JP2003098327A - Semitransmissive reflection base plate and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simpler method for manufacturing an open type translucent reflection base plate. SOLUTION: A microlens array (31) is formed on a whole face of such a semitransmissive base plate (3) as glass and a reflection film (33) is formed on the other face. The microlens array (31) is irradiated with a laser beam (54) and a fine hole (34) is formed in the reflection film (33). A convex lens, a 'Selfoc' lens, a lens of a distributed refractive index type, a Fresnel lens or a diffraction lens is usable in the microlens array. Thus, the open type semitransmissive reflection base plate (3) is available without the positioning process of the microlens array (31) and the fine hole (34), an etching process for forming the fine hole (34) or the like.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semi-transmissive reflective film used in an electro-optical device such as a liquid crystal display device.

[0002]

2. Description of the Related Art A semi-transmissive-semi-reflective liquid crystal display device is used which uses external light as a light source of a display in a bright place and uses an internal light source in a dark place. This type of liquid crystal display device is useful for portable information devices (portable personal computers, mobile phones, etc.) having a limited power supply capacity. A semi-transmissive semi-reflective liquid crystal display device uses a semi-transmissive reflective film that reflects external light and transmits backlight light. There are roughly two types of semi-transmissive reflective films.

The first method is a semi-transmissivity type. In this type, a reflecting film having an intermediate transmittance is uniformly formed on one surface of the reflecting plate. External light is reflected by this reflective film, but part of it passes through the reflective film. Further, the backlight light is transmitted with the transmittance of this reflective film.

The second method is an aperture type. In this type, a total reflection film is uniformly formed on one surface of the reflection plate,
A large number of minute openings are formed in this total reflection film. External light is reflected by the reflective film, and backlight light is transmitted through the opening. Therefore, the transmittance of the backlight light is determined by the area ratio of the opening holes in the reflecting surface.

In any of the systems, when the reflection efficiency with respect to external light is increased, the transmittance of backlight light is lowered, and conversely,
There is a trade-off relationship that, when the transmittance of backlight light is increased, the reflection efficiency with respect to external light is decreased. Therefore, it is difficult to provide a transflective display device that provides a bright screen both outdoors and indoors.

Therefore, in the aperture type reflection film, a microlens array is provided, and the backlight light is condensed into each aperture hole by the microlens to enhance the transmission efficiency, and the reflection efficiency with respect to the external light and the transmission of the backlight light. A method of making the rate compatible is considered. For example, Japanese Patent Application 200
Such a proposal is made in No. 1-038505.

[0007]

However, the number of steps such as formation of fine holes in the reflection film, formation of a microlens array, alignment of the fine holes in the reflection film with the microlens array, etc. is increased. If an aperture type semi-transmissive reflective film is used, an increase in cost of the reflective substrate cannot be avoided.

[0008] Therefore, an object of the present invention is to propose a manufacturing method capable of forming an improved aperture type semi-transmissive reflection plate in a less troublesome process.

Another object of the present invention is to provide a semi-transmissive reflector which can be manufactured more easily.

Another object of the present invention is to provide a display panel, an electro-optical device, an information device, etc. using the above semi-transmissive reflective substrate.

[0011]

To achieve the above object, a transflective substrate of the present invention is a transparent substrate, a reflective film formed on one surface of the transparent substrate and having a plurality of fine holes, and the transparent substrate. And a microlens array formed on the other surface opposite to the one surface, wherein the reflection films have different reflectances on the front and back sides.

With this structure, external light is efficiently reflected by the reflective film and utilized for display illumination, and at the same time, the opening of the minute holes in the reflective film by the laser light is facilitated.

Preferably, the reflective film is composed of a plurality of films, and the underlying film has a lower reflectance than the film formed thereon. For example, the base film contains aluminum such as titanium, tungsten, or aluminum oxide to reduce reflection of laser light and facilitate opening.

Preferably, the thickness of the transparent substrate is substantially equal to the focal length of the microlens array. As a result, the beam of laser light that has passed through the microlens is condensed on the reflective film and has a high energy density, facilitating the opening of the minute hole.

Preferably, the fine holes are formed at each focal position of the microlens array. Further, the plurality of minute holes of the reflection film are opened by the beam light condensed by the microlens array. Thereby, the micro holes are formed in self alignment with respect to the micro lens.

Preferably, the reflection film has an uneven shape for aligning the reflected light in a fixed direction. Thereby,
A display that is easy to see from the outside can be obtained.

