JP2003140062A - Optical transmission device, optical module and method for manufacturing them - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the positional precision of an optical element and an optical waveguide. SOLUTION: A front end face 132 on the side opposite to an optical element 110 of a first optical waveguide 130 is inclined in such degree that optical path conversion is possible. The first optical waveguide 130 has a first connection part 134 for optical connection to the outside in the side face. The first connection part 134 is moved along the axis of the first optical waveguide 130 according as a platform 120 is moved by an actuator 150. A second optical waveguide 140 has a second connection part 144 for optical connection to the outside. The second connection part 144 is placed within the range of movement of the first connection part 134. The control to raise the optical transmission sensitivity detected on the basis of light inputted to a light receiving element is performed by movement of the platform 120.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical transmission device, an optical module, and manufacturing methods thereof.

[0002]

BACKGROUND OF THE INVENTION In recent years, information communication has tended to increase in speed and capacity, and optical communication has been developed. In optical communication, an electrical signal is converted into an optical signal and the optical signal is transmitted through an optical waveguide,
The received optical signal is converted into an electric signal. The conversion of electrical signals and optical signals is performed by optical elements. Further, an optical module in which an optical element is mounted on a platform is known.

In the conventional optical module, it was difficult to align the optical element and the optical waveguide. For example, the position of the optical waveguide was aligned using the V groove formed on the platform, but it was difficult to perform highly accurate alignment.

The present invention solves this problem, and its object is to improve the positional accuracy of the optical element and the optical waveguide.

[0005]

(1) A light transmission device according to the present invention comprises a first optical element, a platform on which the first optical element is mounted, the first optical element and an optical element. A first optical waveguide connected to the first optical waveguide whose relative position with respect to the platform is fixed, a second optical waveguide arranged at a position optically connectable to the first optical waveguide, and the first optical waveguide. And a second optical element that is optically connected to the first optical element through the second optical waveguide, and an actuator that moves the platform along the axis of the first optical waveguide. However, in the first optical waveguide, the tip surface on the side opposite to the first optical element is such that the optical path can be changed by reflecting light between the direction along the axis and the direction intersecting the axis. The optical waveguide with respect to the second optical waveguide 1 side connecting portion, the first connecting portion moves along the axis of the first optical waveguide along with the movement of the platform by the actuator, the second optical waveguide, An optical second connection portion for the first optical waveguide is provided, the second connection portion is located within a movement range of the first connection portion, and the first and second optical elements are provided. One is a light-receiving element, and the other is a light-emitting element, and the movement of the platform controls to increase the optical transmission sensitivity detected based on the light input to the light-receiving element.

According to the present invention, the control for increasing the optical transmission sensitivity is performed, so that the first optical element and the first and second optical elements are provided.
The positional accuracy of the optical waveguide can be improved.

(2) This optical transmission device may further include a driver for driving the actuator.

(3) In this optical transmission device, the signal from the light receiving element is repeatedly received, the detection of the optical transmission sensitivity is repeated, and the comparator for comparing the detection result of the previous time with the detection result of the present time is used. It may further have a controller which controls the driver based on a comparison result.

(4) In this optical transmission device, the first
The tip end surface of the optical waveguide may be inclined at an angle for totally reflecting the light traveling inside.

(5) In this optical transmission device, the first
Further includes a guide that allows movement of the optical waveguide in the axial direction and regulates movement of the optical waveguide in a direction intersecting the axis, and by restricting movement of the first optical waveguide by the guide, the platform is It may move along the axis of the first optical waveguide.

(6) In this optical transmission device, the guide is a hole into which the first optical waveguide is inserted, and a part of an inner wall surface of the hole is the second connecting portion. Good.

(7) In this optical transmission device, the actuator may include a cushion and an energy supply source that deforms the cushion.

(8) In this light transmission device, the energy supply source may be a heater, the cushion may be expanded by heat supplied from the heater, and the platform may be lifted by expansion of the cushion. .

(9) In this light transmission device, the cushion may be an elastic layer that seals gas.

(10) In this light transmission device, the cushion may be an elastic layer containing bubbles.

(11) In this optical transmission device, the first and second optical elements may be mounted on one substrate, and the second optical waveguide may be formed on the one substrate.

(12) This optical transmission device may further include at least one third optical waveguide for optically connecting the second optical waveguide and the second optical element.

(13) In the method for manufacturing a light transmission device according to the present invention, (a) a first optical element, a platform on which the first optical element is mounted, the first optical element and the optical element are optically provided. A first optical waveguide connected to the first optical waveguide whose relative position with respect to the platform is fixed, a second optical waveguide arranged at a position optically connectable to the first optical waveguide, and the first optical waveguide. And a second optical element that is optically connected to the first optical element through the second optical waveguide, and an actuator that moves the platform along the axis of the first optical waveguide. However, in the first optical waveguide, the tip surface on the side opposite to the first optical element is such that the optical path can be changed by reflecting light between the direction along the axis and the direction intersecting the axis. It is inclined, and is optical with respect to the second optical waveguide. A first connecting portion is provided on a side surface, and the first connecting portion moves along the axis of the first optical waveguide with the movement of the platform by the actuator, and the second optical waveguide is An optical second connection portion for the first optical waveguide, wherein the second connection portion is located within a movement range of the first connection portion, and the first and second light One of the elements is a light-receiving element, and the other is a light-emitting element, and (b) at a position where the optical transmission sensitivity detected based on the light input to the light-receiving element is highest, Moving the platform by the actuator to fix the position of the platform in the moving direction.

