JP2003158165A - Carrying device, work carrying device, and control method of carrying device - Google Patents

Carrying device, work carrying device, and control method of carrying device

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Publication number
JP2003158165A
JP2003158165A JP2001357585A JP2001357585A JP2003158165A JP 2003158165 A JP2003158165 A JP 2003158165A JP 2001357585 A JP2001357585 A JP 2001357585A JP 2001357585 A JP2001357585 A JP 2001357585A JP 2003158165 A JP2003158165 A JP 2003158165A
Authority
JP
Japan
Prior art keywords
upper arm
forearm
base
end portion
hand member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001357585A
Other languages
Japanese (ja)
Inventor
Toshiaki Nagai
利明 永井
Eiichi Karasawa
栄一 柄沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juki Corp
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP2001357585A priority Critical patent/JP2003158165A/en
Publication of JP2003158165A publication Critical patent/JP2003158165A/en
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a carrying device capable of efficiently carrying objects and high in rigidity despite a simple structure, a work carrying device for carrying work such as a wafer and a glass substrate with this carrying device between an original carrying position and a destination position where process is performed to this work, and a control method of this carrying device. SOLUTION: Upper arms 2a, 2b are pivotally coupled with a base 13 with the center on a horizontal axis H1, and front arms 3a, 3b are pivotally coupled with these upper arms 2a, 2b with the center on a horizontal axis H2. A hand member 4 provided with mount parts 42, 43 for disposing the object 1 to be carried is pivotally coupled with these front arms 3a, 3b with a center on a horizontal axis H3. The carrying device 11 is constituted so as to provide pivoting means 5a (51a to 62a), 5b pivoting the upper arms 2a, 2b, the front arms 3a, 3b, and the hand member 4 respectively. The upper face of the mount parts 42, 43 of the hand member 4 is formed to be horizontal constantly.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【発明の属する技術分野】本発明は、被搬送物を搬送す
る搬送装置、特に半導体製造ラインに組み込まれ、ウェ
ハやガラス基板などのワークを、搬送元位置（カセット
キャリアなど）とこのワークに処理を施すなどする搬送
先位置（プロセスチャンバ）との間で搬送するワーク搬
送装置、および搬送装置の制御方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is incorporated in a transfer device for transferring an object to be transferred, particularly a semiconductor manufacturing line, and processes a work such as a wafer or a glass substrate into a transfer source position (cassette carrier etc.) and this work. The present invention relates to a work transfer device that transfers a transfer target position (process chamber) for performing a process, and a method for controlling the transfer device.

【０００２】[0002]

【従来の技術】ウェハやガラス基板などのワークを搬送
する搬送装置の従来の代表的な例として、例えば図５に
示すような搬送装置が挙げられる。この搬送装置１１１
は、いわゆるダブルアーム式の搬送装置であり、基台１
０１と、基台１０１の上方に並んで配された２つのリン
ク体１０２，１０２とを備える。各リンク体１０２，１
０２は、基台１０１の内部に配設された駆動装置１０７
によって、元部１２１を中心に水平面上を回転する上腕
１０３と、上腕１０３の先端部１３１に延設され上腕１
０３の回転に従い、元部１４１を中心に水平面上を回転
する前腕１０４と、前腕１０４の先端部１４２に延設さ
れ上腕１０３、前腕１０４の回転に従い、元部１５１を
中心に水平面上を回転するハンド１０５とを備える。2. Description of the Related Art As a typical conventional example of a transfer device for transferring a work such as a wafer or a glass substrate, there is a transfer device as shown in FIG. This transport device 111
Is a so-called double-arm type transfer device, and is a base 1
01 and two link bodies 102, 102 arranged side by side above the base 101. Each link body 102, 1
Reference numeral 02 denotes a drive device 107 arranged inside the base 101.
The upper arm 103 that rotates on the horizontal plane about the base 121 and the distal end 131 of the upper arm 103 that is extended by the upper arm 1
In accordance with the rotation of 03, the forearm 104 which rotates on the horizontal plane centering on the base 141, and the upper arm 103 which extends on the tip 142 of the forearm 104 and rotates on the horizontal plane about the base 151 according to the rotation of the forearm 104. And a hand 105.

【０００３】前腕１０４およびハンド１０５は、上腕１
０３および前腕１０４の内部に配設されたプーリ（図示
せず）とタイミングベルト（図示せず）によって駆動さ
れる。各リンク体１０２は、モータ１０７が回転すると
上腕１０３、前腕１０４およびハンド１０５が各々回転
し、ハンド１０５が水平面上を直線移動できるよう構成
されている。また、ハンド１０５には、被搬送物である
板状のワークを真空吸着するための吸着孔（図示せず）
が形成されており、この吸着孔と基台１０１の内部の真
空装置（図示せず）とを接続するための配管（図示せ
ず）が上腕１０３、前腕１０４およびハンド１０５の内
部に設けられている。さらに、いずれか一方のリンク体
１０２には、ワークとの衝突を回避するための干渉防止
部材としてのコ字状部材１０６が設けられている。その
ほか、基台１０１の内部には、２つのリンク体１０２，
１０２および２つのモータ１０７，１０７を一体として
基台１０１の中央部の鉛直軸を中心として回転させるた
めの駆動装置１０８と、２つのリンク体１０２，１０
２、２つのモータ１０７，１０７および駆動装置１０８
を一体として鉛直方向に上下動させるための駆動装置
（図示せず）が配設されている。The forearm 104 and the hand 105 are the upper arm 1
03 and a forearm 104 are driven by a pulley (not shown) and a timing belt (not shown) provided inside. Each link body 102 is configured such that when the motor 107 rotates, the upper arm 103, the forearm 104, and the hand 105 respectively rotate, and the hand 105 can move linearly on a horizontal plane. Further, the hand 105 has a suction hole (not shown) for vacuum-sucking a plate-like work which is an object to be conveyed.
And a pipe (not shown) for connecting the suction hole and a vacuum device (not shown) inside the base 101 is provided inside the upper arm 103, the forearm 104 and the hand 105. There is. Further, one of the link bodies 102 is provided with a U-shaped member 106 as an interference prevention member for avoiding a collision with a work. In addition, inside the base 101, two link bodies 102,
102 and two motors 107, 107 as a unit, a drive device 108 for rotating about the vertical axis at the center of the base 101, and two link bodies 102, 10
Two and two motors 107, 107 and drive device 108
A drive device (not shown) is provided for vertically moving the components together in the vertical direction.

【０００４】この搬送装置１１１では、搬送効率を上げ
るために、二つのリンク体１０２，１０２が備えられて
いるが、このリンク体１０２がそれぞれ水平に動く構造
であるため、搬送装置１１１の最小回転半径が大きくな
ってしまうとともに、先端のハンド１０５に被搬送物が
載置されるリンク体１０２の剛性を確保するため、装置
が大型のものとなってしまう欠点があった。また、この
ように搬送装置が大型になると、この搬送装置を備える
半導体などの製造装置の大型化を招き、さらに、この製
造装置が設置されるクリーンルームの面積を大きくする
必要も生じて、製造される半導体などのコストを上げる
要因となっていた。The transport device 111 is provided with two link bodies 102, 102 in order to improve the transport efficiency. However, since the link bodies 102 are structured to move horizontally, the minimum rotation of the transport device 111. The radius becomes large and the rigidity of the link body 102 on which the object to be conveyed is placed on the hand 105 at the tip end is ensured, so that the device becomes large in size. In addition, such a large size of the transfer device causes an increase in the size of a manufacturing device such as a semiconductor including the transfer device, and further, it is necessary to increase the area of a clean room in which the manufacturing device is installed, which results in manufacturing. It was a factor to increase the cost of semiconductors.

【０００５】[0005]

【発明が解決しようとする課題】本発明の課題は、被搬
送物を効率よく搬送できるとともに、簡単な構造であり
ながら剛性の高い搬送装置、この搬送装置によりウェハ
やガラス基板などのワークを搬送元位置（カセットキャ
リアなど）とこのワークに処理を施す搬送先位置（プロ
セスチャンバ）との間で搬送するワーク搬送装置、およ
びこの搬送装置の制御方法を提供することである。SUMMARY OF THE INVENTION An object of the present invention is to convey an object to be conveyed efficiently and to convey a work such as a wafer or a glass substrate by the conveying device having a simple structure and high rigidity. It is an object of the present invention to provide a work transfer device that transfers between an original position (cassette carrier or the like) and a transfer destination position (process chamber) that processes this work, and a control method of this transfer device.

【０００６】[0006]

【課題を解決するための手段】上記の課題を解決するた
め、請求項１に記載の発明である搬送装置（半導体搬送
装置）１１（１２）は、例えば図１、図２（または図
４）に示すように、基台１３（１４）と、上腕基端部２
１ａ，２１ｂとこの上腕基端部２１ａ，２１ｂから所定
距離２ａＬ，２ｂＬだけ離れた上腕先端部２２ａ，２２
ｂとを備えて形成され、前記基台１３（１４）と前記上
腕基端部２１ａ，２１ｂとを貫通する水平軸Ｈ１を中心
として回動自在に、前記基台１３（１４）に連結された
上腕部材２ａ，２ｂと、前腕基端部３１ａ，３１ｂとこ
の前腕基端部３１ａ，３１ｂから所定距離３ａＬ，３ｂ
Ｌだけ離れた前腕先端部３２ａ，３２ｂとを備えて形成
され、前記上腕先端部２２ａ，２２ｂと前記前腕基端部
３１ａ，３１ｂとを貫通する水平軸Ｈ２を中心として回
動自在に、前記上腕部材２ａ，２ｂに連結された前腕部
材３ａ，３ｂと、手首部４１とこの手首部４１に取り付
けられ被搬送物（ウェハ）１（１ａ，１ｂ）を載置する
載置部４２，４３とを備えて構成され、前記前腕先端部
３２ａ，３２ｂと前記手首部４１とを貫通する水平軸Ｈ
３を中心として回動自在に、前記前腕部材３ａ，３ｂに
連結されたハンド部材４と、前記上腕部材２ａ，２ｂを
前記基台１に対して、前記前腕部材３ａ，３ｂを前記上
腕部材に２ａ，２ｂ対して、また前記ハンド部材４を前
記前腕部材３ａ，３ｂに対して、それぞれ回動させる回
動手段５ａ（５１ａ〜６２ａ），５ｂと、が備えられ、
前記回動手段５ａ，５ｂは、前記載置部４２，４３の上
面が常に水平となるように、前記上腕部材２ａ，２ｂ、
前腕部材３ａ，３ｂ、ハンド部材４のそれぞれを回動さ
せるように構成されていることを特徴とする。In order to solve the above problems, a transfer device (semiconductor transfer device) 11 (12) according to the invention of claim 1 is, for example, shown in FIG. 1, FIG. 2 (or FIG. 4). As shown in, the base 13 (14) and the upper arm base end 2
1a, 21b and upper arm tip portions 22a, 22 separated from the upper arm base end portions 21a, 21b by a predetermined distance 2aL, 2bL.
b, and is rotatably connected to the base 13 (14) about a horizontal axis H1 that passes through the base 13 (14) and the upper arm base ends 21a and 21b. Upper arm members 2a and 2b, forearm base end portions 31a and 31b, and predetermined distances 3aL and 3b from the forearm base end portions 31a and 31b.
The upper arm is rotatably centered on a horizontal axis H2 that is formed by including forearm tip portions 32a and 32b separated by L and that penetrates the upper arm tip portions 22a and 22b and the forearm base end portions 31a and 31b. The forearm members 3a and 3b connected to the members 2a and 2b, the wrist portion 41, and the placing portions 42 and 43 attached to the wrist portion 41 and on which the transported object (wafer) 1 (1a, 1b) is placed. A horizontal axis H configured to include the forearm tip portions 32a and 32b and the wrist portion 41.
3, the hand member 4 rotatably connected to the forearm members 3a and 3b, the upper arm members 2a and 2b with respect to the base 1, and the forearm members 3a and 3b with the upper arm member. Rotating means 5a (51a to 62a), 5b for rotating the hand member 4 with respect to 2a and 2b and with respect to the forearm members 3a and 3b, respectively,
The rotating means 5a, 5b are provided with the upper arm members 2a, 2b, so that the upper surfaces of the placing portions 42, 43 are always horizontal.
Each of the forearm members 3a and 3b and the hand member 4 is configured to rotate.

