JP2003209753A - Method and apparatus for measuring amount of electric charge left untransferred in solid-state imaging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To measure an amount of electric charges left untransferred with high level of accuracy even when an output is changed due to an effect other than the amount of electric charges left untransferred. <P>SOLUTION: An arithmetic processing section 32 calculates a subtraction value (C-D) resulting from subtracting an average D of an output of OPB (Optical Black) pixels after horizontal lines in horizontal scanning columns including valid pixels from an average C of an output of OPB pixels after the horizontal lines in the horizontal scanning column not including the valid pixels in a CCD imager 10 and calculates a subtraction value (A-B) resulting from subtracting an average B of an output of OPB pixels before the horizontal line in the horizontal scanning column including the valid pixels from an average A of an output of the OPB pixels before the horizontal lines in the horizontal scanning column not including the valid pixels. Then the arithmetic processing section 32 subtracts further the subtraction value (A-B) from the subtraction value (C-D) to measure the amount of electric charges left untransferred from the subtraction value (C-D)-(A-B). <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer residual measurement method and a measuring apparatus for a solid-state image sensor, and more particularly to a measurement method and a measuring apparatus for measuring a charge transfer residual of a horizontal register in a CCD imager.

[0002]

2. Description of the Related Art In a solid-state image pickup device for converting image pickup light of an object into a signal charge, the signal charge accumulated for each gate is not 100% transferred. In particular, when a large number of signal charges are transferred at high speed like a horizontal transfer register (horizontal transfer section) of a CCD imager, it is important to measure the evaluation of transfer deterioration and transfer residual. Among these, as a transfer residual measurement method, a dark current from an ineffective pixel called an optical black (hereinafter referred to as “OPB”) which is a photodiode covered with a light-shielding film and does not receive light is used as a reference black level. The method of use is being done. In the conventional measuring method, the CCD imager is irradiated with high-intensity light to output the black level of the pre-horizontal OPB provided in front of the photosensor array forming each horizontal line and the photosensor array provided after the photosensor array. By measuring the difference from the output of the black level of the post-horizontal OPB, the transfer residual in the photosensor row, that is, the horizontal scanning row is measured and evaluated.

[0003]

However, in the above-mentioned conventional transfer residual measurement method, before horizontal OPB and after horizontal O.
If the output changes due to an effect other than leaving the transfer to the PB,
There was a problem in that it was not possible to accurately measure the remaining transfer.

The present invention has been made in order to solve such a problem, and can accurately measure the residual transfer even when the output changes due to effects other than the residual transfer before the horizontal OPB and the horizontal OPB. An object of the present invention is to provide a transfer residual measurement method and a measurement device for an image sensor.

[0005]

In order to achieve the above object, the present invention contributes to imaging in a pixel matrix having a plurality of horizontal pixel rows in the vertical scanning direction in which a predetermined number of pixels are arranged in the horizontal scanning direction. A transfer residual measurement method of a solid-state image sensor having an image pickup area made of effective pixels and a non-image pickup area made of invalid pixels covered with a light-shielding film and not contributing to image pickup. A first step of detecting a first output value from an invalid pixel provided, and a second output value from an invalid pixel provided behind the effective pixel in a horizontal scanning row including the effective pixel. A second step, a third step of detecting a third output value from an invalid pixel provided in front of a horizontal scanning row that does not include effective pixels, and A fourth step of detecting a fourth output value from an invalid pixel provided in front of the effective pixel, and subtracting the second output value from the first output value to calculate a first subtracted value. And a sixth step of calculating the second subtraction value by subtracting the fourth output value from the third output value, and the second subtraction from the first subtraction value. And a seventh step of calculating the third subtraction value by subtracting the value, and an eighth step of measuring the transfer residual amount of the signal charge generated in the imaging region by the third subtraction value. Characterize.

