JP2003202219A - Surface property profile measuring method and program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-speed profile measuring method with a profile probe for measuring the surface property of an object. <P>SOLUTION: The invention provides a step S40 for calculating the measurement offset to the measurement reference position of the profile probe with respect to the surface property of the object when measuring the object, a step S50 for inputting the surface contour data that represents the object's surface contour, a step S70 for calculating the profile measuring orbit just spaced by the offset outwards in the approximated normal direction of the object's surface contour for the surface contour data, and a step S80 for the orbit profile measurement of the object by making the profile probe moved relatively along the profile measuring orbit. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and program for measuring a surface texture such as roughness, waviness, contour, and roundness of a measured object by a scanning probe, and more particularly, along a surface contour of the measured object. The present invention relates to a surface texture copying measuring method and program for performing measurement by relatively moving a copying probe.

[0002]

BACKGROUND ART As a measuring machine for measuring the surface texture of an object to be measured, a roughness measuring machine, a contour measuring machine, a roundness measuring machine, a three-dimensional measuring machine and the like are known. When measuring with these measuring machines, the contact or non-contact type measurement sensor is moved along the reference guide, and the surface texture of the measurement object is determined from the positional relationship between the measurement object and the measurement sensor placed on the surface plate. Is being measured. For example, in the roughness measuring machine disclosed in Japanese Patent Application No. 2001-177278, a contact type detector is driven along an X-axis guide to cause a slight vertical displacement of the tip of the detector due to the unevenness of the surface of the object to be measured. From the (Z-axis displacement) output and the X-axis detector output for detecting the displacement of the detector in the X-axis direction, the roughness of the object to be measured,
It is possible to measure waviness or contour shape. Since the detector in this case is driven along the X-axis guide and outputs according to the unevenness (Z-axis displacement) of the object to be measured, it functions as a contact-type 1-axis scanning probe, and the measurement result is It is obtained as two-dimensional scanning measurement data of the Z axis. This scanning measurement is a guided scanning measurement because the detector is driven by the guide.

As another example, FIG. 5 shows the scanning probe 118 as a Z-axis spindle 117 of the coordinate measuring machine 100.
It shows an example in which it is attached to the tip of the. The coordinate measuring machine 100 is configured as follows. A surface plate 112 is placed on the vibration isolation table 111 so that its upper surface is a base surface and is aligned with a horizontal plane.
Beam supports 113a, 113 installed upright from both side ends of the
A beam 114 extending in the X-axis direction is supported at the upper end of b. The lower end of the beam support 113a is driven in the Y-axis direction by the Y-axis drive mechanism 115. The lower end of the beam support 113b is supported by an air bearing on the surface plate 112 so as to be movable in the Y-axis direction. The current movement positions of the beam supports 113a and 113b are detected by the Y-axis scale 245 (see FIG. 6).

The beam 114 supports a column 116 extending in the vertical direction (Z-axis direction). The column 116 is driven in the X-axis direction along the beam 114. Column 116
The current movement position of is detected by the X-axis scale 244 (see FIG. 6). The column 116 has a Z-axis spindle 1
17 is provided so as to be driven in the Z-axis direction along the column 116. The current movement position of the Z-axis spindle 117 is detected by the Z-axis scale 246 (see FIG. 6).

At the lower end of the Z-axis spindle 117, as an example, a scanning probe 118 equipped with a contact type probe (contact ball) 121 is mounted. This scanning probe 11
8 measures the object to be measured placed on the surface plate 112.
For the X-axis scale 244, the Y-axis scale 245, and the Z-axis scale 246, for example, an optical linear scale or the like is used. As shown in the block diagram of FIG. 6, the scanning probe 118 has an X-axis sensor 251, a Y-axis sensor 252, and a Z-axis sensor 253 built therein.
The amount of displacement is output according to the displacement in the Y-axis and Z-axis directions.