According to the present invention, since the platform is moved to the position where the optical transmission sensitivity is the highest and then the position is fixed, the positional accuracy of the first optical element and the first and second optical waveguides can be improved. Can be kept high.

(14) The method for manufacturing an optical module according to the present invention is (a) a first one of a light receiving element or a light emitting element.
An optical element, a platform on which the first optical element is mounted, a first optical waveguide optically connected to the first optical element and having a fixed relative position to the platform, A second optical waveguide arranged at a position optically connectable to the first optical waveguide; and an actuator for moving the platform along an axis of the first optical waveguide, In the optical waveguide of 1,
The tip end surface on the side opposite to the first optical element is inclined to such an extent that an optical path can be changed by reflecting light between a direction along the axis and a direction intersecting the axis. An optical first connection portion for the waveguide is provided on a side surface, and the first connection portion moves along the axis of the first optical waveguide along with the movement of the platform by the actuator, and The second optical waveguide has an optical second connecting portion with respect to the first optical waveguide, and the second connecting portion obtains a structure located within a moving range of the first connecting portion. And (b) a second optical element that is the other of the light receiving element or the light emitting element is optically connected to the first optical element through the first and second optical waveguides, and (c) the light receiving element. At the position where the optical transmission sensitivity detected based on the light input to By moving the platform by Chueta include securing the position of the moving direction of the platform.

According to the present invention, since the platform is moved to the position where the optical transmission sensitivity is the highest and then the position is fixed, the positional accuracy of the first optical element and the first and second optical waveguides can be improved. Can be kept high.

(15) The optical transmission device according to the present invention is manufactured by the above method.

(16) The optical module according to the present invention is manufactured by the above method.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIGS. 1A to 1
(C) is a diagram showing an optical transmission device according to a first embodiment to which the present invention is applied. The light transmission device includes a first and a second.
The optical elements 110 and 210 are included. In this embodiment,
The first and second optical elements 110 and 210 are attached to one substrate 100 via other members (for example, platforms 120 and 220).

(Optical element) The first and second optical elements 110,
Each of 210 is at least one (one or more)
Optical parts 112 and 212 of the. In the present embodiment, the first optical element 110 is a light receiving element and the second optical element 210 is a light emitting element. The optical portion 112 of the first optical element 110 is a light receiving portion, and the optical portion 212 of the second optical element 210 is a light emitting portion.

The first or second optical element 110, 210 is
It has at least one (eg, multiple) electrodes 114, 214. The electrodes 114, 214 may include bumps (gold, solder, etc.). First or second optical element 110, 2
The electrodes 114 and 214 may be formed only on the surface of the optical parts 112 and 212 in FIG.
The electrodes 114 and 214 may be formed on the surface on which the optical portions 112 and 212 are formed and the other surface (for example, the opposite surface).

The first or second optical element 110, 210 is
At least one (one or more) stoppers 116, 2
16 may be included. The stoppers 116 and 216 are
It may be provided on the surface of the first or second optical element 110, 210 on which the optical portions 112, 212 are formed. The stoppers 116 and 216 are the first optical waveguide 130 or the third optical waveguide.
Of the optical waveguide 230 of the optical portion 112, 212
It is to prevent hitting. Therefore, the stoppers 116, 216 can be replaced by optical parts 112, 2
It is provided in the vicinity of 12 (for example, within the range of the tip surface of the first optical waveguide 130 or the third optical waveguide 230). The stoppers 116 and 216 may be protrusions or bumps.

(Structure on the First Optical Element Side)
It has a platform 120. Platform 1
The first optical element 110 is mounted on the surface 20 (for example, face-down mounting). Platform 120 has
The wiring pattern 122 is formed. Wiring pattern 1
The first optical element 110 is electrically connected to 22. For example, the electrode 114 and the wiring pattern 122 are joined. Alternatively, wires may be used for electrical connection. The platform 120 has a through hole 124 formed therein. The through hole 124 is formed on the platform
An opening is formed in the surface (for example, the surface on which the wiring pattern 122 is formed) on which the first optical element 110 is mounted. By inserting the first optical waveguide 130 into the through hole 124, the platform 120 and the first optical waveguide 130 can be positioned. In this embodiment, the relative positions of the platform 120 and the first optical waveguide 130 are fixed.

