JP2003144891A - Magnetic drive unit, agitating apparatus, mixing apparatus and substrate processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic drive unit in which thrust decreases with increase of driving force. SOLUTION: The magnetic drive unit comprises a driving magnet 11 and a driven magnet 12 both having almost same shape, and has a solid surrounded by opposite surfaces almost parallel to each other and circumferential side surfaces to cover an outer circumference between the opposite surfaces. The whole area of one surface of the circumferential side surface is made into a magnetic pole of one pole, and the whole area of the other surface being the surface opposite to the one surface of the circumferential side surface is made into the magnetic pole of the other pole. The opposite surface of the driving magnet 11 and the driven magnet 12 and almost parallelized, and the driving magnet 11 and the driven magnet 12 are provided face to face so that the central extended line 13 passing in common through the center of the almost parallel opposite surfaces of the driving magnet 11 coincides with the central extended line 13 passing in common through the center of the almost parallel opposite surfaces of the driven magnet.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic drive device, a stirring device, a mixing device and a substrate processing device.

[0002]

2. Description of the Related Art Conventionally, a U-shaped magnet arranged to face a stirrer is rotated, and the stirrer is rotated only by a suction action between the opposite poles of the two. It has been known.

The mechanism will be described with reference to FIG. 12. A rod-shaped stirrer 112 is arranged in a container 114 for containing the liquid 115, and a U-shaped magnet 111 is arranged opposite to the bottom wall outside the container 114 to drive a drive motor. The U-shaped magnet 111 is rotated by 113 to rotate the stirring bar 112.

There is also a magnetic rotation transmission device called a magnetic coupling, which includes a radial type and an axial type.

[0005]

In the conventional magnetic stirrer described above, the magnetic stirrer 112 and the U-shaped magnet 111 rotate the magnetic stirrer 112. Therefore, there is a problem that the transmission torque is small and the stirring bar 112 is easily detached. Moreover, the diameter of the magnetic flux is relatively small.

However, in order to meet the demand for improving the stirring ability, the stirring bar 112 and the opposing U-shaped magnet 11 are provided.
The magnetic force of No. 1 is strengthened and only the attraction force between the different poles is increased to improve the rotating ability of the stirring bar 112.

However, if an attempt is made to increase the attractive force only between the different poles, the load in the thrust direction will increase.

The increase of the load in the thrust direction of the drive motor 113 causes loss of rotational torque and wear of the bearing. Further, due to an increase in friction of the rotating contact portion of the stirrer 112, a rotational torque loss may occur, or
Wear on the rotating contact part of the stirrer 11
The noise may increase due to the frictional noise of the second rotary contact portion. In particular, when the rotating contact portion of the stirrer 112 is worn, the abrasion powder is mixed with the liquid in the container, which is not preferable.

On the other hand, in the above-mentioned magnetic coupling, the radial type has an advantage that a thrust force is not applied as compared with the axial type, but has a drawback that the partition wall has a complicated shape. On the other hand, the axial type has a simpler structure than the radial type and the axial length can be shortened,
Although it has an advantage that the shape of the partition wall can be simplified, it has a drawback that thrust force acts on the bearing portion and it is proportional to the magnetic force.

Although the magnetic rotation transmission device according to Japanese Patent No. 2678569 reduces thrust, it has not yet reached negative thrust.

The above-mentioned problem is not limited to magnetic stirrers, but is common to magnetic drive devices in general, and thrust increases as the driving force increases.

An object of the present invention is to solve the above-mentioned drawbacks of the prior art, and to provide a magnetic drive device, a stirring device, a mixing device, and a substrate processing device having characteristics that thrust is reduced with an increase in driving force. It is in.

[0013]

According to a first aspect of the invention for solving the above-mentioned problems, one magnet is a driving magnet and the other magnet is a driven magnet, and the driving magnet and the driven magnet are magnetized in a non-contact manner. In a magnetic drive device that drives the driven magnet to follow the movement of the driving magnet.
The drive magnet and the driven magnet are formed in substantially the same shape,
It has a solid body surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces. One surface of the peripheral side surface is a magnetic pole of one pole, and is opposite to the peripheral side surface. Is a double-sided two-pole magnet having the other surface as the magnetic pole of the other pole, and the facing surfaces of the driving magnet and the driven magnet are substantially parallel to each other, and the driving magnet is substantially parallel to each other. The drive magnet and the driven magnet are provided so as to face each other such that a central extension line that commonly passes through the centers of the facing surfaces and a central extension line that commonly passes through the centers of the substantially parallel facing surfaces of the driven magnet coincide with each other. , By moving the drive magnet in a direction intersecting a central extension line of the drive magnet, the movement is transmitted to the driven magnet by a magnetic force generated between the magnetic pole of the drive magnet and the magnetic pole of the driven magnet. The magnetic drive device is characterized by the above.

According to a second aspect of the present invention, a drive rotating body that rotates about a rotating shaft and a driven rotating body that is provided so as to face the drive rotating body and rotates about an extension line of the rotating shaft of the drive rotating body as a rotating shaft. A body, and at least three drive magnets provided on the surface of the drive rotor, which faces the driven rotor, at equal intervals on the circumference of a virtual circle drawn around the rotation axis of the drive rotor. , On the surface of the driven rotating body facing the drive rotating body, on the circumference of a virtual circle drawn around the rotation axis of the driven rotating body corresponding to the virtual circle drawn on the drive rotating body. In a magnetic drive device including the same number of driven magnets and equal number of driven magnets provided at equal intervals, the driving magnets and the driven magnets are formed in substantially the same shape, and facing surfaces parallel to each other and between the facing surfaces. It has a solid body surrounded by the side surface that covers the outer circumference of One side of the magnetic pole is a magnetic pole of one pole, and the other side of the peripheral side surface is the magnetic pole of the other pole. Make the facing surfaces of the magnets substantially parallel to each other,
And a central extension line passing through the center of the facing surface of the drive magnet,
The drive magnet and the driven magnet are attached to the drive rotor and the driven rotor, respectively, so that a central extension line passing through the center of the facing surface of the driven magnet is parallel to the drive rotor and the drive rotor. The magnetic drive device rotates the driven rotor around the rotation axis of the driven rotor by the magnetic force of the drive magnet and the driven magnet.

According to a third aspect of the present invention, in a magnetic drive device in which a driven magnet is provided, and the driven magnet is driven in accordance with the movement of the driving magnet, thereby causing the driven moving body to travel. The driven magnet has a substantially three-dimensional shape, and is a three-dimensional body surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces. And a driven magnet provided on the driven moving body, the driven magnet being configured as The opposing surfaces are substantially parallel to the magnet and commonly pass through the center of the substantially parallel opposing surfaces of the driven magnet with respect to a central extension line that commonly passes through the centers of the substantially parallel opposing surfaces of the drive magnet. Arranged so that the central extension lines are parallel When the drive magnet is moved in a direction intersecting the center extension line of the drive magnet, the driven moving body travels on an arbitrary orbit by the magnetic force of the drive magnet and the driven magnet. It is a drive device.

