JP2003074475A - Micro-pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micro-pump which is small and thin and capable of increasing the discharge quantity (moving amount) of a fluid and attaining high-speed responsiveness. SOLUTION: This micro-pump includes at least one pump part, and is capable of feeding a fluid by the action of pressure. The pump part is constituted of a pump unit 44, and the pump unit 44 is formed by at least one actuator part 2 for causing fluctuation of pressure and a passage part allowing the fluid to pass through it. The actuator part 2 is constructed so that two side walls 2 formed by piezoelectric/electrostrictive element or antiferromagnetic material are arranged on a connecting board 68, and the surface of the side wall 6 opposite to the connecting board 68 is blocked with a cover plate 7 to form a cell 3, fluctuation of pressure is caused in a passage part 42 through the displacement of the cell 3 due to elongation and contraction of the side wall 6, thereby selectively forming the passage for a fluid.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a micropump suitable for being small and thin.

[0002]

2. Description of the Related Art In recent years, in a micromachine in which silicon is microfabricated, a micropump driven by electrostatic force has been proposed. Since such a micro pump is small and consumes low power, it is a pump that can be applied to a device for implanting a small amount of a drug by implanting it in the body and a small chemical analyzer. Such minute pumps are known to be made of silicon, and are expected to be increasingly applied to the fields of medical treatment and chemical analysis in the future. When it is used for this purpose, it is desirable that it is smaller and thinner, and furthermore, it is desirable that the discharge amount (movement amount) of the fluid is large in spite of being small and thin.

However, in such a minute pump, since it is driven by a weak electrostatic force, it is difficult to speed up the pump operation and increase the discharge amount (movement amount) of the fluid.

Then, in order to solve such a problem,
Japanese Patent Laid-Open No. 2000-314381 proposes the following pump. FIG. 2 is a sectional view of a pump that is small and thin and that can increase the discharge amount (movement amount) of a fluid. The pump 110 includes a casing 114 to which a fluid is supplied and a casing 114.
Of the input valve section 118, the pump section 116, and the output valve section 120 provided to face the back surface of the casing 114, and the input valve section 118, the pump section 116, and the back surface of the casing 114.
And a pump main body 112 that selectively forms a flow path on the back surface of the casing 114 through the selective displacement operation of the output valve unit 120 in the approaching / separating direction. Is configured to control.

However, such a pump 110
However, there were the following problems. That is, since the displacement operation of the pump portion 116 is caused by the bending movement of the vibrating portion 142, there is an upper limit to the pressing force and the stroke amount for discharging the fluid, which is small and thin, and has higher performance. There was a limit in producing a simple pump. The upper limit of the bending deformation amount of the vibrating portion is limited by the breaking strength of the vibrating portion 142. Therefore, in order to obtain a larger amount of pressurization, when the bending deformation amount and thus the stroke amount are increased, the thickness of the vibrating portion 142 is increased. It is effective to reduce the thickness. However, if so, the rigidity of the vibrating portion 142 is reduced, and the high-speed response is impaired. The area of the vibrating portion 142 may be increased, but if this is done, the vibrating portion 142 becomes a large vibrating portion, resulting in a pump that is contrary to downsizing and thinning. On the other hand, in order to obtain a better high-speed response, it is necessary to increase the rigidity, and it is effective to thicken the vibrating portion 142 of the pump 110. However, if this is done, the displacement will be small and the desired amount of pressurization will be obtained. Absent. That is, in the pump 110, the vibrating section 1
Due to the bending deformation of 42, it was difficult to achieve both the pressing force and the high-speed response.

[0006]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has a smaller size, a thinner shape, and an increased discharge amount (movement amount) of a fluid and a response. An object of the present invention is to provide a micropump capable of achieving high speed. As a result of repeated studies on the structure of micro pumps, the part that causes the displacement operation, and the method of causing the displacement operation, it was found that the above-mentioned objects can be achieved by the micro pumps shown below. Was done.

[0007]

[Means for Solving the Problems] That is, according to the present invention, there is provided a micropump including at least one pump portion and capable of sending fluid by the action of pressure, wherein the pump portion is composed of a pump unit. The pump unit is composed of at least one actuator section that causes pressure fluctuation and a flow path section through which a fluid flows, and the actuator section is formed on a communication plate from a piezoelectric / electrostrictive body or an antiferroelectric body. By arranging the two side walls, the surface of the side wall facing the communication plate is covered with a lid plate to form a cell, and the side wall expands and contracts to cause displacement of the cell, which causes pressure fluctuations in the flow path. At the very least, a micropump is provided which is capable of selectively forming a fluid flow path.

In this pump unit, it is preferable that the electrode film is formed on both surfaces of the side wall of the actuator portion, and the side wall expands and contracts in the vertical direction according to the driving electric field by applying a voltage to the electrode film. In addition, when the side wall of the actuator portion is formed of a piezoelectric material, it is preferable that the polarization electric field and the driving electric field have the same electric field direction. Regarding the crystal grain state on the side wall of the actuator section, it is preferable that 1% or less of the crystal grains have undergone intragranular fracture, and the contour of the cell surface of the actuator section is approximately 8 μm or less. Is preferred.

Further, in this pump unit,
The ratio of the inner width of the cell of the actuator part to the height is preferably about 1: 2 to 1:40, the inner width of the cell of the actuator part is preferably about 60 μm or less, and the side wall of the actuator part. The surface roughness Rt is preferably about 10 μm or less.

In the actuator section of the pump unit described above, it is preferable that the communication plate is made of a piezoelectric / electrostrictive body or an antiferroelectric body and is integrally formed with the side wall.
It is also preferable that the lid plate is made of a piezoelectric / electrostrictive body or an antiferroelectric body and is integrally formed with the side wall.

In the present invention, as a more detailed form of the above-mentioned pump unit, for example, the following pump unit (A), pump unit (B), and pump unit (C) can be adopted. In the pump unit (A), the cells of the actuator portion are filled with the system fluid, the flow passage portion is preliminarily formed with a flow passage through which the fluid insoluble to the system fluid flows, and the cell and the flow passage are connected through a communication hole. The flow passage has a width that is approximately the same as the diameter of the communication hole at least where the communication hole communicates with the flow passage, and the vertical expansion and contraction of the side wall forming the cell allows the system fluid filled in the cell to flow from the communication hole. It is possible to selectively form a fluid flow path by changing the volume that enters the flow path side.

In the pump unit (B), the flow passage portion includes a displacement transmission portion that adheres at least a part of the cell cover plate of the actuator portion, and a portion of the displacement transmission portion opposite to the actuator portion. A casing facing each other across the flow path,
The expansion and contraction of the side walls of the cell in the vertical direction allows selective formation of the fluid flow path through displacement in which the displacement transmission section moves toward and away from a part of the facing casing. is there.

