JP2003177328A - Scanning optical microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scanning optical microscope having an optical system for detection which can exactly guide the light from a specimen to a confocal diaphragm and is low in cost and small in size. <P>SOLUTION: A first optical element 8 rotating around an axis 11 of rotation in a direction approximately orthogonal with an optical axis 10 and a second optical element 9 rotating around an axis 12 of rotation approximately orthogonal with the optical axis 10 and orthogonal with the axis 11 of rotation are adjusted as the optical elements arranged in an optical path between an imaging lens 7 and the confocal diaphragm 13, by which the optical axis for the confocal diaphragm 13 is moved parallel and the light from the specimen is exactly guided to the confocal diaphragm. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning optical microscope having a detection optical system that guides light from a sample to a photodetector.

[0002]

2. Description of the Related Art Conventionally, in a detection optical system of a scanning optical microscope, as means for accurately guiding light from a sample to a confocal diaphragm, JP-A-5-66349 and Japanese Patent Application No. 6-130.
The one disclosed in the specification of No. 492 is known.

Among them, the one disclosed in Japanese Patent Laid-Open No. 5-66347 includes a total reflection prism rotatably supported between an imaging lens and a confocal diaphragm, and a rod extending from the rotation axis of the total reflection prism. Is pressed by the micrometer head, the total reflection prism is slightly rotated, and the optical axis is deflected.

By disposing two such mechanisms in the directions in which the reflecting surfaces of the prism are orthogonal to each other, the light from the sample can be accurately guided to the confocal diaphragm.

In Japanese Patent Application No. 6-130492, a confocal diaphragm is arranged on a cross movement stage which moves in directions orthogonal to each other in a plane perpendicular to the optical axis, and this stage is a micro stage. By pushing with the spindle of the meter head, the confocal diaphragm can be moved minutely and the light from the sample can be accurately guided to the confocal diaphragm.

[0006]

However, Japanese Unexamined Patent Publication No.
In the Japanese Patent No. 66347, the light from the sample forms a spot at the position of the confocal diaphragm by an imaging lens.
If the focal length of the imaging lens is f = 200 mm and the objective lens used is 20 × and NA = 0.7, the spot diameter at the confocal diaphragm position will be extremely small, about 70 μm. In order to lead to the confocal diaphragm (the diaphragm diameter must be 70 μ or less in order to obtain the confocal effect), the operation of deflecting the optical axis with extremely high precision is required.

This requires precision of mechanical mechanical parts such as rattling of the rotary shaft of the total reflection prism, which makes the price expensive. The micrometer head to be driven also requires precision and becomes expensive.

Further, the rod extending from the rotation axis for rotating the total reflection prism is as large as several tens of mm, and the entire apparatus becomes large. Because the imaging lens f
= 200, the spot diameter will be about 70 μm.
That is, when moving by 70 μ, the distance l from the reflecting surface of the total reflection prism to the confocal diaphragm needs to be at least about 30 mm, so the pitch of the micrometer is (1/5).
Rotation 100μ) 500μm, l = 30mm
2 × (100 μ / E) = 70 μ / l E = (100/70) × l × 2 = (100/70) × 3
It becomes 0 × 2 = 85 mm.

On the other hand, in the case of Japanese Patent Application No. 6-130492, the cross movement stage is expensive and the micrometer is also expensive, so that the entire apparatus is expensive. There is a point.

The present invention has been made in view of the above circumstances, and it is possible to accurately guide light from a sample to a confocal diaphragm, and further, a scanning having a detection optical system which is simple in construction and inexpensive in price. An object is to provide a type optical microscope.