A fourth invention is a stirring device in which the magnetic drive device according to the second invention is used as a means for stirring the liquid in the stirring tank, and the driven rotary body constituting the magnetic drive device. A support shaft provided in the agitation tank, and an insertion hole for rotatably supporting the driven rotor around the support shaft, and the liquid is agitated by rotation of the driven rotor. And a stirring blade for each of them, and when the driven rotary body is pivotally supported on the support shaft, the drive rotary body constituting the magnetic drive device faces the drive rotary body via the tank wall of the stirring tank. As described above, the stirring device is arranged outside the stirring tank, and the driven rotating body rotates about the support shaft by the rotation of the rotation driving body.

A fifth aspect of the present invention is the agitator according to the fourth aspect of the present invention, wherein the stirring device has a predetermined number of liquid supply ports for introducing liquids to be mixed and liquid discharge ports for discharging the liquids after the mixing process. The mixing device is used in the stirring tank as a means for controlling the mixing state of the liquid in the stirring tank.

According to a sixth aspect of the present invention, a vacuum container for processing a substrate, a substrate holder that is rotatably provided in the vacuum container about a vertical rotation axis to hold the substrate, and from above the vertical rotation axis. A rotation drive unit that applies a rotational force to the vertical rotation shaft to rotate the substrate holding body, and a swing of the vertical rotation shaft while floating the substrate holding body from below the substrate holding body against its gravity. In a substrate processing apparatus having a shaft runout preventing mechanism, the magnetic drive device according to the second invention is used as the drive rotation part, and the magnetic rotary device of the driven rotary body constituting the magnetic drive device is provided with the magnetic drive device. By connecting a vertical rotary shaft, the driven rotary body is connected to the substrate holder via the vertical rotary shaft, and the drive rotary body forming the magnetic drive device is connected via the upper wall of the vacuum container. Opposite the rotary follower As described above, the substrate holder is arranged outside the vacuum container, and the substrate holder is rotated about the vertical rotation axis via the driven rotor by the rotation of the drive rotor, and the shaft shake preventing mechanism is provided. A superconducting conductor provided on the substrate holder, and a superconductor provided outside the vacuum container so as to face the levitation magnet via a bottom wall of the vacuum container. By cooling below the critical temperature, the vertical rotation shaft is pinned by the pinning effect while the substrate holder is levitated in the vacuum container by the Meissner effect of the superconductor and the levitation magnet. Is a substrate processing apparatus.

A seventh aspect of the present invention is a closed stirring tank for containing a liquid to be stirred, a stirring blade rotatably provided in the stirring tank about a vertical rotation shaft for stirring the liquid, and the vertical stirring tank. A rotary drive unit for rotating the stirring blade by applying a rotational force to the vertical rotation shaft from above the rotation shaft, and the vertical rotation shaft while floating the stirring blade against the gravity from below the stirring blade. In a stirring device provided with a shaft runout preventing mechanism for preventing runout of the magnetic disk, the magnetic drive device according to the second invention is used as the rotary drive part, and the magnetic drive device is used as a rotary shaft of a driven rotary body. By connecting the vertical rotary shaft, the driven rotary body is connected to the stirring blade via the vertical rotary shaft, and the drive rotary body forming the magnetic drive device is connected via the upper wall of the stirring tank. The agitator is placed so that it faces the rotary follower. The stirring blade is arranged outside the tank, and the stirring blade is rotated about the vertical rotation shaft via the driven rotating body by the rotation of the driving rotating body. A levitating magnet installed in
A superconductor provided outside the stirring tank so as to face the levitation magnet through the bottom wall of the stirring tank,
By cooling the superconductor below the superconducting critical temperature, the vertical rotating shaft is pinned by the pinning effect while the stirring blade is levitated in the stirring tank by the Meissner effect of the superconductor and the levitation magnet. The stirring device is characterized in that.

An eighth aspect of the present invention is a stirring tank for containing a liquid to be stirred, a stirring blade rotatably provided below the stirring tank, a rotary drive unit for rotating the stirring blade, and the stirring blade. And a shaft shake preventing mechanism for preventing the shake of the rotation center of the stirring blade while levitating against the gravity, and the magnetic drive device according to the second invention is used as the rotation drive unit. The stirring blade is attached to one driven rotary body that constitutes the magnetic drive device, and the other drive rotary body that constitutes the magnetic drive device faces the rotary driven body via the bottom wall of the stirring tank. As described above, the stirring blade is arranged outside the stirring tank, and the stirring blade is rotated about the rotation axis of the driven rotating body through the driven rotating body by the rotation of the driving rotating body. The prevention mechanism is the driven rotor. A levitation magnet provided at the center of rotation, and a superconductor provided so as to face the levitation magnet at the center of rotation of the drive rotor arranged outside the stirring tank, the superconductor being provided. By cooling to below the superconducting critical temperature, the stirring blade is floated in the stirring tank by the Meissner effect of the superconductor and the levitation magnet, and the rotation center is pinned by the pinning effect. It is a characteristic stirring device.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a magnetic drive device according to the present invention will be described below with reference to the drawings. FIG. 1 is a principle explanatory diagram of a magnetic drive device configured by combining two magnets according to the present embodiment. For convenience of description, the magnetic drive device will be referred to as a a) is homopolar orthogonal type, (b) is heteropolar orthogonal type, (c) is homopolar parallel type,
(D) will be referred to as a parallel-parallel type. In the figure, (a) shows a plan view and (b) shows a front view.

The magnetic drive devices shown in (a) to (c) above have the following common structure. The magnetic drive device is composed of two permanent magnets. The two permanent magnets are vertically stacked with their magnetic poles directed in a specific direction. The overlapping direction may be left, right, diagonal, or the like. Also,
The combination of the orientations of the upper and lower permanent magnets is 4 as described above.
There are types ((a) to (c)). The direction will be described later.

The lower magnet is the driving magnet 11 on the driving side,
The upper magnet is the driven magnet 12 on the driven side. Drive magnet 1
1 and the driven magnet 12 are magnetically coupled in a non-contact manner with an appropriate gap, and the driven magnet 12 is driven in the same direction by moving the drive magnet 11 in the arrow direction C parallel to the paper surface. There is.

The drive magnet 11 and the driven magnet 12 are formed in substantially the same three-dimensional shape, for example, a rectangular parallelepiped. The rectangular parallelepiped drive magnet 11 and the driven magnet 12 are stacked with their longitudinal directions oriented horizontally. In the rectangular parallelepiped, opposed surfaces that are substantially parallel to each other are upper and lower surfaces 11a and 11b and 12a and 12b. Further, the peripheral side surfaces that cover the outer periphery between the upper and lower surfaces 11a and 11b and 12a and 12b are two side surfaces 11c parallel to the longitudinal direction.
11d and 12c, 12d and 2 parallel to the lateral direction
The entire surface of one side surface 12c, which is one surface parallel to the longitudinal direction, which is a total of four side surfaces including the side surface, is a magnetic pole N of one pole. 1
The entire surface of the other surface 12d, which is the surface opposite to the side surface 12c, is the magnetic pole S of the other pole. The driving magnet 11 and the driven magnet 12 are each composed of such a double-sided two-pole magnet.

