JP2003188064A - Production system for composite product and production method for composite product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a production system which avoids a risk in developing a composite product by preventing the occurrence of defective products or failure which is caused by contamination at a production step for the composite product, related to the production system which comprises a plurality of production facilities constituting a production line and produces products through a plurality of processes. <P>SOLUTION: A first production line and a second production line are physically or geographically, or as a company, defferentiated and arranged from each other. In the first production line, a group comprising first substrates are handled according to a first process, and a first element group is formed at each of a plurality of regions partitioned on the first substrate, to produce semi-finished products. In the second production line, the first substrate is divided into second substrates, and a group comprising the second substrates is handled according to a second process to form a second element group, which is separated into divisions and integrated with other components for a module, thus producing composite products incorporating the module. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production system and a production method for products produced through a number of steps. In particular, the present invention relates to a production system and a production method for a product such as an electronic device or the like that is formed by combining an element group including a plurality of members.

[0002]

2. Description of the Related Art A well-known product related to a semiconductor integrated circuit such as a super LSI is completed through a number of steps. The production system employs a production system called the job shop system, in which the same type of manufacturing equipment is laid out in a factory and the equipment group is organized, and products are produced between these equipment groups. There is. With such a production system, a large number of products are produced at the same time, the product types are switched, and the manufacturing process is frequently changed to improve the yield, stabilize the quality, and improve the function.

A semiconductor integrated circuit is formed with an oxide film or a nitride film,
It is manufactured by combining a photo-etching process with ion implantation treatment and heat treatment, deposition of a metal or semiconductor film, formation of an interlayer insulating film, and the like. At the level of VLSI, the number of processes reaches hundreds. Design rules (design rules)
Is a general term for manufacturing process technology indicated by the minimum processing dimension, and is usually expressed by the gate length or channel length of a transistor. The smaller the design rule is, the finer the processing is, and the 64-Mbit DRAM (Dynam
ic Random Access Memory)
The 0.18 μm process is used.

A film forming apparatus for forming a film on the production line,
It comprises an etching device for etching the film, an exposure device for forming a mask pattern using a photomask, an annealing device for heat treatment, and an industrial robot for transferring the substrate. In any case, in order to ensure fine and precise processing and reproducibility and stability of the quality of semiconductors, physical contamination due to dust, chemical contamination such as phosphorus, boron and organic gas, iron, nickel and sodium are required. Special attention has been paid to prevent chemical contamination of metals such as metal or alkali metals, and the production line is constructed in a special environment called a clean room installed in the factory.

In order to complete a product, a large number of steps are processed in a predetermined order. In each step, a plurality of substrates are regarded as one unit and the steps proceed by batch processing or single-wafer processing. This one unit is called a lot and is a physical distribution unit in the production system.

In semiconductor-related products, MO is used for semiconductor substrates.
In addition to memories and microprocessors formed by forming S transistors, products such as liquid crystal display devices formed by directly forming semiconductor integrated circuits on a substrate such as glass are known. In this case, an element forming an integrated circuit is called a thin film transistor (TFT) because a semiconductor thin film is used. A liquid crystal display device combines a device group (also called a TFT array) composed of TFTs and a liquid crystal device having a structure in which a liquid crystal is sandwiched between a pair of electrodes, and is a composite type device utilizing the switching characteristics of the TFT and the electro-optical effect of the liquid crystal. It is a product of. An EL (electroluminescence) panel is a combination of an element group consisting of TFTs and an EL element in which an organic compound serving as a light emitter is interposed between a pair of electrodes, and the switching characteristics of the TFT and the electroluminescence phenomenon of the EL material. It is a composite product that combines
The EL module is a composite product in which an external circuit such as a controller is added to the EL panel. These are also called active matrix systems because TFTs, which are active elements (active elements), are arranged vertically and horizontally in a matrix to display an image.

The TFT is manufactured by the semiconductor integrated circuit technology similar to the VLSI. The slight difference lies in the step of forming the semiconductor film on the insulating surface, and it can be said that the gate step, the impurity element injecting step, the wiring step, etc. are almost the same. In addition, an inspection process is incorporated as necessary, and the production yield is managed based on the inspection information. Although the display device described above has a large design rule of several microns, the allowable contamination level is 6
It is also said to be the same as a 4-Mbit DRAM.

[0008]

A composite product composed of members having different physical properties such as a semiconductor element and a liquid crystal element or a light emitting element, which are strictly controlled in the manufacturing line, may possibly contaminate the other by a constituent member of one element. Is
The problem is that defects occur. A specific example is an alkali metal or an alkaline earth metal used as a cathode material in a light emitting element, and if this element contaminates a semiconductor, it causes a product failure. This pollution pollutes not only the package of the integrally formed composite product but also the environment surrounding the manufacturing line, and affects the manufacturing process of the product as secondary pollution.

The production means employed to increase the production efficiency is a method of enlarging the size of the substrate forming the element group and taking out a large number of members from one substrate. Along with that, the manufacturing equipment and the lines that make it up also become larger,
If the processing time per sheet is about the same, the production capacity will be improved. However, it is not possible to simply increase the substrate size in the process of film formation, etching, etc. due to the configuration of the device.

In response to the diversification of products required in the market, the production system is required to be able to flexibly meet the demand for high-mix low-volume production. However, the conventional lot-based production system cannot always flexibly cope. As a result of increasing the size of the board and increasing the number of components used, the conventional lot-based production system may produce more products than necessary, or the number of boards in a lot may decrease, resulting in efficient production. Can not do it.

As an information device, in a complex product in which a semiconductor element and a liquid crystal element or a semiconductor element and a light emitting element are combined, advanced technological development is conducted, and a product protected by intellectual property is manufactured and sold ahead of competitors. By doing so, gaining market share and maintaining market advantage is an important issue. However, complex product design, process design,
Designing and optimizing the manufacturing equipment, optimizing manufacturing conditions, accumulating know-how, etc. to manufacture and sell one completed product entails enormous capital and labor costs, while leading other companies in technological development. There is a risk that it will be done. Further, in the electronic equipment market where the product cycle changes in a short period of time, the risk is superimposed. The combination of the element substrate on which the semiconductor element is formed and the liquid crystal element or the semiconductor element and the light emitting element seems to be simple at first glance, but the circuit configuration, the driving method, the driving condition, etc. are different, and the optimum combination The device structures are also not the same.

