JP2003156389A - Vibration measuring apparatus and storage medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration measuring apparatus which enables obtaining of the result of noncontact measurement of a measuring object, and measurement of a plurality of points. SOLUTION: Time series images of a measuring object portion of the vibration measuring object are taken by an imaging portion 14 through the intermediary of an optical portion 13, and are inputted to a data processing portion 16 via an image input portion 15. The processing portion 16 performs vibration analysis of the measuring object portion, on the basis of the inputted time series images of the object portion to be measured. Namely, existence of vibration is detected by cutting out the time series images or a part of them, is expressed numerically in addition, and is outputted by displaying, as needed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration measuring device and a storage medium capable of non-contact measurement of mechanical vibrations of various devices and vibrations such as fluid vibrations flowing in pipes.

[0002]

2. Description of the Related Art Generally, as a technique for measuring the vibration of an object, a vibration sensor is installed so as to come into contact with an object to be measured, and the vibration is displayed or recorded based on a detection signal from the vibration sensor. . An example of the vibration sensor is a piezoelectric vibration sensor using a piezoelectric element.

FIG. 14 is a block diagram of a piezoelectric vibration sensor. The piezoelectric vibration sensor is a vibration sensor in which a thin disk-shaped piezoelectric element 11 is used as a spring and is combined with a mass 12 to form a seismo system, and the piezoelectric element is proportional to a relative displacement caused by an inertial force applied to the mass 12. 11 generates electricity. Since the piezoelectric vibration sensor has a very high natural frequency of the mass 12, it can be used as a vibration acceleration sensor in a frequency range lower than the mass 12 so as to be in close contact with an object to be measured.

[0004]

However, since such a piezoelectric vibration sensor detects the vibration of the measurement object by bringing it into contact with the measurement object, the vibration of the measurement object is measured in a non-contact manner. You cannot do it. For this reason, when measuring vibrations on an object to be measured at a high position, such as in a plant such as a nuclear facility, it is necessary to install a scaffold and then install a vibration sensor. The amount of work for detection increases.

Therefore, in many cases, the vibration sensor is attached to the object to be measured in advance and the vibration sensor is made permanent. Further, even if the vibration sensor is permanently installed, when performing measurements at a plurality of points on the same measurement object, it is necessary to attach or remove another vibration sensor.

It is an object of the present invention to provide a vibration measuring device capable of obtaining a vibration measurement result in a non-contact manner with an object to be measured and capable of measuring a plurality of points.

[0007]

According to a first aspect of the present invention, there is provided a vibration measuring device, wherein an optical unit for enlarging or reducing an image of a measurement target portion of a vibration measurement target, and a time series through the optical unit. Based on the imaging unit that captures the image of the measurement target unit, the image input unit that inputs the time-series image of the measurement target unit captured by the imaging unit, and the time-series image of the measurement target unit that is input by the image input unit And a data processing unit that analyzes the vibration of the measurement target unit.

In the vibration measuring device according to the first aspect of the present invention, a time-series image of the measurement object portion of the vibration measurement object is photographed by the image pickup portion via the optical portion, and the data processing portion is fed through the image input portion. input. The data processing unit performs vibration analysis of the measurement target portion based on the input time series image of the measurement target portion. That is, the time-series image or a part thereof is cut out to detect the presence or absence of vibration, digitize it, and display it as necessary.

A vibration measuring device according to a second aspect of the present invention is the vibration measuring device according to the first aspect of the invention, wherein a wide-angle image pickup section for photographing the measurement target portion in a wide range and an image input section for inputting an image photographed by the wide-angle image pickup section. And the data processing unit specifies the position of the measurement target unit based on the wide-angle image captured by the wide-angle imaging unit.

In the vibration measuring device according to the second aspect of the present invention, in addition to the operation of the first aspect of the invention, the wide-angle image pickup section photographs a measurement target portion in a wide range and inputs it to the data processing section via the image input section. To do. The data processing unit specifies the position of the measurement target unit based on the wide-angle image captured by the wide-angle imaging unit. As a result, a wide range image can be obtained, and thus the position of the measurement target portion can be roughly adjusted.