Further, according to the present invention, in a pixel matrix having a plurality of horizontal pixel rows in which a predetermined number of pixels are arranged in the horizontal scanning direction in the vertical scanning direction, an image pickup area composed of effective pixels contributing to image pickup and a light shielding film are covered. A non-imaging area of a solid-state image sensor having a non-imaging region made up of invalid pixels that do not contribute to imaging, and a first output from an invalid pixel provided behind in a horizontal scanning row that does not include effective pixels. A first detection unit for detecting a value; a second detection unit for detecting a second output value from an invalid pixel provided behind the effective pixel in a horizontal scanning row including the effective pixel; Third detecting means for detecting a third output value from an invalid pixel provided in front of the horizontal scanning row not included, and an invalid image provided in front of the effective pixel in the horizontal scanning row including the effective pixel. Fourth detecting a fourth output value from
Detecting means, and first subtraction means for subtracting the second output value from the first output value to calculate a first subtraction value,
Subtracting the fourth output value from the third output value to obtain a second
Second subtraction means for calculating a subtraction value of, third subtraction means for subtracting the second subtraction value from the first subtraction value to calculate a third subtraction value, and the third subtraction means And a transfer residual amount measuring means for measuring the transfer residual amount of the signal charges generated in the image pickup region according to the value.

According to the present invention having the above-mentioned structure, the transmitted light is output from the horizontal scanning column having the effective pixel generating the electric charge by the irradiation light and the invalid pixel generating the electric charge by the transmitted light which the irradiation light passes through the light shielding film. By subtracting the output value from the horizontal scanning column having only invalid pixels that generate electric charges, the influence of the transmitted light is canceled, and the transfer residual amount of the electric charges generated in the effective pixels is accurately measured.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 shows a system configuration of a measuring apparatus that realizes a transfer residual measurement method for a solid-state image sensor in the present embodiment. In this embodiment, an interline transfer type CCD imager (solid-state image sensor) 10 is used as a measurement target. In FIG.
A plurality of photosensors (effective pixels) 12 which are arranged two-dimensionally in pixel units and photoelectrically convert incident light to be stored, and are arranged in each vertical column of these photosensors 12 and read out through a read gate 14. An image pickup area 18 is constituted by a vertical transfer register (vertical transfer section) 16 that vertically transfers the signal charges. Further, a horizontal transfer register (horizontal transfer unit) 20 for horizontally transferring the signal charges transferred in the vertical direction is provided adjacent to the imaging region 18.

In the image pickup area 18, for example, a color filter array in which complementary color filters of Ye (yellow), Mg (magenta), Cy (cyan), and G (green) are arranged in pixel units as shown in FIG. Has been done. The signal charges read to the vertical transfer register 16 are sequentially transferred to the horizontal transfer register 20 for each horizontal scanning column. The horizontal transfer register 20 transfers the signal charges for one horizontal scanning column transferred from the vertical transfer register 16 in the horizontal direction. At the output end of the horizontal transfer register 20, for example, an FDA (Floating Diffu
A charge detection unit 22 having a sion amplifier configuration is arranged. The charge detection unit 22 detects the signal charge transferred by the horizontal transfer register 20 and derives it as a voltage signal.

The detection output of the charge detector 22 is C.I. D. S
After the reset noise is reduced by the (correlated double sampling) circuit 24, it is digitized by the A / D converter 28 through the amplifier 26, and the pixel is framed in pixel units with a one-to-one correspondence with each pixel of the imaging region 18. It is stored in the memory 30. The arithmetic processing unit 32 performs arithmetic processing based on the pixel-by-pixel image information stored in the frame memory 30.

FIG. 3 shows the CCD imager 1 in FIG.
The arrangement of the photosensors 12 of 0 is shown. The photosensor 12 in the imaging region 18 receives light and converts it into a signal charge, but a non-imaging region 34 is provided around the imaging region 18, and a photodiode covered with a light shielding film (not shown) is arranged. Has been done. Also, L (1) to L
In each of the n horizontal scanning rows of (n), in front of the rows of the photosensors 12 (on the left side of the imaging area 18), the horizontal front OPB (invalid pixel) 36 including photodiodes of four pixels is provided.
Is provided, and a horizontal rear OPB (ineffective pixel) 38 including a photodiode for 7 pixels is provided after the 12 rows of the photosensors (on the right side of the imaging region 18). Further, two horizontal scanning rows L (1), L are provided above the uppermost photosensor row L (3) of the imaging area 18 (above the imaging area 18).
A vertical front OPB (ineffective pixel) 40 composed of (2) is provided, and the photosensor row L (n−
A vertical rear OPB (ineffective pixel) 42 including one horizontal scanning row L (n) is provided below 1) (below the imaging area 18). In the above description, the horizontal pre-OPB 36
Has been described for four pixels and the post-horizontal OPB 38 for seven pixels, but the present invention is not limited to this numerical value.

