JP2003075334A - Sensor using attenuated total reflection - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize high S/N even under influence of external light such as illumination light in a sensor using attenuated total reflection. SOLUTION: This sensor using attenuated total reflection is provide with: a prism 1; a metal film 3 formed on one surface thereof; an optical system 15 for entering a light beam 13 in an infrared region into the prism 1 at various angles so as to provide a total reflection condition on an interface 1b between the prism 1 and the metal film 3; and light detection means 6 and 7 for detecting the light beam totally reflected on the interface 1b. Pyroelectric elements are used for the light detection means 6 and 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor utilizing total reflection attenuation, such as a surface plasmon sensor for quantitatively analyzing a substance in a sample by utilizing the generation of surface plasmon, and more particularly to a total reflection attenuation. The present invention relates to a sensor utilizing attenuation of total reflection for detecting a dark line generated in measurement light by using a light detecting means.

[0002]

2. Description of the Related Art In a metal, free electrons oscillate collectively to generate compression waves called plasma waves. And, the quantized compression wave generated on the metal surface is
It is called surface plasmon.

Conventionally, various surface plasmon sensors have been proposed for quantitatively analyzing a substance in a sample by utilizing the phenomenon that the surface plasmon is excited by a light wave.
Among them, one that is particularly well known is one that uses a system called Kretschmann arrangement (see, for example, JP-A-6-167443).

A surface plasmon sensor using the above system basically emits a light beam and a dielectric block formed in a prism shape, a metal film formed on one surface of the dielectric block and brought into contact with a sample. With respect to the light source to be generated and the above-mentioned light beam with respect to the dielectric block, the total reflection condition can be obtained at the interface between the dielectric block and the metal film, and the total reflection attenuation due to the surface plasmon resonance can occur at various angles. And an optical system for measuring the intensity of the light beam totally reflected at the interface to detect the state of surface plasmon resonance, that is, the state of attenuated total reflection.

In order to obtain various incident angles as described above, a relatively thin light beam may be incident on the above interface by changing the incident angle, or a component incident on the light beam at various angles. Therefore, a relatively thick light beam may be incident on the interface in a convergent light state or a divergent light state. In the former case, a light beam whose reflection angle changes according to the change of the incident angle of the incident light beam is detected by a small photodetector that moves in synchronization with the change of the above-mentioned reflection angle, or the direction of change of the reflection angle. It can be detected by an area sensor extending along. On the other hand, in the latter case, each light beam reflected at various reflection angles can be detected by an area sensor extending in a direction in which all the light beams can be received.

In the surface plasmon sensor having the above structure, when a light beam is incident on the metal film at a specific incident angle θ _SP which is equal to or greater than the total reflection angle, an evanescent wave having an electric field distribution in the sample in contact with the metal film. Is generated, and surface plasmons are excited at the interface between the metal film and the sample by this evanescent wave. When the wave vector of the evanescent light is equal to the wave number of the surface plasmon and the wave number matching is established, both are in a resonance state and the energy of the light is transferred to the surface plasmon, so that at the interface between the dielectric block and the metal film. The intensity of the reflected light sharply decreases. This decrease in light intensity is generally detected as a dark line by the light detecting means.

The above resonance occurs only when the incident beam is p-polarized. Therefore, it is necessary to set in advance that the light beam is incident as p-polarized light.

When the wave number of the surface plasmon is known from the incident angle θ _{SP at which} this attenuated total reflection (ATR) occurs, the dielectric constant of the sample can be obtained. That is, the wave number of the surface plasmon is K
_{Let SP be} the angular frequency of surface plasmons be ω, c be the speed of light in a vacuum, ε _m and ε _S be the metal, and the permittivity of the sample respectively, and the following relationships are established.

[0009]

[Equation 1] If the permittivity ε _S of the sample is known, the concentration of the specific substance in the sample can be known based on a predetermined calibration curve or the like. Therefore, by finally knowing the incident angle θ _{SP at} which the reflected light intensity decreases, the dielectric constant of the sample can be determined. A property related to the index, that is, the refractive index can be obtained.