The upper surface 11a of the drive magnet 11 and the driven magnet 12
A lower surface 12b of the drive magnet 11 and a central extension line 13 that passes through the centers of the upper and lower surfaces 11a and 11b of the drive magnet 11 in common.
And the drive magnet 11 so that the center extension line 13 that passes through the centers of the upper and lower surfaces 12a and 12b of the driven magnet 12 in common.
And the driven magnet 12 are provided so as to face each other.

Then, the drive magnet 11 is moved in a direction intersecting the central extension line 13 of the drive magnet 11, for example, in the above-mentioned arrow direction C, so that the drive magnet 11 and the driven magnet 12 can be driven while maintaining their orientations. The magnetic force generated between the magnetic pole NS of the magnet 11 and the magnetic pole NS of the driven magnet 12 transmits the movement in the same direction to the driven magnet 12.

Further, the magnetic drive devices shown in the above (a) and (b) have different configurations as follows. The homopolar and orthogonal type shown in FIG.
And the driven magnet 12 are orthogonal to each other, and the drive magnet 11 is orthogonal to each other.
The magnetic poles NS of the driven magnet 12 are arranged so as to face the same side in plan view. Therefore, when the driving magnet 11 and the driven magnet 12 are superposed so that the driving magnet 11 and the driven magnet 12 are orthogonal to each other and have the same direction, the driving magnet 11 and the driven magnet 12 have the same polarity.
It means that the opposite magnetic poles of are the same poles.

The heteropolar orthogonal type of (b) means that the driving magnet 11 and the driven magnet 12 are orthogonal to each other, but the magnetic poles NS of the driving magnet 11 and the driven magnet 12 which are orthogonal to each other are opposite in plan view. They are arranged in different directions on the side. Therefore, when the drive magnet 11 and the driven magnet 12 are superposed so that the drive magnet 11 and the driven magnet 12 are orthogonal to each other and are aligned in the same direction, the opposite poles of the drive magnet 11 and the driven magnet 12 are different poles. Means that. In the illustrated example (b), the lower driven magnet 11 with respect to the upper driven magnet 12 in FIG.
Can be realized by rotating 180 degrees around the center extension line 13.

(C) homopolar parallel type means drive magnet 1
1 and the driven magnet 12 are aligned in the longitudinal direction (short direction), and the respective magnetic poles N of the drive magnet 11 and the driven magnet 12 are aligned.
S is arranged so as to face the same side in a plan view. That is, the driving magnet 11 and the driven magnet 12 are arranged in parallel with the same pole. In a plan view (a), the drive magnet 11
Is hidden by the driven magnet 12 and disappears.

The meaning of the different polarity parallel type of (d) means the drive magnet 1
1 and the driven magnet 12 are aligned in the longitudinal direction (short direction), but the matched magnetic poles NS of the drive magnet 11 and the driven magnet 12 are arranged in different directions on the opposite sides in a plan view. is there. That is, the drive magnet 11 and the driven magnet 12 are arranged in parallel with different polarities. Plan view (I)
The drive magnet 11 is hidden by the driven magnet 12 and is invisible. The directions of the magnetic poles NS of the above combination are not limited to the illustrated example, and the magnetic poles NS may be replaced in units of groups.

In the magnetic drive device having four kinds of combinations depending on the arrangement of the magnets 11 and 12, the drive magnet 11 is moved in a direction intersecting with the central extension line 13 of the drive magnet 11, for example, the above-mentioned arrow direction C. By doing so, movement in the same direction is transmitted to the driven magnet 12 by the magnetic force generated between the magnetic pole NS of the drive magnet 11 and the magnetic pole NS of the driven magnet 12 while maintaining the orientations of the drive magnet 11 and the driven magnet 12. Drive magnet 1 here
In the direction intersecting the central extension line 13 of 1, the central extension line 1
3, a direction orthogonal to 3, a direction obliquely intersecting with the central extension line 13, a combination direction of these, and the like are included. However, the rotation direction about the center extension line 13, the same direction overlapping with the center extension line 13, and the direction parallel to the center extension line 13 are not included. Further, in addition to moving while holding the states of (a) to (d) respectively, in one scene, in the state of (a), in another scene in the state of (b), and in the next scene, (c). It is also possible to use a combination of different states, such as the state of (d) in different situations.

The drive magnet 11 of the above magnetic drive device is
When the driven magnet 12 is moved in a direction orthogonal to the central extension line 13, the driven magnet 12 shifts in the horizontal direction. At this time, the lines of magnetic force also shift in the direction in which the driven magnet exists, that is, in the horizontal direction,
The horizontal component of the magnetic field line becomes large and the vertical component becomes small. That is, the attractive force in the driving direction becomes large, and the attractive force in the vertical direction becomes small. Therefore, the moving force of the driven magnet 12 increases, and the thrust of the driven magnet 12 with respect to the drive magnet 11 decreases.

The characteristics of the magnetic drive device having the above-mentioned four types of combinations will be described below. The common characteristic is that when the displacement amount 15 of the driven magnet 12 from the drive magnet 11 increases, the moving force of the driven magnet 12 increases and the thrust decreases instead of increasing. Here, the shift amount is a delay amount or a lead amount of the driven magnet 12 with respect to the drive magnet L11, although the driven magnet 12 causes a movement delay or a movement advance when the drive magnet 11 is moved in the arrow C direction. In the figure, reference numeral 11e indicated by a chain double-dashed line indicates the drive magnet after the movement.

The individual characteristics are roughly as follows, referring to FIG. 9 described later. The homopolar orthogonal type of (a) has a characteristic that both the moving force and the thrust increase and decrease at a relatively low rate as the shift amount increases. Movement will not be that great. In addition, the reduction range of thrust is small. In the heteropolar orthogonal type of (b), there is a region where the thrust becomes negative when the deviation amount reaches near the peak. In the homopolar parallel type of (c), the moving force increases linearly with the increase of the shift amount, but the thrust reduction rate is relatively smaller than the increasing rate of the moving force. Thrust cannot be negative. The distance that the magnetic force between the drive magnet 11 and the driven magnet 12 reaches is the largest. In the heteropolar parallel type of (d), the moving force sharply increases while the displacement amount is small, but the absolute value of the thrust remains relatively large. The range of magnetic force is the smallest.

Although the above-mentioned characteristics and the reason why the characteristics differ from each other are not always clear, the drive magnet 11 is assumed to have the central extension line 13 inferred from the characteristics of the moving force and the thrust described above.
When moving in the direction intersecting with, the central extension line 1 of the magnetic field line
It is considered that this is because the component orthogonal to 3 increased and the component parallel to the central extension line 13 decreased. It is also considered that four poles coexist on the left and right sides of the facing surface of the double-sided two-pole magnet, and a repulsive action occurs simultaneously with the attraction action.

The magnetic drive device moves the drive magnet 11 in a direction intersecting the central extension line 13
It is sufficient that the driven magnet 12 can move. Therefore, the respective magnets do not have to have the exact same shape and need not have a strict cubic shape. Furthermore, the central extension lines 13 do not have to be completely aligned. The size of the appropriate gap provided between the driving magnet upper surface 11a and the driven magnet lower surface 12b is within a range in which the magnetic force between the magnets is exerted when the driving magnet 11 is moved. Good.