The light transmission device has a first optical waveguide 130. The first optical waveguide 130 is a transmission line for propagating an optical signal. The cross section of the first optical waveguide 130 is
It may be circular, elliptical or rectangular. In the present embodiment, the first optical waveguide 130 is an optical fiber. The optical fiber is composed of a core and a clad. The material of the optical fiber may be either quartz glass or plastic. The optical fiber may be covered with a jacket to form an optical fiber cable. The first optical waveguide 130 is optically connected to the optical portion 112. Optical connection refers to a state in which an optical signal can be transmitted from the first optical waveguide 130 to the optical portion 112. First
The optical waveguide 130 is arranged such that its tip end surface faces the optical portion 112. Further, since the tip end surface of the first optical waveguide 130 contacts the stopper 116, it does not contact the optical portion 112. The first optical waveguide 130 is attached (eg, fixed) to the platform 120. This attachment (or fixation) may be performed by inserting (for example, press-fitting) the first optical waveguide 130 into the through hole 124 of the platform 120.

An end surface 132 of the first optical waveguide 130 opposite to the first optical element 110 (optical portion 112).
Are inclined (specifically, inclined with respect to the axis of the first optical waveguide 130). At least a part of the light traveling inside the first optical waveguide 130 is reflected by the inclined end surface 132 and returns to the inside. Thereby, the optical path can be changed. Specifically, as shown by the arrow in FIG. 1A, at least a part of the light traveling in the direction intersecting the axis (the direction from the side surface to the inside) is reflected by the inclined end surface 132, and 1 along the axis of the optical waveguide 130 (optical portion 11
2).

The inclination angle of the end face 132 is an angle at which the light traveling inside the first optical waveguide 130 (light incident at a right angle from the side surface) is totally reflected (angle greater than the critical angle (for example, about 45 °). )). In addition, a light-shielding film (for example, a metal film) may be formed on the end surface 132 to reduce loss due to light radiation.

The first optical waveguide 130 has the above-described structure, and thus has the optical first connection portion 134 with the outside on the side surface. The first optical waveguide 130 has a surface (for example, a tip surface) that faces the first connection portion 134 and the optical portion 112.
An optical path is formed between and.

The optical transmission device includes one first optical waveguide 13
Corresponding to 0, at least one (1 in the example of FIG. 1A)
Second optical waveguide 140. The second optical waveguide 140 has an optical second connection portion 144 with the outside. The second connecting portion 144 shown in FIG. 1A is the tip surface of the second optical waveguide 140. The second connecting portion 144 is
The first connection portion 134 can be optically connected (for example, opposed). Optical connection means the first and second
A state in which an optical signal can be transmitted and received between the connection parts 134 and 144. The first connecting portion 134 is the first optical waveguide 130.
If it is on the side surface of the first optical waveguide 130, the second connection portion 144 is arranged facing the side surface of the first optical waveguide 130. The second
The connecting portion 144 is located within the movement range of the first connecting portion 134. The moving range of the first connecting portion 134 is the first
And a position where the second connecting portions 134 and 144 face each other, and a position where the first and second connecting portions 134 and 144 do not face each other.

In the present embodiment, the second optical waveguide 140
Are formed on the substrate 100. For example, the substrate 100
A part of the inside may be the second optical waveguide 140, or the second optical waveguide 140 may be mounted on the substrate 100. The second optical waveguide 140 includes the first optical waveguide 1
The content described in 30 applies. A wiring pattern (not shown) may be formed on the substrate 100.

The substrate 100 has a hole (through hole or recess) 1
02 is formed. A part of the inner wall surface of the hole 102 may be the second connecting portion 144. This structure can be obtained by forming the substrate 100 so as to include the optical waveguide therein and forming the hole 102 at the position where the optical waveguide is cut in the substrate 100. In this case, the optical waveguide is cut to be separated into a portion having the second connecting portion 144 (the second optical waveguide 140) and the other portion. The hole 102 may be formed perpendicular to the second optical waveguide 140.

The light transmission device has a guide for restricting the movement of the first optical waveguide 130. In the example shown in FIG. 1A, the guide is the hole 102. The movement of the first optical waveguide 130 is regulated by inserting the first optical waveguide 130 into the hole 102 (guide). Specifically, the hole 102 (guide) allows the first optical waveguide 130 to move in the axial direction, but restricts the movement in the direction intersecting the axis. When the movement of the first optical waveguide 130 is restricted, the first
120 fixed to the optical waveguide 130 of the
Is subject to the same restrictions.

The light transmission device has an actuator 150. The actuator 150 is mounted on the platform 12
0 is moved along the axis of the first optical waveguide 130.
As the platform 120 is moved by the actuator 150, the first optical waveguide 130 also moves. By the guide (hole 102) described above, the first optical waveguide 13
0 moves only in its axial direction. Therefore, the first connecting portion 134 moves along the axis of the first optical waveguide 130. The actuator 150 illustrated in FIG. 1A includes a cushion 152 and an energy supply source 154 that deforms the cushion 152. Energy source 15
4 may be a heater. In that case, a wiring pattern (not shown) formed on the substrate 100 and the heater are electrically connected. The cushion 152 may be expanded by the heat supplied from the heater, and the expansion of the cushion 152 may raise the platform 120. The cushion 152 may be an elastic layer (balloon or the like) that seals gas. Such a cushion 15
2 can be called an air cushion.