A vibration measuring device according to a third aspect of the present invention is the vibration measuring device according to the first or second aspect of the present invention, further including a distance measuring section for measuring a distance to the measurement object section, and the data processing section. It is characterized in that the resolution is calculated based on the distance measured by the section and vibration analysis is performed.

In the vibration measuring device according to the invention of claim 3, in addition to the effect of the invention of claim 1 or 2, the distance measuring section measures the distance to the measurement object section and the data processing section acquires it. Provides the resolution of the image in absolute value.

According to a fourth aspect of the invention, in the vibration measuring device according to any one of the first to third aspects of the invention, the optical axis of the image pickup section or the wide-angle image pickup section and the focus of the optical section are adjusted. The optical axis control mechanism section is provided.

In the vibration measuring device according to the invention of claim 4, in addition to the operation of the invention of any one of claims 1 to 3, the attitude of the image pickup section or the wide-angle image pickup section ( The optical axis) and focus can be controlled. Therefore, it is possible to remotely measure the vibration of the measurement target portion at a position whose distance and direction are different.

A vibration measuring device according to a fifth aspect of the present invention is the vibration measuring device according to any one of the first to fourth aspects, further comprising an optical axis converting section for changing an optical axis of the image pickup section. And

In the vibration measuring device according to the invention of claim 5, in addition to the operation of the invention of any one of claims 1 to 4, the optical axis of the image pickup section is changed by the optical axis conversion section, and It is possible to measure multiple points.

A vibration measuring device according to a sixth aspect of the present invention is the vibration measuring device according to any one of the first to fifth aspects, wherein the vibration measuring device detects vibration of the optical unit, the image pickup unit, or the wide-angle image pickup unit itself. It is characterized by including a vibration detection unit, and the data processing unit performs vibration analysis in consideration of the vibration detected by the self-vibration detection unit.

In the vibration measuring device according to the invention of claim 6, in addition to the operation of the invention of any one of claims 1 to 5, the vibration of the optical part, the imaging part or the wide-angle imaging part itself is detected. Since the vibration analysis is corrected, more accurate vibration data can be obtained.

A vibration measuring device according to a seventh aspect of the present invention is the vibration measuring device according to any one of the first to sixth aspects, wherein the data processing unit uses a vector image when specifying the measurement target portion. It is characterized by using the previously used pattern matching.

In the vibration measuring device according to the invention of claim 7, in addition to the operation of the invention of any one of claims 1 to 6, the measurement target portion is specified by pattern matching using a vector image. Since there is much information in the pattern file, the measurement target part can be detected with high probability.

A storage medium according to an eighth aspect of the present invention comprises: a computer, means for reading an image of a measurement object portion of a vibration measurement object as a time series image, and means for performing a vibration analysis based on the read time series image. , And stores a program for functioning as a means for displaying and outputting the vibration analysis result.

The contents stored in the storage medium according to the eighth aspect of the invention are input to the computer and the computer is operated. Thus, the image of the measurement target portion of the vibration measurement target is read as a time series image, vibration analysis is performed based on the read time series image, and the vibration analysis result is displayed and output.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below. 1A and 1B are explanatory diagrams of a vibration measuring device according to a first embodiment of the present invention, FIG. 1A is a configuration diagram of the vibration measuring device, and FIG. 1B is a flowchart showing an operation of the vibration measuring device. Is.

In FIG. 1A, an image of the vibration measurement object is taken by the image pickup unit 14 via the optical unit 13. The optical unit 13 enlarges or reduces the image of the measurement target unit and captures it in the imaging unit 14. The image capturing unit 14 captures images of the measurement target unit in time series via the optical unit 13, and the image input unit 15
The time series image is output to the data processing unit 16 via the. The data processing unit 16 performs vibration analysis of the measurement target portion based on the time series image of the measurement target portion from the image input unit 15.

Here, the image pickup unit 14 is a charge collection device (CCD), and particularly when the object to be measured is vibrating at a high speed, a line camera, a high speed camera or the like capable of taking an image with one or more dimensions. Elements can be used.

Further, as the optical unit 13, it is possible to use a lens for a single-lens reflex camera or a field scope (made by Vixen, Nikon, etc.) capable of fine focus adjustment. Especially when the measurement target is fixed, the fine adjustment mechanism is not necessary.