In this pump unit (B),
In the actuator part of the pump unit, it is preferable to form a through hole that passes through the inside of the cell and the outside of the cell.
It is also preferable that the displacement transmitting section and the casing come into contact with each other when the flow path is potentially present and the displacement transmitting section comes closest to a part of the surface of the casing facing the displacement transmitting section. Further, it is preferable that a plurality of actuator units are assigned corresponding to the displacement transmission units of the flow path unit.

In the pump unit (B), when a plurality of actuator parts are assigned corresponding to the displacement transmission parts of the flow path part, the distance between the cells and the adjacent cells,
The ratio to the height of the cell is preferably about 1: 2 to 1:40, and the distance between the cell and the adjacent cell is about 50.
It is preferably μm or less. Further, it is preferable that the inner width of the cell or the distance between the cell and an adjacent cell has at least two types of lengths.

In the actuator section of the pump unit (B) described above, the outside of the cell is filled with the same material as the displacement transmitting section of the flow path section, and the actuator section and the flow path section are integrally formed. Preferably.

In the pump unit (A) and the pump unit (C) following the pump unit (B), a fluid introduction opening and a fluid discharge opening are formed in the cells of the actuator section, and the introduction passage and the discharge section are formed in the passage section. A flow path consisting of a flow path is formed in advance, the introduction flow path leads to the fluid introduction opening of the cell, and the discharge flow path leads to the fluid discharge opening of the cell. By expanding and contracting in the direction, the volume of the cell is changed to generate a pressure in the cell, and the flow path of the fluid can be selectively formed. According to the present invention, the above-mentioned pump unit (A), pump unit (B), and pump unit (C) are used as a pump unit,
There is provided a micropump comprising at least one pump section.

Further, in the micro pump of the present invention using the pump unit including the pump unit (A), the pump unit (B), and the pump unit (C) described above, pressure loss is formed on the introduction side and the discharge side of the flow path. Has a section,
In the introduction side pressure loss forming part, a pressure loss ΔP1 when flowing in the direction of introducing the fluid, a pressure loss ΔP2 when flowing in the direction opposite to the direction of introducing the fluid, and in the discharge side pressure loss forming part, The pressure loss ΔP3 when flowing in the direction of discharging the fluid and the pressure loss ΔP4 when flowing in the direction opposite to the direction of discharging the fluid are the following two equations, ΔP1 <ΔP
4, it is preferable to satisfy ΔP2> ΔP3. In order to satisfy such a condition, for example, the introduction-side pressure loss forming portion is tapered so that the cross-sectional area continuously decreases in the direction of introducing the fluid, and the discharge-side pressure loss forming portion is The taper shape may be continuously reduced in the discharging direction. Further, the pressure loss forming portions on the introduction side and the discharge side may be check valves.

In the present invention, it is preferable that a plurality of pump parts each including such a pump unit are provided and have at least one series connection. A plurality of pump parts are provided, and the series connection and the parallel connection are provided. It is also preferable that they are connected in any combination. At this time, among the plurality of pump units, at least one set of two pump units that are adjacent in series shifts the phases of pressure fluctuations that occur in the flow channel unit from each other, thereby controlling the flow of fluid in the flow channel unit. Preferably. Further, when a plurality of pump units are provided, it is preferable that the pump units forming the pump units are of the same type, for example, both pump units (A).

When a plurality of pump units are provided, any one of the above-mentioned pump unit (A), pump unit (B), and pump unit (C) is used between at least one adjacent pump unit. It is also preferable that the valve portion is interposed. At this time, it is preferable that the pump unit of the pump unit and the pump unit of the valve unit are the same type of pump unit, such as the pump unit (B).

In the present invention, at least one input valve composed of any one of the above-mentioned pump unit (A), pump unit (B), and pump unit (C) is provided on the introduction side of the pump unit. It is preferable to have a part. At this time, it is preferable that the pump unit of the pump unit and the pump unit of the input valve unit are the same type of pump unit, such as both pump units (C).

Further, the discharge side of the pump portion has at least one output valve portion constituted by any one of the pump unit (A), the pump unit (B), and the pump unit (C) described above. It is preferable.
At this time, both the pump unit of the pump unit and the pump unit of the output valve unit are, for example, the pump unit (A).
It is preferable that the pump units are of the same type.

In the present invention, the actuator portion of the pump unit used as the pump portion or the valve portion is made of a piezoelectric / electrostrictive body or an antiferroelectric body, and a spacer plate having a plurality of slits (A) formed therein, and a spacer. A slit that is composed of a cover plate that covers the overlapping slit (A) on one side of the plate and a communication plate that covers the overlapping slit (A) on the other side of the spacer plate, and that is adjacent to the slit (A). A slit (B) penetrating the cover plate and the spacer plate is preferably formed between (A) and (A).

According to the present invention, the following method for manufacturing a micropump is provided. That is, two side walls made of a piezoelectric / electrostrictive body or an antiferroelectric body are arranged on the communication plate,
A method for manufacturing a micro pump using a punch and a die, in which a cell is formed by closing a surface of a side wall facing a communication plate with a lid plate and the side wall expands and contracts to cause displacement of the cell. A plurality of green sheets made of a piezoelectric / electrostrictive material or an antiferroelectric material, and punching a first slit hole in the first green sheet; The second step of bringing the first green sheet into close contact with the stripper and pulling it up without pulling out the punch, and pulling the punch to such an extent that the tip of the punch is pulled slightly from the bottom of the pulled first green sheet. The third step of pulling up, the fourth step of opening the second slit hole in the second green sheet by the punch, and the state where the punch is not pulled out from the second slit hole. A fifth step of pulling up the second green sheet together with the first green sheet, and a sixth step of pulling up the punch to the extent that the tip of the punch is slightly retracted from the bottom of the pulled up second green sheet, and thereafter. , A micropump including a step of stacking a plurality of green sheets by repeating the fourth to sixth steps to form a piezoelectric / electrostrictive body or an antiferroelectric body having a plurality of slits. Is a manufacturing method.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the micropump of the present invention will be specifically described with reference to the drawings, but the present invention is not construed as being limited thereto. Various changes, modifications and improvements can be made on the basis of the knowledge of those skilled in the art without departing from the scope of the present invention. The micropump of the present invention is a micro, thin pump capable of sending a fluid by the action of pressure. At least one pump unit is provided, and the pump unit is composed of a pump unit. The pump unit is composed of at least one actuator section that causes a pressure fluctuation and a flow path section through which a fluid flows. Then, the actuator section arranges two side walls made of a piezoelectric / electrostrictive body or an antiferroelectric body on the communication plate, and closes a surface of the side wall facing the communication plate with a lid plate to form a cell.

