JP2003195135A - Optical element holder and projector equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical element holder in simplified structure which improves the cooling efficiency of an optical element and prevents the optical element from deteriorating and is adaptive to a long-period use, and a projector equipped with it in a cooling device using cooling liquid. <P>SOLUTION: The optical element holder 447 has an opening part 447P corresponding to an image formation area of a liquid crystal panel 441, an elastic member 447D is arranged at a storage part 447S formed at the circumferential edge of the opening part 447P, and the liquid crystal panel 441 and a polarizing plate 442B are arranged from a light incidence side to a light projection side so as to seal the opening part 447P. Further, a support plate 447E which presses and fixes a substrate by torsion is arranged on the light incidence side and light projection side of the optical element holder 447. Here, a groove 447T is formed on the internal surface of the storage part 447S and the elastic member 447D deforms toward the outer circumference of the storage part according to variation in the pressure of the refrigerant. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element holder for holding an optical element and a projector equipped with the same.

[0002]

2. Description of the Related Art Conventionally, an optical apparatus having a plurality of optical elements has a cooling device for cooling the optical elements due to temperature rise of the optical elements due to transmission or reflection of light. For example, as a cooling device, an air-cooling type cooling device that directly cools the optical element itself that generates heat by air-cooling with a medium such as air using an air-cooling fan, a cooling medium container filled with a cooling liquid, and an optical element are provided. By contacting,
A liquid cooling type cooling device has been proposed which radiates heat generated in an optical element by heat transfer by natural convection of a cooling liquid. Especially, in the liquid cooling type cooling device, the temperature change of the cooling liquid becomes remarkable due to the heat transfer from the optical element to the cooling liquid,
Expansion and contraction of the cooling liquid occurs. Due to the expansion and contraction of the cooling liquid, the sealed state of the cooling liquid becomes unstable, and the liquid leakage of the cooling liquid may occur. In order to keep the sealed state of the cooling liquid stable due to expansion and contraction of the cooling liquid, the following cooling device has been proposed. JP-A-4-125615
In a refrigerant container filled with a cooling liquid, a flexible glass substrate is used as a substrate for sealing the cooling liquid, and the shape of the glass substrate is changed according to expansion and contraction of the cooling liquid to cool the cooling medium. A cooling device using a flexible glass that keeps the internal pressure of liquid constant is disclosed. Further, in the above publication,
The substrate seals the cooling liquid through a bellows that can expand and contract in the optical axis direction, and the bellows expands and contracts according to the expansion and contraction of the cooling liquid, and a bellows that keeps the internal pressure of the cooling liquid constant is used. A conventional cooling device is disclosed. Also, the actual application Sho 62-
No. 170039, in a refrigerant container filled with a cooling liquid, a pressure adjusting member having an inside filled with air is provided in the refrigerant container, and the pressure adjusting member also expands and contracts in response to the expansion and contraction of the cooling liquid. There is disclosed a cooling device using a pressure adjusting member that holds the internal pressure of the cooling liquid constant by discharging or sucking the internal air.

[0003]

However, in the cooling device using the flexible glass as described above, the optical element to be cooled is attached to the flexible glass substrate to be cooled, and the cooling is performed. When the shape of the glass substrate changes in response to the expansion and contraction of the liquid, the shape of the optical element attached to the glass substrate also changes, so the optical characteristics of the optical element also change. Further, there is a problem that the optical element deteriorates due to the change in shape of the optical element. Also,
In the cooling device using the bellows as described above, the optical element to be cooled is cooled by being attached to the substrate that seals the cooling liquid, and the bellows corresponds to the expansion and contraction of the cooling liquid in the optical axis direction. When expanded and contracted, the position of the optical element attached to the substrate is also changed in the optical axis direction, so the position of the optical element will always change with the temperature change of the cooling liquid. There is a problem that the optical characteristics of the optical element cannot be sufficiently exhibited due to the change of the mutual position with the optical component. Further, in the cooling device using the pressure adjusting member as described above, the pressure adjusting member is provided in the refrigerant container in order to cope with expansion and contraction due to heat of the cooling liquid, but with long-term use However, there is a problem that the pressure regulating member may be damaged and liquid leakage of the cooling liquid may occur. Further, in the liquid cooling type cooling device as described above, there is a problem that the cooling liquid sealing structure is complicated and the cooling device cannot be easily manufactured.

An object of the present invention is to improve the cooling efficiency of an optical element in a cooling device using a cooling liquid, prevent deterioration of the optical element, and support long-term use, and have a structure. (EN) Provided is a simplified optical element holder and a projector including the same.

[0005]

An optical element holder according to the present invention is an optical element holder for holding an optical element having an element body that changes the characteristics of a light beam that is transmitted and a substrate that supports the element body. A cooling chamber which is formed in accordance with the light transmission region of the optical element, in which a cooling fluid is hermetically sealed, and a holding surface to which the optical element is attached, and which is made of a heat conductive material, the cooling chamber The light incident side and / or the light emitting side of is sealed by the substrate via a heat conductive elastic material, and the pressure change of the cooling fluid in the cooling chamber is caused by the deformation of the elastic material in the holding surface direction. It is characterized by being absorbed.

According to the present invention as described above, the optical element holder comprises the cooling chamber and the holding surface, which are formed corresponding to the light transmitting region of the optical element and in which the cooling fluid is hermetically sealed. Since the optical element is attached to the surface, the light transmitting region of the optical element is in direct contact with the cooling fluid inside the cooling chamber, the heat generated in the optical element is transferred to the cooling fluid, and the natural convection of the cooling fluid occurs. The heat can be dissipated by heat transfer. Here, since the optical element holder is made of a heat conductive material, the heat generated in the optical element due to the irradiation of the light from the light source is an optical element made of a heat conductive material having a high thermal conductivity. By letting it escape to the holder, it is possible to further improve the heat dissipation of the optical element and prevent the deterioration of the optical element due to the temperature rise. Therefore, the cooling efficiency of the optical element is improved, and the entire optical element can be cooled uniformly, so that the temperature distribution in the optical element becomes uniform, local overheating can be avoided, and deterioration of the optical element can be prevented. it can.

Further, since the light incident side and / or the light emitting side of the cooling chamber is sealed by a substrate which constitutes an optical element via an elastic material, the substrate is pressed and fixed to the optical element holder. As a result, the sealing state of the cooling fluid can be improved, and a structurally simple cooling liquid sealing structure can be realized. Further, since the elastic material interposed in the heat transfer path between the optical element and the optical element holder has thermal conductivity, heat generated in the optical element by irradiation of light from the light source is generated in the optical element holder. When transmitted to the optical element, the elastic material can efficiently dissipate the optical element without deteriorating the characteristic of dissipating heat to the optical element holder.

Further, the pressure change of the cooling fluid in the cooling chamber is
By being absorbed by the deformation of the elastic material in the holding surface direction, the internal pressure of the cooling fluid can be held constant. Therefore, by maintaining the internal pressure of the cooling fluid by changing the shape of the elastic material, the sealed state of the cooling fluid can be stably maintained even after long-term use. Further, the deformation of the elastic material due to the pressure change of the cooling fluid is performed in the holding surface direction, so that the optical element for sealing the light incident side and / or the light emitting side of the cooling chamber is emitted from the light source. It is possible to stably maintain a mutual setting position with other optical components without causing a positional deviation of the light flux in the illumination optical axis direction, and it is possible to fully exhibit the optical characteristics of the optical element.

