JP2003090855A - Device and method for inspecting electrode - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device for inspecting an electrode capable of inspecting an electrode group constituted of plural electrodes arranged on a substrate in a non-contact manner an in a short time. SOLUTION: This device comprises an electrode 104 for inspecting extended in a direction crossing a predetermined direction, a drive stage 22 for scanning the electrode 104 for inspecting while maintaining a predetermined interval to linear electrodes 202, 203 and a measuring device 31 for determining functions of the linear electrodes 202, 203 on the basis of a change in electric property generated between the electrode 104 for inspecting and the linear electrodes 202, 203.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrode inspection apparatus and an electrode inspection method for inspecting the function of a fine electrode group provided on a flat plate such as an electrode substrate which constitutes an electrostatic actuator.

[0002]

2. Description of the Related Art An electrostatic actuator having an electrostatic force as a driving force is known as a minute actuator used for a micromachine, a small camera and the like. The stator of the electrostatic actuator includes an electrode substrate 200 as shown in FIGS. 12 (a) and 12 (b), for example.

In the electrode substrate 200, a plurality of linear electrodes 202 and 203, which are conductive thin films, are arranged on a glass substrate 201 alternately on the same plane and in parallel along a predetermined direction. Are formed. Linear electrode 202,
Reference numeral 203 is connected to each other by current-carrying wirings 204 and 205, and is a so-called two-phase wiring. The potential of each phase is constantly the same. Energizing wiring 204,
Conductive pads 206 and 207 are provided on one end side of 205, and wiring is connected to the conductive pads 206 and 207 when assembled as a stator. Also,
A dielectric film 208 is provided on the linear electrodes 202 and 203 to ensure electrical insulation from an external object.

[0004]

The electrode substrate having the above electrode group has the following problems. That is, in order to obtain a large driving force in the electrode substrate 200, it is necessary to increase the integration degree of the linear electrodes 202 and 203. On the other hand, in order to secure the manufacturing yield of the electrostatic actuator as a product, it is necessary to inspect whether or not the linear electrodes 202 and 203 exhibit desired functions. At this time, since the dielectric film 208 is applied, it is not possible to directly confirm the energization of the linear electrodes 202 and 203 using a tester, for example.

Although the insulation state and the capacitance between the phases can be measured through the current-carrying pads 206 and 207, the quality of each of the linear electrodes 202 and 203 cannot be inspected.

Further, as a method for inspecting minute electric elements, a method for inspecting a TFT substrate of a liquid crystal display device is known. In this inspection method, the inspection electrode is brought close to one pixel to be inspected, and normality / abnormality of the pixel is determined from electrical characteristics such as impedance. However, in this method, all the linear electrodes 202, 20
Since the same inspection was carried out in No. 3, a lot of time was required and the work efficiency was low.

In view of the above, the present invention provides an electrode inspection apparatus and an electrode inspection apparatus capable of performing non-contact inspection of the function of an electrode group composed of a plurality of electrodes arranged along a predetermined direction on a substrate in a short time. It is intended to provide a way.

[0008]

In order to solve the above problems and achieve the object, the electrode inspection apparatus and electrode inspection method of the present invention are configured as follows.

(1) In an electrode inspection apparatus for inspecting the function of an electrode group composed of a plurality of linear electrodes arranged along a predetermined direction, an inspection electrode extending in a direction intersecting with the predetermined direction, An inspection electrode scanning unit that scans the inspection electrode along the predetermined direction while maintaining a predetermined interval with respect to the electrode group, and an electrical generated between the inspection electrode and the linear electrode. And a measuring unit that determines the function of the electrode group based on a change in characteristics.

(2) In the electrode inspection device described in (1) above, the electrical characteristics are based on a capacitance between the inspection electrode and the linear electrode. Characterize.

(3) In the electrode inspection apparatus described in (1) above, the inspection electrode is a conductive wire provided between a pair of insulating members.

(4) In the electrode inspection apparatus described in (1) above, the inspection electrode is a thin film electrode formed on the surface of an insulating flat plate.