The drive unit 260 includes an X-axis drive mechanism 105.
An X-axis drive circuit 261, a Y-axis drive circuit 262 that drives the Y-axis drive mechanism 115, a Z-axis drive circuit 263 that drives the Z-axis drive mechanism 125, and an X-axis counter 264 that counts the output of the X-axis scale 244. , A Y-axis counter 265 that counts the output of the Y-axis scale 245, a Z-axis scale 24
Z-axis counter 266, X-axis sensor 2 that counts the output of 6
51 includes an X-axis P counter 267 for counting the output of the Y-axis sensor 252, a Y-axis P counter 268 for counting the output of the Y-axis sensor 252, and a Z-axis P counter 269 for counting the output of the Z-axis sensor 253, each of which is a computer. 270.
Therefore, each of the X-axis, Y-axis, and Z-axis of the coordinate measuring machine 100 can be positioned at an arbitrary position at an arbitrary speed according to a command from the calculator 270. In addition, the computer 270 uses each counter 2
By inputting the count values of 64 to 269, it is possible to know the current position of each of the X-axis, Y-axis, and Z-axis of the spindle 217 and the current displacement of the probe 121 of the scanning probe 118. .

The computer 270 is similar to a known computer except that it has a connection device (not shown) for exchanging information with the drive device 260, and is the same as a central processing unit, a storage device, an input device, a display device, a printing device, and an output device. The coordinate measuring machine 1 that is equipped with a device and uses a program stored in a storage device.
00 error correction, scanning probe data collection, error calculation, error display, error function, correction data output, and other calibration processing and scanning measurement processing are controlled automatically or as required. Semi-automatic control or manual control. The program and various data can be stored in the storage device using the input device, and can be externally output using the output device. Calculator 270 and drive unit 2
Information exchange with 60 is normally performed by wire communication using a transmission control procedure such as IEEE 488, but wireless communication or optical communication may be used as necessary.

An example of the scanning probe 118 used here is a probe disclosed in Japanese Patent Laid-Open No. 5-256640 (see FIG. 7). This probe includes an X slider, a Y slider, and a Z slider, which are movable in directions orthogonal to the base.
A stylus is supported via a slider, and pressurized air is sent to the sliding portion between the base and the three sliders to form an air bearing, thereby forming a guide mechanism with extremely little friction. There is. Also, this base and Z slider,
Three sensors, a Z sensor, a Y sensor, and an X sensor, which detect the relative displacements of the Z slider and the Y slider and the Y slider and the X slider, respectively, are provided, and the three-dimensional displacement of the stylus is performed by these three sensors. It is possible to find the quantity.

For these sensors, for example, an absolute optical linear scale is used. Therefore, with the probe (contact ball) at the tip of the stylus 24 of this scanning probe kept in contact with the surface of the measured object, the scanning probe is moved relative to the measured object in the surface direction of the measured object. Then, since the tracing stylus is displaced along the contour shape of the surface of the object to be measured, the contour shape data of the object to be measured can be continuously collected. In this case, the contour shape data can be obtained by synthesizing the displacement outputs of the three sensors output from the scanning probe and the linear scale value for measuring the displacement of the drive mechanism of the coordinate measuring machine, thereby obtaining the orthogonality. 3 axes (X axis, Y
Axis, Z axis) to obtain three-dimensional scanning measurement data.
The normal stop position (return position) of the X slider, Y slider, and Z slider of the scanning probe when the probe is not in contact with the object to be measured is the origin position of each absolute sensor.

[0010]

The measurement of the object to be measured by these measuring machines is performed as follows. First, in the case of guide scanning measurement using a roughness measuring machine or the like, determine the measurement start point and measurement end point of the DUT, and within that measurement range, the unevenness of the DUT surface does not exceed the measurement range of the detector. like,
After adjusting the posture of the object to be measured, the detector is brought into contact with the surface of the object to be measured, and the detector is driven along the X-axis guide to perform the measurement. As described above, since the detector is driven along the X-axis guide, the surface direction of the object to be measured needs to match the guide direction of the X-axis guide. If the measuring range of the detector is narrow, it is necessary to adjust the posture more strictly, and there is a problem that the measuring efficiency is reduced.