In view of the above-mentioned problems, the present invention is a production system for producing a product through a plurality of steps, which comprises a plurality of production facilities constituting a production line, and a product defect or failure due to contamination at the production stage of a composite product An object of the present invention is to provide a production system that prevents the occurrence of the occurrence, maximizes the productivity of individual components before compounding, and avoids the risk in developing a compound product.

[0013]

The structure of the present invention for solving the above problems is a composite product production system for producing a product through a plurality of steps, which comprises a plurality of production facilities constituting a production line. , At least a first production line composed of a plurality of production facilities and a second production line composed of a plurality of production facilities, which is discontinuous from the first production line and arranged at a distance from the first production line. A production system that manufactures complex products shares mutual information. Specifically, the first production line is provided with a first manufacturing device group including a plurality of manufacturing devices, and a first production management means for performing production management or progress management.
The first production management means has a first storage means for storing first quality information or characteristic information regarding the first element group formed on the first substrate in the first manufacturing apparatus group, and is provided in the second production line. Is provided with a second manufacturing device group including a plurality of manufacturing devices and a second production management means for performing production management or progress management, and divides the first substrate into a second substrate. A second storing second quality information or characteristic information regarding the second element group formed on the second substrate, or third quality information or product information in a state in which the first element group and the second element group are combined. It has a storage means. The first production control means and the second production control means or the first storage means and the second storage means can mutually communicate information, and the first quality information or characteristic information and the second quality information or characteristic information or the third Is compared with the quality information or product information of (1) to identify the address of the section identified as a non-defective product on the second substrate. In the above-mentioned configuration of the present invention, the first production line is configured based on the production method licensed from the first patentee, and the second production line is the production licensed from the second patentee. You may use the thing.

The structure of the present invention for solving the above problems has a first production line and a second production line each of which is composed of a plurality of production facilities, and produces a product through a plurality of steps. However, the first production line and the second production line are physically or geographically distinguished from each other as corporations, and are arranged in separate places or areas. In the first production line, , One batch of the first substrate is processed as a first lot according to the first step,
A work-in-process product or a semi-finished product is produced by forming a first element group for each region divided into a plurality of sections on the first substrate,
In addition, the first quality information or the characteristic information regarding the first element group formed on the first substrate during the specific process of the first process is collected, and the first substrate is divided into the second substrates in the second production line. Then, one group consisting of the second substrate is treated as a second lot according to the second step, and a second element group is formed on the second substrate corresponding to the regions divided into a plurality of sections. Collecting second quality information or characteristic information about the second element group between the specific steps in the order of two steps, or third quality information or product information in a state in which the first element group and the second element group are combined, Collating the first quality information or the characteristic information with the second quality information or the characteristic information or the third quality information or the product information, and generating information for specifying the address of the section identified as the non-defective product on the second substrate, 2 boards are separated into compartments It generates a potential member, to select only the function member for a conforming the information for identifying the address into a module integrated with other components, is to produce a composite product incorporating the module.

Further, the present invention is a production method for producing a product through a plurality of steps, which has a first production line and a second production line composed of a plurality of production facilities. Assigns a first identifier to each first substrate, stores a group of the first substrates in a carrier, assigns a second identifier for identifying the group to the carrier, and outputs the first identifier and the second identifier. In accordance with the process and processing conditions programmed corresponding to, the first element group is formed in each of the regions divided into a plurality of sections on the first substrate to produce a work-in-process product or a semi-finished product. A first element group formed on a first substrate between specific steps
The quality information or the characteristic information is collected in association with the first identifier, and in the second production line, the first substrate is divided into the second substrates, and one set of the second substrates is used as the second lot to make the second lot. Processing according to the process to form a second element group corresponding to the regions divided into a plurality of sections on the second substrate,
Collecting second quality information or characteristic information about the second element group between the specific steps in the second step order, or third quality information or product information in a state in which the first element group and the second element group are combined. , The first quality information or the characteristic information and the second quality information or the characteristic information or the third quality information or the product information is collated, and the information for specifying the address of the section identified as the non-defective product on the second substrate is generated, The second substrate is divided into sections to generate one unit of functional member, only functional members that are non-defective are selected from the information specifying the address, integrated with other constituent members to form a module, and the module is incorporated. It is to produce a complex product.

Further, the present invention is a production method for producing a product through a plurality of steps, which has a first production line and a second production line composed of a plurality of production facilities. The second production line is one that is physically, geographically, or legally distinguished and is arranged in a remote place or area. In the first production line, a first identifier is provided for each first substrate. Is assigned to allocate the process conditions for each first substrate in correspondence with the first identifier, the information related to the process conditions is stored in the storage means, and one set of the first substrates is stored in the carrier. A second identifier for identifying one set is given to a carrier, management information as a set of process processing conditions based on the first identifier is stored in a storage unit, and progress information of a process based on the second identifier, First
The process information of the process is managed by the information processing device by the identifier, and the first element group is formed in each region divided into a plurality of sections on the first substrate to produce a work-in-process product or a semi-finished product. In the second production line, the first quality information or the characteristic information regarding the first element group formed on the first substrate during the specific process of one process is collected in association with the first identifier and stored in the storage means. Corresponds to a region divided into a plurality of sections on the second substrate by dividing the first substrate into the second substrates and treating one set of the second substrates as a second lot according to the second step. To form the second element group,
Collecting second quality information or characteristic information about the second element group between the specific steps in the second step order, or third quality information or product information in a state in which the first element group and the second element group are combined. , The first quality information or the characteristic information and the second quality information or the characteristic information or the third quality information or the product information are collated, and the information for specifying the address of the section identified as the non-defective product on the second substrate is stored in the storage means. After saving, the second substrate is divided into sections to generate one unit of functional member, and only the functional member which is a non-defective product is selected from the information for specifying the address and integrated with other constituent members to form a module, It manufactures a composite product that incorporates the module.

The above-mentioned first element group is an active element group or an active element substrate formed by using active elements such as transistors and diodes. As a typical example, a TFT substrate on which thin film transistors (TFTs) are arranged, MIM ( Metal Ins
(Mulator substrate) is an MIM substrate on which elements are arranged. The second element group includes electro-optical elements typified by liquid crystal elements, light emitting elements typified by EL elements, and electron source elements.

In the above-mentioned configuration of the present invention, the first production line is constructed and produced based on the production method licensed from the patentee, and is composed of a plurality of production equipments, and a plurality of processing conditions can be applied. Exist as
In addition, the second production line can be configured to include a plurality of production facilities and to be able to apply a plurality of processing conditions by using a product licensed from the patentee.