(Structure on the Second Optical Element Side)
It has a platform 220. Platform 2
The second optical element 210 is mounted on the surface 20 (for example, face-down mounting). Platform 220 has
The wiring pattern 222 is formed. Wiring pattern 2
The second optical element 210 is electrically connected to 22. For example, the electrode 214 and the wiring pattern 222 are joined. Alternatively, wires may be used for electrical connection. The platform 220 has a through hole 224 formed therein. The through hole 224 is defined by the platform 220
The surface of the second optical element 210 is mounted on the surface (for example, the surface on which the wiring pattern 222 is formed). By inserting the third optical waveguide 230 into the through hole 224, the platform 220 and the third optical waveguide 230 can be positioned. In this embodiment, the relative positions of the platform 220 and the third optical waveguide are fixed. The platform 220 is also attached (eg, glued or fixed) to the substrate 100.

The optical transmission device has a third optical waveguide 230. The contents of the first optical waveguide 130 described above correspond to the third optical waveguide 230. Third optical waveguide 230
Are optically connected to the optical portion 212. The optical connection means from the optical portion 212 to the third optical waveguide 2
A state in which an optical signal can be transmitted to 30. The third optical waveguide 230 is arranged with its tip end surface facing the optical portion 212. Further, the tip surface of the third optical waveguide 230 is
Since it hits the stopper 216, the optical portion 212
It does not hit. Third optical waveguide 230
Is attached (eg, fixed) to the platform 220. This attachment (or fixation) is
It may be performed by inserting (for example, press-fitting) the third optical waveguide 230 into the through hole 224 of the platform 220.

An end surface 232 of the third optical waveguide 230 opposite to the second optical element 210 (optical portion 212).
Are inclined (specifically, inclined with respect to the axis of the third optical waveguide 230). At least part of the light traveling inside the third optical waveguide 230 is reflected by the inclined end surface 232 and returns to the inside. Thereby, the optical path can be changed. Specifically, as shown by an arrow in FIG.
At least a part of the light traveling in the direction along the axis of the optical waveguide 230 is reflected by the inclined end surface 232 and travels in the direction (side surface direction) intersecting the axis.

The inclination angle of the end face 232 is an angle at which the light traveling in the inside of the third optical waveguide 230 (light traveling along the axis) is totally reflected (angle above the critical angle (for example, about 45 °)). It may be. Further, a light-shielding film (for example, a metal film) may be formed on the end surface 232 to reduce the loss due to light radiation.

The third optical waveguide 230 has the above-mentioned structure, and thus has the third optical connecting portion 234 with the outside on the side surface. The third optical waveguide 230 has a surface (for example, a front end surface) facing the first connection portion 234 and the optical portion 212.
An optical path is formed between and.

The second optical waveguide 140 includes the second connecting portion 1
On the side opposite to 44, an optical fourth connection portion 14 with the outside is provided.
Have six. The fourth connecting portion 146 is the third connecting portion 23.
4 can be optically connected (for example, facing each other). Optical connection means the third and fourth connection parts 234,
A state in which optical signals can be transmitted and received between 146. The details of the fourth connecting portion 146 correspond to the contents of the second connecting portion 144.

The substrate 100 has a hole (through hole or recess) 1
04 are formed. A part of the inner wall surface of the hole 104 may be the fourth connecting portion 146. This structure is obtained by forming the substrate 100 so as to include the optical waveguide therein and forming the hole 104 at the position where the optical waveguide is cut in the substrate 100. In this case, the optical waveguide is cut to be separated into a portion having the fourth connection portion 146 (second optical waveguide 140) and the other portion. The hole 104 may be formed perpendicular to the second optical waveguide 140.

With the above configuration, the second optical element 210
Are optically connected to the first optical element 110 through the first and second optical waveguides 130 and 140 (and the third optical waveguide 230).

(Configuration for Control) The optical transmission device has at least one electronic component 106. Electronic component 106
Is, for example, an integrated circuit device. The electronic component 106 has a driver that drives the actuator 150. Therefore, the electronic component 106 is arranged at a position closer to the platform 120 on the first optical element 110 side than the platform 220 on the second optical element 210 side.
The electronic component 106 may be mounted on the substrate 100. The electronic component 106 includes a light receiving element (first optical element 11
0) is repeatedly received, the detection of the optical transmission sensitivity is repeated, and a comparator for comparing the detection results of the previous time and this time is included. The electronic component 106 may include a controller that controls the driver based on the comparison result by the comparator.

