JP2003181378A - Ultrasonic vibration system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ultrasonic vibration system and a ultrasonic vibrator hard to be damaged and having high power and stable quality. <P>SOLUTION: Two horns of the ultrasonic vibration system are joined to each other in the outside of the outer circumference. The force for fastening is controlled by controlling the size. Two rods of a ultrasonic vibrator are joined to each other in the outside of the outer circumference. The force for fastening is controlled by controlling the size. Air is ventilated in through holes to carry out cooling. Consequently, a ultrasonic vibration system and a ultrasonic vibrator hard to be damaged and having high power and stable quality can be obtained. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibration system, and more particularly to an ultrasonic vibration system used for ultrasonic wave application techniques such as ultrasonic machining, ultrasonic welding and ultrasonic plastic working. .

[0002]

2. Description of the Related Art In recent years, ultrasonic vibration machining using an ultrasonic system has come into wide use. The ultrasonic system is composed of an ultrasonic oscillator which is an electronic device and an ultrasonic vibration system which is a mechanical device. And the ultrasonic vibration system 1
As shown in the outline in FIG. 14, it is composed of an ultrasonic transducer 2, a cone 3 and a horn 4, which are sequentially connected by a connecting screw 5. The ultrasonic vibrator 2 is usually a Langevin type ultrasonic vibrator (sometimes referred to as BLT) in which a piezoelectric element 2a is sandwiched between two rods and the rod is fastened with bolts 6.
Is used. The displacement loop and the displacement node of the ultrasonic vibration are as shown in FIG. 15, and the ultrasonic oscillator, the cone and the horn each have a length of ½ of the wavelength of the ultrasonic wave and are displaced on the end faces. Loop L1, L2, L3, L
4, and also has displacement nodes N1, N2 and N3 in the middle. Each length may be several times λ / 2. Patent publication Sho 36-1
In the electromechanical force transmission device disclosed in 682, it is disclosed that a piezoelectric element is sandwiched by two rods, a bolt passing through a center hole of the two rods is tightened with a nut, and the two rods are tightened.
It is also disclosed that the tightening device is externally arranged. But there is no suggestion of how to tighten it.

[0003]

The conventional ultrasonic vibration system has problems such as damage of the ultrasonic vibrator, damage of the tightening portion between the cone and the horn, and the like due to screwing. That is, in the Langevin type ultrasonic transducer, the piezoelectric element is sandwiched by two rods and the bolts are tightened. Since the internal threads of the bolt and the rod are in the high stress region, there is a problem that the bolt or the rod is cracked and damaged. There were also performance constraints due to the non-uniformity of the compressive load. At the same time, the temperature rises during operation, but there is a problem that it is damaged due to insufficient cooling. Also, when using a ceramic horn, it is not easy to screw a screw on the ceramic material, and even if it is screwed, it will not be stable in vibration transmission when it is connected with the cone and the screw, and it will be damaged. There was a problem that it was easy. Further, in the plastic working such as pipe drawing or wire drawing, the shape and structure of the die mounting portion becomes complicated, so that mounting and replacement are not easy. Further, since the horns are engaged with each other by screwing, cracks frequently occur in the screw threaded portions. Therefore, the use of ultrasonic vibrations in plastic working is limited, and the use of a large amount of lubricating oil used in other processing methods, which also contributes to environmental pollution, cannot be reduced. There was a problem that improvement was requested from the viewpoint of environmental conservation. Further, in the technology of applying ultrasonic waves of relatively high frequency, the ultrasonic vibration system is generally small in size, which makes it difficult to apply the connecting screw method. In the first place, tightening by screwing has a problem of difficulty in torque management. That is, in the Langevin type ultrasonic transducer, it is not possible to improve the accuracy of tightening torque management, so that there is a large variation in the characteristics of each product, and stable quality cannot be secured. In the connection of the cone and the horn, when the tightening torque is too large, the development of cracks is promoted, and when the tightening torque is too small, there is a problem that abnormal noise occurs on the contact surface. When mounting a die for plastic working, there is a problem that the frequency of the ultrasonic vibration system is not constant and stable operation is difficult because the tightening torque cannot be controlled accurately when the die is replaced.

In view of the above problems, the present invention is less likely to break,
An object is to provide an ultrasonic vibration system of high performance and stable quality.

[0005]

According to the present invention, there is provided a first unit waveguide rod, a second unit waveguide rod, and a first locking member which engages with the outer periphery of the first unit waveguide rod. A second locking member that engages with the outer periphery of the second unit waveguide rod, a first holding member, and a second
The first holding member and the second holding member include the first holding member and the second holding member inserted between the first holding member and the second holding member. When the holding member is sandwiched between the first unit waveguide rod and the second unit waveguide rod in close contact with each other, a gap is formed between the first locking member and the second locking member. When the first locking member and the second locking member, which are formed so as to exist, are fastened and locked to each other via the second holding member so that the gap disappears, the first locking member and the second locking member are locked. An ultrasonic vibration system is configured in which a compressive load is applied to the sandwiching member, the first unit waveguide rod, and the second unit waveguide rod.

The present invention also provides a first unit waveguide rod and a second unit waveguide rod.
The unit waveguide rod, a first locking member that engages with the outer circumference of the first unit waveguide rod, a second locking member that engages with the outer circumference of the second unit waveguide rod, and A member, and the holding member includes a first locking member and a first locking member when the holding member is tightly held between the first unit waveguide rod and the second unit waveguide rod. A gap is formed between the first locking member and the second locking member, and when the first locking member and the second locking member are tightened and locked to each other so that the void disappears, A compressive load is applied to the sandwiching member, the first unit waveguide rod, and the second unit waveguide rod, thereby forming an ultrasonic vibration system.

The present invention also provides a first unit waveguide rod and a second unit waveguide rod.
Unit waveguide rod, a first locking member that engages with the outer circumference of the first unit waveguide rod, and a second locking member that engages with the outer circumference of the second unit waveguide rod. When the first unit waveguide rod and the second unit waveguide rod are in close contact with each other, the first locking member and the second locking member have the first locking member and the second locking member. A gap is formed between the first locking member and the second locking member, and when the first locking member and the second locking member are fastened and locked to each other so that the void disappears, An ultrasonic vibration system is constructed in which a compressive load is applied to the unit waveguide rod and the second unit waveguide rod.