Further, in the optical element holder of the present invention, it is preferable that the elastic material is composed of a sheet-like member which is formed in a ring shape and surrounds an outer peripheral portion of the cooling chamber on the holding surface side. In such a configuration, the elastic material is composed of a sheet-shaped member configured in a ring shape surrounding the holding surface side outer peripheral portion of the cooling chamber, so that the heat transfer path from the optical element to the optical element holder is formed. The length can be shortened, and the heat generated in the optical element can be efficiently radiated to the optical element holder.

Further, in the optical element holder of the present invention, it is preferable that a locking projection for locking the ring-shaped elastic material is formed on the outer peripheral portion of the holding surface. In such a configuration, since the locking projection for locking the ring-shaped elastic material is formed on the outer peripheral portion of the holding surface, the locking projection is held when the elastic material is brought into contact with the holding surface. If it is used for positioning, it is possible to easily incorporate the elastic material into the optical element holding body and improve the assembling efficiency of the optical element holding body. Further, when the cooling fluid contracts due to the temperature change of the cooling fluid in the cooling chamber, the deformation of the elastic material toward the inside of the cooling chamber can be held by the locking projections, and the cooling fluid is sealed by the elastic material. The stopped state can be stably maintained.

Further, in the optical element holder of the present invention, the holding surface is formed with a recess for accommodating the elastic material,
It is preferable that a gap with a predetermined interval is formed between the inside of the recess and the outside of the elastic material. In such a configuration, the holding surface is formed with a recess for accommodating the elastic material, and a gap is formed between the inner side of the recess and the outer side of the elastic material at a predetermined interval. When the heat generated in the element is transferred to the cooling fluid and the cooling fluid expands as the temperature of the cooling fluid rises, the elastic material can move to the gap, which corresponds to the expansion and contraction of the cooling fluid. Therefore, the internal pressure of the cooling fluid can be kept constant.

Further, in the optical element holder of the present invention, it is preferable that a locking projection for locking the substrate is formed inside the recess. In such a configuration, since the locking protrusion that locks the substrate is formed inside the recess, when the cooling chamber of the optical element holder is sealed by the substrate that constitutes the optical element, If the locking projection is used for positioning the optical element, the optical element can be easily incorporated into the optical element holder, and the assembling efficiency of the optical element holder can be improved.

Further, in the optical element holder of the present invention, the elastic material is composed of a polymer cross-linking material, and the layer near the contact surface with the holding surface is a layer having a high degree of cross-linking. preferable. In such a configuration, the elastic material is made of a polymer cross-linked material, and the layer in the vicinity of the contact surface with the holding surface is a layer with a high degree of cross-linking, so that the elastic material contacts the holding surface. The surface has a low adhesive force, and when the elastic material is incorporated into the holding surface, the elastic material can be easily positioned and the assembling efficiency of the optical element holder can be improved. Further, since the contact surface of the elastic material with the holding surface has a low adhesive force, the elastic material is deformed in the holding surface direction in response to the expansion and contraction of the cooling fluid due to the temperature change of the cooling fluid. Is easily performed, and the internal pressure of the cooling fluid can be stably maintained. It is also preferable that the layer in the vicinity of the contact surface of the elastic material with the optical element also has a high degree of crosslinking.

In the optical element holder according to the present invention, it is preferable that an injection hole for injecting the cooling fluid is formed in an end surface intersecting the optical element holding surface. In such a configuration, since the injection hole for injecting the cooling fluid is formed in the end surface of the optical element holding body that intersects the optical element holding surface, after the optical element holding body is installed in the optical component casing. Even in this case, it becomes possible to inject the cooling fluid into the cooling chamber, which improves the manufacturing efficiency. Further, if the injection hole is arranged at the upper end of the optical element holder when the optical element holder is installed, even if the optical element holder is used for a long time after the cooling fluid is injected, the cooling fluid of It is possible to avoid leakage due to its own weight.

In the optical element holder of the present invention, it is preferable that an air vent hole for discharging the air in the cooling chamber at the time of injection is formed adjacent to the injection hole. Usually, when a cooling fluid is injected into the cooling chamber of the optical element holder to seal it, bubbles are likely to remain inside the cooling chamber. Due to the bubbles remaining in the cooling chamber, the light flux emitted from the light source lamp is scattered, and the image projected on the screen is decolored corresponding to the position of the remaining bubbles. In such a configuration, the air vent hole is formed adjacent to the injection hole in the optical element holder, so that the hole for discharging the air in the cooling chamber is independently present. At the same time as the cooling fluid is injected, the residual air can be discharged from the air vent hole. Therefore, since the residual air in the cooling fluid is eliminated, the light flux passing through the optical element holder is not scattered by the residual air in the cooling fluid, and the projected image can be displayed clearly.

Here, it is preferable that a concave portion for accumulating a bubble is formed inside the cooling chamber corresponding to the penetration position of the air vent hole. In such a configuration, when the air is mixed in the cooling fluid, the air is mixed in the cooling chamber inside the cooling chamber corresponding to the penetration position of the air vent hole. It does not face the light transmitting region of the optical element, because it accumulates in the recess for storing bubbles. Therefore, the residual air in the cooling fluid does not interfere with the light flux optically processed by the optical element, and the characteristics of the optical element can be sufficiently exhibited.

The injection hole and the air vent hole are
It is preferable that they are arranged asymmetrically with respect to an axis that symmetrically divides the intersecting end faces. In such a configuration,
The injection hole and the air vent hole are arranged asymmetrically with respect to the axis that symmetrically divides the intersecting end faces, so that when the cooling fluid is injected into the cooling chamber of the optical element holder, the air vent hole is located above. By injecting the cooling fluid from the inlet while tilted to, the air mixed in the cooling fluid rises to the air vent hole side, and when the cooling fluid injection is completed, the air mixed in the cooling fluid is eliminated through the air vent hole. can do.

Further, it is preferable that recesses for accumulating bubbles are formed in an upper portion and a lower portion of the cooling chamber. When the projector is suspended from the ceiling and used, it is often installed upside down. At this time, the lower part for accumulating bubbles is positioned above. In addition, the recess for storing bubbles in the upper portion assists the recess depending on the position where the air vent hole penetrates.

On the other hand, the projector of the present invention is characterized by including any one of the above-mentioned optical element holders in order to achieve the above object. According to the present invention, it is possible to enjoy a projector that exhibits substantially the same actions and effects as the actions and effects of the optical element holder described above. Further, by using the above-mentioned optical element holder, the optical element inside the projector can be surely cooled and the life of the projector can be extended.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. [1. Main Configuration of Projector] FIG. 1 is a plan view schematically showing an internal structure of a projector 1 according to an embodiment of the present invention. The projector 1 includes an outer case 2 having a substantially rectangular parallelepiped shape as a whole, an optical unit 4 which optically processes a light beam emitted from a light source to form an optical image corresponding to image information, and heat accumulated in the projector 1. A cooling unit 5 for cooling and a power supply unit 3 for supplying the power supplied through a power cable to the optical unit 4 and a driver board for controlling the optical unit 4 are provided. The outer case 2 is made of metal or resin, and forms an upper surface, a front surface, and a side surface of the projector 1, and a bottom surface of the projector 1.
It is composed of a lower case and a side case, respectively.