Preferably, the optical axis of each microlens of the microlens array and the normal line of the reflecting surface of the reflecting film are formed so as to intersect obliquely. As a result, a semi-transmissive reflection plate that receives the inclined backlight light from the flat light source and emits it upward is obtained.

Preferably, the microlens array is any one of a convex lens, a SELFOC lens, a gradient index lens, a Fresnel lens and a diffractive lens.
The use of SELFOC lenses allows the microlens array to be made thin. Further, by using the gradient index microlens lens, it becomes possible to use both the substrate of the liquid crystal display and the semi-transmissive reflective substrate.
Further, by using the Fresnel lens and the diffractive lens, it becomes possible to form the microlens array thinly.

Preferably, the semi-transmissive reflective substrate also serves as one of a pair of substrates of the liquid crystal display panel facing each other. Thereby, it becomes possible to form a thinner display panel.

The transflective substrate of the present invention is used in an electro-optical device. Further, this electro-optical display device is used for a digital camera, a mobile information terminal device, a mobile phone device and the like.

The method of manufacturing a semi-transmissive reflective substrate according to the present invention comprises the steps of forming a transparent substrate having a microlens array on one surface, forming a reflective film on the other surface of the substrate, and from the one surface side. Irradiating a laser beam, condensing the laser beam on the reflective film by the microlens, and opening a minute hole in the reflective film.

With this structure, it becomes possible to form fine holes in the reflecting film by laser light using the microlens array.

Preferably, the irradiation of the laser light is performed by scanning the microlens array with the laser light. As a result, it becomes possible to continuously form minute holes near the focal position of the microlens.

Preferably, the scanning of the laser light is adjusted by a rotating mirror for reflecting the laser light emitted from the laser light source, and an F-θ lens arranged so that the laser light is incident on the reflection film at a predetermined angle. And a scanning optical system including.

Preferably, in the process of forming the reflection film, the reflection film is formed so that the reflectance is different between the front and back, and the laser light is applied to the low reflectance side of the reflection film. As a result, the conditions for forming the minute holes by the laser light are made easier.

Preferably, the method further comprises the step of forming the microlens array on one surface of the transparent substrate and the uneven shape on which the reflective film is to be formed on the other surface. This simplifies the manufacturing process by forming concavo-convex shapes on both sides of the transparent substrate at the same time. Specifically, an injection molding method using a mold,
It can be performed by a photopolymerization (2P) method or the like.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 schematically shows an example of an electro-optical device using the semi-transmissive reflective substrate of the present invention. As shown in the figure, the display device 1 includes a flat light source (backlight) 2
, A transflective reflector 3 and a transmissive liquid crystal panel 4
And,

The flat light source 2 includes a light source 21 such as an LED, and a light guide plate 22 which converts light rays emitted from the light source into flat light and emits the light toward the liquid crystal panel 4 side. The light guide plate 22 is made of a transparent resin and has a large number of protrusions 23 formed on the bottom thereof. Further, the light guide plate 22 has a reflection film 24 formed on the outer peripheral surface except the upper surface, and reflects the propagating light beam upward.

The reflection plate 3 is made of a transparent substrate 30 such as glass or resin, a microlens array 31 including a large number of microlenses 32 formed on the lower surface of the substrate 30, and a reflection film formed on the upper surface of the substrate 30. 33 is included. The thickness of the substrate 30 is set to the focal length of the microlens 32. As the micro lens 32, a thin Fresnel lens is preferable. Thereby, the microlens array 31 can be formed thin. Examples of the method of forming the microlens 31 and the substrate 30 include injection molding, photopolymerization (2P) method, dry etching method, wet etching method, and the like, but injection molding and 2P method are preferable. This can increase the accuracy of the lens,
In addition, the manufacturing is easy and the productivity is good.

The reflective film 33 is preferably composed of a plurality of metal films. In this example, two layers are formed. Board 3
The underlayer (first layer) film formed at 0 is formed by depositing aluminum, aluminum oxide, titanium, chromium or the like by a sputtering method to form a reflective film having a relatively low reflectance. The reflection film (second layer) on the upper surface is formed by depositing aluminum, neodymium (Nd) and the like by a sputtering method to form a film having a relatively high reflection efficiency.