In the present invention, there are various forms of the pump unit as will be described later, but in common, pressure fluctuations are generated in the flow path portion through displacement caused by expansion and contraction of the side wall of the cell of the actuator portion. The feature is that the flow path of the fluid can be selectively formed. Since the side wall, which is the drive unit, causes pressure due to expansion and contraction, it is not necessary to thin the drive unit in order to obtain a large displacement. Absent. Large displacement and high-speed response are compatible with each other.

FIG. 1A and FIG. 1B are cross-sectional views showing an embodiment of the micropump according to the present invention. FIG. 1A shows a stopped state (OFF), and FIG.
Indicates a drive state (ON). Micro pump 1
01 is composed of one pump unit 84 and is composed of the pump unit (A) 44. Pump unit (A) 44
Is composed of the actuator section 2 and the flow path section 42. The cell 3 provided in the actuator section 2 is formed by using the side wall 6 made of a piezoelectric / electrostrictive body or an antiferroelectric body, and the flow path section 42 is formed.
A channel 13 is formed between the casing 14 and the nozzle plate 9. The cell 3 and the flow path 13 communicate with each other through a communication hole 72 in which the communication opening 72 of the cell 3 and the nozzle 8 communicate with each other, and the flow path 13 includes a communication hole at least at a position where the communication hole 72 communicates with the flow path 13. It is formed to have a width substantially equal to the diameter of 72.

In the pump unit (A) 44 of the micropump 101, the volume of the cell 3 is changed by the vertical expansion and contraction of the side wall 6 so that the system fluid 31 filled in the cell 3 flows into the flow path portion 42. It can be projected or retracted into the flow path 13 in which the fluid 32 formed and insoluble in the system fluid 31 flows. That is, the system fluid 31 with which the cells 3 are filled flows from the communication hole 73 to the flow path 13
The volume that enters the side can be changed. And
By this operation, the flow path 13 of the fluid 32 can be selectively formed.

The features and preferable modes of the actuator unit 2 in the pump unit will be described below by taking the pump unit (A) 44 shown in FIGS. 1A and 1B as an example. The actuator part 2 covers, for example, a spacer plate 70 formed of a piezoelectric / electrostrictive body or an antiferroelectric body in which the slit (A) 5 is formed, and a cover for covering the slit (A) 5 on one side of the spacer plate 70. Lid plate 7 and the spacer plate 70 on the other side of the overlapping slit (A) 5
Can be formed from the communication plate 68 that covers the. Then, on both sides of the slit (A) 5 of the actuator portion 2, slits (B) 45 penetrating the cover plate 7 and the spacer plate 70 with the side wall 6 interposed are formed. That is, the cell 3 is formed by the slit (A) 5 and the cover plate 7, and the slit (B) 45 makes the cell 3 independent from the surrounding spacer plate 70 or other cells 3.

As described above, although the slits (B) 45 are formed and the cells 3 are independently formed, although not shown, the cells 3 are, for example, from other cells 3,
It can be driven completely independently, and the displacement operation of the side wall 6, which is the drive unit, is not hindered. As shown in FIG. 1A, when the driving electric field is OFF, the side wall 6 which is the driving portion is not deformed. When the driving electric field is turned ON, as shown in FIG. Deform. At this time, since the cell 3 is formed in the actuator portion 2 by being sandwiched between the slits (B) 45, the displacement of the side wall 6 is performed without limitation, and in order to obtain the same displacement amount, The electric field strength can be small. The slit (B) 45 may be formed to the extent that it does not hinder the deformation of the side wall 6. For example, at least the slit (B) 45 may be formed to have a length approximately equal to the portion where the lid plate 7 is deformed, but more preferably, the slit (B) 45 has a length approximately equal to the length of the cell 3 in the longitudinal direction. B) Form 45.

The pump unit including the pump unit (A) 44 is a unit that can selectively form a fluid passage in the passage portion by displacement of the actuator portion, and is used only for the pump portion. Instead, it can also be used as a valve portion as described later. Further, the selective formation of the flow passage means any expansion / contraction or opening / closing operation of the flow passage in the pump portion or the valve portion.

Although not shown, in order to expand and contract the side wall, for example, an electrode film may be formed on both surfaces of the side wall 6 of the actuator 2 and a voltage may be applied to the electrode film. Then, the side wall 6 expands and contracts in the vertical direction according to the driving electric field generated by applying the voltage.

When the side wall 6 is made of a piezoelectric material, it is preferable that the polarization electric field and the driving electric field of the piezoelectric material have the same electric field direction. If the polarization electric field of the piezoelectric body and the driving electric field are in the same direction, it is not necessary to prepare a temporary polarization electrode and apply the electric field in the manufacturing process, and the throughput can be improved. Further, it is possible to apply a manufacturing process involving heating at a high temperature not lower than the Curie temperature regardless of the polarization treatment. Therefore, when fixing and connecting the micropump to, for example, a circuit board, soldering such as solder reflow or thermosetting bonding can be performed, and further, throughput can be improved and manufacturing cost can be reduced. . The polarization state does not change even if it is driven with a high electric field strength, rather, a more preferable polarization state can be obtained, and a high strain amount can be stably obtained. Therefore, it can be made more compact and is preferable as a micropump.

In the pump unit, the contour of the surface of the side wall 6 forming the cell 3 is preferably about 8 μm or less, and the unevenness of the wall surface of the side wall 6 forming the cell 3 is about 10 μm or less. And the surface roughness Rt of the wall surface of the side wall 6 forming the cell 3 is
It is preferably about 10 μm or less. If the pump unit meets at least one of these conditions, the side wall 6 forming the cell 3 has a smooth surface, so that electric field concentration or stress concentration is less likely to occur during driving, and stable operation is realized. You can

Incidentally, the contour degree of the surface is based on Japanese Industrial Standard B06.
21 "Definition and Display of Geometric Deviation". The surface contour is the surface specified to have a functionally defined shape, and the surface contour degree is the deviation of the surface contour from the geometrical contour defined by theoretically accurate dimensions. Says the size. The surface of the cell shown in the present invention refers to the inner wall surface of the cell of the driving unit that constitutes the cell.