The cutout 2 is formed on the front surface of the outer case 2.
A is formed, and a part of the optical unit 4 arranged inside the exterior case 2 is exposed to the outside from the cutout 2A. The optical image formed by the optical unit 4 is emitted through the cutout portion 2A, and the image is displayed on the screen. Further, exhaust ports 2B and 2C for exhausting the air warmed inside the projector 1 are provided on both sides of the position of the cutout 2A. An intake port (not shown) is provided on the bottom surface of the outer case 2 below the optical unit 4 for sucking cooling air from the outside by the cooling unit 5.

The optical unit 4 has a substantially L-shape in plan view and, as shown in FIG. 2, optically processes the light beam emitted from the light source lamp 411 to form an optical image corresponding to image information. The unit includes an integrator illumination optical system 41, a color separation optical system 42, a relay optical system 43, an optical device 44, and a projection lens 46 as a projection optical system. These optical components are placed and fixed in the light guide 4A as the optical component casing. Power supply unit 3
Is disposed near the integrator illumination optical system 41 of the optical unit 4 and is supplied with power through a power cable (not shown). The supplied power is supplied to a driver board (not shown) or a lamp drive circuit (ballast) incorporated inside. Is supplied to the light source lamp 411 of the optical unit 4. Here, the driver board is arranged above the optical unit 4 and is for controlling each liquid crystal panel 441R, 441G, 441B which becomes a light modulation device described later, and projects an optical image according to image information. In order to do so, the image information is fetched, and control and arithmetic processing are performed. The power supply unit 3 is covered with a shield plate made of a metal plate. This prevents leakage of electromagnetic noise from the power supply unit 3 to the outside. The power supply unit 3 and the optical unit 4 are covered by shield plates arranged above and below the units 3 and 4, respectively. As a result, the power supply unit 3
Prevents electromagnetic noise from leaking out from the driver board or the like.

The cooling unit 5 sends cooling air to a cooling flow path formed inside the projector 1 to cool the heat generated inside the projector 1, and is disposed below the optical device 44 of the optical unit 4. And an axial-flow intake fan 51 for sucking cooling air from an intake port formed on the bottom surface of the outer case 2, and a light source device 4 of the optical unit 4.
13, which is located below the optical unit 4, attracts the cooling air inside the optical unit 4, cools the light source device 413 in the process of attracting, and heats the air heated from the exhaust port 2B through the duct 52A located below the optical unit 4. Blower 5 to discharge
2 and an exhaust port 2C formed in the front surface of the outer case 2 which is arranged in the vicinity of the power supply unit 3 from the projector 1
It is composed of an axial exhaust fan 53 for exhausting the air warmed inside and by the power supply unit 3.

[2. Detailed Configuration of Optical System] In FIG. 2, the integrator illumination optical system 41 is shown as three liquid crystal panels 441 (liquid crystal panels 441R, 441G, and 441B for each color light of red, green, and blue, respectively) that configure the optical device 44. ) Is an optical system for illuminating the image forming area of FIG.
, The second lens array 414, and the polarization conversion element 415.
And a superimposing lens 416.

Of these, the light source device 413 includes a light source lamp 411 for emitting a radial ray and an elliptical mirror 412 for reflecting the emitted light emitted from the light source lamp 411.
And a collimating concave lens 413A for collimating the light emitted from the light source lamp 411 and reflected by the ellipsoidal mirror 412.
With. A UV filter (not shown) is provided on the plane portion of the parallelizing concave lens 413A. As the light source lamp 411, a halogen lamp, a metal halide lamp, or a high pressure mercury lamp is often used. Further, a parabolic mirror may be used instead of the ellipsoidal mirror 412 and the parallelizing concave lens 413A.

The first lens array 418, the second lens array 414, and the polarization conversion element 415 are integrally combined and installed and fixed in the housing. The first lens array 418 has a configuration in which small lenses having a substantially rectangular contour when viewed in the optical axis direction are arranged in a matrix. Each small lens splits the light flux emitted from the light source lamp 411 into a plurality of partial light fluxes. The contour shape of each small lens is set to be substantially similar to the shape of the image forming area of the liquid crystal panel 441. For example,
If the aspect ratio (ratio of horizontal and vertical dimensions) of the image forming area of the liquid crystal panel 441 is 4: 3, the aspect ratio of each small lens is also set to 4: 3.

The second lens array 414 has a structure similar to that of the first lens array 418, and has a structure in which small lenses are arranged in a matrix. This second lens array 414, together with the superposing lens 416,
The image of each small lens of the lens array 418 is displayed on the liquid crystal panel 44.
1 has an image forming function.

The polarization conversion element 415 is arranged between the second lens array 414 and the superimposing lens 416 and is unitized with the second lens array 414. The polarization conversion element 415 as described above converts the light from the second lens array 414 into one type of polarized light, which improves the light utilization efficiency of the optical device 44.

Specifically, the polarization conversion element 415 sets 1
Each of the partial lights converted into the polarized light of the type has a superposition lens 41.
Finally, by 6 the liquid crystal panel 441 of the optical device 44
Substantially superimposed on R, 441G, 441B. In the projector 1 (optical device 44) of the present embodiment using the liquid crystal panel 441 that modulates polarized light, since only one type of polarized light can be used, the light source lamp 411 that emits another type of randomly polarized light is used. Almost half of the light is unused. Therefore, by using the polarization conversion element 415, all the light emitted from the light source lamp 411 is converted into one type of polarized light, and the light utilization efficiency in the optical device 44 is improved. Such a polarization conversion element 415 is introduced, for example, in Japanese Patent Laid-Open No. 8-304739.

The color separation optical system 42 includes two dichroic mirrors 421 and 422 and a reflection mirror 423. The dichroic mirrors 421 and 422 divide a plurality of partial light beams emitted from the integrator illumination optical system 41 into red and green. , And has a function of separating into three color lights of blue.

The relay optical system 43 includes an incident side lens 43.
1, relay lens 433, and reflection mirrors 432, 4
34, and has a function of guiding the color light and the red light separated by the color separation optical system 42 to the liquid crystal panel 441R.

At this time, the dichroic mirror 421 of the color separation optical system 42 transmits the blue light component of the light beam emitted from the integrator illumination optical system 41 and reflects the red light component and the green light component. The blue light transmitted by the dichroic mirror 421 is reflected by the reflection mirror 42.
The light then reflects at 3, and reaches the blue liquid crystal panel 441B through the field lens 417. This field lens 4
Reference numeral 17 converts each partial light flux emitted from the second lens array 414 into a light flux parallel to the central axis (chief ray) thereof. The same applies to the field lens 417 provided on the light incident side of the other liquid crystal panels 441G and 441R.

Of the red light and the green light reflected by the dichroic mirror 421, the green light is reflected by the dichroic mirror 422 and the field lens 417.
To reach the liquid crystal panel 441G for green. on the other hand,
The red light passes through the dichroic mirror 422, passes through the relay optical system 43, further passes through the field lens 417, and reaches the liquid crystal panel 441R for red light. The relay optical system 43 is used for red light because the optical path length of the red light is longer than the optical path lengths of the other color lights, so that the reduction of the light use efficiency due to the diffusion of the light or the like is prevented. This is because. That is, the partial light flux that has entered the incident side lens 431 is directly transmitted to the field lens 417.