Further, in the case of a three-dimensional measuring machine, Japanese Patent Laid-Open No. 3-84
As disclosed in Japanese Patent No. 408, in addition to a method of performing scanning measurement while simultaneously controlling each axis so that the direction of the probe with respect to the measurement reference line of the work is constant, there is a method disclosed in Japanese Patent Laid-Open No. 63-131016 or JP-A-63-131017 or JP-A-8-178646
As disclosed in Japanese Unexamined Patent Publication No. JP-A No. 2003-242, the constant amount of the scanning probe and that of the scanning probe are kept constant so that the pushing amount of the tracing probe to the measured object (for example, the displacement output combined amount of the X-, Y-, and Z-axis sensors) becomes substantially constant. There is a method of performing scanning measurement by controlling the relative positional relationship of the measurement object. However, while these scanning measurement methods (so-called autonomous scanning measurement methods) have the advantage of being able to measure the surface texture of an object whose contour shape is unknown, on the other hand, the posture of the scanning probe and the amount of pushing of the probe are not measured. It is difficult to improve the measurement efficiency because the measurement speed cannot be increased because it is necessary to perform constant control while constantly grasping and judging the positional relationship with the measurement object and searching for the surface contour of the measurement object. There was a problem.

[0012]

In order to solve the above problems, a surface texture scanning measuring method according to the present invention is a surface texture scanning measuring method for measuring a surface texture of a workpiece by a scanning probe. When measuring, the step of calculating the measurement offset to the measurement reference position of the scanning probe for the surface contour of the object to be measured, the step of inputting surface contour data indicating the surface contour of the object to be measured, With respect to the surface contour data, a step of calculating a scanning measurement trajectory separated by the measurement offset to the outside in a direction substantially normal to the surface contour of the object to be measured, and a relative movement of the scanning probe along the scanning measurement trajectory. And a step of measuring the object to be measured by following a trajectory.

Further, the present invention further comprises a step of setting an appropriate limit of displacement output of the scanning probe when measuring the object to be measured in the above-mentioned surface texture scanning measuring method, wherein in the measuring step, When the displacement output of the scanning probe exceeds the aptitude limit, it is preferable to perform an autonomous scanning measurement in which the displacement output of the scanning probe measures the surface contour. Also,
The present invention, in the surface texture scanning measuring method described above, when performing the autonomous scanning measurement in the measuring step, if the separation distance from the measurement trajectory of the measurement reference position is within a predetermined value, in the autonomous scanning measurement. Instead, it is preferable to perform the trajectory tracking measurement. Further, the present invention, in the above-described surface texture scanning measuring method, further comprises a step of setting an appropriate limit of displacement output of the scanning probe when measuring the object to be measured, in the measuring step, the scanning probe It is preferable to correct the scanning measurement trajectory by correcting the measurement offset so that the displacement output of the scanning probe is within the appropriate limit when the displacement output exceeds the appropriate limit.

Further, according to the present invention, in the above-mentioned surface texture scanning measuring method, it is preferable that the surface contour data is design data of the object to be measured. Further, in the present invention, in the above-mentioned surface texture scanning measuring method, it is preferable that the surface contour data is measurement data obtained by measuring a reference master of the object to be measured. Further, it is preferable that the surface texture scanning measurement program according to the present invention is a surface texture scanning measurement program that causes a computer to execute the method. By doing so, for example, it becomes easy to use an inexpensive general-purpose computer to cause the computer to execute the program, and it is possible to greatly promote the use of the present invention.