Further, according to the present invention, the first locking member engages with a substantially middle outer circumference of the first unit waveguide rod and extends toward the end along the outer circumference, and the second locking member is provided. The member according to claim 1, 2 or 3, wherein the member engages with a substantially middle outer circumference of the second unit waveguide rod and extends along the outer circumference toward an end portion. A sonic vibration system was constructed.

Further, according to the present invention, the first locking member engages with the outer circumference of the first unit waveguide rod, and bulges outward, and then goes to the end portion substantially parallel to the outer circumference, The locking member of (1) engages with the outer circumference of the second unit waveguide rod, protrudes outward, and then heads toward the end substantially parallel to the outer circumference. The ultrasonic vibration system according to claim 3 is configured.

The present invention further comprises tightening means, and the tightening means tightens the first locking member and the second locking member. The ultrasonic vibration system according to Item 3 was constructed.

The present invention also provides a piezoelectric element, holding means,
A first locking member, a second locking member, a spacing ring,
Tightening means, wherein the holding means comprises a first holding member and a second holding member for sandwiching the piezoelectric element, and the first locking member engages with the outer circumference of the first holding member. , The second locking member engages the outer periphery of the second holding member, and the spacing ring inserts the spacing ring between the first locking member and the second locking member, When the piezoelectric element is sandwiched between the first holding member and the second holding member in close contact with each other, a gap exists between the first locking member and the second locking member. The tightening means is tightened to lock the first locking member and the second locking member to each other via the spacing ring so that the gap disappears. The ultrasonic transducer is characterized in that a compressive load is applied to the holding member and the second holding member.

The present invention also provides a piezoelectric element, holding means, and
A first locking member, a second locking member, and a tightening means are provided, and the holding means includes a first holding member and a second holding member that sandwich the piezoelectric element. Locking member engages with the outer periphery of the first holding member, and the second locking member engages the second holding member.
Engaging with the outer periphery of the holding member, and the first locking member and the second locking member sandwich the piezoelectric element in close contact with each other between the first holding member and the second holding member. At this time, a gap is formed between the first locking member and the second locking member, and the tightening means separates the first locking member and the second locking member from each other. The ultrasonic transducer is characterized in that the piezoelectric element, the first holding member and the second holding member are loaded with a compressive load by being tightened and locked so as to disappear.

Further, according to the present invention, the piezoelectric element and the pair of holding members each have a through hole formed in a central hole, and an inflow hole through which a cooling gas flows. The ultrasonic transducer according to claim 7 or claim 8 is configured.

The present invention also provides a piezoelectric element, a front round bar,
The rear round bar, the front locking member, the rear locking member, the spacing ring, and the tightening means are provided, and the front round bar and the rear round bar sandwich the piezoelectric element, and the front locking. The member engages with the outer periphery of the front round bar on the side not contacting the piezoelectric element, extends through the slit to the side contacting the piezoelectric element, and forms a front locking surface at the end thereof. The rear surface locking member engages with the outer periphery of the rear surface round bar that does not contact the piezoelectric element, and extends to the surface side that contacts the piezoelectric element through a slit to form an end portion thereof. Forming a rear surface locking surface, the spacing ring, the spacing ring is inserted between the front surface locking surface and the rear surface locking surface, the piezoelectric element between the front round bar and the rear round bar. When closely sandwiched between the two, they are formed so that a gap exists between the front locking surface and the rear locking surface. The tightening means tightens the front locking member and the rear locking member so as to eliminate the gap through the spacing ring and locks the piezoelectric element, the front round bar and the rear surface. An ultrasonic transducer characterized by applying a compressive load to a round bar was constructed.

The present invention also includes a piezoelectric element, a front round bar,
A rear round bar, a front locking member, a rear locking member, and a tightening means. The front round bar and the rear round bar sandwich the piezoelectric element, and the front locking member is The front round bar engages with the outer periphery of the surface not contacting the piezoelectric element, extends through the slit to the surface contacting the piezoelectric element, and forms a front locking surface at the end thereof, The rear surface locking member engages with the outer circumference of the surface of the rear round bar that does not contact the piezoelectric element, extends to the surface side that contacts the piezoelectric element through a slit, and locks the rear surface at its end. And a front surface locking member and a rear surface locking member, the front surface locking member and the rear surface locking member, when the piezoelectric element is closely sandwiched between the front surface round bar and the rear surface round bar, respectively. A space is formed between the rear locking surface and the rear locking surface, and the tightening means connects the front locking member and the rear locking member to each other. Engage each other tightened so voids disappear, and constituting the piezoelectric element, ultrasonic transducers, characterized in that loading the compressive load on the front rod and the rear rod.

According to the present invention, the piezoelectric element, the front round bar and the rear round bar each have a through hole formed in a central portion thereof, and the front round bar, the rear round bar and the front link. 11. A slit layer formed between a stop member and the rear locking member, and an inflow port through which a cooling gas flows into the through hole or the slit layer. The ultrasonic transducer according to item 11 was configured.

[0017]

In the invention described in claims 1 to 6, the cone or the horn is tightened by the locking member provided on the outside of the outer circumference, and a static static load is applied to the cone or the horn. At that time, since the tightening force is controlled with extremely high precision by dimensional control, the applied static load is controlled with extremely high precision. According to the invention described in claims 7 to 12, the piezoelectric element is tightened by the locking member provided on the outer side of the outer periphery, and the static load of compression is applied to the round bar sandwiched with the piezoelectric element. At that time, since the tightening force is controlled with extremely high precision by dimensional control, the applied static load is controlled with extremely high precision. In the invention described in claims 9 and 12, the piezoelectric element is sufficiently cooled.

FIG. 1, FIG. 2 and FIG. 3 for the first embodiment
Will be described. FIG. 1 is a conceptual diagram of the ultrasonic vibration system, FIG. 2 is a sectional view passing through the central axis of the ultrasonic vibration system before tightening, and FIG. 3 is a sectional view passing through the central axis of the ultrasonic vibration system after tightening. The ultrasonic vibration system 1 is composed of an ultrasonic vibrator 11, a cone 12 and a horn 13 which are sequentially coupled. Ultrasonic transducer 11
Is a vibrator for generating ultrasonic waves, the cone 12 is a unit waveguide rod for accelerating ultrasonic vibration, and the horn 13 is a unit waveguide rod for accelerating ultrasonic vibration. A piezoelectric element 14 is inserted into the ultrasonic oscillator 11, and one end 11a of the ultrasonic oscillator 11 is free, but a cone 12 is fixedly attached to the other end 11b at one end 12a thereof. The horn 1 is attached to the other end 12b of the cone 12.
3 is fixed at one end 13a thereof. The other end 13b of the horn 13 is a free end, but may be engaged by a tool or may be engaged by another horn. The vibration generated by the piezoelectric element 14 upon receiving the excitation voltage from the oscillator 15 passes through the cone 12 and is output from the horn 13 with the amplitude increased as necessary. The ultrasonic transducer 11 and the cone 12 are the mounting member 11c and the cone 1 of the ultrasonic transducer 11.
It is attached to a base (not shown) by means of two attachment members 12c.