Further, in the pump unit, the cell 3
The ratio of the inner width W (width in the widthwise direction) to the height H, in other words, the aspect ratio W: H of the cell 3 is approximately 1: 2 to 1:
Preferably, the inner width W of the cell 3 is about 6
It is preferably 0 μm or less (the inner width W and the height H are
1 (a)). More preferably, the aspect ratio W: H of the cell 3 is 1:10 to 1:25, and the inner width W of the cell 3 is
Is 50 μm or less. The reason why these aspect ratio values are preferable is that if the aspect ratio is too small, the electric field required to obtain sufficient pressing force becomes too high, and the risk of dielectric breakdown or the like increases, while the aspect ratio becomes large. This is because the strength is weakened, and the occurrence of defects during assembly and handling increases. If the pump unit satisfies at least one of the conditions, more preferably, a pump unit satisfying both of the two conditions, that is, a pump unit including a thin and tall cell 3, is used as a micropump. The output can be easily achieved, and a more compact micropump can be realized. The shape of the cell 3 is not limited, but it is preferable that the cell 3 has a substantially rectangular parallelepiped shape.

The above-described features or preferable aspects of the pump unit are common to the pump units constituting the micropump of the present invention, including the pump unit (A) 44. The same can be said not only for the micro pump 101 having the pump section configured by the pump unit (A) 44 described above but also for the micro pump having other pump units described later. Further, it is effective not only when the pump unit is used as the pump unit but also when it is used as the valve unit.

Next, an embodiment of a micro pump using a pump unit other than the pump unit (A) 44 will be described. FIG. 7A and FIG. 7B are cross-sectional views showing another embodiment of the micropump according to the present invention. FIG. 7A shows a stopped state (OFF), and FIG.
Indicates a drive state (ON). Micro pump 1
07 is composed of one pump unit 94 and is composed of a pump unit (B) 54. Pump unit (B) 54
Is composed of the actuator section 2 and the flow path section 52. The actuator section 2 has two side walls 6 made of a piezoelectric / electrostrictive body or an antiferroelectric body arranged on the communication plate 68.
The cell 3 is formed by covering the surface facing the communication plate 68 with the cover plate 7. A through hole 74 communicating with the outside of the cell 3 is provided in the cell 3 to facilitate the expansion and contraction of the side wall 6. Flow path 52
Is a displacement transmission part 26 for adhering at least a part to the cover plate 7 of the cell 3 of the actuator part 2, and a part of the surface of the displacement transmission part 26 on the opposite side of the actuator part 2 with the flow path 13 interposed therebetween. And a casing 14 that operates.

In the pump unit (B) 54 of the micropump 107, the side walls 6 forming the cells 3 are expanded and contracted in the vertical direction, so that the displacement transmission section 26 approaches / applies to a part of the surface of the casing 14 that faces. Separate. Through this approach and separation, the flow path 13 of the fluid 32 can be selectively formed.

The flow path 13 may be formed in advance from the introduction side to the discharge side. This is advantageous in terms of responsiveness.
Further, when the flow path 13 is potentially present and the displacement transmission section 26 comes closest to a part of the surface of the casing 14 facing the displacement transmission section 26, the displacement transmission section 26 and the casing 14 can be brought into contact with each other. . By doing so, the compression rate and the pressure reduction rate of the fluid 32 can be increased, and a more compact micropump can be obtained. In the pump unit (B) 54,
An introduction flow path 33 and a discharge flow path 34 are formed on the introduction side and the discharge side, respectively, where it is difficult for the displacement transmitting section 26 to approach and separate from a part of the surface of the casing 14 due to the displacement of the side wall 6 of the cell 3. In the portion between them, as shown in FIG. 7A, in the stopped state, the displacement transmitting portion 26 and the casing 14 are in contact with each other, and the flow path 13 is not formed. Figure 7
As shown in (b), at the time of driving, the flow path 13 is formed through the displacement transmitting portion 26 approaching and separating from a part of the surface of the casing 14.

Further, in the pump unit (B) 54, although not shown, a plurality of actuator units 2 can be assigned corresponding to the displacement transmission unit 26 of the flow path unit 52. By doing so, a large amount of fluid can be discharged while maintaining high rigidity and high-speed response. At this time, the plurality of actuator units 2 are adjacent to each other, but it is preferable that the ratio between the distance between the cells 3 and the adjacent cells 3 and the height of the cells 3 is approximately 1: 2 to 1:40. , The distance between the cell 3 and the adjacent cell 3 is about 50 μm
The following is preferable. If either condition is met,
More preferably, if both conditions are satisfied, the cells 3 can be formed with high density, and a more compact micropump can be obtained.

It is also preferable that the inner width of the cell 3 or the interval between the cell 3 and the adjacent cell 3 has at least two types of lengths. In this way, the flow path 1 of the fluid 32
In selectively forming 3, the displacement transmission section 26 and the cells 3 have a higher degree of freedom in arrangement, and are easy to design.

Further, in the pump unit (B) 54, like the micro pump 109 shown in FIG. 9, the same material as that of the displacement transmitting portion 26 of the flow path portion 52 is filled outside the cell 3 of the actuator portion 2. Therefore, it is preferable that the actuator section 2 and the flow path section 52 are integrally formed. When the side wall 6 of the cell 3 expands and contracts in the actuator section 2, the flow path section 52 becomes more difficult to peel off than in the case where the displacement transmitting section 26 is bonded only to the cover plate 7 of the cell 3. is there.

Next, an embodiment of a micro pump using still another pump unit will be described. FIG. 8 (a),
FIG. 8B is a sectional view showing another embodiment of the micropump according to the present invention. FIG. 8A shows a stopped state (O
FF), and FIG.8 (b) has shown the drive state (ON). The micro pump 108 has one pump unit 10.
4 and is composed of a pump unit (C) 64. The pump unit (C) 64 includes the actuator unit 2
And a flow path portion 62. The actuator section 2 has two side walls 6 made of a piezoelectric / electrostrictive body or an antiferroelectric body arranged on a communication plate 68, and a surface of the side wall 6 facing the communication plate 68 is covered with a cover plate 7 to form a cell. 3 is formed, and its cell 3
Further, the fluid introduction opening 35 and the fluid discharge opening 36 are open. The flow passage portion 62 includes an introduction flow passage 33 and a discharge flow passage 34.
The flow path 13 in which the fluid 32 flows is formed in advance. The introduction flow path 33 communicates with the fluid introduction opening 35 of the cell 3, and the discharge flow path 34 communicates with the fluid discharge opening 36 of the cell 3.

In the pump unit (C) 64 of the micropump 108, as shown in FIG. 8B, the side wall 6 forming the cell 3 is expanded and contracted in the vertical direction to change the volume of the cell 3 and thereby the cell 3 Creates pressure inside the cell 3
By itself becoming a part of the flow path 13, the flow path 13 through which the fluid 32 flows can be selectively formed.

