JP2003075737A - 可動レンズを備えた光学的スイッチ - Google Patents

可動レンズを備えた光学的スイッチ

Info

Publication number
JP2003075737A
JP2003075737A JP2002159763A JP2002159763A JP2003075737A JP 2003075737 A JP2003075737 A JP 2003075737A JP 2002159763 A JP2002159763 A JP 2002159763A JP 2002159763 A JP2002159763 A JP 2002159763A JP 2003075737 A JP2003075737 A JP 2003075737A
Authority
JP
Japan
Prior art keywords
lens
optical switch
optical
plane
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002159763A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003075737A5 (enExample
Inventor
Brian E Lemoff
ブライアン・イー・レモフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2003075737A publication Critical patent/JP2003075737A/ja
Publication of JP2003075737A5 publication Critical patent/JP2003075737A5/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3526—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3534—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being diffractive, i.e. a grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12102—Lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2002159763A 2001-06-01 2002-05-31 可動レンズを備えた光学的スイッチ Withdrawn JP2003075737A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/872,120 US6678436B2 (en) 2001-06-01 2001-06-01 Optical switch with moving lenses
US872120 2001-06-01

Publications (2)

Publication Number Publication Date
JP2003075737A true JP2003075737A (ja) 2003-03-12
JP2003075737A5 JP2003075737A5 (enExample) 2005-10-06

Family

ID=25358882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002159763A Withdrawn JP2003075737A (ja) 2001-06-01 2002-05-31 可動レンズを備えた光学的スイッチ

Country Status (2)

Country Link
US (1) US6678436B2 (enExample)
JP (1) JP2003075737A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010004061A (ja) * 2004-12-28 2010-01-07 Asml Netherlands Bv リソグラフィ装置及びデバイス製造方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020006247A1 (en) * 2000-06-28 2002-01-17 Vladimir Vaganov Optical switch
EP1365507A1 (en) * 2002-05-22 2003-11-26 Lucent Technologies Inc. Universal tuning and matching device
US6937783B2 (en) * 2002-06-07 2005-08-30 Charles Chu 2-D optical switch with lens mount
US20040118241A1 (en) * 2002-12-20 2004-06-24 Andreas Niendorf Arrangement, method, and system to reduce the play of micro-mechanical produced gears
US20100157609A1 (en) * 2008-12-24 2010-06-24 Wu Yii-Der Brightness enhancement film
DE102010020243B4 (de) * 2010-05-11 2012-03-01 Jos. Schneider Optische Werke Gmbh Kamera-Modul mit umschaltbarer Brennweite
CN102645705A (zh) * 2011-02-21 2012-08-22 华为技术有限公司 一种波分复用器、光开关装置及光开关控制方法
US9279774B2 (en) * 2011-07-12 2016-03-08 Kla-Tencor Corp. Wafer inspection
KR102101864B1 (ko) * 2014-01-29 2020-04-20 엘지이노텍 주식회사 깊이 정보 추출 장치
WO2020087016A1 (en) * 2018-10-26 2020-04-30 The Charles Stark Draper Laboratory, Inc. Adaptive lidar scanning techniques for improved frame rate and safety

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5165104A (en) * 1991-03-01 1992-11-17 Optivideo Corporation Optical interconnecting device and method
US5835458A (en) * 1994-09-09 1998-11-10 Gemfire Corporation Solid state optical data reader using an electric field for routing control
US5969848A (en) * 1997-07-03 1999-10-19 The Regents Of The University Of California Micromachined electrostatic vertical actuator
US6137103A (en) * 1998-07-31 2000-10-24 Lucent Technologies Opto-mechanical components
US6304703B1 (en) * 2000-01-13 2001-10-16 Transvision, Inc. Tiled fiber optic display apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010004061A (ja) * 2004-12-28 2010-01-07 Asml Netherlands Bv リソグラフィ装置及びデバイス製造方法
US7756660B2 (en) 2004-12-28 2010-07-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
US6678436B2 (en) 2004-01-13
US20020181836A1 (en) 2002-12-05

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