 31.

Further, the light receiving portion 6 may be formed on the entire body member 2. That is, the body member 2 itself may be formed in a shape that generates an optical trapping force. For example, the main body member 2 is mainly formed in a columnar shape (rod shape) having a central axis in the longitudinal direction, and when this portion is irradiated with laser light, an optical trapping force is generated. As a result, the operator can operate the action part 31 regardless of where the main body member 2 is irradiated with the laser light, so that the operability of the apparatus itself can be improved. By the way,
Even if the main body member 2 is formed in a semi-cylindrical shape, the same effect is obtained.

(Deformation Section) Further, in the body member 2, a space between the one end portion 4 and the light receiving section 6 is formed by an elastic member which can be deformed in any direction to form a deformation section 7. There is. That is, the deformable portion 7 has a spring characteristic, and the action portion 31 which is the other end portion 3 can move in the vertical and horizontal directions with the one end portion 4 as a fulcrum. Therefore, in the vicinity of the one end portion 4, that is, in the vicinity of the fixed end, the main body member 2 has a shape close to a line. The specific shape will be described later.

At this time, the part of the main body member 2 formed of the elastic member may be only a part of the main body member 2, or the whole main body member 2 is formed of the elastic member. Good. Since the main body member 2 as a whole has elastic characteristics, the main body member 2 is easily elastically deformed, so that the action portion 31 is easily moved.

However, the deforming portion 7 is not limited to being formed of an elastic member. It may be a plastically deformable member. In such a case, when the light receiving unit 6 is moved, the main body member 2
The deformed portion 7 of is plastically deformed and remains in the deformed state,
Further, the light receiving section 6 is moved by the optical trapping force, and the action section 3
By returning 1 to the original position, the minute object 5 can be captured and fixed. Therefore, the deformable portion 7 may be a link mechanism including a hinge or the like.

(Irradiating Means) Further, below the above-mentioned substrate 1 etc., an irradiating means (not shown) for irradiating the light-receiving section 6 with light is provided. The irradiation means includes a light source and a lens. Then, as the light source, a laser beam that easily obtains high-intensity parallel rays is used, and the laser beam is focused by a lens for use. Here, the lens is, for example, an objective lens of an optical microscope. Further, an operating means is also provided (not shown) so that the operator can operate the focus of the laser light.

In addition to the irradiation means, the minute object 5
Also provided is an irradiation unit (not shown) for a minute object that irradiates the minute object 5 with light so as to move to the focal position of the light by receiving the condensed light. The irradiation means for the minute object also has the same configuration as the irradiation means.

The light emitted from the irradiation means does not necessarily have to be condensed by a predetermined lens. The light may be moved by the pressure of the light only by irradiating the light receiving unit 6 and the minute object 5 with the light.

The irradiation means is not limited to being provided below the substrate 1. That is, the light irradiation to the light receiving unit 6 and the minute object 5 is not limited to being performed from below the substrate 1, and may be performed from above. However, by irradiating from below as described above, since the substrate 1 is formed of a transparent glass member, light is prevented from being blocked, and the light receiving portion 6 and the minute object 5 are operated by an optical trap. Can be done easily.

(Specific Configuration) Here, an example of the configuration of the minute object fixing device will be described with reference to FIG. Figure 2 (a)
[FIG. 4] is a view of the present device as seen from above, which is an explanatory view for explaining the manufacturing process thereof. FIG. 2B is a side view of FIG. 2A. FIG. 2C is a side view of the produced minute object fixing device.

As described above, the main body member 2 which plays an important role of this apparatus is provided on the substrate 1. One end 4 is fixed to the substrate 1 and the other end 3 is formed with an action portion 31. Further, a light receiving portion 6 is formed at a predetermined location from the central portion of the main body member 2 to the action portion 31. In addition, as will be described later, the main body member 2 has a structure shown in FIG.
As shown in (b), it has a substantially linear shape.

The acting portion 31 and the light receiving portion 6 are annular as shown. However, the outer diameter and the inner diameter are different, and the light receiving portion 6 is formed larger. Action part 3
The through hole 33 formed in the vicinity of the center of 1 has a diameter larger than that of the minute object 5 and allows the minute object 5 to the space portion. Therefore, as will be described later, the substrate 1
When the minute object 5 larger than the gap between the action portion 31 and the action portion 31 is captured by the action portion 31, the minute object 5 is located inside the through hole 33. It is bound and protected as it is surrounded by. Further, the through hole 62 formed in the main body member 2 forming the light receiving portion 6 is fitted with the spherical body 63 forming the light receiving portion 6 in the same manner. That is, in this example, the light receiving unit 6 is configured by the through hole 62 formed in the main body member 2 and the spherical body 63 having a diameter larger than that of the through hole 32.
The sphere 63 is formed of polystyrene beads, for example.