The above-described exemplified micropumps differing in the method of selectively forming the flow path of the fluid are all pumps that cause the fluctuation of the pressure in the flow path part according to the displacement of the actuator part that causes the fluctuation of the pressure. . In these micropumps of the present invention, it is preferable to configure the pump unit as follows in order to allow the fluid to be sent from the introduction side to the discharge side by the action of the pressure generated in the flow path portion. That is, a pressure loss forming portion is formed on each of the introduction side and the discharge side of the flow path, and the pressure loss ΔP1 when flowing in the fluid introduction direction in the introduction side pressure loss formation portion and the fluid introduction direction Is the pressure loss ΔP2 when flowing in the opposite direction,
In the discharge-side pressure loss forming portion, the pressure loss ΔP3 when flowing in the direction of discharging the fluid and the pressure loss ΔP4 when flowing in the direction opposite to the direction of discharging the fluid are ΔP1 <Δ
Two expressions of P4 and ΔP2> ΔP3 are satisfied.

With this configuration, when a negative pressure is generated in the flow path portion according to the displacement of the actuator portion, the fluid enters from the introduction side because ΔP1 is smaller than ΔP4, and a positive pressure is generated in the flow passage portion according to the displacement of the actuator portion. At this time, since ΔP3 is smaller than ΔP2, the fluid flows out from the discharge side. In this way, the fluid can be sent from the introduction side to the discharge side. In order to satisfy the conditions of the above two expressions, for example, the introduction-side pressure loss forming portion is tapered so that the cross-sectional area continuously decreases in the direction of introducing the fluid, and the discharge-side pressure loss forming portion discharges the fluid. It may be formed in a taper shape that becomes smaller continuously in the direction of. Also, check valves may be provided in the pressure loss forming portions on the introduction side and the discharge side. Of course, it is still preferable to provide independent valves on the introduction side and the discharge side.

FIGS. 10 to 12 show that in the micropumps 101, 107 and 108 described above, pressure loss forming portions are formed on the introduction side and the discharge side of the flow path to satisfy the conditions of the above two expressions. It is an example. In the micropump 101 shown in FIG. 10, as the pressure loss forming portion 38,
Check valves 37 are provided on the introduction side and the discharge side of the flow path 13. FIG. 11 shows a horizontal cross section at the level of the surface of the flow channel 13 in the micropump 107 shown in FIGS. 7A and 7B. The micro pump 107 shown in FIG.
Then, the flow passage 13 as shown in the figure is formed between the introduction flow passage 33 and the discharge flow passage 34 by the separation of the displacement transmission portion with respect to the casing. That is, the introduction side of the flow path 13 is tapered so that the cross-sectional area continuously decreases in the direction in which the fluid 32 is introduced, and the discharge side of the flow path 13 is oriented in the direction in which the fluid 32 is discharged. The pressure loss forming portions 38 are formed so as to be continuously tapered. In the micropump 108 shown in FIG. 12, the fluid introduction opening 35 communicating with the cell 3 has a tapered shape in which the cross-sectional area continuously decreases in the direction in which the fluid 32 is introduced, and the fluid discharge opening communicating with the cell 3 is formed. The pressure loss forming portions 38 are formed by forming the tapered portions 36 that are continuously reduced in the direction in which the fluid 32 is discharged.

An embodiment using a plurality of pump units in the micropump of the present invention will be described below. First, there is a micropump including a plurality of pump units. The connection method of the pump unit can be any combination of series connection and parallel connection. By adopting such a form, the applied pressure of the fluid can be amplified to a greater extent and can be adapted to a larger flow rate. By having at least one set of series connection and the two pump sections adjacent to each other in series shifting the phases of the fluctuations of the pressures generated in the flow path section from each other, even if there is no valve section, It is possible to control the flow of fluid.

When a plurality of pump units are provided, different pump units such as the above-described pump unit (A), pump unit (B), and pump unit (C) are used as the pump units of the respective pump units. However, if multiple pump parts are configured with the same type of pump unit, in terms of manufacturing cost and pump characteristics,
More preferable.

Next, one to a plurality of pump parts are provided,
A micro pump in which one to a plurality of valve portions are mixed is included. The pump unit according to the present invention can be used not only as the pump portion but also as the valve portion by using the expansion and contraction displacement of the side wall of the cell in the actuator portion. For example, a pump unit (A) 44 used in the micropump 101 shown in FIGS. 1A and 1B, and FIG.
The pump unit (B) 54 used in the micropump 107 shown in (a) and FIG. 7 (b) can be used as it is as a valve portion. That is, in the pump unit (A) 44, when the system fluid 31 blocks the flow passage 13 at the time of driving shown in FIG. 1B, the flow passage is closed by a valve. Further, in the pump unit (B) 54, as shown in FIGS. 7 (a) and 7 (b), the flow path does not communicate in the stopped state, and the flow path 13 is formed during driving, It is also a pump and equal to a valve.

The valve section is preferably provided, for example, between a plurality of pump sections. By doing so, it becomes easy to control the flow of fluid even in the case of a micropump having a complicated system in which a plurality of pump units are connected in series or in parallel. Further, it is preferable to provide it as an inlet valve portion on the introduction side of the pump portion, and further preferably as an outlet valve portion on the discharge side of the pump portion. The inlet valve section and the outlet valve section can function as a valve that restricts the flow of fluid and also as a pressure loss forming section, and can control the flow of fluid.

Any pump unit can be adopted as the valve section between the pump sections, or the inlet valve section and the outlet valve section. For example, the pump unit (A) described above,
Different pump units such as the pump unit (B) and the pump unit (C) may be mixed, but if the valve units between the pump units, or the inlet valve unit and the outlet valve unit are configured by the same type of pump unit. In terms of manufacturing cost and valve characteristics, it is more preferable.

FIGS. 13A and 13B are cross-sectional views showing an embodiment including a plurality of pump units of the micropump according to the present invention. FIG. 13A shows a vertical cross section, and FIG. 13B shows a horizontal cross section at the cell 3 level in FIG. 13A. The micro pump 130 has one input valve section 83 and one pump section 84.
And one output valve portion 85. The pump section 84, the input valve section 83, and the output valve section 85 are
The flow path 13 and the casing 14 through which the fluid 32 flows, respectively.
The same pump unit (A) 44 having the actuator section 2 in which the cell 3 is formed on one surface of the flow path section 42 including the nozzle plate 9 and the nozzle plate 9.

That is, in the micropump 130, the side wall 6 serving as the drive portion is expanded and contracted and deformed in each of the input valve portion 83, the pump portion 84, and the output valve portion 85, and the volume in the cell 3 is changed to allow the system fluid 31 to flow. The volume that enters the passage 13 is changed to selectively form the passage 13 through which the fluid 32 flows, and the flow of the fluid 32 is controlled.

