JP2003136338A - Machining method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To machine a glass molding metal mold of an optical device made of a cemented carbide material, etc., and to machine a work piece in high precision and in favorable surface roughness. SOLUTION: The work piece 7 is machined in a process to machine it in a specified shape in a direction orthogonal with the vibrating direction of an exciting means by electric discharge machining using an electric discharge machining electrode rod 6 rotating around a shaft center in a state of setting a polishing tool 5 on the exciting means and in a process to polish and machine the roughly machine work piece 7 by feeding it in the vibrating direction toward the polishing tool 5 by vibrating the polishing tool 5 by the exciting means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method and apparatus which are preferably used when processing a fine mold for glass-forming an optical device.

[0002]

2. Description of the Related Art In a fine mold used in the glass molding technology for optical devices such as optical waveguides and optical fiber guides, a cemented carbide material must be used because of its durability.

Generally, fine electric discharge machining is known as a fine machining method for a super hard material. According to this fine electric discharge machining, even a high hardness material such as a super hard material has a high degree of freedom in shape. Is possible.

[0004]

However, in the fine electric discharge machining, when the workpiece 22 is machined by the electrode 21 as shown in FIG. 4, the electrode 2 is processed as the machining progresses.
There is a problem that the consumption of No. 1 is unavoidable and a shape error occurs due to the consumption of the electrode 21, and the processed surface is a set of fine discharge marks 23, so that the processed surface has a rough surface as a whole. There is a problem in that it cannot be used as a mold for an optical device because of low processing accuracy and rough processed surface.

In view of the above-mentioned conventional problems, the present invention is a processing method capable of performing processing with high precision and good surface roughness even on a workpiece made of a cemented carbide material such as a glass molding die of an optical device. And to provide a device.

[0006]

According to the machining method of the present invention, the vibration direction of the vibrating means is changed by the electric discharge machining using the electric discharge machining electrode rod which rotates around the axis while the polishing tool is installed on the vibrating means. Those having a step of processing into a predetermined shape in a direction orthogonal to each other, and a step of vibrating the polishing tool by vibrating means and feeding the roughly processed material toward the polishing tool in the vibration direction for polishing processing Is.

According to this machining method, the material to be roughly machined is fed in the vibration direction while vibrating the polishing tool to carry out polishing, so that it is relatively large compared to the size of the machined surface of the polishing tool. The surface to be machined can be machined with high precision and good surface roughness, and the area of the surface of the polishing tool is relatively small. It is possible to perform processing with high accuracy, and therefore it is possible to perform processing of a fine shape with high accuracy and good surface roughness. Further, since the feed direction of the work material is perpendicular to the polishing tool, it is possible to form a step at a right angle to the fine shape at the end of the fine shape.

[0008] Further, a step of machining an electric discharge machining electrode installed in parallel with a polishing tool into a predetermined shape by electric discharge machining using an electric discharge machining electrode rod rotating around an axis, and an electric discharge machining of a workpiece. If it has a step of feeding the material toward the electrode and rough-machining the workpiece, the rough-machining of the workpiece is also processed in a series of steps. The amount of polishing can be reduced, wear of the polishing tool can be reduced, and processing with higher precision can be performed.

Further, when a tool made of sintered diamond is used, even if a workpiece of cemented carbide is fed by several mm, the tool is hardly deteriorated and the workpiece can be uniformly machined in the feeding direction. .

Further, the machining apparatus of the present invention comprises a mandrel for holding the electric discharge machining electrode rod so as to be rotatable about its axis and a holding means for the material to be machined, and the electric discharge machining electrode rod in the axial direction thereof. It is possible to move and position any one of the vibrating means arranged facing each other and capable of installing the polishing tool, the mandrel, the holding means and the vibrating means in the axial direction of the electric discharge machining electrode rod. The stage,
The other of the mandrel and holding means and the vibrating means is electrically connected between the electric discharge machining electrode rod and the polishing tool, and an XY stage capable of moving and positioning in the direction perpendicular to the axis of the electric discharge machining electrode rod. A discharge generating circuit is provided, and the working effect can be obtained by implementing the above-described processing method.