Further, the image input unit 15 is capable of transmitting a video signal to the data processing unit 16. For example, for a high speed camera or a line camera, it is manufactured by Nagase & Co.
As AdvancedGrab-2, the FASTCAM-NET series manufactured by Photolon can be used as the high-speed camera.

Next, the operation will be described. As shown in FIG. 1B, the angle of view of the imaging unit 14 is adjusted with respect to the first measurement target portion of the vibration measurement target (S1) so that the image of the measurement target portion can be read. Then, the images of the measurement object are captured in time series (S2). The captured time series images are input to the data processing unit 16 via the image input unit 15 and vibration analysis is performed (S3). That is, in step S3, it is determined whether or not vibration is occurring in the measurement target portion by the image processing and the FFT processing.

The vibration analysis result in step S3 is temporarily stored as acquired data (S4). Then, it is determined whether or not there is a next measurement target portion (S5), and if there is a next measurement target portion, the painter phrase is adjusted to the next measurement target portion (S6), and steps S2 to S2 are performed. The process of step S5 is repeated. If it is determined in step S5 that there is no next measurement target portion, it is determined that all the measurements are completed,
The acquired data temporarily stored in step S4 are collectively displayed as a final result (S7). Then, a report is prepared based on these final results (S8).

FIG. 2 is an explanatory view of the case where the vibration measuring device 17 of the first embodiment detects the vibration of the piping 18 of the plant. Now, consider a case where a vibration measurement target object at a distance L is photographed by the image pickup unit 14 having a vertical angle θ and a horizontal angle φ. The vibration measurement target is the pipe 18,
This pipe 18 is arranged in the vertical direction (y direction),
It is assumed that the image is vibrating in the direction orthogonal to the axis of the imaging unit 14 at the frequency f in the left-right direction. At a position corresponding to a certain scan line number on the screen, it is assumed that the screen vibrates with the amplitude A and the frequency f. That is, it is assumed that the vibration is generated as shown in the equation (1). In reality, it is assumed that complex vibrations are occurring, and more generally, it is assumed that the vibrations are as shown in equation (2).

X = Asin (2πf + δ) (1) X = ΣA _k sin (2πf _k + δ) (2) FIG. 3 is an explanatory diagram of a time series image of the measurement target portion of the vibration measurement target. The imaging unit 14 acquires a plurality of images in time series for the same measurement target unit. FIG. 3 shows a case where five images are acquired. Then, attention is paid to one scanning line in the acquired image, and the information of the scanning line is updated and stored in the data processing unit 16 as time-series image data. Then, the data processing unit 16 performs FFT processing on the stored boundary coordinates of the time-series image to obtain frequency analysis and amplitude.

That is, in a still digital image (image of one scanning line) taken at a certain reference time t = t0, the edge position of the vibration measurement object is E (i, j) _{t = t0.}
Suppose it is detected by. Similarly, time t = t1, t = t2 ...
Images captured at t = tn are obtained in time series. Assuming that it does not oscillate in the y direction, E (i, j)
Is obtained as a time-series signal as shown in equation (3). By frequency-analyzing this time-series signal, the vibration amplitude of each frequency component can be analyzed.

E (i, j) = Xi (t) (t = t1, ..., Tn) (3) In the above description, vibration on a one-dimensional axis is assumed, but the same thing can be said within the plane. It can also be extended to vibration at. In this case, the vibration can be expressed as a two-dimensional locus on a plane, but basically it can be expressed as a one-dimensional vibration that is separated into the X axis and the Y axis and has mutual correlation. In that case, X on the screen
Although it is possible to use the axis and the Y axis as they are, it is effective to select the axis capable of separating vibration to some extent by rotational conversion of the axis in order to perform more detailed analysis.

[0034]

[Equation 1] Here, in the first embodiment, in order to specify the actual measurement target part of the vibration measurement target, some marker is set on the measurement target part of the vibration measurement target, and the coordinate detection of the point on the marker is performed. The detection target part is detected by. On the other hand, if it is difficult to add a marker, preprocessing such as pattern matching is required.

Further, when measuring the vibration, the vibration of the vibration measuring device 17 itself must be taken into consideration. Therefore, measurement is performed on a part that does not vibrate as a measurement target part, for example, a mark on a building wall or a scratch on the wall, and the obtained vibration measurement result is acquired in advance as the natural vibration (background vibration) of the building. Then, the vibration measurement result will be corrected offline.

