JP2003211150A5 - - Google Patents
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- JP2003211150A5 JP2003211150A5 JP2002013702A JP2002013702A JP2003211150A5 JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5 JP 2002013702 A JP2002013702 A JP 2002013702A JP 2002013702 A JP2002013702 A JP 2002013702A JP 2003211150 A5 JP2003211150 A5 JP 2003211150A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002013702A JP3734081B2 (ja) | 2002-01-23 | 2002-01-23 | Cmp工程排水処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002013702A JP3734081B2 (ja) | 2002-01-23 | 2002-01-23 | Cmp工程排水処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003211150A JP2003211150A (ja) | 2003-07-29 |
| JP2003211150A5 true JP2003211150A5 (enExample) | 2005-06-02 |
| JP3734081B2 JP3734081B2 (ja) | 2006-01-11 |
Family
ID=27650595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002013702A Expired - Lifetime JP3734081B2 (ja) | 2002-01-23 | 2002-01-23 | Cmp工程排水処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3734081B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5233138B2 (ja) * | 2007-03-20 | 2013-07-10 | 栗田工業株式会社 | 純水製造装置からの濃縮廃水の処理方法および前記濃縮廃水の処理装置。 |
| JP6156678B2 (ja) * | 2012-10-11 | 2017-07-05 | パナソニックIpマネジメント株式会社 | レジスト剥離液の再生方法および再生装置 |
| CN103241885A (zh) * | 2013-05-15 | 2013-08-14 | 绍兴奇彩化工有限公司 | 一种分散染料的酸性废水处理方法 |
| CN113788507B (zh) * | 2021-08-31 | 2023-03-07 | 深圳市金华泰实验室科技发展有限公司 | 一种实验室废液浓缩装置 |
| CN117658257B (zh) * | 2023-11-09 | 2025-09-12 | 北京首创环境科技有限公司 | 高盐废水蒸发结晶处理系统及方法 |
| CN119118406B (zh) * | 2024-09-05 | 2025-07-11 | 上海中发环保工程有限公司 | 基于电催化、hubf厌氧和hfst好氧处理的聚乙二醇综合化学降解装置 |
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2002
- 2002-01-23 JP JP2002013702A patent/JP3734081B2/ja not_active Expired - Lifetime