(5) The electrode inspection apparatus according to (1) above, wherein the inspection electrode is a ridge at one end of a conductive plate member.

(6) In an electrode inspection device for inspecting the function of an electrode group composed of a plurality of linear electrodes arranged along a predetermined direction, a thin-film elastic body capable of accumulating charges and this elastic body are used as the electrodes. An elastic body scanning unit that scans along the predetermined direction while maintaining a predetermined distance from the group, and a measuring unit that determines the function of the electrode group based on the displacement of the elastic body. Is characterized by.

(7) In an electrode inspection method for inspecting the function of an electrode group consisting of a plurality of linear electrodes arranged along a predetermined direction, an inspection having electrodes extending in a direction intersecting with the predetermined direction. The inspection electrode scanning step of scanning the electrodes along the predetermined direction while maintaining a predetermined interval with respect to the electrode group, and the change in the electrical characteristics between the inspection electrode and the linear electrode. And a measurement step of determining the function of the electrode group based on the above.

[0016]

1 (a) and 1 (b) are diagrams schematically showing the structure of an electrode inspection apparatus 10 according to a first embodiment of the present invention, and FIG. FIG. 3 is a perspective view of the incorporated inspection electrode unit 100 seen from the lower surface side, FIG. 3 is a flowchart showing an inspection sequence, and FIG. 4 is an explanatory diagram showing a method of positioning the inspection electrode unit 100 and the electrode substrate 200 in the initial setting. is there. In the figure, arrows XYZ indicate three directions orthogonal to each other, and arrow αβγ indicates arrow X.
The direction around the YZ axis is shown.

The electrode inspection apparatus 10 comprises an inspection unit 20 and a measurement unit 30. The inspection unit 20 supports a fixed stage 21 for mounting a sample holder H that holds an electrode substrate 200 to be inspected, and an inspection electrode unit 100 described later, and reciprocates along the arrow X direction in FIG. And a drive stage 22. The fixed stage 21 is provided with position adjusting means (not shown) for positioning the position, posture, and orientation of the sample holder H, and performs adjustment at the time of initial setting.

The measuring unit 30 measures the electrical characteristics of the electrode substrate 200 and determines the function of the linear electrodes 202 and 203, a controller 32 for automatically performing the measurement, and a drive unit. A stage driving driver 33 for driving and controlling the stage 22 and measurement probes 34 to 36 connected to the measuring device 31 are provided. Furthermore, the measuring device 31 and the controller 32 are connected to the signal lines 37a and 37b.
The controller 32 and the stage driving driver 33 are connected by signal lines 38a and 38b.

The measuring device 31 has an LCR meter for measuring electrical characteristics between the inspection electrode portion 100 and the linear electrodes 202 and 203, for example, capacitance. The measurement probe 34 includes the terminal 31a of the measuring device 31 and the energizing pad 2
It connects with 06. In addition, the measurement probe 3
Reference numeral 5 electrically connects the terminal 31b of the measuring device 31 and the inspection electrode 104 of the inspection electrode portion 100. further,
The measurement probe 36 is for electrically connecting the ground and the current-carrying pads 206 of a group that is not an inspection target. That is, the potential is set to the ground (0 V) in order to obtain stable measurement data. Thereby, at least one of the electrodes adjacent to each other,
Since it becomes 0 V, there is a high possibility that a significant difference will occur at the time of inspection, and the quality judgment will be easy. When three or more phase electrodes are provided, the measurement probe 36
To contact the electrode of the phase that is not the inspection target.

The wiring connecting the above-mentioned measuring probes 34, 35 and the terminals 31a, 31b of the measuring device 31 is preferably a shielded wire in order to suppress the influence of external noise as much as possible. Although not shown in FIG. 1,
It is possible to improve the measurement accuracy by dividing the current wiring and the voltage measurement wiring and connecting them in the immediate vicinity of the object to be measured, which is a so-called four-terminal pair method.