As described above, according to the first embodiment, since the time-series image of the measurement target portion of the vibration measurement target can be acquired, the image or a part thereof is cut out to detect the presence or absence of vibration. It can be digitized.

Next, a second embodiment of the present invention will be described. FIG. 4 is a configuration diagram of a vibration measuring device according to a second embodiment of the present invention. The second embodiment is different from the first embodiment shown in FIG. 1 in that a wide-angle imaging unit 19 that captures a wide range of an object to be measured and an image input that inputs an image captured by the wide-angle imaging unit 19 are input. The data processing unit 16 specifies the position of the measurement target unit based on the wide-angle image captured by the wide-angle image capturing unit 19. The same elements as those in FIG. 1 are designated by the same reference numerals, and overlapping description will be omitted.

The optical axis of the wide-angle image pickup section 19 is adjusted so as to be parallel to the optical axis of the image pickup section 14. Therefore, the distance between the optical axis of the image pickup unit 14 and the optical axis of the wide-angle image pickup unit 19 is equal regardless of the distance. As a result, the image captured by the wide-angle imaging unit 19 is a wide-angle image of the position where the image-capturing unit 14 is measuring the vibration measurement target, so that it can be used as a guideline for measuring points.

Here, the wide-angle image pickup unit 19 is, like the image pickup unit 19, a charge collection device (CCD), particularly a line camera, a high-speed camera, or the like when a measurement target vibrates at high speed. It is possible to use an image pickup device capable of taking an image in a dimension or more. Further, the wide-angle image input unit 20 is capable of transmitting a video signal to the data processing unit 16, and is a product of Nagase & Co. for high-speed cameras and line cameras.
As AdvancedGrab-2, the FASTCAM-NET series manufactured by Photolon can be used as the high-speed camera.

Next, the operation will be described. FIG. 5 is a flowchart showing the operation of the vibration measuring device according to the second embodiment. First, a wide-angle image is captured by the wide-angle imaging unit 19 (S1), and a measurement target portion is extracted from the wide-angle image (S2). Extraction of this measurement target part, if some marker is installed in the measurement target part of the vibration measurement target,
The measurement target portion is detected by detecting the coordinates of the point on the marker. If no marker is installed, the measurement target portion is extracted by pattern matching.

The angle of view of the image pickup unit 14 is adjusted with respect to the first measurement target portion extracted in step S2 (S3), and the image of the measurement target portion is read. Then, the images of the measurement object are captured in time series (S4). The time-series images that have been taken in are input to the data processing unit 1 via the image input unit 15.
6 is input and vibration analysis is performed (S5). That is, in step S5, it is determined whether or not vibration is occurring in the measurement target portion by the image processing and the FFT processing.

The vibration analysis result in step S5 is temporarily stored as acquired data (S6). Then, it is determined whether or not there is a next measurement target part (S7), and if there is a next measurement target part, the painter phrase is adjusted to the next measurement target part (S8), and steps S4 to S4 to. The process of step S7 is repeated. If it is determined in step S7 that there is no next measurement target portion, it is determined that all the measurements have been completed,
The final results are displayed together with the acquired data temporarily stored in step S6 (S9). Then, a report is created based on these final results (S10).

According to the second embodiment, since the wide-angle image pickup unit 19 can obtain a wide-range image, it is possible to simultaneously view the small area in the image from the image pickup unit 14 and the wide-angle image from the wide-angle image pickup unit 19. Therefore, the position of the measurement target portion in the imaging unit 14 can be roughly adjusted.

Next, a third embodiment of the present invention will be described. FIG. 6 is a configuration diagram of a vibration measuring device according to a third embodiment of the present invention. In the third embodiment, distance measuring units 21a and 21b for measuring the distance to the measurement target portion are added to the second embodiment shown in FIG. The resolution is calculated based on the distances measured by the measuring units 21a and 21b, and vibration analysis is performed.