The optical device 44 will be described in detail later, but
Liquid crystal panels 441R, 441G, which serve as light modulators for one sheet,
The 441B and the cross dichroic prism 45 as a color synthesizing optical system are integrally configured. The liquid crystal panels 441R, 441G, and 441B use, for example, a polysilicon TFT as a switching element, and each color light separated by the color separation optical system 42 is composed of these three components.
The liquid crystal panels 441R, 441G, and 441B, and the polarizing plate 442A on the light-incident side and the polarizing plate 442B on the light-exiting side of the liquid crystal panels 441R, 441G, and 441B, are modulated according to image information to form an optical image. Specifically, as shown in FIG. 6, in the liquid crystal panels 441R, 441G, and 441B, a drive substrate 441C made of quartz glass or the like and a counter substrate 441D are attached to each other with a predetermined gap therebetween via a sealing material (not shown). The liquid crystal is injected between both substrates. In the liquid crystal panel 441, a switching element such as a TFT element and ITO are provided on the inner surface of the driving substrate 441C.
Pixel electrodes, wirings, alignment films, etc. made of a transparent conductor such as (Indium Tin Oxide) are formed, and the counter substrate 44
On the inner surface of 1D, a counter electrode, an alignment film, etc. are formed corresponding to the pixel electrodes, and these constitute an active matrix type liquid crystal panel structure. Here, the counter substrate 4 of each liquid crystal panel 441R, 441G, 441B
Dustproof glass 441A made of sapphire or quartz glass is attached to 41D.

The cross dichroic prism 45 has three
The image modulated for each color light emitted from the liquid crystal panels 441R, 441G, and 441B is combined to form a color image. In the cross dichroic prism 45, a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are formed in a substantially X shape along the interfaces of the four rectangular prisms. Three color lights are combined by the dielectric multilayer film. Then, the color image combined by the prism 45 is emitted from the projection lens 46 and enlarged and projected on the screen.

Each of the optical systems 41 to 45 described above is shown in FIG.
As shown in, the light guide 4A is housed in a metal or synthetic resin casing. The light guide 4A includes the above-mentioned optical components 416, 417, 422-4.
The lower light guide is provided with a groove portion into which the 24, 431 to 434 are slidably fitted from above, and a lid-shaped upper light guide that closes the upper opening side of the lower light guide. Further, as shown in FIG. 2, the light source device 41 is provided on one end side of the light guide 4A having a substantially L-shaped plane.
3 is accommodated, and the projection lens 46 is fixed to the other end side via the head portion 49.

[3. Structure of Optical Device] The structure of the optical device 44 will be described below. In FIG. 3, the optical device 44
Is shown in an exploded perspective view. Of the three liquid crystal panels 441 (441R, 441G, 441B), only the liquid crystal panel 441G is shown as a representative, and the other liquid crystal panels 441R, 441B are omitted. Optical device 44
Is a liquid crystal panel 441R, 441G, 441B, a light beam exit side polarization plate 442B, and a cross dichroic prism 45 that are integrally formed. The light beam emitted from the light source lamp 411 is a liquid crystal panel 441R, 4B.
Of the light beams modulated by the liquid crystal panels 441R, 441G, and 441B that are modulated by 41G and 441B according to image information, only the light beam having a predetermined polarization axis is polarized plate 44.
The cross dichroic prism 45 transmits the color lights that pass through 2B, and the color lights that pass through the polarizing plate 442B are combined to be projected as an optical image. The optical device 44 includes a pedestal 445 for mounting and fixing the cross dichroic prism 45 for cooling the liquid crystal panels 441R, 441G, 441B and the polarizing plate 442B, and the liquid crystal panels 441R, 4B.
Optical element holder 44 for holding 41G and 441B in the frame
7 and a fixing plate 446 that is attached to the light flux incident end surface of the cross dichroic prism 45 and holds the optical element holder 447. Where pedestal 4
45, the optical element holder 447, and the fixing plate 446,
It is made of aluminum with high thermal conductivity. In addition,
The member is not limited to aluminum and may be made of a material having high thermal conductivity such as magnesium alloy or copper.

The pedestal 445 is fixed to the lower surface of the cross dichroic prism 45, and its outer peripheral shape is substantially the same as that of the cross dichroic prism 45. In addition, holes 445C for fixing the integrated optical device 44 to the light guide 4A are provided at the corner portions of the edge of the pedestal 445 on the light exit side and the center of the edge on the light entrance side, respectively. It is fixed by.

The optical element holder 447 is the liquid crystal panel 44.
The optical element holder 447 is formed in a substantially rectangular frame shape having an opening 447P corresponding to the first image forming area, and an elastic member 447D is arranged at the periphery of the opening 447P of the optical element holder 447. For sealing, a light flux incident side substrate 447B and a light flux emission side substrate 447C are arranged from the light incident side and the light emitting side. Further, on the light incident side and the light emitting side of the optical element holder 447, a support plate 447E for pressing and fixing the substrate with screws is arranged. Although a refrigerant is filled in the sealed opening 447P, here, ethylene glycol, which is a transparent non-volatile liquid, is used as the refrigerant.

In the optical element holder 447, an injection hole 447F for injecting a refrigerant into the upper end portion and an air vent hole 447G for eliminating residual air mixed in the refrigerant are asymmetric with respect to the illumination optical axis. Has been formed. As shown in FIG. 4, the injection hole 447F formed in the upper end portion and the air vent hole 447G formed in the corner portion of the upper end portion are provided with the opening 447.
A bubble reservoir salai 447 which is formed to penetrate to P and is connected to the air vent hole 447G at the upper end of the opening 447P.
H is formed. In addition, bubble storing recesses 447V are formed along the upper and lower edges at the upper and lower ends of the opening 447P. Here, a bubble storing recess 447V at the upper end portion
Is connected to the bubble accumulation saray 447H. In addition, the support plate 44 is provided on the upper and lower ends of the optical element holder 447.
A hole 447L for fixing 7E is formed. Further, holes 447I projecting from the upper and lower ends are formed for fixing to the fixing plate 446. In addition, the left and right end faces are formed with fins 447J having the lengths of the left and right edges and projecting from the ends, and the heat transmitted from the refrigerant can be radiated by the fins 447J. There is. Further, a holding surface that abuts the elastic member 447D is provided on the periphery of the opening 447P, and the elastic member 4 is provided.
47D, a storage portion 447S for storing the substrates 447B and 447C is provided.