The one end 4 has a substantially pentagonal shape,
The end 4 side is fixed to the substrate 1. Further, the other end 3 side of the one end 4 is bent in a stepped shape, and the other end 3 side itself has a predetermined gap with respect to the substrate 1 as a whole with respect to such a portion. .

Since the main body member 2 itself is formed of an elastic member and the portions other than the other end portion 3, the light receiving portion 6 and the one end portion 4 are thin-line shaped, the main body member 2 itself is a spring. Acts as. That is, the body member 2 has a suspended structure. A method for manufacturing the suspended structure is shown below.

First, a sacrificial layer (resist layer 8) having a thickness of about 1 μm is patterned on the glass substrate 1 using a negative photoresist or the like. Next, the pattern of the main body member 2 is produced with the arrangement as shown in FIG. Body member 2
There is no limitation on the material of the metal, but when it is produced by mask vapor deposition, a metal such as Au, Pt, Al, W, or Ti, a metal compound such as tungsten carbide, Si, SiO2, SiNx.
Or, an organic resin or the like can be used. Further, it is also possible to pattern a photocurable resin or the like by mask exposure, or directly pattern amorphous carbon or tungsten carbide by a chemical vapor deposition method using a focused ion beam. Then, the resist sacrificial layer 8 is dissolved in an organic solvent, or is removed by oxygen plasma treatment or the like, whereby a suspended structure can be manufactured.

Next, a method of manufacturing the light receiving portion 6 will be described. The spheres 63 (beads) forming the light receiving unit 6 are made of a material having high transparency with respect to the light used. For example, organic resins such as polystyrene and optical glass are suitable. The shape is not limited to a spherical shape, and may be a biconvex lens shape. In order to bond the beads, the substrate on which the main body member 2 is prepared is dipped in a solution in which the beads are diffused, and the beads are formed on the main body member 2 as shown in FIG. 2B using optical tweezers. It is arranged in the through hole 62 for. At this time, if a small amount of a dry-curable resin is dissolved in the solution, the adhesive resin 9 is removed when the solution is removed and dried.
The beads 62 and the main body member 2 are bonded together. As another bonding method, the charged particle beam may be irradiated to the vicinity of the contact portion between the beads and the manipulator to deposit a decomposed product of gas in the atmosphere and bond the particles.

The order of the bead adhesion and the resist sacrifice layer removing step may not be the order described in the embodiment. When the common steps such as immersion in a solvent and introduction into a vacuum device are included, they can be simultaneously performed.

Here, a description will be given of an example of making when the material of the main body member 2 is gold with less internal stress. By the electron beam exposure, the width of the thin line portion (deformation portion 7) is 150 nm,
A gold main body member 2 having a thickness of 150 nm and a total length of about 40 μm is prepared. The length of the deforming portion 7 is about 30 μm, and a circular holder (through hole 62) having an inner diameter of about 2.5 μm is formed at the tip of the deforming portion 7 as a light receiving portion 6 for easily adhering the polystyrene beads 63 having a diameter of 3 μm. Further, a similar holder (through hole 33) having an inner diameter of about 2 μm is formed as the acting portion 31 at the tip of the main body member 2 to facilitate the fixation of the object.

At this time, the spring constant of the deformable portion 7 is about 3.
It is 3 × 10 ⁻⁴ N / m. When operating polystyrene beads with an optical tweezers system using a solid-state laser (for example, a laser using a neodymium-doped yttrium lithium fluoride crystal) or the like, a trapping force of about 1 nN at maximum can be obtained. At this time, a displacement of 4 μm or more can be obtained at the tip of the deformable portion 7, that is, at the action portion 31, compared with the original position of the action portion 31.

Next, an example in which a Si-based material is used as the material of this apparatus will be described with reference to FIG. Specifically, an example of manufacturing the body member 2 made of a silicon oxide film using SiO ₂ and SiN _x will be described. 3 (a)-(g)
It is explanatory drawing which shows the manufacturing procedure of a micro object fixing apparatus.

First, a silicon substrate 81 whose entire surface is covered with a silicon oxide film 21 having a thickness of about 150 nm is prepared (FIG. 3A). Oxide film 2 on the back of this silicon substrate
1 is partially removed using lithography or the like (see FIG.
(B)), when immersed in a TMAH (tetramethylammonium hydrate) solution, a potassium hydroxide solution, or the like, the silicon substrate portion 81 is etched, and FIG.
It is possible to obtain a membrane structure as shown in (c) in which only the silicon oxide film 21 remains.

