JP2003163105A - Resistor element - Google Patents

Resistor element

Info

Publication number
JP2003163105A
JP2003163105A JP2001364659A JP2001364659A JP2003163105A JP 2003163105 A JP2003163105 A JP 2003163105A JP 2001364659 A JP2001364659 A JP 2001364659A JP 2001364659 A JP2001364659 A JP 2001364659A JP 2003163105 A JP2003163105 A JP 2003163105A
Authority
JP
Japan
Prior art keywords
resistor
protective film
resistor element
glass
titanium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001364659A
Other languages
Japanese (ja)
Other versions
JP3813864B2 (en
Inventor
Hiroyuki Abe
博幸 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2001364659A priority Critical patent/JP3813864B2/en
Publication of JP2003163105A publication Critical patent/JP2003163105A/en
Application granted granted Critical
Publication of JP3813864B2 publication Critical patent/JP3813864B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Volume Flow (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a resistor element which is improved in pollution resistance by covering the surfaces of a heating resistor, a temperature-sensitive resistor or the like with a protection film having a water-repelling function. <P>SOLUTION: In the resistor element 1 in which a resistor 5 is covered with a glass protection film 6 and exposed to an air flow in use, the protection film 6 is formed of a mixed material composed of glass and titanium oxide. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、内燃機関の吸入空
気流量を検出するのに好適な抵抗体素子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resistor element suitable for detecting the intake air flow rate of an internal combustion engine.

【0002】[0002]

【従来の技術】発熱抵抗体および感温抵抗体に関する従
来技術は、例えば特開平5−312617号公報に開示
されている。これは、外径φ0.5mm、長さ2mm程
度の円柱状のアルミナパイプにφ0.15程度のリード
を挿入し、その表面にφ20μmの白金線をスパイラル
状に巻線した後、抵抗体の表面に保護膜としてガラスを
コートするというものである。
2. Description of the Related Art A conventional technique relating to a heat generating resistor and a temperature sensitive resistor is disclosed in, for example, Japanese Patent Laid-Open No. 5-313617. This is because a lead of about φ0.15 was inserted into a cylindrical alumina pipe with an outer diameter of φ0.5 mm and a length of about 2 mm, and a platinum wire of φ20 μm was spirally wound on the surface of the lead, and then the surface of the resistor It is to coat glass as a protective film.

【0003】また、特開平11−230802号公報に
開示されている抵抗体素子は、シリコン基板上に発熱抵
抗体、感温抵抗体を形成し、その表面に光触媒膜つまり
酸化チタンで形成した保護膜を形成し、この保護膜の近
傍に発光体を設けることにより、発熱抵抗体、感温抵抗
体に付着した汚損物質を除去するというものである。
The resistor element disclosed in Japanese Patent Laid-Open No. 11-230802 has a heating resistor and a temperature sensitive resistor formed on a silicon substrate, and a photocatalyst film, that is, titanium oxide, is formed on the surface of the resistor element for protection. By forming a film and providing a light-emitting body in the vicinity of this protective film, the contaminants adhering to the heat-generating resistor and the temperature-sensitive resistor are removed.

【0004】さらに、特開平9−17608号公報に
は、白金薄膜の表面に酸化チタンを蒸着する技術が開示
されている。
Further, Japanese Patent Application Laid-Open No. 9-17608 discloses a technique of depositing titanium oxide on the surface of a platinum thin film.

【0005】[0005]

【発明が解決しようとする課題】前記した従来技術のう
ち、特開平5−312617号公報に記載の技術は、保
護膜にガラスをコーティングする構造であるが、ガラス
等の無機物質(酸化物)は一般的に親水性に近いことが
知られている。つまり発熱抵抗体、感温抵抗体に水が付
着した際、ガラスは水を弾くはっ水作用により、コーテ
ィング表面に水が一様に広がる親水性を示し、水が発熱
抵抗体、感温抵抗体に付着して、さらにここにダスト、
ゴミ等の汚損物質が付着した場合、これら発熱抵抗体、
感温抵抗体の放熱特性等の諸特性を変化させてしまう恐
れがある。
Among the above-mentioned conventional techniques, the technique described in JP-A-5-313617 has a structure in which a protective film is coated with glass. However, an inorganic substance (oxide) such as glass is used. Is generally known to be close to hydrophilic. In other words, when water adheres to the heat-generating resistor or the temperature-sensitive resistor, the glass shows a hydrophilic property that the water spreads evenly on the coating surface due to the water-repellent action. Attached to the body, dust here,
If fouling substances such as dust adhere, these heating resistors,
There is a possibility that various characteristics such as heat dissipation characteristics of the temperature sensitive resistor may be changed.