Since the side wall 6 of the cell 3 expands and contracts, it is not necessary to make it thin, and a desired strength can be given.
It is possible to make the drive unit excellent in responsiveness. Also, although the plurality of cells 3 are adjacent to each other, the cell 3 adjacent to the cell 3 is
The ratio of the distance between the cell and the height of the cell 3 is approximately 1: 2 to 1:
The distance between the cell 3 and the adjacent cell 3 is preferably about 50 μm or less. If either condition is satisfied, or more preferably, both conditions are satisfied, the cells 3 can be formed at high density, and the input valve portion 83,
This is because even if the pump unit 84 and the output valve unit 85 are provided, a more compact micro pump can be obtained.

The micropump 130 includes the input valve unit 8
3, in all of the pump portion 84 and the output valve portion 85, the actuator portion 2 is configured as a laminated body of the communication plate 68 which is the lowermost layer, the spacer plate 70 which is the intermediate layer, and the lid plate 7 which is the uppermost layer. ing. The spacer plate 70 has a lid plate 7
Slits (A) 5 are formed by closing them with the slits (A) 5 to form cells 3, and slits (B) 45 are formed between the adjacent slits (A) 5 and the slits (A) 5 to separate the cells 3 from each other. There is. As described above, the micropump 130 has slits (A) 5 and slits (B) 45 at positions corresponding to the pump unit 84, the input valve unit 83, and the output valve unit 85.
It can be understood as a three-layer integrated structure in which and are formed.

The actuator unit 2 may be an integrally co-fired body, one in which each layer is joined and integrated by glass or resin, or may be attached later. Further, the structure is not limited to a three-layer structure, and a structure having four or more layers may be used.

Although not shown, the micropump 130 operates as follows, for example. First, in the natural state, the input valve portion 83, the pump portion 84, and the output valve portion 85 are ON, that is, the voltage is applied to the electrodes formed on, for example, the side walls of the respective actuator portions 2, System fluid 31 closes the flow path 13. From this state, for example, when the input valve section 83 is turned off, the side wall of the actuator section 2 of the input valve section 83 expands, the system fluid 31 is withdrawn into the cell 3, and the flow path 13 is opened.

After that, by turning off the pump portion 84, the side wall of the actuator portion 2 of the pump portion 84 expands and the system fluid 31 retracts into the cell 3, and the flow path 13
Is opened further. Next, the output valve unit 85 is also turned off to further open the flow path 13.

Then, by turning on the pump portion 84 and the input valve portion 83, the system fluid 31 closes the flow path 13 at the portions corresponding to the pump portion 84 and the input valve portion 83, and the applied pressure at this time The fluid 32 is sent to the discharge side.
That is, the actuator portion 2 included in the input valve portion 83, the pump portion 84, and the output valve portion 85 has the flow passage 1 in the portion corresponding to the input valve portion 83, the pump portion 84, and the output valve portion 85.
3 functions as a means for selectively forming 3.

In a preferred mode, the input valve portion 83 and the output valve portion 85 have a large rigidity while ensuring a displacement amount that allows the system fluid 31 to enter the flow passage 13 to the extent that the flow passage is completely closed. To obtain. This makes it possible to eliminate fluid leakage. The pump portion 84 preferably has a configuration in which the displacement amount is increased so that the volume change of the cell 3 can be increased while maintaining a certain degree of rigidity. This makes it possible to increase the pressing force. This can be set by the inner width of the cell 3, the thickness of the side wall 6, and the area of at least a pair of electrodes formed on the side wall 6.

FIGS. 14A and 14B are sectional views showing another embodiment including a plurality of pump units of the micro pump according to the present invention. FIG. 14A shows a vertical cross section, and FIG. 14B shows a horizontal cross section at the level of the flow path 13 in FIG. 14A. The micropump 140 has one pump portion 94, one input valve portion 93, and one output valve portion 95. The pump portion 94, the input valve portion 93, and the output valve portion 95 are respectively a displacement transmitting portion 26 that adheres at least a part to the cover plate 7 of the cell 3 of the actuator portion 2, and a displacement transmitting portion 26.
Of the casing 1 facing a part of the surface opposite to the actuator part 2 with a potentially existing flow path 13 in between.
From a pump unit (B) 54 having a flow path portion 52 composed of 4 and an actuator section 2 having a cell 3 which is provided with a through hole 74 in a communication plate 68 on the side opposite to the flow path portion 52 and is easily deformed. It is configured.

That is, in the micropump 140, the side wall 6 of the cell 3 expands and contracts in the vertical direction in each of the input valve section 93, the pump section 94, and the output valve section 95.
Through the selective displacement movement in the approaching / separating direction performed by the displacement transmitting unit 26 with respect to a part of the surface of the casing 14, the flow path 13 is selectively formed on one surface of the casing 14 to allow the flow of the fluid 32. Is configured to control.

On the inlet side of the input valve portion 93, the introduction flow passage 33
Is provided in communication with the outside of the casing 14 through a hole, and the fluid 3
2 is supplied. The discharge flow path 3 is provided on the outlet side of the output valve unit 95.
4 is provided in communication with the outside of the casing 14 through a hole, and the fluid 32 is sent to the other. Of course, the hole for supplying and feeding the fluid 32 does not penetrate the casing 14, and the introduction flow passage 33 and the discharge flow passage 34 may be formed along the casing 14 (in the lateral direction in the drawing). Absent. 14
As shown in (a), these introduction flow path 33 and discharge flow path 3
4, an input valve portion 93, a pump portion 94, and an output valve portion 95 are arranged laterally. The casing 14
The inlet passage 33 communicating with the outside of the casing through the hole is provided inside the input valve portion 93 (immediately above the cell 3) rather than the inlet side of the input valve portion 93, and the discharge passage 34 communicating with the outside of the casing 14 through the hole is provided as the output valve. It may be provided not in the outlet side of the portion 95 but in the output valve portion 95 (immediately above the cell 3). This makes it possible to further reduce the size of the micropump.

In FIG. 14B, of the displacement transmitting section 26 between the actuator section 2 and the casing 14, the portions surrounded by broken lines are movable as the input valve section 93, the pump section 94, and the output valve section 95. That is, the portion that participates in the transmission of the displacement of the actuator portion 2 and forms the flow path 13a when the displacement transmission portion 26 separates from the casing 14. As shown in FIGS. 14A and 14B, it is difficult to transmit the displacement of the actuator unit 2 between the input valve unit 93 and the pump unit 94, and between the pump unit 94 and the output valve unit 95. Has a channel 13b that is recessed in advance. The recessed flow passage 13b passes through the flow passage 13a and, when performing the operation of transferring the fluid 32, mutual interference between the input valve portion 93 and the pump portion 94 and between the pump portion 94 and the output valve portion 95. Exerts the effect of relaxing. In order to completely block mutual interference between the input valve section 93 and the pump section 94 and between the pump section 94 and the output valve section 95, the displacement transmitting section 26 is provided with a slit, and the displacement transmitting section 26 is connected to the input valve section. 9
3, the pump section 94 and the output valve section 95 may be divided into parts. The input valve unit 93, the pump unit 94, and the output valve unit 95 can be operated independently,
preferable.