In the configuration of the above invention, the work-in-progress or the work-in-progress between the first production line and the second production line, which are physically or geographically distinguished from each other as a legal entity and which are arranged in distant places or areas, In the transportation form of semi-finished products,
Forming a protective film on the first substrate to prevent destruction of the first element group due to environmental pollution or static electricity, and then packaging and transporting it; and in the second production line, after removing the protective film, perform processing according to the second step. You can

The first production line and the second production line are used as a production system for producing a composite product through a plurality of steps, and the first production line and the second production line are physically
Or geographically or as a legal entity, by arranging in a remote place or area, the other one is contaminated by the constituent members of one element, abnormal operation of the elements constituting the composite product, irreversible destruction, It is possible to prevent defects such as short circuits, insulation, abnormal heat generation, and odor. In addition, it becomes easier to control environmental pollution in each production line, specifications such as air conditioners and accompanying filters are loosened, the replacement cycle of consumables becomes longer, and the power consumption of the factory where the production equipment is located is reduced. , Easy equipment management.

By applying the first substrate having a specific size in the first production line and applying the second substrate having a specific size obtained by dividing the first substrate in the second production line, unlike the first substrate, The optimum substrate size can be applied according to the production technology applied to the first production line and the second production line. The optimum substrate size here is determined in consideration of the requirements based on the fundamental elements of the manufacturing apparatus, the requirements based on the process yield, the requirements based on the processing capacity per unit time, and the like.

In the production line, the transportation of products in process is almost automated. Work-in-process is collected by a carrier, and the process proceeds for each unit. Usually, we prepare many work-in-process products and focus on minimizing the waiting time. Since the steps of the process can be carried out by considering the carrier as one unit, if the number of work-in-process products in the carrier is small, only the waiting time becomes long and the productivity per unit time decreases. To support high-mix low-volume production, use identifiers such as numbers, symbols, letters, marks, barcodes, block codes, and color codes.
It is assigned to the first substrate, the process condition corresponding to the identifier is input to the storage means, and the aggregate composed of one or a plurality of sheets is stored in a carrier as one group, and the information about the aggregate is associated with the identifier. A means for storing in the storage means is used. Even if multiple lots exist in one holding frame, multiple lots are produced in small quantities by identifying the existence of multiple lots by the identifier given to the carrier and identifying the processing conditions by the identifier given for each in-process product. Is possible. This prevents the increase of inventory due to overproduction,
Moreover, productivity can be improved.

In the above-mentioned configuration of the present invention, the first production line is constructed and produced based on the production method licensed from the first patentee, and is composed of a plurality of production facilities to which a plurality of processing conditions can be applied. Exists as possible. In addition, the second production line may be configured to include a plurality of production facilities and apply a plurality of processing conditions by using a product licensed from the first patentee. Regarding the second production line, the first
Complete the composite product by adding the product licensed from the patentee to the product licensed from the third patentee and the product that is the other component of the composite product depending on the production method. Is also good. As described above, the risk can be dispersed by combining the elements backed by intellectual property rights in the individual constituent elements or constituent members of the composite product.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows the concept of a production system according to the present invention. The production system of the present invention is a system suitable for producing a composite product in which a plurality of functional elements or functional materials having different constituent materials, constituent members, or structures are combined, and a plurality of production devices suitable for respective functional elements or functional materials. Contains a line. Although the aspect shown in FIG. 1 shows at least the mutual relationship between the first production line 101 and the second production line 102, the number of production lines associated with each other is not limited in the present invention. First
The production line 101 and the second production line 102 are physically, geographically, or legally distinctive, and are arranged in separate places or areas.

The first production line 101 comprises a manufacturing apparatus group 106 composed of a plurality of manufacturing apparatuses, and is capable of continuously processing a plurality of processes in parallel. The manufacturing apparatus is not limited in its configuration and specifications as long as it is necessary for manufacturing a desired product.

The work-in-process 108 is flown through the first production line 101, but the form of the work-in-process 108 is not particularly limited. If the applicable composite product is an electronic device,
A semiconductor substrate, a glass or quartz substrate, a printed board, or the like is applied. An element group in which a plurality of semiconductor elements are integrally formed is formed on the substrate having such a form. For example, T
A TFT panel or the like in which FTs are arranged in a matrix is formed.

The work-in-process products 108 are sent to the production line as a single unit or a plurality of units called a lot. Each of the work in progress 108 (specifically, for each substrate)
An identifier is assigned to distinguish each.
Further, an identifier for distinguishing the group is attached to a carrier that holds one or more work-in-process products 108 and is used for movement within the production line. Those that can function as identifiers are signs such as numbers, symbols, characters, marks, bar codes, block codes, color codes, and magnetic tapes.
The information possessed by the identifier is read by optical, magnetic, electro-optical, magneto-optical, or mechanical means.

An example of the first production control means 112 for performing production control or progress control in the first production line 101 is a client-server system consisting of a server (divided synthesis control system) 114 and a client (information collection input / output terminal) 116. Composed. Server 114 is MPU
A (microprocessor) 115 and a storage means 124 are included, and the storage means 124 includes a process control table 118 and process conditions 1.
19, lot organization 120, lot composition 121, quality characteristic information 123, etc. are recorded, and processing for updating or changing is always performed during the period in which the production line is operating. The client 116 includes input means such as a keyboard, mouse, image scanner, code reader, etc., output means such as a monitor and printer, storage means such as a hard disk, etc. Of course, the production control means is not limited to such a client server system, and depending on the amount of information to be processed, the production control means may be constructed by a mainframe, or by a personal computer if the scale is small. is there.

In the first production line 101, the manufacturing equipment group 1
A plurality of lots are constantly flown so as to increase the driving rate of 06 and maximize the productivity. This is the first production control means 11
The process control is performed according to 2, but this is performed using an identifier to identify a plurality of lots and a plurality of work-in-process 108. An example of an identifier for distinguishing between lots and work-in-process is shown in FIG. Work-in-process is held in a container or frame called a carrier and used for movement between manufacturing apparatuses. In FIG. 2, a plurality of work-in-process products 303 are held on a carrier 301, and each work-in-process product 303 has a first identifier 304.
Is given. As the identifier 304, numbers, symbols, characters, marks, bar codes, block codes, color codes and the like can be used. Further, the carrier 301 is provided with a second identifier 302, which is associated with the information of the work in progress 303 on the carrier 301.