Here, the opening portion 447P of the storage portion 447S.
Locking protrusions 447R for positioning the elastic member 447D are formed at the outer peripheral corners. Also, the storage section 447
As shown in FIG. 4 or FIG. 5, on the inner side surface of S, a groove 447T corresponding to the shape change of the elastic member 447D is provided on at least one side on the entrance / exit side, and the substrates 447B and 447C.
And a convex portion 447U for positioning are formed. Specifically, the heat generated in the liquid crystal panel 441 and the polarizing plate 442B by the irradiation of the light flux from the light source lamp 411 is air-cooled and is also transferred to the refrigerant of the optical element holder 447. Therefore, the temperature of the refrigerant increases due to heat, and the internal pressure of the refrigerant increases. As the internal pressure of the refrigerant increases, as shown in FIG.
As shown in FIG. 5, the elastic member 447D changes its shape in the outer peripheral direction of the holding surface of the storage portion 447S to cope with the increase in the internal pressure of the refrigerant. On the other hand, when the optical element holder 447 is cooled from this state and the internal pressure of the refrigerant drops, the elastic member 447D
Are drawn toward the opening 447P side, and the optical element holder 4
The four corners of the elastic member 447D are supported by the locking projections 447R formed at 47, and the elastic member 447D returns to its original state. Such changes in the shape of the elastic member 447D correspond to changes in the internal pressure of the refrigerant. Here, the optical element holder 447 is subjected to chromate treatment (alodine) in order to prevent a chemical reaction with the refrigerant, and the optical element holder 447 has a thickness of 0.1 to 0.
The surface layer of about 3 μm is covered with an oxide film.

The light beam incident side substrate 447B is the liquid crystal panel 4
41G is adopted. At this time, the optical element holder 447
On the side, a drive substrate 44 that constitutes the liquid crystal panel 441G
1C corresponds. The light flux emission side substrate 447C is the polarizing plate 4
42B is adopted. Here, the polarizing plate 442B has a configuration in which a polarizing film is attached to a sapphire, crystal, or quartz glass substrate by using a transparent adhesive (not shown), and the sapphire substrate is installed toward the optical element holder 447 side. .

The elastic member 447D is the optical element holder 44.
7 and the substrates 447B and 447C to prevent leakage of the refrigerant filled therein and the like, which is formed in a substantially rectangular frame shape corresponding to the storage portion 447S and has high thermal conductivity. It is composed of a silicon rubber sheet and has a storage section 44
The surface of the 7S that contacts the holding surface is subjected to a surface treatment to increase the crosslink density of the surface layer. For example, Sarcon GR-d series (trademark of Fuji Polymer Co., Ltd.) can be adopted. Here, since the end surface is subjected to the surface treatment, it is possible to easily install the elastic member 447D on the optical element holder 447 when assembling the optical element holder 447.

The support plate 447E is composed of the substrates 447B and 447.
The optical element holder 44 is for fixing C by pressing.
No. 7 opening 447P corresponding to the opening 447P.
A peripheral portion of the support plate 447E is formed so as to project from the frame body so as to be fitted to the outer peripheral edge of the support plate 447E. Also, the support plate 4
The holes 44 of the optical element holder 447 are provided at the upper and lower ends of 47E.
A hole 447N is formed corresponding to 7L. When fixing the support plate 447E to the optical element holder 447, the peripheral edge portion of the support plate 447E is fitted to the outer peripheral edge of the optical element holder 447 and temporarily assembled, and the holes 447N and 447L are formed.
It is fixed by screwing a screw on. Fixed plate 446
Is a rectangular plate-like member that holds and fixes the optical element holder 447, and is a rectangular plate-like member having a large corner area, and is adhesively fixed to the light flux incident end surface of the cross dichroic prism 45. Here, when fixing the optical element holder 447 to the fixing plate 446, a pin spacer 446A having a stepped shape, which is made of a transparent member that transmits ultraviolet rays, is used. Here, the large-diameter end of the pin spacer 446A is joined to the fixing plate 446 so that the load of the optical element holder 447 can be secured. In addition,
In consideration of the direction of the polarized light beam incident on the cross dichroic prism 45, the cross dichroic prism 45
A phase difference plate (not shown) is attached to the light flux incident end surface of the G color light of the light flux incident end surface.

[4. Manufacturing Method of Optical Device] Hereinafter, a manufacturing method of the optical device will be described in detail with reference to FIG. 9. First, the prism unit is assembled by the steps shown in (1) to (3) below. (1) The pedestal 445 is bonded and fixed to the lower surface of the cross dichroic prism 45 by using a thermosetting adhesive having good thermal conductivity. (2) A retardation plate is attached to the end surface of the cross dichroic prism 45 on the G color light incident side. (3) The fixing plate 446 is bonded and fixed to the light-incident end surface of the cross dichroic prism 45 by using a thermosetting adhesive having good thermal conductivity.

Next, the optical element holder 447 is assembled by the steps shown in the following (4) to (8). (4) The elastic member 447D is positioned and installed by the locking protrusion 447R so as to come into contact with the holding surface of the storage portion 447S. (5) Further, each liquid crystal panel 44 is disposed on the light beam incident side so as to sandwich the elastic member 447D with the optical element holder 447.
1R, 441G, 441B, and a polarizing plate 44 on the light beam exit side.
2B is positioned and installed by the convex portion 447U of the storage portion 447S. (6) Each incorporated liquid crystal panel 441R, 441G,
In order to press and fix 441B and the polarizing plate 442B,
After the peripheral edge of the support plate 447E is fitted to the outer peripheral edge of the optical element holder 447 to perform temporary assembly, the hole 4 of the support plate 447E is formed.
The screw 44 is inserted into 47N, and the hole 44 of the optical element holder 447 is inserted.
The support plate 447E is fixed at 7L.

(7) Optical element holder 447 as described above
After the opening 447P is sealed, the refrigerant is injected into the opening 447P. Specifically, the corners where the air vent holes 447G are formed are inclined so that the corners are upward, and
Refrigerant is injected from 7F. The air mixed with the refrigerant is collected in the bubble collecting saray 447H formed in the opening 447P corresponding to the air vent hole 447G, and is removed from the air vent hole 447G at the same time when the injection of the refrigerant is completed. (8) After the completion of the refrigerant injection, the injection hole 447F and the air vent hole 447G are sealed with a screw having an O-ring.

Next, the positions of the liquid crystal panels 441R, 441G and 441B are adjusted and the optical element holder 447 is fixed to the prism unit by the steps shown in (9) and (10) below. (9) The prism unit to which the fixing plate 446 is fixed is fixed to the position adjusting jig. Further, an ultraviolet curable adhesive having good thermal conductivity is applied to the large-diameter ends of the pin spacers 446A at the four corners of the fixing plate 446, and the tip portions of the pin spacers 446A coated with the ultraviolet curable adhesive are also optically attached. The element holder 447 is inserted into the hole 447I. (10) Each liquid crystal panel 441R, 44 in order to prevent the pixel shift of the projected image with the adhesive being uncured.
Adjust the mutual positions of 1G and 441B. Specifically, the counter substrate 44 of the liquid crystal panel 441G that faces the projection lens
The position adjusting jig is fixed to the dustproof glass 441A attached to 1D, and the side surface of the fixing plate 446 and the optical element holder 44 are fixed.
7, the alignment is adjusted with the joint surface with the pin spacer 446A inserted into the hole 447I of No. 7 as a sliding surface, and the joint is performed through the joint between the pin spacer 446A and the optical element holder 447, that is, the pin to adjust the focus. I do. After adjusting the liquid crystal panel 441G (optical element holder 447) to a predetermined position from the light source, the pin spacer 446A is irradiated with ultraviolet rays from the light beam incident side to cure the adhesive and fix it. Next, the liquid crystal panel 441 is aligned with the pixels of the liquid crystal panel 441G that is cured and fixed after the above position adjustment.
Position adjustment and fixing of R and 441B are performed in the same manner as above. (11) After the position adjustment of the optical device is completed, the optical device is incorporated into the light guide, and the hole 445 of the pedestal 445 is installed.
Insert the screw into C and fix it to the light guide.