[0011]

The invention according to claim 1 is
In a scanning optical microscope having a detection optical system that guides light from a sample to a photodetector through a confocal diaphragm, the scanning optical microscope is arranged on the optical axis in front of the confocal diaphragm, and the tilt with respect to the optical axis is made variable. The optical element includes a plane-parallel plate-like optical element, and the optical element includes a first optical element that rotates about a first rotation axis that is substantially orthogonal to the optical axis, and an optical element that rotates substantially about the optical axis. The second optical element is configured to rotate about a second rotation axis that is orthogonal to the first rotation axis and is orthogonal to the first rotation axis.

According to the second aspect of the present invention, the parallel plane plate-shaped optical element can always adjust the inclination with respect to the optical axis by the knob connected to the optical element.

According to a third aspect of the present invention, a light source, a wavelength selection element for selecting light having a specific wavelength from the light emitted from the light source, a switching means for switching the wavelength selection element, and the selected light. Means for two-dimensionally scanning the sample by
A detection optical system that guides light from a sample to a photodetector through a confocal diaphragm, and a parallel-plane plate-shaped optical element that is arranged on the optical axis in front of the confocal diaphragm and whose tilt with respect to this optical axis is variable. In a scanning optical microscope having an element, the inclination of the parallel flat plate-shaped optical element is determined in advance in association with the switching operation of the wavelength selection element by the switching means. It has drive means for adjusting the tilt amount.

As a result, according to the invention of claim 1,
Even when the light from the sample deviates from the confocal stop position, the optical axis can be moved in parallel, so that the light from the sample can be corrected so as to be accurately guided to the confocal stop.

According to the second aspect of the invention, even if the optical axis is deviated during the operation of the microscope, the optical axis can be quickly adjusted by the knob.

According to the third aspect of the present invention, when a plurality of wavelength selecting elements are switchably provided in the microscope optical system, each wavelength selecting element causes a slight angular deviation with respect to the optical axis. Regardless of which wavelength selection element is used, the optical axis shift is automatically corrected by adjusting the tilt of the optical element to a preset tilt amount so as to correct the angle shift even if it has it. It becomes a state.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 shows a schematic configuration of the first embodiment.

In this case, the dichroic mirrors 1a, 1b, 1c as wavelength selecting means are arranged corresponding to the laser beam L output from the laser oscillator 1 as a light source. These dichroic mirrors 1a, 1b,
Reference numeral 1c is movable in the direction of the arrow in the figure with respect to the optical path, and is provided with a switching means capable of switching the dichroic mirrors 1a, 1b, 1c.

In the figure, the laser beam incident on the dichroic mirror 1a is reflected in the direction of the mirror 2.

Two galvanometer mirrors 3 and 4 for scanning the laser beam reflected by the mirror 2 are also used.
After that, the light is made incident on the mirror 5, and the light reflected by the mirror 5 is made incident on the pupil projection lens 6.

Then, a spot is formed on the image plane of the objective lens (not shown) by the laser beam that has passed through the pupil projection lens 6, and this spot is two-dimensionally scanned on the image plane by rotation of the two galvanometer mirrors 3 and 4. I am trying to do it. This spot is focused on the sample by the objective lens and scans the sample.

Further, the fluorescence (or reflected light) from the sample surface is made to enter the dichroic mirror 1a by following the path reverse to the above, and after passing through it, the image forming lens 7 is made to pass therethrough.
The light is incident on the first optical element 8 and the second optical element 9 which are parallel plate-shaped and are arranged in front of the confocal diaphragm 13.

Here, the first optical element 8 has a rotary shaft 11 in a direction substantially orthogonal to the optical axis 10 and is rotatable about the rotary shaft 11, and the second optical element 8 is also rotatable. The optical element 9 has a rotating shaft 12 that is substantially orthogonal to the optical axis 10 and also orthogonal to the rotating shaft 11. The optical element 9 is rotatable about the rotating shaft 12. The inclination can be changed.

Then, the fluorescence transmitted through the second optical element 9 is introduced into the photodetector 14 through the confocal diaphragm 13.