Subsequently, a resist is applied to the surface side where the oxide film remains, and a main body having the same size and shape as in the case of the above-described manufacturing example is patterned by lithography, and the resist is developed and the pattern is transferred by dry etching. After that, the main body member 2 having the suspend structure is obtained (FIG. 3 (d),
(E)). At this time, since the Young's modulus of the silicon oxide film is about 70 GPa similar to that of gold, the body member 2 thus manufactured has the same movable performance as described above. Further, silicon nitride can be used instead of silicon oxide. Since silicon nitride has a high Young's modulus, a strong elastic force can be obtained.

Then, the surface of a transparent substrate such as glass coated with PMMA (polymethylmethacrylate) having a thickness of about 100 nm and the surface of the body member 2 made of a silicon substrate are adhered to each other (FIG. 3 (g)). After the PMMA is hardened, the PMMA at the portion where the main body member 2 and the glass substrate 1 are bonded is lightly washed with an organic solvent or the like to be removed.

The advantage of the laminated structure is that the gap between the main body and the substrate can be easily controlled, and even when the main body member 2 is formed on a substrate that is opaque to visible light, such as a silicon substrate,
For example, it is possible to easily install the minute object fixing device on a transparent substrate such as a glass substrate.

Finally, the beads 63 for receiving light are adhered in the same manner as described above. Alternatively, since silicon oxide and silicon nitride are insulators and are transparent to visible light, it is possible to manufacture the light receiving unit 6 with the same material as the main body.
In that case, the shape of the portion that becomes the light receiving portion 6 may be a shape suitable for an optical trap. Specifically, it is preferable that the width, the length, the height, and the like of the light wavelength or more be given. Further, by forming the light receiving portion with the same material as the main body member 2, the light receiving beads 63 can be formed later.
Since it is not necessary to adhere to each other, the number of manufacturing steps can be reduced. In addition, silicon oxide or silicon nitride can be warped when a suspend structure is manufactured by changing the film manufacturing conditions (FIG. 3F). By utilizing this, the size of the gap with the transparent substrate to be adhered and the pressing force can be controlled.

An example of using amorphous carbon as a material will be described with reference to FIG. That is, an example of manufacturing a manipulator using an amorphous carbon deposition method by excitation with a focused ion beam (FIB) will be described. FIG. 4A to FIG. 4C are explanatory views showing a production example thereof.

First, when a substrate is irradiated with Ga ⁺ FIB having an acceleration voltage of 30 keV and a beam current of 5 pA or less in a vacuum in which an aromatic hydrocarbon gas such as phenanthrene or pyrene exists at a partial pressure of about 1 × 10 ^-4 Pa, the diameter is changed. 100 nm
Decomposition products of hydrocarbon gas due to the beam excitation reaction are locally deposited below. If irradiation is continued at a fixed point as it is, a pillar having a maximum diameter of 100 μm and a diameter of about 100 nm can be formed in the beam irradiation direction.

Further, when the beam irradiation position is moved at the same speed as the growth speed of the deposit, the deposit is generated in an oblique direction so as to follow the beam irradiation position. By using this principle, the cross-sectional shape of the pillar can be arbitrarily changed during the growth of the pillar. The components of this decomposition product are
With amorphous carbon, the Young's modulus can be controlled in the range of 100 to 600 GPa depending on the growth rate. Specifically, the Young's modulus is low when the gas partial pressure of the hydrocarbon to be supplied is increased and the hydrocarbon is grown at a high speed, while the Young's modulus is increased when the gas is grown at a low speed. By using this, for example, a portion (deformation portion 7) between the light receiving portion 6 and one end portion is formed.
Part) has a low Young's modulus so that it can be easily deformed,
It is also possible to increase the Young's modulus in the portion between the light receiving unit 6 and the other end. Further, in the case of amorphous carbon, since the bonding state of carbon varies depending on the Young's modulus, the transparency also changes. Therefore, it is also possible to adjust the transparency by controlling the growth rate depending on the application. Therefore, the light receiving portion 6 can be formed with sufficient transparency to generate an optical trapping force.

FIG. 4A shows a fine object fixing device made of amorphous carbon by FIB excitation. First, the pillar 1 (P1) having a length of 30 μm and a diameter of 100 nm is formed on the substrate 1. Then pillars 1 to 100
nm to several μm apart, length 33 μm, diameter 100
Pillar 2 (P2) of nm is produced. Further, at the tip of the pillar 2, a sphere having a diameter of about 1 μm is similarly produced by the FIB excitation as the light receiving portion 6 to obtain a micro object fixing device.