With such a structure that the reflectance is different between the front surface and the back surface of the reflective film 33, external light from above is completely reflected, and as will be described later, the reflective film 33 is formed by irradiating a laser beam from below. To facilitate the opening of the micropores 34. Further, by irradiating the laser beam through each microlens 31, each microlens 31
High energy is generated at the focal position of, and the corresponding portion 34 of the reflection film 33 near the focal point is opened in a self-aligned manner, and one micro hole is obtained in one micro lens. By forming the minute holes 34 in the reflective film 33, a semi-transmissive reflective film 33 that reflects external light from above and transmits backlight light from below upward is obtained.

The liquid crystal panel 4 includes a transparent common electrode 42 such as ITO between a transparent upper substrate 41 and a lower substrate 46.
And a liquid crystal 43 and a transparent pixel electrode 40.
A black matrix 49, a TFT circuit (not shown), and the like are arranged around the pixel electrode 40. Opening part (transparent window) 4 surrounded by the black matrix 49
91 are arranged in a matrix and correspond to one pixel. For the upper substrate 41 and the lower substrate 46, various kinds of glass or the like are used. On both sides of the upper substrate 41 and the lower substrate 46,
Polarizing plates 47 and 48 are joined, respectively.

FIG. 2 shows another embodiment. In the figure, parts corresponding to those in FIG. 1 are designated by the same reference numerals, and description of those parts will be omitted.

In this embodiment, the semi-transmissive reflective film 44 and the microlens array 31 are formed on the lower substrate 46 of the liquid crystal panel 4. Thereby, a thinner display device 1 is obtained. The thickness of the substrate 46 is selected to be the focal length of the microlens 32 as much as possible.

The microlens 32 uses a gradient index lens constructed by diffusing a refraction material in a transparent substrate 46, for example, a transparent glass substrate.
This involves immersing a masked glass having microlens positions opened in a solution in which a refraction material (eg, silver ion) is dissolved, and diffusing the refraction material into a hemispherical shape in the glass. For example, by substituting the silver ions for the alkali ions of the glass, the condensing lens 32 can be equivalently obtained by the density distribution of the silver ions diffused in a hemispherical shape.

Also in this embodiment, the reflection film 44 can have a two-layer structure having different reflectances on the front and back sides. As will be described later, the minute holes 45 are opened in the reflective film 44 by the laser beam utilizing the microlens array 31, and the lower substrate 46 is formed.

FIG. 3 shows another example of the semi-transmissive reflector 3. Also in this example, the backlight light L _B is condensed by the microlens array 31 formed on one surface of the substrate 3, and is opened in the reflection film 33 mainly composed of aluminum such as AlNd on the opposite surface. The display panel 4 is illuminated through the minute holes 34. The thickness of the reflective substrate 3 is
It is set to the focal length of the micro lens. Since the focal length depends on the wavelength, for example, the central wavelength 55 in the visible range is
It is set to 5 nm.

However, it differs from the previous embodiment in that the reflecting film 33 has an uneven shape. This is because when the user visually recognizes the display device using outside light, the outside light enters the display panel and is reflected obliquely, so that the display panel is tilted so that characters and the like can be seen well. It corresponds to the fact that there is a tendency to use it.

Therefore, in this embodiment, the external light rays L _{out that} are obliquely incident on the substrate 3 are arranged by the concave-convex reflecting surface 33 in the same direction as possible (in the direction of the eyes of the user). On the other hand, the optical axis of the lens 32 is preliminarily tilted so that the principal ray L _B of the backlight light transmitted through each microlens 32 is emitted while being substantially perpendicular to the substrate 3. The micro lens 32 may be a Fresnel lens. Corresponding to this, the parallel light rays L _B from the plane light source 2 are incident on the microlens array 31. It is desirable that the light emitted from the light guide plate 2 be as parallel as possible (high directivity).

FIG. 4 shows a half having the uneven shape shown in FIG.
1 illustrates a display device 1 including a transflective substrate 3. this
The display device 1 includes a transmissive liquid crystal display panel 4 and a semi-transmissive reflective panel.
It is constructed by stacking a reflective reflector 3 and a flat light source 2.
Has been. Light from the backlight light source 21 is guided by the light guide plate 22.
Is guided by the backlight L from the light guide plate 22. _B
As obliquely emitted. This outgoing ray L_BIs Microlet
The light is condensed by the lens array 31 and is formed on the reflection film 33.
Of the liquid crystal panel 4 through the small holes (pinholes) 34
It is emitted to the front. On the other hand, outside light L_outIs the display panel 4
After being transmitted, the light is reflected by the reflection plate 33 and is again displayed on the display panel.
It passes through 4 and is emitted to the front surface of the display panel.