Next, the first and second optical elements 8 and 9 will be described in detail. FIG. 2 shows an optical path from the dichroic mirror to the photodetector 14 in FIG. 1, and shows a state in which the dichroic mirror 1a is in the optical path and the light from the sample is guided to the confocal diaphragm 13. There is.

FIG. 3 shows a state in which the dichroic mirror 1b is placed in the optical path. In this case, the inclination of the dichroic mirror 1b is not completely the same as that of the dichroic mirror 1a due to manufacturing variations. Light does not completely pass through the confocal diaphragm 13. (In this figure, for simplification of description, the dichroic mirror 1b is assumed to be tilted only around the rotation axis 15 which is perpendicular to the paper surface.) If the distance to 13 is D = 200 mm, the dichroic mirror 1a
And the angular difference between 1b and 1b deviates by 1 minute, l = 200 × tan
1 '= 58 μm is also displaced.

This means that, for example, when the focal length of the imaging lens is f = 200 mm, the number of objective lenses used is 2
When 0 ×, NA = 0.7, the spot diameter at the position of the confocal diaphragm 13 is about 70 μm, so even if the angular difference between the dichroic mirrors 1a and 1b is about 1 minute,
The light from the sample leaves the confocal diaphragm 13, and the light detector 14
The amount of light to

By the way, since the focal length of the imaging lens and the diameter of the light spot from the sample are almost proportional to each other, the relationship between the angle deviation of the dichroic mirror 1a (1b) and the light quantity loss at the confocal diaphragm 13 is as follows. It hardly depends on the focal length of the imaging lens. For example, when the focal length f = 100, the spot diameter is reduced to 35 μm under the same conditions,
From the dichroic mirror 1a (1b) to the confocal diaphragm 13
Since the distance D to the position can be halved, D = 100mm
Then, l ′ = 100 × tan1 ′ = 29 μm is offset.

Therefore, in the first embodiment, as shown in FIG. 4, when the first optical element 8 is rotated about the rotation axis 11 in a direction substantially orthogonal to the optical axis 10, the imaging lens 7 is formed. The optical path of the light passing through the optical axis is translated, so that the optical axis is translated even when the light from the sample deviates from the confocal diaphragm 13 position as shown in FIG. Thus, it can be corrected so as to accurately lead to the confocal diaphragm 13.

In this description, the dichroic mirror 1a is used.
On the other hand, the dichroic mirror 1b is assumed to be inclined only around the rotation axis 15, but as shown in FIG.
Further, when the dichroic mirror 1b is also tilted around the rotary shaft 16 orthogonal to the rotary shaft 15, the first
By rotating not only the optical element 8 but also the second optical element 9 around the rotation axis 12, it is possible to correct the light from the sample so that it is accurately guided to the confocal diaphragm 13. You can

The same applies when the dichroic mirror 1c is placed in the optical path, and the rotations of the first and second optical elements 8 and 9 may be adjusted so that the amount of light detected by the photodetector 14 is maximized. .

In this case, the first and second optical elements 8,
Assuming that the plate thickness t of 9 is t = 1 mm, the first optical element 8 may be tilted by about 8 ° in order to move the light spot from the sample at the position of the confocal diaphragm 13 by the above-mentioned 58 μm. Further, the plate thickness t of the optical elements 8 and 9 is the amount of movement of the light spot due to the variation in the angles of the dichroic mirrors 1a to 1c and the tilt angle of the optical elements 8 and 9 (that is, sensitivity to rotation).
It may be set by. However, as shown in FIG. 5, if the rotation angle θ is larger than the total reflection angle determined by the refractive index of the first optical element 8, total reflection occurs and the light spot is not guided to the confocal diaphragm 13. It is necessary to limit the rotation angle of the element 8.

In the first embodiment, the dichroic mirrors 1a, 1b, 1c can be switched in three steps, but it is needless to say that the dichroic mirror can be replaced. .