【０００７】ここで、上記回動手段は、単一の駆動源に
よって、上腕部材を前記基台に対して、前腕部材を上腕
部材に対して、またハンド部材を前腕部材に対して回動
させるように構成されていてもよい。また上記回動手段
は、上腕部材を前記基台に対して、前腕部材を上腕部材
に対して、またハンド部材を前腕部材に対して、それぞ
れ個別の駆動源で回動させ、これら各駆動源の動作のタ
イミングを制御装置により制御するように構成されてい
てもよい。The rotating means rotates the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member with respect to the forearm member by a single drive source. It may be configured as follows. Further, the rotating means rotates the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member with respect to the forearm member by individual drive sources, and these drive sources are respectively rotated. The timing of the operation may be controlled by the control device.

【０００８】請求項１に記載の発明によれば、載置部の
上面が常に水平となるように、前記上腕部材、前腕部
材、ハンド部材のそれぞれが回動されるので、この載置
部に載置された被搬送物を円滑に搬送できる。また、上
腕部材、前腕部材、ハンド部材のそれぞれが鉛直面内で
回転するので、搬送装置が動作するときに占有する水平
面積が小さくなる。したがって、搬送装置を設置するた
めに必要な空間が小さくて済む。また、搬送装置の基台
が、その設置面に対して回動可能に取り付けられている
場合に、搬送装置の回転半径を小さくすることができ
る。According to the first aspect of the present invention, each of the upper arm member, the forearm member and the hand member is rotated so that the upper surface of the mounting portion is always horizontal. The placed object can be smoothly conveyed. Further, since each of the upper arm member, the forearm member, and the hand member rotates in the vertical plane, the horizontal area occupied when the transport device operates becomes small. Therefore, the space required to install the carrier device can be small. Further, when the base of the transfer device is rotatably attached to the installation surface, the radius of rotation of the transfer device can be reduced.

【０００９】請求項２に記載の発明である搬送装置１１
（１２）は、例えば図１、図２（または図４）に示すよ
うに、基台１３（１４）と、上腕基端部２１ａ，２１ｂ
とこの上腕基端部２１ａ，２１ｂから所定距離２ａＬ，
２ｂＬだけ離れた上腕先端部２２ａ，２２ｂとを備えて
形成され、前記基台１３（１４）と前記上腕基端部２１
ａ，２１ｂとを貫通する水平軸Ｈ１を中心として回動自
在に、前記基台１３（１４）の両側に連結された一対の
上腕部材２ａ，２ｂと、前腕基端部とこの前腕基端部か
ら所定距離３ａＬ，３ｂＬだけ離れた前腕先端部とを備
えて形成され、前記各上腕部材の各上腕先端部と前記前
腕基端部とを貫通する水平軸Ｈ２を中心として回動自在
に、前記各上腕部材にそれぞれ連結された一対の前腕部
材３ａ，３ｂと、手首部４１とこの手首部４１に取り付
けられ被搬送物１（１ａ，１ｂ）を載置する載置部４
２，４３とを備えて構成され、前記各前腕先端部２１
ａ，２１ｂと前記手首部４１とを貫通する水平軸Ｈ３を
中心として回動自在に、前記両前腕部材３ａ，３ｂに連
結された一のハンド部材４と、前記各上腕部材２ａ，２
ｂを前記基台１に対して、前記各前腕部材３ａ，３ｂを
前記各上腕部材２ａ，２ｂに対して、また前記一のハン
ド部材４を前記両前腕部材３ａ，３ｂに対して、それぞ
れ回動させる回動手段５ａ（５１ａ〜６２ｂ），５ｂ
と、が備えられ、前記回動手段５ａ，５ｂは、前記載置
部４２，４３の上面が常に水平となるように、前記上腕
部材２ａ，２ｂ、前腕部材３ａ，３ｂ、ハンド部材４の
それぞれを回動させることを特徴とする。A transport device 11 according to a second aspect of the invention.
(12) is, for example, as shown in FIG. 1 and FIG. 2 (or FIG. 4), a base 13 (14) and upper arm base end portions 21a and 21b.
And a predetermined distance 2aL from the upper arm base end portions 21a, 21b,
The upper arm distal end portions 22a and 22b are separated from each other by 2 bL, and are formed by the base 13 (14) and the upper arm proximal end portion 21.
a pair of upper arm members 2a and 2b connected to both sides of the base 13 (14) so as to be rotatable about a horizontal axis H1 penetrating a and 21b, a forearm base end portion and this forearm base end portion. Is formed with a forearm tip portion that is separated from the forearm by a predetermined distance 3aL, 3bL, and is rotatably centered on a horizontal axis H2 that passes through the forearm tip portion and the forearm base end portion of each of the upper arm members. A pair of forearm members 3a and 3b connected to the respective upper arm members, a wrist portion 41, and a mounting portion 4 mounted on the wrist portion 41 and on which the transported object 1 (1a, 1b) is mounted.
2, 43, and each of the forearm tip portions 21
a hand member 4 connected to the both forearm members 3a and 3b so as to be rotatable about a horizontal axis H3 penetrating the a and 21b and the wrist portion 41, and the upper arm members 2a and 2a.
b to the base 1, the forearm members 3a and 3b to the upper arm members 2a and 2b, and the one hand member 4 to the forearm members 3a and 3b, respectively. Rotating means 5a (51a to 62b), 5b for moving
The rotating means 5a, 5b are respectively provided with the upper arm members 2a, 2b, the forearm members 3a, 3b, and the hand member 4 so that the upper surfaces of the placing portions 42, 43 are always horizontal. Is characterized by rotating.

【００１０】請求項２に記載の発明によれば、上腕部
材、前腕部材、ハンド部材のそれぞれが鉛直面内で回転
するので、搬送装置が動作するときに占有する水平面積
が小さくなる。したがって、搬送装置を設置するために
必要な空間が小さくて済む。また、一のハンド部材が前
腕部材の双方に連結されているので、上腕部材、前腕部
材、ハンド部材から構成されるアーム機構の剛性が高ま
る。これにより、上腕部材や前腕部材の長さを大きくし
て、被搬送物の搬送距離を長くすることができる。ま
た、アーム機構の剛性が高められると、アーム機構を高
速に動作させたり、また停止位置の精度を高めたりする
ことができる。According to the second aspect of the present invention, each of the upper arm member, the forearm member, and the hand member rotates within the vertical plane, so that the horizontal area occupied when the transport device operates becomes small. Therefore, the space required to install the carrier device can be small. Moreover, since one hand member is connected to both the forearm members, the rigidity of the arm mechanism including the upper arm member, the forearm member, and the hand member is increased. As a result, the length of the upper arm member or the forearm member can be increased, and the transport distance of the transported object can be increased. Further, if the rigidity of the arm mechanism is increased, the arm mechanism can be operated at high speed and the accuracy of the stop position can be improved.

【００１１】請求項３に記載の発明は、例えば図４に示
すように、請求項１または２に記載の搬送装置１２にお
いて、前記上腕部材２ａ，２ｂ、前腕部材３ａ，３ｂ、
ハンド部材４を回動させる回動手段５ａ（５１ａ〜６２
ａ），５ｂが、単一の駆動源７により動作するように構
成されていることを特徴とする。According to a third aspect of the present invention, for example, as shown in FIG. 4, in the transport device 12 according to the first or second aspect, the upper arm members 2a and 2b, the forearm members 3a and 3b,
Rotating means 5a (51a-62) for rotating the hand member 4.
a) and 5b are configured to be operated by a single drive source 7.

【００１２】請求項３に記載の発明によれば、請求項１
または２に記載の発明と同様の効果が得られるととも
に、上腕部材、前腕部材、ハンド部材を回動させる回動
手段が、単一の駆動源により動作するように構成されて
いるので、搬送装置の構造を簡単にできる。According to the invention of claim 3, claim 1
Alternatively, the same effect as that of the invention described in 2 is obtained, and the rotating means for rotating the upper arm member, the forearm member, and the hand member are configured to be operated by a single drive source. The structure of can be simplified.

【００１３】請求項４に記載の発明は、請求項１〜３の
いずれかに記載の搬送装置１１（１２）において、前記
回動手段５ａ，５ｂは、前記上腕部材２ａ，２ｂの前記
基台１に対する回動角と、前記前腕部材３ａ，３ｂの前
記上腕部材２ａ，２ｂに対する回動角と、前記ハンド部
材４の前記前腕部材３ａ，３ｂに対する回動角との比が
１：（−２）：１となるように、前記上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそれぞれを回
動させることを特徴とする。According to a fourth aspect of the present invention, in the transfer device 11 (12) according to any of the first to third aspects, the rotating means 5a and 5b are the bases of the upper arm members 2a and 2b. The ratio of the rotation angle with respect to 1, the rotation angle of the forearm members 3a and 3b with respect to the upper arm members 2a and 2b, and the rotation angle of the hand member 4 with respect to the forearm members 3a and 3b is 1: (-2. ): 1 so that the upper arm members 2a, 2
b, the forearm members 3a and 3b, and the hand member 4 are each rotated.