Then, the tip of the pillar 2 is set to 100 mW,
As a result of attempting an optical trap with an argon ion laser having a spot diameter of about 1 μm, an optical trap was possible and a deflection of at least about 5 μm was observed. It corresponds to a trapping force of about 1 nN. By doing so, a fixing device capable of fixing a minute object can be manufactured between the pillar 1 and the pillar 2. That is, pillar 1
The substrate itself functions similarly to the substrate 1, and the pillar 1 itself and the rod-shaped portion of the pillar 2 can sandwich a minute object. Therefore, the rod-shaped portion of the pillar 2 is also the deforming portion 7 and also serves as the operating portion 31. The distance between the pillar 1 and the pillar 2 can be selected according to the size of the minute object.

Further, as shown in FIG. 4B, the surface of the glass substrate 1 can be used instead of the pillar 1.
That is, the member (silicon substrate 8) from which the pillar 2 is manufactured.
By fixing 1) to the glass substrate 1, a fixing device can be manufactured (see FIG. 4C).

The manufacturing procedure will be described in detail. First, the deformed portion 7 having a characteristic of low Young's modulus, that is, easily elastically deformed at high speed growth, is formed at an end portion such as the cleavage surface 101 of the silicon substrate 81 which can be the main body member 2. To make. Next, the light-receiving unit 6 is manufactured by gradually expanding the irradiation range of FIB. Further, a high-strength working portion 31 is formed at the tip by low-speed growth, or the light receiving portion 6 itself is used as the working portion 31. Action part 31
By making the film by low-speed growth, it is possible to improve the durability of the action portion 31 that comes into direct contact with another object. Finally, the fixing device can be obtained by bonding the silicon substrate 2 to the glass substrate 1 or the like with the adhesive 102 or the like. Amorphous carbon produced by GaFIB is
Ga is included as an impurity. This gallium is 50
It can be removed by a high temperature treatment of 0 ° C. or higher.
As a result, effects such as reduction of light absorption and increase of Young's modulus can be obtained.

(Operation) Next, the operation of this embodiment will be described with reference to FIG. FIG. 5A shows the light receiving portion 6
3A and 3B are explanatory diagrams showing a state in which a laser beam is applied to the minute object 5 that is the fixing target. FIG. 5B shows the minute object 5.
It is explanatory drawing which shows the state which is being fixed.

First, as shown in FIG. 5A, the light receiving section 6 is focused and irradiated by an irradiation means (not shown), and the focal point thereof is moved above the original position of the light receiving section 6. Then, the displacement portion 7 of the main body member 2 is elastically deformed, and the light receiving portion 6 moves upward (see arrow A1). That is, the light receiving unit 6 is moved by the optical tweezers technique. Along with this, the action portion 31 formed on the one end portion 3 of the body member 2 also moves upward. At this time, the irradiation means is below the substrate 1, that is,
The laser beams L1 and L2 are provided in the downward direction of FIG.
Is similarly radiated to the light receiving portion 6 and the minute object 5 from below. Thereby, the laser beams L1 and L2 are transmitted through the glass substrate 1 and are surely applied to the light receiving portion 6 and the minute object 5, so that the operability of the minute object fixing device can be improved. That is, if the irradiation is from above, the laser beam L2 may be blocked by the main body member 2 while the minute object 5 is being irradiated, but in the above case, such an inconvenience is suppressed.

Subsequently, while keeping the position of the acting portion 31 above the original position, the minute object 5 is focused and irradiated by another irradiation means (for minute object) not shown, that is, , By using the optical tweezers technique, the minute object to be fixed can be moved directly below the action part 31 (arrow A2
Hold) on the spot. After that, by cutting off the laser from the irradiation means that is irradiating the light-receiving section 6 with condensed light, an elastic restoring force acts on the deformable section 7, and the main body member 2 returns to its original shape. Then, as shown in FIG. 5B, the minute object 5 is set in the concave portion 32 formed in the acting portion 31, and the position of the minute object 5 is fixed by the substrate 1 and the inner surface of the concave portion 32. At this time, the action part 31 is not limited to moving the action part 31 from the upper part of the minute object 5 by shutting off the laser, but the action part 31 covers the upper part of the minute object 5 by operating the position of the light receiving part 6 with the laser. You may operate it.

By doing so, the minute object 5 is accommodated in the concave portion formed in the action portion 31, and the action portion 31 is concerned.
Can be fixed between the substrate and the substrate 1 (FIG. 5B).
reference). At this time, the irradiation of the laser beam onto the minute object 5 is performed only when the minute object 5 is moved directly below the operating portion 31, and since the time is short, the minute object 5 is destroyed or altered by light irradiation. Etc. can be suppressed. Further, since the optical system, which is the irradiation means conventionally used to fix the minute object 5, can be used for other purposes, the efficiency of the optical tweezers system can be improved.