Even when the dichroic mirror and the beam splitter are fixed in the optical path and are not replaced, it is extremely difficult to accurately adjust the confocal diaphragm 13 in the order of μm, and the assembly is difficult. It takes a lot of time for adjustment and the cost is high. Further, although the optical system shown in FIG. 1 is mechanically fixed to a frame (not shown) or the like, it may be removed from the sample due to a change in environmental temperature or heat generated by a heat-generating component (for example, photomultiplier as a photodetector). There may be a deviation in the relative position between the light spot and the confocal diaphragm 13.

However, even in such a case, according to the first embodiment, by adjusting the rotations of the first optical element 8 and the second optical element 9, the light from the sample is surely confocal. It is possible to make a correction that leads to the diaphragm 13.

In the case of the so-called slit scan method (method in which a slit is provided in the light receiving portion instead of a pinhole), the correction of the optical axis may be performed in one direction orthogonal to the slit, or with one parallel plane plate. .

Next, FIGS. 6A and 6B show a mechanism for adjusting the rotation of the first optical element 8.

In this case, the first optical element 8 is attached to the frame 21, and the end of the horizontal shaft 22 is screwed into the frame 21. The shaft 22 is rotatably supported by a bearing 25 on an upright portion of a frame 30 provided upright. In this case, the shaft 22 is tightened by the nut 26 with the friction members 23 and 24 sandwiched with respect to the bearing 25 and set to an appropriate amount of rotational force. A rotary knob 29 is fixed to the shaft 22 with a set screw 27. The rotation knob 29 has a groove 29a, and the rotation range is limited by the pin 28 driven into the frame 30. Here, the rotation range limited by the groove 29a and the pin 28 is a range in which the first optical element 8 does not totally reflect.

By doing so, the rotary knob 2
By rotating the shaft 22 while applying the amount of rotational force by 9, the first optical element 8 can be rotated around the rotation shaft 11.

Although FIG. 6 describes the mechanism for adjusting the rotation of the first optical element 8, the second optical element 9 is used.
A mechanism for adjusting the rotation of can be similarly configured.

Therefore, according to the first embodiment, the optical element arranged in the optical path between the imaging lens 7 and the confocal diaphragm 13 rotates in a direction substantially orthogonal to the optical axis 10. Each of the first optical element 8 that rotates about the axis 11 and the second optical element 9 that rotates about the rotation axis 12 that is substantially orthogonal to the optical axis 10 and also orthogonal to the rotation axis 11 are respectively provided. The adjustment makes it possible to move the optical axis of the confocal diaphragm 13 in parallel, so that the optimum correction can be performed so that the light from the sample is accurately guided to the confocal diaphragm. In this case, the adjustment by the optical elements 8 and 9 does not require a precise one such as the conventional micrometer, so that the price can be reduced, the configuration is extremely simple, and the size can be reduced. Moreover, since it is not necessary to adjust the second optical element 9 after adjusting the first optical element 8 and then readjust the first optical element 8 again, the operation can be simplified. Since the rotary knob 29 can be operated even while the microscope is in operation, even if the optical axis shifts due to the influence of heat described above during operation and the state of the image deteriorates, the operator still operates the rotary knob 29. The operation can quickly restore the image to its best normal state.

(Second Embodiment) FIG. 7 shows a schematic configuration of the second embodiment. The same parts as those in FIG. 2 are designated by the same reference numerals.

In this case, in the optical path between the second optical element 9 and the confocal diaphragm 13, the third and fourth optical elements 41 having a smaller plate thickness t than the first and second optical elements 8 and 9 are provided. Four
3 and insert the respective optical elements 41 and 43 into the rotary shaft 4
It can be rotated around 2,44. The thickness t of the first and second optical elements 8 and 9 is set so that the angular difference between the dichroic mirrors 1a, 1b and 1c can be absorbed, and the third and fourth optical elements 41 and 43 are set.
In the above, each plate thickness t is set small so that fine adjustment can be performed.