The cone 12 is made of nickel chrome steel and has an outer diameter of 40 mm and a length of 170 mm, and has a substantially cylindrical shape.
A point 1 which is approximately halfway between the one end face 12a and the other end face 12b.
The sleeve 15 made of nickel chrome steel and having a thickness of 4.5 mm is inserted into the cone 12 through the slit 14 having a gap of 4 mm from 2d.
Are formed so as to enclose the inside of the cone 12, and extend parallel to the outer circumference of the cone 12. The sleeve 15 has an outer diameter of 57 mm and an inner diameter of 48 m.
m. A flange 16 having an outer diameter of 75 mm, an inner diameter of 48 mm and a thickness of 8.0 mm is formed at the end of the sleeve 15.
The flange 16 is provided with a hole 16a. The end surface 16b of the flange 16 is flush with the end surface 12b of the cone 12.

The horn 13 is made of nickel chrome steel and has an outer diameter of 40 mm and a length of 170 mm, and has a substantially cylindrical shape.
Almost point 13d of the one end face 13a and the other end face 13b
A sleeve 18 made of nickel chrome steel and having a thickness of 4.5 mm is formed so as to enclose the horn 13 through a narrow gap 17 having a clearance of 4 mm, and extends parallel to the outer periphery of the horn 13. The sleeve 18 has an outer diameter of 57 mm and an inner diameter of 48 mm. 75 mm outer diameter and 48 inner diameter at the end of the sleeve 18.
A flange 19 having a thickness of 8.0 mm and a thickness of 8.0 mm is formed, and a hole 19a is formed in the flange 19. Flange 19
End surface 19b of the horn 13 is flush with the end surface 13a of the horn 13. The cone 12 and the sleeve 15 and the horn 13 and the sleeve 18 may be integrally formed, or may be separately processed and then combined.

The end faces of the flange 16 and the flange 19 are
That is, the end faces of the cone 12 and the horn 13 are smooth and form faces 16b and 19b, respectively. Usually surface 16
b and surface 19b are the surface 12b of the cone 12 and the horn 13.
Are formed on the same surface as the surface 13a. Although not necessarily formed on the same surface, forming the surface on the same plane makes it possible to form the surface flat and smooth most easily in processing. The thin plate 20 is made of beryllium copper having a thickness of 0.36 mm. The thin plate 20 is the end surface 12b of the cone 12.
Even if they are inserted between the end face 13a of the horn 13 and the end face 13a of the horn 13 and come into contact with each other, a gap 2 is formed between the flange 16 and the flange 19 while the tightening by the bolt 21 and the nut 22 is not yet performed.
There are three. The void 23 has a size equal to the thickness of the thin plate 20 and serves as a tightening margin. That is, the size of the interference is 0.36 mm. The flanges 16 and 19 are provided with holes 16a and 19a at positions corresponding to six holes, respectively. The bolt 21 is inserted through the corresponding holes 16a and 19a, and the nut 22 is connected to the bolt 21.

Next, the operation will be described. The thin plate 20 is inserted between the end surface 12b of the cone 12 and the end surface 13a of the horn 13. At that time, there is a gap 23 between the end surface 16b of the flange 16 and the end surface 19a of the flange 19, and the two are not in close contact with each other. The size of the void 23 is 0.
Equal to 36 mm. A nut 22 is screwed into a bolt 21 passing through the holes 16a and 19a and tightened, and the previously existing tightening margin is tightened to eliminate the void 23. At this time, the cone 12, the thin plate 20, and the horn 13 contract, and at the same time, the sleeve 15 and the sleeve 18 extend and the void 23 disappears. The state where the end surface 16b of the flange 16 and the end surface 19b of the flange 19 are in contact is as shown in FIG.

A compressive load is applied between the cone 12b and the horn 13a, and a tensile load is applied between the sleeve 15 and the sleeve 18. The tightening margin is set in advance so that the compressive load and the tensile load do not exceed the allowable maximum load. When the frequency is 15 kHz, the cone 12 and the horn 13 each have an outer diameter of 40 mm, a length of 170 mm, and a slit 1
4 and the slit 17 are 4 mm respectively, and the sleeve 15 and the sleeve 18 are outer diameter 57 mm, inner diameter 48 mm, and wall thickness 4.5.
mm, length 65 mm, tightening margin 0.44 mm, nickel chrome steel cone 12 and horn 1
The compressive load generated in 3 is approximately 289 × 10 3 N, or
The tensile stress generated in the sleeve 15 and the sleeve 18 is 3.90 × 10 8 Pa, that is, 40.0 kgf /
At mm2, it is about 1/3 of the stress at yield point. Also, the magnitude of the compressive load assures normal operation. Therefore, there is no risk of creep occurring.

Next, it will be described that the ultrasonic vibrating body according to the present embodiment is hard to break and maintains high performance. In the ultrasonic vibrating body according to the present embodiment, the tightening is performed not on the inside of the cone and the horn but on the outside of the outer circumference, and the cone and the horn are uniformly loaded with a compressive load in a wide range. Since tightening of screws such as bolts is performed externally without vibration, there is no damage due to internal screwing, and damage is less likely to occur, so performance can be improved. Moreover, since the tightening is performed outside the displacement node, the tightening site is not damaged. Further, the tightening is performed by pressing the cone and both flanges provided on the outer periphery of the outer periphery of the horn so as to be smooth and flat and in close contact with each other. Therefore,
The magnitude of the pressing force is not controlled by the tightening torque when tightening the bolts and nuts, but is controlled in advance by the thickness of the thin plate at the stage of processing the parts. Needless to say, the machining and rolling of the metal material can be performed with extremely high accuracy. By adopting the dimensional control, in this embodiment, the cone and the horn can be tightened with high accuracy, and the performance of the ultrasonic vibrating body is improved and stabilized.

