JP2003077624A - Heater lamp, and light radiating heating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure for preventing break of a glass tube at curved corner in a heater lamp having substantially a U shape as a whole. SOLUTION: The substantially U-shaped constitution has a horizontal part L1 having a filament coil F and erected parts L3 at both ends through the curved corners L2 . The filament coils F exist also in the curved corners L2 . The filament coils F existing in the curved corners L2 have smaller heating value per unit length than the filament coil F existing in the horizontal part L1 .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater lamp having a generally U-shape as a whole and a light irradiation type heating device using the heater lamp. In particular, it relates to a heater lamp used as a light source of a light irradiation type heating device for rapidly heating a work such as a semiconductor wafer.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a light irradiation type heating device for performing heat treatment with light including infrared light emitted from a heater lamp is used to perform treatments such as film formation, diffusion and annealing on a semiconductor wafer. To be done. Although all of these processes heat-treat a semiconductor wafer at a high temperature, the semiconductor wafer can be rapidly heated when used in a light irradiation type heat treatment apparatus. The temperature can be raised to a temperature of ℃ or more. Further, if the light irradiation is stopped, it can be cooled rapidly.

In the heater lamp, the filament coil inside thereof generates heat when electricity is applied. The arc tube excluding the base is generally U-shaped and is composed of a horizontal portion, a bent corner portion, and a rising portion, and each portion has a filament coil. This filament coil is formed by turning a tungsten wire several times.
A large current flows.

Here, the heater lamp has a built-in filament coil not only in the horizontal portion but also in the bent corner portion. This is because in the length direction of the semiconductor wafer that is the irradiation target,
This is to ensure the uniformity of the calorific value. In this way, in the sense that the surface of the semiconductor wafer to be heated is uniformly irradiated, the substantially U-shaped shape of the heater lamp has important technical significance. That is, in the case of a rod-shaped lamp, the amount of heat generated in the periphery of the wafer will decrease or increase, but by making it roughly U-shaped, it is possible to control the heat generation in the peripheral part like other parts. .

Here, the arc tube of the heater lamp is made of quartz glass, but in the manufacturing process, since the quartz glass is bent at a right angle, distortion occurs at the bent corner after completion. In particular, the heater lamp used for this purpose has a very peculiar structure in which a large current flows and a filament coil also exists at the bend corner, so this "distortion" is accompanied by the heating of the filament coil. Causes glass breakage.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to provide a heater lamp having a generally U-shape as a whole, which structure does not cause cracks in a glass tube at a bent corner.

[0007]

In order to solve the above-mentioned problems, a heater lamp of the present invention has a substantially U-shape having a horizontal portion having a filament coil inside and rising portions at both ends thereof through curved corners. In the configuration, the filament coil exists also in the bent corner portion, and the filament coil existing in the bent corner portion has a smaller heat generation amount per unit length than the filament coil existing in the horizontal portion. It is characterized by being configured. Here, the "heat generation amount per unit length" is obtained by dividing the heat generation amount immediately below the filament coil in the horizontal portion and the bent corner by the length of the filament coil itself in the horizontal portion and the bent corner. .

Further, the structure in which the heat generation amount is small is formed by partially short-circuiting the filament coil at the bent corner portion or by reducing the number of turns per unit volume of the filament coil itself at the bent corner portion. It is characterized by

Further, in the light irradiation type heating device for rapidly heating the work, the heater lamp is used as a heating source, and the horizontal portion of the heater lamp is arranged substantially parallel to the work.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an overall schematic view of a heater lamp of the present invention. The heater lamp L is composed of a transparent quartz glass tube, and has a horizontal portion L1, a curved corner portion L2, and a rising portion L3.
The overall shape composed of is roughly U-shaped. A filament coil F is arranged in the arc tube,
The power supply line F0 is connected between them. The filament coil F is configured by winding a tungsten wire in a coil shape, and the tungsten wire connects the filament coils F to each other. Specifically, the filament has a wire diameter of 0.27 mm, and the filament coil F is formed as a coil having a diameter of about 3.5 mm as a double winding.
Ring-shaped supporters S are attached to the filament coil F at substantially equal intervals. Note that, in FIG. 1, from the viewpoint of explaining the entire structure of the lamp, no consideration is given to the number of turns of the coil in the bent corner L2, which will be described later. In the numerical example, the horizontal part L1 is 40
mm, the rising portion L3 is 70 mm, and lights at a rated voltage of 200 V and a rated voltage of 5 KW.

The heater lamp of the present invention is characterized in that the overall shape is a U shape, but the amount of heat generated from the coil is different from that of the horizontal portion L1 at the bent corner portion L2. Below, a configuration for explaining this feature is shown. Figure 2
An example of a configuration is shown in which the heat generation amount in the bent corner portion L2 is smaller than the heat generation amount in the horizontal portion L1. (A) shows an enlarged view of a curved corner portion of a conventional U-shaped heater lamp for comparison, and (b) shows an enlarged view of a curved corner portion of a U-shaped heater lamp of the present invention. Both have filament coil F,
It is supported by the supporters S (S1, S2 ...). Both figures differ in the number of supporters S arranged in the same region.

