JP2003194718A5 - - Google Patents

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Publication number
JP2003194718A5
JP2003194718A5 JP2001396865A JP2001396865A JP2003194718A5 JP 2003194718 A5 JP2003194718 A5 JP 2003194718A5 JP 2001396865 A JP2001396865 A JP 2001396865A JP 2001396865 A JP2001396865 A JP 2001396865A JP 2003194718 A5 JP2003194718 A5 JP 2003194718A5
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JP
Japan
Prior art keywords
image
photoluminescence
detected
defect
znse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001396865A
Other languages
English (en)
Japanese (ja)
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JP2003194718A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001396865A priority Critical patent/JP2003194718A/ja
Priority claimed from JP2001396865A external-priority patent/JP2003194718A/ja
Publication of JP2003194718A publication Critical patent/JP2003194718A/ja
Publication of JP2003194718A5 publication Critical patent/JP2003194718A5/ja
Pending legal-status Critical Current

Links

JP2001396865A 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法 Pending JP2003194718A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001396865A JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001396865A JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Publications (2)

Publication Number Publication Date
JP2003194718A JP2003194718A (ja) 2003-07-09
JP2003194718A5 true JP2003194718A5 (https=) 2004-11-25

Family

ID=27602819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001396865A Pending JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Country Status (1)

Country Link
JP (1) JP2003194718A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009054771A (ja) * 2007-08-27 2009-03-12 Japan Aerospace Exploration Agency 半導体結晶の欠陥評価方法及び評価装置
JP2025008952A (ja) * 2023-07-06 2025-01-20 レーザーテック株式会社 検査装置及び検査方法

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