【0006】一方、特開平11−230802号公報に
記載の技術は、保護膜に汚損物質が付着しても光触媒膜
と発光源による光触媒作用により汚損物質を除去すると
いうものであり、発光源を必要とする。
On the other hand, the technique disclosed in Japanese Patent Laid-Open No. 11-230802 is to remove the pollutant by the photocatalytic action of the photocatalyst film and the light emitting source even if the pollutant adheres to the protective film. I need.

【0007】なお、特開平9−17608号公報に記載
の技術、すなわち白金薄膜の表面に蒸着した酸化チタン
膜の効果は、酸素以外の汚染物質の白金薄膜への拡散を
防止すること、つまり高温度においても白金薄膜が劣化
させないことにあり、後述する本発明とはその目的、構
成、効果のいずれの点でも相違している。
The technique described in Japanese Patent Laid-Open No. 9-17608, that is, the effect of the titanium oxide film deposited on the surface of the platinum thin film is to prevent diffusion of contaminants other than oxygen into the platinum thin film, that is, Since the platinum thin film does not deteriorate even at a temperature, it differs from the present invention described later in any of its objects, constitutions and effects.

【0008】本発明の目的は、発熱抵抗体、感温抵抗体
等の表面を覆う保護膜そのものにはっ水作用の機能を付
加し、耐汚損性を改善した抵抗体素子を提供することに
ある。
An object of the present invention is to provide a resistor element in which the function of water repellency is added to the protective film itself covering the surface of the heating resistor, the temperature sensitive resistor, etc., and the stain resistance is improved. is there.

【0009】[0009]

【課題を解決するための手段】前記課題は、抵抗体の表
面をガラス保護膜で覆い、空気流の中に曝露して使用さ
れる抵抗体素子であって、前記保護膜を、ガラスと酸化
チタンとの混合部材で形成することによって達成され
る。
Means for Solving the Problems The above-mentioned problem is a resistor element which is used by covering the surface of a resistor with a glass protective film and exposing it to an air stream for use. It is achieved by forming a mixed member with titanium.

【0010】[0010]

【発明の実施の形態】本発明の実施例を図面により説明
する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to the drawings.

【0011】図1は本発明で提示している抵抗体素子の
一実施例の断面図である。
FIG. 1 is a sectional view of an embodiment of the resistor element proposed in the present invention.

【0012】抵抗体素子1はアルミナ等の安価な汎用無
機材により外径φ0.5〜φ0.9mm、長さ2〜3m
m程度の円柱状パイプ2に外径φ0.2mm以下のリー
ド3を接着剤4により接着固定する。このリード3は白
金線、白金合金線、非貴金属材料表面に貴金属材料をク
ラッドしたリードが使用されることが多く、接着剤4に
はガラス系の無機物、あるいは白金、銀を始めとする貴
金属を導電体とした導電性接着ペーストが使用されるケ
ースが多い。さらに白金細線等を抵抗体5として使用す
るため、抵抗体5の片端をリード3に溶接し、これを基
点にパイプ2上をスパイラル状に巻線し、所定の抵抗値
に巻線し終えた後、反対側のリード3に溶接固定する。
最後に抵抗体部分を保護するためガラスで保護膜6を形
成する。
The resistor element 1 is made of an inexpensive general-purpose inorganic material such as alumina and has an outer diameter of 0.5 to 0.9 mm and a length of 2 to 3 m.
A lead 3 having an outer diameter of 0.2 mm or less is bonded and fixed to a cylindrical pipe 2 of about m by an adhesive 4. The lead 3 is often a platinum wire, a platinum alloy wire, or a lead in which a precious metal material is clad on the surface of a non-precious metal material, and the adhesive 4 is made of a glass-based inorganic material or a precious metal such as platinum or silver. In many cases, a conductive adhesive paste used as a conductor is used. Further, since a platinum thin wire or the like is used as the resistor 5, one end of the resistor 5 is welded to the lead 3, and the pipe 2 is spirally wound with this as a base point, and the winding is finished to a predetermined resistance value. After that, the lead 3 on the opposite side is fixed by welding.
Finally, a protective film 6 is formed of glass to protect the resistor portion.