The displacement transmission section 26 is not formed by the displacement of the actuator section 2 without forming the recessed flow path 13 b.
The flow path 13a may be formed only when the flow path 13a is separated from the flow path 4. That is, the entire flow path 13 may potentially exist. In this case, since the flow path space is eliminated when unnecessary, the compression rate and the pressure reduction rate of the fluid 32 can be increased, which is preferable.

On the contrary, the recessed flow path 13b may be formed to connect from the introduction side to the discharge side. That is, the entire flow path 13 may be explicitly made to exist in advance. In this case, the compression rate and the pressure reduction rate of the fluid 32 are reduced, but it is advantageous in terms of responsiveness. In particular, when a liquid is used as the fluid, the volume change of the flow path 13 is important, so that forming the flow path 13b connecting from the introduction side to the discharge side in advance causes no problem. In any case, the flow path 13 in the stopped state is formed on one surface of the casing 14 through the selective displacement operation in the approaching / separating direction performed by the displacement transmitting unit 26 on a part of the surface of the casing 14. Different new flow paths are selectively formed,
The flow of fluid 32 may be controlled.

Similar to the micropump 130 using the pump unit (A), in the micropump 140 using the pump unit (B), the side wall 6 of the cell 3 expands and contracts, so it is not necessary to make it thin. It is possible to provide a drive unit that can provide desired strength and is excellent in responsiveness. Further, although the plurality of cells 3 are adjacent to each other, it is preferable that the ratio between the distance between the cells 3 and the adjacent cells 3 and the height of the cells 3 is approximately 1: 2 to 1:40. It is preferable that the distance between the cell 3 and the adjacent cell 3 is approximately 50 μm or less. If either condition is satisfied, or more preferably, both conditions are satisfied, the cells 3 can be formed with high density, and the input valve portion 93, the pump portion 94, and the output valve portion 9 can be formed.
This is because even if the micro pump is equipped with 5, the micro pump becomes more compact.

The micropump 140 has the input valve unit 9
3, in all of the pump portion 94 and the output valve portion 95, the actuator portion 2 is configured as a laminated body of the communication plate 68 which is the lowermost layer, the spacer plate 70 which is the intermediate layer, and the lid plate 7 which is the uppermost layer. ing. The spacer plate 70 has a lid plate 7
Slits (A) 5 are formed by closing them with the slits (A) 5 to form cells 3, and slits (B) 45 are formed between the adjacent slits (A) 5 and the slits (A) 5 to separate the cells 3 from each other. There is. As described above, in the micro pump 140, the actuator unit 2 includes the pump unit 94 and the input valve unit 9
It can also be understood as a three-layer integrated structure in which the slits (A) 5 and the slits (B) 45 are formed at the positions corresponding to 3 and the output valve portion 95.

It should be noted that each slit (B) 45 is preferably filled with the same material as the displacement transmitting portion 26 of the flow path portion 52. The flow path section 52 and the actuator section 2 are integrated,
This is because peeling is less likely to occur. Further, the actuator unit 2 may be an integrally co-firing body, one in which each layer is joined and integrated by glass or resin, or may be attached later. The actuator unit 2 is not limited to a three-layer structure and has four or more layers. It may be a structure.

The micropump 130 is shown in FIG.
As shown in FIG. 16D, for example, the operation is as follows. First, in the natural state, the input valve portion 93, the pump portion 94, and the output valve portion 95 are OFF, and the end surface of the displacement transmission portion 26 is in contact with one surface of the casing 14. From this state, for example, by applying a voltage to an electrode formed on, for example, a side wall of the input valve section 93 and turning it on, the side wall 6 of the cell 3 of the actuator section 2 of the input valve section 93 expands and contracts, and the input valve section. Displacement transmission unit 2 corresponding to 93
By separating the end surface of 6 from one surface of the casing 14, a flow path communicating with the introduction flow path 33 is formed in a portion corresponding to the input valve portion 93, and the fluid 32 is introduced.

After that, as shown in FIG. 16A, by turning on the pump portion 94, the side wall 6 of the cell 3 of the actuator portion 2 of the pump portion 94 expands and contracts, and the displacement corresponding to the pump portion 94. By separating the end surface of the transmission portion 26 from one surface of the casing 14, the flow path 13 is further formed in the portion corresponding to the pump portion 94, and the fluid 32 flows in. Subsequently, as shown in FIG. 16B, the input valve portion 93 is turned off, so that the end surface of the displacement transmitting portion 26 corresponding to the input valve portion 93 comes into contact with one surface of the casing 14 again. The flow path 13 is closed. As a result, the fluid 32 is sealed and filled in the flow passage 13 in the portion corresponding to the pump portion 94.

Further, as shown in FIG. 16C, by turning on the output valve portion 95, the end surface of the displacement transmitting portion 26 corresponding to the output valve portion 95 is separated from one surface of the casing 14. Then, the flow path 13 is further formed, and the fluid 32 flows in. Then, as shown in FIG. 16D, by turning off the pump portion 94, the end surface of the displacement transmitting portion 26 corresponding to the pump portion 94 comes into contact with one surface of the casing 14 again, and the pump portion The flow path 13 corresponding to 94 is closed. As a result, the fluid 32 is pushed out to the flow passage 13 in the portion corresponding to the output valve portion 95. And further,
By turning off the output valve unit 95, the output valve unit 95
When the end surface of the displacement transmitting portion 26 corresponding to the contact with one surface of the casing 14, the fluid 3 in the output valve portion 95
2 is discharged to the outside of the casing 14 through the discharge flow path 34.

As described above, in the pump portion 94, the input valve portion 93, and the output valve portion 95, for example, applying a voltage to the electrodes formed on the side wall 6 of the cell 3 or stopping the application of the voltage. Accordingly, the displacement transmitting section 26 corresponding to the pump section 94, the input valve section 93, and the output valve section 95 is provided.
It is possible for the end face of the above-mentioned device to function as a means for selectively forming the flow path 13 by separating and contacting one surface of the casing 14. The micropump 140 of the present invention is further miniaturized and thinned, and it is possible to easily and selectively form the flow path by an electric operation, and it is easy to reduce the pressure on the introduction side and pressurize the discharge side. Since it can be performed, it can be easily applied to various techniques such as medical treatment and chemical analysis.