Further, by using light for driving the main body member 2, a simpler structure can be obtained as compared with the conventional tweezers type manipulator, and at the same time, it has a special function such as a piezoelectric body or an optical strain element. Since no material is required, mass production is possible at low cost. Further, since the light-receiving unit 6 to which light is irradiated uses polystyrene beads or glass, the main body member 2 itself, which partially has the action unit 31 that holds the minute object 5, does not generate heat due to light absorption. Therefore, it is possible to further prevent the body member 2 itself and the microscopic object 5 from being destroyed by heating or being altered.

Here, the deformable portion 7 and the acting portion 3 of the main body member 2
1, the size of the polystyrene beads of the light receiving portion 6,
The arrangement of each part and the interval between the main body member 2 and the substrate 1 are not limited to those described above, and in order to fix an object efficiently, the minute object 5 to be fixed is selected.

Generally, the light trapping force and the light pressure are p
Since the force is weak on the order of N to nN, it is preferable to increase the length / cross-sectional area ratio so that the deformable portion 7 is easily deformed even with a weak force. Further, in order to increase the light trapping force for the light receiving section 6, it is preferable to use a sphere having a diameter of about 1 to several times the wavelength of the laser used and a high refractive index. To increase the light pressure, a mirror having a high reflectance and a large area may be used.

(Another Operational Example) Here, an operational example different from the above will be described. In this operation example, in particular, the deformable portion 7 of the main body member 2 is deformable in all directions, and the main body member 2 is made of an elastic member that is expandable and contractible in the longitudinal direction to some extent.

Then, when the minute object 5 to be fixed is present near the original position of the acting portion 31 of the main body member 3, the light receiving portion 6 is irradiated with light and is deformed by the optical driving force. Is deformed to control the position of the acting portion 31, thereby capturing the minute object 5. That is, as described above, the action portion 31 is covered from above the minute object 5 by irradiating the minute object 5 with the laser beam and moving the focused light only to the light receiving portion 6 without moving. Move the position of.

By doing so, it is possible to fix the minute object 5 at the acting portion 31 without directly irradiating the minute object 5, and it is possible to perform other processing on the minute object 5. As a result, it is possible to prevent the destruction and alteration of the minute object due to the light irradiation.

<Second Embodiment> Next, a second embodiment of the present invention will be described with reference to FIG. Figure 6
It is a side view which shows the structure in this embodiment.

(Structure) The minute object fixing device according to the present embodiment has substantially the same components as the device according to the first embodiment. Further, in the second embodiment, the main body member 2 is adsorbed by projecting in the direction of the main body member 2 at a predetermined position on the substrate 1 facing the periphery of the acting portion 31 formed on the main body member 2. The suction protrusion 10 is provided.

The suction protrusion 10 is a re-end portion of the acting portion 31,
That is, it is a projection that is provided on the substrate 1 near the most distal end of the main body member 2 and has a height lower than the gap formed between the substrate 1 and the action portion 31. Therefore, the protrusion 1
A predetermined gap still exists between the upper end portion of 0 and the action portion 31. When the action portion 31 comes into contact with the upper end portion of the adsorption protrusion portion 10, intermolecular force, electrostatic force of residual charge, chemical adsorption force, etc. act on the contact surface. As a result, the action portion 31 is held in a state of being in contact with the suction protrusion 10. That is, the suction protrusion 10 has a latch function.

For example, when gold is used for the main body member 2 and the adsorption protrusions 10, the main body member 2 and the adsorption protrusions 10 can be formed by immersing the apparatus in a solution of alkanethiol.
Both are adsorbed by the chemical adsorption force between the alkyl groups of the alkanethiol molecule adsorbed on. When the main body member 2 and the adsorption protrusions 10 are made of an insulator, they are adsorbed by electrostatic force or intermolecular force due to residual charges. Also, by using a magnetic material such as Cr, which is used for the main body member 2 and the adsorption protrusions 10 by mask vapor deposition, adsorption is performed even in such a case.

(Operation) Here, the operation when the above-mentioned latch function operates will be described. First, similarly to the first embodiment, the light receiving unit 6 is focused and irradiated with laser light to move the position of the action unit 31 and capture the minute object 5 by the action unit 31. At this time, as described above, the minute object 5 may be focused and irradiated with the laser beam to move the minute object 5. At the same time, or by moving the light receiving section 6 toward the substrate with laser light,
The action portion 31 also moves in the direction of the substrate 1, and the tip end portion of the action portion 31 contacts the suction protrusion 10. As a result, the acting portion 31 and the attracting protrusion portion 10 are fixed by the attracting force acting on the attracting protrusion portion 10, and the position of the minute object 5 captured between the acting portion 31 and the substrate 1 is also fixed.