In FIG. 6, a distance measuring unit 21a and a distance measuring unit 21b emit visible light such as a laser marker, and the wide-angle image pickup unit 1 mounted on the optical unit 13 is provided.
The distance measuring unit 21a is arranged above the optical unit 9 and the optical unit 13
The distance measuring unit 21b is arranged in the lower part of. And FIG.
As shown in (a), the optical axis of the distance measuring unit 21a and the optical axis of the distance measuring unit 21b are aligned in parallel, and the imaging unit 14
It is aligned in parallel with the optical axis of the wide-angle imaging unit 19.

The laser markers aligned in parallel have a constant distance from each other no matter how far they are apart from each other.
4 or the wide-angle imaging unit 5 captures an image. Since the pixel interval between the two laser markers in the image captured as the distance increases is inversely proportional to the distance to the measurement target, it is possible to calculate the distance by creating a relational expression in advance. . As a result, the distance to the remote measurement target is measured without contact.

Here, when measuring small-diameter pipes that are often found in nuclear power plants and general plants, distance measuring units 21a and 21b are arranged in the pipe arrangement direction. this is,
Distance measuring parts 21a, 21b in the direction perpendicular to the pipe arrangement direction
This is because the laser marker may be radiated to a position different from the measurement target portion when the piping is small in the case of arranging.

In the distance measuring unit 21 using the laser marker, the error is likely to increase as the distance increases, so that the measurement is performed a plurality of times and the average thereof is taken in order to improve the accuracy.

As the distance measuring unit 21, a laser range finder or an ultrasonic range finder is used as shown in FIG. 7B without using a plurality of visible rays such as a laser marker. Therefore, the distance may be measured.

In the data processing unit 16, it is possible to properly align the two optical axes of the image pickup unit 14 and the wide-angle image pickup unit 2 on the basis of the distance to the object to be measured obtained by the distance measuring unit 21, and it is acquired. It is also possible to convert the actual size of the image.

Further, the resolution of the vibration analysis is expressed as a function of the density (Px · Py) of the image element of the image pickup section 14 and the angle of view and the distance, as shown in the following equation, and therefore the resolution can be calculated. .

[0052]

[Equation 2] In this way, the distance to the measurement target portion acts as a factor that directly affects the resolution, so that the resolution can be made an absolute value depending on the distance.

Next, the operation will be described. FIG. 8 is a flowchart showing the operation of the vibration measuring device according to the third embodiment. First, a wide-angle image is captured by the wide-angle imaging unit 19 (S1), and a measurement target portion is extracted from the wide-angle image (S2). Extraction of this measurement target part, if some marker is installed in the measurement target part of the vibration measurement target,
The measurement target portion is detected by detecting the coordinates of the point on the marker. If no marker is installed, the measurement target portion is extracted by pattern matching.

The angle of view of the image pickup section 14 is adjusted with respect to the first measurement target portion extracted in step S2 (S3), and the image of the measurement target portion is read. Then, the distance measuring unit 21 measures the distance to the measurement target unit (S4) and stores it in the data processing unit 16.

Next, the images of the measurement object are captured in time series (S5). The captured time series images are the image input unit 15
The data is input to the data processing unit 16 via and the vibration analysis is performed (S6). In step S6, image processing and FFT
By the processing, it is determined whether or not vibration is occurring in the measurement target portion. At this time, the resolution is calculated based on the distance obtained in step S4 and vibration analysis is performed.

The vibration analysis result in step S6 is temporarily stored as acquired data (S7). Then, it is determined whether or not there is the next measurement target portion (S8), and if there is the next measurement target portion, the painter phrase is adjusted to the next measurement target portion (S8), and steps S4 to S4. The process of step S8 is repeated. If it is determined in step S8 that there is no next measurement target portion, it is determined that all the measurements have been completed,
The final result is displayed together with the acquired data temporarily stored in step S7 (S10). Then, a report is created based on these final results (S11).

According to the third embodiment, in addition to the effect of the second embodiment, since the distance of the vibration measurement object to the measurement object portion can be measured, the resolution of the acquired image can be expressed in absolute value. Can be provided.

Next, a fourth embodiment of the present invention will be described. FIG. 9 is an external configuration diagram of a vibration measuring device according to a fourth embodiment of the present invention. The fourth embodiment is shown in FIG.
The optical axis control mechanism sections 22a, 22b, 22c for adjusting the optical axes of the imaging section 14 and the wide-angle imaging section 19 and the focus of the optical section 13 are added to the third embodiment shown in FIG. is there. In FIG. 9, the image input unit 15 and the wide-angle image input unit 2
0, the data processing unit 16 is not shown.