Next, a method of manufacturing a semi-transmissive reflection plate having the above-mentioned uneven reflection surface and the microlens array (see FIG. 3) having an inclined optical axis will be described.

(1) First, a stamper corresponding to the uneven shape of the reflecting surface (upper surface) and the microlens surface (lower surface) of the reflecting plate 3 is prepared.

(2) Using this stamper, injection molding or sheet molding is performed to form a substrate having concavo-convex shapes on both the reflecting surface and the lens surface.

The substrate manufacturing method is a photopolymerization (2P) method in which a transparent substrate made of glass or resin is coated with an ultraviolet (UV) curable resin, a stamper is pressed and then cured to transfer the shape. (3) An aluminum (Al) / titanium (Ti) film is formed on the reflective surface side of the substrate by a sputtering method or a vapor deposition method,
An aluminum (Al) / neodymium (Nd) film is formed on this. Thereby, a reflection film layer suitable for laser processing and a reflection film suitable for total reflection of external light are formed. In addition,
If there is no problem in laser processing, aluminum (Al)
It is also possible to form only one layer of the neodymium (Nd) film.

(4) Laser light is irradiated from the microlens surface side, and the laser light is condensed on the reflection film on the relatively low reflectance side by way of the microlens to form microscopic holes (pinholes) in the reflection film. ) Is opened.

Next, with reference to FIG. 5, an outline of a processing apparatus for forming fine holes in a reflecting substrate by laser light will be described.

The processing device 50 includes a laser oscillator 51, a polygon mirror (polyhedral mirror) 52, an f-θ lens 53, and a substrate 3.
And a slider (not shown) for moving. The laser light 54 emitted from the laser oscillator 51 is reflected by the polygon mirror 52. The polygon mirror 52 rotates counterclockwise, and repeatedly scans the laser beam 54 from right to left in a fan shape. This laser light 54 is f
The light enters the −θ lens 53 and is corrected so that the direction of the light ray becomes a right angle to the reflection substrate 3, and becomes a slightly convergent light and enters the reflection substrate 3. The laser beam 54 converged by the microlens 32 of the substrate 3 is collected on the reflection film 33, evaporates the reflection film 33, and opens the minute holes 34.

At this time, the incident angle of the light beam 54 with respect to the substrate is adjusted to the incident angle of the backlight light from the light guide plate 22 which is used. Thereby, the laser beam is focused on the focal position of the microlens 31.

Further, vertical scanning of the substrate 3 (sub-scanning)
Is performed by placing the substrate 3 on a slider and moving it. Thereby, the entire surface of the substrate 3 can be scanned with the laser beam.

The laser oscillator 51 may be a high power laser such as a YAG laser or a femtosecond laser. When the laser wavelength is far from the center of the visible light range, even if the laser light 54 of parallel light is irradiated, the laser beam is not focused on the reflection film. In this case, the reflection film 33 is opened by adjusting the beam of the laser light 54 that is incident on the microlens 32 as the diffusion light or the convergence light of the laser light 54 so that the focal point is formed on the reflection film 33. It is possible to

The intensity of the laser light may be modulated in synchronization with the scanning position of the laser light on the substrate. This makes it possible to increase the intensity of the laser beam when the laser beam scans the vicinity of the center of the microlens and decrease the intensity of the other part. By doing so, it is possible to achieve more reliable opening and adjustment of the opening diameter of the minute holes of the reflective film, reduce damage to the substrate, and the like, which is favorable.

In this way, an aperture type semi-transmissive reflective substrate is formed.

Next, examples of electronic equipment provided with a display device including the semi-transmissive reflection type substrate of the present invention will be described below, but the invention is not limited thereto.

<Mobile Computer> First, an example in which the display device according to the above-described embodiment is applied to a mobile personal computer will be described. FIG. 6 is a perspective view showing the configuration of this personal computer.
In the figure, a personal computer 1100 is composed of a main body 1104 having a keyboard 1102 and a display device unit having the above-mentioned display device 1106.

<Mobile Phone> Next, an example in which the display device according to the above-described embodiment is applied to the display portion of a mobile phone will be described. FIG. 7 is a perspective view showing the configuration of this mobile phone. In the figure, the mobile phone 1200 includes a plurality of operation buttons 1202, an earpiece 1024, and a mouthpiece 1206.
In addition, the display device 1208 described above is provided.

<Digital Still Camera> A digital still camera using the display device according to the above-described embodiment as a finder will be described. FIG. 8 is a perspective view showing the configuration of this digital still camera, but it also briefly shows the connection with an external device.