【００１４】請求項４に記載の発明によれば、請求項１
〜３のいずれかに記載の発明と同様の効果が得られると
ともに、回動手段が、上腕部材の基台に対する回動角
と、前腕部材の上腕部材に対する回動角と、ハンド部材
の前腕部材に対する回動角との比が１：（−２）：１と
なるように、上腕部材、前腕部材、ハンド部材のそれぞ
れを回動させるので、これら上腕部材、前腕部材、ハン
ド部材が回動しても、ハンド部材の鉛直面内における角
度が一定に保たれる。したがって、このハンド部材に取
り付けられた載置部の角度も一定に保たれ、この載置部
に載置された被搬送物を円滑に搬送できる。According to the invention of claim 4, claim 1
The same effect as that of the invention described in any one of 1 to 3 is obtained, and the rotating means includes a rotating angle of the upper arm member with respect to the base, a rotating angle of the forearm member with respect to the upper arm member, and a forearm member of the hand member. Since the upper arm member, the forearm member, and the hand member are rotated so that the ratio of the rotation angle with respect to is 1: (-2): 1, the upper arm member, the forearm member, and the hand member rotate. However, the angle of the hand member in the vertical plane is kept constant. Therefore, the angle of the placing portion attached to the hand member is also kept constant, and the object to be conveyed placed on the placing portion can be smoothly conveyed.

【００１５】請求項５に記載の発明は、例えば図２（ま
たは図４）に示すように、請求項４に記載の搬送装置１
１（１２）において、前記上腕部材２ａ，２ｂの上腕基
端部２１ａ，２１ｂと上腕先端部２２ａ，２２ｂとの間
の距離２ａＬ，２ｂＬと、前記前腕部材３ａ，３ｂの前
腕基端部３１ａ，３１ｂと前腕先端部３２ａ，３２ｂと
の間の距離３ａＬ，３ｂＬとが、互いに等しく設定され
ていることを特徴とする。The invention described in claim 5 is, for example, as shown in FIG. 2 (or FIG. 4), the conveying device 1 according to claim 4
1 (12), the distances 2aL, 2bL between the upper arm base end portions 21a, 21b and the upper arm tip end portions 22a, 22b of the upper arm members 2a, 2b, and the forearm base end portions 31a, 31a of the forearm members 3a, 3b. It is characterized in that the distances 3aL and 3bL between 31b and the forearm tip portions 32a and 32b are set to be equal to each other.

【００１６】請求項５に記載の発明によれば、請求項４
に記載の発明と同様の効果が得られるとともに、上腕部
材の上腕基端部と上腕先端部との間の距離と、前腕部材
の前腕基端部と前腕先端部との間の距離とが、互いに等
しく設定されているので、回動手段によって、上腕部
材、前腕部材、ハンド部材のそれぞれが、上腕部材の基
台に対する回動角と、前腕部材の上腕部材に対する回動
角と、ハンド部材の前腕部材に対する回動角との比が
１：（−２）：１となるように回動されても、ハンド部
材の高さが一定に保たれる。したがって、このハンド部
材に取り付けられた載置部の高さも一定に保たれ、この
載置部に載置された被搬送物を円滑に搬送できる。According to the invention of claim 5, claim 4
While obtaining the same effect as the invention described in, the distance between the upper arm base end portion and the upper arm tip portion of the upper arm member, the distance between the forearm base end portion and the forearm tip portion of the forearm member, Since they are set to be equal to each other, the rotating means causes the upper arm member, the forearm member, and the hand member to rotate with respect to the base of the upper arm member, the rotation angle with respect to the upper arm member of the forearm member, and the hand member. Even if the hand member is rotated so that the ratio of the rotation angle to the forearm member is 1: (-2): 1, the height of the hand member is kept constant. Therefore, the height of the placing portion attached to the hand member is also kept constant, and the object to be conveyed placed on the placing portion can be smoothly conveyed.

【００１７】請求項６に記載の発明は、例えば図１、図
２（または図４）に示すように、請求項１〜５のいずれ
かに記載の搬送装置１１（１２）において、水平方向に
長尺に形成され、この長さ方向の中央と前記ハンド部材
４とを貫通する鉛直軸Ｖ１を中心として回動自在に前記
ハンド部材４に取り付けられた載置部本体４４の、長さ
方向の両端部に、それぞれ前記載置部４２，４３が設け
られ、前記載置部本体４４を前記ハンド部材４に対して
回動させる載置部回動手段（モータ）４５が備えられて
いることを特徴とする。The invention described in claim 6 is, for example, as shown in FIG. 1 and FIG. 2 (or FIG. 4), in the conveying device 11 (12) according to any one of claims 1 to 5, in the horizontal direction. The mounting portion main body 44, which is formed to be long and is rotatably attached to the hand member 4 about the vertical axis V1 passing through the center in the length direction and the hand member 4, in the length direction. The placement parts 42 and 43 are respectively provided at both ends, and a placement part rotation means (motor) 45 for rotating the placement part body 44 with respect to the hand member 4 is provided. Characterize.

【００１８】請求項６に記載の発明によれば、請求項１
〜５のいずれかに記載の発明と同様の効果が得られると
ともに、水平方向に長尺に形成され、この長さ方向の中
央とハンド部材とを貫通する鉛直軸を中心として回動自
在にハンド部材に取り付けられた載置部本体の、長さ方
向の両端部に、それぞれ載置部が設けられ、載置部本体
をハンド部材に対して回動させる載置部回動手段が備え
られているので、載置部本体の両端部に設けられた各載
置部にそれぞれ被搬送物を載置し、この載置部本体をハ
ンド部材に対して回動させることで、被搬送物の搬送を
効率的に行うことができる。According to the invention of claim 6, claim 1
The same effect as that of the invention described in any one of 5 to 5 is obtained, and the hand is rotatably centered on a vertical axis that is formed to be long in the horizontal direction and that penetrates the center of the length direction and the hand member. Mounting portions are provided at both ends in the length direction of the mounting portion main body attached to the member, and mounting portion rotating means for rotating the mounting portion main body with respect to the hand member are provided. Therefore, the transported object is placed on each of the mounting portions provided on both ends of the mounting portion main body, and the mounting portion main body is rotated with respect to the hand member to convey the transported object. Can be done efficiently.

【００１９】請求項７に記載の発明であるワーク搬送装
置（半導体搬送装置）は、例えば図３に示すように、請
求項１〜６のいずれかに記載の搬送装置１１（１２）に
より、搬送元位置（カセットキャリア）Ｐ１にある前記
被搬送物である平板状のワーク（ウェハ）１（１ａ，１
ｂ）を、このワークに所定の処理を施すための搬送先位
置（プロセスチャンバ）Ｐ２に搬送し、また、前記搬送
先位置Ｐ２で前記処理が施されたワークを、前記搬送元
位置Ｐ１に搬送することを特徴とする。According to a seventh aspect of the present invention, there is provided a work transfer device (semiconductor transfer device) which transfers a transfer device 11 (12) according to any one of the first to sixth embodiments, as shown in FIG. A flat plate-like work (wafer) 1 (1a, 1) that is the transported object at the original position (cassette carrier) P1.
b) is transferred to a transfer destination position (process chamber) P2 for performing a predetermined process on this work, and the work processed at the transfer destination position P2 is transferred to the transfer source position P1. It is characterized by doing.

【００２０】請求項７に記載の発明によれば、請求項１
〜６のいずれかに記載の発明と同様の効果が得られる。
特に、請求項６に記載の搬送装置によって基板を搬送す
る場合には、一の基板に処理が施された後、この基板を
搬送先位置から取り出し、次に処理を施そうとする基板
をこの搬送先位置にセットするまでの所要時間を大幅に
短縮することができる。According to the invention of claim 7, claim 1
The same effects as those of the invention described in any one of to 6 can be obtained.
Particularly, when a substrate is transferred by the transfer device according to claim 6, after one substrate is processed, this substrate is taken out from the transfer destination position, and the substrate to be processed next is transferred to this substrate. It is possible to significantly reduce the time required to set the transfer destination position.

【００２１】請求項８に記載の発明は、例えば図１、図
２（または図４）に示すように、基台１３（１４）と、
上腕基端部２１ａ，２１ｂとこの上腕基端部２１ａ，２
１ｂから所定距離２ａＬ，２ｂＬだけ離れた上腕先端部
２２ａ，２２ｂとを備えて形成され、前記基台１３（１
４）と前記上腕基端部２１ａ，２１ｂとを貫通する水平
軸Ｈ１を中心として回動自在に、前記基台１３（１４）
に連結された上腕部材２ａ，２ｂと、前腕基端部３１
ａ，３１ｂとこの前腕基端部３１ａ，３１ｂから所定距
離だけ離れた前腕先端部３２ａ，３２ｂとを備えて形成
され、前記上腕先端部２２ａ，２２ｂと前記前腕基端部
３１ａ，３１ｂとを貫通する水平軸を中心として回動自
在に、前記上腕部材２ａ，２ｂに連結された前腕部材３
ａ，３ｂと、手首部４１とこの手首部４１に取り付けら
れ被搬送物（ワーク）１（１ａ，１ｂ）を載置する載置
部４２，４３とを備えて構成され、前記前腕先端部３２
ａ，３２ｂと前記手首部４１とを貫通する水平軸を中心
として回動自在に、前記前腕部材３ａ，３ｂに連結され
たハンド部材４と、前記上腕部材２ａ，２ｂを前記基台
１に対して、前記前腕部材３ａ，３ｂを前記上腕部材に
２ａ，２ｂ対して、また前記ハンド部材４を前記前腕部
材３ａ，３ｂに対して、それぞれ回動させる回動手段５
ａ，５ｂと、が備えられた搬送装置１１（１２）の制御
方法であって、前記回動手段５ａ，５ｂで、前記載置部
４２，４３の上面が常に水平となるように、前記上腕部
材２ａ，２ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそ
れぞれを回動させることを特徴とする。The invention described in claim 8 is, for example, as shown in FIGS. 1 and 2 (or FIG. 4), a base 13 (14),
Upper arm base end portions 21a and 21b and the upper arm base end portions 21a and 2b
1b and upper arm tip portions 22a and 22b which are separated from each other by a predetermined distance 2aL and 2bL.
4) and the base 13 (14) so as to be rotatable about a horizontal axis H1 that passes through the upper arm base end portions 21a and 21b.
Upper arm members 2a and 2b connected to the forearm base end portion 31
a, 31b and forearm tip portions 32a, 32b separated from the forearm base end portions 31a, 31b by a predetermined distance, and formed through the upper arm tip portions 22a, 22b and the forearm base end portions 31a, 31b. Forearm member 3 connected to the upper arm members 2a and 2b so as to be rotatable about a horizontal axis.
a, 3b, a wrist portion 41, and mounting portions 42, 43 mounted on the wrist portion 41 and on which the transported object (work) 1 (1a, 1b) is mounted, the forearm tip portion 32
The hand member 4 connected to the forearm members 3a and 3b and the upper arm members 2a and 2b so as to be rotatable about a horizontal axis passing through the a and 32b and the wrist portion 41 with respect to the base 1. A rotating means 5 for rotating the forearm members 3a, 3b against the upper arm members 2a, 2b and for rotating the hand member 4 with respect to the forearm members 3a, 3b.
a and 5b are provided, and the upper arm is configured so that the upper surfaces of the placing portions 42 and 43 are always horizontal by the rotating means 5a and 5b. The members 2a and 2b, the forearm members 3a and 3b, and the hand member 4 are each rotated.