In FIG. 9, the image pickup section 14, the wide-angle image pickup section 19, and the distance measuring sections 21a and 21b whose optical axes are aligned in parallel are all mounted on the optical axis control mechanism section 22a.
The optical axis control mechanism section 22a is provided on the optical axis control mechanism section 22a.
An optical axis control mechanism portion 22b is provided in the vertical direction, and an optical axis control mechanism portion 22c is mounted so as to be in contact with the focusing knob of the optical portion 13.

The optical axis control mechanism section 22a is used for horizontal alignment, and the optical axis control mechanism section 22 is used for vertical alignment.
b) Focusing is performed by adjusting the optical axis control mechanism 22c. Also, all of these optical axis control mechanisms 2
2a, 22b and 22c are connected to these optical axis control mechanism parts 22a,
The optical axis control mechanism section 22b and the optical axis control mechanism section 22c are configured by using a motor-driven automatic rotation stage and the like, and when the control of the motor is performed by a command from the data processing acknowledgement 16, remote operation becomes possible. Become. This enables remote measurement even in high temperature, high pressure, and high dose fields where people cannot enter for a long time.

Next, a method of adjusting the focus by the optical axis control mechanism section 22c will be described. First, the optical axis control mechanism unit 22c acquires a plurality of images at regular intervals. An image that is out of focus has no contrast, so there is almost no difference in brightness between adjacent pixels, so the image with the highest contrast among multiple images, that is, the difference in brightness between adjacent pixels is the largest. It is determined that the image is in focus, and the optical axis control mechanism unit 2 is placed at the position where the image is acquired.
This is done by combining 2c again. In addition, a relational expression between the distance to the measurement target portion and the number of rotations of the optical axis control mechanism portion 22c is calculated in advance, so that an approximate focus is achieved and a plurality of images are acquired around it at a smaller interval than before. It is possible to speed up by doing.

According to the fourth embodiment, the posture (optical axis) and the focus of the vibration measuring device can be controlled by the optical axis control mechanisms 22a, 22b and 22c.
The optical axis and focus can be easily adjusted. That is, since the optical axis and the focus can be easily changed, it is possible to easily remotely perform the vibration measurement of the measurement target portion at the position where the distance and the direction are different. When the optical axis control mechanisms 22a, 22b, 22c are driven by motors so that they can be driven by a command from the data processing device 16, it is possible to measure vibrations at high temperature, high pressure, and high dose field.

Next explained is the fifth embodiment of the invention. FIG. 10 is an external configuration diagram of a vibration measuring device according to a fifth embodiment of the present invention. The fifth embodiment is different from the fourth embodiment shown in FIG. 9 in that the vibration measuring device 17
That is, the self-vibration detection unit 23 that detects the vibration of the optical unit 13, the imaging unit 14, or the wide-angle imaging unit 19 itself is additionally provided, and the data processing unit 16 takes the vibration detected by the self-vibration detection unit 23 into consideration. Then, the vibration analysis is performed.

FIG. 10 shows a case where a vibrometer capable of measuring horizontal vibration is used as the self-vibration detecting section 23. The method of correcting the natural vibration of the building from the data obtained by measuring it in advance can be corrected only off-line, and therefore it is corrected in real time using a general-purpose vibrometer.

The measurement data of the vibration measurement target at the measurement point of the measurement target portion is stored as a waveform, and the measurement data obtained by the self-vibration detection unit 23 is also stored as a waveform.
By taking the difference between these two waveforms, the corrected waveform can be obtained.

According to the fifth embodiment, since the vibration of the vibration measuring device itself can be measured and the measurement data of the measurement object portion can be corrected, the vibration of the vibration measurement object with higher accuracy can be detected. can do.

Next, a sixth embodiment of the present invention will be described. FIG. 11 is a configuration diagram of a vibration measuring device according to a sixth embodiment of the present invention. In the sixth embodiment, an optical axis conversion unit 24 for changing the optical axis of the image pickup unit 14 is added to the first embodiment shown in FIG. 1, and the optical axis conversion unit 24 is provided. By rotating, it is possible to measure the vibration in the measurement target portion at a plurality of points. The same elements as those of the first embodiment shown in FIG. 1 are designated by the same reference numerals, and duplicate description will be omitted.