The signal line 37a is used to send measurement conditions, measurement timing and the like from the controller 32 to the measuring instrument 31, and the signal line 37b is used to send measurement data from the measuring instrument 31 to the controller 32. The signal line 38a indicates an operation command from the controller 32 to the stage driving driver 33, and the signal line 38b indicates stage state information (for example, position information of the inspection electrode portion 100 in the arrow X direction) from the stage driving driver 33 to the controller 32. It is for sending. When the drive stage 22 is completely open loop driven, the signal line 38b can be omitted.

Next, the inspection electrode section 100 will be described. As shown in FIG. 2, the inspection electrode portion 100 includes a plate-shaped holder 101 formed of an insulating material and detachably attached to the drive stage 22, and an arm portion 102 formed at one end of the holder 101. Is equipped with. A slit 102a is formed in the arm portion 102. A pair of support members 1 provided at the tip of the slit 102a
03a and 103b are provided. A pair of support members 1
The interval δ between 03a and 103b is formed larger than the width of the electrode substrate 200.

An inspection electrode 104 made of a conductive thin wire is laid over the pair of support members 103a and 103b. The inspection electrode 104 has a diameter of 0..m of the width of the linear electrodes 202 and 203 to be inspected on the electrode substrate 200.
It is set to 5 times to 2 times. One end of the inspection electrode 104 is fixed by a mounting screw 106, and a lead wire 105 for electrical connection with the measurement probe 35 is connected.

The arm 10 is provided with a slit 10
A screw 107 penetrating the 2a is screwed in and attached, and an interval δ between the pair of support members 103a and 103b.
Can be adjusted by the screwing amount of the screw 107.
Therefore, the inspection electrode 1 depends on the screw amount of the screw 107.
The tension of 04 can be adjusted.

The electrode inspecting apparatus 10 having the above structure is used to perform the electrode substrate 200 in the procedure shown in FIGS. 3 (a) and 3 (b).
Conduct an inspection. First, collectively measure (ST1
0). That is, after the electrode substrate 200 is attached to the holder H and installed on the fixed stage 21, as shown in FIG. 3B, the relative position between the inspection electrode unit 100 and the electrode substrate 200 is initialized (ST11). ).

FIG. 4 is an explanatory diagram showing a specific method of initial setting. That is, the inspection electrode unit 100 on the drive stage 22 and the electrode substrate 2 on the fixed stage 21.
The displacement sensor 300 measures the height in the Z direction with respect to a plurality of positions 00. Then, based on the measured value, the fixed stage 21 is arranged such that the inspection electrode 104 and the linear electrodes 202 and 203 of the electrode substrate 200 are parallel to each other, and the gap in the Z direction has a predetermined value. Fine adjustment is performed using the positioning means.

In order to obtain good data,
It is necessary to secure sufficient parallelism between the inspection electrode portion 100 and the electrode substrate 200, to optimize the gap value, and to secure the accuracy of the scanning direction (arrow X direction) feed. The value of the gap is set to a sufficiently small value so that there is an electrically significant difference in characteristics when the inspection electrode section 100 is scanned.

It should be noted that some of the degrees of freedom may be fixed as long as they can be secured without adjustment due to the processing accuracy and assembly accuracy of the device. Electrode substrate 2
If the dimensional error of 00 and the mounting position error of the electrode substrate 200 can be ignored, the minimum degree of freedom required for the inspection is the degree of freedom in the scanning direction (X direction) of the inspection electrode unit 100.

In addition to the displacement sensor 300, a microscope and an image sensor may be used to acquire the Z direction height information of the inspection electrode section 100 and the electrode substrate 200 from the focused state.

Next, the measurement is repeated over the entire area of the electrode substrate 200 (ST12), and the driving stage 22 is fed so that the inspection electrode unit 100 moves step by step along the arrow X direction in FIG. Perform (ST13). At this time, the change in the capacitance value between the inspection electrode 104 and the linear electrode 202 is acquired as data by the measuring device 31 and recorded (ST14). Then, the process returns to ST12, and the step feeding, data acquisition and recording are repeated. When the measurement of the entire area of the electrode substrate 200 is completed, the process proceeds to ST20.