A second embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a sectional view through the central axis of the ultrasonic vibration system before tightening, and FIG. 5 is a sectional view through the central axis after tightening. Description of the same or similar matters as in the first embodiment will be omitted. The cone 26 has a substantially cylindrical shape and has smooth parallel-plane end faces at both ends. The one end face 26
The slit 28 is formed from a point 26d that is approximately halfway between a and the other end surface 26b.
A sleeve 29 is formed on the outside of the outer periphery 26f of the cylindrical central portion 26e, and extends parallel to the outer periphery 26f. A flange 30 is formed at the end of the sleeve 29,
The flange 30 is provided with a hole 30b. The end surface 30b of the flange 30 is a smooth flat surface and is parallel to the end surface 26b, but at a position slightly retracted. The horn 27 has a substantially cylindrical shape, and has smooth parallel flat end faces at both ends. 2 in the middle of one end face 27a and the other end face 27b
A sleeve 32 is formed on the outer periphery 27f of the cylindrical central portion 27e from the 7d through the slit 31 and the outer periphery 27 of the horn 27 is formed.
It extends parallel to f. A flange 33 is formed at the end of the sleeve 32, and a hole 33b is formed in the flange 33. The end surface 33b of the flange 33 is a smooth flat surface and is parallel to the end surface 27a, but is in a position slightly retracted.
A bolt 34 is inserted through the holes 30a and 33a,
The bolt 34 is screwed with the nut 35. Bolt 3 to be screwed
There are 6 sets of 4 and nuts 35.

Next, the operation will be described. While the end face 26b of the cone 26 and the end face 27a of the horn 27 face each other and are in close contact with each other, the end face 30b of the flange 30 and the flange 33
End faces 33b of the two are opposed to each other. There is a void 36 between the two end faces, which is equal to the sum of both minute amounts. A nut 35 is screwed into a bolt 34 passing through the hole 30a and the hole 33a and tightened. The end surface 26b of the cone 26 and the end surface 27a of the horn 27 are brought into contact with each other, and the nuts 35 are tightened by tightening the six bolts 34. End face 30b and end face 33
The void 36 disappears between the end face 30b and the end face 33b.
Is in close contact with. A compressive static load is applied between the end surface 26b of the cone 26 and the end surface 27a of the horn 27, and a tensile static load is applied between the sleeve 29 and the sleeve 32.

A third embodiment of the present invention will be described with reference to FIG. FIG. 6 is a conceptual diagram showing the amplitude of the ultrasonic vibration system. The description of the same or similar matters as those of the above-described embodiments will be omitted. The horn 41 is a rod made of nickel chrome steel and having a substantially cylindrical shape, and is connected to a cone (not shown) at one end surface 41a thereof. A sleeve 44 is formed on the horn 41 with a slit 43 therebetween. A flange 45 is formed at the end of the sleeve 44, and the flange 4
5, a hole 45a is formed. The end surface 45b of the flange 45 is flush with the end surface 41b of the first horn 41.

The horn 46 is a ceramic rod having a substantially cylindrical shape, and an annular protrusion 49 is formed at a substantially middle portion in the longitudinal direction thereof. The sleeve 48 is made of nickel chrome steel, and has a bottom plate 48 having a hole 48a in the center.
It has a tubular shape having b. Horn 4 in hole 48a
6 is inserted, the bottom plate 48b engages with the protrusion 49, and extends parallel to the outer periphery of the horn 46 toward the end surface 46a through the slit 47. A flange 49 is formed at the end of the sleeve 48, and a hole 49a is formed in the flange 49. The end surface 49b of the flange 49 is the end surface 46 of the horn 46.
It is on the same plane as a. The thin plate 51 is made of beryllium copper. The six bolts 52 are screwed with the nut 53.

Next, the operation will be described. The thin plate 51 is sandwiched between the end surface 41b and the end surface 46a, and the holes 45a and 4
A bolt 52 is inserted through 9a, and a nut 53 is screwed into this and tightened. Then, the horn 41 comes into close contact with the horn 46 via the thin plate 51. When tightened further, the sleeve 44 and the sleeve 48 extend, and the end surfaces 45b and 49 are extended.
Upon contact with b, a compressive static load is applied to the horn 41, the thin plate 51, and the horn 46, and a tensile static load is applied to the sleeves 44 and 48. It is extremely difficult to screw a ceramic horn used for stirring / dispersing a high-temperature liquid material, for example, dispersing carbon fibers in aluminum, but in this embodiment, it is easily connected to another horn or cone. can do. Vibration of the horn is transmitted stably and is less likely to be damaged, so that the performance of the ceramic horn can be improved. For this reason, the application of ultrasonic waves can be opened up in the development of new materials.

In yet another embodiment, both horns of the pair of horns are formed with annular projections, each configured to engage a sleeve. In yet another embodiment, the post-tightening engagement portions of the flanges are fixed by welding.

Next, a fourth embodiment will be described with reference to FIGS. 7 and 8. FIG. 7 is a sectional view taken along the central axis of the ultrasonic vibration system, and FIG. 8 is a partial view of a section taken along the central axis. Detailed description of the same or similar matters as in the above-described embodiment will be omitted. An ultrasonic vibration system 61 of an ultrasonic plastic working machine for pipe drawing is composed of a high frequency vibrator 62, a cone 63, a horn 64, a die 65, a spacing ring 66 and a horn 67 which are sequentially connected.

The cone 63 has a three-pronged shape in which two cylinders are combined into one cone. Two cylindrical parts 71
A high-frequency vibrator 62 abuts on each of the end faces 72, and the cylindrical portion 71 and the high-frequency vibrator 62 are joined by a connecting screw 73. The horn 64 abuts on the end surface 74a of the other one conical portion 74 at the end surface 64a, and the conical portion 74 and the horn 64 are connected by a connecting screw 75. Cone 6
3 and the connecting screw 75 are both provided with holes 76. Both the horn 64 and the horn 67 are made of nickel chrome steel, and a sleeve 80, which is a cylinder having holes 64d and 67d, engages with the outer peripheral side of the horn 64 and faces the horn 67 via the slit 79. It is formed to extend in a cylindrical shape in the direction of. The surface 64b of the horn 64 and the surface 80a of the sleeve 80 are formed so as to be smooth and on the same plane.