A production unit called a lot may be organized for each carrier, or a plurality of lots may be included in the carrier. As aforementioned,
In the production line, work-in-process 30
Since 3 moves between manufacturing apparatuses, maximizing the loading amount of the carrier 301 contributes to minimizing process waiting time and maximizing productivity.

The first identifier and the second identifier, and the process control table 1 in the first process control system 112 described in FIG.
18, an example of the relationship between the process conditions 119, the lot organization 120, and the lot composition 121 is shown in detail in FIG.

In the example shown in FIG. 3, in the carrier to which the second identifier 302 is given, the first "A%" is written.
Lot 305 and second lot 3 labeled "B #"
At least two lots of 06 are included. The breakdown of each lot is stored in the data of the hierarchy of lot composition 307. In each lot, a first identifier 304 is assigned for each work in process. These lots can have different forms such as functions, characteristics, standards, sizes, and types according to product specifications, and different process conditions can be given to them. The process condition 309 is created for each lot, and the manufacturing condition can be further changed for each work in process. Further, all lots flowing on the production line are stored as hierarchical data called lot organization 308.

An example of utilizing the identifier in the production line is shown in FIG. FIG. 4 shows the main components of the manufacturing apparatus group 106 and the first production control means 112 in the first production line. The first production line 106 includes a manufacturing apparatus 401, and the manufacturing apparatus can be divided into a carrier station 403 holding a carrier 410 moving in the production line and a manufacturing apparatus main body 404. The carrier station 403 is provided with reading means 405 for the second identifier 302 and reading means 406 for the first identifier 304. These reading means are by optical, magnetic, electro-optical, magneto-optical, or mechanical means, and a CCD camera is typically applied.

Second identifier 3 recognized by the reading means 405
The information No. 02 is sent to the first production control means 112 and compared and referred to the data group of the process control table, the process conditions, the lot organization, and the lot configuration stored in the storage means 124, and the information of No. 02 is included in the lot concerned. 1 identifier 304 information and process process program name information corresponding thereto are provided to the manufacturing apparatus 4
Send 01. In the manufacturing apparatus 401, the information of the first identifier 304 given to the work in process is sent to the MPU 407 of the manufacturing apparatus 401 by the reading means 406, and compared with the above-mentioned information sent from the first production management means, and referred to, A program 409 (for example, job1) having a predetermined processing condition stored in the storage unit 408 is read and executed. The manufacturing apparatus 402 has a similar configuration, and the manufacturing apparatus group 106 is configured by disposing a plurality of manufacturing apparatuses having such a configuration. In the manufacturing device group, manufacturing devices having similar functions are arranged in the same area. This is because the manufacturing apparatus requires utilities such as electricity, compressed air, cooling water, and an exhaust duct for operating the manufacturing apparatus, and piping for supplying raw materials or auxiliary materials, so that these can be efficiently arranged.

As shown in FIGS. 1 to 4, the first identifier and the second identifier are used to manage information about process conditions, lot organization, and lot configuration, and to use a LAN (Local Area).
Network) connects the process control system and the manufacturing equipment to centrally manage the production line. Then, the information processing load on the manufacturing apparatus can be reduced, and a large number of lots and complicatedly organized lots or production units can be processed without confusion.

Note that the manufacturing apparatus group 107 in the second production line 102 shown in FIG. 1, the second process management system 113 including the server 125, the storage means 126, the client 117 and the like may have the same configuration. You can
Detailed description thereof will be omitted.

Further, in the first production line 101 and the second production line, inter-process inspection for the purpose of quality control or quality assurance is appropriately performed between specific processes. The quality information or the characteristic information based on the inspection between specific processes includes 100% inspection for all the products in process and sampling inspection for each lot or every fixed period, and is selected according to the purpose. Then, the first quality information or the characteristic information collected in the first production line 101 is associated with the first identifier and the second identifier, and is stored in the storage unit 124 of the first production management unit 112 or the storage of the second production management unit 113. It is stored in the means 126. The first quality information or the characteristic information collected in the second production line 102 is associated with the first identifier and the second identifier, and is stored in the storage means 124 of the first production management means 112 or the storage means 126 of the second production management means 113. Stored in. The information obtained by this inter-process inspection is the first production line 101.
The first quality information or characteristic information of the constituent elements of the product added in step 2, the second quality information or characteristic information of the constituent elements of the product added in the second production line 102, the first production line 101 and the second production line 102. It may be the third quality information or product information in a combined state (a combined state of the first element group and the second element group) of the constituent elements added in both. This quality information or characteristic information is
The first production control means 112 and the second production control means 113 can be connected by a communication line to share information with each other.

The work-in-process products 108 shipped from the first production line 101 are divided into individual sizes according to the specifications of the manufacturing apparatus group 107 provided in the second production line 102 to form a new second lot. May be. Therefore, as the identifier in the second production line 102, the identifier in the first production line 101 may be applied as it is, or a new identifier may be added when dividing each size.

First production line 101 and second production line 1
In the form of transporting a work-in-process product or a semi-finished product with respect to 02, it is packaged and transported after forming a protective film on the work-in-process product 108 to prevent destruction of the first element group due to environmental pollution or static electricity,
In the second production line 102, the process is performed after removing the protective film. In addition, a shipping inspection is performed when the first production line 101 is shipped, and an arrival inspection is performed in the second production line 102. The shipping inspection and the arrival inspection are performed by the inspection device having the same configuration, and the change in quality due to transportation is inspected by performing mutual reference. Further, it is useful information as a rational criterion for judging the quantity of shipments and the number of non-defective products in the quantity of receipts.

After that, the first quality information or characteristic information and the second
By collating with the quality information or the characteristic information or the third quality information or the product information, the information for specifying the address of the section identified as the non-defective product on the second board is generated, and the second board is separated for each section to make one unit. The functional member is generated, and only the functional member that is a non-defective product is selected from the information that specifies the address, integrated with other information members to form a module, and a product including the module is produced.

In FIG. 7, as a composite product, a pixel panel is formed by a TFT panel in which first element groups 702 and 703 made of TFTs are formed on a substrate 701 made of glass or plastic, and a second element group 704 made of EL elements. An example of the structure of the EL panel by combining the display bodies is shown. The first element groups 702 and 703 composed of TFTs are manufactured on the first production line, and the second element group 704 composed of EL elements are manufactured on the second production line. An example of these steps is shown in FIGS.