[0015]

Preferred embodiments of the present invention will be described below with reference to the drawings. In all the drawings, the same reference numerals represent the same constituent elements. Further, the scanning probe 118 used in all the following embodiments is provided with a spherical probe (contact ball) 121 at the tip of the stylus, which makes contact with the object to be measured W for measurement.
The Z-axis spindle 117 of the coordinate measuring machine 100 shown in FIG.
It is used by being attached to the lower end of the.

FIG. 1 shows a surface texture scanning measuring method according to a first embodiment of the present invention. First, the processing is started in S10, and then, in S20, the scanning probe 118 is attached to the lower end of the Z-axis spindle 117, and the object to be measured W is placed on the surface plate 11.
Install in 2. After that, in S30, the scanning probe 118 measures the reference sphere 120 having a known radius installed on the surface plate, and the scanning probe 118 is calibrated. Specifically, the tracing stylus 121 is brought into contact with the reference sphere 120, the measurement is performed at three or more places, the center coordinates of the reference sphere 120 are obtained, and the stylus is calculated from the center coordinates and the known radius of the reference sphere 120. The radius r of 121 and the center coordinates (measurement reference position) when the tracing stylus 121 is at the return position are obtained, and the scanning probe 118 is calibrated. That is, by the calibration processing of the scanning probe, the X, Y, and Z axis counters 264,
The values of 265 and 266 are calibrated so as to indicate the center coordinates (measurement reference position) of the tracing stylus 121.

Next, in S40, the measurement offset is calculated. This measurement offset Q is Q = r from the radius r of the tracing stylus 121 and the pushing amount Δr of the tracing stylus 121 to the object to be measured.
-Calculate as Δr. Here, the radius r is a unique value determined by the individual scanning probe 118 as determined in S30, and the pushing amount Δr is the scanning probe when the probe 121 is pushed into the measured object W by an appropriate amount. 5 shows a combined value of displacement amounts of the displacement outputs (outputs of the X-, Y-, and Z-axis P counters) of the respective axes from the origin position. That is, the measurement offset Q
Indicates the distance from the center position (measurement reference position) of the probe 121 during the scanning measurement to the surface contour of the object W to be measured. This indicates the apparent radius of the tracing stylus 121.

Next, in S50, the surface contour data of the object to be measured W is input. This surface contour data is design data (for example, CAD data) when the object W to be measured is designed.
Alternatively, the measurement data obtained by measuring the reference master of the object to be measured is input from an input device (for example, a magnetic tape input device) of the computer 270, or is input using an input device such as a keyboard. Here, since the workpiece W is usually a machined workpiece, a machining tolerance is set for the surface contour shape. The reference master is, for example, finished to have a median value of this tolerance. Say the work done.

Then, in S60, the characteristic portion of the object to be measured W is measured, the position and orientation of the object to be measured W installed on the surface plate 112 are obtained, and the object coordinate system is set. After that, collation calibration is performed so that the coordinate system of the surface contour data matches the coordinate system of the object to be measured. More specifically, X, Y, Z
The values of the axis counters 264, 265, 266 are collated and calibrated so as to indicate the center coordinates (measurement reference position) of the tracing stylus 121 when the tracing stylus 121 is at the return position in the coordinate system of the surface contour data. Here, a hole center position, a plane coordinate value, a spherical center position, or the like is used as the characteristic portion of the object to be measured W. Generally, a design reference point when the object to be measured W is designed. Is preferably used.

Next, in S70, a scanning measurement trajectory M for the surface contour data separated by the measurement offset to the outside of the surface contour of the object to be measured is calculated.
For example, when measuring a scanning measurement point T of a spherical object to be measured W having a radius R, as shown in FIGS. 4 (a) and 4 (b), only a measurement offset Q is applied to the outside of the scanning measurement point T in the normal direction. The separated scanning measurement trajectory M is calculated. In this example, a sphere is shown as the object to be measured W, but the geometric shape may be arbitrary, or a combination of a plurality of geometric shapes may be used.