While a normal camera exposes a film by an optical image of an object, the digital still camera 1
300 is a CCD (Charge Coupled Devi
The image pickup device such as ce) performs photoelectric conversion to generate an image pickup signal. Case 1302 of digital still camera 1300
The display device 1304 described above is provided on the back surface of the
The display is made based on the image pickup signal from the CD. Therefore, the display device 1304 functions as a finder that displays the subject. On the observation side (the back side in the figure) of the case 1302, an optical lens or CC
A light receiving unit including D and the like is provided.

When the photographer confirms the image of the subject displayed on the display device 1304 and presses the shutter button 1308, the image pickup signal of the CCD at that time is displayed on the circuit board 1.
The data is transferred and stored in the memory 310. The digital still camera 1300 also includes a video signal output terminal 1312 and an input / output terminal 1314 for data communication on the side surface of the case 1302. Then, as shown in the figure, a television monitor 1430 is provided at the video signal output terminal 1312, and an input / output terminal 13 for data communication is provided.
A personal computer 1430 is connected to each of the devices 14 as needed, and the image pickup signal stored in the memory of the circuit board 1308 is output to the television monitor 1330 or the computer 1340 by a predetermined operation. ing.

<Electronic Book> FIG. 9 is a perspective view showing the configuration of an electronic book as an example of the electronic apparatus of the present invention.
In the figure, reference numeral 1400 indicates an electronic book. The electronic book 1400 has a book-shaped frame 140.
2 and a cover 140 that can be opened and closed on this frame 1402
3 and 3. A display device 1404 is provided on the frame 1402 in a state where the display surface is exposed on the surface thereof, and an operation unit 1405 is further provided. Frame 140
A controller, a counter, a memory and the like are built in the inside of the unit 2. In this embodiment, the display device 1404 includes a pixel portion formed by filling a thin film element with electronic ink, and a peripheral circuit that is integrated with and integrated with the pixel portion. The peripheral circuit includes a decoder-type scan driver and a data driver.

As electronic equipment, in addition to the personal computer shown in FIG. 6, the mobile phone shown in FIG. 7, the digital still camera shown in FIG. 8 and the electronic book shown in FIG. 9, electronic paper, a liquid crystal television, a viewfinder type, Examples include a monitor direct-view video tape recorder, a car navigation device, a pager, an electronic notebook, a calculator, a word processor, a workstation, a videophone, a POS terminal, and a device equipped with a touch panel. The display device described above can be applied to the display units of these various electronic devices.

As described above, according to the embodiment of the present invention, the microlens array is used to open the minute holes in the reflecting film. Therefore, in the manufacture of the aperture type semi-transmissive reflecting film, the microlens and the minute holes are formed. No position adjustment required.

Further, in the embodiment, the reflective film has a plurality of layers,
By making the front surface of the reflective film have a high reflectance and the back surface thereof a low reflectance, highly efficient reflection of external light and improvement of workability of the reflective film with respect to laser light can be achieved, which is preferable. The reflective film is not limited to the two-layer film, and a larger number of films may be laminated instead. Further, it is also possible to form a reflective film having different reflectances on the front and back sides without a boundary between the films by continuously changing the material of the reflective film.

Even if the reflective film is a single layer, it is sufficient that the opening by the laser beam can be performed without any problem, and the reflective film does not necessarily have to be formed of a plurality of films.

Further, it is desirable that the reflection film completely reflects the external light (external light source), but even if it is not the perfect reflection, some effect can be expected.

Further, as in the embodiment, by forming the shape of the reflection film in a concavo-convex shape, the reflected light is efficiently and enters the user's visual field when the display panel is tilted at a predetermined angle, so that it is easy to see brightly. A screen is obtained, which is preferable.

[0067]

As described above, according to the present invention,
When forming an aperture type semi-transmissive reflective film, micro holes are formed in the reflective film by laser processing using microlenses formed on the reflective substrate, so the manufacturing process of the semi-transmissive reflective substrate is simplified. It is possible to do it and it is in good condition.

[Brief description of drawings]

FIG. 1 is an explanatory diagram illustrating a first embodiment of the present invention (a display device using a semi-transmissive reflective substrate).

FIG. 2 is an explanatory diagram illustrating a second embodiment of the present invention (a display device using a semi-transmissive reflective substrate that also serves as a liquid crystal substrate).

FIG. 3 is an explanatory diagram illustrating a third embodiment of the present invention (a semi-transmissive reflective substrate having an uneven shape).