【0013】本発明の説明を具体的に行う前に、本発明
が最も効果的に使用されるであろう熱式空気流量計につ
いて図4を用いて説明する。
Before specifically explaining the present invention, a thermal air flow meter in which the present invention will be most effectively used will be described with reference to FIG.

【0014】発熱抵抗体7および感温抵抗体8を用いた
熱式空気流量計の発熱抵抗体7は、空気温度を計測する
感温抵抗体8と常に一定の温度差に保たれるようにフィ
ードバック回路により定温度制御され、常時加熱されて
いる。発熱抵抗体7は空気流の中に設置されるため、こ
の空気流に放熱する発熱抵抗体7の表面部分が放熱面、
つまり熱伝達面となる。この熱伝達で空気流に奪われた
熱量を電気的信号に変換し、空気流量を計測する。9は
発熱抵抗体7からの信号を電気的に変換し、空気流量信
号にする駆動回路を保持し、かつ、全吸入空気流量が流
入する空気通路を形成するエンジンボディである。ボデ
ィ9は、吸入空気の大部分が流入する一方の空気通路と
しての主通路10と、一部の空気が流れ込む他方の空気
通路としての副通路11とに分けられた両通路を有し、
発熱抵抗体7と感温抵抗体8とから成る抵抗体素子1が
副通路11中に配置されている。
The heating resistor 7 of the thermal air flow meter using the heating resistor 7 and the temperature sensitive resistor 8 is always kept at a constant temperature difference from the temperature sensitive resistor 8 for measuring the air temperature. It is controlled by a feedback circuit at a constant temperature and is constantly heated. Since the heating resistor 7 is installed in the air flow, the surface portion of the heating resistor 7 that radiates heat to this air flow is
That is, it becomes a heat transfer surface. The amount of heat taken by the air flow due to this heat transfer is converted into an electrical signal, and the air flow rate is measured. Reference numeral 9 is an engine body that electrically converts the signal from the heating resistor 7 and holds a drive circuit that converts the signal into an air flow rate signal, and that forms an air passage into which the total intake air flow rate flows. The body 9 has both passages divided into a main passage 10 as one air passage into which most of the intake air flows and a sub passage 11 as the other air passage into which a part of the air flows,
A resistor element 1 including a heating resistor 7 and a temperature sensitive resistor 8 is arranged in a sub passage 11.

【0015】内燃機関は、空気流量計が計測した信号と
他センサの信号を基に、マイクロコンピュータが内燃機
関のシリンダ内へのインジェクタ噴射量を決定し、内燃
機関の燃焼制御を行っているが、空気流量測定装置の信
号をベースに内燃機関の燃焼制御を行っているため、発
熱抵抗体を用いた熱式空気流量計は直接質量流量を測定
できる利点と、その信頼性により、多くの内燃機関の制
御システムに採用されている。
In the internal combustion engine, the microcomputer determines the amount of injector injection into the cylinder of the internal combustion engine on the basis of the signal measured by the air flow meter and the signal of another sensor to control combustion of the internal combustion engine. Since the combustion control of the internal combustion engine is performed based on the signal of the air flow rate measurement device, the thermal air flow meter using a heating resistor has the advantage of being able to directly measure the mass flow rate and its reliability, so that many internal combustion Used in engine control systems.