Then, in S80, the measurement reference position (X, Y, Z axis counter 26 of the scanning measurement probe 118).
The values of 4, 265, and 266 are moved along the scanning measurement trajectory M, and the scanning probe 118 is moved to perform the trajectory scanning measurement of the scanning measurement point T of the object to be measured W. However, in this trajectory scanning measurement, since the radius of the tracing stylus 121 is r (> measurement offset Q), the center of the tracing stylus 121 does not actually move along the tracing measurement trajectory M, but By performing the control, the tracing stylus 121 is pushed (displaced) with respect to the scanning probe main body, and the optimum pushing amount Δr
Trajectory scanning measurement is performed while maintaining.

In this measurement, for example, X, Y, Z axis P counters 267, 268, 269 and X,
The values of the Y and Z axis counters 264, 265 and 266 are sampled and stored / stored. After the end of sampling, the values of the X-axis P counter 267 and the X-axis counter 264, the values of the Y-axis P counter 268 and the Y-axis counter 265,
By combining the values of the Z-axis P counter 269 and the Z-axis counter 266, the scanning measurement value of the scanning measurement point T can be obtained. Since the coordinate system of this scanning measurement value matches the coordinate system of the surface contour data, the two are collated to calculate the error. Then, in S90, all the measurement processes are completed.

According to the first embodiment shown in FIG. 1,
It has the following effects. (1) A scanning measurement trajectory is calculated based on the surface contour data of the object to be measured, and the scanning probe 1 is along the scanning measurement trajectory.
Since the trajectory scanning measurement of the object to be measured W is performed by moving 18 relatively, the autonomous scanning measurement speed (for example, 20 when measuring while scanning the surface contour by the displacement output of the scanning probe).
Since it is not necessary to search for the surface contour, it is much faster (eg, 100 mm / se) than that of (mm / sec).
The measurement can be performed in c), and the measurement efficiency is dramatically improved. (2) Since the measurement offset Q is calculated from the radius r of the tracing stylus 121 of the scanning probe 118 and the optimum pushing amount Δr, and the scanning measurement trajectory M is calculated using this measurement offset Q, the optimum scanning measurement trajectory can be calculated. , The accuracy of scanning measurement is improved.

(3) Since the coordinate system is collated and the collation calibration is performed so that the coordinate system of the object to be measured coincides with the coordinate system of the surface contour data, when the object W to be measured is installed on the surface plate 112, Restrictions on installation conditions such as position conditions and posture conditions can be eliminated, and measurement setup can be shortened. (4) Since design data can be used as the surface contour data of the object to be measured W, the input processing of the surface contour data can be simplified, the measurement setup can be shortened, and the accuracy of the surface contour data can be improved. The accuracy of the scanning measurement track M is improved, and the scanning measurement accuracy is improved. (5) Since the master measurement data can be used as the surface contour data of the object to be measured W, the error collation with the master becomes easy and accurate. More specifically, for example, in a mating die, the male die is used as a master to perform scanning measurement, and if this is used as surface contour data, it is possible to perform more accurate measurement in the female die scanning measurement. It becomes easy to judge the quality.

Next, FIG. 2 shows a surface texture scanning measuring method according to a second embodiment of the present invention. Since S110 to S140 are the same as S10 to S40 in FIG. 1, description thereof will be omitted. In S150, the suitability limit for scanning measurement is set. The appropriate limit is the individual displacement limit of the X, Y, and Z axis P counters when the tracing stylus 121 is pushed into the object to be measured W and the tracing stylus 121 is displaced with respect to the scanning probe body in the scanning measurement. And the displacement limit of the combined displacement of these three axes (the square root of the squared sum of the individual displacements of the X-, Y-, and Z-axis P counters). This aptitude limit is usually Δr
It is set on both sides (both the limit of deeper pushing and the limit of shallower pushing) like + L and Δr-L, but may be set on only one side like Δr + L or Δr-L. .

