JP2003139522A - Image inspection device - Google Patents

Image inspection device

Info

Publication number
JP2003139522A
JP2003139522A JP2001340128A JP2001340128A JP2003139522A JP 2003139522 A JP2003139522 A JP 2003139522A JP 2001340128 A JP2001340128 A JP 2001340128A JP 2001340128 A JP2001340128 A JP 2001340128A JP 2003139522 A JP2003139522 A JP 2003139522A
Authority
JP
Japan
Prior art keywords
image
inspected
camera
inspection
function
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001340128A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Takahashi
高橋一義
Koichi Yashiro
矢代浩一
Mari Ishizuka
石塚真理
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TORAI TEC KK
Original Assignee
TORAI TEC KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TORAI TEC KK filed Critical TORAI TEC KK
Priority to JP2001340128A priority Critical patent/JP2003139522A/en
Publication of JP2003139522A publication Critical patent/JP2003139522A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sorting Of Articles (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a convenient inspection system by reducing the burden on workman, eliminating individual difference or the like of judgement, and providing a specification changing function, a resolution automatic calculating function and an inspection object image segmenting function of an image inspection device. SOLUTION: A positioning machine is provided for selecting an inspection portion by X and Y stages and a projection angle setter while looking at a screen of a CCD camera. Such a means is provided that is operating in agreement with image processing software designating inspection contents at a position of the inspection portion and a script file format description describing operation procedures such as lighting control. A means is provided for automatically calculating resolution of the camera. A segmented image is inspected until uniformity of measurement conditions is secured.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明が属する技術分野】本発明は、カメラで撮影した
画像データ内の異常を自動検出する画像検査装置におい
て、検査手順を簡単に作成及び変更する機能、解像度の
自動補正機能を有する使い勝手の良いシステムを提案す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image inspection apparatus for automatically detecting an abnormality in image data taken by a camera, which has a function of easily creating and changing an inspection procedure and an automatic correction function of resolution, which is easy to use. Suggest a system.

【0002】[0002]

【従来の技術】従来、製品の外観検査は人の目で行なう
ことが主でした。外観検査とは、製品に傷がないか、ゴ
ミは付着していないか、汚れはないか、色のムラはない
か、異なる部品がついていないか、等々の確認である。
見やすいように照明を工夫したり、拡大レンズを付けた
りして検査することもある。これを機械化することも検
討され、部分的にはかなり実施されている。具体的には
カメラ、XY等の駆動装置、コンピューターソフトウエ
アからなる。
2. Description of the Related Art Conventionally, the visual inspection of products has been mainly conducted by human eyes. The appearance inspection is to check whether the product is scratched, dust is not attached, dirt is not present, color is not uneven, different parts are not attached, or the like.
Sometimes the inspection is done by devising lighting so that it is easy to see, or by attaching a magnifying lens. Mechanization of this has also been considered and is partly well implemented. Specifically, it consists of a camera, a driving device such as XY, and computer software.

【0003】[0003]

【発明が解決しようとする課題】本発明が解決しようと
しているのは、下記の課題である。 (1)人による作業は、検査対象が小さい場合が多く、
疲れによる作業者への負担や、見落とし、判断の個人差
等の問題があった。 (2)機械化が一部にしか行き渡らないのは、汎用装置
の組み合わせでは本当に効果的なレベルまで性能を上げ
ることが出来ない。専用のシステムを組むと高価であ
り、仕様変更や他の製品への再利用がやりにくい問題が
指摘されていた。
Problems to be Solved by the Invention The problems to be solved by the present invention are as follows. (1) In many cases, the work to be done by a person is small,
There were problems such as the burden on workers due to fatigue, oversight, and individual differences in judgment. (2) The mechanization is only partially spread, and it is impossible to raise the performance to a truly effective level with a combination of general-purpose devices. It has been pointed out that it is expensive to build a dedicated system, and it is difficult to change specifications and reuse it in other products.