FIG. 9 shows a case where a double-sided mirror is rotated in the one-dimensional direction as the optical axis converter 24. When the optical axis conversion unit 24 arranged in this way is rotated around the rotation axis at a constant speed, it is possible to acquire data at a plurality of positions from the lower direction to the upper direction of the optical axis. 24
By dividing the data for each rotation angle, it is possible to create time-series data for each measurement point. When measuring low-frequency vibrations at multiple points, using a high-speed camera or line camera with a high sampling rate will result in obtaining more data than necessary. Therefore, the measurement time can be shortened by collecting the measurement at multiple points and using the same time. As the optical axis converter 24, a material such as a prism that can convert the optical axis may be used in addition to the mirror.

According to the sixth embodiment, it is possible to measure a plurality of points on the same measuring object. Moreover, since the drive unit is only the drive unit that rotates the optical axis conversion unit 24, the size of the drive unit can be reduced.

Next, a template used in the pattern matching process for specifying the measurement target portion will be described.
In the present invention, a template capable of pattern matching using a vector image is created in advance.

FIG. 12 shows a section 25 selected from the image when the template of the pipe as the vibration measurement object is created. If an attempt is made to create a template for the area of this section 25 by using the line difference extraction method using the brightness difference, two straight lines will be obtained in the vertical direction, but the probability of erroneous detection is very high because the amount of information in the template is small. . Therefore, the pixel of interest in the area is compared with the surrounding pixel components, and the result is displayed as a rotation vector as shown in FIG. As a result, the template as shown in FIG. 13 can be obtained. When this template is used, a straight line part consisting of a flat surface such as a place where the paint color on the wall is changed is not selected, and a gradation is generated in the brightness change peculiar to a curved surface such as piping. Can be created, and using this makes it possible to detect the measurement point that is being obtained with high probability.

The method described in each of the above-described embodiments is stored in a storage medium as a program that can be executed by a computer and applied to each device, or transmitted by a communication medium and applied to various devices. It is also possible.

The storage medium in the present invention is a magnetic disk, a flexible disk, an optical disk (CD-R).
OM, CD-R, DVD, etc., magneto-optical disk (MO
Etc.), a semiconductor memory, and the like, and the storage format may be any form as long as the storage medium can store the program and is readable by a computer. In addition, the storage medium is not limited to a medium independent of a computer, but includes a storage medium in which a program transmitted via a LAN or the Internet is downloaded and stored or temporarily stored.

[0074]

As described above, according to the present invention,
Since a time-series image is acquired and the image or a part thereof is cut out to detect the presence or absence of vibration and digitize it, it is possible to obtain the vibration measurement result without contacting the vibration measurement target. Further, when the wide-angle imaging unit is provided, a wide-range image can be acquired, so that the position of the measurement target portion can be roughly adjusted.

Further, when the distance measuring section is provided, the distance to the measurement object can be measured, so that the resolution of the image as a function of the distance can be provided as an absolute value. When the optical axis control mechanism unit is provided, it becomes possible to control the posture and focus of the vibration measuring device itself, and it is possible to remotely provide vibration measurement of the measurement target unit at a plurality of locations with different distances and directions. it can.
Furthermore, if the optical axis control mechanism can be operated remotely, facilities with poor measurement environment, such as high temperature, high places,
Measurement is possible even in high dose areas.

When a self-vibration detector is provided,
Since the vibration of the vibration measuring device itself can be measured, the measurement data of the measurement target portion can be corrected. When the optical axis converter is provided, it is possible to measure a plurality of measurement target parts at one time. Further, since the vector image template is used, the desired measurement target portion can be detected with high probability.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a vibration measuring device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a case where the vibration measuring apparatus according to the first embodiment of the present invention detects vibration of a plant pipe.

FIG. 3 is an explanatory diagram of a time series image of a measurement target portion of the vibration measurement target according to the first embodiment of the present invention.

FIG. 4 is a configuration diagram of a vibration measuring device according to a second embodiment of the present invention.

FIG. 5 is a flowchart showing an operation of the vibration measuring device according to the second embodiment of the present invention.