S160 to 180 are S50 in FIG.
To S70, the description thereof will be omitted. S19
0, the measurement reference position of the scanning measurement probe 118 (center position of the probe 121 = X, Y, Z axis counters 264, 2
(Values of 65 and 266) are moved along the scanning measurement trajectory M to start the trajectory scanning measurement of the scanning measurement point T of the workpiece W. Then, in S200, it is checked whether or not the displacement output value of each of the X, Y, and Z axis P counters of the scanning probe 118 or a combined value thereof exceeds an appropriate limit. To S210, and if not exceeded, to S220. The limit check in S200 is
When the autonomous scanning measurement described later is performed, the measurement reference position (X, Y, Z axis counter 26 of the scanning probe 118).
(Values of 4, 265, 266) are deviated from the scanning measurement trajectory M, and depending on whether or not the deviated amount exceeds + L or -L, if it exceeds, S210
If not, the center (measurement reference position) of the tracing stylus 121 of the scanning measurement probe 118 is positioned on the scanning measurement track M, and then the process branches to S220.

When S210 is executed, autonomous scanning measurement is performed. When this autonomous scanning measurement is executed, the X-axis drive is performed so that the displacement output values of the X-, Y-, and Z-axis P counters of the scanning probe 118 and their combined values become the optimum pushing amount Δr. Circuit 261, Y-axis drive circuit 26
2. Since the measurement is performed while controlling the Z-axis drive circuit 263 to search the surface contour of the object to be measured, the scanning measurement trajectory M is ignored. Various known techniques can be used for the autonomous scanning measurement here. If S220 is executed,
Similar to S80 in FIG. 1, the measurement reference position (X, Y, Z axis counters 264, 265, 26 of the scanning measurement probe 118 is determined.
The scanning probe 1 so that the value of 6) follows the scanning measurement trajectory M.
18 is moved to perform the trajectory profile measurement of the profile measurement location T of the object to be measured W.

Then, in S230, it is checked whether or not all the scanning measurement points T of the object to be measured W have been measured. If the measurement is not completed, the process branches to S200, and if the measurement is completed, the scanning measurement end process is performed in S240. That is, S24
At 0, the values of the X-axis P counter 267 and the X-axis counter 264, the values of the Y-axis P counter 268 and the Y-axis counter 265,
By combining the values of the Z-axis P counter 269 and the Z-axis counter 266, respectively, the scanning measurement value of the scanning measurement point T is obtained. Since the coordinate system of this scanning measurement value matches the coordinate system of the surface contour data, the two are collated to calculate the error. Then, in S250, all the measurement processes are completed.

According to the second embodiment shown in FIG. 2,
In addition to the effects (1) to (5) in the first embodiment, there are the following effects. (6) An appropriateness limit is set for the amount of pushing of the probe 121 into the workpiece W in the scanning measurement, and if the result of the determination of the suitability limit is that the pushing is too deep or too shallow, switch to autonomous scanning measurement. Therefore, even if the surface contour data and a part of the contour shape of the object to be measured W are different, the scanning measurement can be accurately performed. (7) The measurement reference position (X, Y, Z) of the scanning probe 118 even when the autonomous scanning measurement is temporarily switched.
(The value of the axis counters 264, 265, 266) and the deviation amount between the scanning measurement trajectory M are calculated, and when the deviation amount is within a predetermined value, the autonomous scanning measurement is canceled and the trajectory on the scanning measurement trajectory M is calculated. Since scanning measurement can be performed, high speed measurement is not sacrificed.

Next, FIG. 3 shows a surface texture scanning measuring method according to a third embodiment of the present invention. The difference between the third embodiment and the second embodiment is the same as the second embodiment except for the contents of the limit excess check in S400 and the scanning measurement trajectory correction processing in S410. That is, S310 to S390 and S420 to S450 are the same as S110 to S190 and S220 to S250 in FIG. The limit excess check in S400 is to check whether the displacement output value of each axis of the scanning probe 118 (the output value of each axis of the X, Y, and Z axis P counters) or their combined value exceeds the appropriate limit. Is checked, and if it exceeds, the process branches to S410, and if not, the process branches to S420.