[5. Cooling Structure] In the projector 1 of this embodiment, the panel cooling system A that mainly cools the liquid crystal panels 441R, 441G, and 441B, the light source cooling system B that mainly cools the light source device 413, and the power supply unit 3 are mainly cooled. Power supply cooling system C and liquid crystal panels 441R, 441G, 4
41B and a light modulator cooling system D that mainly cools the polarizing plate 442B on the light beam emission side.

In FIG. 1, in the panel cooling system A, an axial intake fan 51 arranged below the optical device 44 is used. The cooling air sucked from the intake port on the lower surface of the exterior case 2 by the axial flow intake fan is guided to below the optical device 44. Here, the bottom surface of the light guide 4A is located at a position corresponding to an intake port (not shown) formed on the bottom surface of the outer case 2 and below the optical element holder 447 of the optical device 44. The opening 4B is formed so that the cooling air sucked from the intake port formed on the bottom surface of the outer case 2 can be taken into the light guide 4A. As a result, the cooling air sucked by the axial intake fan 51 enters the fixing plate 446, the optical element holder 447, and the light incident side of the optical element holder 447, and the liquid crystal panels 441R, 441G, 44.
1B and polarizing plate 4 disposed on the light incident side and the light emitting side
42A and 442B are adapted to be cooled.
The liquid crystal panels 441R, 441G, 441B seal the openings 447P of the optical element holder 447, and the heat transferred from the liquid crystal panels 441R, 441G, 441B to the refrigerant and the optical element holder 447 is also cooled by the cooling. It is cooled by air. Here, the optical element holder 447 is
The fins 447J projecting from the left and right edges allow more efficient cooling. As shown in FIG. 1 or 6, on the lower surface of the light guide 4A, a flat rectangular plate-shaped straightening plate 478 is provided, and a pair of rising pieces 478A provided on the straightening plate 478 (total 14 pieces).
(Sheets) project upward from the opening 4B. However, in FIG. 1, the rising piece 478A is indicated by a chain double-dashed line. By these rising pieces 478A, liquid crystal panels 441R, 441G, 441B and polarizing plates 442A,
The flow of cooling air for cooling 442B is regulated from bottom to top.

In this way, the cooling air of the panel cooling system A cools the liquid crystal panels 441R, 441G, 441B and the polarizing plates 442A, 442B from the lower side to the upper side, and is then drawn to the blower 52 side, and the front side is cooled. Exhaust port 2
Exhausted from B. Here, the cooling air by the panel cooling system A not only plays a role of cooling the liquid crystal panels 441R, 441G, 441B, but also the liquid crystal panels 441R, 441.
By being blown onto the surface of G, 441B, it also has a role of blowing away dust and the like adhering to the panel surface. By the panel cooling system A, the liquid crystal panels 441R, 441G,
Since the surface of the 441B can be constantly cleaned, the projector 1 can project an optical image of stable image quality on a screen or the like.

In FIG. 1, the light source cooling system B uses a blower 52 provided on the lower surface of the optical unit 4. The cooling air sucked from the outside by the axial intake fan 51 and entering the light guide 4A receives the liquid crystal panels 441R, 441G, 441B and the polarizing plate 442A.
After cooling 442B, the first lens array, the second lens array 414, and the polarization conversion element 415, which are attracted by the blower 52 and integrated, are cooled and then enter the inside of the light source device 413 to cool the light source lamp. Cool 411, then exit the light guide 4A,
The air is exhausted from the exhaust port 2B via the duct 52A.

In the power supply cooling system C, the power supply unit 3
The axial exhaust fan 53 provided in the vicinity of is used. The air warmed by the heat of the power supply unit 3 is sucked by the axial exhaust fan 53 and discharged from the front side exhaust port 2C. Similarly, the air inside the projector 1 is also discharged from the exhaust port 2C, so that the projector 1
The heat does not stay inside.

In the optical modulator cooling system D, the optical element holder 447 is used as described above. The liquid crystal panels 441R, 441G, 441B and the polarizing plate 442B on the light beam emission side are provided in the opening 44 of the optical element holder 447.
7P is configured to be sealed, and is in direct contact with the coolant filled in the optical element holder 447. The liquid crystal panel 441 is formed by the light flux emitted from the light source lamp 411.
The heat generated in R, 441G, 441B and the polarizing plate 442B is air-cooled from the surface and at the same time transferred to the refrigerant. The refrigerant heated by heat rises due to the decrease in density, and natural convection occurs in the refrigerant. The heat carried by the convection is exchanged with the outside air by the optical element holder 447. Here, the cooling air by the panel cooling system A is blown to the fins 447J protruding on the left and right edges of the optical element holder 447, so that the optical element holder 447 is provided.
The heat exchange from is promoted more effectively.

[6. Effects of Embodiment] According to the present embodiment as described above, there are the following effects. (1) Since the liquid crystal panel 441 and the polarizing plate 442B on the light beam emission side are installed in the housing portion 447S of the optical element holder 447 and the opening 447P is sealed, the light flux emitted from the light source lamp 411 The heat generated in the liquid crystal panel 441 and the polarizing plate 442B due to the irradiation can be transferred to the refrigerant filled in the optical element holder 447, and can be radiated by the heat transfer by natural convection of the refrigerant. Therefore, the cooling efficiency of the liquid crystal panel 441 and the polarizing plate 442B is improved, and the liquid crystal panel 441 and the polarizing plate 442B are improved.
Since it is possible to uniformly cool the entire light transmission area of
The temperature distribution in the liquid crystal panel 441 and the polarizing plate 442B is made uniform to avoid local overheating,
1 and the polarizing plate 442B can be prevented from deterioration.

(2) Since the optical element holder 447 is made of aluminum having heat conductivity,
The heat generated in the liquid crystal panel 441 and the polarizing plate 442B can be released to the optical element holder 447, and the heat radiation of the liquid crystal panel 441 and the polarizing plate 442B is not only transferred by the refrigerant but also to the optical element holder 447. A transmission path can also be secured, the heat dissipation of the liquid crystal panel 441 and the polarizing plate 442B can be further improved, and deterioration due to temperature rise can be prevented. (3) The light incident side and the light emitting side of the opening 447P of the optical element holder 447 are pressed and fixed by the liquid crystal panel 441 and the polarizing plate 442B through the elastic member 447D, so that the refrigerant filled therein. By sealing the refrigerant, the sealed state of the refrigerant can be improved, and a structurally simple refrigerant sealing structure can be realized.

(4) Liquid crystal panel 441 and polarizing plate 44
Since the elastic member 447D interposed in the heat transfer path between the 2B and the optical element holder 447 has high thermal conductivity, it is generated in the liquid crystal panel 441 and the polarizing plate 442B by the irradiation of the light from the light source lamp 411. When the generated heat is transferred to the optical element holder 447, the elastic member 447D does not deteriorate the heat radiation characteristic to the optical element holder 447, and the liquid crystal panel 441 and the polarizing plate 442 can be efficiently used.
B can be dissipated. (5) Since the elastic member 447D is formed of a silicon rubber sheet having elasticity, the liquid crystal panel 441
Since the shape of the elastic member 447D is deformed in response to the expansion and contraction of the refrigerant accompanying the temperature change of the refrigerant due to the heat transferred from the polarizing plate 442B to the refrigerant, the internal pressure of the refrigerant can be kept constant. Therefore, by maintaining the internal pressure of the refrigerant by changing the shape of the elastic member, it is possible to secure a stable sealed state of the cooling liquid even after long-term use.