Next, a first embodiment in which the above magnetic drive device is applied to a rotary magnetic drive device will be described with reference to FIG.
In this rotary magnetic drive device, four sets of the magnetic drive device, which is composed of one set of magnets described in FIG. 1, are concentrically assembled on the upper and lower rotating bodies. The rotating body is composed of a disk.

FIG. 2 shows a plan view of the rotary magnetic drive device.
From the way of combining and arranging the magnets, as in FIG. 1,
(A) is referred to as homopolar orthogonal type, (b) is referred to as heteropolar orthogonal type, (c) is referred to as homopolar parallel type, and (d) is referred to as heteropolar parallel type. The rotary magnetic drive devices shown in (a) and (b) above have the following common configuration.

The rotary magnetic drive device comprises two rotary members 22,
23 is provided. The two rotating bodies are composed of, for example, discs having the same diameter, and are vertically stacked. Although not visible in the drawing, the lower rotating body is the driving rotating body 22 and the upper rotating body is the driven rotating body 23. The drive rotating body 22 rotates around the rotating shaft 21. The driven rotary body 23 provided so as to face the drive rotary body 22 has the rotary shaft 21 on an extension line of the rotary shaft 21 of the drive rotary body 22, that is, the axes coincide with each other. Rotate around.

On the upper surface of the drive rotor 22 facing the driven rotor 23, the four drive magnets 1 are equally spaced on the circumference of a virtual circle drawn around the rotation axis 21 of the drive rotor 22.
1 is attached. In addition, a virtual circle drawn on the lower surface of the driven rotary body 23 facing the drive rotary body 22 and corresponding to the virtual circle drawn on the drive rotary body 22 around the rotary shaft 21 of the driven rotary body 23. Driving magnets 22 are evenly spaced on the circumference
And the same number of driven magnets 12 are attached. The magnets 11 and 12 are attached to the rotating bodies 22 and 23 by screwing, fixing by welding or the like. The number of magnets 11 and 12 mounted on the rotating bodies 22 and 23 is four in the illustrated example, but is not limited to this. In order to stably support the driven rotary body 23 with respect to the drive rotary body 22, the number of the driven rotary bodies 23 should be at least three.

The drive magnet 22 and the driven magnet 23 are composed of the double-sided bipolar magnet described in FIG. That is,
Upper and lower surfaces 11a, 11 that are formed in substantially the same shape and are parallel to each other
b and 12a, 12b, and a rectangular parallelepiped surrounded by four side surfaces that cover the outer circumference between the upper and lower surfaces.
c, a double-sided two-pole type magnet having the entire surface as a magnetic pole N of one pole and the entire other side surface 12d opposite to the one side surface 12c as a magnetic pole S of the other pole (see FIG. 1).

The driving magnet 11 and the driven magnet 12 have their facing surfaces substantially parallel to each other, and the driving magnet 1
The central extension line passing through the center of the facing surface of 1 and the central extension line passing through the center of the facing surface of the driven magnet 12 are parallel to each other.
It is attached to each of the driving rotary body 22 and the driven rotary body 23. When the drive rotor 22 is rotated about the rotary shaft 21 of the drive rotor 22, the driven rotor 23 is driven by the magnetic force of the drive magnet 11 and the driven magnet 12.
It rotates centering on the rotating shaft 21 of.

Next, the magnetic drive device shown in FIGS. 2 (a) and 2 (b) has the following different structure. The different configurations are in the magnet arrangement. In addition, the drive magnet 1 shown in FIG.
1. The relative position between the driven magnets 12 indicates an equilibrium state in which the rotors 22 and 23 are balanced by magnetic force.

In the homopolar and orthogonal type shown in FIG. 2A, the magnets are arranged as follows. In the drive rotator 22, the upper surface of the drive rotator 22 is virtually divided into four regions with two diameters orthogonal to each other. A drive magnet 11 composed of one double-sided dipole magnet is attached to each of the four regions. In each region, in the double-sided magnet, the magnetic pole N of one pole is directed inward in the radial direction, and the magnetic pole S of the other pole is directed outward in the radial direction. Further, the surface parallel to the longitudinal direction on which the magnetic pole N is formed is arranged parallel to one diameter, and the surface parallel to the lateral direction is arranged parallel to the other diameter. That is, the double-sided dipole magnet is attached with the plane parallel to the longitudinal direction inclined by 45 degrees with respect to the diameter passing through the center thereof. The double-sided bipolar magnet is
Its center lies on the circumference of the imaginary circle and also lies at the center of the region. The double-sided dipole magnets attached to the opposite regions are arranged point-symmetrically.

The driven rotary body 23 has basically the same structure as the drive rotary body 22. That is, the upper surface of the driven rotating body 23 is divided into four areas, and one double-sided dipole magnet is attached to each area, and the center thereof exists on the circumference of the virtual circle and exists in the center of the area. The points arranged symmetrically are also the same. The different point is the mounting direction of the driven magnet 12. The surface of the driven magnet 12 parallel to the longitudinal direction is displaced from the drive magnet 11 by 45 degrees. That is, when the drive rotor 22 or the driven rotor 23 is rotated and the centers of the driven magnet 12 and the drive magnet 11 attached to them are overlapped with each other, the drive magnet 11 is disposed orthogonal to the driven magnet 12. To be installed.

Then, as shown in FIG. 2A, when the rotation direction of the drive rotor 22 is clockwise, the driven magnet 23 provided on the drive rotor 22 is driven by the driven rotor 23. When the driven magnet 12 corresponding to the provided drive magnet 11 is delayed by 45 degrees, magnetic force interaction between the four drive magnets 11 and the four driven magnets 12 causes the drive rotor 22 and the driven rotor 23 to interact with each other. Is in equilibrium.

The different pole orthogonal type shown in FIG. 2B differs from the homopolar orthogonal type magnet shown in FIG. 2A in that the magnet arrangement is different. Accordingly, when the drive magnet 11 and the driven magnet 12 are orthogonal to each other with their centers overlapped, the magnetic interaction between the four drive magnets 11 and the four driven magnets 12 causes the drive rotor 22 and the driven rotor 22 to move. The rotor 23 is in equilibrium.

The homopolar parallel type of FIG. 2C is the same as the homopolar orthogonal type of FIG. 2A in the direction of the magnetic poles. The difference is that the double-sided double-sided magnets attached to the driving rotary body 22 and the driven rotary body 23 do not have the plane parallel to the longitudinal direction inclined by 45 degrees with respect to the diameter passing through the center thereof, and are parallel to the diameter. Is the point attached to. That is, all double-sided dipole magnets are mounted radially. As a result, when the drive magnet 11 is located in the middle between the driven magnets 12, or when the driven magnet 12 is located in the middle between the drive magnets 11, the magnetic forces between the four driving magnets 11 and the four driven magnets 12 are mutual. By the action, the driving rotary body 22 and the driven rotary body 23 are in an equilibrium state.

The different-polarity parallel type shown in FIG. 2D is different from FIG. 2C in that the directions of the magnetic poles are different, and the drive magnet 11 and the driven magnet 12 are opposite to each other. Thereby, the drive magnet 11
When the driven magnet 12 overlaps with the driven magnet 12, the magnetic force interaction between the four driving magnets 11 and the four driven magnets 12 causes the driving rotor 2 to move.
2 and the driven rotor 23 are in equilibrium.