When S410 is executed, the scanning measurement trajectory M is corrected. Stylus 1 checked in S400
When the pushing amount of 21 exceeds Δr + L (when it is large), the pushing is too deep. Therefore, the measurement offset Q is increased by L and the scanning measurement trajectory M is calculated as in S380. On the other hand, when the pushing amount of the tracing stylus 121 checked in S400 exceeds Δr−L (when it is small), the pushing is too shallow. Therefore, the measurement offset Q is reduced by L and the same as in S380. Then, the measurement measurement trajectory M is calculated. After that, the scanning probe 118
The scanning probe 118 so that the center position (measurement reference position) of the tracing stylus 121 is positioned on the corrected scanning measurement trajectory M.
After moving, the trajectory tracing measurement is continued in S420.

According to the third embodiment shown in FIG. 3,
In addition to the effects (1) to (7) in the above embodiment, there are the following effects. (8) An appropriateness limit is set for the amount of indentation of the tracing stylus 121 into the object to be measured W in the scanning measurement, and if the indentation is too deep or too shallow as a result of the determination of the appropriateness, the measurement offset Q is corrected. Since the scanning measurement trajectory M can be corrected and the measurement can be continued, even if the surface contour data and the contour shape of the object W to be measured are partly or wholly different, the trajectory can be accurately measured while maintaining high-speed measurement. Copying measurement can be performed. (9) Since the measurement offset Q can be corrected any number of times, and it is not limited to a positive value and may be a negative value, the degree of freedom in correcting the scanning measurement trajectory M is large, and the surface contour data and the object to be measured can be corrected. Even if there is a large difference from the contour shape of W, it is possible to perform accurate trajectory tracking measurement while maintaining high-speed measurement.

Although the present invention has been described above with reference to the preferred embodiment, the present invention is not limited to this embodiment, and modifications can be made without departing from the gist of the present invention. For example, although the contact type probe has been described in each embodiment, a CCD camera, an image sensor, or a capacitance type or electromagnetic induction type non-contact copying probe may be used. Further, it may be a scanning probe using a displacement meter used in a range finder, a roughness measuring machine, a roundness measuring machine, a contour shape measuring machine, or the like. In this case, the measurement offset Q can be zero with respect to the focal position of the CCD camera or the image sensor or the measurement reference position of the displacement meter, for example.

Furthermore, the tracing stylus of the scanning probe does not have to have a spherical shape, but may have an abacus or disc shape. Further, the calibration of the scanning probe 118 has been described only when the reference sphere 120 is used, but a precision processed gauge block or the like may be used. Further, as the measuring device, only the case of using a three-dimensional measuring machine has been described, but it is a scanning probe used for other roughness measuring machines, contour shape measuring machines, roundness measuring machines, image measuring machines, etc. Also, the highly accurate surface texture scanning measuring method according to the present invention can be implemented.

Further, a calibration program that causes a computer to execute these probe calibration methods,
This calibration program can be stored in a form executable by various computers using a portable storage medium such as a CD-ROM. Further, this proofreading program may be in a compiled form translated into a machine language or may be in an interpreted form translated into an intermediate language.

Further, it is possible to configure a probe calibration device by causing the computer 270 to execute the calibration program. That is, S30, S130, and S3 of FIGS.
The scanning probe calibration means by S20, S40, S14
0, measurement offset calculation means by S340, S5
0, S160, S360, surface contour data input means, S60, S170, S370, coordinate system collation means, S70, S180, S380, scanning measurement trajectory calculation means, S80, S220, S420, scanning measurement means, S150, S350. Limit setting means, S190, S390 for scanning measurement starting means, S
200, S400, limit exceedance determination means, S23
0, S430 for determining the end of scanning measurement, S24
0, S440 can constitute a scanning measurement ending means, S210 can constitute an autonomous scanning measurement means, and S410 can constitute a scanning measurement trajectory correction means.