(Operation of Light Transmission Device) The light transmission device according to the present embodiment has the above-mentioned configuration, and its operation will be described below. In the optical transmission device, control for increasing the optical transmission sensitivity detected based on the light input to the first optical element 110 (light receiving element) is performed by moving the platform 120. For example, in the state shown in FIG. 1A, the optical axis is deviated from the optical portion 112 of the first optical element (light receiving element) 110, and the optical transmission sensitivity is low. Therefore, by moving (for example, raising) the platform 120, the optical axis is aligned with the optical portion 112 as shown in FIG. 1B, and the optical transmission sensitivity is increased.
Specifically, the first optical waveguide 130 moves (for example, rises) as the platform 120 moves (for example, raises). Then, as the slanted end face 32 of the first optical waveguide 130 moves (for example, rises), the refraction position of light moves (moves in the direction orthogonal to the axis of the first optical waveguide 130). As a result, the optical axis moves (moves in the direction orthogonal to the axis of the first optical waveguide 130). If the platform 120 is moved (for example, raised) too much,
As shown in FIG. 1C, the optical axis and the optical portion 112 are displaced again.

As shown in FIG. 1 (A) or FIG. 1 (C), even if the optical axis is deviated from the optical portion 112, light does not completely enter the optical portion 112. Figure 1
As shown in (B), the highest optical transmission sensitivity can be obtained if the optical axis and the optical portion 112 match, and the greater the deviation between the two, the lower the optical transmission sensitivity. Further, the light may travel while refracting inside the first to third optical waveguides 130, 140, 230 (for example, the interface between the core and the clad).

An actuator 150 is used to move (elevate) the platform 120. For example, from the energy source 154 (eg, heater) to the cushion 1
By supplying energy to 52 (for example, turning on the heater), the cushion 152 expands and the platform 120 rises. Specifically, the position (height) of the platform 120 can be adjusted according to the amount of energy from the energy supply source 154.
For that purpose, an energy supply source 154 (for example, a heater) that can adjust the amount of energy in a stepless manner may be used.

In the present embodiment, the signal (electrical signal) output by the light receiving element (first optical element 110) by receiving light is repeatedly received, so that the detection of the optical transmission sensitivity is repeated. Compare the detection results. The comparison is
For example, a comparator of the electronic component 106 is used. A signal (electrical signal) from the light receiving element (first optical element 110)
May be received by a comparator, or the optical transmission device may further include a measuring device. Then, the driver of the actuator 150 is controlled based on the comparison result. The control is performed by the controller of the electronic component 106, for example. Then, based on the control, the driver drives the actuator 150. The driver is an electronic component 1
06 may be incorporated. The optical transmission device has a function of performing such feedback control.

Specifically, for example, when the optical transmission sensitivity is detected in the state shown in FIG. 1A, the detection result is stored in the comparator (the storage section thereof). Next, as shown in FIG. 1B, when the platform 120 moves (raises) and detects the optical transmission sensitivity, the detection result is stored in the comparator (the storage unit thereof). Then, the optical transmission sensitivity of the previous time (FIG. 1A) and the optical transmission sensitivity of this time (FIG. 1B) are compared. As a result, if the optical transmission sensitivity of this time is higher than that of the previous time, it is determined that the moving direction of the platform 120 is correct. Where the platform 120
However, if it is known that the highest optical transmission sensitivity can be obtained at the position of FIG. 1B (for example, when the maximum value of the optical transmission sensitivity is input to the comparator etc.), the platform 120 is stopped at this position. However, the optical transmission device according to the present embodiment does not have that function. Therefore, as shown in FIG. 1C, the platform 120 is further moved (raised) to detect the optical transmission sensitivity, and the detection result is stored in the comparator (the storage unit thereof). And last time (Fig. 1
The optical transmission sensitivity of (B)) is compared with the optical transmission sensitivity of this time (FIG. 1C). As a result, the optical transmission sensitivity of this time is lower than that of the previous time, so that it is determined that the moving direction of the platform 120 is wrong. Then, the platform 120 is moved in the opposite direction (downward direction). The above control is repeated (every predetermined period) to correct the position of the platform 120. According to the present embodiment, since the above control is performed, the optical transmission sensitivity can be increased.

In the present embodiment, the first optical element 110 is a light receiving element and the second optical element 210 is a light emitting element.
Conversely, the first optical element 110 may be a light emitting element and the second optical element 210 may be a light receiving element. In that case, the above description applies, except that the traveling direction of light is reversed.
This also applies to the following embodiments.

Further, in the present embodiment, the second optical element 2
Although the platform 220 on which 10 is mounted does not move, it may be configured to move. For more information,
The platform 120 and the actuator 150,
It may be applied to the second optical element 210 side. In that case, both platforms 120 and 220 will be controlled. This also applies to the following embodiments.

(Second Embodiment) FIG. 2 is a diagram showing a part of an optical transmission device according to a second embodiment to which the present invention is applied. In this embodiment, a cushion 160 is used instead of the cushion 152 of the first embodiment. The cushion 160 is an elastic layer having a plurality of spaces for sealing gas. The cushion 160 may be a tape or a sheet. The cushion 160 may be arranged so as to protrude from the platform 120. Accordingly, the energy source 162 may also be arranged so as to protrude from the platform 120.
According to this, the positional accuracy of providing the cushion 160 may be low. Other configurations are the same as those in the first embodiment.