FIGS. 5A and 5B are explanatory diagrams showing an example of the acquired measurement data and a method for determining normality / abnormality based on the measurement data. FIG. 5A shows the electrode substrate 2
An example of measurement data when 00 is normal is shown. G in the figure
1 shows the PV value of the capacitance change. In the measurement data, the maximum value is taken just above the linear electrode 202, and the linear electrode 2
The minimum value is taken just above 03. In this case, it has a characteristic of repeating the maximum and the minimum while taking the predetermined maximum and minimum values over the entire measurement range.

FIG. 6B shows an example of measurement data when there is an abnormality in a part of the electrode substrate 200. That is,
In some cases, the maximum value is smaller than the predetermined value. This indicates that some abnormality, such as disconnection or depression, has occurred in the linear electrode 202 in this portion. G in the figure
2 indicates the PV value of the capacitance change directly above the linear electrode 202 in which an abnormality is observed. The judgment of normality / abnormality is made by setting a numerical value given by the ratio of G1 and G2 as a threshold value. It can be done automatically.

By setting the positioning accuracy of the drive stage 22 for scanning the inspection electrode section 100 and the data acquisition interval in the scanning direction to be smaller than the dimensional accuracy required for the linear electrodes 202 and 203 of the electrode substrate 200, Linear electrode 2
It is possible to check whether 02 and 203 satisfy the required accuracy.

When measuring the electrostatic capacitance in the inspection of the electrode substrate 200, it is possible to know the cause of the abnormality by also recording the loss coefficient. For example, when the loss coefficient D increases with an increase in the measurement frequency (M1 in FIG. 6), it is considered that the cause is a series resistance component such as contact resistance or disconnection. On the contrary, when the loss coefficient D decreases with the increase of the measurement frequency (M2 in FIG. 6), it is considered that the parallel resistance component such as the leak to the adjacent electrode is a cause.

As described above, according to the electrode inspection apparatus 10 according to the present embodiment, the function of the electrode group composed of the plurality of electrodes 202 and 203 arranged on the glass substrate 201 along the predetermined direction is inspected. In the electrode inspection device, the functional inspection of the electrode group can be performed efficiently and in a non-contact manner even when the insulating film or the like is interposed. Therefore, it is possible to contribute to the improvement of product quality by finding and classifying defects that have occurred during manufacturing.

In the above-described current-carrying pads 206 and 207 of the electrode substrate 200, lead wires are connected when the stator is assembled. At this time, the conductive adhesive or solder wets and spreads over the entire current-carrying pads 206, 207. Therefore, after attaching the lead wires, the measurement probe 34,
In some cases, it is not possible to directly contact 35 with the energizing pads 206 and 207. In such a case, as shown in FIG. 7, an inspection land 210 for contacting the measurement probes 34, 35 may be provided in advance.

Further, when measuring the position of the electrode substrate 200 in the Z direction, the displacement sensor 300 was used in the above-mentioned example, but if a capacitance measuring system is used, no new device is added, It becomes possible to measure. For example, as shown in FIG. 8, the electrode 2 for adjusting the initial gap is formed on the electrode substrate 200.
20 is patterned, and the capacitance when the inspection electrode unit 100 is brought close to a predetermined gap is measured,
Store as standard value. Next, when inspecting the same type of electrode substrate 200, the inspection electrode unit 100 is brought close to the electrode 220 for initial gap setting, and the height in the Z direction is adjusted so that the capacitance becomes the standard value described above. It will be a proper gap.

Alternatively, if it is certain that a normal linear electrode 202 is formed on a part of the electrode substrate 200 without providing a dedicated electrode 220 on the substrate, the linear electrode 202 Z so that the measured value matches the standard value
The height in the direction may be adjusted.