The sleeve 82 engages with the outer peripheral side of the horn 67 and faces the horn 64 with the slit 81 interposed therebetween.
It is formed to extend in a cylindrical shape in the direction of a. The surface 67a of the horn 67 and the surface 82a of the sleeve 82 are formed so as to be smooth and on the same plane. Sleeve 80
The sleeve 82 is provided with holes 80c and 82c, respectively, and a bolt 83 and a nut 84 are provided.

A contact plate 64e is vertically provided at the tip of the sleeve 80 so that the contact plate 64e abuts and supports the ultrasonic vibration system 61 on the base 78 of the ultrasonic plastic working machine. Die 6
Reference numeral 5 is a ring made of a cemented carbide for pipe drawing, the inside of which has a shape peculiar to the die, the outside of which is cylindrical, and which has smooth parallel planes on both sides. The outer diameter is smaller than the outer diameter of the horn 64. A hole 65d (sometimes called a bearing) is formed in the center. The spacing ring 66 is an annular ring made of nickel chrome steel and having smooth parallel planes on both sides. The inner diameter of the central hole is equal to the inner diameter of the die 65. The holes 76 and 67d are
A through hole 61d penetrating the cone 63, the horn 64, and the horn 67 is formed, in which the tube 85 is pulled out from the left to the right in the figure.

The spacing ring 66 is thinner than the die 65. Therefore, as shown in FIG. 7, the die 65 is attached to the surface 64b of the horn 64.
And the surface 67a of the horn 67, and the spacing ring 66 is inserted between the surface 80a of the sleeve 80 and the surface 82a of the sleeve 82. When the bolt 83 and the nut 84 are engaged and tightened in this state, the surface 64b and the surface 67a come into close contact with each other via the die 65, but there is a gap 86 between the surface 80a and the surface 82a. When the force is further tightened, the sleeve 80 and the sleeve 82 are gradually extended, and the horn 64
And a part of the horn 67 are compressed. The void 86 between the surface 80a and the surface 82a disappears, and the surface 86a and the surface 82a come into close contact with each other via the spacing ring 66. If you try to tighten it further, the resistance will suddenly increase, and the tightening will not proceed, and it will end.

A static static load is applied to the sleeve 80 and the sleeve 82, and a compressive static load is applied to the horn 64 and the horn 67. The following results were obtained for the compressive load on the horn and the tensile stress on the sleeve. Frequency 15kH
A die with a mass of 1 kg vibrating at a speed of 1.25 m / s exerts an inertial force of 1.18 × 10 5 N (corresponding to 12 tons) on the horn. The pulling force of the pipe reaches 10 tons. A sleeve having the same cross-sectional area is pulled out from a horn of nickel chromium steel having a diameter of 60 mm. The tensile stress of the sleeve is set to the value exemplified in the first embodiment, that is, 40 kgf / mm @ 2. At this time, the compressive static load of the horn is 1.10 × 10.
6 N, which is close to 10 times the inertial force of the die and more than 10 times the static drawing force.

In this embodiment, since the surface of the horn can be constructed by a simple flat surface, the contact surface between the horn and the die is formed extremely smooth and flat, and there is no local micro plastic flow heat generation. It is possible to avoid deterioration or destruction of performance and improve performance. As in the above-described embodiment, there is no screw torque control and dimensional control is performed with high accuracy, so that the die can be attached stably in a short time with good reproducibility. Further, since the pulling force of the pipe can be directly borne by the base plate through the plurality of bolts and nuts and the thick flange outside the vibrating body, the pipe diameter size that can be pulled out increases. Furthermore, if a high-frequency oscillator, which will be described later, is used in the sixth embodiment, the output can be further improved.

An ultrasonic vibration system according to the fifth embodiment of the present invention will be described with reference to FIGS. 9 and 10. Detailed description of the same or similar matters as in the above-described embodiment will be omitted. 9 is a cross-sectional view of the ultrasonic vibration system passing through the central axis before tightening, and FIG. 10 is a cross-sectional view of the ultrasonic vibration system passing through the central axis after tightening.

The horn 91 is made of titanium alloy 6A14V and has a substantially cylindrical shape with a length of 12.50 mm and an outer diameter of 4.00 mm.
It is a stick of. This length is equal to one half of the longitudinal wave wavelength of 25 mm at the frequency of 200 kHz. One end surface 91a
Is connected to an ultrasonic transducer (not shown). Other end face 9
A flange 92 is integrally formed by extending from a point 91c extending from 1b to 2.50 mm outward in a direction substantially perpendicular to the outer peripheral direction and in an umbrella shape. The thickness of the flange 92 is 1.1.
It is 7 mm. A ring 93 is formed on the outer circumference of the flange 92 and extends toward the end face 91b. The inner diameter of the flange 93 is 8.28 mm. Between the cylindrical portion 91d of the horn 91 and the ring 93, a slightly wide hole 94 is formed in an annular shape. Eight holes 93a are formed in the ring 93. The end surface 93b of the ring 93 is the end surface 91b of the horn 91.
Is smooth and on the same plane.

The horn 95 is a rod made of titanium alloy 6A14V and having a length of 12.5 mm and an outer diameter of 4.0 mm and having a substantially cylindrical shape. This length is equal to one half of the longitudinal wave wavelength of 25 mm when the frequency is 200 kHz. An umbrella-shaped flange 96 is integrally formed by extending outward from the point 95b which extends from the end surface 95a to 2.50 mm and is substantially perpendicular to the outer peripheral direction. The thickness of the flange 96 is 1.17 mm
Is. A ring 97 is formed on the outer circumference of the flange 96 and extends toward the end surface 95a. The inner diameter of the ring 97 is 8.28 mm. Between the cylindrical portion 95c of the horn 95 and the ring 97, a slightly wide hole 98 is formed in an annular shape. Eight holes 97a are formed in the ring 97.
The end surface 97b of the ring 97 is smooth and coplanar with the end surface 95a of the central portion 95c of the horn 95.

The thin plate 101 is made of beryllium copper and has a thickness of 0.1.
16 mm. A total of eight bolts 99 are inserted through the holes 93a and 97a, and the bolts 99 are screwed into the nut 100.