(6) Since the elastic member 447D is made of sheet-shaped silicone rubber, the liquid crystal panel 441 and the polarizing plate 442B are used to hold the optical element holder 447.
The heat transfer path to the liquid crystal panel 44 can be shortened.
It is possible to efficiently dissipate the heat generated in 1 and the polarizing plate 442B to the optical element holder 447. (7) The elastic member 447D is surface-treated on the contact surface with the holding surface so that the crosslink density is high,
Adhesive force of the contact surface of the elastic member 447D with the holding surface is low, and when the elastic member 447D is brought into contact with the holding surface, the elastic member 447D can be easily positioned, and the optical element holder 447 is assembled. The efficiency can be improved.
Further, the elastic member 447D can be easily deformed in the holding surface direction in response to the change in the pressure of the refrigerant, and the internal pressure of the refrigerant can be stably held.

(8) Storage section 44 for optical element holder 447
The locking protrusion 447 is provided at the corner of the peripheral edge of the opening 447P of the 7S.
Since the R is formed, when the elastic member 447D is installed on the optical element holder 447, the locking protrusion 447 is formed.
R can be used for positioning, and elastic member 447D
The optical element holder 447 can be easily installed, and the assembling efficiency of the optical element holder 447 can be improved. Further, the locking projection 44 is attached to the optical element holder 447.
By forming 7R, it is possible to suppress the shape change of the elastic member 447D due to the decrease in the internal pressure of the refrigerant. (9) Since the groove 447T is formed on the inner side surface of the storage portion 447S of the optical element holder 447, the elastic member 447D is formed by the increase of the internal pressure of the refrigerant due to the heat transfer from the liquid crystal panel 441 and the polarizing plate 442B. The shape can be changed to escape into the gap of the groove 447T, and the internal pressure of the refrigerant can be kept constant in response to the increase in the internal pressure of the refrigerant. Therefore, it is possible to prevent the liquid leakage of the refrigerant due to the change in the internal pressure of the refrigerant. Further, since the elastic material 447D is deformed in the direction of the holding surface of the storage portion 447S due to the pressure change of the refrigerant, the liquid crystal panel 441 and the polarizing plate 442B are not displaced in the illumination optical axis direction. Therefore, the mutual setting positions with other optical components can be stably held, and the optical characteristics of the liquid crystal panel 441 and the polarizing plate 442B can be sufficiently exhibited.

(10) Storage section 4 for optical element holder 447
Since the convex portion 447U is formed on the inner surface of 47S, the convex portion 447U can be used for positioning when the liquid crystal panel 441 and the polarizing plate 442B are installed in the storage portion 447S, and the liquid crystal panel 441 can be used. Further, the polarizing plate 442B can be easily incorporated into the optical element holder 447, and the assembling efficiency of the optical element holder 447 can be improved. (11) Since the bubble collecting saray 447H is formed at the upper end of the opening 447P of the optical element holder 447, when air is mixed in the refrigerant, the air is collected in the bubble collecting saray 447H. , Liquid crystal panel 441
There is no intervening position opposite to the image forming area.
Therefore, the residual air in the coolant does not disturb the optical image modulated by the liquid crystal panel 441, and the characteristics of the liquid crystal panel 441 can be sufficiently exhibited. (12) Since the recess 447V for accumulating bubbles is formed at the upper and lower ends of the opening 447P of the optical element holder 447, the recess at the lower end can be used even when the projector 1 is suspended from the ceiling. 447V can store bubbles in the refrigerant. Also, the recess 447V at the upper end is
By being connected to the bubble accumulation saray 447H, the bubble accumulation saray 447H can be assisted.

(13) At the upper end of the optical element holder 447, the air collecting hole 4 is connected to the bubble collecting saray 447H.
Since 47G is formed, the optical element holder 4
At the time of injecting the refrigerant into 47, the bubble collecting saray 447
By injecting the refrigerant from the injection hole 447F in the state in which H is tilted upward, the air mixed in the refrigerant rises and accumulates in the bubble pool saray 447H, and when the refrigerant injection is completed, it enters the bubble pool saray 447H. The collected air is
It can be eliminated through the air vent hole 447G. (14) By improving the heat dissipation of the optical element, it is possible to suppress an increase in energy consumption and noise due to an increase in a cooling device such as a fan, and further to downsize the cooling device such as a fan. (15) Since the polarizing plate 442B is composed of a polarizing film and a sapphire plate, it can radiate the heat generated by the polarizing film due to the irradiation of the light flux emitted from the light source lamp 411 to the sapphire plate having good thermal conductivity. Therefore, it is possible to prevent the temperature of the polarizing film from rising and to ensure the functional reliability of the polarizing film.

(16) Since the polarizing plate 442B composed of the polarizing film and the sapphire plate having a high hardness constitutes one wall of the opening 447P of the optical element holder 447, the expansion due to the heat of the refrigerant. It is possible to avoid damage to the wall. (17) Since dust-proof glass 441A made of sapphire or quartz glass is attached to the light flux incident end faces of the liquid crystal panels 441R, 441G, 441B, the liquid crystal panels 441R, 441G, 441B are provided with optical element holders. Heat conduction to 447 can be improved. In addition, each liquid crystal panel 441R, 441G, 441B
The strength of the outer surface of the liquid crystal panel 4 can be improved.
The outer surfaces of 41R, 441G, and 441B are less likely to be scratched, and the risk of damage during handling during the manufacturing process can be avoided. Furthermore, each liquid crystal panel 441R, 4
By improving the mechanical strength of 41G and 441B, it is possible to reduce the thickness of the drive substrate and the counter substrate that form the liquid crystal panel, and it is possible to reduce the thickness of the liquid crystal panel.

(18) Since the surface of the optical element holder 447 is subjected to chromate treatment (alodine), the extreme surface layer can be covered with an oxide film, and the corrosion resistance can be improved. Therefore, it is possible to prevent a chemical reaction with the refrigerant even when it is in contact with the refrigerant for a long time, and it is possible to clearly display an image projected on the screen without deteriorating the optical characteristics of the refrigerant. (19) The fins 4 are provided on the left and right edges of the optical element holder 447.
Since 47J is provided in a protruding manner, the exchange of the heat generated in the optical element holder 447 due to the heat transfer by the natural convection of the refrigerant with the outside air by the cooling air blowing from the panel cooling system A is promoted. The heat of the element holder 447 can be efficiently dissipated. (20) Since the optical element holder 447 is attached to the cross dichroic prism 45 via the fixing plate 446, a cooling flow path between the cross dichroic prism 45 and the optical element holder 447 can be secured. Yes, by the cooling air blowing by the panel cooling system A,
It is possible to improve the cooling efficiency of the polarizing plate 442B that constitutes the wall of the optical element holder 447 on the light exit side, and prevent heat from staying in the optical element holder 447.