Therefore, the horizontal front OPB 36 and the horizontal rear O
The PB 38, the vertical front OPB 40, and the vertical rear OPB 42 do not generate signal charges in response to light reception. That is, in a pixel matrix having a plurality of horizontal pixel rows in which a predetermined number of pixels are arranged in the horizontal scanning direction in the vertical scanning direction, the image pickup area 18 made up of effective pixels contributing to image pickup and the light-shielding film contribute to image pickup. And a non-imaging region 34 including invalid pixels. However, the invalid pixels in the non-imaging region 34 generate a black level electric charge that is a so-called dark current and is not related to light reception. Therefore, the transfer remaining of the horizontal transfer register 20 is obtained from the difference in black level between the horizontal pre-OPB 36 and the horizontal post-OPB 38 in the horizontal scanning direction.

Next, the operation principle for obtaining the transfer remaining of the horizontal transfer register 20 will be described. First, when obtaining the transfer residual of the horizontal transfer register 20, high-luminance light is irradiated to the imaging region 18 in which the color filters of the complementary color filter array shown in FIG. 2 are arranged. When field reading, vertical transfer, and horizontal transfer are performed in this state, if there is no transfer residual, the result is as shown in FIG. 4, and the signal charge QV accumulated in the vertical transfer register 16 under all the gates is in the vertical direction. After being transferred, the signal charge Q is transferred to the horizontal transfer register 20.
When stored as H, there is no signal charge that overflows in the effective pixel, so no output appears in any pixel in the post-horizontal OPB 28. Therefore, the OPB 36 before horizontal and the OPB after horizontal
38 has almost the same output, and the difference is "0"
Close to.

On the other hand, when there is a transfer remaining, as shown in FIG. 5, the signal charge QV accumulated in the vertical transfer register 16 is transferred only under a certain gate, and the signal charge is transferred to the horizontal transfer register 20. When accumulated as QH, the signal charge QO overflowing the effective pixels moves backward, so that the signal charge of the horizontal transfer register 20 becomes 100.
%, The overflowed charge QO is accumulated in the OPB 38 after horizontal. Therefore, after horizontal OPB38
The transfer remaining is obtained by subtracting the output of the horizontal pre-OPB 36 from the output of. The actual calculation method is shown in FIG.
As shown in, the second bit (specific one invalid pixel) of the horizontal OPB 36 and the second bit (specific one invalid pixel) of the horizontal OPB 38 correspond to the vertical imaging area, that is, the horizontal scanning row L ( 3) to the horizontal scanning row L (n-1), the average value is obtained, the difference E between the average values is obtained, and the difference can be compared with the standard value to make the determination.

Here, when an output appears due to the light transmission other than the untransferred light in the pre-horizontal OPB 36 or the post-horizontal OPB 38, it becomes as shown in FIG. That is,
OPB36 in front of the horizontal as much as the charge increased by light transmission
The output value of 1 increases by Δ1 and the output value of the horizontal OPB 38 increases by Δ2. Even in this case, horizontal front O
If the PB36 and the post-horizontal OPB38 have the same light transmission amount, that is, if the Δ1 level and the Δ2 level are the same, the transfer residual amount can be measured by obtaining the difference E between the average values. Are not always the same. Therefore, even if the difference E of the average value is obtained, the difference (Δ2-Δ1) of the light transmission amount is included in the difference E, and thus the transfer residual amount cannot be accurately measured.

Therefore, it is necessary to determine the amount of light transmission.
The calculation method is shown in FIG. In FIG. 8, the vertical front OP
Since all the photodiodes in the horizontal direction of B40 and the OPB42 after vertical are shielded from light, no charge is accumulated and no transfer residue occurs. That is, the vertical front OP
B40 or OPB42 after vertical and OPB3 before horizontal
6 or if the output appears on the OPB 38 after horizontal,
It is a component that only transmits light. The amount before horizontal OPB
36. By taking the difference from the horizontal OPB 38, pure transfer remaining data can be obtained.