As a similar sensor utilizing the attenuated total reflection (ATR), for example, "Spectroscopic Research" Vol. 47, No. 1 (1998), pages 21 to 23 and 26 to 27.
Leakage mode sensors described on the page are also known. This leaky mode sensor is basically formed by, for example, a dielectric block formed in a prism shape, a clad layer formed on one surface of the dielectric block, and formed on the clad layer and brought into contact with a sample. An optical waveguide layer, a light source for generating a light beam, and the light beam with respect to the dielectric block, a total reflection condition is obtained at the interface between the dielectric block and the cladding layer, and the light guide layer is used. The optical system that is incident at various angles so that the attenuation of the total reflection due to the excitation of the wave mode may occur, and the intensity of the light beam that is totally reflected at the interface is measured to determine the excited state of the guided mode, that is, the attenuated total reflection state. And a light detecting means for detecting.

In the leak mode sensor having the above structure,
When a light beam is incident on the cladding layer through the dielectric block at an angle of incidence equal to or more than the total reflection angle, only light with a specific incident angle having a specific wave number is transmitted in the optical waveguide layer after passing through the cladding layer. It propagates in the guided mode. When the guided mode is excited in this manner, most of the incident light is taken into the optical waveguide layer, so that the total reflection attenuation occurs in which the intensity of the light totally reflected at the interface sharply decreases.
Since the wave number of the guided light depends on the refractive index of the sample on the optical waveguide layer, the refractive index of the sample and the related characteristics of the sample are analyzed by knowing the above-mentioned specific incident angle at which attenuation of total reflection occurs. be able to.

[0012]

In the conventional surface plasmon sensor and leak mode sensor of the type described above, a light beam in the visible light region having a wavelength of 0.4 μm to 0.9 μm is usually used for measurement. However, the wavelength of the illumination light used in the environment where the above sensor is used is 0.25 μm to 2.5 μm, and it is difficult to improve the S / N because it is affected by these illumination lights at the time of measurement. is there.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a sensor that utilizes high total S / N attenuation of total reflection even under the influence of external light such as illumination light. Is.

[0014]

A first sensor utilizing attenuation of total reflection according to the present invention comprises a dielectric block, a thin film layer formed on one surface of the dielectric block and brought into contact with a sample, and an infrared ray. , A light source for generating infrared rays, an optical system for making infrared rays incident on the dielectric block at various angles so that total reflection conditions can be obtained at the interface between the dielectric block and the thin film layer, and infrared rays totally reflected at the interface. In a sensor utilizing attenuated total internal reflection, which comprises a light detecting means for measuring the intensity of, and detecting the state of attenuated total internal reflection, a thermal type element is used as the optical detecting means. is there.

Here, the "infrared" has a wavelength of 0.76.
Although it means a light beam having a wavelength of μm to 1 mm, it is preferable to use a light beam having a wavelength of 2.5 μm to 1 mm in order to avoid the influence of commonly used illumination light (wavelength 0.25 μm to 2.5 μm). .

The "thermal element" is a sensor for electrically detecting the temperature rise of the element caused by the thermal effect of infrared rays, and for example, a thermopile or a pyroelectric element (pyrosensor) can be used. .

The second sensor utilizing attenuation of total reflection according to the present invention is a dielectric block, a metal film formed on one surface of the dielectric block and brought into contact with a sample, and a light source for generating infrared rays. And an optical system that makes infrared rays incident on the dielectric block at various angles so that total reflection conditions can be obtained at the interface between the dielectric block and the metal film, and the intensity of infrared rays totally reflected at the interface. Measure
In a sensor utilizing attenuated total reflection, which comprises a photodetection means for detecting a state of attenuation of total internal reflection due to surface plasmon resonance, a thermal element is used as the photodetection means.

Further, the third sensor utilizing attenuation of total reflection according to the present invention is a dielectric block, a clad layer formed on one surface of the dielectric block, and a clad layer formed on the clad layer. An optical waveguide layer that is brought into contact with the light source, a light source that generates infrared rays, and the infrared rays are incident on the dielectric block at various angles so that total reflection conditions can be obtained at the interface between the dielectric block and the clad layer. Attenuation of total internal reflection comprising an optical system and a photodetection means for measuring the intensity of infrared rays totally reflected at the interface and detecting a state of total internal reflection attenuation accompanying excitation of a guided mode in the optical waveguide layer. In the sensor used, a thermal type element is used as the light detecting means.

In the sensor utilizing the first to third attenuations of total internal reflection, the thermal element is preferably a pyroelectric element.