According to the second embodiment as described above, the dichroic mirrors 1a, 1b, 1c can be adjusted without strict control of the angular error, and the light from the sample can be extremely accurately adjusted. It becomes possible to lead to.

(Third Embodiment) FIG. 8 shows a schematic configuration of the third embodiment. The same parts as those in FIG. 1 are designated by the same reference numerals.

In this case, the first optical element 8 is constructed so as to be rotatable around the rotary shaft 11 by the pulse motor 52, and the second optical element is similarly constructed around the rotary shaft 12 by the pulse motor 53. It is configured to be rotatable. The pulse motors 52 and 53 are connected to the controller 5
It is controlled by 0.

Further, each of the dichroic mirrors 1a to 1c.
Is also detected by the detector 51 and the detected output is given to the controller 50.

Thus, the controller 50 stores the reference pulse value necessary to rotate the first optical element 8 and the second optical element 9 in order to correct the angular error of each of the dichroic mirrors 1a to 1c in a memory (not shown). When the detector 51 detects the switching of the dichroic mirrors 1a to 1c and supplies the detection output to the controller 50, the first optical element 8 and The reference pulse value required to rotate the second optical element 9 is read from the memory,
The rotation angles of the first optical element 8 and the second optical element 9 are set by controlling the rotations of the pulse motors 52 and 53 based on this reference pulse value.

According to the third embodiment as described above, the rotation of the pulse motors 52 and 53 is controlled only by the reference pulse value in association with the switching of the dichroic mirrors 1a to 1c. The rotation angles of 8 and 9 are set, and optimum angle error correction can be performed according to the dichroic mirror used.

(Fourth Embodiment) FIG. 9 shows a schematic configuration of the fourth embodiment, and the same parts as those in FIG. 8 are denoted by the same reference numerals.

In this case, the photodetector 14 is also connected to the controller. Further, the controller 50 stores a reference pulse value required to rotate the first optical element 8 and the second optical element 9 in order to correct the angular error of each of the dichroic mirrors 1a to 1c in a memory (not shown). , When the detector 51 detects the switching of the dichroic mirrors 1a to 1c and gives this detection output to the controller 50, the first optical element 8 and the second optical element 8 correspond to the switching of the dichroic mirrors 1a to 1c. The reference pulse value required to rotate the element 9 is read from the memory,
The pulse motors 52 and 53 are rotationally controlled by this reference pulse value, and the rotation angles of the first optical element 8 and the second optical element 9 are set.

Therefore, the controller 50 first controls the rotation of the pulse motor 52 to rotate it about the rotation axis 11 of the first optical element 80, and passes the confocal diaphragm 13 from the detection output of the photodetector 14. The amount of light emitted is monitored, and a stop signal is generated to the pulse motor 52 at the position where the amount of light is maximum. Next, the controller 50 causes the pulse motor 5
3 is rotationally controlled, the second optical element 9 is rotated about the rotation axis 12, the light amount that passes through the confocal diaphragm 13 is monitored by the photodetector 14, and the pulse motor 53 is located at the position where the light amount is maximum. Generates a stop signal. As a result, the light from the sample is accurately guided to the confocal diaphragm 13.

According to the fourth embodiment as described above, when the optical elements 8 and 9 are rotated by the reference pulse value which is preliminarily confirmed by the thermal expansion due to the change of the environmental temperature and the like, the light from the sample is emitted. Although the spot position and the position of the confocal diaphragm 13 may deviate, the detector 14 monitors the amount of light passing through the confocal diaphragm 13 and feeds back the amount of light to stop the pulse motors 52 and 53 at the position where the amount of light is maximum. Therefore, the light from the sample can be guided to the confocal diaphragm 13 extremely accurately.

(Fifth Embodiment) FIGS. 10 and 11 show
The schematic configuration of the fifth embodiment is shown, and the same parts as those in FIG. 1 are denoted by the same reference numerals.

In this case, the optical element 60 positioned after the image forming lens 7 has a plane-parallel plate shape and is rotatable about the spherical member 63.