The crossing angles between the magnets 11 and 12 of the rotating bodies 22 and 23 in the equilibrium state shown in FIGS. 2A to 2D are represented by θ _a , θ _b , θ _c and θ _d , respectively. Then θ _a =
45 degrees, θ _b = 0 degrees, θ _c = 45 degrees, and θ _d = 0 degrees.
Moreover, when the driving rotor 22 is rotated by breaking the equilibrium state,
The driven rotary body 23 also rotates accordingly, but the amount of deviation from the equilibrium state between the drive rotary body 22 and the driven rotary body 23 at this time is referred to as a deviation angle θ.

Next, each magnetic characteristic (torque characteristic and thrust characteristic) with respect to the above deviation angle of the rotary magnetic drive device shown in FIGS. 2A to 2D will be described with reference to FIG. The magnetic characteristics were measured by the magnetic measurement device shown in FIG. The test magnet attached to the rotor is a rare earth magnet with a magnetic force of 38.
It is 0 mT. The dimensions are 25 mm x 15 mm x 10 mm
Then, the magnetic pole surface is 25 mm × 15 mm, the facing surface is 10 mm ×
The distance between the magnets is 15 mm, the distance between the magnets is 7 mm, and the radius of gyration at the center of the magnet is 40 mm. The unit of torque is × 10 Ncm, and the unit of thrust is N (kgf). For torque measurement,
Yamasaki Seiki Co., Ltd. made rotary torque meter SS-1
R (Torque measurement range 0 to 98 Ncm (0 to 10 kgc
m)), the thrust is measured by a circular spring type tension gauge set needle type manufactured by Oba Keiki Seisakusho Co., Ltd. (measurement range 0 to 1).
96 N (0-20 kgf)) was used.

A method of measuring torque and thrust by the above-mentioned magnetic measuring device will be described. The drive handle 22 is rotated and held by the rotating handle 95. Drive rotor 2
A rotation angle of 2 is shown on the angle dial A100. The driven rotating body 23 rotates due to the magnetic force. The rotation angle of the driven rotor 23 is shown on the angle scale plate B101. The difference between the values indicated by the angle graduation plate A100 and the angle graduation plate B101 is the deviation angle between the drive rotor 22 and the driven rotor 23. First, read the value on the torque meter while maintaining this deviation angle.

Thrust that acts to slide the moving base 99 toward the driving rotary body 22 acts on the driven rotary body 23. By limiting the movement of the moving body 99 by the stopper 103, the distance between the driving rotary body 22 and the driven rotary body 23 is kept constant. From this state, the driven base 23 is pulled in the direction away from the drive rotor 22 by turning the moving base tension screw 102. The pulling force
It is shown on the spring scale 92. The pulling force is the driven rotor 23.
At the moment when it exceeds the thrust that acts on the moving table 99, the moving base 99 is separated from the stopper 103 at a stretch. Since the pointer of the spring scale 92 is a needle and always shows the maximum value, it indicates the value at the moment of leaving. The thrust which is the value indicated by the spring balance 92 at that time is read.

When the thrust is negative, that is, when the driven rotor 23 is acting in the direction away from the drive rotor 22, the movable base 99 separated from the stopper 103 is used.
By turning the moving table tension screw 102 in the reverse direction,
Return it to the stopper 103 position. The value of the spring balance 92 at that time is the thrust.

The torque and thrust characteristics shown in FIG. 9 measured by the above method will be described. 1) Homopolar and orthogonal magnetic characteristics (FIG. 9A) This characteristic corresponds to FIG. 2A. As the deviation angle θ increases, the torque increases, but the thrust decreases.
If the deviation angle exceeds 20 degrees, a repulsive magnetic field is entered and measurement becomes impossible. However, in this unmeasurable range, the torque becomes negative,
A position where thrust due to repulsion was close to 0 was observed.

At equilibrium, torque is 0 and thrust is 16.
17 (1.65 kgf). When the deviation angle θ is 10 degrees, the torque starts to increase to 1.6 and the thrust is 14.7.
(1.5 kgf), which is slightly decreasing. The torque increases and the thrust decreases as the deviation angle θ increases. Maximum torque of 2.7 and minimum thrust of 10.
29 (1.05 kgf).

In the rotary magnetic drive device, the larger the torque, the better, and the smaller the thrust, the better. It is preferable because the thrust is minimized when the torque is maximum. It is considered that the thrust at the maximum torque is the component force of the suction action.

2) Different polarity orthogonal type magnetic characteristic This is a characteristic corresponding to FIG. 2B, in which the torque is 0 and the thrust is 3.234 (0.33 kgf) in the equilibrium state.
When the deviation angle θ was 4 degrees, the torque started to increase to 1.8 and the thrust tended to decrease to 2.45 (0.25 kgf). The torque increases and the thrust decreases as the deviation angle θ increases. The thrust becomes 0 when the deviation angle is around 8 degrees.
Further, as the deviation angle θ was increased, the thrust exhibited a negative value of −2.254 (−0.23 kgf) near 12 degrees. Maximum torque 4.6 and minimum thrust around 16 degrees
It becomes 4.9 (-0.5 kgf).

The thrust becomes negative at the maximum torque, which is preferable. 3.23 Thrust at equilibrium
4 (0.33 kgf) is considered to be a component component when the magnetic force lines are twisted. When the drive rotor 22 is rotated from the equilibrium state, the attracting action between the different poles is reduced and the repulsing action between the same poles is increased. From this, it is considered that negative thrust occurs due to magnetic levitation in the vicinity of the deviation angle of 16 degrees.

3) Homopolar parallel type magnetic characteristics These are the characteristics corresponding to FIG. 2 (c). In the equilibrium state, the torque is 0 and the thrust is 16.17 (1.65 kgf).
When the deviation angle θ was 10 degrees, the torque started to increase to 2.5 and the thrust tended to decrease to 15.68 (1.60 kgf). The torque increases and the thrust decreases as the deviation angle θ increases. At a deviation angle of 25 degrees, the maximum torque is 7.6 and the minimum thrust is 6.37 (0.65 kgf).

The thrust is minimized when the torque is maximum, which is preferable. However, in order to obtain the maximum torque when the thrust is a negative value, the different polarity perpendicular magnetic property is preferable. This property is good if you do not need to obtain negative thrust. Ratio of maximum torque to minimum thrust (ratio) = (maximum torque) / (minimum thrust) If you want to increase, this characteristic is the best. Thrust 16.17 at equilibrium
(1.65 kgf) is generated. This component is considered to be the component component of the attraction force between different poles.

4) Different polarity parallel type magnetic characteristics These are the characteristics corresponding to FIG. 2 (d). When the torque is 0 in the equilibrium state, the thrust is as large as 88.2 (9 kgf), and the torque increases as the deviation angle θ increases. However, there is a slight tendency for the thrust to decrease. Maximum torque of 9.
0, the minimum thrust is 80.36 (8.2 kgf).

When the torque is maximum, the thrust becomes the minimum, but the value of the minimum thrust is the largest among the above four magnetic characteristics.