(Third Embodiment) FIG. 3 is a diagram showing a part of an optical transmission device according to a third embodiment of the present invention. In this embodiment, a cushion 170 is used instead of the cushion 152 of the first embodiment. The cushion 170 is an elastic layer (for example, tape) containing air bubbles (or air capsules in the form of microcapsules). As such a cushion 170, "Riva Alpha" (trademark) of Nitto Denko Corporation can be used. The cushion 170 may be arranged so as to protrude from the platform 120. Accordingly, the energy supply source 172 may also be arranged so as to protrude from the platform 120. According to this, the positional accuracy of providing the cushion 170 may be low. Other configurations are the same as those in the first embodiment.

(Fourth Embodiment) FIGS. 4A to 4
(B) is a diagram showing an optical transmission device according to a fourth embodiment of the present invention. The light transmission device according to the present embodiment has a different actuator structure as compared with the light transmission device according to the first embodiment. That is, the actuator according to the present embodiment includes the actuator 150 described in the first embodiment and the second actuator 180.
Including and The second actuator 180 may include a cushion 182 and an energy source 184.

In this embodiment, the platform 18
One of the actuator 150 and the second actuator 180 is arranged on each side of the moving direction of 6 (or the first optical waveguide 130). Figure 4 (A)
In the example shown in, the actuator 150 is provided on the side of the second optical waveguide 140 in the platform 186,
The second actuator 180 is provided on the opposite side. Further, the second actuator 180 is sandwiched between the platform 186 and the support 188. The support 188 is fixed at a position relative to the second optical waveguide 140. For example, the support 188 is the substrate 1
It is fixed at 00.

The actuator 150 and the second actuator 180 move in the same direction in the platform 186.
(Or the first optical waveguide 130) is moved. Therefore, the actuator 150 and the second actuator 18
0 does the opposite. For example, as shown in FIG. 4A, when the cushion 152 contracts, the cushion 182 expands. On the contrary, as shown in FIG.
When the cushion 152 is inflated, the cushion 18
2 contracts.

According to this, the force for moving the platform 186 is enhanced by the actuator 150 and the second actuator 180. In particular, FIG.
In the case shown in (A), the expansion of the cushion 182 serves as a force for lowering the platform 186. Therefore,
The platform 186 can be lowered against the friction between the hole 102 and the first light guide 130. Note that the contents of this embodiment can be applied to other embodiments.

(Fifth Embodiment) FIG. 5 is a diagram for explaining a method of manufacturing an optical transmission device according to a fifth embodiment of the present invention. In this embodiment, the optical transmission device described in the first embodiment (not yet a finished product in this embodiment) is obtained (for example, manufactured or purchased). Then, the platform 120 is moved to the position where the optical transmission sensitivity is the highest. In the first embodiment, automatic control (for example, feedback control) was performed, but in the present embodiment, this may be performed manually. In that case, the electronic component 106 may be omitted. Then, the moving position of the platform 120 is fixed. For example, resin 190
The platform 120 is fixed to the substrate 100 by. In this way, a light transmission device as a finished product is obtained. According to this embodiment, an optical transmission device having high optical transmission sensitivity can be obtained.

(Sixth Embodiment) FIG. 6 is a diagram for explaining a method of manufacturing an optical module according to a sixth embodiment of the present invention. In the present embodiment, the first optical element 110 of the optical transmission device described in the first embodiment is used.
Obtain (eg, manufacture or purchase) the side structure. This structure corresponds to the first optical element 11 described in the first embodiment.
0, the platform 120, the first optical waveguide 130, and the actuator 150. The structure also has a second optical waveguide 302. Second optical waveguide 3
02 forms a part of the substrate 300. Substrate 300 and second
The same contents as those of the substrate 100 and the second optical waveguide 140 described in the first embodiment correspond to the optical waveguide 302. The second optical waveguide 302 includes a connection optical waveguide 304.
May be optically connected. The connection optical waveguide 304 is
It may be an optical fiber.

In this embodiment, the first optical element 110 is a light receiving element. First and second optical waveguides 130, 30
Light is incident on the first optical element 110 (the optical portion 112 thereof) through the light source 2 (and the connecting optical waveguide 304).
Then, the platform 120 is moved to the position where the optical transmission sensitivity is the highest. The control is as described in the first embodiment. In the first embodiment, automatic control (for example, feedback control) was performed, but in the present embodiment, this may be performed manually. In that case, the electronic component 106 may be omitted. Then, the moving position of the platform 120 is fixed. For example, the resin 306 may be used to connect the platform 120 to the substrate 300.
Fixed to. In this way, an optical module is obtained. According to this embodiment, an optical module having high optical transmission sensitivity can be obtained.

In the present embodiment, the first optical element 1
Although 10 is a light receiving element, a light emitting element may be used as the first optical element 110. In that case, the light emitted from the first optical element (light emitting element) 110 through the first and second optical waveguides 130 and 302 (and the connecting optical waveguide 304) is received by the light receiving element. After that, the first control
The contents described in the embodiment may be applied.