【００２２】ここで、上記回動手段は、単一の駆動源に
よって、上腕部材を前記基台に対して、前腕部材を上腕
部材に対して、またハンド部材を前腕部材に対して回動
させるように構成されていてもよい。また上記回動手段
は、上腕部材を前記基台に対して、前腕部材を上腕部材
に対して、またハンド部材を前腕部材に対して、それぞ
れ個別の駆動源で回動させ、これら各駆動源の動作のタ
イミングを制御装置により制御するように構成されてい
てもよい。The rotating means rotates the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member with respect to the forearm member by a single drive source. It may be configured as follows. Further, the rotating means rotates the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member with respect to the forearm member by individual drive sources, and these drive sources are respectively rotated. The timing of the operation may be controlled by the control device.

【００２３】請求項８に記載の発明によれば、請求項１
に記載の発明と同様の効果が得られる。According to the invention of claim 8, claim 1
The same effect as the invention described in (1) can be obtained.

【００２４】[0024]

【発明の実施の形態】以下、図面を参照して、本発明の
搬送装置、ワーク搬送装置、および搬送装置の制御方法
の実施の形態を詳細に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a transfer device, a work transfer device, and a control method of the transfer device of the present invention will be described in detail below with reference to the drawings.

【００２５】〔第１の実施の形態〕図１、図２に、本発
明の搬送装置、ワーク搬送装置、および搬送装置の制御
方法の一例としての、半導体搬送装置１１の斜視図、側
面図をそれぞれ示す。この半導体搬送装置１１は、被搬
送物（ワーク）であるウェハを、図３に示すカセットキ
ャリア（搬送元位置）Ｐ１とプロセスチャンバ（搬送先
位置）Ｐ２との相互間で搬送するために用いられるもの
である。[First Embodiment] FIGS. 1 and 2 are a perspective view and a side view of a semiconductor transfer device 11 as an example of a transfer device, a work transfer device, and a control method of the transfer device of the present invention. Shown respectively. The semiconductor transfer device 11 is used to transfer a wafer, which is an object to be transferred (work), between a cassette carrier (transfer source position) P1 and a process chamber (transfer destination position) P2 shown in FIG. It is a thing.

【００２６】本半導体搬送装置１１は、図１、図２に示
すように、基台１３と、この基台の両側に取り付けられ
た一対の上腕部材２ａ，２ｂと、この上腕部材２ａ，２
ｂの外側面にそれぞれ連結された前腕部材３ａ，３ｂ
と、この一対の前腕部材３ａ，３ｂに連結された一のハ
ンド部材４と、上記上腕部材２ａ，２ｂ、前腕部材３
ａ，３ｂ、ハンド部材４を動作させる回動手段５ａ（５
１ａ〜６２ａ），５ｂと、を備えて、概略構成されてい
る。As shown in FIGS. 1 and 2, the semiconductor carrier device 11 includes a base 13, a pair of upper arm members 2a and 2b mounted on both sides of the base, and the upper arm members 2a and 2b.
b, forearm members 3a and 3b respectively connected to the outer side surface
A hand member 4 connected to the pair of forearm members 3a and 3b, the upper arm members 2a and 2b, and the forearm member 3
a, 3b, a rotating means 5a (5 for operating the hand member 4)
1a to 62a) and 5b, and is roughly configured.

【００２７】上腕部材２ａ，２ｂはそれぞれ、上腕基端
部２１ａ，２１ｂとこの上腕基端部２１ａ，２１ｂから
所定距離２ａＬ，２ｂＬだけ離れた上腕先端部２２ａ，
２２ｂとを備えて形成され、基台１３と上腕基端部２１
ａ，２１ｂとを貫通する水平軸Ｈ１を中心として回動自
在に、前記基台１３に連結されている。The upper arm members 2a and 2b respectively include upper arm base end portions 21a and 21b and upper arm tip portions 22a and 22b which are separated from the upper arm base end portions 21a and 21b by predetermined distances 2aL and 2bL, respectively.
22b, the base 13 and the upper arm base end portion 21 are formed.
It is connected to the base 13 so as to be rotatable about a horizontal axis H1 passing through a and 21b.

【００２８】また、前腕部材３ａ，３ｂはそれぞれ、前
腕基端部３１ａ，３１ｂとこの前腕基端部３１ａ，３１
ｂから所定距離３ａＬ，３ｂＬだけ離れた前腕先端部３
２ａ，３２ｂとを備えて形成され、上腕先端部２２ａ，
２２ｂと前腕基端部３１ａ，３１ｂとを貫通する水平軸
Ｈ２を中心として回動自在に、上腕部材２ａ，２ｂに連
結されている。Further, the forearm members 3a and 3b respectively include the forearm base end portions 31a and 31b and the forearm base end portions 31a and 31b.
Forearm tip 3 separated from b by a predetermined distance 3aL, 3bL
2a, 32b, and the upper arm tip 22a,
It is connected to upper arm members 2a and 2b so as to be rotatable about a horizontal axis H2 that penetrates 22b and the forearm base ends 31a and 31b.

【００２９】そして、ハンド部材４は、手首部４１と、
水平方向に長尺に形成され、この長さ方向の中央とハン
ド部材４とを貫通する鉛直軸Ｖ１を中心として回動自在
にハンド部材４に取り付けられた載置部本体４４と、載
置部本体４４を前記手首部４１に対して回動させるモー
タ（載置部回動手段）４５を備えて構成され、前腕先端
部３２ａ，３２ｂと前記手首部４１とを貫通する水平軸
Ｈ３を中心として回動自在に、前腕部材３ａ，３ｂに連
結されている。載置部本体４４の長さ方向両端部の上面
は、ウェハ１（１ａ，１ｂ）を載置する載置部４２，４
３になっている。The hand member 4 has a wrist portion 41,
A placing portion main body 44 that is formed to be long in the horizontal direction and is rotatably attached to the hand member 4 about a vertical axis V1 that passes through the center in the length direction and the hand member 4, and a placing portion. A horizontal axis H3 that is configured to include a motor (placement portion rotating means) 45 that rotates the main body 44 with respect to the wrist portion 41, and that penetrates the forearm tip portions 32a and 32b and the wrist portion 41 as a center. It is rotatably connected to the forearm members 3a and 3b. The upper surfaces of both ends in the length direction of the mounting portion main body 44 have mounting portions 42, 4 on which the wafer 1 (1a, 1b) is mounted.
It is 3.

【００３０】回動手段５ａは、図２に示すように、プー
リ５１ａ，５３ａ，５５ａ，５７ａ，５９ａ，６１ａ、
駆動伝達ベルト５２ａ，５６ａ，６０ａ、上腕駆動軸５
４ａ、前腕駆動軸５８ａ、ハンド部材駆動軸６２ａから
構成されている。プーリ５５ａの軸心が位置する上腕基
端部２１ａとプーリ５７ａの軸心が位置する上腕先端部
２２ａとの間の距離２ａＬと、プーリ５９ａの軸心が位
置する前腕基端部３１ａとプーリ６１ａの軸心が位置す
る前腕先端部３２ａとの間の距離３ａＬとは、互いに等
しく設定されている。また、プーリ５５ａ，６１ａの径
は、プーリ５７ａ，５９ａの径の倍に設定されている。As shown in FIG. 2, the rotating means 5a includes pulleys 51a, 53a, 55a, 57a, 59a, 61a,
Drive transmission belts 52a, 56a, 60a, upper arm drive shaft 5
4a, a forearm drive shaft 58a, and a hand member drive shaft 62a. The distance 2aL between the upper arm base end 21a where the shaft center of the pulley 55a is located and the upper arm tip end 22a where the shaft center of the pulley 57a is located, and the forearm base end 31a and the pulley 61a where the shaft center of the pulley 59a is located. The distance 3aL from the forearm tip portion 32a where the axis of is located is set to be equal to each other. The diameters of the pulleys 55a and 61a are set to be twice the diameters of the pulleys 57a and 59a.

【００３１】駆動源となるモータ６ａの軸に取り付けら
れたプーリ５１ａから、駆動伝達ベルト５２ａを通じ
て、プーリ５３ａに回転が伝達される。そして、このプ
ーリ５３ａに固定されたに上腕駆動軸５４ａが回転し、
この上腕駆動軸５４ａに固定された上腕部材２ａが基台
１３に対して回動する。Rotation is transmitted from the pulley 51a attached to the shaft of the motor 6a serving as a drive source to the pulley 53a through the drive transmission belt 52a. Then, the upper arm drive shaft 54a fixed to the pulley 53a rotates,
The upper arm member 2a fixed to the upper arm drive shaft 54a rotates with respect to the base 13.

【００３２】このとき、上腕部材２ａの内部に収められ
たプーリ５５ａは、基台１３に固定されていて回転しな
い。したがって、上腕２ａが回動すると、プーリ５５ａ
とプーリ５７ａとに巻き付く駆動伝達ベルト５６ａによ
り、プーリ５５ａの半分の径に形成されたプーリ５７ａ
が、上腕部材２ａの角度に対して相対的に、上腕部材２
ａの回動角の２倍だけ、上腕部材２ａの回動方向と逆方
向に回転する。そして、このプーリ５７ａに固定された
前腕駆動軸５８ａが回転し、この前腕駆動軸５８ａに固
定された前腕部材３ａが、上腕部材２ａに対して、上腕
部材２ａの回動角の２倍だけ、上腕部材２ａの回動方向
と逆方向に回動する。At this time, the pulley 55a housed inside the upper arm member 2a is fixed to the base 13 and does not rotate. Therefore, when the upper arm 2a rotates, the pulley 55a
And a pulley 57a formed around the pulley 57a by a drive transmission belt 56a wound around the pulley 57a.
However, relative to the angle of the upper arm member 2a, the upper arm member 2
The upper arm member 2a rotates in a direction opposite to the rotation direction of the upper arm member 2a by twice the rotation angle of a. Then, the forearm drive shaft 58a fixed to this pulley 57a rotates, and the forearm member 3a fixed to this forearm drive shaft 58a is twice the rotation angle of the upper arm member 2a with respect to the upper arm member 2a. The upper arm member 2a rotates in the direction opposite to the rotating direction.