[0020]

Since the sensor utilizing attenuation of total reflection of the present invention uses a light source for generating infrared rays and a thermal element as a light detecting means, it is affected by external light such as illumination light. Since the measurement can be performed without using the sensor, it is possible to realize a sensor that utilizes a high S / N attenuation of total reflection.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. A sensor utilizing attenuation of total internal reflection according to the first embodiment of the present invention is a surface plasmon sensor utilizing surface plasmon resonance, and FIG. 1 shows a plane shape of an incident optical system and a sensor portion thereof. FIG. 2 shows a side surface shape of the surface plasmon detecting portion.

As shown in the figure, this surface plasmon sensor is formed of glass which is a dielectric, and has a triangular prism 1 whose major axis extends in a direction perpendicular to the plane of FIG. 2 (vertical direction in FIG. 1). (One form of dielectric block),
A metal film 3 formed on one surface of the prism 1 and brought into contact with the sample 2 and made of, for example, gold, silver or the like, and a light source 14 made of a semiconductor laser or the like for generating a light beam 13 in an infrared region (hereinafter, A laser light source 14), an optical system 15 which allows the light beam 13 to pass through the prism 1 and is incident on the interface 1b between the prism 1 and the metal film 3 so as to obtain various incident angles, and the interface. Light beam totally reflected by 1b
It is provided with a first light detecting means 6 and a second light detecting means 7 for detecting the amount of light of 13, and a comparator 8 connected to these light detecting means 6, 7.

The incident optical system 15 converges the collimator lens 15a for collimating the light beam 13 emitted from the laser light source 14 in a divergent state and the collimated light beam 13 on the interface 1b. It is composed of a condenser lens 15b.

Since the light beam 13 is condensed by the condensing lens 15b as described above, as shown in the example of the minimum incident angle θ ₁ and the maximum incident angle θ ₂ in FIG. It includes components incident at various incident angles θ. The incident angle θ is set to an angle equal to or larger than the total reflection angle. Therefore, the light beam 13 is totally reflected at the interface 1b, and the reflected light beam 13 contains components that are reflected at various reflection angles. The optical system 15 may be configured to make the light beam 13 incident on the interface 1b in a defocused state. By doing so, the error in the state detection of the surface plasmon resonance (for example, the position measurement of the dark line) is averaged, and the measurement accuracy is improved.

The light beam 13 is incident on the interface 1b as p-polarized light. In order to do so, the laser light source 14 may be arranged in advance so that the polarization direction thereof becomes a predetermined direction. Alternatively, the polarization direction of the light beam 13 may be controlled by the wave plate.

On the other hand, the first light detecting means 6 and the second light detecting means 7 are, for example, pyroelectric elements. The first light detecting means 6 is arranged so as to detect the light amount of the component in the first reflection angle range (relatively low angle range) of the light beam 13 totally reflected at the interface 1b, and Light detection means 7
Is arranged so as to detect the light quantity of the component in the second reflection angle range (relatively high angle range) of the light beam 13 totally reflected at the interface 1b.

As described above, in the present embodiment, the interface 1b between the prism 1 and the metal film 3 is irradiated with the light beam 13 in the infrared region and is reflected by the interface 1b between the prism 1 and the metal film 3. Since 13 is detected by a thermal element such as a pyroelectric element, it is possible to realize a sensor that utilizes high total S / N attenuation of total reflection even under the influence of external light such as illumination light.

The sample analysis by the surface plasmon sensor having the above structure will be described below. The sample 2 to be analyzed is held in contact with the metal film 3. Then, the light beam 13 condensed as described above is irradiated toward the metal film 3. The light beam 13 totally reflected at the interface 1b between the metal film 3 and the prism 1 is detected by the first light detecting means 6 and the second light detecting means 7.

At this time, the light amount detection signal S1 output by the first light detecting means 6 and the light amount detection signal S2 output by the second light detecting means 7 are input to the comparator 8, which then outputs both signals. A difference signal S indicating the difference between S1 and S2 is output.

Here, a specific incident angle θ at the interface 1b
_The light incident at _SP excites surface plasmons at the interface between the metal film 3 and the sample 2, so that the reflected light intensity I of this light sharply decreases. That is, the totally reflected light beam 13
The relationship between the intensity I and the incident angle θ is approximately (A) in FIG.
The curves a and b are shown in FIG.
The specific substance in the sample 2 can be quantitatively analyzed by knowing the incident angle θ _{SP of} attenuated total reflection (ATR) and the relationship curve of the reflected light intensity I and the incident angle θ. Hereinafter, the reason will be described in detail.