【0004】[0004]

【課題を解決するための手段】上記の問題点を解決する
ために下記のような手段を提案する。 (1) 最初はX,Yステージを位置P1に移動、角度
θ1にて検査する。次は、X,Yステージを位置P2に
移動、角度θ2にて検査する。次は・・・というかたち
で駆動系の位置を決めていく手段をユーザーが選択でき
るような手段を設ける。 (2) 上記(1)の位置での検査内容を指定する画像
処理ソフトウエアと照明制御等の動作手順を記述するス
クリプトファイル形式の記述に従い動作する手段を設け
る。 (3) カメラの解像度を自動的に算出する手段を設け
る。 (4) 測定条件の均一性が確保されるまで細分化した
画像に対して検査する。
[Means for Solving the Problems] In order to solve the above problems, the following means are proposed. (1) First, move the X and Y stages to the position P1 and inspect at the angle θ1. Next, the X and Y stages are moved to the position P2 and inspected at the angle θ2. Next, a means is provided that allows the user to select a means for determining the position of the drive system in the form of ... (2) The image processing software for designating the inspection contents at the position of (1) above and means for operating in accordance with the description in the script file format which describes the operation procedure such as lighting control are provided. (3) A means for automatically calculating the resolution of the camera is provided. (4) The subdivided image is inspected until the uniformity of the measurement conditions is ensured.

【0005】[0005]

【発明の実施の形態】本発明では、画像検査装置の仕様
変更を簡単に出来る仕組みを入れる、解像度を自動的に
算出する機能を設ける、測定条件が均一になるように検
査対象画像を細分化するという手段を設けることで生産
性が高く使い勝手の良いシステムを実現することが出来
た。
BEST MODE FOR CARRYING OUT THE INVENTION In the present invention, a mechanism for easily changing the specifications of an image inspection apparatus is provided, a function for automatically calculating resolution is provided, and an image to be inspected is subdivided so that the measurement conditions are uniform. By providing such a means, it was possible to realize a system with high productivity and ease of use.

【0006】[0006]

【実施例】第1図に本発明の実施例構成図(CCDカメ
ラを使った画像検査装置例)を示す。1は検査対象物4
を撮影するためのカメラであり、リニア駆動系2によっ
て矢印3の方向に移動することが出来る。これはおもに
カメラの焦点距離を確保するために働く。検査対象物を
載せた台は、θ軸モーター5によりカメラの撮影角度を
変えることができる。6はX軸方向7に移動するための
リニア駆動系であり、検査対象物の撮影個所を選択する
ために働く。8は検査対象物の背面から照明する光源で
ある。図示していないが検査対象物前面からの照明手段
も設けることが出来ることは言うまでもない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a block diagram of an embodiment of the present invention (an example of an image inspection apparatus using a CCD camera). 1 is the inspection object 4
It is a camera for photographing, and can be moved in the direction of arrow 3 by the linear drive system 2. This mainly works to secure the focal length of the camera. On the table on which the inspection object is placed, the shooting angle of the camera can be changed by the θ-axis motor 5. Reference numeral 6 denotes a linear drive system for moving in the X-axis direction 7, which works to select a photographing position of the inspection object. Reference numeral 8 denotes a light source that illuminates the back surface of the inspection object. Although not shown, it goes without saying that an illumination means from the front surface of the inspection object can be provided.

【0007】第2図で画像処理による画像のゴミを見つ
け出す方法について説明する。キズやゴミは、周囲の色
に対して異なる色、濃度をしている。正常な画像は、所
定の正規分布内に収まるがキズ、ゴミはこれらから逸脱
することを特徴にして不具合を見つけ出す。具体的な例
をもって説明する。図2−1のように検査対象の画像が
グレイの中に黒っぽくゴミ画像が存在する場合を考え
る。この場合の濃度データのヒストグラムをとると図2
−2のようになる。平均値が120.75で標準偏差が3.91と
算出された。この画像の場合、60*50ピクセルであ
るので3000個のピクセルが存在する。3.5σの範囲
(120.75-3.5*3.91〜120.75+3.5*3.91)に正常な画像が
ほぼ全て存在することが予想されるのでこの範囲以外の
ピクセルを黒く他は白の画像を作成すると図2−3にな
る。これで中心部のゴミ位置だけが黒く塗りつぶされ
て、結果的にゴミを抽出できたことになる。この黒点の
ピクセル数をカウントするとゴミの大きさがわかる。
A method for finding dust in an image by image processing will be described with reference to FIG. Scratches and dust have different colors and densities with respect to the surrounding colors. A normal image fits within a predetermined normal distribution, but scratches and dust deviate from these to find defects. A specific example will be described. Consider a case where an image to be inspected is dark in gray and a dust image is present as shown in FIG. A histogram of the density data in this case is shown in FIG.
It becomes like -2. An average value of 120.75 and a standard deviation of 3.91 were calculated. For this image, there are 3000 pixels since there are 60 * 50 pixels. It is expected that almost all normal images will exist in the 3.5σ range (120.75-3.5 * 3.91 to 120.75 + 3.5 * 3.91), so if you create a black image for pixels outside this range and a white image for others, it will be as shown in Figure 2- It will be 3. With this, only the dust position in the center is painted black, and as a result, dust can be extracted. The size of dust can be known by counting the number of pixels of the black dots.