FIG. 6 is a configuration diagram of a vibration measuring device according to a third embodiment of the present invention.

FIG. 7 is an explanatory diagram of an arrangement of a distance measuring unit of a vibration measuring device according to a third embodiment of the present invention.

FIG. 8 is a flowchart showing an operation of the vibration measuring device according to the third embodiment of the present invention.

FIG. 9 is an external configuration diagram of a vibration measuring device according to a fourth embodiment of the present invention.

FIG. 10 is an external configuration diagram of a vibration measuring device according to a fifth embodiment of the present invention.

FIG. 11 is a configuration diagram of a vibration measuring device according to a sixth embodiment of the present invention.

FIG. 12 is an explanatory diagram of sections in an image when creating a template of the present invention.

FIG. 13 is an explanatory diagram of a template of a measurement target portion using a vector image of the present invention.

FIG. 14 is a configuration diagram of a conventional piezoelectric vibration sensor.

[Explanation of symbols]

11 ... Piezoelectric element, 12 ... Mass, 13 ... Optical section, 14 ... Imaging section, 15 ... Image input section, 16 ... Data processing section, 17 ...
Vibration measuring device, 18 ... Piping, 19 ... Wide-angle image part, 20 ...
Wide-angle image input section, 21 ... Distance measuring section, 22 ... Optical axis converting section, 23 ... Self-vibration detecting section, 24 ... Optical axis converting section, 25 ...
Section

Continued front page    (72) Inventor Katsumi Kubo             8th Shinsugita Town, Isogo Ward, Yokohama City, Kanagawa Prefecture             Ceremony company Toshiba Yokohama office (72) Inventor Masatake Sakuma             8th Shinsugita Town, Isogo Ward, Yokohama City, Kanagawa Prefecture             Ceremony company Toshiba Yokohama office (72) Inventor Yoshihiko Ubara             8th Shinsugita Town, Isogo Ward, Yokohama City, Kanagawa Prefecture             Ceremony company Toshiba Yokohama office (72) Inventor Takashi Enka             66-2 Horikawa-cho, Saiwai-ku, Kawasaki-shi, Kanagawa Prefecture             Engineering Co., Ltd. F term (reference) 2G064 AA02 AA04 AB07 BA02 BC01                       BC24 CC29 CC46                 5L096 BA03 CA02 HA03

Claims (8)

[Claims] 1. An optical unit for enlarging or reducing an image of a measurement target portion of a vibration measurement target, an image capturing unit for capturing images of the measurement target unit in time series via the optical unit, and the image capturing unit. An image input unit that inputs a time-series image of the captured measurement target unit, and a data processing unit that performs vibration analysis of the measurement target unit based on the time-series image of the measurement target unit input by the image input unit are provided. A vibration measuring device characterized in that 2. A wide-angle image pickup section for photographing the measurement target section in a wide range, and an image input section for inputting an image photographed by the wide-angle image pickup section, wherein the data processing section is photographed by the wide-angle image pickup section. The vibration measuring device according to claim 1, wherein the position of the measurement target portion is specified based on a wide-angle image. 3. A distance measuring unit that measures a distance to the measurement target unit, wherein the data processing unit calculates a resolution based on the distance measured by the distance measuring unit and performs vibration analysis. The vibration measuring device according to claim 1 or 2. 4. The optical axis control mechanism section for adjusting the optical axis of the image pickup section or the wide-angle image pickup section and the focus of the optical section is provided. The vibration measuring device described in. 5. The vibration measuring device according to claim 1, further comprising an optical axis conversion unit that changes an optical axis of the image pickup unit. 6. A self-vibration detection unit that detects vibration of the optical unit, the imaging unit, or the wide-angle imaging unit itself, wherein the data processing unit vibrates in consideration of the vibration detected by the self-vibration detection unit. The vibration measuring device according to any one of claims 1 to 5, wherein analysis is performed. 7. The data processing section uses pattern matching using a vector image when specifying the measurement target section, according to claim 1. Vibration measuring device. 8. A computer for reading an image of a measurement target portion of a vibration measurement object as a time-series image, a means for performing a vibration analysis based on the read time-series image, and a means for displaying and outputting a vibration analysis result. A storage medium storing a program for performing the functions described above.