The optical element 60 has a frame 6 as shown in FIG.
It is fixed to the spherical member 63 via 1. This frame 61
Has a transparent window portion 611 in a portion corresponding to the optical element 60. The spherical member 63 is used for the frame 6
6, the receiving member 64 partially supports the peripheral surface via a spring 65, and one end of an operating shaft 67 protruding from the frame 66 is fixed. The spherical member 63 can be rotated about its center point, that is, about the center of the spherical member 63, by operating the spherical member 63. It becomes possible to obtain the same operation as the rotation.

The frame 66 has a circular hole (φ
D) is provided, and the operating shaft 67 is operated within the range of this hole. This range is set so that the optical element 60 does not totally reflect. Also,
68 is a mirror.

According to the fifth embodiment, one optical element 60 can correspond to the above-mentioned first and second optical elements 8 and 9.

(Sixth Embodiment) FIGS. 12 and 13
(A) and (b) show a schematic configuration of the sixth embodiment, and the same parts as those in FIG. 1 are denoted by the same reference numerals.

In this case, the optical element 60 positioned after the imaging lens 7 has a plane-parallel plate shape and is attached to the first apex portion of the triangular plate-shaped support member 70.

This supporting member 70 is shown in FIGS. 13 (a) and 13 (b).
As shown in FIG.
One part is attached so as to be pulled toward the frame 75 by a spring 74.

A conical recess 70 is formed on the extension line of the rotary shaft 76 of the optical element 60 at the first apex portion a of the support member 70.
A is formed, and the tip of the fulcrum screw 71 screwed into the frame 74 is fitted into the recess 70a.

Further, the tips of the pressing screws 72 and 73 screwed into the frame 74 are pressed against the second and third apex portions b and c of the supporting member 70. In addition, 68 is a mirror.

When the second apex portion b of the supporting member 70 is pressed by the tip of the pressing screw 72, the supporting member 70
Rotates about an axis connecting the apices a and c located on the extension line of the rotation shaft 76 of the optical element 60, the optical element 60 rotates about the shaft 76, and similarly, the tip of the push screw 73 causes the optical element 60 to rotate. When the third apex portion c of the support member 70 is pressed, the support member 70 rotates about the axis connecting the apex portions a and b, so that the optical element 60 has an axis 77 orthogonal to the axis 76.
Therefore, the optical element 60 can obtain the same operation as the above-described rotation about the rotating shafts 11 and 12.

In this case, the rotation angle of the optical element 60 is limited by the distance D from the surface of the frame 75 to the necks of the push screws 72 and 73 and the distance D between the support member 70 and the frame 75.

Also according to the sixth embodiment as described above,
One optical element 60 can correspond to the above-described first and second optical elements 8 and 9. In this case, the optimum adjustment can be performed only by adjusting the push screws 72 and 73 so that the detected light amount becomes maximum. Further, the push screws 72 and 73 do not need to be as precise as conventional micrometers, ordinary screws are sufficient, and the cost can be reduced, and after the push screws 72 are adjusted, Although the screw 73 is adjusted, it is not necessary to readjust the screw 72 again and the operation is easy.

Although the above description is based on the embodiment,
The present invention includes the following inventions.

(1) In a scanning optical microscope having a detection optical system that guides light from a sample to a photodetector through a confocal diaphragm, the scanning optical microscope is arranged on the optical axis in front of the confocal diaphragm and with respect to the optical axis. The optical element is provided with a parallel flat plate-like optical element whose tilt is variable, and the optical element includes a first rotation axis that rotates about a first rotation axis that is substantially orthogonal to the optical axis.
Optical element and a second optical element that rotates about a second rotation axis that is substantially orthogonal to the optical axis and that is orthogonal to the first rotation axis. microscope.