For example, if the first reflection angle range and the second reflection angle range are continuous and the reflection angle at the boundary between the two ranges is θ _M , the incident angle is smaller than the incident angle θ _M. The light in the small range and the light in the large range are detected by one and the other of the photodetectors 6 and 7, respectively.

As an example, the light in the range where the incident angle is smaller than θ _M is detected by the first light detecting means 6, and θ
_Assuming that the light beam whose incident angle is larger than _M is detected by the second light detecting means 7, the first light detecting means 6 is hatched in FIGS. 3A and 3B. The light in the above range is detected, and the detected light amount is larger in the case of (B) than in the case of (A). On the contrary, the amount of light detected by the second light detecting means 7 is smaller in the case of (B) than in the case of (A). in this way,
The amount of light detected by the first light detecting means 6 and the amount of light detected by the second light detecting means 7 will have a unique difference depending on the relationship between the incident angle θ and the reflected light intensity I.

Therefore, referring to the calibration curve for each sample which is obtained in advance, the light amount detection signal S1 output from the first light detecting means 6 and the light amount detection signal output from the second light detecting means 7 are obtained. Based on the output of the comparator 8 indicating the difference from S2, that is, the difference signal S, the attenuated total reflection (ATR) incident angle θ _SP regarding the analysis sample 2 and the relation curve between the incident angle θ and the reflected light intensity I are estimated. This makes it possible to quantitatively analyze the substance in the sample 2.

Although the case where the first reflection angle range and the second reflection angle range are continuous has been described above, the first light detecting means 6 can be used even when these two ranges are not continuous. The amount of light detected by the second light detecting device 7 and the amount of light detected by the second light detecting means 7 have a peculiar difference according to the relationship between the incident angle θ and the reflected light intensity I. Therefore, the substance in the sample 2 should be quantitatively analyzed in the same manner. You can

Next, a second embodiment of the present invention will be described with reference to FIG. In FIG. 4, elements that are the same as the elements in FIG. 1 are given the same numbers, and explanations thereof are omitted unless necessary.

The sensor utilizing the attenuation of total reflection of the second embodiment is a surface plasmon sensor utilizing the surface plasmon resonance as in the first embodiment, and FIG. 4 shows its side surface shape.

This surface plasmon sensor has, for example, a dielectric block 10 formed by cutting out a part of a roughly square pyramid, and one surface of the dielectric block 10 (upper surface in the figure).
And a metal film 12 made of, for example, gold, silver, copper, aluminum or the like.

The dielectric block 10 is made of, for example, a transparent resin and has a raised shape around the portion where the metal film 12 is formed. The raised portion 10a serves as a sample holding portion for storing the liquid sample 11. Function. In this example, the sensing medium 30 is fixed on the metal film 12, and the sensing medium 30 will be described later.

The dielectric block 10 constitutes a disposable measuring chip together with the metal film 12, and is fitted and fixed one by one in a plurality of chip holding holes 31a provided in the turntable 31, for example. After the dielectric block 10 is thus fixed to the turntable 31, the turntable 31 is intermittently rotated by a constant angle, and the liquid sample 11 is dropped onto the dielectric block 10 stopped at a predetermined position. The liquid sample 11 is held in the sample holder 10a. Thereafter, when the turntable 31 is further rotated by a certain angle, the dielectric block 10 is sent to the measurement position shown in FIG. 1 and stopped there.

The surface plasmon sensor of this embodiment is
In addition to the dielectric block 10, a light source 14 (hereinafter referred to as a laser light source 14) including a semiconductor laser or the like for generating a light beam 13 in the infrared region, and the light beam 13
Is passed through the dielectric block 10 and is incident on the interface 10b between the dielectric block 10 and the metal film 12 so as to obtain various incident angles, and a light beam totally reflected at the interface 10b. Collimator lens 16 for collimating 13 and light detecting means 17 for detecting this collimated light beam 13.
A diffusing plate 27 for diffusing the light beam 13 arranged between the collimator lens 16 and the light detecting means 17, and the light detecting means 17
A differential amplifier array 18, a driver 19, a signal processing section 20 including a computer system, and a display means 21 connected to the signal processing section 20.