By doing so, the position of the acting portion 31 is fixed, so that the minute object 5 can be stably held. Therefore, it is possible to prevent the action portion 31 from being lifted up when the user does not intend to operate it due to an external force applied to the device, a user's erroneous operation, or the like, and to prevent a situation in which the once-fixed minute object 5 is missed. It Therefore, the user can efficiently perform the work performed on the fixed minute object, and the convenience of the user can be improved.

<Third Embodiment> Next, a third embodiment of the present invention will be described with reference to FIG. Figure 7
FIGS. 7A and 7B are partial configuration diagrams showing an example of the configuration according to the third embodiment.

(Structure) This embodiment has substantially the same constituent elements as those of the above-described first embodiment,
Of these, the above-described light receiving unit 6 and an irradiation unit (not shown) for irradiating the light receiving unit 6 with laser light or the like are not provided.
That is, the main body member 2 is provided with the action portion 31 at one end portion 3 thereof, only the other end portion 4 is fixed to the substrate 1, and has a fine line shape except for both end portions. Even in such a case, the thin line-shaped portion is formed of an elastic member and has a spring characteristic. By the way, at this time, the distance between the acting portion 31 and the minute object 5 is
Is formed to be slightly shorter than the height (see FIG. 7A).

Further, the irradiating means not provided is for the above-mentioned light receiving part, and in the present embodiment, a minute object which moves the minute object by condensing and irradiating the minute object 5 with predetermined light. An object irradiation means (not shown) is provided. That is, the one irradiation means is provided.

(Operation) Next, the operation of the third embodiment will be described with reference to FIG. First, when the laser light L2 is focused and irradiated onto the minute object 5 from the lower side of the substrate 1, the minute object 5 is captured (trapped by the optical tweezers technique) at the focal position, and the minute object 5 is minutely moved along with the movement of the focal point. The object also moves (see arrow A3). And
By moving the focus position of the laser beam L2 to the upper part of the action part 31 of the main body member 2, the minute object 5 moves toward the action part 31, but at this time, the upper part of the minute object 5 is on the outer peripheral part of the action part 31. Abut.

Then, the movement of the minute object 5 is further continued,
When the minute object 5 is moved from the outer periphery of the action portion 31 of the main body member 2 to substantially the center of the action portion 31, the portion formed by the elastic member of the main body member 3 elastically deforms so as to warp upward, and the action portion 31 becomes After moving upward (see arrow A4), the minute object 5 slides into the lower part of the acting portion 31. That is, the minute object 5 itself moved by the optical trap acts so as to push up the acting portion 31 of the main body member 2 and enters between the acting portion 31 and the substrate 1. Further, in the same manner, the minute object 5 fixed by the acting portion 31 can be taken out from the acting portion 31.

By doing so, as in the case of the above-described embodiment, the minute object 5 can be fixed, and the light receiving portion 6 is not formed on the main body member 2 as described above. Since two irradiation means are not required, the structure can be simplified and the manufacturing cost can be reduced. Since the minute object 5 itself is only irradiated with laser light or the like when moving to the lower part of the acting portion 31, the irradiation time of light to the minute object 5 is fixed by the optical trap in the conventional example. It can be shortened as compared with the case, and damage to the minute object 5 due to irradiation can be suppressed.

Here, in the present embodiment, FIG.
As shown in FIG. 5, the inclined portion 34 may be formed around the portion of the acting portion 31 facing the substrate 1 so that the gap with the substrate 1 becomes larger toward the outer edge. That is, the outer periphery of the annular action portion 31 is tapered such that its diameter decreases toward the substrate 1. A similar structure can be formed by forming a taper in advance by controlling the exposure amount when the resist sacrificial layer 8 is formed, or by local etching with a focused ion beam. In this way, by providing the inclined portion 34, the minute object 5 can be easily made to sneak into the lower portion of the action portion 31, and the minute object 5
The operation of the user using the optical tweezers is facilitated, and the convenience of the user can be improved.

[0099]

Since the present invention is constructed and functions as described above, according to the present invention, the main body member on which the action portion for fixing a minute object is formed is provided with the light receiving portion for focusing and driving light. Therefore, it is possible to operate the position of the action part by operating the light receiving part, and by doing so, it is possible to capture and fix the minute object, and thus it is not necessary to directly irradiate the minute object with light. Since the action portion itself for fixing the minute object is not irradiated with light, it is possible to suppress the heating of the minute object, to suppress alteration, destruction, damage, etc. of the minute object, and to easily reduce the minute object. It has an unprecedented excellent effect that an object can be fixed.