FIG. 9 is a perspective view showing an inspection electrode section 110 according to a first modification of the inspection electrode section 100 described above. That is, a linear pattern of conductive thin film (inspection electrode) on an insulating plate 111 (glass substrate or the like) having a smooth surface.
This is an example of patterning 112. Linear pattern 11
A land portion 113 is formed at one end of the wire 2, and the lead wire 114 is connected to the land portion 113 with solder or a conductive adhesive. During use, the illustrated upper surface side is used as the lower surface side, that is, the linear pattern 112 is directed downward.

10A to 10C show the inspection electrode portion 12 according to the second modification of the inspection electrode portion 100 described above.
It is a figure which shows 0. That is, the inspection electrode section 120 is
A thin conductive plate 121, a ridge portion (inspection electrode) 122 having a minute width provided at an end portion of the conductive plate, and the conductive plate 12
1 and a lead wire 123 connected by solder or a conductive adhesive. The width η of the ridge 122 at the tip of the conductive plate 121 is 0.5 times the width of the linear electrodes 202 and 203 of the electrode substrate 200, as shown in FIG.
It is desirable to double.

FIG. 10C is a perspective view showing an example in which the above-mentioned inspection electrode portion 120 is mounted on the support arm 130 and used. In the above-described embodiments, it is assumed that the electrode substrate 200 is inspected in the divided state, but the inspection may be performed in the state of the wafer W before being divided. The inspection electrode portion 120 has a ridge portion 1 with a minute width.
Since there is no portion projecting to the electrode substrate 200 side from 22, the inspection electrode portion 120 can be brought close to the electrode substrate 200, and measurement can be performed even in the state of the wafer W having a wide and smooth surface. Note that automatic measurement can be realized by mounting the measurement probes 34 and 35 on a robot hand or the like operated by a program.

FIG. 11 shows an inspection electrode section 14 incorporated in an electrode inspection apparatus 10A according to the second embodiment of the present invention.
It is a perspective view which shows 0. In the electrode inspection device 10 according to the first embodiment described above, the electrical characteristic to be measured is capacitance, but in the electrode inspection device 10A,
Uses electrostatic force.

That is, the inspection electrode portion 140 is provided with an insulating thin film 141 on which a metal is vapor-deposited, and a lead wire 142 connected to this insulating thin film 141. Electrode substrate 2
When an unsteady voltage is applied to the electrode No. 00 and the inspection electrode unit 100 kept at a constant potential is brought close to the electrode No. 00, the electrostatic force corresponding to the voltage fluctuation is generated between the electrode of the electrode substrate 200 and the inspection electrode unit 100. Changes, and the insulating thin film 141 of the inspection electrode unit 100 vibrates. This vibration can be observed from the outside using a microscope or a camera 143, and the quality of the inspection site can be determined from the magnitude of the vibration state.

The present electrode inspection apparatus 10A also has the same effect as the above-described electrode inspection apparatus 10.

The present invention is not limited to the above embodiment. That is, in the above-described embodiment,
Although the electrode substrate in which the electrodes are composed of two phases has been exemplified, an electrode substrate having a plurality of phases such as three phases and four phases is also applicable. However, in this case, it is difficult to form all the wirings on the substrate on the same plane, and therefore three-dimensional wirings may be used if necessary.

Further, the state immediately before assembling as one component of the electrostatic actuator is shown. However, in the manufacturing process of this electrode substrate, it is more costly to manufacture a plurality of electrodes on a wafer having a large area at a time. There may be an advantage in terms. Therefore, the inspection of the electrode function may be performed at the wafer stage before being individually cut as shown in FIG.

Further, when automation is not performed, the controller and the stage driving driver may be omitted. Of course, various modifications can be made without departing from the scope of the present invention.

[0048]

According to the present invention, the function of the electrode group composed of a plurality of electrodes arranged along the predetermined direction on the substrate can be inspected in a non-contact manner in a short time.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a configuration of an electrode inspection device according to a first embodiment of the present invention.

FIG. 2 is a perspective view of an inspection electrode section incorporated in the electrode inspection apparatus as seen from a lower surface side.