FIG. 9 is a block diagram showing the internal structure of the arithmetic processing section 32 in the measuring apparatus shown in FIG. In this figure, a CPU (first to fourth detecting means, first to third subtracting means, transfer remaining measuring means) 322 is a central arithmetic unit for executing arithmetic processing, and its system bus has a program ROM 324. The memory reading unit 326, the work RAM 328, and the measurement result output unit 330 are connected. In the program ROM 324, a program for measurement processing of transfer remaining is stored in advance, and a reference value Ef of transfer remaining amount and other initial values are stored in advance. The memory reading unit 326 reads the output value of each pixel stored in the frame memory 30 of FIG. That is, since the signal charge amount transferred from each pixel is converted into a voltage value and stored in the frame memory 30 as an output value, the output value is read according to the read command from the CPU 322. The work RAM 328 is provided with a plurality of areas including registers A to F and a pointer i, and the CPU 322 controls writing and reading of data in each area. Measurement result output unit 330
Outputs an OK or NG measurement result to a display device, a printer, or a peripheral device (not shown) such as an external memory according to an output command from the CPU 322.

Next, in order to realize the transfer residual measurement method of the solid-state image pickup device of the present invention, the CPU 32 of the arithmetic processing unit 32.
Regarding the measurement processing program executed by No. 2, the flowchart shown in FIGS. 10 to 12 and the C shown in FIG.
Horizontal scan lines L (1) to L in the CD imager 10
This will be described in detail with reference to the n pixel array of (n).

In FIG. 10, the horizontal OPB of L (1)
Read the output value of the frame memory from the frame memory and register it
(Step S12). Next, the output value of the horizontal OPB of L (2) is read from the frame memory and stored in the register C2 (step S14). Then L
The output value of the horizontal OPB of (n) is read from the frame memory and stored in the register Cn (step S1).
6). After that, the average value of the output values of the registers C1, C2, and Cn is calculated, and the average value (first output value) is stored in the register C (step S18).

Next, the pointer i is set to 3 (step S20), and the loop processing of steps S22, S24 and S26 is repeatedly executed while incrementing the value of i. That is, the output value of the horizontal OPB of L (i) is read from the frame memory and stored in the register Di (step S22), and the value of i is incremented (step S24). Then, it is determined whether or not the incremented value of i has reached n (step S26). When the value of i has not reached n, that is, the value of i is (n-
1) If it is less than or equal to L in step S22
The output value of the horizontal OPB of (i) is read from the frame memory and stored in the register Di. When the value of i reaches n, the average value of the output values of the registers D3 to D (n-1) is calculated, and the average value (second output value) is stored in the register D (step S28). ).

Next, in FIG. 11, the output value of the horizontal pre-OPB of L (1) is read from the frame memory and stored in the register A1 (step S30). Then L
The output value of the horizontal pre-OPB of (2) is read from the frame memory and stored in the register A2 (step S3).
2). Next, the output value of the horizontal pre-OPB of L (n) is read from the frame memory and stored in the register An (step S34). After this, registers A1, A2 and An
The average value of the output values is calculated and the average value (third output value) is stored in the register A (step S36).

Next, the pointer i is set to 3 (step S38), and the loop processing of steps S40, S42 and S44 is repeatedly executed while incrementing the value of i. That is, the output value of the pre-horizontal OPB of L (i) is read from the frame memory and stored in the register Bi (step S40), and the value of i is incremented (step S42). Then, it is determined whether or not the incremented value of i has reached n (step S44). When the value of i has not reached n, that is, the value of i is (n-
1) If less than or equal to L in step S40
The output value of the horizontal pre-OPB of (i) is read from the frame memory and stored in the register Bi. When the value of i reaches n, the average value of the output values of the registers B3 to B (n-1) is calculated, and the average value (fourth output value) is stored in the register B (step S46). ).

Next, in FIG. 12, the value of the register D is subtracted from the value of the register C, and the subtracted value (first subtracted value) is stored in the register E1 (step S48).
Also, subtract the value of register B from the value of register A,
The subtracted value (second subtracted value) is stored in the register E2 (step S50). Next, the value of the register E2 is subtracted from the value of the register E1, and the subtracted value (third subtracted value) is stored in the register E (step S52). After that, the value of the register E is subtracted from the reference value Ef of the transfer residual amount read from the program ROM, and the subtracted value is stored in the register F (step S54).

Then, it is determined whether or not the value of F is 0 or more (step S56). That is, it is determined whether or not the measured transfer residual amount does not exceed the reference value of the transfer residual amount. When the value of F is 0 or more and the measured transfer residual amount does not exceed the reference value of the transfer residual amount, the measurement result OK is output (step S58). On the other hand, the value of F is 0
If it is smaller and the measured transfer residual amount exceeds the reference value of the transfer residual amount, the measurement result NG is output (step S60).