Further, the electric discharge machining electrodes are arranged side by side on the side of the polishing tool and the vibrating means, and the electric discharge generating circuit is arranged between the electric discharge machining electrode rod and the polishing tool and between the electric discharge machining electrode rod and the electric discharge machining electrode. And the connection between the electric discharge machining electrode and the material to be machined, the rough machining of the material to be machined can be performed collectively by the same device, and the wear of the polishing tool is reduced as described above. And more precise processing is possible.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) A first embodiment of the processing method and apparatus of the present invention will be described below with reference to FIG.
This will be described with reference to FIG.

In FIG. 1, reference numeral 1 denotes a fine shape processing apparatus, which is a Z axis perpendicular to the horizontal direction on an XY stage 2 which can be moved and positioned in the X axis direction and the Y axis direction which are orthogonal to each other in the horizontal direction. A vibrating means 3 capable of oscillating in the direction is installed. A Z stage 4 that can move and position in the Z-axis direction is arranged above the vibrating means 3. The polishing tool 5 can be installed on the vibrating means 3, and the Z stage 4 is equipped with the electric discharge machining electrode rod 6 whose axis is along the Z-axis direction and the die material 7 as the workpiece. It is configured to be fixed. EDM electrode rod 6
Is held by a mandrel 8 which is rotatably driven on the Z stage 4, and is rotatably driven around the axis. The mold material 7 is held by a chuck 9 which is a holding means provided on the Z stage 4. Further, an electric discharge generating circuit 10 is connected between the electric discharge machining electrode rod 6 mounted on the mandrel 8 and the polishing tool 5 via a switch 11, and the electric discharge machining electrode rod 6 performs electric discharge machining on the order of μm. It is configured to be able to. Reference numeral 12 is a processing tank containing the oil of the processing liquid.

In the above structure, as shown in FIG. 2A, the electric discharge generating circuit 10 is operated while the electric discharge machining electrode rod 6 is rotated by the mandrel 8, and the XY stage 2 is operated.
While the above polishing tool material is being electric discharge machined, the polishing tool material is scanned by the XY stage 2 and processed into a predetermined shape, thereby creating the polishing tool 5 having a fine shape. Normal,
When the polishing tool 5 is installed in the processing device, a positioning error of about several μm occurs, but since the edge portion of the polishing tool 5 is processed by this method, a polishing tool having no positioning error can be created.

As a concrete example of processing, a tungsten electrode is used as the electric discharge machining electrode rod 6, and electric discharge machining is performed on a polishing tool material made of sintered diamond having a plate thickness of 300 μm. As a result, the polishing tool 5 in which the triangular grooves of 3 are arranged side by side was obtained.

After making the polishing tool 5 as described above, Z
As shown in FIG. 2B, the mold material 7 that has been roughly processed in advance is attached and fixed to the stage 4, and the mold material 7 and the polishing tool 5 are positioned in the XY directions on the XY stage 2. ,
By vibrating the polishing tool 5 by the vibrating means 3, the Z stage 4 is lowered and the mold material 7 is fed toward the polishing tool 5 to polish the surface of the mold material 7.

As a concrete processing example, a preliminarily rough-machined cemented metal mold material 7 is vibrated at an amplitude of about 10 μm and a frequency of 100 Hz to make the mold material 7 1 μm / se.
As a result of being sent by c, it was possible to process the die material 7 into a die having a mirror surface on the surface and triangular prisms having a length of 5 mm arranged.

Further, in the machining with a normal rotary tool, the shape changes at the end of the fine shape, but according to this method, since the die feeding direction and the plate-like polishing tool 5 are perpendicular to each other, the fine change occurs. It is also possible to form a step at a right angle to the fine shape at the end of the shape.

(Second Embodiment) Next, a second embodiment of the die machining method of the present invention will be described with reference to FIG. The same components as those of the above-described embodiment are designated by the same reference numerals, the description thereof will be omitted, and only different points will be described.

In the present embodiment, the rough machining of the die material 7 is also performed on the fine shape die machining apparatus 1, and XY
Separately from the polishing tool 5, a plate electrode 13 as an electric discharge machining electrode for die machining shown in FIG. 3A is installed and fixed on the stage 2, and the plate electrode 13 and the polishing tool 5 are discharged. After machining a predetermined fine shape with the machining electrode rod 6 as shown in FIG. 2A, the mold material 7 is discharged with a reverse polarity to the plate electrode 13 as shown in FIG. 3B. While being fed, the die material 7 is roughly processed by electric discharge machining. In this electric discharge machining, a shape error due to consumption of the plate electrode 13 becomes a problem, but by forming a plurality of plate electrodes 13 on the XY stage 2 and sequentially feeding the die material 7 to the plate electrode 13, The consumption of the electrode 13 can be ignored.