【0016】図1を例に本発明の構造および特徴を説明
する。円柱状パイプ2にリード3が接着剤4により接着
固定された後、白金細線の片端をリード3に溶接し、こ
れを基点にパイプ2上をスパイラル状に巻線し、所定の
抵抗値に巻線し終えた後、反対側のリード3に溶接固定
し、抵抗体部分に保護膜6を形成する構造および製造工
程は従来と同様である。そして本発明では、抵抗体5を
保護する保護膜6にはっ水性を有する部材を採用したこ
とに特徴があり、本実施例では、このはっ水膜として、
酸化チタン2wt%を含むガラスにより形成した。ガラ
スは一般的にシリカ、アルミナ、酸化鉛、酸化亜鉛等か
ら形成されることが多いが、本発明では親水性傾向とい
われるシリカガラス、鉛ガラス等に酸化チタンを配合し
たガラスを用いることにより、ガラス表面に発生するシ
ラノール基(水酸基)の規則正しい配列を阻害し、シリ
カガラス、鉛ガラスの表面に酸化チタンを適度に配列す
ることではっ水性を付与させることが可能となる。この
場合、水滴との接触角が少なくとも90°以上あればは
っ水膜と云える(水滴との接触角が90°を境にはっ水
膜と定義付けているが、現在明確なはっ水膜と親水膜の
境界線は無く、少なくとも90°以上の接触角であれば
一般的常識よりはっ水膜と云える)。
The structure and features of the present invention will be described with reference to FIG. After the lead 3 is bonded and fixed to the cylindrical pipe 2 with the adhesive 4, one end of a platinum thin wire is welded to the lead 3, and the pipe 2 is spirally wound from this as a base point and wound to a predetermined resistance value. After the wiring is completed, the structure and manufacturing process of welding and fixing to the lead 3 on the opposite side and forming the protective film 6 on the resistor portion are the same as the conventional one. The present invention is characterized in that a member having water repellency is adopted as the protective film 6 for protecting the resistor 5, and in this embodiment, this water repellant film is
It was made of glass containing 2 wt% of titanium oxide. Glass is generally formed from silica, alumina, lead oxide, zinc oxide and the like, but in the present invention, silica glass, which is said to have a hydrophilic tendency, by using glass in which titanium oxide is mixed with lead glass, By hindering the regular arrangement of silanol groups (hydroxyl groups) generated on the glass surface and appropriately arranging titanium oxide on the surface of silica glass or lead glass, it becomes possible to impart water repellency. In this case, if the contact angle with the water droplets is at least 90 ° or more, it can be said to be a water-repellent film (the water-repellent film is defined when the contact angle with the water droplets is 90 °, but it is currently clear. There is no boundary line between the water film and the hydrophilic film, and if the contact angle is at least 90 ° or more, it can be said that it is a water-repellent film according to common sense).

【0017】ここではっ水性について簡単に説明する。
はっ水性とは、水分子となじめずに水に溶けにくい性質
を持った原子団あるいは分子を指すが、表面に付着した
水滴を弾くことができる表面状態をはっ水と云い、水滴
を弾くことができず、一様になじんでしまう状態を親水
性と云う。これは、膜表面の表面自由エネルギの大小で
説明できる。表面自由エネルギは膜表面に発生する余分
なエネルギで、この値が大きいと水分子を膜表面に取り
込むエネルギが大きいため、親水的な傾向となる。反対
に表面自由エネルギが小さい膜ははっ水性を有する傾向
にあり、この表面自由エネルギは表面張力および水滴と
の接触角と相関性がある。
Here, the water repellency will be briefly described.
Water repellency refers to an atomic group or molecule that does not dissolve in water molecules and does not easily dissolve in water, but the surface condition that allows water droplets attached to the surface to be repelled is called water repellency. The state in which it is not possible to fit in and is uniformly adapted is called hydrophilic. This can be explained by the magnitude of the surface free energy of the film surface. The surface free energy is extra energy generated on the surface of the film, and if this value is large, the energy for taking in water molecules to the surface of the film is large, so that it tends to be hydrophilic. On the contrary, a film having a small surface free energy tends to have water repellency, and this surface free energy correlates with the surface tension and the contact angle with a water droplet.