Next, the operation will be described. The thin plate 10 is provided between the end surface 91b of the horn 91 and the end surface 95a of the horn 95.
While inserting 1 into contact with each other, end face 93 of ring 93
b and the end surface 97b of the ring 97 are opposed to each other. At this time, there is a gap of 0.116 mm, which is equal to the thickness of the thin plate 101, between the end surface 93b and the end surface 97b, and this is the interference. Next, insert the bolt 99 into the holes 93a and 97a,
The nut 100 is screwed. When only the tightening margin of the thickness of the tightening thin plate 101 is pressed, the end face 93b and the end face 97b come into contact with each other. When tightened further, the end surface 93b of the ring 93 and the ring 9 are
7 through the end face 97b of the flange 92 and the flange 96.
The bending static load is applied to. A compressive load of 289 N is applied to the horn 91 and the horn 95.

In this example, good results were obtained with oscillation at a high frequency of 200 kHz and a large amplitude.

As another embodiment, it is possible to insert a spacing ring thinner than the thin plate between the end faces of both flanges engaging with the facing horns.

An ultrasonic transducer according to a sixth embodiment is shown in FIG.
1, FIG. 12 and FIG. Detailed description of the same or similar matters as in the above-described embodiment will be omitted. 11 is a cross-sectional view taken through the central axis of the ultrasonic transducer before tightening, FIG. 12 is a partial cross-sectional view taken through the central axis of the ultrasonic vibrator before tightened, and FIG. 13 is an ultrasonic transducer after tightened. It is sectional drawing which passes along the central axis of.

The piezoelectric element 111 of the ultrasonic transducer 110 is a lead zirconate titanate-based piezoelectric element having a smooth surface with a circular hole 111a formed in the center, and an outer diameter of 40.
mm, thickness 5.0 mm, inner diameter of circular hole 111a is 10 m
m. The piezoelectric element 111 has four members 111b and 11b.
1c, 111d, and 111e, which are alternately sandwiched by an anode electrode (not shown) and a ground electrode (not shown). Here, the load direction that consumes the mechanical vibration power of the piezoelectric element 111 may be referred to as the front surface, and the back side may be referred to as the back surface.

The front round bar 112 and the backing round bar 113 are made of high-strength aluminum alloy A7075-T651, and are round bars having circular holes 112a and 113a in the center thereof. The front round bar 112 has a surface 112b and a piezoelectric element 111.
The front surface 111f and the backing rod 113 contact the rear surface 111g of the piezoelectric element 111 at the surface 113b to form a part of the pressing member. Further, the circular holes 111a, 112a, 113
a forms a through hole 110a. Both the front round bar 112 and the backing round bar 113 have an outer diameter of 40 mm and an inner diameter of 10 m.
m 2, the length is 73.46 mm, and the total length with the piezoelectric element 111 sandwiched at a frequency of 20 kHz is 166.9 mm.

From the outer side of the outer circumference of the surface 112c and the surface 113c, along the outer side of the outer circumference through the narrow gap 112d and the narrow gap 113d, respectively, the surface 112b and the surface 11b, respectively.
A sleeve 114 and a sleeve 115 facing 3b are formed so as to include the front round bar 112 and the backing round bar 113, respectively. The front round bar 112 and the sleeve 114, and the backing round bar 113 and the sleeve 115 may be integrally formed, or may be separately processed and then combined. Sleeve 114 and sleeve 11
The end surface of No. 5 is smooth and forms surfaces 114a and 115a, respectively. The normal surface 114a and the surface 115a are the surface 112b of the front round bar 112 and the surface 113b of the backing round bar 113.
It is desirable that they are formed on the same plane as the above because of smoothness and flatness, but they are not necessarily formed on the same plane. The sleeve 114 and the sleeve 115 each have an outer diameter of 57 mm, an inner diameter of 48 mm, and a wall thickness of 4.5 mm. The slit 112d and the slit 113d are each 4 mm.
Is.

Flanges 116 and 117 are provided on the outer diameter sides of the sleeves 114 and 115, respectively. The flanges 116 and 117 have a relatively large mass as compared with the sleeves 114 and 115. Flange 116, 117
6 are provided with holes 116a and 117a, respectively. The bolt 118 penetrates through the corresponding holes 116 a and 117 a, and the nut 119 is inserted into the bolt 11.
Connected to 8.

The spacing ring 120 is a ring having two smooth surfaces and is inserted between the sleeve 114 and the sleeve 115 to maintain a spacing. High strength aluminum alloy A7075-
It is made of 76 and has an outer diameter equal to the outer diameter of the flanges 116 and 117, which is 96 mm, and its thickness is determined so as to obtain an appropriate interference as will be described later. That is, the front round bar 112, the piezoelectric element 1
Even if 11 and the backing round bar 113 come into contact with each other, a gap 121 is inserted between the sleeve 114 and the sleeve 115 while the tightening by the bolt 118 and the nut 119 is not yet performed. The void 121 is the interference and its size is 0.371 mm.

The electric terminal 122 is an electric terminal for applying an exciting voltage and receives an exciting voltage from an electric device (not shown). The electric terminal 123 is an electric terminal for grounding. A supply pipe 125 for cooling dry air is connected to the inflow hole 124. Further, four holes 126 are provided to connect the narrow gap 112d and the through hole 110a, and four holes 127 are provided to connect the narrow gap 112d and the outside of the system, respectively.

Here, the relation of specifications will be described. Piezoelectric element 111 having an outer diameter of 40 mm, an inner diameter of 10 mm and a thickness of 5 mm
The two front and rear members 111b, 111c, 111d, and 111e of A7075-T651 are arranged so as to resonate at 20 kHz.
2. The calculated length of the lining round bar 113 is 73.46 mm
Is. Therefore, the total length of the ultrasonic transducer 110 is 166.9.
mm. When both surfaces of the piezoelectric element 111 are vibrated at an allowable speed of 0.45 m / s, the speed is increased by 3.80 times by the front round bar 112, and the speed is 1.72 at the end surface 112e.
m / s. Since the compressive stress that does not deteriorate the piezoelectric element 111 for a long period of time is 0.689 × 10 8 Pa, the compressive load to be applied is 0.812 × 10 5 N. If the outer diameters of the sleeves 114 and 115 are 57 mm, the inner diameter is 48 mm, and the wall thickness is 4.5 mm, the tightening margin is 0.371 m.
and the stress generated in the sleeves 114 and 115 is 1.18.
At 0.times.10@8 Pa, or 12.0 kgf / mm @ 2, this is only about a quarter of the 0.2% creep value of A7075-T651. Therefore, there is no risk of creep occurring.