Further, in the second manufacturing line, a sealing material 705 and a sealing plate 706 are assembled in order to modularize the EL panel, and F is connected to the input terminal 703.
The PC 707 is attached and connected to an external circuit to form a module. In addition, the module can be used for mobile phones, landlines,
A composite product is completed by incorporating it into an electronic device such as a personal computer or PDA or an information device.

In manufacturing such TFTs in such a composite product, physical contamination by dust or the like, chemical contamination by phosphorus, boron or organic gas, metal such as iron, nickel or sodium, or alkali metal or the like is produced. While it is necessary to clean the manufacturing environment to prevent chemical contamination, EL devices require alkali metals or alkaline earth metals as their constituent materials. Therefore, producing such a composite product in an integrated production line causes a contradiction in practice and requires a great deal of labor. On the other hand, the first production line and the second production line are distinguished physically, geographically, or as a corporation, and by arranging them in distant places or areas, it is possible to eliminate such adverse effects. it can.

In the present embodiment, the first TFT composed of
Although an example of combining the second element group including the EL element with the element group has been shown, the present invention is not limited to this, and includes a combination of the first element group including the TFT and the second element group including the liquid crystal element, and the MIM element. Various combinations such as a combination of the first element group formed of and the second element group formed of the electron source element are possible.

Although the requirements for constructing the production line have been described above, the R & D department and the design / prototype department play an important role in achieving the composite product development and manufacturing / sales in a short time. Includes these departments. The R & D department 103 shown in FIG. 1 develops new products, manufacturing methods and driving methods thereof, and at the same time, holds and holds industrial property rights such as patent rights, trademark rights, and design rights. It is a thing. Based on the newly developed technology, the design and prototype department carries out mass production prototypes and reliability tests, and reflects the technical information in the manufacturing equipment and process conditions of the first production line 101.

Research and development department 103 and design and prototype department 10
4 and the first production line 101 and the second production line 102 may be owned by different corporations. The patent right or the like owned by the research and development department 103 is protected by granting the legal person who owns the first production line a general license or a dedicated license regarding the production method. Further, the corporation that owns the second production line can be protected by granting the normal license or the exclusive license to the products produced in the first production line. By developing better products based on the price, R & D and diffusion of composite products to the market will be accelerated.

On the other hand, on the other hand, it is virtually impossible to secure all industrial property rights for complex products that are to be highly functionalized. For example, the technology according to the patented invention is introduced from another research and development institution 105. It is also a reasonable measure to carry out the above and set a non-exclusive license or exclusive license. As a result, the specified corporation that has the research and development department 103 and the design and prototype department 104
It is possible to concentrate capital in the area of expertise of the company,
A corporation that owns a production line can spread risk.

Although the embodiments of the present invention have been described above, the present invention can be carried out in many different modes, and various forms and details thereof can be obtained without departing from the spirit and scope of the present invention. It is easily understood by those skilled in the art that it can be changed to Therefore, the present invention is not construed as being limited to the description of this embodiment.

[0049]

According to the present invention, the first production line and the second production line
By being physically or geographically distinguished from a production line or as a legal entity and arranged at a remote place or area, it is possible to prevent product defects due to contamination occurring in mutual production lines.

Further, in the first production line, the first
A group of substrates is processed as a first lot in accordance with the first step, and a first element group is formed in each of the regions divided into a plurality of sections on the first substrate to form a work-in-process or a semi-finished product. In the second production line, the first substrate is divided into the second substrates, and one batch of the second substrates is treated as the second lot according to the second process,
By forming the second element group corresponding to the regions divided into a plurality of sections on the second substrate, the production system can handle a wide variety of products in a small amount in response to the diversification of products required in the market. It can respond flexibly and improve the productivity of composite products. In addition, by integrating the R & D department and the production department into separate corporations, it is possible to shorten the period from R & D to commercialization and to disperse the risks related to industrial property rights.

Further, by using the present invention, the TFT
A composite product in which a first element group consisting of an EL element is combined with a second element group consisting of an EL element, a composite product combining a first element group consisting of a TFT and a second element group consisting of a liquid crystal element, MI
Various combinations such as a composite product in which the first element group composed of M elements and the second element group composed of electron source elements are combined are possible, and typical examples of the composite products are a liquid crystal display device and an EL display device. Is.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing an example of a production system according to the present invention.

FIG. 2 is a schematic diagram showing an example of utilization of lot organization and identifiers corresponding to production of a complex multi-product according to the present invention.

FIG. 3 is a diagram illustrating a mutual relationship between lot organization information and identifiers corresponding to production of a complex multi-product according to the present invention.

FIG. 4 is a diagram illustrating a configuration of mutual information transmission between a manufacturing apparatus group of a production line and a production management unit according to the present invention.

FIG. 5 is a process chart showing an example of a production process in the first production line.

FIG. 6 is a process chart showing an example of a production process in the second production line.

FIG. 7 is a diagram showing an example of a configuration of a composite product.

Claims (14)