FIG. 4 is an explanatory diagram illustrating an example of a display device including an uneven transflective substrate.

FIG. 5 is an explanatory diagram for explaining an example of manufacturing a semi-transmissive reflective substrate by opening minute holes in a reflective film using laser light.

FIG. 6 is an explanatory diagram illustrating an example of a portable personal computer (information device) that uses the display device of the present invention.

FIG. 7 is an explanatory diagram illustrating an example of a mobile phone (information device) using the display device of the present invention.

FIG. 8 is an explanatory diagram illustrating an example of a digital camera (information device) using the display device of the present invention.

FIG. 9 is an explanatory diagram illustrating an example of an electronic book (information device) using the display device of the present invention.

[Explanation of symbols] 1 Liquid crystal display 2 Back light source 3 Semi-transmissive reflector 4 LCD panel 30,46 Transparent substrate 31 micro lens 32 micro lens array 33,44 Reflective film (semi-transmissive reflective film) 34, 45 Micro holes (pin holes)

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Eiichi Fujii             Seiko, 3-3-3 Yamato, Suwa City, Nagano Prefecture             -In Epson Corporation F-term (reference) 2H042 DA02 DA03 DA06 DA11 DA12                       DA22 DC02 DD10 DE00                 2H091 FA14Z FA23Z FA29Z FA41Z                       FB08 FC14 LA12

Claims (18)

[Claims] 1. A transparent substrate, a reflective film formed on one surface of the transparent substrate and having a plurality of minute holes, and a microlens array formed on the other surface facing the one surface of the transparent substrate, A semi-transmissive reflective substrate in which the reflective film has different reflectances on the front and back sides. 2. The semi-transmissive reflective substrate according to claim 1, wherein the reflective film is composed of a plurality of films, and the underlying film has a lower reflectance than the film formed thereon. 3. The transflective substrate according to claim 1, wherein the thickness of the transparent substrate is substantially equal to the focal length of the microlens array. 4. The semi-transmissive reflective substrate according to claim 1, wherein the minute holes are formed at each focal position of the microlens array. 5. The semi-transmissive reflective substrate according to claim 1, wherein the plurality of micro holes of the reflective film are opened by the beam light condensed by the micro lens array. 6. The semi-transmissive reflective substrate according to claim 1, wherein the reflective film has an uneven shape for aligning reflected light in a fixed direction. 7. The semi-transmissive film according to claim 1, wherein the optical axis of each microlens of the microlens array and the normal line of the reflection surface of the reflection film intersect obliquely. Reflective board. 8. The transflective substrate according to claim 1, wherein the microlens array is any one of a convex lens, a SELFOC lens, a gradient index lens, a Fresnel lens, and a diffractive lens. 9. The semi-transmissive reflective substrate also serves as one of a pair of substrates of a liquid crystal display panel facing each other.
The semi-transmissive reflective substrate according to claim 1. 10. An electro-optical device comprising the semi-transmissive reflective substrate according to claim 1. 11. A digital camera provided with the electro-optical display device according to claim 10. 12. A portable information terminal device comprising the electro-optical display device according to claim 10. 13. A mobile phone device comprising the electro-optical display device according to claim 10. 14. A process of forming a transparent substrate having a microlens array on one surface, a process of forming a reflective film on the other surface of the substrate, and a step of irradiating laser light from the one surface side to the reflection by the microlens. A method of manufacturing a semi-transmissive reflective substrate, comprising the step of converging the laser light on a film and opening fine holes in the reflective film. 15. The method of manufacturing a semi-transmissive reflective substrate according to claim 14, wherein the laser light irradiation is performed by scanning the microlens array with the laser light. 16. The scanning of the laser light is performed by a rotating mirror that reflects the laser light emitted from the laser light source, and an F-θ lens that arranges the laser light so that the laser light is incident on the reflection film at a predetermined angle. 16. The method for manufacturing a semi-transmissive reflective substrate according to claim 15, which is performed by a scanning optical system including. 17. The process of forming the reflection film is to form the reflection film so that the reflectance is different between the front surface and the back surface, and the laser light is applied to the low reflectance side of the reflection film. 17. The method for manufacturing a semi-transmissive reflective film according to any one of 14 to 16. 18. The method according to claim 14, further comprising: forming the microlens array on one surface of the transparent substrate and forming an uneven shape on which the reflective film is to be formed on the other surface.
The method for producing a semi-transmissive reflective film according to any one of 1.