Next, the operation will be described. Piezoelectric element 11
1 is placed in the central space of the spacing ring 120, and the piezoelectric element 11
The surface 112b of the front round bar 112 is brought into contact with the front surface 111f of the No. 1 and the surface 113b of the backing round bar 113 is brought into contact with the back surface 111g. After completing the electrical wiring, the spacing ring 120 is inserted between the sleeve 114 and the sleeve 115. At that time, the front round bar 112, the piezoelectric element 111, and the backing round bar 1
Even though 13 are in close contact with each other, bolt 118 and nut 119
Since the tightening is not performed yet, there is a gap 121 between the sleeve 114, the spacing ring 120 and the sleeve 115.
And there is no close contact. Next, the bolt 118 and the nut 119 are screwed together to form the sleeve 114 and the sleeve 115.
With the spacing ring 120 inserted between and, the previously existing interference is tightened to eliminate the gap 121. Compared with the front round bar 112, the piezoelectric element 111, and the backing round bar 113, the sleeve 114, the spacing ring 120, and the sleeve 11
5 has a smaller cross-sectional area, and the sleeve 114 and the sleeve 115 easily extend by the length of the gap 121.
14, the spacing ring 120 and the sleeve 115 are in close contact with each other.

The front round bar 112, the piezoelectric element 111 and the backing round bar 113 are already in close contact with each other, and the sleeve 1
When the 14, the spacing ring 120 and the sleeve 115 come into close contact with each other, a compressive load is applied to the front round bar 112, the piezoelectric element 111 and the backing round bar 113. The tightening margin is set in advance so that this compression load becomes equal to the maximum compression load allowed for the piezoelectric element 111.

An exciting voltage is applied to the piezoelectric element 111 via the electric terminal 122, and the piezoelectric element 111 expands and contracts the front round bar 112, the backing round bar 113, the sleeve 114, and the sleeve 115 to generate a large amplitude from the surface 112c. It outputs to the unit vibration body (not shown) connected. Grounding is performed through the electric terminal 123.

Drying air for cooling from the supply pipe 125 flows in through the inflow hole 124, into the slit 112d and further through the hole 126 into the through hole 110a, and the piezoelectric element 111, the front round bar 112 and the backing round bar 113 are connected. The entire ultrasonic transducer 110 including it is cooled and dried, and flows out from the through hole 110a. The air that has flowed into the slits 112d and 113d is the hole 12
It also flows out from 7.

Next, it will be explained that the ultrasonic transducer according to the present embodiment is hard to break and maintains high performance. In the ultrasonic transducer according to the present embodiment, the tightening is performed not on the inside of the piezoelectric element, the front round bar, and the backing round bar but on the outside of the outer circumference. The piezoelectric element is uniformly pressed by the end surface of the round bar over a wide range except for the central hole, and the round bar is also uniformly loaded with a compressive load. It has been clear from the conventional example that this is a major cause of damage when the tightening of the screw of the bolt or the like is performed inside. Since the tightening is performed on the outside of the outer periphery, there is no one of the major causes of the damage, and it is obvious that the damage is difficult.
Further, since the compressive load is uniformly applied, the function can be enhanced by increasing the power by increasing the vibration force.

Further, the tightening is performed by the sleeves provided on the outer circumferences of the front round bar and the backing round bar in close contact with each other via a spacing ring and pressing. Therefore, the magnitude of the pressing force is
Instead of controlling the tightening torque when tightening the bolts and nuts, the sizes of both the sleeve and the spacing ring are controlled in advance on a smooth and flat surface in the part processing stage. Needless to say, it is well known that the machining of metal materials can be performed with extremely high precision, but the tightening torque can be controlled only with precision that is lower by one digit or less. In the present embodiment, controlling the dimensions of each component with high accuracy does not impose an excessive compressive load on the piezoelectric element, and the performance is stable and the quality can be improved.

Further, since the dry cooling air flows into the through holes and further into the slits for cooling, it is possible to increase the power by suppressing the temperature rise of the piezoelectric element due to the dielectric loss.
Further, it is possible to prevent deterioration of insulation due to humidity and improve stability and safety.

[0060]

According to the present invention, an ultrasonic vibration system and an ultrasonic vibrator which are hard to break, have high performance and are stable in quality are provided.

[Brief description of drawings]

FIG. 1 is a conceptual diagram of an ultrasonic vibration system according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view passing through the central axis of the ultrasonic vibration system according to the first example of the present invention.

FIG. 3 is a cross-sectional view through the central axis of the ultrasonic vibration system according to the first example of the present invention.

FIG. 4 is a cross-sectional view passing through a central axis of an ultrasonic vibration system according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view passing through a central axis of an ultrasonic vibration system according to a second embodiment of the present invention.

FIG. 6 is a cross-sectional view passing through a central axis of an ultrasonic vibration system according to a third embodiment of the present invention.

FIG. 7 is a cross-sectional view passing through a central axis of an ultrasonic vibration system according to a fourth example of the present invention.

FIG. 8 is a partial view of a cross section passing through a central axis of an ultrasonic vibration system according to a fourth example of the present invention.

FIG. 9 is a cross-sectional view passing through a central axis of an ultrasonic vibration system according to a fifth example of the present invention.

FIG. 10 is a cross-sectional view passing through the central axis of an ultrasonic vibration system according to a fifth example of the present invention.

FIG. 11 is a cross-sectional view passing through the central axis of an ultrasonic transducer according to a sixth embodiment of the present invention.

FIG. 12 is a partial view of a cross section passing through the central axis of an ultrasonic transducer according to a sixth embodiment of the present invention.

FIG. 13 is a cross-sectional view passing through the central axis of an ultrasonic transducer according to a sixth embodiment of the present invention.

FIG. 14 is a conceptual diagram of an ultrasonic vibration system according to a conventional example.

FIG. 15 is a conceptual diagram illustrating vibration of an ultrasonic vibration system.