【0008】第3図は、駆動系の動作手順を入力するた
めの画面である。第1図には示していないがカメラの出
力画像はモニター上にリアルタイムで表示される。ユー
ザーはカメラの画面を見ながら検査したい位置にコンピ
ューターGUI上のX軸、Z軸、θ軸モーター移動キー
を押して、OKなら確定キーを押して登録する。これを
繰り返すことで駆動系の動作手順を登録することが出来
る。
FIG. 3 is a screen for inputting the operating procedure of the drive system. Although not shown in FIG. 1, the output image of the camera is displayed on the monitor in real time. The user presses the X-axis, Z-axis, and θ-axis motor movement keys on the computer GUI at the position to be inspected while looking at the camera screen, and if OK, presses the enter key to register. By repeating this, the operating procedure of the drive system can be registered.

【0009】第4図では、画像の解像度を算出する機能
を説明する。本実施例では、テスト画像は黒い点が1つ
ある画像である。最初は図4−1の位置に黒点があった
とする。たとえばX軸駆動系をLインチ移動してあとの
画像が図4−2であるとする。図4−1と4−2の黒点
の重心を計算する。ここで、重心(X0、Y0)の計算方法
は、黒点を構成するn個の各ピクセルの座標を(Xi,Yi)
としてX0={ΣXi}/n、Y0={ΣYi}/nで算出できる。図
4−1の座標を(x1,y1) 図4−2の座標を(x2,y2)とす
ると、ピクセル上の空間距離は、√{(x1-x2)^2+(y1-y
2)^2}=Lインチとなり、画像の解像度DPI=√{(x1
- x2)^2+(y1-y2)^2}/Lで計算できる。解像度の設定も
上記の「駆動系の測定条件トレース機能」と同じで、画
面上で指定して(x1,y1)の位置まで動かして「セッ
ト」、(x2,y2)の位置まで動かして「セット」を押すと
解像度が自動的に計算、設定されることになる。
FIG. 4 illustrates the function of calculating the image resolution. In this embodiment, the test image is an image with one black dot. It is assumed that there is a black dot at the position shown in Fig. 4-1 at first. For example, assume that the X-axis drive system is moved by L inches and the subsequent image is shown in FIG. Calculate the center of gravity of the black dots in Figures 4-1 and 4-2. Here, the method of calculating the center of gravity (X0, Y0) is to calculate the coordinates of each of the n pixels forming the black dot as (Xi, Yi).
Can be calculated as X0 = {ΣXi} / n and Y0 = {ΣYi} / n. If the coordinates in FIG. 4-1 are (x1, y1) and the coordinates in FIG. 4-2 are (x2, y2), the spatial distance on the pixel is √ {(x1-x2) ^ 2 + (y1-y
2) ^ 2} = L inches, and the image resolution DPI = √ {(x1
-It can be calculated by x2) ^ 2 + (y1-y2) ^ 2} / L. The resolution setting is also the same as the above "Drive system measurement condition trace function", specify it on the screen and move it to the (x1, y1) position, then "Set", and move it to the (x2, y2) position. Pressing "Set" will automatically calculate and set the resolution.

【0010】次に検査手順全体を記述するための方法に
ついて説明する。そのためには画像処理内容の部品化す
る事が必要である。部品化するとは、機能毎にソフトウ
エアを分割して用意することである。そうすれば検査対
象物が変更になる度にプログラムを書きかえるという、
生産性の低下を避けることが出来る。画像検査は基本的
に、被検査対象の移動(駆動系の制御)と画像取りこ
み、画像処理と判定、結果の出力からなる。追加すれば
照明の制御である。これらを部品化して組み合わせるこ
とが出来るプラットフォームを作れば、汎用性がアップ
する。そして全体の処理手順をスクリプトファイル形式
に記述して汎用性を高めることが出来る。下記にその例
を示す。
Next, a method for describing the entire inspection procedure will be described. For that purpose, it is necessary to divide the contents of image processing into parts. To make it into a component means to divide and prepare software for each function. That way, every time the inspection object changes, the program will be rewritten,
Productivity decline can be avoided. The image inspection basically consists of movement of an object to be inspected (control of drive system), image capturing, image processing and determination, and output of results. It is lighting control if added. If you create a platform that can combine these into parts, the versatility will increase. The general processing procedure can be described in a script file format to enhance versatility. An example is shown below.