【００３３】また、前腕部材３ａの内部に収められたプ
ーリ５９ａは、上腕部材２ａに固定されていて、上腕部
材２ａに対して相対的に回転しない。したがって、前腕
部材３ａが上記のとおり回動すると、プーリ５９ａとプ
ーリ６１ａとに巻き付く駆動伝達ベルト６０ａにより、
プーリ５９ａの倍の径に形成されたプーリ６１ａが、前
腕部材３ａの角度に対して相対的に、前腕部材３ａの回
動角の半分だけ、前腕部材３ａの回動方向と逆方向に回
転する。そして、このプーリ６１ａに固定されたハンド
部材駆動軸６２ａが回転し、このハンド部材駆動軸６２
ａに固定されたハンド部材４が、前腕部材３ａに対し
て、前腕部材３ａの回動角の半分だけ、前腕部材３ａの
回動方向と逆方向に回動する。すなわち、ハンド部材４
が、前腕部材３ａに対して、上腕部材２ａの回動角と同
じだけ、上腕部材２ａの回動方向と同方向に回動する。Further, the pulley 59a housed inside the forearm member 3a is fixed to the upper arm member 2a and does not rotate relative to the upper arm member 2a. Therefore, when the forearm member 3a rotates as described above, the drive transmission belt 60a wrapped around the pulley 59a and the pulley 61a causes
A pulley 61a having a diameter twice that of the pulley 59a rotates in a direction opposite to the rotation direction of the forearm member 3a by a half of the rotation angle of the forearm member 3a relative to the angle of the forearm member 3a. . Then, the hand member drive shaft 62a fixed to this pulley 61a rotates, and the hand member drive shaft 62a rotates.
The hand member 4 fixed to a rotates in a direction opposite to the rotation direction of the forearm member 3a with respect to the forearm member 3a by a half of the rotation angle of the forearm member 3a. That is, the hand member 4
However, it rotates in the same direction as the rotation direction of the upper arm member 2a with respect to the forearm member 3a by the same angle as the rotation angle of the upper arm member 2a.

【００３４】回動手段５ｂも、回動手段５ａと同様に構
成され、また回動手段５ｂの駆動源となるモータ６ｂ
は、回動手段５ａの駆動源となるモータ６ａと同方向に
同速度で駆動するようになっている。したがって、上腕
部材２ｂ、前腕部材３ｂはそれぞれ、基台１３を挟んで
上腕部材２ａ、前腕部材３ａと対称に動作する。The rotating means 5b is also constructed in the same manner as the rotating means 5a, and a motor 6b serving as a drive source for the rotating means 5b.
Is driven in the same direction and at the same speed as the motor 6a serving as the drive source of the rotating means 5a. Therefore, the upper arm member 2b and the forearm member 3b operate symmetrically with respect to the upper arm member 2a and the forearm member 3a with the base 13 interposed therebetween.

【００３５】そして、このように構成された回動手段５
ａ，５ｂが動作することにより、ハンド部材４は、一定
の水平面内で上記水平軸Ｈ１〜Ｈ３と直交する方向に前
後進する。Then, the rotating means 5 configured as described above.
The movement of a and 5b causes the hand member 4 to move back and forth in a direction orthogonal to the horizontal axes H1 to H3 within a certain horizontal plane.

【００３６】また、図２において、モータ８が回転する
ことにより、上腕部材２ａ，２ｂ、前腕部材３ａ，３
ｂ、ハンド部材４の全体が、基台１３の中心軸Ｖ２の周
りに回転運動を行うようになっている。また、モータ９
の回転が、垂直移動ボールスクリュー９１により直動運
動に変換され、上腕部材２ａ，２ｂ、前腕部材３ａ，３
ｂ、ハンド部材４の全体が鉛直方向に上下動するように
なっている。Further, in FIG. 2, the rotation of the motor 8 causes the upper arm members 2a and 2b and the forearm members 3a and 3 to be rotated.
b, the entire hand member 4 is adapted to perform a rotary motion around the central axis V2 of the base 13. In addition, the motor 9
Is converted into a linear motion by the vertically moving ball screw 91, and the upper arm members 2a and 2b and the forearm members 3a and 3 are rotated.
b. The entire hand member 4 is vertically movable.

【００３７】本半導体移動装置１１によるウェハの搬送
手順について、図３を参照して説明する。図３におい
て、未処理のウェハ１ａを斜線の円形で、処理済のウェ
ハ１ｂを白抜きの円形で示している。プロセスチャンバ
Ｐ２内にあるウェハ１ｂに処理が行われている間に、図
３（ａ）に示すように、カセットキャリアＰ１から載置
部４２に未処理ウェハ１ａをピックする。このとき、載
置部４２をカセットキャリアＰ１内の未処理ウェハ１ａ
の下に挿入し、モータ９を回転させて上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４の全体をわずか
に上昇させることにより、ウェハ１ａを載置部４２に取
り上げる。プロセスチャンバＰ２内にあるウェハ１ｂの
処理が終了すると、図３（ｂ）に示すように、回動手段
５ａ，５ｂを動作させて載置部４３をプロセスチャンバ
Ｐ２側に移動させて、図３（ｃ）に示すように、処理済
のウェハ１ｂの下に挿入する。そして、上記と同様に、
モータ９を回転させて上腕部材２ａ，２ｂ、前腕部材３
ａ，３ｂ、ハンド部材４の全体をわずかに上昇させるこ
とにより、ウェハ１ｂを載置部４３に取り上げる。A wafer transfer procedure by the semiconductor moving apparatus 11 will be described with reference to FIG. In FIG. 3, the unprocessed wafer 1a is shown by a shaded circle, and the processed wafer 1b is shown by a white circle. While the wafer 1b in the process chamber P2 is being processed, as shown in FIG. 3A, the unprocessed wafer 1a is picked from the cassette carrier P1 to the mounting portion 42. At this time, the mounting portion 42 is moved to the unprocessed wafer 1a in the cassette carrier P1.
The upper arm member 2a, 2 by rotating the motor 9
The wafer 1a is picked up on the mounting portion 42 by slightly raising all of the b, the forearm members 3a and 3b, and the hand member 4. When the processing of the wafer 1b in the process chamber P2 is completed, as shown in FIG. 3B, the rotating means 5a and 5b are operated to move the mounting portion 43 to the process chamber P2 side, and then, as shown in FIG. As shown in (c), the wafer is inserted under the processed wafer 1b. And like above,
By rotating the motor 9, the upper arm members 2a and 2b, the forearm member 3
The wafer 1b is picked up on the mounting portion 43 by slightly raising the entire a, 3b and hand member 4.

【００３８】続いて、回動手段５ａ，５ｂを動作させて
処理済のウェハ１ｂをプロセスチャンバＰ２から引き抜
き、図３（ｄ）、図３（ｅ）に示すように、ハンド部材
４を基台１３の直上に位置させた状態で、モータ４５に
より載置部本体４５を水平面内で旋回させ、未処理のウ
ェハ１ａと処理済のウェハ１ｂとの位置を入れ替える。
載置部本体４５が１８０度旋回されると、図３（ｆ）に
示すように、回動手段５ａ，５ｂを動作させて、載置部
４２に載置された未処理のウェハ１ａをプロセスチャン
バＰ２側に移動させる。そして、図３（ｇ）に示すよう
に、未処理のウェハ１ａがプロセスチャンバＰ２へ完全
に挿入された状態で、モータ９を回転させて上腕部材２
ａ，２ｂ、前腕部材３ａ，３ｂ、ハンド部材４の全体を
わずかに下降させることにより、ウェハ１ａをプロセス
チャンバＰ２内に載置する。Subsequently, the rotating means 5a and 5b are operated to pull out the processed wafer 1b from the process chamber P2, and as shown in FIGS. 3 (d) and 3 (e), the hand member 4 is used as a base. In the state of being positioned directly above 13, the mounting portion main body 45 is swung in the horizontal plane by the motor 45, and the positions of the unprocessed wafer 1a and the processed wafer 1b are exchanged.
When the mounting portion main body 45 is rotated 180 degrees, as shown in FIG. 3F, the rotating means 5a and 5b are operated to process the unprocessed wafer 1a mounted on the mounting portion 42. It is moved to the chamber P2 side. Then, as shown in FIG. 3G, with the unprocessed wafer 1a completely inserted into the process chamber P2, the motor 9 is rotated to rotate the upper arm member 2
The wafer 1a is placed in the process chamber P2 by slightly lowering all of the a, 2b, the forearm members 3a, 3b, and the hand member 4.

【００３９】そして、図３（ｈ）に示すように、回動手
段５ａ，５ｂを動作させて、載置部４３に載置された処
理済のウェハ１ｂをカセットキャリアＰ１内に挿入し、
上記と同様に、モータ９を回転させて上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４の全体をわずか
に下降させることにより、ウェハ１ｂをカセットキャリ
アＰ１内に載置する。Then, as shown in FIG. 3 (h), the rotating means 5a and 5b are operated to insert the processed wafer 1b placed on the placing portion 43 into the cassette carrier P1.
Similarly to the above, the motor 9 is rotated to rotate the upper arm members 2a, 2
The wafer 1b is placed in the cassette carrier P1 by slightly lowering all of the b, the forearm members 3a and 3b, and the hand member 4.

【００４０】〔第２の実施の形態〕図４に、本発明の搬
送装置、ワーク搬送装置、および搬送装置の制御方法の
他の一例としての、半導体搬送装置１２の側面図をそれ
ぞれ示す。本実施の形態の半導体搬送装置１２が、第１
の実施の形態と異なる点は、上腕部材２ａ、前腕部材３
ａ、ハンド部材４ａを回動させる回動手段５ａと、上腕
部材２ｂ、前腕部材３ｂ、ハンド部材４ｂを回動させる
回動手段５ｂとが共通の駆動源（モータ）７により駆動
されるようになっている点である。半導体搬送装置１２
のその他の箇所については、第１の実施の形態に記載の
半導体搬送装置１１と同様に構成されているので、同一
符号を付してその説明を省略する。[Second Embodiment] FIG. 4 is a side view of a semiconductor transfer device 12 as another example of the transfer device, the work transfer device, and the control method of the transfer device of the present invention. The semiconductor carrier device 12 of the present embodiment is the first
Is different from the above embodiment in that the upper arm member 2a and the forearm member 3
a, a rotating means 5a for rotating the hand member 4a, and a rotating means 5b for rotating the upper arm member 2b, the forearm member 3b, and the hand member 4b are driven by a common drive source (motor) 7. That is the point. Semiconductor carrier 12
Since the other parts of the configuration are similar to those of the semiconductor transfer device 11 described in the first embodiment, the same reference numerals are given and the description thereof is omitted.