As described above, in the vertical direction, since the horizontal scanning lines L (1), L (2) and L (n) do not include effective pixels, the predetermined number of pixels in these horizontal scanning lines are All are composed of invalid pixels. The horizontal scanning lines L (3) to L (n-1) include effective pixels. Therefore, after the horizontal OP in the horizontal scanning row that does not include effective pixels
A subtraction value (C-D) is calculated by subtracting the average value D of the horizontal OPB38 output in the horizontal scanning row including the effective pixel from the average value C of the output of B38, and the horizontal value of the horizontal scanning row that does not include the effective pixel is calculated. A subtraction value (A−B) is calculated by subtracting the average value B of the outputs of the horizontal pre-OPB 38 of the horizontal scanning row including the effective pixel from the average value A of the outputs of the previous OPB 38. Next, the subtraction value (AB) is further subtracted from the subtraction value (CD),
The transfer residual amount is measured by the subtracted value (CD)-(AB). Therefore, even if the output changes in the pre-horizontal OPB and the post-horizontal OPB due to effects other than the transfer remaining, the transfer remaining amount can be accurately obtained.

In the above embodiment, the measurement of the residual charge transfer amount in the interline CCD imager has been described. However, the frame interline CCD imager provided with the frame memory adjacent to the pixel matrix. The present invention can also be applied to the measurement of the residual transfer amount of the electric charge in. The present invention can also be applied to the measurement of the residual transfer amount of electric charges in solid-state image pickup devices other than CCD imagers.

[0027]

According to the present invention, even if the output changes due to an influence other than the transfer residual amount, the transfer residual amount can be accurately obtained.

[Brief description of drawings]

FIG. 1 is a diagram showing a system configuration of a transfer residual measurement device according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a configuration of a color filter provided in an image pickup area of the CCD imager of FIG.

FIG. 3 is a diagram showing a configuration of horizontal scanning rows of an image pickup region and a non-image pickup region in the CCD imager of FIG.

FIG. 4 is a diagram showing an operation of a horizontal transfer register in the CCD imager of FIG. 1 when there is no transfer remaining.

5 is a diagram showing an operation of a horizontal transfer register when there is a transfer remaining in the CCD imager of FIG.

FIG. 6 is a diagram showing an operation of residual transfer measurement using only the OPB of a horizontal scanning row including effective pixels when the CCD imager of FIG. 1 is not affected by light transmission.

7 is a diagram showing an operation of transfer residual measurement using only the OPB of the horizontal scanning row including effective pixels when the CCD imager of FIG. 1 is affected by light transmission.

8 is a diagram showing an operation of residual transfer measurement using OPBs of a horizontal scanning row including effective pixels and a horizontal scanning row not including effective pixels when the CCD imager of FIG. 1 is affected by light transmission. .

FIG. 9 is a block diagram showing an internal configuration of an arithmetic processing unit shown in FIG.

10 is a flowchart showing a procedure of a measurement processing program executed by the CPU of FIG.

11 is a flowchart showing the procedure of a measurement processing program following FIG.

FIG. 12 is a flowchart showing a procedure of a measurement processing program following FIG. 11.

[Explanation of symbols]

10 ... CCD imager, 16 ... Vertical transfer register, 18 ... Imaging area, 20 ... Horizontal transfer register, 3
0 ... Frame memory, 32 ... Arithmetic processing unit, 34 ...
Non-imaging area, 36 ... OPB before horizontal, 38 ... O after horizontal
PB, 40 ... vertical front OPB, 42 ... vertical rear OPB,
322 ... CPU, 324 ... Program ROM.

Claims (14)