(Seventh Embodiment) FIG. 7 is a diagram for explaining an optical transmission device according to a seventh embodiment of the present invention. In the present embodiment, a plurality of third optical waveguides 23 are provided between the first optical waveguide 130 and the second optical element 210.
It has 0, 310, and 312. The light transmission device according to the present embodiment has a plurality (two) of substrates 314 and 316. The substrates 314 and 316 have a configuration obtained by dividing the substrate 100 of the first embodiment into two. In other respects, the contents of the first embodiment are applied to this embodiment.

In the present embodiment, the configuration on the first optical element 110 side (optical element 110, platform 120, first optical element 110,
Optical waveguide 130, second optical waveguide 318, and actuator 150. ) And the configuration on the second optical element 210 side (including the optical element 210, the platform 220, and the third optical waveguides 230 and 310), the third optical waveguide 312 is arranged. An optical fiber or the like can be used as the third optical waveguide 312 to perform optical transmission between a plurality of electronic devices.

For example, referring to FIG. 8, the optical transmission device 110.
Reference numeral 0 interconnects electronic devices 1102 such as a computer, a display, a storage device, and a printer.
The electronic device 1102 may be an information communication device. The optical transmission device 1100 includes a third optical waveguide 3 such as an optical fiber.
It has a cable 1104 including twelve. Light transmission device 11
00 may be one in which plugs 1106 are provided at both ends of the cable 1104. Each plug 110
The structure on the side of the first or second optical element 110, 210 is provided in the unit 6. An electric signal output from one of the electronic devices 1102 is converted into an optical signal by the light emitting element,
The optical signal is transmitted through the cable 1104 and converted into an electric signal by the light receiving element. The electric signal is transmitted to another electronic device 11
It is input to 02. Thus, according to the optical transmission device 1100 according to the present embodiment, the electronic device 1 is
102 information can be transmitted.

FIG. 9 is a diagram showing a usage pattern of the optical transmission device according to the embodiment to which the present invention is applied. Light transmission device 1
Reference numeral 112 connects between the electronic devices 1110. Electronic device 1
As 110, a liquid crystal display monitor or a digital compatible CRT (may be used in the fields of finance, mail order, medical care, education), liquid crystal projector, plasma display panel (PDP), digital TV, cash register of retail store ( POS (Point of Sale Scanning), video,
Examples include tuners, game machines, printers, and the like.

The present invention is not limited to the above-described embodiment, but various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations having the same function, method and result, or configurations having the same purpose and result). Further, the invention includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. Further, the present invention includes a configuration having the same effects as the configurations described in the embodiments or a configuration capable of achieving the same object. Further, the invention includes configurations in which known techniques are added to the configurations described in the embodiments.

[Brief description of drawings]

FIG. 1A to FIG. 1C are views for explaining an optical transmission device according to a first embodiment to which the present invention is applied.

FIG. 2 is a diagram illustrating an optical transmission device according to a second embodiment of the present invention.

FIG. 3 is a diagram illustrating an optical transmission device according to a third embodiment of the present invention.

FIG. 4 (A) and FIG. 4 (B) are diagrams illustrating an optical transmission device according to a fourth embodiment of the present invention.

5 (A) to 5 (B) are views for explaining a method of manufacturing the optical transmission device according to the fifth embodiment of the present invention.

FIG. 6 is a diagram illustrating a method of manufacturing an optical module according to a sixth embodiment of the present invention.

FIG. 7 is a diagram showing an optical transmission device according to a seventh embodiment of the present invention.

FIG. 8 is a diagram showing an optical transmission device according to a seventh embodiment of the present invention.

FIG. 9 is a diagram showing a usage pattern of an optical transmission device according to a seventh embodiment of the present invention.

[Explanation of symbols]

102 holes 110 Optical element 120 platforms 130 First optical waveguide 132 end face 134 Optical first connection 140 Second optical waveguide 150 actuators 152 cushion 154 Energy source 210 Second optical element 230 Third Optical Waveguide

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H04B 10/12 H04B 9/00 Q 10/13 10/135 10/14 F term (reference) 2H036 MA05 MA07 NA01 2H037 AA01 BA02 BA11 CA32 DA03 DA06 DA15 2H041 AA14 AB27 AC07 AZ02 AZ03 5F089 AA01 AB01 AC13 AC17 AC20 CA03 DA05 5K002 BA03 BA15 BA21 BA32 FA01

Claims (16)