Further, unlike the optical tweezers technique, strong light is not required, and once fixed, there is no need to irradiate light for further observation. Therefore, for example, a minute object such as DNA is fixed to a specific portion. When observing the fluorescence of the adsorbed fluorescent substance, it is possible to easily observe light with low brightness of the fluorescence, facilitating research and experiments,
It is possible to speed up.

Further, by using a spherical body made of a member that transmits light for the light receiving portion, the light trapping force due to the focused irradiation is easily generated in the light receiving portion, and the position of the light receiving portion, that is, the position of the acting portion is accurately adjusted. Since it can be operated well, minute objects can be efficiently captured and fixed.

Further, when the irradiation means for a minute object is provided, since the minute object can be condensed and irradiated to move the position of the minute object, it is possible to move the minute object directly below the acting portion. Also, even a minute object located at a location distant from the action part can be captured and fixed by the action part, which can improve the convenience of the user, and even in such a case, the minute object Since the irradiation time of light to the object is reduced as compared with the conventional example, it is possible to suppress alteration and destruction of the minute object due to the light.

Further, in the case of irradiating only a minute object with light and moving the minute object by an optical trap to cause the minute object to sneak into the lower part of the action portion, the light receiving portion or the irradiation for irradiating light thereto. Since it is not necessary to provide any means, the structure of the device itself can be simplified and the manufacturing cost can be reduced. And, even in such a case, the micro object itself is only irradiated with light when moving to the lower part of the action part, and since the micro object is not irradiated with light when fixed at the action part, The irradiation time of light to the minute object can be shortened, and damage to the minute object due to irradiation can be suppressed.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a configuration in a first embodiment of the present invention.

FIG. 2 is a configuration diagram showing a specific example of a configuration according to the first exemplary embodiment of the present invention. FIG. 2A is a top view for explaining the forming process, and FIG. 2B is a side view thereof. FIG. 2C is a side view showing the completed view.

FIG. 3A to FIG. 3G are explanatory views showing a manufacturing procedure when the structure according to the first embodiment is manufactured using a Si-based material.

FIG. 4A to FIG. 4C are explanatory views showing a manufacturing procedure when the structure in the first embodiment is manufactured using amorphous carbon.

FIG. 5 is an explanatory diagram explaining an operation according to the first embodiment of the present invention. FIG. 5A is a diagram showing a state during operation, and FIG. 5B is a diagram showing a state in which a minute object is fixed.

FIG. 6 is a configuration diagram showing a configuration according to a second exemplary embodiment of the present invention.

FIG. 7 is a configuration diagram showing a part of a configuration according to a third embodiment of the present invention. 7A and 7B respectively show
It is a block diagram which shows an example of the structure.

FIG. 8 is an explanatory diagram illustrating the principle of the optical tweezers technique. FIGS. 8A and 8B are explanatory diagrams showing before and after the operation when the minute object moves to the focus position of the laser.

[Explanation of symbols]

1 substrate (glass substrate) 2 Body member 3 other end 4 one end 5 small objects 6 Light receiving part 7 Deformation part 10 Adsorption protrusion 11 Plane 31 Working part 32 recess 33 Through hole (on the operating part side) 34 Inclined part 61 protrusions 62 Through hole (light receiving side) L1, L2 laser light P1, P2 pillar

Claims (24)