[Claims] 1. In a pixel matrix having a plurality of horizontal pixel rows in which a predetermined number of pixels are arranged in the horizontal scanning direction in the vertical scanning direction, an imaging region made up of effective pixels that contribute to the imaging and a light-shielding film are covered for imaging. A transfer residual measurement method for a solid-state image sensor having a non-imaging region made up of non-contributing invalid pixels, wherein a first output value from an invalid pixel provided behind in a horizontal scanning row that does not include effective pixels is detected. A first step; a second step of detecting a second output value from an ineffective pixel provided behind the effective pixel in a horizontal scanning row including the effective pixel; and a horizontal scanning row not including the effective pixel. A third step of detecting a third output value from an ineffective pixel provided in front, and a fourth step from an ineffective pixel provided in front of the effective pixel in a horizontal scanning row including the effective pixel. A fourth step of detecting an output value, the by subtracting the second output value from the first output value 1
And a second step of subtracting the fourth output value from the third output value.
A sixth step of calculating a subtraction value of the second subtraction value, and a third step of subtracting the second subtraction value from the first subtraction value.
Solid-state image pickup device, comprising: a seventh step of calculating a subtraction value of the above; and an eighth step of measuring an untransferred amount of signal charges generated in the imaging region by the third subtraction value. Transfer remaining measurement method. 2. The first to fourth steps detect the first to fourth output values from a specific one invalid pixel among a plurality of invalid pixels. 2. The transfer residual measurement method of the solid-state image sensor according to 1. 3. The second step and the fourth step are characterized in that an average value of output values of invalid pixels in a plurality of horizontal scanning rows is detected as the second and fourth output values. The transfer residual measurement method of the solid-state image sensor according to claim 1. 4. The first to fourth steps include detecting the first to fourth output values of the invalid pixel after the effective pixel is irradiated with high-luminance light. The transfer residual measurement method of the solid-state image sensor according to claim 1. 5. The fifth step and the sixth step include the first and the sixth steps for canceling an influence of light transmission that occurs in an invalid pixel after the effective pixel is irradiated with high-intensity light. The transfer residual measurement method for a solid-state imaging device according to claim 1, wherein a subtraction value of 2 is calculated. 6. The eighth step is characterized by measuring a transfer residual amount in the horizontal transfer section after the signal charge generated in the imaging region is transferred to the horizontal transfer section by the vertical transfer section. The transfer residual measurement method of the solid-state image sensor according to claim 1. 7. The residual transfer measuring method for a solid-state image pickup device according to claim 1, wherein the residual transfer amount of the CCD imager is measured. 8. A pixel matrix having a plurality of horizontal pixel rows in which a predetermined number of pixels are arranged in the horizontal scanning direction in the vertical scanning direction is covered by a light-shielding film and an imaging area made up of effective pixels that contribute to the imaging. A transfer residual measurement device for a solid-state imaging device having a non-imaging region made up of non-contributing invalid pixels, wherein a first output value from an invalid pixel provided behind in a horizontal scanning row that does not include effective pixels is detected. First detection means, second detection means for detecting a second output value from an ineffective pixel provided behind the effective pixel in a horizontal scanning row including the effective pixel, and horizontal scanning not including the effective pixel Third detecting means for detecting a third output value from an invalid pixel provided in front of the column, and fourth detector from an invalid pixel provided in front of the effective pixel in a horizontal scanning column including the effective pixel. And fourth detection means for detecting an output value, the first by subtracting the second output value from the first output value
First subtraction means for calculating a subtraction value of the second output value, and second subtraction means for subtracting the fourth output value from the third output value.
Second subtraction means for calculating a subtraction value of the second subtraction value, and a second subtraction value for subtracting the second subtraction value from the first subtraction value.
Solid-state imaging, comprising: a third subtraction unit that calculates a subtraction value of the transfer residual amount; and a transfer residual amount measuring unit that measures the transfer residual amount of the signal charge generated in the imaging region by the third subtractive value. Measurement device for residual transfer of elements. 9. The first to fourth detecting means detect the first to fourth output values from a specific one invalid pixel among a plurality of invalid pixels. The transfer residual measurement device of the solid-state image sensor according to claim 8. 10. The second detection means and the fourth detection means detect an average value of output values of invalid pixels in a plurality of horizontal scanning rows as the second and fourth output values. The transfer residual measurement device for a solid-state image sensor according to claim 8. 11. The first to fourth detecting means detect the first to fourth output values of the invalid pixel after the effective pixel is irradiated with high-luminance light. The transfer residual measurement device for a solid-state image sensor according to claim 8. 12. The first subtraction unit and the second subtraction unit cancel the influence of light transmission that occurs in an invalid pixel after the effective pixel is irradiated with high-intensity light. And the second subtraction value is calculated, and the transfer residual measurement device of the solid-state image sensor according to claim 8. 13. The transfer residual amount measuring means measures the transfer residual amount in the horizontal transfer unit after the signal charge generated in the imaging region is transferred to the horizontal transfer unit by the vertical transfer unit. The transfer residual measurement device of the solid-state image sensor according to claim 8. 14. The solid-state image sensor transfer residual amount measuring apparatus according to claim 8, wherein the transfer residual amount of the CCD imager is measured.