As shown in FIG. 4, the light beam 13 emitted from the laser light source 14 in a diverging state is caused by the action of the optical system 15.
It converges on the interface 10b between the dielectric block 10 and the metal film 12. Therefore, the light beam 13 includes components that are incident on the interface 10b at various incident angles θ. The incident angle θ is set to an angle equal to or larger than the total reflection angle. Therefore, the light beam 13 is totally reflected at the interface 10b, and the reflected light beam 13
Will include components that reflect at various reflection angles.

The light beam 13 which is totally reflected by the interface 10b and then collimated by the collimator lens 16 is detected by the light detecting means 17. The light detection means 17 in this example is
A pyroelectric array element in which a plurality of pyroelectric elements 17a, 17b, 17c ... Are arranged side by side in one row, and in the plane of the drawing of FIG. 4, with respect to the traveling direction of the collimated light beam 13. The pyroelectric elements are arranged in a direction in which the parallel arrangement directions are substantially right angles.
Therefore, the components of the light beam 13 totally reflected at various reflection angles at the interface 10b are different from each other in different pyroelectric elements.
17a, 17b, 17c ... Will receive light.

FIG. 5 is a block diagram showing the electrical construction of this surface plasmon sensor. As shown in the figure, the driver 19 includes the differential amplifiers 18 a, 18 a of the differential amplifier array 18.
The sample-hold circuits 22a, 22b, 22c, ... for sampling and holding the outputs of b, 18c .., the multiplexer 23 to which the outputs of these sample-hold circuits 22a, 22b, 22c. A / D converter 24 that digitizes and inputs to signal processing unit 20, multiplexer 23 and sample hold circuits 22a, 22b, 22
.. and c, and a controller 26 that controls the operation of the drive circuit 25 based on an instruction from the signal processing unit 20.

The outputs of the pyroelectric elements 17a, 17b, 17c ... Are supplied to the differential amplifiers 18a, 18b of the differential amplifier array 18, respectively.
It is input to 18c ……. At this time, the outputs of the two pyroelectric elements adjacent to each other are input to a common differential amplifier. Therefore, the output of each differential amplifier 18a, 18b, 18c ...
It can be considered that the photodetection signals output by the plurality of pyroelectric elements 17a, 17b, 17c ... Are differentiated with respect to their parallel arrangement direction.

The outputs of the differential amplifiers 18a, 18b, 18c, ... Are sample and hold circuits 22a, 22b, 22c ,.
Are sample-held at a predetermined timing by the ... And input to the multiplexer 23. The multiplexer 23 includes the sample-and-hold differential amplifiers 18a, 18b, 18c ...
The outputs of ... Are input to the A / D converter 24 in a predetermined order. The A / D converter 24 digitizes these outputs and inputs them to the signal processing unit 20.

FIG. 6 shows the light beam 13 totally reflected at the interface 10b.
Intensity of each incident angle θ and differential amplifiers 18a, 18b, 18c
It describes the relationship with the output of. Here, it is assumed that the relationship between the incident angle θ of the light beam 13 on the interface 10b and the light intensity I is as shown in the graph of FIG.

Light incident on the interface 10b at a specific incident angle θ _SP excites surface plasmons at the interface between the metal film 12 and the sample 11, so that the reflected light intensity I of this light sharply decreases. That is, θ _SP is the total reflection elimination angle, and the reflected light intensity I takes the minimum value at this angle θ _SP . This decrease in the reflected light intensity I is observed as a dark line in the reflected light, as indicated by D in FIG.

Further, FIG. 6B shows the pyroelectric elements 17a, 17a.
b, 17c ... Show the juxtaposed direction, and as described above, the positions of these pyroelectric elements 17a, 17b, 17c .. .

Then, the positions of the pyroelectric elements 17a, 17b, 17c in the parallel installation direction, that is, the incident angle θ, and the differential amplifiers 18a, 18
The relationship between b, 18c ... And the output I '(differential value of the reflected light intensity I) is as shown in FIG.