【0018】次に、酸化チタンを用いた本発明の保護膜
7を用いることによる効果を説明する。抵抗体素子1に
おいて抵抗体5を保護する保護膜6は通常ガラスで形成
されていることが多いが、ガラスは一般的に水に対して
は親水的(親水性)であると云われている。したがって
抵抗体素子1に水が付着した場合、水滴は抵抗体外周に
一様に濡れる傾向となる。この場合、抵抗体素子1全周
に濡れ広がった水は飛散しにくく、ある温度に加熱され
て使用される発熱抵抗体7の場合、発熱抵抗体7表面に
濡れ広がった水の影響で発熱抵抗体7本来の放熱特性等
の諸特性を変化させる要因となり、流量測定精度を悪化
させる可能性がある。
Next, the effect of using the protective film 7 of the present invention using titanium oxide will be described. In many cases, the protective film 6 for protecting the resistor 5 in the resistor element 1 is usually made of glass, but it is generally said that glass is hydrophilic with respect to water. . Therefore, when water adheres to the resistor element 1, water droplets tend to uniformly wet the outer circumference of the resistor. In this case, the water that has spread over the entire circumference of the resistor element 1 is unlikely to scatter, and in the case of the heating resistor 7 that is used by being heated to a certain temperature, the heating resistance is affected by the water that has spread over the surface of the heating resistor 7. It becomes a factor that changes various characteristics such as the heat dissipation characteristic of the body 7, which may deteriorate the flow rate measurement accuracy.

【0019】また、水滴が保護膜表面に一様に濡れ広が
った場合、濡れ広がった水は飛散しにくく、ここにダス
ト、ゴミ等の汚損物質が流入した際、表面に付着しやす
くなり、抵抗体素子1の汚損を加速させる要因となる可
能性がある。
Further, when the water droplets evenly spread on the surface of the protective film, the wetted water is less likely to scatter, and when pollutants such as dust and dust flow into the surface, they easily adhere to the surface, resulting in resistance. This may be a factor that accelerates the contamination of the body element 1.

【0020】一般的に考えて前記抵抗体素子1表面の保
護膜を疎水性樹脂でコートすれば良いものであるが、こ
れら樹脂の耐熱温度はせいぜい200〜300℃程度で
あり、発熱抵抗体7は400℃付近の耐熱性を要求され
る場合が多く、採用できない。また、これらの多くは経
時と共にコート膜が摩耗損失したり、初期性能が失われ
たりする事例が多い。逆に400℃以上の耐熱性を維持
できる工業用コーティングとしてガラスは有効である。
そこで本発明では、ガラスの特性を生かしつつ、更にガ
ラスにはっ水作用を付加させたガラスを以って、発熱抵
抗体7のコート膜とすることで、抵抗体素子1表面の耐
汚損性を改善することを提案するものである。具体的に
はガラスの添加剤として酸化チタンを配合する。酸化チ
タンは近年、光触媒での励起作用により、酸化チタン表
面を清浄する効果が確認され、セルフクリーニング膜と
して、多方面に採用されているが、本発明は光触媒によ
る励起作用による汚損物質除去を趣旨としている訳では
ない。逆に光触媒を必要としないことに特徴がある。酸
化チタンの光触媒作用は、光が酸化チタンに入射される
ことにより発生する励起作用を利用したものであるが、
このセルフクリーニングは表面に付着した液体が親水的
に一様に拡散することを促す効果ともいえるため、はっ
水性の効果よりも親水効果が大きい側面がある。相反し
て、光のない状態において酸化チタンははっ水性を有す
ることが近年判りはじめ、現在この分野の研究が進んで
いる。つまり本発明では、自動車のエンジンルームに設
置される熱式空気流量計の抵抗体素子1は常に暗所に設
置されていることに注目し、光のない状態における酸化
チタンのはっ水性を利用したものである。
It is generally considered that the protective film on the surface of the resistor element 1 may be coated with a hydrophobic resin, but the heat resistant temperature of these resins is about 200 to 300 ° C. at most, and the heat generating resistor 7 is used. In many cases, heat resistance around 400 ° C. is required, so it cannot be adopted. Further, in many of these cases, there are many cases in which the coating film loses wear and the initial performance is lost over time. On the contrary, glass is effective as an industrial coating capable of maintaining heat resistance of 400 ° C. or higher.
In view of this, in the present invention, by making use of the characteristics of glass and further adding water repellency to the glass to form the coating film of the heating resistor 7, the stain resistance of the surface of the resistor element 1 is improved. Is proposed to improve. Specifically, titanium oxide is added as an additive for glass. In recent years, titanium oxide has been confirmed to have an effect of cleaning the surface of titanium oxide by an excitation action of a photocatalyst, and has been adopted in various fields as a self-cleaning film. It does not mean that. On the contrary, it is characterized by not requiring a photocatalyst. The photocatalytic action of titanium oxide utilizes the excitation action that occurs when light enters titanium oxide.
Since this self-cleaning can be said to be an effect of promoting the uniform diffusion of the liquid attached to the surface hydrophilically, there is a side surface having a greater hydrophilic effect than the water-repellent effect. On the contrary, it has recently been found that titanium oxide has water repellency in the absence of light, and research in this field is currently in progress. That is, in the present invention, attention is paid to the fact that the resistor element 1 of the thermal air flow meter installed in the engine room of the automobile is always installed in a dark place, and the water repellency of titanium oxide in the absence of light is utilized. It was done.