【００４１】以上、第１の実施の形態または第２の実施
の形態に記載の半導体搬送装置１１，１２および半導体
搬送装置１１の制御方法によれば、載置部４２，４３の
上面が常に水平となるように、前記上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそれぞれが回
動されるので、この載置部４２，４３に載置されたウェ
ハ１（１ａ，１ｂ）を円滑に搬送できる。また、上腕部
材２ａ，２ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそ
れぞれが鉛直面内で回転するので、半導体搬送装置１
１，１２が動作するときに占有する水平面積が小さくな
る。したがって、半導体搬送装置１１，１２を設置する
ために必要な空間が小さくて済む。また、半導体搬送装
置１１，１２の基台１３，１４の中心の鉛直軸Ｖ２を中
心とする回転半径を小さくすることができる。As described above, according to the semiconductor carrier devices 11 and 12 and the control method of the semiconductor carrier device 11 described in the first embodiment or the second embodiment, the upper surfaces of the mounting portions 42 and 43 are always horizontal. So that the upper arm members 2a, 2
Since the b, the forearm members 3a and 3b, and the hand member 4 are rotated, the wafer 1 (1a, 1b) placed on the placing portions 42 and 43 can be smoothly transported. Further, since the upper arm members 2a and 2b, the forearm members 3a and 3b, and the hand member 4 rotate within the vertical plane, the semiconductor transfer device 1
The horizontal area occupied when 1 and 12 operate becomes small. Therefore, the space required for installing the semiconductor transfer devices 11 and 12 can be small. Further, the radius of gyration about the vertical axis V2 at the center of the bases 13 and 14 of the semiconductor transfer devices 11 and 12 can be reduced.

【００４２】また、一のハンド部材４が前腕部材３ａ，
３ｂの双方に連結されているので、上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４から構成される
アーム機構の剛性が高まる。これにより、上腕部材２
ａ，２ｂや前腕部材３ａ，３ｂの長さを大きくして、ウ
ェハ１（１ａ，１ｂ）の搬送距離を長くすることができ
る。また、アーム機構の剛性が高められると、アーム機
構を高速に動作させたり、また停止位置の精度を高めた
りすることができる。Further, one hand member 4 is the forearm member 3a,
Since it is connected to both 3b, the upper arm members 2a, 2
The rigidity of the arm mechanism composed of b, the forearm members 3a and 3b, and the hand member 4 is increased. Thereby, the upper arm member 2
By increasing the length of a, 2b and the forearm members 3a, 3b, it is possible to lengthen the transport distance of the wafer 1 (1a, 1b). Further, if the rigidity of the arm mechanism is increased, the arm mechanism can be operated at high speed and the accuracy of the stop position can be improved.

【００４３】また、上腕部材２ａ，２ｂ、前腕部材３
ａ，３ｂ、ハンド部材４を回動させる回動手段５ａ（５
１ａ〜６２ａ），５ｂが、単一の駆動源６ａ，６ｂ
（７）により動作するように構成されているので、半導
体搬送装置１１（１２）の構造を簡単にできる。Also, the upper arm members 2a and 2b and the forearm member 3
a, 3b, a rotating means 5a for rotating the hand member 4 (5
1a to 62a), 5b are single drive sources 6a, 6b
Since it is configured to operate according to (7), the structure of the semiconductor transfer device 11 (12) can be simplified.

【００４４】また、回動手段５ａ，５ｂが、上腕部材２
ａ，２ｂの基台１３（１４）に対する回動角と、前腕部
材３ａ，３ｂの上腕部材２ａ，２ｂに対する回動角と、
ハンド部材４の前腕部材３ａ，３ｂに対する回動角との
比が１：（−２）：１となるように、上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそれぞれを回
動させるので、これら上腕部材２ａ，２ｂ、前腕部材３
ａ，３ｂ、ハンド部材４が回動しても、ハンド部材４の
鉛直面内における角度が一定に保たれる。したがって、
このハンド部材４に取り付けられた載置部４２，４３の
角度も一定に保たれ、この載置部４２，４３に載置され
たウェハ１（１ａ，１ｂ）を円滑に搬送できる。Further, the rotating means 5a and 5b have the upper arm member 2
rotation angles of the a and 2b with respect to the base 13 (14) and rotation angles of the forearm members 3a and 3b with respect to the upper arm members 2a and 2b;
The upper arm members 2a, 2 are so arranged that the ratio of the rotation angle of the hand member 4 to the forearm members 3a, 3b is 1: (-2): 1.
Since the b, the forearm members 3a and 3b, and the hand member 4 are rotated, the upper arm members 2a and 2b and the forearm member 3 are rotated.
Even if a, 3b and the hand member 4 rotate, the angle of the hand member 4 in the vertical plane is kept constant. Therefore,
The angles of the mounting portions 42 and 43 attached to the hand member 4 are also kept constant, and the wafer 1 (1a, 1b) mounted on the mounting portions 42 and 43 can be smoothly transported.

【００４５】また、上腕部材２ａ，２ｂの上腕基端部２
１ａ，２１ｂと上腕先端部２２ａ，２２ｂとの間の距離
２ａＬ，２ｂＬと、前腕部材３ａ，３ｂの前腕基端部３
１ａ，３１ｂと前腕先端部３２ａ，３２ｂとの間の距離
３ａＬ，３ｂＬとが、互いに等しく設定されているの
で、回動手段５ａ，５ｂによって、上腕部材２ａ，２
ｂ、前腕部材３ａ，３ｂ、ハンド部材４のそれぞれが、
上腕部材２ａ，２ｂの基台１３（１４）に対する回動角
と、前腕部材３ａ，３ｂの上腕部材２ａ，２ｂに対する
回動角と、ハンド部材４の前腕部材３ａ，３ｂに対する
回動角との比が１：（−２）：１となるように回動され
るとき、ハンド部材４の高さが一定に保たれる。したが
って、このハンド部材４に取り付けられた載置部４２，
４３の高さも一定に保たれ、この載置部４２，４３に載
置されたウェハ１（１ａ，１ｂ）を円滑に搬送できる。Also, the upper arm base end portion 2 of the upper arm members 2a and 2b.
Distances 2aL and 2bL between the upper arm tip portions 22a and 22b and the forearm base end portions 3 of the forearm members 3a and 3b.
Since the distances 3aL and 3bL between the front end portions 32a and 32b of the forearms 1a and 31b are set equal to each other, the upper arm members 2a and 2b are rotated by the rotating means 5a and 5b.
b, the forearm members 3a and 3b, and the hand member 4,
The rotation angle of the upper arm members 2a and 2b with respect to the base 13 (14), the rotation angle of the upper arm members 3a and 3b with respect to the upper arm members 2a and 2b, and the rotation angle of the hand member 4 with respect to the forearm members 3a and 3b. When rotated so that the ratio is 1: (-2): 1, the height of the hand member 4 is kept constant. Therefore, the mounting portion 42 attached to the hand member 4,
The height of 43 is also kept constant, and the wafers 1 (1a, 1b) mounted on the mounting portions 42, 43 can be transported smoothly.

【００４６】また、水平方向に長尺に形成され、この長
さ方向の中央とハンド部材４とを貫通する鉛直軸Ｖ１を
中心として回動自在にハンド部材４に取り付けられた載
置部本体４４の、長さ方向の両端部に、それぞれ載置部
４２，４３が設けられ、載置部本体４４をハンド部材４
に対して回動させるモータ４５が備えられているので、
載置部本体４４の両端部に設けられた各載置部４２，４
３にそれぞれウェハ１（１ａ，１ｂ）を載置し、この載
置部本体４４をハンド部材４に対して回動させること
で、ウェハ１（１ａ，１ｂ）の搬送を効率的に行うこと
ができる。Further, the mounting portion main body 44 is formed horizontally long and is rotatably attached to the hand member 4 about a vertical axis V1 passing through the center of the length direction and the hand member 4. Mounting portions 42 and 43 are provided at both ends in the length direction, and the mounting portion main body 44 is attached to the hand member 4
Since the motor 45 for rotating the
The mounting portions 42, 4 provided at both ends of the mounting portion main body 44
The wafer 1 (1a, 1b) is placed on each of the wafers 3, and the placing portion main body 44 is rotated with respect to the hand member 4, so that the wafer 1 (1a, 1b) can be efficiently transported. it can.

【００４７】特に、一のウェハ１ａに処理が施されてい
る間に、次に処理を施すウェハ１ｂをカセットキャリア
Ｐ１から取り出しておくことで、処理済のウェハ１ａと
未処理のウェハ１ｂとの交換に要する時間を大幅に短縮
することができる。In particular, while the wafer 1a is being processed, the wafer 1b to be processed next is taken out from the cassette carrier P1 so that the processed wafer 1a and the unprocessed wafer 1b are separated from each other. The time required for replacement can be greatly reduced.

【００４８】なお、本発明の搬送装置、ワーク搬送装
置、および搬送装置の制御方法は、上記の各実施の形態
に限定されることなく、本発明の主旨を逸脱しない範囲
において、種々の改良並びに設計の変更を行ってもよ
い。例えば、上記の各実施の形態では、上腕部材２ａ，
２ｂ、前腕部材３ａ，３ｂ、ハンド部材４を回動させる
回動手段５ａ，５ｂが、単一のモータ６ａ，６ｂ（７）
により動作するように構成されているが、上腕部材、前
腕部材、ハンド部材をそれぞれ個別の駆動源により動作
させ、各駆動源の動作を制御することによって、載置部
の上面が常に水平となるようにしてもよい。その他、具
体的な細部構造などについても適宜に変更可能であるこ
とは勿論である。The transfer device, the work transfer device, and the control method of the transfer device according to the present invention are not limited to the above-described embodiments, and various improvements and modifications can be made without departing from the gist of the present invention. Design changes may be made. For example, in each of the above embodiments, the upper arm member 2a,
2b, forearm members 3a, 3b, and rotating means 5a, 5b for rotating the hand member 4 are composed of a single motor 6a, 6b (7).
However, by operating the upper arm member, the forearm member, and the hand member by individual drive sources and controlling the operation of each drive source, the upper surface of the mounting portion is always horizontal. You may do it. In addition, it goes without saying that a specific detailed structure can be appropriately changed.