[Claims] 1. In a production system comprising a plurality of production equipments constituting a production line to produce a product through a plurality of steps, a first production line comprising a plurality of production equipments and the first production line are separated from each other. A second production line that is arranged at a location and that includes a plurality of production facilities; and a first manufacturing device group that includes a plurality of manufacturing devices in the first production line;
A first production management means for performing production management or progress management, wherein the first production management means includes first quality information regarding a first element group formed on a first substrate in the first manufacturing apparatus group. Alternatively, it has a first storage means for storing characteristic information, and the second production line is provided with a second manufacturing device group consisting of a plurality of manufacturing devices and a second production management device for carrying out production management or progress management. To divide the first substrate into second
In a state in which the substrate is a second quality information or characteristic information regarding the second element group formed on the second substrate in the second manufacturing apparatus group, or the first element group and the second element group are combined. The second that stores the third quality information or the product information
Storage means is provided, and the first production management means and the second production management means or the first storage means and the second storage means are capable of mutually communicating the information, and the first quality information or the characteristic. A composite having a function of collating information with the second quality information, the characteristic information, the third quality information, or the product information, and specifying an address of a section identified as a non-defective product on the second substrate. Product production system. 2. A production system for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, is constructed on the basis of a production method licensed from the first patentee, and comprises a plurality of production equipments. A first production line which is composed of a plurality of processing conditions and is capable of applying a plurality of processing conditions;
A second production line which is disposed at a place distant from the production line and uses a product licensed from the second patentee, wherein the first production line comprises a plurality of manufacturing apparatuses. One manufacturing apparatus group and a first production management unit that performs production management or progress management, and the first production management unit includes a first element formed on a first substrate in the first manufacturing apparatus group. It has a first storage means for storing the first quality information or characteristic information about the group, the second production line,
In the second manufacturing device group, a second manufacturing device group including a plurality of manufacturing devices and a second production management means for performing production management or progress management are provided, and the first substrate is divided into second substrates. Second quality information or characteristic information about the second element group formed on the second substrate, or the first element group and the second element information.
It has a second storage means for storing third quality information or product information in a combined state with the element group, the first production management means and the second production management means or the first storage means and the first The two storage means are capable of mutually communicating the information, and collate the first quality information or the characteristic information with the second quality information or the characteristic information or the third quality information or the product information to obtain the second substrate. A production system for a composite product, which has a function of specifying an address of a section identified as a non-defective product in. 3. A production method comprising a plurality of production equipments constituting a production line to produce a product through a plurality of steps, wherein a first production line comprising a plurality of production equipments and the first production line are separated from each other. A second production line that is arranged at a location and that includes a plurality of production facilities; and in the first production line, one group of the first substrates is processed as a first lot according to the first step, A first element group is formed in each region divided into a plurality of sections on the first substrate, and the first element group is formed between the specific steps of the first step.
Collecting first quality information or characteristic information on a first element group formed on a substrate, dividing the first substrate into a second substrate in the second production line, and The batch is processed as a second lot according to a second step, and a second element group is formed on the second substrate in a manner corresponding to the regions divided into the plurality of sections. Second quality information or characteristic information regarding the second element group between the two, or third quality information or product information in a state in which the first element group and the second element group are combined, The quality information or characteristic information is collated with the second quality information or characteristic information or the third quality information or product information to generate information for specifying an address of a section identified as a non-defective product on the second substrate, The second substrate is the section To generate a unit of a functional member, select only the functional member that is a non-defective product from the information that specifies the address, integrate it with other constituent members into a module, and manufacture a product incorporating the module. A method for producing a composite product, which is characterized in that 4. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipment constituting a production line, wherein a first production line comprising a plurality of production equipment and the first production line are separated from each other. A second production line which is arranged at a place and which is composed of a plurality of production facilities; and in the first production line, one batch of the first substrates is treated as a first lot according to a first step, A first element group is formed for each region divided into a plurality of sections on the first substrate, and a first quality relating to the first element group formed on the first substrate between specific steps of the first step. Information or characteristic information is collected, a protective film for preventing destruction of the first element group due to environmental pollution or static electricity is formed on the first substrate, and the first substrate is transferred from the first production line to the second production line. Transport the second In production lines, the second and the substrate by dividing the first substrate, the unity of one consisting of the second substrate as the second lot, after removing the protective film,
A second element group is formed on the second substrate corresponding to the regions divided into the plurality of sections by performing the process according to the second step, and the second element group is formed between the specific steps in the order of the second step. Two
Second quality information or characteristic information about the element group or the first
Collecting third quality information or product information in a state where the element group and the second element group are combined, and collect the first quality information or characteristic information and the second quality information or characteristic information or third quality. Information or product information is collated to generate information for specifying the address of a section of the second substrate that is identified as a non-defective product, and the second substrate is separated for each section to generate one unit of functional member. A method for producing a composite product, which comprises selecting only a functional member that is a non-defective product from the information that specifies the address, integrating it with other constituent members to form a module, and producing a product incorporating the module. 5. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein a first production line comprising a plurality of production equipments and the first production line are separated from each other. A second production line that is arranged at a location and that includes a plurality of production facilities; and in the first production line, assigns a first identifier to each first substrate, and attaches one group of the first substrates to a carrier. Paying, and giving the carrier a second identifier for identifying the one group,
Forming a first element group for each region divided into a plurality of sections on the first substrate according to a process and processing conditions programmed corresponding to the first identifier and the second identifier,
The first quality information or the characteristic information regarding the first element group formed on the first substrate between the specific steps of the first step is collected in association with the first identifier, The first substrate is divided into the second substrate,
A set of the second substrates is treated as a second lot according to a second step, and a second element group is formed on the second substrate corresponding to the regions divided into the plurality of sections. Second quality information or characteristic information regarding the second element group or a third state in a state in which the first element group and the second element group are combined between the specific steps in the second step order.
Quality information or product information is collected, the first quality information or characteristic information is collated with the second quality information or characteristic information, or third quality information or product information, and the product is identified as a good product on the second substrate. Information for specifying the address of the section to be generated, the second substrate is separated for each of the sections to generate one unit of functional member, and only the functional member that is a good product is selected from the information for specifying the address. A method for producing a composite product, which comprises integrating with other components to form a module and producing a product incorporating the module. 6. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein a first production line comprising a plurality of production equipments and the first production line are separated from each other. A second production line that is arranged at a location and that includes a plurality of production facilities; and in the first production line, assigns a first identifier to each first substrate, and attaches one group of the first substrates to a carrier. Paying, and giving the carrier a second identifier for identifying the one group,
Forming a first element group for each region divided into a plurality of sections on the first substrate according to a process and processing conditions programmed corresponding to the first identifier and the second identifier,