【0011】 スクリプト形式の記述例 ------------------------------------------------------------------------ -------------------------- START Light 1 on, Light 2 off:2つの光源の内1を点灯、2を消灯する。 Move1:測定位置トレース機能で指定した1へ移動する。 Capture size1, param1,param2:指定のサイス゛、ハ゜ラメータで画像取りこみする。 Img_process1:指定の画像処理と判定、結果の出力を行なう。 Move2:測定位置トレース機能で指定した2へ移動する。 Capture size1, param1,param2:指定のサイス゛、ハ゜ラメータで画像取りこみする。 Img_process1:指定の画像処理と判定、結果の出力を行なう。 Light 1 off, Light 2 on:2つの光源の内1を消灯、2を点灯する。 Move3:測定位置トレース機能で指定した3へ移動する。 Capture size2, param1,param2:指定のサイス゛、ハ゜ラメータで画像取りこみする。 Img_process2:指定の画像処理と判定、結果の出力を行なう。 END ------------------------------------------------------------------------ --------------------------[0011] Script format description example -------------------------------------------------- ---------------------- -------------------------- START Light 1 on, Light 2 off: Turn on 1 of the 2 light sources and turn off 2 of them. Move1: Moves to 1 specified by the measurement position trace function. Capture size1, param1, param2: Capture image with specified size and parameter. Img_process1: Specified image processing, judgment, and output of results. Move2: Move to 2 specified by the measurement position trace function. Capture size1, param1, param2: Capture image with specified size and parameter. Img_process1: Specified image processing, judgment, and output of results. Light 1 off, Light 2 on: Turn off 1 of the 2 light sources and turn on 2. Move3: Move to 3 specified by the measurement position trace function. Capture size2, param1, param2: Capture image with specified size and parameter. Img_process2: Specified image processing, judgment, and output of results. END -------------------------------------------------- ---------------------- --------------------------

【0012】全体の画像を同一の判断基準で処理しよう
としてもうまく行かない場合がある。これは画面の右上
と左下で測定条件が異なるため、同一の判定基準では矛
盾が生じる事があるためである。測定条件とは例えば、
光量とかピントとかである。この問題を解決するために
条件がほぼ同一な小空間に分割して処理することが有効
である。この小空間をウインドーと読んでいる。図5に
示すのは1画面を4分割して画像処理をかける場合であ
る。
Attempts to process the entire image with the same criteria may not work. This is because the measurement conditions are different on the upper right and lower left of the screen, and thus the same criterion may cause inconsistency. For example, the measurement conditions are
The amount of light and the focus. In order to solve this problem, it is effective to divide the processing into small spaces with almost the same conditions and perform processing. I read this small space as a window. FIG. 5 shows a case where one screen is divided into four and image processing is performed.

【0013】また、複数の処理を多段にかけると言うこ
とも重要である。1つのアルゴリズム、1つの判定基準
で正確な判断は出来ない。よって複数のアルゴリズム
(判定基準)で問題点を見逃さないように見つけ出すこ
とが重要になる。Aという検査で30%、Bという検査
で25%、Cという検査で25%、のこり20%はDとい
う検査で見つけ出すというような考え方である。図6に
その概念を示す。
It is also important to apply a plurality of processes in multiple stages. Accurate judgment cannot be made with one algorithm and one criterion. Therefore, it is important to find out the problems with multiple algorithms (criteria) so as not to overlook the problems. The idea is to find out 30% by inspection A, 25% by inspection B, 25% by inspection C, and 20% by weight inspection D. The concept is shown in FIG.

【0014】[0014]

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の構成例FIG. 1 is a configuration example of the present invention.

【図2】画像処理の例FIG. 2 Example of image processing

【図3】測定位置をトレースするための画面例[Figure 3] Screen example for tracing the measurement position

【図4】解像度測定の説明図FIG. 4 is an explanatory diagram of resolution measurement.

【図5】画像分割処理の説明図FIG. 5 is an explanatory diagram of image division processing.

【図6】多段画像処理の説明図FIG. 6 is an explanatory diagram of multistage image processing.