【0021】以下、本発明の別の実施例について説明す
る。
Another embodiment of the present invention will be described below.

【0022】図2は、円柱状のパイプ2表面に白金等に
より抵抗体5を薄膜により形成し、この抵抗体表面にレ
ーザ等でスパイラル状に抵抗トリミングした後、リード
3を白金接着剤4等で接着し、保護膜6を形成する構造
の抵抗体素子1に本発明の酸化チタンを採用した保護膜
6を適用した例である。
In FIG. 2, a resistor 5 is formed of a thin film of platinum or the like on the surface of a cylindrical pipe 2, and spiral resistance trimming is performed on the resistor surface by a laser or the like, and then the lead 3 is attached to a platinum adhesive 4 or the like. This is an example in which the protective film 6 employing the titanium oxide of the present invention is applied to the resistor element 1 having a structure in which the protective film 6 is adhered to form the protective film 6.

【0023】図3は、アルミナ等の中実ボビン2表面に
白金等で薄膜を形成し、この抵抗体5表面にレーザ等で
スパイラル状に抵抗トリミングした後、両端にリード3
を有するキャップ14を圧入し、保護膜6を形成する構
造の抵抗体素子1に本発明の酸化チタンを採用した保護
膜6を適用した例である。
In FIG. 3, a thin film is formed on the surface of a solid bobbin 2 of alumina or the like with platinum or the like, and the surface of the resistor 5 is spirally trimmed with a laser or the like.
In this example, the protective film 6 employing the titanium oxide of the present invention is applied to the resistor element 1 having a structure in which the protective film 6 is formed by press-fitting the cap 14 having.

【0024】[0024]

【発明の効果】本発明によれば、発熱抵抗体、感温抵抗
体等の表面を覆い保護膜にはっ水作用の機能を付加し、
耐汚損性を改善した抵抗体素子を提供することができ
る。
According to the present invention, the function of water repellency is added to the protective film by covering the surface of the heating resistor, the temperature sensitive resistor and the like,
It is possible to provide a resistor element having improved stain resistance.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例を示す抵抗体素子の断面
図である。
FIG. 1 is a sectional view of a resistor element showing a first embodiment of the present invention.

【図2】本発明の第2の実施例を示す抵抗体素子の断面
図である。
FIG. 2 is a sectional view of a resistor element showing a second embodiment of the present invention.

【図3】本発明の第3の実施例を示す抵抗体素子の断面
図である。
FIG. 3 is a sectional view of a resistor element showing a third embodiment of the present invention.

【図4】本発明の抵抗体素子を使用した空気流量測定装
置の断面図である。
FIG. 4 is a cross-sectional view of an air flow rate measuring device using the resistor element of the present invention.

【符号の説明】[Explanation of symbols]

1…抵抗体素子、2…円柱状パイプ、3…リード、4…
接着剤、5…抵抗体、6…保護膜、7…キャップ、8…
発熱抵抗体、9…感温抵抗体、10…エンジンボディ、
11…主通路、12…副通路。
1 ... Resistor element, 2 ... Cylindrical pipe, 3 ... Lead, 4 ...
Adhesive, 5 ... Resistor, 6 ... Protective film, 7 ... Cap, 8 ...
Heating resistor, 9 ... Temperature sensitive resistor, 10 ... Engine body,
11 ... Main passage, 12 ... Sub passage.

フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G01K 7/18 F02D 35/00 366E 13/02 366L Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) G01K 7/18 F02D 35/00 366E 13/02 366L

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 抵抗体の表面をガラス保護膜で覆い、空
気流の中に曝露して使用される抵抗体素子であって、前
記保護膜を、ガラスと酸化チタンとの混合部材で形成し
たことを特徴とする抵抗体素子。
1. A resistor element in which the surface of a resistor is covered with a glass protective film and exposed to an air stream to be used, and the protective film is formed of a mixed member of glass and titanium oxide. A resistor element characterized by the above.
【請求項2】 請求項1において、絶縁体により形成さ
れた円柱状パイプの両端に導電性部材により成るリード
線を接着し、前記円柱状パイプ表面に抵抗体を形成し、
その表面に保護膜を形成する抵抗体素子の前記保護膜
を、ガラスと酸化チタンとの混合部材で形成した抵抗体
素子。
2. The method according to claim 1, wherein lead wires made of a conductive member are adhered to both ends of the cylindrical pipe made of an insulator, and a resistor is formed on the surface of the cylindrical pipe.
A resistor element in which the protective film of the resistor element having a protective film formed on its surface is formed of a mixed member of glass and titanium oxide.
【請求項3】 請求項1において、絶縁体の薄板上に抵
抗体を形成し、その表面を保護膜で覆う薄膜型の抵抗体
素子の前記保護膜を、ガラスと酸化チタンとの混合部材
で形成した抵抗体素子。
3. The protective film of a thin-film type resistor element according to claim 1, wherein a resistor is formed on a thin plate of an insulator, and the surface of the resistor is covered with a protective film. Resistor element formed.
【請求項4】 請求項1において、シリコン基板に形成
された薄肉部上に設けられた抵抗体を保護膜で覆う抵抗
体素子の前記保護膜を、ガラスと酸化チタンとの混合部
材で形成した抵抗体素子。
4. The protective film of the resistor element according to claim 1, wherein the resistor provided on the thin portion formed on the silicon substrate is covered with the protective film, and the protective film is formed of a mixed member of glass and titanium oxide. Resistor element.
【請求項5】 請求項1〜4のいずれか1項に記載の抵
抗体素子をエンジンルームの空気ダクト内に設置した内
燃機関。
5. An internal combustion engine in which the resistor element according to claim 1 is installed in an air duct of an engine room.
JP2001364659A 2001-11-29 2001-11-29 Resistor element Expired - Fee Related JP3813864B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001364659A JP3813864B2 (en) 2001-11-29 2001-11-29 Resistor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001364659A JP3813864B2 (en) 2001-11-29 2001-11-29 Resistor element

Publications (2)

Publication Number Publication Date
JP2003163105A true JP2003163105A (en) 2003-06-06
JP3813864B2 JP3813864B2 (en) 2006-08-23

Family

ID=19174810

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3813864B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1845344A2 (en) 2006-04-13 2007-10-17 Hitachi, Ltd. Thermal flow meter for an exhaust gas recirculation system
JP2015521016A (en) * 2012-12-21 2015-07-23 電子部品研究院Korea Electronics Technology Institute Energy conversion substrate using liquid
KR20180132537A (en) * 2017-06-02 2018-12-12 센사타 테크놀로지스, 인크 Alumina diffusion barrier for sensing elements

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BR112018069113B1 (en) 2016-04-07 2022-10-25 Cmblu Energy Ag METHOD FOR THE PRODUCTION OF LOW MOLECULAR WEIGHT AROMATIC LIGIN DERIVATIVE COMPOUNDS
WO2018146344A1 (en) 2017-02-13 2018-08-16 Cmblu Projekt Ag Process for the production of sulphonated low molecular weight derivatives from lignin
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1845344A2 (en) 2006-04-13 2007-10-17 Hitachi, Ltd. Thermal flow meter for an exhaust gas recirculation system
US7526955B2 (en) 2006-04-13 2009-05-05 Hitachi, Ltd. Flow meter and exhaust gas recirculation system using the same
JP2015521016A (en) * 2012-12-21 2015-07-23 電子部品研究院Korea Electronics Technology Institute Energy conversion substrate using liquid
KR20180132537A (en) * 2017-06-02 2018-12-12 센사타 테크놀로지스, 인크 Alumina diffusion barrier for sensing elements
KR102603003B1 (en) * 2017-06-02 2023-11-15 센사타 테크놀로지스, 인크 Alumina diffusion barrier for sensing elements

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