The first quality information or the characteristic information regarding the first element group formed on the first substrate during the specific step of the first step is collected in association with the first identifier, and the first substrate is environmentally polluted or A protective film is formed to prevent destruction of the first element group due to static electricity, the first substrate is transported from the first production line to the second production line, and the first substrate is divided in the second production line. Then, the second substrate is used as a second substrate, and a single lot made of the second substrate is used as a second lot. After removing the protective film, a process is performed according to a second step to form the plurality of sections on the second substrate. A second element group is formed corresponding to the divided regions, and second quality information or characteristic information regarding the second element group or the first element group and the second element between the specific steps in the second step sequence. In the state where the element group is combined Collecting third quality information or product information, collating the first quality information or characteristic information with the second quality information or characteristic information or third quality information or product information, and determining that the second board is a good product. Information for specifying the address of the section to be identified is generated, the second substrate is separated for each section to generate one unit of functional member, and only the functional member that is a non-defective product is selected from the information for specifying the address. Then, a method for producing a composite product is characterized in that it is integrated with other components into a module to produce a product incorporating the module. 7. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein a first production line comprising a plurality of production equipments and the first production line are separated from each other. A second production line including a plurality of production equipments, which is arranged at a place, and in the first production line, a first identifier is given to each first substrate, and the process processing condition for each first substrate is given. Allocating corresponding to the first identifier, storing the information related to the processing condition in the storage means, and storing one set of the first substrate in the carrier,
A second identifier for identifying the one group is given to the carrier, and management information as a set of process processing conditions based on the first identifier is stored in a storage unit, and the second information is stored.
The progress information of the process based on the identifier and the process information of the process based on the first identifier are managed by the information processing device, and the first element group is formed in each of the regions divided into a plurality of sections on the first substrate. Then, the first quality information or the characteristic information regarding the first element group formed on the first substrate during the specific step of the first step is collected in association with the first identifier and stored in the storage means. In the second production line, the first substrate is divided into second substrates, and one set of the second substrates is treated as a second lot according to the second step, and then processed on the second substrate. A second element group is formed corresponding to the regions divided into the plurality of sections, and second quality information or characteristic information or the first element group regarding the second element group between the specific steps in the second step order. And the second element group are combined The third quality information or the product information in the opened state, and collates the first quality information or the characteristic information with the second quality information or the characteristic information or the third quality information or the product information to obtain the second quality information or the characteristic information. Information for specifying the address of a section identified as a non-defective on the board is stored in the storage means, the second board is separated for each section to generate one unit of the functional member, and the information for specifying the address is used. A method for producing a composite product, which comprises selecting only functional members that are non-defective products, integrating them with other constituent members to form a module, and producing a product incorporating the module. 8. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein a first production line comprising a plurality of production equipments and the first production line are separated from each other. And a second production line including a plurality of production facilities arranged at a place, wherein a first identifier is given to each first substrate in the first production line, and the process processing conditions for each first substrate are described above. Allocating corresponding to the first identifier, storing the information on the processing condition in the storage means, and storing one set of the first substrate in the carrier,
A second identifier for identifying the one group is given to the carrier, and management information as a set of process processing conditions based on the first identifier is stored in a storage unit to store the second information.
The progress information of the process by the identifier and the process information of the process by the first identifier are managed by the information processing device, and the first element group is formed in each of the regions divided into a plurality of sections on the first substrate. , Collecting first quality information or characteristic information relating to the first element group formed on the first substrate between the specific steps of the first step in association with the first identifier, and saving the collected information in a storage means, A protective film is formed on the first substrate to prevent destruction of the first element group due to environmental pollution or static electricity, the first substrate is transported from the first production line to the second production line, and the second production is performed. In the line, the first substrate is divided into second substrates, and one set of the second substrates is used as a second lot. After removing the protective film, the second substrate is processed according to a second step, and the second substrate is processed. 2 The plurality of sections on the substrate Corresponds to a region which is divided into a second
In a state in which an element group is formed and second quality information or characteristic information regarding the second element group between the specific steps in the second step order or the first element group and the second element group are combined. 3 quality information or product information is collected, and the first quality information or characteristic information is collated with the second quality information or characteristic information or the third quality information or product information, and identified as a good product on the second substrate. Information for specifying the address of the section to be generated, the second substrate is separated for each of the sections to generate one unit of functional member, and only the functional member that is a non-defective product is selected from the information for specifying the address. A method for producing a composite product, which comprises integrating the other components into a module to produce a product incorporating the module. 9. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein the production method comprises a production method licensed from a patentee. In the first production line that is applicable to a plurality of processing conditions, one batch of the first substrates is processed as a first lot according to the first step, and a plurality of the first substrates are processed on the first substrate. A product relating to the first element group formed on the first substrate between the specific steps of the first step is produced in the process of producing a product in which the first element group is formed for each of the regions divided into sections. 1 In the second production line, which collects quality information or characteristic information and uses a product licensed from the patentee, and which is capable of applying a plurality of processing conditions consisting of a plurality of production facilities, The first substrate is divided into second substrates, one batch of the second substrates is treated as a second lot according to the second step, and the regions are divided into the plurality of sections on the second substrate. Corresponding to the second element group is formed, and in the process, second quality information or characteristic information regarding the second element group or the first element group and the second element between the specific steps in the second step order. Collecting third quality information or product information in a state where the group is combined, and collating the first quality information or characteristic information with the second quality information or characteristic information or third quality information or product information. Information that specifies the address of a section that is identified as a non-defective on the second board, separates the second board for each of the sections to generate a unit of functional member, and specifies the address. Function that becomes a good product from The method of producing composite products, characterized in that by selecting only the wood modular integrated with other components, to produce a product incorporating the module. 10. A production method for producing a product through a plurality of steps, which comprises a plurality of production facilities constituting a production line, wherein the production method is constructed based on the production method licensed from the patentee. In the first production line that is applicable to a plurality of processing conditions, one batch of the first substrates is processed as a first lot according to the first step, and a plurality of the first substrates are processed on the first substrate. A product relating to the first element group formed on the first substrate between the specific steps of the first step is produced in the process of producing a product in which the first element group is formed for each of the regions divided into sections. 1. Collecting quality information or characteristic information, forming a protective film on the first substrate to prevent destruction of the first element group due to environmental pollution or static electricity, and from the first production line to the second production line. The first substrate is divided in a second production line that transports the plates and uses the product licensed by the patentee, and that is capable of applying a plurality of processing conditions consisting of a plurality of production facilities. As a second substrate, one batch of the second substrates as a second lot, the protective film is removed, and then the second substrate is processed according to the second step.
A second element group is formed on the second substrate so as to correspond to the regions divided into the plurality of sections, and in the process, second quality relating to the second element group between specific steps in the second step order. Information or characteristic information, or third quality information or product information in a state in which the first element group and the second element group are combined, and the first quality information or characteristic information and the second quality information are collected. Alternatively, by collating with the characteristic information or the third quality information or the product information, the information specifying the address of the section identified as the non-defective product on the second substrate is generated,