Summarizing the characteristics of the four types described above,               Maximum torque Minimum thrust deviation angle ratio Homopolar orthogonal type 2.7 10.29 20 0.26 Different polarity orthogonal type 4.6 -4.9 16 -0.94 Homopolar parallel type 7.6 6.37 25 1.19 Different polarity parallel type 9.0 80.36 7 0.11 Becomes

In the rotary magnetic drive device described above, the case where four magnets are mounted on the drive rotary plate and the driven rotary plate has been described, but the present invention is not limited to this. At least three magnets may be provided. This is because the surface is stabilized by three-point support.

The shape of the magnet described above has been described in the case of a rectangular parallelepiped, but various cubic shapes can be adopted for practical use. FIG. 10 shows the drive magnets 121, 123, 125, 127 and the driven magnet 12 attached to the rotating body.
It is a top view which shows various practical shapes of 2,124,126,128. In addition, an insertion hole 120 for inserting a shaft, which will be described later, is provided in the central portions of the rotating bodies 22 and 23 to which these are attached.

FIG. 10A is a diagram in which four fan-shaped magnets 121 and 122 having a fan-shaped cross section are arranged. This is advantageous when obtaining a strong magnetic force in a limited space. Figure 1
0 (b) has a substantially rectangular parallelepiped shape, and an inner surface parallel to the lateral direction on the radially inner side and an outer surface parallel to the lateral direction on the radially outer side have the insertion hole 120 and the rotation. Plates 22, 23
The magnets 123, 1 each having a curved surface along the outer circumference of the
It is the figure which arranged four 24. At the time of implementation, this shape is suitable for practical use. FIG. 10C shows the cubic magnets 125, 12
It is the figure which arranged 4 six. At the time of implementation, this shape is suitable for practical use. FIG. 10D shows a cylindrical magnet 127, 128.
It is the figure which arranged eight. At the time of implementation, this shape is suitable for practical use. The shape of the magnet may be any shape other than the above, depending on the magnetic action and the embodiment.

The shape of each rotating body does not necessarily have to be a disk. For example, a cross shape or an equilateral triangle may be used, and any shape that allows stable rotation when rotated about the rotation axis may be used.

Next, a second embodiment will be described with reference to FIG. This is an application of the magnetic drive device described in FIG. 1 to a linear magnetic drive device. This linear magnetic drive device is configured by incorporating a pair of magnets on the upper and lower moving bodies. The linear magnetic drive device shown in FIGS. 3A and 3B has the following common configuration.

The linear magnetic drive device causes the driven moving body 33 to follow the movement of the driving moving body 32 running on the arbitrary trajectory 34, thereby causing the driven moving body 33 to travel on the arbitrary trajectory 34. The drive moving body 32 is formed of, for example, a plate-like body, has wheels, and can move on an arbitrary track 34. The driven body 33 is also made of, for example, a plate, has wheels, and is movable on an arbitrary track 34. The arbitrary trajectory of the driven moving body 33 is configured by, for example, a partition wall that partitions the space where the drive moving body 32 exists from the space where the driven moving body 33 exists.

As described above, the driving magnet 11 and the driven magnet 12 are formed in substantially the same shape, and are three-dimensionally surrounded by the facing surfaces that are substantially parallel to each other and the peripheral side surface that covers the outer circumference between the facing surfaces. A double-sided two-pole magnet is used, in which one surface of the peripheral side surface is the magnetic pole N of one pole, and the other surface of the peripheral side surface opposite the one surface is the magnetic pole S of the other pole.

The driven magnet 12 provided on the driven moving body 33.
However, the opposing surfaces of the driven magnet 12 are substantially parallel to each other, and the centers of the opposing surfaces of the driven magnet 12 that are substantially parallel to the central extension line that commonly passes through the centers of the opposing surfaces of the driving magnet 11 that are substantially parallel to each other. The central extension lines that pass in common are arranged so as to be parallel.

When the drive magnet 11 is moved in a direction intersecting the central extension line of the drive magnet 11, for example, in a direction orthogonal to the drive magnet 11, the magnetic force between the drive magnet 11 and the driven magnet 12 causes the driven moving body 33 to move on a track such as a partition wall. Drive over 34.

In the linear magnetic drive device shown in FIG. 3, four types of combinations ((a) to (d)) are conceivable as in the rotary magnetic drive device. The homopolar and orthogonal type shown in FIG. 3A is not suitable for practical use. The different-polarity orthogonal type shown in FIG. 3 (b) has the optimum magnetic characteristics for the sliding bearing, and the thrust becomes 0 or the levitation force, and the weight of the heavy object can be reduced. The homopolar parallel type shown in FIG. 3C has thrust as compared with the heteropolar orthogonal type, and is a rolling bearing type suitable for a large-sized device. Since the heteropolar parallel type shown in FIG. 3D has a small deviation amount, it is most suitable for an apparatus for accurately stopping a moving body at a fixed position.

The moving direction of the linear magnetic drive device is
The direction is not necessarily horizontal, but may be any direction as long as it intersects with the central extension line 13.

If the driven body 33 rotates on the spot, all the magnetic characteristics shift to the different pole parallel type due to the characteristics of the magnets. The body 32 and the driven moving body 33 move on a rail or guide. That is, the angles of the drive magnet 11 and the driven magnet 12 with respect to the moving direction must always be kept constant.

Further, in FIG. 3, each drive magnet 11 is
Are all positioned with the center extension line aligned with the driven magnet 12, but in (a) the same-polarity orthogonal type and (c) the same-polarity parallel type, the driven moving body in FIG. Stabilizes a little to the right or left of the position shown.

FIG. 4 shows a stirring device for stirring the material 45, which is equipped with the above-described drive rotor 22 and driven rotor 23. The drive rotator 22 and the driven rotator 23 are attached to face each other with the bottom of the stirring tank 44 as a partition. An insertion hole is provided in the center of the drive rotor 22 and is fixed to the shaft of the motor 41 outside the stirring tank 44. The motor 41 is installed with a support 46 in a partition wall 47 with an appropriate gap. An insertion hole is also provided in the center of the driven rotating body 23, and the stirring blade 43 is provided. The insertion hole of the driven rotor 23 is rotatably inserted into the support shaft 42 provided on the inner bottom wall of the stirring tank 44. The structure in which the drive rotor 22 is rotated by the rotating means and the driven rotor 23 is rotated by the magnetic force and is agitated by the agitating blades is called an agitator 48.

The stirring member 48 is not limited to the bottom portion, but may be the upper portion, the side surface portion, or any position suitable for stirring.
4 is preferably provided at the bottom. The weight of the driven rotor 23 and the buoyancy due to the negative thrust cancel each other out,
Since the driven rotary body 23 rotates without coming into contact with the bearing of the support shaft 42, abrasion with the bearing does not occur. Therefore, since the generation of dust can be suppressed, the material 45 can be stirred with high purity.

FIG. 5 shows a mixing device for efficiently mixing the materials. The container 51 includes a supply port 52 and a discharge port 53, and includes two sets of the above-described stirring members 48 facing each other inside the container 51. Liquid A is supplied from the supply port 52a and liquid B is supplied from the supply port 52b. The drive rotating body 22 is rotated by the motor 41, and the stirring blade 43 integrated with the driven rotating body 23 is driven. The supplied liquid A and liquid B are mixed by the stirring blade 43 and are discharged from the discharge port 53.