[0037]

As described above, according to the present invention, it is possible to efficiently measure the surface texture of an object to be measured with high accuracy and high speed.

[Brief description of drawings]

FIG. 1 is a flowchart showing a surface texture scanning measuring method according to a first embodiment of the present invention.

FIG. 2 is a flowchart showing a surface texture scanning method according to a second embodiment of the present invention.

FIG. 3 is a flowchart showing a surface texture scanning measuring method according to a third embodiment of the present invention.

FIG. 4 is an explanatory diagram of a surface texture scanning measuring method according to the present invention.

FIG. 5 is a perspective view of a coordinate measuring machine embodying the present invention.

FIG. 6 is a block diagram of the coordinate measuring machine system.

FIG. 7 is a cross-sectional view showing the structure of a scanning probe.

[Explanation of symbols]

100 CMM 118 probe 120 reference sphere 121 Stylus 260 drive 270 calculator Q measurement offset T Copy measurement point M Copy measurement trajectory

Continued front page    (72) Inventor Shinichiro Aoyagi             2200 Shimoguricho, Utsunomiya City, Tochigi Prefecture             Within Mitutoyo (72) Inventor Kozo Sugita             2200 Shimoguricho, Utsunomiya City, Tochigi Prefecture             Within Mitutoyo F term (reference) 2F069 AA04 AA54 AA56 AA57 AA66                       EE07 EE23 FF01 GG01 GG12                       GG14 GG52 GG62 GG72 HH01                       HH30 JJ05 JJ25 LL02

Claims (7)

[Claims] 1. A surface texture profile measuring method for measuring a surface profile of an object to be measured by a profile probe, comprising: a measuring reference position of the profile probe to a surface contour of the object to be measured when measuring the object to be measured. The step of calculating the measurement offset of, the step of inputting the surface contour data indicating the surface contour of the object to be measured, with respect to the surface contour data, to the outside in the substantially normal direction of the surface contour of the object to be measured. A step of calculating a scanning measurement trajectory separated by the measurement offset, and a step of relatively moving the scanning probe along the scanning measurement trajectory to perform trajectory scanning measurement of the object to be measured. Surface texture scanning method. 2. The surface texture scanning measuring method according to claim 1, further comprising a step of setting an appropriate limit of displacement output of the scanning probe when measuring the object to be measured, wherein in the measuring step, A surface texture scanning measuring method characterized by performing an autonomous scanning measurement in which the displacement output of the scanning probe exceeds the aptitude limit and the measurement is performed while searching the surface contour by the displacement output of the scanning probe. 3. The surface texture scanning measuring method according to claim 2, wherein in the measuring step, the autonomous scanning measurement is performed.
A surface texture scanning measuring method, wherein when the distance from the measurement trajectory of the measurement reference position is within a predetermined value, the trajectory scanning measurement is performed instead of the autonomous scanning measurement. 4. The surface texture scanning measuring method according to claim 1, further comprising a step of setting an appropriate limit of a displacement output of the scanning probe when measuring the object to be measured, wherein in the measuring step, When the displacement output of the scanning probe exceeds the aptitude limit, the displacement output of the scanning probe is within the aptitude limit, so that the scanning measurement trajectory is corrected by correcting the measurement offset. Measuring method of surface texture. 5. The surface texture scanning measuring method according to claim 1, wherein the surface contour data is design data of the object to be measured. . 6. The surface texture scanning measuring method according to claim 1, wherein the surface contour data is measurement data obtained by measuring a reference master of the object to be measured. Surface texture scanning method. 7. A surface texture scanning measurement program, characterized by causing a computer to execute the surface texture scanning measurement method according to claim 1.