[Explanation of symbols]

1 ... Ultrasonic vibration system, 11 ... Ultrasonic vibrator, 12
... Cone, 13 ... Horn, 14, 17 ... Slit, 15, 18 ... Sleeve, 16, 19 ... Flange, 20 ... Thin plate

Claims (12)

[Claims] 1. A first unit waveguide rod, a second unit waveguide rod, a first locking member that engages with the outer periphery of the first unit waveguide rod, and a second unit waveguide. A second locking member that engages with the outer circumference of the rod, a first holding member, and a second holding member, wherein the first holding member and the second holding member are the second holding member. Is inserted between the first locking member and the second locking member,
When the holding member is sandwiched between the first unit waveguide rod and the second unit waveguide rod in close contact with each other, a gap is formed between the first locking member and the second locking member. When the first locking member and the second locking member, which are formed so as to exist, are fastened and locked to each other via the second holding member so that the gap disappears, the first locking member and the second locking member are locked. An ultrasonic vibration system, wherein a compressive load is applied to the sandwiching member, the first unit waveguide rod and the second unit waveguide rod. 2. A first unit waveguide rod, a second unit waveguide rod, a first locking member that engages with the outer periphery of the first unit waveguide rod, and a second unit waveguide. A second locking member that engages with the outer circumference of the rod, and a sandwiching member, wherein the sandwiching member is provided between the first unit waveguide rod and the second unit waveguide rod. When sandwiched in close contact with each other, a gap is formed between the first locking member and the second locking member, and the first locking member and the second locking member are A compressive load is applied to the holding member, the first unit waveguide rod, and the second unit waveguide rod when they are tightened and locked to each other so that the gap disappears. system. 3. A first unit waveguide rod, a second unit waveguide rod, a first locking member that engages with the outer periphery of the first unit waveguide rod, and a second unit waveguide. A second locking member that engages with the outer circumference of the rod, wherein the first locking member and the second locking member are a first unit waveguide rod and a second unit waveguide rod. When they are in close contact with each other, a gap is formed between the first locking member and the second locking member, and the first locking member and the second locking member are An ultrasonic vibration system, wherein a compressive load is applied to the first unit waveguide rod and the second unit waveguide rod when they are tightened so as to disappear and locked to each other. 4. The first locking member engages with a substantially middle outer circumference of the first unit waveguide rod and extends along the outer circumference toward an end portion, and the second locking member has a second 4. The ultrasonic vibration system according to claim 1, wherein the unit vibration rod is engaged with a substantially middle outer circumference of the unit waveguide rod and extends toward the end portion along the outer circumference. 5. The first locking member engages with the outer periphery of the first unit waveguide rod, bulges outward, and then extends toward the end portion substantially parallel to the outer periphery, and the second locking member is provided. The member engages with the outer circumference of the second unit waveguide rod, bulges outward, and then extends toward the end portion substantially parallel to the outer circumference. The ultrasonic vibration system described in 1. 6. The method according to claim 1, wherein the tightening means tightens the first locking member and the second locking member. Ultrasonic vibration system. 7. A piezoelectric element, a holding means, and a first
The locking member, the second locking member, the spacing ring, and the tightening means, and the holding means includes a first holding member and a second holding member for holding the piezoelectric element, The first locking member engages with the outer circumference of the first holding member, the second locking member engages with the outer circumference of the second holding member, and the spacing ring includes the first spacing ring and the first spacing member. When the piezoelectric element is inserted between the locking member and the second locking member and the piezoelectric element is closely contacted and sandwiched between the first holding member and the second holding member,
A gap is formed between the first locking member and the second locking member, and the tightening means connects the first locking member and the second locking member with the spacing ring. Through the piezoelectric element, tightened so as to eliminate the gap through
An ultrasonic transducer, wherein a compressive load is applied to the first holding member and the second holding member. 8. A piezoelectric element, a holding means, a first locking member, a second locking member, and a tightening means, the holding means holding the piezoelectric element between the first holding members. And a second holding member, wherein the first locking member engages with the outer circumference of the first holding member and the second locking member engages with the outer circumference of the second holding member. The first locking member and the second locking member, when the piezoelectric element is closely sandwiched between the first holding member and the second holding member, respectively, the first locking member and the second locking member Is formed so that there is a gap between the first locking member and the second locking member, and the first locking member and the second locking member are tightened and locked to each other so that the space disappears. An ultrasonic transducer is characterized in that a compressive load is applied to the piezoelectric element, the first holding member and the second holding member. 9. The piezoelectric element and the pair of holding members each have a through hole formed in a central hole, and an inflow hole through which a cooling gas flows. The ultrasonic transducer according to claim 7 or 8. 10. A piezoelectric element, a front round bar, a rear round bar,
A front locking member, a rear locking member, a spacing ring, and a tightening means, the front round bar and the rear round bar sandwich the piezoelectric element, and the front locking member is the front round bar. The rod engages with the outer periphery of the surface not contacting the piezoelectric element and extends through the slit to the surface contacting the piezoelectric element to form a front locking surface at the end thereof. The stop member engages with the outer periphery of the surface of the rear round bar that does not contact the piezoelectric element, extends through the slit to the surface that contacts the piezoelectric element, and has a rear surface locking surface at its end. The spacing ring is formed by inserting the spacing ring between the front locking surface and the rear locking surface and closely contacting the piezoelectric element between the front round bar and the rear round bar. When sandwiched between the front locking surface and the rear locking surface, a gap is formed between the front locking surface and the rear locking surface. When the front locking member and the rear locking member are tightly locked to each other via the spacing ring so that the gap disappears, the piezoelectric element, the front round bar and the rear round bar are compressed. An ultrasonic transducer, which is characterized by applying a load. 11. A piezoelectric element, a front round bar, a rear round bar,
A front locking member, a rear locking member, and tightening means, the front round bar and the rear round bar sandwich the piezoelectric element, and the front locking member is the front round bar. The rear surface locking member engages with the outer periphery of the surface not contacting the piezoelectric element and extends through the slit to the surface contacting the piezoelectric element to form a front surface locking surface at the end thereof. The rear round bar engages with the outer periphery of the side not contacting the piezoelectric element, extends through the slit to the side contacting the piezoelectric element, and forms a rear surface locking surface at its end. The front locking member and the rear locking member have the front locking surface and the rear locking surface when the piezoelectric element is closely sandwiched between the front round bar and the rear round bar, respectively. Formed so that there is a void between
The tightening means tightens and locks the front locking member and the rear locking member so that the gap disappears,
An ultrasonic transducer, wherein a compressive load is applied to the piezoelectric element, the front round bar and the rear round bar. 12. A through hole formed by a hole formed in the center of each of the piezoelectric element, the front round bar, and the rear round bar, the front round bar, the rear round bar, the front locking member, and the through hole. 12. A slit layer formed between the rear surface locking member and an inflow port through which a cooling gas flows into the through hole or the slit layer.
The ultrasonic transducer according to.