[Claims] 1. A first optical element, a platform on which the first optical element is mounted, a first optical element optically connected to the first optical element, and a relative position of the platform is fixed. A first optical waveguide, a second optical waveguide arranged at a position optically connectable to the first optical waveguide, and a first optical element and an optical device through the first and second optical waveguides. A second optical element that is electrically connected, and an actuator that moves the platform along the axis of the first optical waveguide. In the first optical waveguide, the first optical element is provided. The tip end surface on the side opposite to is inclined to such an extent that an optical path can be changed by reflecting light between a direction along the axis and a direction intersecting the axis, and an optical first optical path for the second optical waveguide is formed. 1 has a connecting portion on a side surface, and the first connecting portion Moving along the axis of the first optical waveguide with the movement of the platform by the actuator, the second optical waveguide having an optical second connection to the first optical waveguide. However, the second connecting portion is located within a moving range of the first connecting portion, and one of the first and second optical elements is a light receiving element,
The other is a light emitting element, and an optical transmission device in which control is performed to increase optical transmission sensitivity detected based on light input to the light receiving element by movement of the platform. 2. The light transmission device according to claim 1, further comprising a driver that drives the actuator. 3. The optical transmission device according to claim 2, wherein a signal is repeatedly received from the light receiving element, the detection of the optical transmission sensitivity is repeated, and a comparison is made between the previous detection result and the current detection result. An optical transmission device further comprising: a controller that controls the driver based on a comparison result by a comparator. 4. The optical transmission device according to claim 1, wherein the tip end surface of the first optical waveguide is inclined at an angle that totally reflects light traveling inside. Light transmission device. 5. The optical transmission device according to claim 1, further comprising a guide that permits movement of the first optical waveguide in the axial direction and regulates movement in the direction intersecting the axis. The optical transmission device further comprising: the platform to move along the axis of the first optical waveguide when the guide restricts the movement of the first optical waveguide. 6. The light transmission device according to claim 5, wherein the guide is a hole into which the first optical waveguide is inserted, and a part of an inner wall surface of the hole is the second connection portion. Is a light transmission device. 7. The light transmission device according to claim 1, wherein the actuator includes a cushion and an energy supply source that deforms the cushion. 8. The light transmission device according to claim 7, wherein the energy supply source is a heater, the cushion is expanded by heat supplied from the heater, and the platform is raised by expansion of the cushion. Light transmission device. 9. The light transmission device according to claim 8, wherein the cushion is an elastic layer that seals gas. 10. The light transmission device according to claim 8, wherein the cushion is an elastic layer containing bubbles. 11. The optical transmission device according to claim 1, wherein the first and second optical elements are attached to one substrate, and the second optical waveguide is the optical waveguide. An optical transmission device formed on one substrate. 12. The optical transmission device according to claim 1, wherein at least one third optical connection optically connects the second optical waveguide and the second optical element. An optical transmission device further comprising an optical waveguide. 13. A method for manufacturing an optical transmission device, comprising: (a) a first optical element, a platform on which the first optical element is mounted, and an optical connection with the first optical element. A first optical waveguide whose relative position with respect to the platform is fixed, a second optical waveguide arranged at a position optically connectable to the first optical waveguide, and the first and second optical waveguides. A second optical element optically connected to the first optical element through the optical waveguide of, and an actuator for moving the platform along an axis of the first optical waveguide, In the first optical waveguide, the tip end surface on the side opposite to the first optical element is inclined so that the optical path can be changed by reflection of light between the direction along the axis and the direction intersecting the axis. And an optical first for the second optical waveguide. A connecting part on a side surface, the first connecting part moves along an axis of the first optical waveguide with the movement of the platform by the actuator, and the second optical waveguide is the first optical waveguide. One of the first and second optical elements has an optical second connection portion for the first optical waveguide, wherein the second connection portion is located within a movement range of the first connection portion. Is a light receiving element,
On the other hand, a structure that is a light emitting element is obtained, and (b) the platform is moved by the actuator to a position where the light transmission sensitivity detected based on the light input to the light receiving element is the highest, A method of manufacturing an optical transmission device, comprising fixing the position of the platform in the moving direction. 14. A method of manufacturing an optical module, comprising: (a) a first optical element which is one of a light receiving element and a light emitting element; a platform on which the first optical element is mounted; and the first optical element. A first optical waveguide optically connected to an optical element and fixed in a relative position to the platform, and a second optical waveguide arranged at a position optically connectable to the first optical waveguide. And an actuator that moves the platform along the axis of the first optical waveguide, wherein the tip end surface of the first optical waveguide opposite to the first optical element has an axis Between the direction along the axis and the direction intersecting the axis, which is inclined to such an extent that an optical path can be changed by reflection of light, and has an optical first connection portion for the second optical waveguide on a side surface, The first connecting portion is the actuator. Moves along the axis of the first optical waveguide with the movement of the platform by the data, and the second optical waveguide has an optical second connection portion with respect to the first optical waveguide. , The second connecting portion obtains a structure located within the movement range of the first connecting portion, and (b) the second optical element, which is the other of the light receiving element or the light emitting element, is connected to the first optical element. And optically connected to the first optical element through a second optical waveguide, and (c) by the actuator at a position where the optical transmission sensitivity detected based on the light input to the light receiving element is the highest. A method of manufacturing an optical module, comprising moving the platform to fix a position of the platform in a moving direction. 15. A light transmission device manufactured by the method of claim 13. 16. An optical module manufactured by the method according to claim 14.