JP2003130604A - Configuration measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a configuration measurement device which improves the accuracy of measurement while it makes contact force smaller and expands the width of a measuring object. SOLUTION: The configuration measurement device includes a gravimeter, a gauge head at the upper part of a gravimeter, a means to change the distance of the vertical direction between the gravimeter and the gauge head, a means to measure the variation of the distance of the vertical direction of the gravimeter and the gauge head, a means to change the horizontal distance of the gauge head and the measuring object and a means to measure the variation of the horizontal distance of the gauge head and the measuring object.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring instrument for measuring the shape of a measuring object having a transparent non-metal multilayer film shape.

[0002]

2. Description of the Related Art Conventionally, for measuring the shape of a transparent non-metal multilayer film-shaped measuring object, a contact measuring element is used for the measuring object. These contact forces are measured by Mitutoyo Co., Ltd.'s precision measuring equipment, total force tag No. 13.34
Lever head type probe MLH- manufactured by the same company described in
322, the company's lightmatic head VL-50,
High-precision contact type displacement sensor AT2 etc. described on the home page of Keyence Co., Ltd., 0.02 N, 0.
It was 01N and 0.02N, and none of them had a contact force smaller than this.

It is known that when the contact force is large, the surface of the object to be measured may be damaged or the object to be measured may be deformed. The smaller the contact force, the better.

[0004]

However, the contact force of the conventional contact probe is 0.02N, 0.01N, 0.02N.
Since there was no contact force smaller than this,
The width of the measurement target was narrow and the measurement accuracy was limited.

The present invention has been made in view of the above problems, and an object of the present invention is to reduce the contact force to widen the width of the object to be measured and to improve the measurement accuracy. To provide.

[0006]

In order to achieve the above object, the present invention changes a vertical scale distance between a weighing scale, a stylus placed above the weighing scale, and the weighing scale. Means for measuring the amount of change in the vertical distance between the weighing scale and the measuring element, a means for changing the horizontal distance between the measuring element and the measuring object, and the measuring element and the measuring object It is characterized in that the shape measuring instrument is configured to include means for measuring the amount of change in the horizontal distance.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings.

It is assumed that the object to be measured is always placed on the weighing scale A. When P is the position vector of the measuring object with respect to the probe B, it can be defined as P = αX + βY + γZ (α, β, γ are real numbers).

Where X is a unit quantity vector in the vertical direction,
If Y is a first horizontal unit quantity vector, Z is a second horizontal unit quantity vector, and X, Y, and Z are orthogonal to each other, the vertical distance between the weighing scale and the probe is , ΑX The amount of change in the vertical distance between the scale and the measuring element is the horizontal distance between the ΔαX measuring element and the measuring object, and the changing amount of the horizontal distance between the βY + γZ measuring element and the measuring object is , Δ
(ΒY + γZ).

The means C for changing the vertical distance between the weighing scale and the measuring element is used to change the distance between the weighing scale and the measuring element arranged on the upper part of the weighing scale to change the distance between the weighing scale and the measuring element. To measure the amount of change in the distance between the measuring object placed on the weighing scale and the probe using the means D for measuring the amount of change in the vertical distance between the measuring object and the stylus is measured. For,
This is equivalent to using the means C to change the distance αX and using the means D to measure the distance change amount ΔαX.

The means E for changing the horizontal distance between the measuring element and the measuring object is used to change the horizontal distance between the measuring element and the measuring object so as to change the horizontal distance between the measuring element and the measuring object. The means F for measuring the amount of change in the distance and the amount of change in the horizontal distance between the contact point and the measuring object are measured by changing the distance (βY + γZ) using the means E.
This is equivalent to measuring the change amount Δ (βY + γZ) of the distance using the means F.

"Means C are used to change the distance αX so that the reading amount G of the weighing scale A becomes a non-zero value g, and the means D
Measuring the amount of change in distance ΔαX by using the means E to change the distance (βY + γZ) and measuring the amount of change in distance Δ (βY + γZ) using the means F. The locus of P is obtained, which is the shape of the surface of the measuring object. That is, it functions as a shape measuring instrument.

Where g is the minimum resolution Δ of the weighing scale A.
If it is made equal to G, the contact force of the portion of the probe contacting the object to be measured becomes g.