The mold material 7 thus roughly processed is
As in the case of the first embodiment, a highly accurate mold can be obtained by feeding the polishing tool 5 and polishing the surface.

According to the method of this embodiment, since the rough machining and the polishing of the die material 7 can be collectively performed on the same machining apparatus 1, almost no positioning error of the die material occurs.
By making the plate electrode 13 into a predetermined shape, rough machining can be made almost equal to the product shape, and the final polishing amount can be reduced.

[0023]

According to the processing method and apparatus of the present invention, while the polishing tool is vibrated as described above, the material to be roughly processed is fed in the vibration direction of the polishing tool to carry out the polishing, so that the processing surface of the polishing tool is processed. It is possible to machine a relatively large surface to be machined with high accuracy and good surface roughness, and the area of the machined surface of the polishing tool is relatively small. It is possible to perform high-precision machining by fine electric discharge machining, and thus it is possible to perform high-precision machining of a fine shape with good surface roughness. Also, since the feed direction of the work material to the polishing tool is at a right angle,
It is also possible to form a step at a right angle to the fine shape at the end of the fine shape.

Further, the electric discharge machining electrodes installed side by side with the polishing tool are machined into a predetermined shape by electric discharge machining using an electric discharge machining electrode rod rotating around an axis, and the workpiece is made into an electric discharge machining electrode. When the workpiece is rough-processed by feeding it toward the workpiece, the rough machining of the workpiece is also processed in a series of steps, so there is almost no positioning error of the workpiece, so the polishing amount of the final polishing can be reduced. Therefore, it is possible to reduce the wear of the polishing tool and perform highly accurate processing.

Further, when a tool made of sintered diamond is used, even if a workpiece of cemented carbide is fed by several mm, the tool is hardly deteriorated and the workpiece can be uniformly machined in the feeding direction. .

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a processing device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram of a processing method according to the same embodiment.

FIG. 3 is an explanatory diagram of a processing method according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram of a machining method by electric discharge machining of a conventional example.

[Explanation of symbols]

1 Fine shape processing equipment 2 XY stage 3 Vibrating means 4 Z stage 5 polishing tools 6 EDM electrode rod 7 Mold material (workpiece) 8 mandrels 9 Chuck (holding means) 10 Discharge generation circuit 13 plate electrode (electric discharge machining electrode)

Claims (5)

[Claims] 1. A step of machining into a predetermined shape in a direction orthogonal to the vibration direction of the vibrating means by electric discharge machining using an electric discharge machining electrode rod that rotates around an axis with a polishing tool installed in the vibrating means. And vibrating the polishing tool by vibrating means,
And a step of sending a roughly processed material toward a polishing tool in a vibration direction to perform polishing. 2. A step of machining an electric discharge machining electrode installed in parallel with a polishing tool into a predetermined shape by electric discharge machining using an electric discharge machining electrode rod rotating around an axis, and a workpiece being electric discharge machined. The method according to claim 1, further comprising a step of feeding the material toward the electrode to roughly process the workpiece. 3. The processing method according to claim 1, wherein the polishing tool is a tool made of sintered diamond, and the material to be processed is a superhard material. 4. A mandrel for holding an electric discharge machining electrode rod rotatably around its axis and a holding means for a material to be processed, and the mandrel and the electric discharge machining electrode rod are arranged so as to face each other in the axial direction. In addition, a vibrating means configured to be able to install a polishing tool, a Z stage capable of moving and positioning any one of the mandrel and holding means and the vibrating means in the axial direction of the electric discharge machining electrode rod, the mandrel and the holding means. And an XY stage capable of moving and positioning the other of the vibrating means in a direction perpendicular to the axis of the electric discharge machining electrode rod, and an electric discharge generating circuit electrically connected between the electric discharge machining electrode rod and the polishing tool. A processing device comprising: 5. An electric discharge machining electrode is provided side by side on the side of the polishing tool and the vibrating means, and an electric discharge generating circuit is provided between the electric discharge machining electrode rod and the polishing tool and between the electric discharge machining electrode rod and the electric discharge machining electrode. The machining device according to claim 4, wherein the machining device is configured to be connectable between the electric discharge machining electrode and the workpiece.