By doing so, even if the light from the sample deviates from the confocal stop position, the optical axis can be moved in parallel. Therefore, the light from the sample is corrected so as to be accurately guided to the confocal stop. Therefore, the adjustment by the optical element does not require a precise one such as a conventional micrometer, so that the price can be reduced and the configuration can be extremely simple.

(2) In the scanning optical microscope described in (1), the parallel plane plate optical element can always adjust the inclination with respect to the optical axis by the knob connected to the optical element.

By doing so, even if the optical axis is deviated during the operation of the microscope, the optical axis can be quickly adjusted by the knob.

(3) A light source, a wavelength selection element for selecting a light of a specific wavelength from the light emitted from the light source, a switching means for switching the wavelength selection element, and a two-dimensional sample using the selected light. A means for scanning, a detection optical system for guiding the light from the sample to a photodetector through a confocal diaphragm, and a parallel arrangement which is arranged on the optical axis in front of the confocal diaphragm and whose inclination with respect to this optical axis is variable. In a scanning optical microscope having a flat plate-shaped optical element, the tilt of the parallel flat plate-shaped optical element corresponds to the selected wavelength selection element in association with the switching operation of the wavelength selection element by the switching means. A scanning optical microscope, comprising: a driving unit that adjusts the tilt amount to a predetermined amount.

By doing so, even if each wavelength selection element has a slight angle deviation with respect to the optical axis, the inclination of the optical element is adjusted to a predetermined inclination amount so as to correct the angle deviation. By doing so, it is possible to obtain a state in which the deviation of the optical axis is automatically corrected regardless of which wavelength selection element is used.

(4) In the scanning optical microscope described in (1), an optical element for fine adjustment is inserted in the optical path between the optical element and the confocal diaphragm.

In this way, the light from the sample can be guided to the confocal diaphragm very accurately by fine adjustment, without strictly controlling the angular error of the optical axis.

(5) In the scanning optical microscope according to (1), the reference pulse value of the pulse motor for driving the optical element is controlled according to the dichroic mirror inserted on the optical axis in front of the optical element. There is.

With this arrangement, the rotation of the pulse motor is only controlled by the reference pulse value according to the dichroic mirror, so that the inclination of the optical element can be set quickly.

(6) In the scanning optical microscope described in (1), the amount of light passing through the confocal diaphragm is monitored, and the operation of the pulse motor for driving the optical element is stopped at the position where the amount of light becomes maximum.

By doing so, even if the light spot position from the sample deviates from the confocal diaphragm position due to changes in environmental temperature or the like, the light amount passing through the confocal diaphragm is fed back and the position of maximum light amount is returned. Since the operation of the pulse motor is stopped at, the light from the sample can be guided to the confocal diaphragm very accurately.

[0081]

As described above, according to the present invention, it is possible to accurately guide the light from the sample to the confocal diaphragm, and further, the scanning type having the detection optical system which is simple in construction and inexpensive in price. An optical microscope can be provided.

[Brief description of drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is a diagram for explaining the first embodiment.

FIG. 3 is a diagram for explaining the first embodiment.

FIG. 4 is a diagram for explaining the first embodiment.

FIG. 5 is a diagram for explaining the first embodiment.

FIG. 6 is a diagram showing a mechanism for rotationally adjusting the optical element of the first embodiment.

FIG. 7 is a diagram showing a schematic configuration of a second embodiment of the present invention.

FIG. 8 is a diagram showing a schematic configuration of a third embodiment of the present invention.

FIG. 9 is a diagram showing a schematic configuration of a fourth embodiment of the present invention.

FIG. 10 is a diagram showing a schematic configuration of a fifth embodiment of the present invention.

FIG. 11 is a diagram showing a detailed schematic configuration of a fifth embodiment.

FIG. 12 is a diagram showing a schematic configuration of a sixth embodiment of the present invention.