When a means in which the portion of the measuring element that contacts the measuring object is not made of an elastic body is used, the portion of the measuring object that contacts the measuring element is deformed and the contact force is always g = ΔG. It becomes possible to measure. In this case, if ΔG is sufficiently small, the amount of deformation of the portion of the measuring object that comes into contact with the measuring element is sufficiently small, which causes an undetectable error with respect to the shape measurement accuracy.

By using a means in which the portion of the probe contacting the object to be measured is made of an elastic body, the portion of the probe contacting the object to be deformed is deformed so that the contact force is always g = ΔG. It becomes possible to measure. In this case, if ΔG is sufficiently small, the amount of deformation of the portion of the tracing stylus that comes into contact with the measuring object is sufficiently small, which causes an undetectable error with respect to the shape measurement accuracy.

<First Embodiment> FIG. 1 is a block diagram of a shape measuring instrument according to the present invention.

As shown in FIG. 1, the shape measuring instrument according to the present invention comprises a base, an X stage, a Y stage, a Z stage, a weight scale, a tracing stylus, a tracing stylus pointing member 1, and a tracing stylus pointing member 2. . The X stage fixed on the base is
It is possible to manually move in the left-right direction on the paper surface, and a scale for reading the amount of movement is provided. The Y stage is fixed to the upper part of the X stage, can be manually moved in the direction perpendicular to the paper surface, and is provided with a scale for reading the amount of movement.
The weighing scale is fixed to the upper part of the Y stage, and an object to be measured is placed on it.

A Z stage is separately fixed on the base table, and the upper surface of the Z stage is movable in the vertical direction in the plane of the drawing, and a scale for reading the amount of movement is provided. The tracing stylus indicating member 1 is fixed to the upper surface of the Z stage,
The tracing stylus indicating member 2 is fixed to the tracing stylus indicating member 1, the tracing stylus is fixed to the tracing stylus indicating member 2, and the tracing stylus is configured to move up and down by the same amount when the upper surface of the Z stage moves up and down.

The detailed specifications of each part are as follows: the weighing scale has a minimum reading resolution of 100 mg, the maximum measurement weight of 100 g, the X stage has a maximum stroke of ± 6.5 mm, a minimum feed amount resolution of 10 μm, and the movement amount is a positive value when moved to the right side of the paper. Becomes

The maximum stroke of the Y stage is ± 6.5 m
m, the minimum feed amount resolution is 10 μm, and the amount of movement becomes a positive value when moving to the front side of the paper surface.

Z stage has a maximum stroke of ± 2.5 m
m, the minimum feed amount resolution is 1 μm, and the movement amount becomes a positive value when moving to the lower side of the paper surface. The probe has a diameter of 1 mm and is made of urethane (Shore A50).

On the other hand, as an object to be measured, an S45C iron plate (thickness: 10 μm) having a silicon film (film thickness: 500 μm) on its surface is used.
mm, X-axis moving direction length 20 mm, Y-axis moving direction length 2
0 mm) was prepared and fixed on a weighing scale, and the weight was measured, and the result was 33.7 g.

FIG. 2 is a view for explaining the initial setting state of measurement by the shape measuring instrument according to the present invention.

First, as shown in FIG. 2, the object to be measured is fixed to the upper part of the weight scale of the shape measuring instrument so that the probe is not in contact with the object to be measured on the upper part of the object to be measured. .

The scale reading of the X-axis stage is ± 0.000
mm, Y-axis stage scale reading is ± 0.000 mm,
The Z-axis stage graduation reading is -0.300 mm.

From this state, the Z-axis stage is moved, and as shown in FIG. 1, the probe contacts the surface of the S45C iron plate coated with the silicon film, and the Z-axis stage at the time when the weight scale reaches 33.8 g. When the movement amount of is measured, the scale is +
It was 0.833 mm.

Next, the reading of the scale of the Z-axis stage is -0.
Return the probe to 300 mm, and the probe is S45.
The scale of the X stage is +1.0 away from the C iron plate
Then, the Z-axis stage is moved, and the probe contacts the surface of the S45C iron plate as shown in FIG.
When the amount of movement of the Z-axis stage at the time of reaching 3.8 g was measured, the scale was +0.7900 mm.