【００４９】[0049]

【発明の効果】請求項１に記載の発明によれば、載置部
の上面が常に水平となるように、前記上腕部材、前腕部
材、ハンド部材のそれぞれが回動されるので、この載置
部に載置された被搬送物を円滑に搬送できる。また、上
腕部材、前腕部材、ハンド部材のそれぞれが鉛直面内で
回転するので、搬送装置が動作するときに占有する水平
面積が小さくなる。したがって、搬送装置を設置するた
めに必要な空間が小さくて済む。また、搬送装置の基台
が、その設置面に対して回動可能に取り付けられている
場合に、搬送装置の回転半径を小さくすることができ
る。According to the invention described in claim 1, each of the upper arm member, the forearm member and the hand member is rotated so that the upper surface of the mounting portion is always horizontal. An object to be conveyed placed on the section can be smoothly conveyed. Further, since each of the upper arm member, the forearm member, and the hand member rotates in the vertical plane, the horizontal area occupied when the transport device operates becomes small. Therefore, the space required to install the carrier device can be small. Further, when the base of the transfer device is rotatably attached to the installation surface, the radius of rotation of the transfer device can be reduced.

【００５０】請求項２に記載の発明によれば、上腕部
材、前腕部材、ハンド部材のそれぞれが鉛直面内で回転
するので、搬送装置が動作するときに占有する水平面積
が小さくなる。したがって、搬送装置を設置するために
必要な空間が小さくて済む。また、一のハンド部材が前
腕部材の双方に連結されているので、上腕部材、前腕部
材、ハンド部材から構成されるアーム機構の剛性が高ま
る。これにより、上腕部材や前腕部材の長さを大きくし
て、被搬送物の搬送距離を長くすることができる。ま
た、アーム機構の剛性が高められると、アーム機構を高
速に動作させたり、また停止位置の精度を高めたりする
ことができる。According to the second aspect of the present invention, each of the upper arm member, the forearm member, and the hand member rotates within the vertical plane, so that the horizontal area occupied when the transport device operates becomes small. Therefore, the space required to install the carrier device can be small. Moreover, since one hand member is connected to both the forearm members, the rigidity of the arm mechanism including the upper arm member, the forearm member, and the hand member is increased. As a result, the length of the upper arm member or the forearm member can be increased, and the transport distance of the transported object can be increased. Further, if the rigidity of the arm mechanism is increased, the arm mechanism can be operated at high speed and the accuracy of the stop position can be improved.

【００５１】請求項３に記載の発明によれば、請求項１
または２に記載の発明と同様の効果が得られるととも
に、上腕部材、前腕部材、ハンド部材を回動させる回動
手段が、単一の駆動源により動作するように構成されて
いるので、搬送装置の構造を簡単にできる。According to the invention of claim 3, claim 1
Alternatively, the same effect as that of the invention described in 2 is obtained, and the rotating means for rotating the upper arm member, the forearm member, and the hand member are configured to be operated by a single drive source. The structure of can be simplified.

【００５２】請求項４に記載の発明によれば、請求項１
〜３のいずれかに記載の発明と同様の効果が得られると
ともに、回動手段が、上腕部材の基台に対する回動角
と、前腕部材の上腕部材に対する回動角と、ハンド部材
の前腕部材に対する回動角との比が１：（−２）：１と
なるように、上腕部材、前腕部材、ハンド部材のそれぞ
れを回動させるので、これら上腕部材、前腕部材、ハン
ド部材が回動しても、ハンド部材の鉛直面内における角
度が一定に保たれる。したがって、このハンド部材に取
り付けられた載置部の角度も一定に保たれ、この載置部
に載置された被搬送物を円滑に搬送できる。According to the invention of claim 4, claim 1
The same effect as that of the invention described in any one of 1 to 3 is obtained, and the rotating means includes a rotating angle of the upper arm member with respect to the base, a rotating angle of the forearm member with respect to the upper arm member, and a forearm member of the hand member. Since the upper arm member, the forearm member, and the hand member are rotated so that the ratio of the rotation angle with respect to is 1: (-2): 1, the upper arm member, the forearm member, and the hand member rotate. However, the angle of the hand member in the vertical plane is kept constant. Therefore, the angle of the placing portion attached to the hand member is also kept constant, and the object to be conveyed placed on the placing portion can be smoothly conveyed.

【００５３】請求項５に記載の発明によれば、請求項４
に記載の発明と同様の効果が得られるとともに、上腕部
材の上腕基端部と上腕先端部との間の距離と、前腕部材
の前腕基端部と前腕先端部との間の距離とが、互いに等
しく設定されているので、回動手段によって、上腕部
材、前腕部材、ハンド部材のそれぞれが、上腕部材の基
台に対する回動角と、前腕部材の上腕部材に対する回動
角と、ハンド部材の前腕部材に対する回動角との比が
１：（−２）：１となるように回動されても、ハンド部
材の高さが一定に保たれる。したがって、このハンド部
材に取り付けられた載置部の高さも一定に保たれ、この
載置部に載置された被搬送物を円滑に搬送できる。According to the invention of claim 5, claim 4
While obtaining the same effect as the invention described in, the distance between the upper arm base end portion and the upper arm tip portion of the upper arm member, the distance between the forearm base end portion and the forearm tip portion of the forearm member, Since they are set to be equal to each other, the rotating means causes the upper arm member, the forearm member, and the hand member to rotate with respect to the base of the upper arm member, the rotation angle with respect to the upper arm member of the forearm member, and the hand member. Even if the hand member is rotated so that the ratio of the rotation angle to the forearm member is 1: (-2): 1, the height of the hand member is kept constant. Therefore, the height of the placing portion attached to the hand member is also kept constant, and the object to be conveyed placed on the placing portion can be smoothly conveyed.

【００５４】請求項６に記載の発明によれば、請求項１
〜５のいずれかに記載の発明と同様の効果が得られると
ともに、水平方向に長尺に形成され、この長さ方向の中
央とハンド部材とを貫通する鉛直軸を中心として回動自
在にハンド部材に取り付けられた載置部本体の、長さ方
向の両端部に、それぞれ載置部が設けられ、載置部本体
をハンド部材に対して回動させる載置部回動手段が備え
られているので、載置部本体の両端部に設けられた各載
置部にそれぞれ被搬送物を載置し、この載置部本体をハ
ンド部材に対して回動させることで、被搬送物の搬送を
効率的に行うことができる。According to the invention of claim 6, claim 1
The same effect as that of the invention described in any one of 5 to 5 is obtained, and the hand is rotatably centered on a vertical axis that is formed to be long in the horizontal direction and that penetrates the center of the length direction and the hand member. Mounting portions are provided at both ends in the length direction of the mounting portion main body attached to the member, and mounting portion rotating means for rotating the mounting portion main body with respect to the hand member are provided. Therefore, the transported object is placed on each of the mounting portions provided on both ends of the mounting portion main body, and the mounting portion main body is rotated with respect to the hand member to convey the transported object. Can be done efficiently.

【００５５】請求項７に記載の発明によれば、請求項１
〜６のいずれかに記載の発明と同様の効果が得られる。
特に、請求項６に記載の搬送装置によって基板を搬送す
る場合には、一の基板に処理が施された後、この基板を
搬送先位置から取り出し、次に処理を施そうとする基板
をこの搬送先位置にセットするまでの所要時間を大幅に
短縮することができる。According to the invention of claim 7, claim 1
The same effects as those of the invention described in any one of to 6 can be obtained.
Particularly, when a substrate is transferred by the transfer device according to claim 6, after one substrate is processed, this substrate is taken out from the transfer destination position, and the substrate to be processed next is transferred to this substrate. It is possible to significantly reduce the time required to set the transfer destination position.

【００５６】請求項８に記載の発明によれば、請求項１
に記載の発明と同様の効果が得られる。According to the invention described in claim 8, claim 1
The same effect as the invention described in (1) can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の搬送装置またはワーク搬送装置の一例
としての半導体搬送装置を示す斜視図である。FIG. 1 is a perspective view showing a semiconductor transfer device as an example of a transfer device or a work transfer device of the present invention.

【図２】同例の側面図である。FIG. 2 is a side view of the example.

【図３】同例による被搬送物（ワーク）の搬送手順を示
す上面図である。FIG. 3 is a top view showing a procedure for transporting an object to be transported (work) according to the same example.

【図４】本発明の搬送装置またはワーク搬送装置の他の
一例としての半導体搬送装置を示す側面図である。FIG. 4 is a side view showing a semiconductor transfer device as another example of the transfer device or the work transfer device of the present invention.

【図５】従来の搬送装置の一例を示す側面図である。FIG. 5 is a side view showing an example of a conventional transport device.

【符号の説明】[Explanation of symbols]

１，１ａ，１ｂ 被搬送物、ワーク（ウェハ） １１，１２ 搬送装置、ワーク搬送装置（半導体
搬送装置） １３，１４ 基台 ２ａ，２ｂ 上腕部材 ２１ａ，２１ｂ 上腕基端部 ２２ａ，２２ｂ 上腕先端部 ２ａＬ，２ｂＬ 上腕基端部と上腕先端部との距離 ３ａ，３ｂ 前腕部材 ３１ａ，３１ｂ 前腕基端部 ３２ａ，３２ｂ 前腕先端部 ３ａＬ，３ｂＬ 前腕基端部と上腕先端部との距離 ４ ハンド部材 ４１ 手首部 ４２，４３ 載置部 ４４ 載置部本体 ４５ 載置部回動手段 ５ａ，５ｂ 回動手段 ６ａ，６ｂ，７ 駆動源 Ｈ１，Ｈ２，Ｈ３ 水平軸 Ｖ１ 鉛直軸 Ｐ１ 搬送元位置（カセットキャリア） Ｐ２ 搬送先位置（プロセスチャンバ）1, 1a, 1b Objects to be transferred, works (wafers) 11, 12 Transfer devices, work transfer devices (semiconductor transfer devices) 13, 14 Bases 2a, 2b Upper arm members 21a, 21b Upper arm base ends 22a, 22b Upper arm tip parts 2aL, 2bL Distance between upper arm base end and upper arm tip 3a, 3b Forearm members 31a, 31b Forearm base ends 32a, 32b Forearm tip 3aL, 3bL Distance between forearm base and upper arm tip 4 Hand member 41 Wrists 42, 43 Placement part 44 Placement part body 45 Placement part rotation means 5a, 5b Rotation means 6a, 6b, 7 Drive sources H1, H2, H3 Horizontal axis V1 Vertical axis P1 Transport source position (cassette carrier ) P2 Destination position (process chamber)

───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3C007 AS24 BS10 BT11 CT04 CT05 CV08 CW08 CY36 HS27 HT02 HT20 NS13 5F031 CA02 CA05 DA01 FA01 FA02 FA07 FA11 GA03 GA08 GA43 GA46 GA47 GA49 LA07 LA13   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3C007 AS24 BS10 BT11 CT04 CT05                       CV08 CW08 CY36 HS27 HT02                       HT20 NS13                 5F031 CA02 CA05 DA01 FA01 FA02                       FA07 FA11 GA03 GA08 GA43                       GA46 GA47 GA49 LA07 LA13