3 (a) and 3 (b) are enlarged views of one supporter S and filament coil F in FIG. In FIG. 3A, the supporter S is welded or pressure-bonded at the portions P1 and P2 of the filament coil F. As a result, a part of the current flowing through the filament is shunted to the supporter S, and as a result, the amount of current flowing through the filament coil F decreases, and the amount of heat generated decreases. Further, FIG. 3B has a structure in which one end of the supporter S is wound around the filament coil F in some relation. As a result, the amount of heat generated by the filament coil in the wound portion is reduced. With such a structure, when the filament coil F is supported by the supporter S, the amount of heat generated by the filament coil is reduced in that portion. Even with filament coils of the same length, the amount of heat generated can be adjusted by adjusting the number of supporters having the above-mentioned action. By providing this principle in the horizontal portion and the curved corner portion of the generally U-shaped heater lamp, it is possible to reduce the amount of heat generated in the curved corner portion with respect to the horizontal portion. 3A shows the filament coil F with a single line, and FIG. 3B shows the filament coil with a double line, but they are the same except that they are written differently.

FIG. 4 shows another example of the structure for reducing the heat generation amount in the curved corner portion L2 to be smaller than the heat generation amount in the horizontal portion L1. The short-circuit member 40 is inserted in the filament coil F at the bent corner L2. This short-circuit member 40 is inserted in the filament coil F,
The form is not limited as long as it can be fixed in some position. Further, as the material of the short-circuit member, a conductive material such as molybdenum or tungsten is selected. With such a configuration, when the short-circuit member 40 is inserted into the filament coil, the current flows through the short-circuit member instead of the coil in this portion, and the amount of heat generation in that portion is reduced. The short-circuit member 40 is not limited to the form inserted into the filament coil, and a structure in which, for example, a gutter-shaped metal member is covered outside the filament coil can be applied.

The structure for making the heat generation amount at the bent corner L2 smaller than the heat generation amount at the horizontal part L1 is not limited to the above embodiment. For example, the filament coil F at the bent corner L2. The number of turns per unit length of the filament coil F in the horizontal portion L1
Can be less than the number of turns per unit length of.
This is to make the winding pitch of the filament coil in the bent corner L2 sparse relative to the horizontal portion L1.
Thus, the amount of heat generation can be adjusted by adjusting the density of the filament coil.

Further, as another configuration, the horizontal portion L1
In the above, it is conceivable that the filament coil F is further formed in a coil shape to have a so-called double coil structure, and that the structure of the filament coil F at the bent corner L2 is a single coil.

FIG. 5 shows a light irradiation type heating device using the heater lamp of the present invention. The heater lamp L is attached to the lamp support 20, and the power supply terminal of the lamp L is electrically connected to a power supply mechanism (not shown). Work W that is the object to be processed
Is placed on the processing table 1, and the whole is covered with the chamber 10. Here, the horizontal portion L1 of the lamp L (the corner L
(Including 2) is configured to be substantially equal to the length of the work W, and a plurality of heater lamps L are also arranged in the front direction of the paper surface in accordance with the shape of the work W. For the light irradiation type heating device, refer to Japanese Patent Application No. 2000-140456 of the present applicant.

In the light irradiation type heating device having such a structure, since the heater lamp L also has the filament coil in the bent corner portion L2, the surface of the work W can be uniformly irradiated. In addition, the heater lamp L can heat the work to a high temperature state of 1000 ° C. or higher in a few tens of seconds to a few tens of seconds by flowing a large current of 25 A, for example, and can form a workpiece. That is, extremely high temperature conditions can be treated extremely uniformly in a very short time. The heater lamp L has a curved corner L2.
Since the amount of heat generated by the filament coil in (1) is smaller than the amount of heat generated by the filament coil in the horizontal portion L1, the problem of distortion in the quartz glass can be solved satisfactorily.

As described above, the heater lamp of the present invention includes the horizontal portion having the filament coil therein,
In a substantially U-shaped configuration having a rising portion at both ends through curved corners, the filament coil exists also in the curved corners, and the filament coil existing in the curved corners exists in the horizontal portion. Since the amount of heat generated per unit length is smaller than that of the filament coil, uniform heating is possible even when a large current is applied, and the problem of distortion of the quartz glass at the corners Can be solved well.

[Brief description of drawings]

FIG. 1 shows the overall structure of a heater lamp.

FIG. 2 shows an enlarged view of a bent corner portion of a heater lamp of the present invention.

FIG. 3 shows an enlarged view of a filament coil and a supporter of the present invention.

FIG. 4 shows an enlarged view of a bent corner portion of the heater lamp of the present invention.

FIG. 5 shows a light irradiation type heating device of the present invention.

[Explanation of symbols]

L heater lamp Horizontal part of L1 heater lamp Corner of L2 heater lamp L3 heater lamp upright F filament coil 10 processing table 20 lamp support W work

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H05B 3/10 H01L 21/26 J G

Claims (4)

[Claims] 1. A heater lamp having a substantially U-shape having a horizontal portion having a filament coil inside, and a rising portion at both ends thereof via curved corner portions, wherein the filament coil is present also at the curved corner portion. A heater lamp characterized in that the filament coil existing in the bent corner portion is configured to generate a smaller amount of heat per unit length than the filament coil existing in the horizontal portion. 2. The heater lamp according to claim 1, wherein the structure in which the amount of heat generated is small is formed by partially short-circuiting the filament coils at the bent corners. 3. The heater lamp according to claim 1, wherein the heat generation amount is reduced by reducing the number of coil turns per unit volume of the filament coil in the bent corner portion. 4. A light irradiation type heating device for rapidly heating a work, wherein the heater lamp according to any one of claims 1 to 3 is used as a heating source, and the horizontal portion of the heater lamp is arranged substantially parallel to the work. A light irradiation type heating device characterized in that.