(21) Since the optical element holder 447 is made of aluminum having good thermal conductivity, the liquid crystal panel 441 is irradiated with light from the light source lamp 411.
R, 441G, 441B, and polarizing plate 4 on the light beam emission side
By releasing the heat of 42B to the optical element holder 447 made of aluminum having good thermal conductivity, the heat dissipation of the liquid crystal panel 441 and the polarizing plate 442B is further improved,
It is possible to prevent malfunction of the liquid crystal panel 441 and the polarizing plate 442B due to temperature rise. Further, since the fixing plate 446 constituting the optical device is made of the same material (Al), the amount of dimensional change (expansion, contraction) due to heat is the same, so that the functional reliability is improved.

(22) By using an adhesive having heat conductivity to fix the respective members constituting the optical device 44, the heat transfer between the respective members in the adhesive is promoted. Liquid crystal panels 441R and 441
The heat dissipation of G, 441B and the polarizing plate 442B is improved. (23) Since the pin spacer 446A used when fixing the optical element holding member 447 to the fixing plate 446 is made of a transparent member that transmits ultraviolet rays, the optical element holding member 447 and the fixing plate 446 can be fixed. This can be performed using an ultraviolet curable adhesive, and by irradiating ultraviolet rays through the pin spacer 446A, the optical element holder 447 and the fixing plate 446 can be easily joined. (24) Since the pin spacer 446A has a stepped shape, the ends having a large diameter are joined to the four corners of the fixing plate 446, and the joining areas are increased. A stable joining state can be secured.

[7. Modification of Embodiments]
The present invention is not limited to the embodiment described above, and includes other configurations and the like that can achieve the object of the present invention, and the following modifications and the like are also included in the present invention. In the embodiment, the configuration in which the groove 447T is formed on the inner side surface of the storage portion 447S of the optical element holding body 447 so as to correspond to the shape change of the elastic member 447D has been described. It suffices that a gap be provided between the member 447D and the inner side surface of the storage portion 447S so that the elastic member 447D can be changed in shape. In the above embodiment, an optical compensation film such as a WV film may be interposed between each liquid crystal panel 441R, 441G, 441B and the polarizing plate 442B on the light beam emission side. By interposing such an optical compensation film, , Each liquid crystal panel 441R, 441G, 441B
The image displayed by can be projected clearly.

In the above embodiment, the support plate 447E and the optical element holder 447 are fixed by screws, but
The adhesive is not limited to this, and a thermosetting adhesive or an ultraviolet curable adhesive having good thermal conductivity may be used as long as it is fixed so that heat can be transferred. In the above embodiment, the optical element holder 4
Although fins are provided in order to efficiently dissipate heat to 47, the shape of the fins is arbitrary and is not limited to the shape in the above embodiment.

Further, in each of the above-mentioned embodiments, only an example of the projector using the three light modulation devices is given, but the present invention is a projector using only one light modulation device.
It is also applicable to a projector using one light modulation device or a projector using four or more light modulation devices.

Further, in each of the above-mentioned embodiments, the liquid crystal panel is used as the light modulating device, but a light modulating device other than the liquid crystal such as a device using a micromirror may be used. In this case, the polarizing plates on the entrance and exit sides can be omitted. Further, in the above-described embodiment, the transmissive light modulator having the different light incident surface and the light exit surface is used. However, the reflective light modulator having the same light incident surface and the light exit surface is used. Good.

Furthermore, in each of the above-mentioned embodiments, only an example of a front type projector which projects from the direction of observing the screen has been given, but the present invention projects from the side opposite to the direction of observing the screen. It can also be applied to rear type projectors. Further, the optical element holder of the present invention is not limited to the one applied to the optical element of the projector, but may be applied to the optical element of various other optical devices. include.

[0071]

According to the optical element holder of the present invention and the projector provided with the same, in the cooling device using the cooling liquid, the cooling efficiency of the optical element is improved and the deterioration of the optical element is prevented. It is effective in that it can be used for a long period of time and that the structure can be simplified.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing an internal structure of a projector according to the present embodiment.

FIG. 2 is a plan view schematically showing the optical unit in the embodiment.

FIG. 3 is an exploded perspective view of the optical device according to the embodiment.

FIG. 4 is a front view showing the structure of the optical element holder in the embodiment.

5 is a cross-sectional view illustrating a refrigerant sealing structure in FIG.

FIG. 6 is a cross-sectional view showing a cooling structure of the optical device according to the exemplary embodiment.

[Explanation of symbols]

1 Projector 441, 441R, 441G, 441B Liquid crystal panel (optical element) 442B Polarizing plate (optical element) 447 Optical element holder 447D Elastic member (elastic material) 447F Injecting hole 447G Air vent hole 447H Salai for bubble retention (for bubble retention) Recessed portion) 447R Locking protrusion 447S Storage portion (recessed portion) 447T Groove (gap) 447U Convex portion (locking protrusion) 447V Recessed portion for storing bubbles

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) G03B 21/16 G03B 21/16

Claims (12)

[Claims] 1. An optical element holder for holding an optical element comprising an element body for changing the characteristics of a transmitted light beam and a substrate supporting the element body, the optical element holder being formed in accordance with a light transmission region of the optical element. A cooling chamber in which a cooling fluid is hermetically sealed and a holding surface to which the optical element is attached, and is made of a heat conductive material, and the light incident side and / or the light emitting side of the cooling chamber is a An optical element holder, which is sealed by the substrate via a conductive elastic material, and a pressure change of a cooling fluid in the cooling chamber is absorbed by deformation of the elastic material in the holding surface direction. 2. The optical element holder according to claim 1, wherein the elastic material is formed of a ring-shaped sheet member that surrounds an outer peripheral portion of the cooling chamber on the holding surface side. Optical element holder. 3. The optical element holder according to claim 2, wherein a retaining projection for retaining a ring-shaped elastic material is formed on an outer peripheral portion of the retaining surface. Holding body. 4. The optical element holder according to claim 2 or 3, wherein a concave portion for accommodating the elastic material is formed on the holding surface, and the inside of the concave portion and the outside of the elastic material are formed. An optical element holder, characterized in that a gap having a predetermined interval is formed between them. 5. The optical element holder according to claim 4, wherein a locking protrusion for locking the substrate is formed inside the recess. 6. The optical element holder according to any one of claims 1 to 5, wherein the elastic material is composed of a polymer cross-linking material, and a layer near a contact surface with the holding surface is cross-linked. An optical element holder characterized by being formed as a highly flexible layer. 7. The optical element holder according to any one of claims 1 to 6, wherein an injection hole for injecting the cooling fluid is formed in an end surface intersecting with the optical element holding surface. Characteristic optical element holder. 8. The optical element holder according to claim 7, wherein an air vent hole for discharging the air in the cooling chamber at the time of injection is formed adjacent to the injection hole. body. 9. The optical element holder according to claim 8, wherein a recess for storing a bubble is formed in the cooling chamber corresponding to the penetration position of the air vent hole. body. 10. The optical element holder according to claim 9, wherein the injection hole and the air vent hole are arranged asymmetrically with respect to an axis that symmetrically divides the intersecting end faces. Optical element holder. 11. The optical element holder according to claim 1, wherein recesses for accumulating bubbles are formed in an upper part and a lower part of the cooling chamber. 12. A projector comprising the optical element holder according to any one of claims 1 to 11.