FIG. 3 is a flowchart showing an inspection sequence by the electrode inspection apparatus.

FIG. 4 is an explanatory diagram showing a method of positioning an inspection electrode portion and an electrode substrate in initial setting of the electrode inspection device.

FIG. 5 is an explanatory view showing measurement data by the electrode inspection apparatus.

FIG. 6 is an explanatory diagram showing a principle of occurrence of an abnormal cause by the electrode inspection apparatus.

FIG. 7 is a plan view showing a first modified example of the electrode substrate applied to the electrode inspection apparatus.

FIG. 8 is a perspective view showing a second modified example of the electrode substrate applied to the electrode inspection apparatus.

FIG. 9 is a perspective view showing a first modified example of the inspection electrode section incorporated in the electrode inspection apparatus.

FIG. 10 is a view showing a second modified example of the inspection electrode section incorporated in the electrode inspection apparatus.

FIG. 11 is a perspective view showing a main part of an inspection electrode unit incorporated in an electrode inspection device according to a second embodiment of the present invention.

12A and 12B are diagrams showing an electrode substrate that constitutes a stator of an electrostatic actuator, wherein FIG. 12A is a plan view and FIG. 12B is a cross section taken along line AA in FIG. Fig.

[Explanation of symbols]

10 ... Electrode inspection device 20 ... Inspection department 30 ... Measuring unit 21 ... Fixed stage 22 ... Drive stage 30 ... Measuring unit 31 ... Measuring instrument 32 ... Controller 33 ... Driver for driving stage 34 to 36 ... Measurement Measuring probe 100 ... Inspection electrode part 103a, 103b ... Support member 104 ... Electrode for inspection 200 ... Electrode substrate 201 ... Glass substrate 202, 203 ... Electrodes

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Akira Tomita             1st Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa             Inside the Toshiba Research and Development Center F-term (reference) 2G011 AD01 AE03                 2G014 AA02 AA03 AB55 AB59 AC10                       AC12                 4M106 AA01 AA11 BA01 BA14 CA11                       CA16

Claims (7)

[Claims] 1. An electrode inspection apparatus for inspecting the function of an electrode group composed of a plurality of linear electrodes arranged along a predetermined direction, comprising an inspection electrode extending in a direction intersecting the predetermined direction. An inspection electrode scanning unit configured to scan the inspection electrode along the predetermined direction while maintaining a predetermined distance from the electrode group, and electrical characteristics generated between the inspection electrode and the linear electrode. And a measurement unit that determines the function of the electrode group based on the change in the electrode inspection apparatus. 2. The electrode inspection apparatus according to claim 1, wherein the electrical characteristic is based on a capacitance between the inspection electrode and the linear electrode. 3. The electrode inspection apparatus according to claim 1, wherein the inspection electrode is a conductive wire provided between a pair of insulating members. 4. The electrode inspection apparatus according to claim 1, wherein the inspection electrode is a thin film electrode formed on the surface of an insulating flat plate. 5. The electrode inspection apparatus according to claim 1, wherein the inspection electrode is a ridge at one end of a conductive plate member. 6. An electrode inspecting apparatus for inspecting the function of an electrode group composed of a plurality of linear electrodes arranged along a predetermined direction, comprising: a thin film elastic body capable of accumulating charges; On the other hand, an elastic body scanning unit that scans along the predetermined direction while maintaining a predetermined interval, and a measurement unit that determines the function of the electrode group based on the displacement of the elastic body. Characteristic electrode inspection device. 7. An electrode inspection method for inspecting the function of an electrode group composed of a plurality of linear electrodes arranged along a predetermined direction, the inspection having linear electrodes extending in a direction intersecting with the predetermined direction. A test electrode scanning step of scanning the test electrode along the predetermined direction while maintaining a predetermined gap with respect to the electrode group; and a change in electrical characteristics generated between the test electrode and the linear electrode. And a measurement step of determining the function of the electrode group based on the above.