FIG. 13 is a diagram showing a detailed schematic configuration of a sixth embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Laser oscillator, 1a, 1b, 1c ... Dichroic mirror, 2 ... Mirror, 3 ... 4 Galvano mirror, 5 ... Mirror, 6 ... Pupil projection lens, 7 ... Imaging lens, 8 ... 1st optical element, 9 ... second optical element, 10 ... optical axis, 11, 1
2 ... Rotation axis, 13 ... Confocal diaphragm, 14 ... Photodetector, 21
... Frame, 22 ... Shaft, 23, 24 ... Friction member, 25 ... Bearing,
26 ... Nut, 27 ... Set screw, 28 ... Pin, 29 ... Rotating knob, 29a ... Groove, 30 ... Frame, 41 ... Third optical element, 43 ... Fourth optical element, 42, 44 ... Rotating shaft,
50 ... Controller, 51 ... Detector, 52 ... Pulse motor, 53 ... Pulse motor, 60 ... Optical element, 61 ... Frame,
611 ... Window part, 63 ... Spherical member, 64 ... Receiving member, 65 ...
Spring, 66 ... Frame, 67 ... Operation axis, 68 ... Mirror,
70 ... Support member, 701 ... Through hole, 71 ... Support screw, 7
2, 73 ... Push screw, 74 ... Spring, 75 ... Frame, 7
6, 77 ... Axis.

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[Procedure amendment]

[Submission date] March 7, 2003 (2003.3.7)

[Procedure Amendment 1]

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[Claims]

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[0011]

The invention according to claim 1 is
Light source and multiple wavelength selection elements to select light of specific wavelength
A switching means for switching the wavelength selection element,
A means for two-dimensionally scanning the sample with light from a source,
The detection optical system that guides light to the photodetector through the confocal diaphragm
The scanning optical microscope having the
Each wavelength selection element is linked with the switching operation of the wavelength selection element.
Reference value stored in memory to correct the angular error of
To read the deviation of the optical axis due to the switching operation.
It is characterized by having a driving means for dynamically correcting .

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0012

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[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Delete

[Procedure Amendment 5]

[Document name to be amended] Statement

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[Procedure correction 6]

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[Procedure Amendment 7]

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[Correction target item name] 0016

[Correction method] Change

[Correction content]

As a result, according to the invention of claim 1 ,
If multiple wavelength selection elements are switchably provided in the microscope optical system, even if each wavelength selection element has a slight angle deviation with respect to the optical axis, it is stored in advance to correct the angle deviation. The reference value thus read is read, and the deviation of the optical axis is automatically corrected regardless of which wavelength selection element is used.

Claims (3)

[Claims] 1. A scanning optical microscope having a detection optical system for guiding light from a sample to a photodetector through a confocal diaphragm, wherein the scanning optical microscope is arranged on the optical axis in front of the confocal diaphragm and tilts with respect to the optical axis. A parallel plane plate-shaped optical element that is variable, and the optical element includes a first optical element that rotates about a first rotation axis that is substantially orthogonal to the optical axis, and A scanning optical microscope comprising a second optical element that rotates about a second rotation axis that is substantially orthogonal to the optical axis and that is orthogonal to the first rotation axis. 2. The scanning optical microscope according to claim 1, wherein the parallel plane plate-shaped optical element can always adjust the inclination with respect to the optical axis by a knob connected to the optical element. 3. A light source, a wavelength selection element for selecting light of a specific wavelength among the light emitted from this light source, switching means for switching this wavelength selection element, and two-dimensional scanning of a sample by the selected light. Means, a detection optical system that guides the light from the sample to the photodetector through the confocal diaphragm, and a parallel plane that is arranged on the optical axis in front of the confocal diaphragm and has a variable tilt with respect to the optical axis. In a scanning optical microscope having a face plate optical element, the inclination of the plane-parallel plate optical element corresponds to the selected wavelength selection element in association with the switching operation of the wavelength selection element by the switching means. A scanning optical microscope, comprising a driving means for adjusting the tilt amount to a predetermined value.