According to the embodiment, when the motors 41 are set to rotate in the same direction and are installed at opposite positions in the container 51, the stirring blades 43 rotate in different directions, so that efficient stirring can be performed. When several kinds of liquids to be mixed are continuously supplied, they are instantaneously mixed in the container 51, and the mixed materials are continuously discharged.

When the stirrers 48 are installed facing each other, when the stirrers 48 are installed above and below the container 51, the lower stirrer 4 is installed.
8 is a heteropolar orthogonal type, so that the negative thrust and its own weight cancel each other out, wear with the bearing does not occur, and the upper side is provided with the stirring body 48 configured with other magnetic characteristics, This is preferable because the positive thrust and the self-weight cancel each other out and wear with the bearing does not occur.

Further, it is possible to play the role of a pump as well as stirring. Position of stirrer 48 and stirrer 48
The liquid can be sent from the supply port 52 to the discharge port 53 by appropriately selecting the shape of the above.

FIG. 6 schematically shows a substrate processing apparatus equipped with the agitator 48 and the levitation magnet 65.

The vertical rotary shaft 67 in the vacuum container 66 has a driven rotor 23 at the top, a lower substrate holder 68 and a levitation magnet 65.
Equipped with. The drive rotor 22 is provided above the vacuum container 66 and is rotated by the motor 41. The superconductor 64 is joined to the center of the outer wall of the bottom of the vacuum container 66. The superconductor 64 is the ultra-freezing portion 6 that is the tip of the ultra-low temperature freezing body 61.
It is joined to 2. The ultra-freezing portion 62 and the superconductor 64 are covered with a low temperature vacuum container 63 for the purpose of preventing frost and heat insulation. When the temperature of the superconductor 64 is lowered to the superconducting critical temperature, the magnetic levitation magnet 65 floats by the Meissner effect and is pinned by the pinning effect, and prevents the vertical rotation shaft 67 from swinging.

When the motor 41 rotates, the driven rotor 23 rotates via the partition wall, and the substrate holder 68 rotates about the vertical rotation shaft 67. Vertical rotation shaft 67 and substrate holder 68
Rotates without contacting the vacuum container 66. Therefore, no dust is generated due to rotational wear. Also, the vertical rotation shaft 67
Can be stably rotated by being supported at two points by the upper part and the lower part.

The substrate holder 6 provided on the vertical rotation shaft 67.
A film can be uniformly formed by placing a wafer on the wafer 8 and rotating it during film formation. In addition, it is effective for non-contact rotating devices such as sputtering, photoresist coating, and developing process in the semiconductor industry.

FIG. 7 shows a stirring device for stirring a liquid.
In addition to the description of FIG. 6, the closed stirring tank 70 is for the purpose of stirring the liquid. The vertical rotating shaft 67 is provided with a stirring blade 71 according to the purpose of stirring. When the magnetically levitated vertical rotation shaft 67 is rotated, high-purity stirring can be performed in a non-contact manner without generating dust. Further, the vertical rotation shaft 67 can be stably rotated by being supported at two points at the upper portion and the lower portion.

FIG. 8 shows another stirring device. In addition to the description of FIG. 7, the vertical rotating shaft 67 is not provided, and the stirring body 48 is in the vicinity of the superconductor 64. The drive rotor 22 is
It rotates around the low temperature vacuum container 63 as an axis. Drive rotor 22
Simultaneously functions as a driven pulley. When the drive pulley 81 is rotated by the motor 41, the rotational force is transmitted to the drive rotating body 22 by the belt 82. In FIG.
The belt 82 on the front side of the drawing is omitted. The magnetic levitation stirring blade 85 has the driven rotary body 23 sealed therein. A levitation magnet 65 is provided at the center of rotation of the driven rotor. The magnetic levitation stirring blade 85, which is levitated by the superconducting effect and is pinned, can stir in a non-contact state while being magnetically levitated when rotated by the stirring member 48. An appropriate distance is provided or a magnetic shield wall is provided so that the magnetic circuits of the superconductor 64 and the agitator 48 do not affect each other.

Since the rotary drive unit and the superconductor are provided at the bottom of the closed stirring tank 70, it is not necessary to provide them at the top, and the structure is simple. Moreover, since the vertical rotation shaft 67 is not provided,
Simple structure and easy maintenance.

[0091]

According to the present invention, the thrust can be reduced as the driving force increases.

[Brief description of drawings]

FIG. 1 is a plan view and a front view of a magnetic drive device according to an embodiment.

FIG. 2 is a plan view of a rotating body according to the present embodiment.

FIG. 3 is a front view of a moving body according to the present embodiment.

FIG. 4 is a side sectional view of a stirring device including the stirring body according to the present embodiment.

FIG. 5 is a side sectional view of a mixing device including a plurality of stirring bodies according to the present embodiment.

FIG. 6 is a side sectional view of the substrate processing apparatus according to the present embodiment.

FIG. 7 is a side sectional view of an agitator including a superconductor according to the present embodiment.

FIG. 8 is another stirring device according to the present embodiment.

FIG. 9 is a graph showing the relationship between the deviation angle of the rotating body and the torque and thrust according to the present embodiment.

FIG. 10 is an example of a shape of a magnet of a magnetic drive device included in a rotating body according to the present embodiment.

FIG. 11 is a schematic diagram of a measuring machine for measuring the relationship between the deviation angle of the rotating body and the torque and thrust according to the present embodiment.

FIG. 12 is a side sectional view of a conventional magnetic stirrer.

[Explanation of symbols]

11 Drive magnet 11a Top surface of drive magnet 11b Lower surface of drive magnet 11c N pole surface of drive magnet 11d S-pole surface of driving magnet 12 Driven magnet 12a Upper surface of driven magnet 12b Lower surface of driven magnet 12c N pole surface of driven magnet 12d S pole surface of driven magnet 13 Central extension line C arrow direction (movement direction) N One pole magnetic pole S Magnetic pole of the other pole

Claims (8)