Thereafter, similarly, the probe is separated from the S45C iron plate, and the X stage and / or the Y stage is moved in 2 mm increments of 1 mm.
mm inside the square, move the Z-axis stage and the Y stage at each position, and as shown in Fig. 1, the contact point comes into contact with the surface of the S45C iron plate on which the silicon film is applied, and the weight scale weighs 33.8 g. The amount of movement of the Z-axis stage at that time was measured, and the results shown in Table 1 were obtained. Table 1 shows the shape within a 2 mm square of the surface of the S45C iron plate coated with the silicon film.

[0029] By using an electronic balance or the like as the weighing scale, it is possible to set the reading resolution to, for example, about 0.1 mg, further reduce the deformation amount of the surface contact portion, and further reduce the measurement error of the surface shape. By measuring the moving amount of the Z stage with a laser length measuring device, the moving amount measuring resolution can be set to about 0.1 μm, and the measurement error of the surface shape can be further reduced.

<Second Embodiment> Next, a second embodiment of the present invention will be described.

FIG. 3 is a block diagram of the shape measuring instrument according to the second embodiment of the present invention. This Embodiment and the First Embodiment
The difference from this is that in the present embodiment, the X stage and the Y stage are placed on the weighing scale, and the weight of the object to be measured and the weights of the X stage and the Y stage are constantly measured.

<Third Embodiment> Next, a third embodiment of the present invention will be described.

FIG. 4 is a block diagram of a shape measuring instrument according to the third embodiment of the present invention.

In the present embodiment, the object to be measured is fixed on the scale, and the scale is fixed on the X stage.
The stage is fixed on the Y stage, and the Y stage is fixed on the base.

On the other hand, the tracing stylus is fixed to the Z-axis stage via the indicating member, and the Z-axis stage is fixed to the base.

In this embodiment, the X-axis stage, the Y-axis stage, and the Z-axis stage each employ an automatic control stage.
It is connected to a computer. In addition, the weighing scale can also be connected to a personal computer to read the measured values.

Further, in the present embodiment, the amount of movement of the Z stage is controlled while reading the value of the weighing scale with a personal computer, and the values of the X stage, Y stage, and Z stage are read at a constant weight. During the movement control of the X stage and the Y stage, the value of the Z stage is controlled so that the tracing stylus does not contact the measurement object. As a result, the value of the Z stage when the probe contacts the measurement object with a constant contact force with respect to each value of the X stage and the Y stage is read, and thereby the surface shape of the measurement object is automatically measured.

[0038]

As is apparent from the above description, according to the present invention, the weighing scale, the measuring element arranged above the weighing scale, and the vertical distance between the weighing scale and the measuring scale are changed. Means for measuring the amount of change in the vertical distance between the weighing scale and the measuring element, a means for changing the horizontal distance between the measuring element and the measuring object, and the measuring element and the measuring object Since the shape measuring instrument is configured to include means for measuring the amount of change in the horizontal distance, it is possible to obtain an effect that the contact force can be further reduced to widen the width of the measurement object and the measurement accuracy can be improved. .

[Brief description of drawings]

FIG. 1 is a configuration diagram of a shape measuring instrument according to a first embodiment of the present invention.

FIG. 2 is a diagram for explaining a state of initial setting of measurement by the shape measuring instrument according to the first embodiment of the present invention.

FIG. 3 is a configuration diagram of a shape measuring instrument according to a second embodiment of the present invention.

FIG. 4 is a configuration diagram of a shape measuring instrument according to a third embodiment of the present invention.

[Explanation of symbols] 1 Stylus support member 2 Stylus support member

Claims (2)

[Claims] 1. A weighing scale, a stylus located above the weighing scale, means for changing the vertical distance between the weighing scale and the stylus, and a vertical distance between the weighing scale and the stylus. Shape having means for measuring the amount of change in the horizontal distance between the probe and the measurement object, and means for measuring the amount of change in the horizontal distance between the probe and the measurement object Measuring instrument. 2. The shape measuring instrument according to claim 1, wherein the portion of the measuring element that comes into contact with the measuring object is made of an elastic body.