The signal processing section 20 is based on the value of the differential value I'input from the A / D converter 24, and the differential amplifiers 18a, 18a.
From b, 18c, ..., select the one that gives the output closest to the differential value I '= 0 corresponding to the total reflection elimination angle θ _SP (in the example of FIG. 6, it is the differential amplifier 18d). , The differential value I ′ output therefrom is subjected to a predetermined correction process, and then the value is displayed on the display means 21. In some cases, there is a differential amplifier that outputs a differential value I ′ = 0, and in that case, that differential amplifier is naturally selected.

Thereafter, every time a predetermined time elapses, the differential value I'output from the selected differential amplifier 18d is displayed on the display means 21 after undergoing a predetermined correction process. This differential value I'changes the dielectric constant of the substance in contact with the metal film 12 (see FIG. 1) of the measuring chip, that is, the refractive index,
When the curve shown in (1) changes in the form of moving to the left and right, the curve moves up and down accordingly. Therefore, by continuously measuring the differential value I ′ with the passage of time, it is possible to investigate the change in the refractive index of the substance in contact with the metal film 12, that is, the change in the characteristic.

In particular, in this embodiment, the metal film 12 is provided with a liquid sample.
The sensing medium 30 that binds to the specific substance in 11 is fixed, and the refractive index of the sensing medium 30 changes according to the binding state thereof. Therefore, by continuously measuring the differential value I ′, this binding You can check how the state changes. That is, in this case, both the liquid sample 11 and the sensing medium 30 are samples to be analyzed. Examples of such a combination of the specific substance and the sensing medium 30 include an antigen and an antibody.

As is apparent from the above description, in the present embodiment, the plurality of pyroelectric elements 17a, 17b, 17 are used as the light detecting means 17.
Since c ... are arranged in parallel in one row, even if the curve shown in FIG. 6 (1) moves to the left and right depending on the liquid sample 11 to some extent, , Dark line detection is possible. That is, the use of such an array-shaped light detecting means 17 can secure a large dynamic range of measurement.

A plurality of differential amplifiers 18a, 18b, 18c
, A differential amplifier is provided instead of using the differential amplifier array 18, and each output of the pyroelectric elements 17a, 17b, 17c is switched by a multiplexer, and two adjacent outputs of them are switched. You may make it input to this one differential amplifier sequentially.

In order to investigate the change in the binding state between the specific substance in the liquid sample 11 and the sensing medium 30 with the passage of time, the differential value I '
In addition to displaying, the first measured differential value I '(0)
And the differential value I '(t) measured after the lapse of a predetermined time Δ
I ′ may be obtained and displayed.

Next, a third embodiment of the present invention will be described with reference to FIG. In FIG. 7, elements equivalent to those in FIG. 1 or 4 are designated by the same reference numerals, and description thereof will be omitted unless particularly necessary.

The sensor utilizing the attenuated total reflection of the third embodiment is the leak mode sensor described above,
Also in this example, the dielectric block 10 formed into a measurement chip is used. A clad layer 40 is formed on one surface (upper surface in the figure) of the dielectric block 10, and an optical waveguide layer 41 is further formed thereon.

The dielectric block 10 is made of, for example, synthetic resin or B.
It is formed using an optical glass such as K7. On the other hand, the clad layer 40 is formed in a thin film shape using a dielectric having a lower refractive index than the dielectric block 10 or a metal such as gold. The optical waveguide layer 41 is a dielectric material having a higher refractive index than the cladding layer 40,
For example, PMMA is also used to form a thin film. The clad layer 40 has a film thickness of, for example, 36.5 nm when formed from a gold thin film, and the optical waveguide layer 41 has a film thickness of, for example, PMMA.
When formed from, the thickness is about 700 nm.

In the leaky mode sensor having the above structure,
Dielectric block the light beam 13 emitted from the laser light source 14.
When the light beam 13 is incident on the clad layer 40 through 10 at an incident angle equal to or larger than the total reflection angle, the light beam 13 is totally reflected at the interface 10b between the dielectric block 10 and the clad layer 40.
Light having a specific wave number that has passed through the optical waveguide layer 41 and is incident on the optical waveguide layer 41 at a specific incident angle propagates through the optical waveguide layer 41 in the guided mode. When the guided mode is excited in this way, most of the incident light is taken into the optical waveguide layer 41, so that the total reflection attenuation occurs in which the intensity of the light totally reflected at the interface 10b sharply decreases.