Claims (8)

【特許請求の範囲】[Claims] 【請求項１】 基台と、 上腕基端部とこの上腕基端部から所定距離だけ離れた上
腕先端部とを備えて形成され、前記基台と前記上腕基端
部とを貫通する水平軸を中心として回動自在に、前記基
台に連結された上腕部材と、 前腕基端部とこの前腕基端部から所定距離だけ離れた前
腕先端部とを備えて形成され、前記上腕先端部と前記前
腕基端部とを貫通する水平軸を中心として回動自在に、
前記上腕部材に連結された前腕部材と、 手首部とこの手首部に取り付けられ被搬送物を載置する
上面を備える載置部とを備えて構成され、前記前腕先端
部と前記手首部とを貫通する水平軸を中心として回動自
在に、前記前腕部材に連結されたハンド部材と、 前記上腕部材を前記基台に対して、前記前腕部材を前記
上腕部材に対して、また前記ハンド部材を前記前腕部材
に対して、それぞれ回動させる回動手段と、が備えら
れ、 前記回動手段は、前記載置部の上面が常に水平となるよ
うに、前記上腕部材、前腕部材、ハンド部材のそれぞれ
を回動させるように構成されていることを特徴とする搬
送装置。1. A horizontal shaft formed by including a base, an upper arm base end portion, and an upper arm tip end portion separated from the upper arm base end portion by a predetermined distance, and penetrating the base base and the upper arm base end portion. Rotatably around an upper arm member connected to the base, a forearm base end portion, and a forearm tip end portion separated from the forearm base end portion by a predetermined distance. Rotatably about a horizontal axis that penetrates the forearm base end,
A forearm member connected to the upper arm member, a wrist portion and a mounting portion having an upper surface attached to the wrist portion and on which a transported object is mounted are configured, and the forearm tip portion and the wrist portion are provided. A hand member connected to the forearm member so as to be rotatable about a horizontal axis that penetrates the upper arm member, the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member. Rotating means for rotating each of the forearm members, and the rotating means includes a rotating member for the upper arm member, the forearm member, and the hand member so that the upper surface of the placing portion is always horizontal. A carrier device configured to rotate each. 【請求項２】 基台と、 上腕基端部とこの上腕基端部から所定距離だけ離れた上
腕先端部とを備えて形成され、前記基台と前記上腕基端
部とを貫通する水平軸を中心として回動自在に、前記基
台の両側に連結された一対の上腕部材と、 前腕基端部とこの前腕基端部から所定距離だけ離れた前
腕先端部とを備えて形成され、前記各上腕部材の各上腕
先端部と前記前腕基端部とを貫通する水平軸を中心とし
て回動自在に、前記各上腕部材にそれぞれ連結された一
対の前腕部材と、 手首部とこの手首部に取り付けられ被搬送物を載置する
上面を備える載置部とを備えて構成され、前記各前腕先
端部と前記手首部とを貫通する水平軸を中心として回動
自在に、前記両前腕部材に連結された一のハンド部材
と、 前記各上腕部材を前記基台に対して、前記各前腕部材を
前記各上腕部材に対して、また前記一のハンド部材を前
記両前腕部材に対して、それぞれ回動させる回動手段
と、が備えられ、 前記回動手段は、前記載置部の上面が常に水平となるよ
うに、前記上腕部材、前腕部材、ハンド部材のそれぞれ
を回動させることを特徴とする搬送装置。2. A horizontal shaft formed by including a base, an upper arm base end portion, and an upper arm tip end portion separated from the upper arm base end portion by a predetermined distance, and penetrating the base base and the upper arm base end portion. Rotatably around the base, a pair of upper arm members connected to both sides of the base, a forearm base end portion and a forearm tip end portion separated from the forearm base end portion by a predetermined distance, are formed, A pair of forearm members connected to the upper arm members, respectively, rotatably around a horizontal axis penetrating the upper arm distal end portions of the respective upper arm members and the forearm base end portion, a wrist portion, and a wrist portion thereof. A mounting portion having an upper surface on which an object to be transported is mounted is mounted, and the both forearm members are rotatably rotatable about a horizontal axis penetrating each forearm tip portion and the wrist portion. One hand member connected, each of the upper arm member to the base, front Rotating means for rotating each forearm member with respect to each of the upper arm members and rotating the one hand member with respect to both of the forearm members, respectively, wherein the rotating means is the mounting portion. The conveying device, wherein each of the upper arm member, the forearm member, and the hand member is rotated so that the upper surface of the above is always horizontal. 【請求項３】 請求項１または２に記載の搬送装置にお
いて、 前記上腕部材、前腕部材、ハンド部材を回動させる回動
手段が、単一の駆動源により動作するように構成されて
いることを特徴とする搬送装置。3. The transporting device according to claim 1, wherein the rotating means for rotating the upper arm member, the forearm member, and the hand member are configured to be operated by a single drive source. A transport device characterized by. 【請求項４】 請求項１〜３のいずれかに記載の搬送装
置において、 前記回動手段は、前記上腕部材の前記基台に対する回動
角と、前記前腕部材の前記上腕部材に対する回動角と、
前記ハンド部材の前記前腕部材に対する回動角との比が
１：（−２）：１となるように、前記上腕部材、前腕部
材、ハンド部材のそれぞれを回動させることを特徴とす
る搬送装置。4. The conveyance device according to claim 1, wherein the rotating means includes a rotating angle of the upper arm member with respect to the base and a rotating angle of the forearm member with respect to the upper arm member. When,
Each of the upper arm member, the forearm member, and the hand member is rotated so that the ratio of the rotation angle of the hand member to the forearm member is 1: (-2): 1. . 【請求項５】 請求項４に記載の搬送装置において、 前記上腕部材の上腕基端部と上腕先端部との間の距離
と、前記前腕部材の前腕基端部と前腕先端部との間の距
離とが、互いに等しく設定されていることを特徴とする
搬送装置。5. The transport device according to claim 4, wherein the distance between the upper arm base end portion and the upper arm tip end portion of the upper arm member and the distance between the forearm base end portion and the forearm tip end portion of the forearm member. A conveying device, wherein the distance is set to be equal to each other. 【請求項６】 請求項１〜５のいずれかに記載の搬送装
置において、 水平方向に長尺に形成され、この長さ方向の中央と前記
ハンド部材とを貫通する鉛直軸を中心として回動自在に
前記ハンド部材に取り付けられた載置部本体の、長さ方
向の両端部に、それぞれ前記載置部が設けられ、 前記載置部本体を前記ハンド部材に対して回動させる載
置部回動手段が備えられていることを特徴とする搬送装
置。6. The transporting device according to claim 1, wherein the transporting device is formed to be long in a horizontal direction, and rotates about a vertical axis that penetrates the center of the length direction and the hand member. A placing part is provided at both ends of the placing part body freely attached to the hand member in the longitudinal direction, and a placing part for rotating the placing part body with respect to the hand member. A transporting device comprising a rotating means. 【請求項７】 請求項１〜６のいずれかに記載の搬送装
置により、搬送元位置にある前記被搬送物である平板状
のワークを、このワークに所定の処理を施すための搬送
先位置に搬送し、また、前記搬送先位置で前記処理が施
されたワークを、前記搬送元位置に搬送することを特徴
とするワーク搬送装置。7. A transport destination position for performing a predetermined process on a flat workpiece, which is the transported object at a transport source position, by the transport device according to any one of claims 1 to 6. And a work carrying device, which carries the processing at the carrying destination position to the carrying source position. 【請求項８】 基台と、 上腕基端部とこの上腕基端部から所定距離だけ離れた上
腕先端部とを備えて形成され、前記基台と前記上腕基端
部とを貫通する水平軸を中心として回動自在に、前記基
台に連結された上腕部材と、 前腕基端部とこの前腕基端部から所定距離だけ離れた前
腕先端部とを備えて形成され、前記上腕先端部と前記前
腕基端部とを貫通する水平軸を中心として回動自在に、
前記上腕部材に連結された前腕部材と、 手首部とこの手首部に取り付けられ被搬送物を載置する
上面を備える載置部とを備えて構成され、前記前腕先端
部と前記手首部とを貫通する水平軸を中心として回動自
在に、前記前腕部材に連結されたハンド部材と、 前記上腕部材を前記基台に対して、前記前腕部材を前記
上腕部材に対して、また前記ハンド部材を前記前腕部材
に対して、それぞれ回動させる回動手段と、が備えられ
た搬送装置の制御方法であって、 前記回動手段で、前記載置部の上面が常に水平となるよ
うに、前記上腕部材、前腕部材、ハンド部材のそれぞれ
を回動させることを特徴とする搬送装置の制御方法。8. A horizontal shaft formed by including a base, an upper arm base end portion, and an upper arm tip end portion separated from the upper arm base end portion by a predetermined distance, and penetrating the base base and the upper arm base end portion. Rotatably about the upper arm member connected to the base, a forearm base end portion and a forearm tip end portion separated from the forearm base end portion by a predetermined distance, and the upper arm tip end portion is formed. Rotatably about a horizontal axis that penetrates the forearm base end,
A forearm member connected to the upper arm member, a wrist portion and a mounting portion having an upper surface attached to the wrist portion and on which a transported object is mounted are configured, and the forearm tip portion and the wrist portion are provided. A hand member connected to the forearm member so as to be rotatable about a horizontal axis that penetrates the upper arm member, the upper arm member with respect to the base, the forearm member with respect to the upper arm member, and the hand member. A method for controlling a carrying device, comprising: a rotating unit that rotates with respect to the forearm member, wherein the upper surface of the placing unit is always horizontal by the rotating unit. A method for controlling a carrying device, comprising rotating each of an upper arm member, a forearm member, and a hand member.
JP2001357585A 2001-11-22 2001-11-22 Carrying device, work carrying device, and control method of carrying device Pending JP2003158165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001357585A JP2003158165A (en) 2001-11-22 2001-11-22 Carrying device, work carrying device, and control method of carrying device

Publications (1)

Publication Number Publication Date
JP2003158165A true JP2003158165A (en) 2003-05-30

Family

ID=19168910

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2003158165A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4466785B2 (en) * 2007-09-13 2010-05-26 株式会社安川電機 Transfer robot and control method of transfer robot

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4466785B2 (en) * 2007-09-13 2010-05-26 株式会社安川電機 Transfer robot and control method of transfer robot
JPWO2009034854A1 (en) * 2007-09-13 2010-12-24 株式会社安川電機 Transfer robot and control method of transfer robot

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