[Claims] 1. A body member having a predetermined length, which is disposed substantially parallel to a surface of a predetermined substrate and has one end fixed on the substrate, is deformed by using an optical trapping force,
A minute object fixing device characterized in that a minute object is captured and fixed between the main body member and the substrate. 2. A main body member, which is arranged substantially parallel to a surface of a predetermined substrate and has one end portion fixed to the substrate and having a predetermined length, receives the condensed light. A minute object fixing device, characterized in that the object to be condensed is deformed by using a force for moving the condensed object to a focal position of the light, and a minute object is captured and fixed between the body member and the substrate. 3. A micro object fixing device for fixing a micro object on a predetermined substrate, wherein a main body member having a predetermined length is fixed on the substrate by fixing one end thereof to the substrate. A light receiving portion that is provided substantially parallel to the upper surface and that moves to the focus position of the light by receiving the condensed light is formed at a position other than the one end of the main body member, and A micro object fixing device, characterized in that a deformable portion that allows movement of the light receiving portion is formed in at least a part between the light receiving portion and the one end portion. 4. The micro object fixing device according to claim 3, wherein the deformable portion is formed of an elastic member. 5. The micro object fixing device according to claim 4, wherein a portion of the main body member formed of an elastic member is formed of a member that can be deformed in any direction. 6. The light receiving portion is located between one end portion and the other end portion of the main body member.
Alternatively, the minute object fixing device according to item 5. 7. The operating member for holding the micro object between the main body member and the substrate and fixing the position of the micro object is formed in the main body member. , 5 or 6, the minute object fixing device. 8. The micro object fixing device according to claim 7, wherein the acting portion is positioned with a predetermined gap between the acting portion and the substrate. 9. The small object fixing according to claim 7, wherein a concave portion is formed in a portion of the acting portion facing the substrate in a direction opposite to the substrate allowing the minute object. apparatus. 10. The micro object fixing device according to claim 7, wherein a through hole for allowing the micro object is formed in a portion of the acting portion facing the substrate. 11. The minute object fixing device according to claim 7, wherein a protrusion protruding toward the substrate is provided in the vicinity of the action portion of the main body member. 12. A suction projection portion, which projects toward the main body member and sucks the main body member, is provided at a predetermined position on the substrate facing the periphery of the acting portion. The minute object fixing device according to 8, 9, 10 or 11. 13. The light receiving portion is formed of a member that allows light to pass therethrough, and is formed into a substantially spherical body, as described in any one of claims 3, 4, 5, 6, 7, 8, 9, 10, 11 or. 12. The micro object fixing device according to 12. 14. The light receiving portion is configured by a through hole formed in the main body member and a sphere that is a member that transmits light and has a diameter larger than that of the through hole, and the through hole has the sphere. The micro object fixing device according to claim 3, 4, 5, 6, 7, 8, 9, 10, 11 or 12, characterized in that: 15. The micro object is an object which is fixed between the main body member and the substrate by being irradiated with condensed light and moved to a focal position of the light. Claims 1, 2, 3, 4, 5, 6, 7, 8,
The minute object fixing device according to 9, 10, 11, 12, 13 or 14. 16. A micro object fixing device for fixing a micro object on a predetermined substrate, wherein a main body member having a predetermined length is fixed on the substrate by fixing one end thereof to the substrate. An action portion that is provided substantially parallel to the upper surface and that fixes the position of the minute object by holding the minute object between the other end and the substrate is provided at the other end of the body member. At least a part of the main body member between the acting portion and the one end portion is formed of an elastic member, and the minute object is irradiated with condensed light and moved to a focal position of the light. Thus, the minute object fixing device is an object which is fixed by being inserted between the acting portion and the substrate. 17. The small object fixing according to claim 16, wherein an inclined portion is formed around a portion of the acting portion facing the substrate so that a gap between the acting portion and the substrate increases toward an outer edge. apparatus. 18. The recessed portion, which is recessed in a direction opposite to the substrate that allows the minute object, is formed at a portion of the acting portion facing the substrate.
7. The minute object fixing device according to 7. 19. The micro object fixing device according to claim 16, wherein a through hole for allowing the micro object is formed in a portion of the acting portion facing the substrate. 20. The main body member is made of gold, 1, 2, 3, 4, 5, 6, 7, 8,
9, 10, 11, 12, 13, 14, 15, 16, 1
The minute object fixing device according to 7, 18 or 19. 21. 1, 2, 3, 4, 5, 6, wherein the body member is made of a silicon compound.
7,8,9,10,11,12,13,14,15,1
The minute object fixing device according to 6, 17, 18 or 19. 22. The main body member is made of amorphous carbon by using an amorphous carbon deposition method using focused ion beam excitation.
4,5,6,7,8,9,10,11,12,13,1
4, 15, 16, 17, 18, or 19, the minute object fixing device. 23. A method of fixing a micro object on a predetermined substrate, the method comprising: fixing a predetermined length to the substrate, the one end of which is provided substantially parallel to a surface of the substrate. The body member having the body member is deformed by moving the light receiving unit to a focus position of light by receiving light condensed on a light receiving unit formed at a position other than the one end of the body member. , Maintaining a part of the main body member away from the substrate, irradiating the light condensed on the micro object into the gap between the substrate and the main body member, and the micro object at the focal position of the light. To release the deformed state of the main body member and move a part of the main body member that is separated from the substrate so as to be close to the substrate, and to move the minute object between the substrate and the main body member. Fixing method for small objects characterized by fixing between them . 24. A micro-object fixing method for fixing a micro-object on a predetermined substrate, the one end being fixed to the substrate and having a predetermined length provided substantially parallel to a surface on the substrate. A main body member having the main body member is provided, and the other end portion of the main body member is provided with an action portion that holds the micro object between the other end portion and the substrate and fixes the position of the micro object. In addition, at least a part of the main body member between the acting portion and the one end portion is formed of an elastic member, and the condensed light is emitted to the minute object to operate the main body member. Moving the minute object to the focal position of the light so as to insert the minute object between the portion and the substrate, and deforming the body member so that the acting portion of the body member is separated from the substrate. The minute object to the substrate and the main body member. Very small object fixing method characterized by fixing between the working portion.