[Claims] 1. One magnet is a drive magnet and the other magnet is a follower magnet, the drive magnet and the follower magnet are magnetically coupled in a non-contact manner, and the follower magnet is moved as the drive magnet moves. In the driven magnetic drive device, the drive magnet and the driven magnet are formed in substantially the same shape,
It has a solid body surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces. One surface of the peripheral side surface is a magnetic pole of one pole, and is opposite to the peripheral side surface. Is a double-sided two-pole magnet having the other surface as the magnetic pole of the other pole, and the opposing surfaces of the driving magnet and the driven magnet are substantially parallel to each other, and the driving magnet is substantially parallel to each other. The drive magnet and the driven magnet are provided so as to face each other such that a central extension line that commonly passes through the centers of the facing surfaces and a central extension line that commonly passes through the centers of the substantially parallel facing surfaces of the driven magnet coincide with each other. , By moving the drive magnet in a direction intersecting a central extension line of the drive magnet, so that the movement is transmitted to the driven magnet by a magnetic force generated between the magnetic pole of the drive magnet and the magnetic pole of the driven magnet. A magnetic drive device characterized by the above. 2. A drive rotating body that rotates about a rotation axis, a driven rotating body that is provided so as to face the drive rotating body, and that rotates using an extension line of the rotation axis of the drive rotating body as the rotation axis. At least three drive magnets provided at equal intervals on the circumference of an imaginary circle drawn around the rotation axis of the drive rotating body, on the surface of the drive rotating body facing the driven rotating body; Provided on the surface of the body facing the drive rotor at equal intervals on the circumference of the virtual circle drawn around the rotation axis of the driven rotor corresponding to the virtual circle drawn on the drive rotor. In the magnetic drive device including the same number of driven magnets as the driven magnets, the driving magnets and the driven magnets are formed in substantially the same shape,
It has a solid body surrounded by opposing surfaces parallel to each other and a peripheral side surface covering the outer periphery between the opposing surfaces, and one surface of the peripheral side surface is a magnetic pole of one pole, and is opposite to the peripheral side surface. Each of which is a double-sided magnet having the other surface as the magnetic pole of the other pole, the facing surfaces of the driving magnet and the driven magnet are substantially parallel to each other, and the center of the facing surface of the driving magnet is The drive magnet and the driven magnet are attached to the drive rotor and the driven rotor, respectively, so that the center extension line passing through and the center extension line passing through the center of the facing surface of the driven magnet are parallel to each other. When the body is rotated about the rotation axis of the drive rotor, the driven rotor rotates about the rotation axis of the driven rotor due to the magnetic force of the drive magnet and the driven magnet. Drive. 3. A magnetic drive device for moving a driven moving body by providing a driven magnet for the driven moving body and moving the driven magnet according to the movement of the driving magnet, wherein the driving magnet and the driven magnet are Formed in almost the same shape,
It has a solid body surrounded by opposing surfaces that are substantially parallel to each other and a peripheral side surface that covers the outer periphery between the opposing surfaces. One surface of the peripheral side surface is a magnetic pole of one pole, and is opposite to the peripheral side surface. Of the other side, which is the other side, is used as the magnetic pole of the other pole, and the driven magnet provided in the driven moving body has the opposing surfaces substantially parallel to the drive magnet. And a central extension line that commonly passes through the centers of the substantially parallel facing surfaces of the driven magnet is parallel to a central extension line that commonly passes through the centers of the substantially parallel facing surfaces of the drive magnet. When the drive magnet is moved in a direction intersecting a central extension line of the drive magnet, the driven moving body travels on an arbitrary track due to the magnetic forces of the drive magnet and the driven magnet. Magnetic drive. 4. The magnetic drive device according to claim 2, wherein the magnetic drive device is used as a means for agitating the liquid inside the agitation tank, wherein the driven rotor that constitutes the magnetic drive device is provided with the agitation tank. An insertion hole for inserting a support shaft provided therein to rotatably support the driven rotor about the support shaft, and a stirring blade for stirring the liquid by rotation of the driven rotor. Respectively, and when the driven rotor is pivotally supported on the support shaft, the stirring is performed so that the driving rotor constituting the magnetic drive device faces the driving rotor via the tank wall of the stirring tank. An agitator, which is disposed outside the tank, wherein the driven rotary body rotates around the support shaft by the rotation of the rotary drive body. 5. The stirring device according to claim 4, wherein the stirring tank has a predetermined number of liquid supply ports for introducing liquids to be mixed and a liquid discharge port for discharging the liquids after the mixing process, A plurality of mixing devices are used as means for controlling the mixing state of the liquid in the stirring tank. 6. A vacuum container for processing a substrate, a substrate holder rotatably provided in the vacuum container about a vertical rotation shaft to hold the substrate, and a vertical rotation shaft from above the vertical rotation shaft. A rotation drive unit that applies a rotational force to the substrate holder to rotate the substrate holder, and a shaft that prevents the vertical rotation shaft from swinging while lifting the substrate holder from below the substrate holder against its gravity. In a substrate processing apparatus including a shake prevention mechanism, the magnetic drive device according to claim 2 is used as the drive rotation unit, and the vertical rotation shaft is connected to a rotation shaft of a driven rotary body that constitutes the magnetic drive device. By doing so, the driven rotating body is connected to the substrate holding body via the vertical rotation shaft, and the drive rotating body forming the magnetic drive device faces the rotating driven body via the upper wall of the vacuum container. As the vacuum volume Is arranged outside the container, and is configured to rotate the substrate holder through the driven rotor by the rotation of the drive rotor around the vertical rotation axis, and the shaft shake prevention mechanism is configured to rotate the substrate. A levitation magnet provided on a holder and a superconductor provided outside the vacuum container so as to face the levitation magnet through a bottom wall of the vacuum container, and the superconductor is below a superconducting critical temperature. By cooling to, by superposing the substrate holder in the vacuum container by the Meissner effect of the superconductor and the levitation magnet, the vertical rotating shaft is pinned by the pinning effect. Substrate processing equipment. 7. A closed stirring tank for containing a liquid to be stirred, stirring blades rotatably provided in the stirring tank about a vertical rotation shaft for stirring the liquid, and above the vertical rotation shaft. A rotation drive unit that applies a rotational force to the vertical rotating shaft to rotate the stirring blade, and prevents the vertical rotating shaft from swinging while floating the stirring blade from below the stirring blade against its gravity. In the agitating device including a shaft runout preventing mechanism, the magnetic drive device according to claim 2 is used as the rotary drive unit, and the vertical rotary shaft is provided as a rotary shaft of a driven rotary body that constitutes the magnetic drive device. By connecting, the driven rotor is connected to the stirring blade via the vertical rotation shaft,
A drive rotating body that constitutes the magnetic drive device is arranged outside the stirring tank so as to face the rotary driven body through an upper wall of the stirring tank, and the driven rotating body is rotated by the rotation of the drive rotating body. The stirring blade is configured to rotate about the vertical rotation shaft via the shaft, and the shaft runout preventing mechanism includes a levitation magnet provided on the stirring blade and a bottom of the stirring tank outside the stirring tank. A stirring blade provided with a superconductor provided so as to face the levitation magnet via a wall, and cooling the superconductor to a superconducting critical temperature or lower, by the Meissner effect of the superconductor and the levitation magnet. An agitating device, wherein the vertical rotating shaft is pinned by a pinning effect while being floated in the agitating tank. 8. A stirring tank for containing a liquid to be stirred, a stirring blade rotatably provided below the stirring tank, a rotation drive unit for rotating the stirring blade, and the stirring blade for its gravity. A magnetic drive device according to claim 2 is used as the rotational drive unit in a stirring device provided with a shaft runout prevention mechanism that prevents the center of rotation of the agitating blade from swinging while being floated against the magnetic drive device. The stirring blade is attached to one driven rotor which constitutes the device, and the other driving rotor which constitutes the magnetic drive device is arranged so as to face the rotary driven member through the bottom wall of the stirring tank. The stirring blade is rotated around the rotation axis of the driven rotating body via the driven rotating body by the rotation of the drive rotating body, the shaft runout preventing mechanism is Installed at the center of rotation of the driven rotor. A levitation magnet and a superconductor provided so as to face the levitation magnet at the center of rotation of the drive rotor disposed outside the stirring tank, and the superconductor is below the superconducting critical temperature. The cooling is performed by pinning the rotation center with a pinning effect while floating the stirring blade in the stirring tank by the Meissner effect of the superconductor and the levitation magnet. apparatus.