Since the wave number of the guided light in the optical waveguide layer 41 depends on the refractive index of the sample 11 on the optical waveguide layer 41, by knowing the above-mentioned specific incident angle at which attenuation of total reflection occurs, the sample
It is possible to analyze the refractive index of 11 and the characteristics of the sample 11 related thereto. The characteristics of the sample 11 can also be analyzed based on the reflected light intensity I in the vicinity of the specific incident angle and the differential value I ′ output from each differential amplifier of the differential amplifier array 18.

Also in the second and third embodiments described above, since a light beam in the infrared region is irradiated and detected by a thermal element such as a pyroelectric element, a high S is obtained even under the influence of external light such as illumination light. It is possible to realize a sensor utilizing attenuation of total reflection of / N.

Further, in the first to third embodiments described above, the same effect can be obtained by using, for example, a thermopile as the thermal type element used for the light detecting means, in addition to the pyroelectric element. .

[Brief description of drawings]

FIG. 1 is a plan view showing a part of a surface plasmon sensor according to a first embodiment of the present invention.

FIG. 2 is a side view showing a part of the surface plasmon sensor according to the first embodiment of the present invention.

FIG. 3 is a graph showing a schematic relationship between an incident angle of a light beam on a surface plasmon sensor and a light intensity detected by a light detecting means.

FIG. 4 is a side view of a surface plasmon sensor according to a second embodiment of the present invention.

FIG. 5 is a block diagram showing an electrical configuration of the surface plasmon sensor.

FIG. 6 is a schematic diagram showing the relationship between the incident angle of the light beam and the detected light intensity and the relationship between the incident angle of the light beam and the differential value of the light intensity detection signal in the surface plasmon sensor.

FIG. 7 is a side view of a leaky mode sensor according to a third embodiment of the present invention.

[Explanation of symbols]

1 prism 1b Interface of prism with metal film 2 samples 3 metal film 6, 7 Light detection means 10 Dielectric block 10a Dielectric block sample holder 10b Interface between dielectric block and metal film 11 samples 12 Metal film 13 light beam 14 Semiconductor laser, etc. 15 Optical system 16 collimator lens 17 Light detection means (pyroelectric array element) 17a, 17b, 17c ... Pyroelectric element 18 Differential amplifier array 18a, 18b, 18c ... Differential amplifier 19 driver 20 Signal processor 21 Display means 22a, 22b, 22c ... Sample hold circuit 23 Multiplexer 24 A / D converter 25 Drive circuit 26 Controller 30 Sensing medium 31 turntable 40 clad layer 41 Optical waveguide layer

Claims (4)

[Claims] 1. A dielectric block, a thin film layer formed on one surface of the dielectric block and brought into contact with a sample, a light source for generating infrared rays, and a dielectric layer for applying the infrared rays to the dielectric block. An optical system that makes incidence at various angles so that total reflection conditions are obtained at the interface between the body block and the thin film layer, and the intensity of infrared rays totally reflected at the interface is measured to detect the state of attenuation of total reflection. A sensor using attenuated total reflection, comprising a photodetector, wherein a thermal element is used as the photodetector. 2. A dielectric block, a metal film formed on one surface of the dielectric block and brought into contact with a sample, a light source for generating infrared rays, and a dielectric film for exposing the infrared rays to the dielectric block. An optical system that is incident at various angles so that total reflection conditions can be obtained at the interface between the body block and the metal film, and the intensity of infrared light that is totally reflected at the interface is measured, and total reflection attenuation accompanying surface plasmon resonance is measured. In the sensor using attenuated total reflection, which comprises a light detecting means for detecting the above condition, a thermal type element is used as the light detecting means. 3. A dielectric block, a clad layer formed on one surface of the dielectric block, an optical waveguide layer formed on the clad layer and brought into contact with a sample, and a light source for generating infrared rays. , An optical system that makes the infrared rays incident on the dielectric block at various angles so that total reflection conditions can be obtained at the interface between the dielectric block and the cladding layer, and the infrared rays totally reflected at the interface In a sensor utilizing attenuated total internal reflection, which comprises a light detecting means for measuring intensity and detecting a state of attenuated total internal reflection due to excitation of a guided mode in the optical waveguide layer, wherein the optical detecting means: A sensor utilizing attenuated total reflection characterized by using a thermal element. 4. The sensor utilizing attenuation of total reflection according to claim 1, wherein the thermal element is a pyroelectric element.