【0015】[0015]

フロントページの続き Fターム(参考) 2F065 AA17 AA49 AA58 DD03 DD04 FF04 GG09 HH16 JJ03 JJ26 KK03 MM03 MM04 MM07 PP12 QQ03 QQ42 QQ43 QQ51 SS13 UU05 2G051 AB01 AB02 AC02 AC15 CA04 DA07 EC02 ED09 ED23 3F079 CA31 CA41 CB29 CB37 EA16 5B057 AA01 BA02 BA24 DA03 DA20 DB02 DB09 DC05 DC06 DC30 DC32 DC36 Continued front page    F term (reference) 2F065 AA17 AA49 AA58 DD03 DD04                       FF04 GG09 HH16 JJ03 JJ26                       KK03 MM03 MM04 MM07 PP12                       QQ03 QQ42 QQ43 QQ51 SS13                       UU05                 2G051 AB01 AB02 AC02 AC15 CA04                       DA07 EC02 ED09 ED23                 3F079 CA31 CA41 CB29 CB37 EA16                 5B057 AA01 BA02 BA24 DA03 DA20                       DB02 DB09 DC05 DC06 DC30                       DC32 DC36

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】被検査対象物の画像読み取り様のカメラと
測定位置を変更する駆動系と、該カメラからの画像を取
りこみ所定の画像処理を行ない、該被検査対象物の良否
を判定する画像検査装置において、制御コンピューター
上の画面より駆動系の位置を指定する機能と、確定した
位置を記録する手段により該駆動系の測定条件をトレー
スする機能を有する事を特徴とする。
1. A camera for reading an image of an object to be inspected, a drive system for changing a measuring position, and an image for determining whether the object to be inspected is good or bad by taking an image from the camera and performing a predetermined image processing. The inspection apparatus is characterized by having a function of designating the position of the drive system on the screen of the control computer and a function of tracing the measurement conditions of the drive system by means of recording the confirmed position.
【請求項2】全体の画像処理ソフトウエアを機能毎に分
解すると共に、少なくとも前記1の駆動条件と該機能別
ソフトウエアと被検査対象物に対する照明制御の3項目
の動作手順を記述するスクリプトファイル形式の記述に
従い動作することを特徴とする画像検査装置。
2. A script file in which the entire image processing software is decomposed for each function, and at least the driving condition of the above 1, the software for each function, and the operation procedure of three items of illumination control for the object to be inspected are described. An image inspection device characterized in that it operates according to the description of the format.
【請求項3】被検査対象物の画像読み取り様のカメラと
測定位置を変更する駆動系と、該カメラからの画像を取
りこみ所定の画像処理を行ない、該被検査対象物の良否
を判定する画像検査装置において、該カメラからの取り
こみ画像の解像度を算出する手段として、テスト画像を
置きその画像を取りこみ(画像A)、既知の所定量
(L)移動後にテスト画像を置きその画像を取りこみ
(画像B)、画像Aと画像BとLから取りこみ画像の解
像度を算出することを特徴とする画像検査装置。
3. A camera for reading an image of an object to be inspected, a drive system for changing a measurement position, an image from the camera and performing predetermined image processing to determine whether the object to be inspected is good or bad. In the inspection apparatus, as a means for calculating the resolution of an image captured from the camera, a test image is placed and the image is captured (image A), and a test image is placed after a known predetermined amount (L) movement and the image is captured (image B), an image inspection apparatus characterized in that the resolution of the captured image is calculated from the images A, B and L.
【請求項4】被検査対象物の画像読み取り様のカメラと
測定位置を変更する駆動系と、該カメラからの画像を取
りこみ所定の画像処理を行ない、該被検査対象物の良否
を判定する画像検査装置において、該被検査対象物の撮
影を複数画像に分けて、測定条件の均一性が確保される
まで細分化した画像に対して検査することを特徴とす
る。
4. A camera for reading an image of an object to be inspected, a drive system for changing a measuring position, and an image for determining whether the object to be inspected is good or bad by taking an image from the camera and performing a predetermined image processing. The inspection apparatus is characterized in that the image of the object to be inspected is divided into a plurality of images and the subdivided images are inspected until the uniformity of the measurement conditions is ensured.
JP2001340128A 2001-11-06 2001-11-06 Image inspection device Pending JP2003139522A (en)

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101207378B1 (en) * 2007-10-03 2012-12-04 가부시끼가이샤 도시바 Visual examination device and visual examination method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101207378B1 (en) * 2007-10-03 2012-12-04 가부시끼가이샤 도시바 Visual examination device and visual examination method

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