The second substrate is divided into each of the sections to generate one unit of functional member, and only the functional member that is a non-defective product is selected from the information for specifying the address, and the functional member is integrated with other constituent members to form a module. A method for producing a composite product, comprising producing a product incorporating a module. 11. A production method for producing a product through a plurality of steps, which comprises a plurality of production facilities constituting a production line, the production method being licensed from the patentee, and comprising a plurality of production facilities. In the first production line which is made up of a plurality of processing conditions and is provided with a first identifier for each first substrate, a single group of the first substrates is stored in a carrier, and the single group is identified. Second
An identifier is given to the carrier, and the first identifier and the second identifier are added.
According to the process and processing conditions programmed corresponding to the identifier, a product in which the first element group is formed in each of the regions divided into a plurality of sections on the first substrate is produced. Collecting first quality information or characteristic information about the first element group formed on the first substrate between specific steps of one step, and using a product licensed from the patentee, a plurality of productions are performed. In a second production line including equipment, which is capable of applying a plurality of processing conditions, the first substrate is divided into second substrates,
One group of substrates is treated as a second lot according to the second step, and a second element group is formed on the second substrate corresponding to the regions divided into the plurality of sections. In the process, , Second quality information or characteristic information regarding the second element group between the specific steps in the second step order, or third quality information in a state in which the first element group and the second element group are combined, or Collecting product information, the first
The quality information or characteristic information is collated with the second quality information or characteristic information or the third quality information or product information, and the second information
A function of generating information for specifying an address of a section identified as a non-defective on the board, separating the second board for each of the sections to generate one unit of a functional member, and determining a non-defective from the information for specifying the address. A method for producing a composite product, which comprises selecting only a member, integrating it with other constituent members to form a module, and producing a product incorporating the module. 12. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments forming a production line, the production method being based on the production method licensed from the patentee. In the first production line which is made up of a plurality of processing conditions and is provided with a first identifier for each first substrate, a single group of the first substrates is stored in a carrier, and the single group is identified. Second
An identifier is given to the carrier, and the first identifier and the second identifier are added.
According to the process and processing conditions programmed corresponding to the identifier, a product in which the first element group is formed in each of the regions divided into a plurality of sections on the first substrate is produced. The first quality information or the characteristic information about the first element group formed on the first substrate is collected during a specific step of one step, and the first substrate is protected from environmental pollution or static electricity to destroy the first element group. A protective film is formed, the first substrate is transported from the first production line to the second production line, and a product licensed from the patentee is used to form a plurality of production facilities. In the second production line that can apply processing conditions,
On the second substrate, the first substrate is divided into second substrates, one set of the second substrates is used as a second lot, the protective film is removed, and then the second substrate is processed according to a second step. Corresponding to the area divided into the plurality of sections
An element group is formed, and in the process, second quality information or characteristic information regarding the second element group or the first element group and the second element group during the specific step of the second step order is combined. The third quality information or the product information in the closed state, and collects the first quality information or the characteristic information and the second quality information.
The quality information or the characteristic information or the third quality information or the product information is collated, and the information for specifying the address of the section identified as the non-defective product on the second board is generated, and the second board is separated for each section. To generate one unit of functional material,
A method for producing a composite product, characterized in that only a functional member that is a non-defective product is selected from the information specifying the address, integrated with other constituent members into a module, and a product incorporating the module is produced. 13. A production method for producing a product through a plurality of steps, which comprises a plurality of production facilities constituting a production line, wherein the production method is licensed from the patentee and comprises a plurality of production facilities. In the first production line which is made up of a plurality of processing conditions and is provided with a first identifier for each first substrate, the process processing condition for each first substrate is assigned in correspondence with the first identifier. , Storing information about the processing conditions in a storage unit, storing one group of the first substrates in a carrier, giving a second identifier for identifying the one group to the carrier, and
Management information as a set of process processing conditions based on the identifier is stored in the storage means, and the information processing device manages the process progress information based on the second identifier and the process processing information based on the first identifier. To produce a product in which the first element group is formed in each of the regions divided into a plurality of sections on the first substrate, and the product is formed on the first substrate between the specific steps of the first step. The first quality information or the characteristic information about the first element group is collected in association with the first identifier and stored in the storage means, and the product licensed from the patentee is used to produce a plurality of production facilities. In the second production line, which is capable of applying a plurality of processing conditions, the first substrate is divided into second substrates, and one set of the second substrates is treated as a second lot according to the second step. Processing A second element group is formed on the second substrate corresponding to the regions divided into the plurality of sections, and in the process, a second quality regarding the second element group between the specific steps in the second step order. Information or characteristic information, or third quality information or product information in a state in which the first element group and the second element group are combined, and the first quality information or characteristic information and the second quality information are collected. Alternatively, the characteristic information or the third quality information or the product information is collated, and the information for specifying the address of the section identified as the non-defective product on the second board is stored in the storage means, and the second board is set for each section. To generate a unit of a functional member, select only the functional member that is a non-defective product from the information that specifies the address, integrate it with other constituent members into a module, and manufacture a product incorporating the module. This The method of producing composite products, wherein. 14. A production method for producing a product through a plurality of steps, which comprises a plurality of production equipments constituting a production line, wherein the production method is based on the production method licensed from the patentee. In the first production line which is made up of a plurality of processing conditions and is provided with a first identifier for each first substrate, the process processing condition for each first substrate is assigned in correspondence with the first identifier. , Storing information about the processing conditions in a storage unit, storing one group of the first substrates in a carrier, giving a second identifier for identifying the one group to the carrier, and
Management information as a set of process processing conditions based on the identifier is stored in the storage means, and the information processing device manages the process progress information based on the second identifier and the process processing information based on the first identifier. To produce a product in which the first element group is formed in each of the regions divided into a plurality of sections on the first substrate, and the product is formed on the first substrate between the specific steps of the first step. First quality information or characteristic information about the first element group is collected in association with the first identifier and stored in a storage unit to prevent destruction of the first element group due to environmental pollution or static electricity on the first substrate. A protective film is formed, the first substrate is transported from the first production line to the second production line, and a product licensed from the patentee is used to form a plurality of production facilities. Apply processing conditions In a possible second production line,
On the second substrate, the first substrate is divided into second substrates, one set of the second substrates is used as a second lot, the protective film is removed, and then the second substrate is processed according to a second step. Corresponding to the area divided into the plurality of sections
In a state in which an element group is formed and second quality information or characteristic information regarding the second element group between the specific steps in the second step order or the first element group and the second element group are combined. 3 quality information or product information is collected, and the first quality information or characteristic information is collated with the second quality information or characteristic information or the third quality information or product information, and identified as a good product on the second substrate. Information for specifying the address of the section to be generated, the second substrate is separated for each of the sections to generate one unit of functional member, and only the functional member that is a non-defective product is selected from the information for specifying the address. A method for producing a composite product, which comprises integrating the other components into a module to produce a product incorporating the module.