In a preferred mode, the input valve portion 93 and the output valve portion 95 are configured to obtain a large rigidity while securing a displacement amount sufficient to secure the flow path 13. This makes it possible to eliminate the leakage of the fluid 32. On the other hand, it is preferable that the pump portion 94 maintain a certain degree of rigidity and increase the displacement amount by allowing a large volume change of the cell 3 of the actuator portion 2. This is the inner width of the cell 3, the thickness of the side wall 6, the side wall 6
It can be set by the area of at least a pair of electrodes formed on the substrate.

In the micropump 140, since the side wall 6 of the cell 3 of the actuator section 2 which is the drive section expands and contracts, it is not necessary to make the wall thin, the rigidity is increased, and high-speed displacement operation can be achieved. This leads to an increase in the operating frequency of displacement, and an increase in the discharge amount (movement amount) of the fluid is achieved. That is, it is possible to reduce the size and weight of the micropump, and at the same time, to increase the discharge amount (movement amount) of the fluid. or,
The micropump 140 can also be applied as a pressurizing pump or a depressurizing pump, and can increase the ultimate pressure and speed up the ultimate pressure. Furthermore, even if the atmosphere outside the system is under reduced pressure, the input valve section 93 and the pump section 9
4 and the output valve unit 95 can be operated sufficiently.

In the micropump 140, since the displacement of the actuator section 2 is transmitted via the displacement transmission section 26, the input valve section 93 and the output valve section 9 are particularly preferable.
In 5, the sealing property (adhesion) can be improved. Further, in the natural state (initial state), the displacement transmission section 2
When the end surface of 6 is brought into contact with one surface of the casing 14, the flow path 13 is potentially formed, and further miniaturization can be achieved.

FIGS. 15A and 15B are cross-sectional views showing still another embodiment including a plurality of pump units of the micro pump according to the present invention. FIG. 15 (a)
Shows a vertical section, and FIG. 15B shows a horizontal section at the level of the cell 3 of the pump unit 104 in FIG. 15A. The micro pump 150 has one pump unit 1.
04, one input valve section 103, and one output valve section 10
5 and 5. The micropump 150 is shown in FIG.
8 (a) and 8 (b) is a pump in which an input valve portion is provided in the fluid introduction opening 35 and an output valve portion is provided in the fluid discharge opening 36 of the micropump 108. Actuator part 2a
The pump unit (C) 64 is composed of the pump unit (C) 64 and the actuator unit 2 b is formed in the flow unit 62 of the pump unit (C) 64. The actuator portion 2a has two side walls 6 made of a piezoelectric / electrostrictive body or an antiferroelectric body arranged on a communication plate 68, and a surface of the side wall 6 facing the communication plate 68 is covered with a cover plate 7 to form a cell. 3 is formed, and the fluid introduction opening 35 and the fluid discharge opening 36 are opened in the cell 3. The flow passage portion 62 includes the introduction flow passage 3
A flow path 13 in which the fluid 32 flows, which is composed of 3 and a discharge flow path
Are formed in advance. The introduction flow path 33 communicates with the fluid introduction opening 35 of the cell 3, and the discharge flow path 34 communicates with the fluid discharge opening 36 of the cell 3. As can be understood from FIG. 15 (b), FIG. 15 (a) is different from FIG. 8 (a) in that it shows a vertical cross section parallel to the slit (B) 45. Slit (B) 4 of pump unit 104
5 is not displayed.

In the input valve portion 103, the conical displacement transmission portion 126 formed on the upper portion of the cover plate 7 closes the fluid introduction opening 35 by the vertical displacement operation of the side wall 6 of the cell 3 in the actuator portion 2. ,Open. Further, in the output valve section 105, the displacement movement of the side wall 6 of the cell 3 in the actuator section 2 in the vertical direction causes the conical displacement transmission section 126 formed on the upper portion of the cover plate 7 to close the fluid discharge opening section 36. Open.

As a result, the fluid 32 introduced through the introduction flow path 33 passes through the input valve section 103 and the pump section 10
4 into cell 3. Then, in the pump portion 104, the volume inside the cell 3 changes due to the vertical displacement operation of the side wall 6 of the cell 3 in the actuator portion 2,
The fluid 32 in the cell 3 is discharged through the output valve portion 105 and the fluid discharge opening portion 36.

This micropump 150 can promote miniaturization and thinning similarly to the above-described micropump 130 and micropump 140, and can be applied to various technologies such as medical treatment and chemical analysis. Is.

The micropump 1 described above
30, micro pump 140, micro pump 150
Is a series connection of one valve unit-pump unit-valve unit, but the micropump of the present invention is not limited to these. One or a plurality of pump parts and one or a plurality of valve parts are connected in series or in parallel, or 2
It may be a complex system in which one to three or more branch connections, two to three or more merge connections, and the like are performed. Further, the positional relationship between the pump part and the valve part is not limited. Furthermore, the pump units that form the pump unit and the valve unit are not limited to the same type.

Next, a method for manufacturing a micropump according to the present invention will be described by taking the micropump 130 including three pump units (A) as an example. First, the actuator section 2 is produced, and then integrated with the flow path section 42 to obtain the micropump 130. Hereinafter, an example of a schematic manufacturing process of the actuator unit 2 will be described with reference to FIGS. 3 (a) to 3 (c). This is a manufacturing method using a punch and a die. In FIG. 3A, the green sheet 16 made of a piezoelectric / electrostrictive material or an antiferroelectric material is used.
A slit hole 25 which is laminated to form the slit (A) 5.
And a slit hole 1 that is laminated to form a slit (B) 45
5 is opened, and the green sheets 16 are laminated at the same time by stacking by a punching simultaneous laminating method described later.
This is a manufacturing method including a step of forming a piezoelectric / electrostrictive body or an antiferroelectric body having a predetermined thickness by completing stacking as well as punching. After that, for example, in FIG. 3B, the spacer plate 70 is obtained by firing and integrating to obtain the desired slits (A) 5 and the slits (B) 45, and inside the slits (A) 5 to be cells later. Form the electrodes on the
In (c), the lid plate 7 and the communication plate 68 are joined. The green sheet 16 can be formed by a known tape forming means such as a doctor blade method. The electrode can be formed by various thick film forming methods such as screen printing, spraying, coating, dipping, coating, and electrophoresis although it depends on the size of the slit (A) to be a cell later. You can choose. The screen printing method is particularly preferable because it can be formed at low cost.

As shown in FIGS. 4A to 4C, the lid plate 7 and the communication plate 68 are also formed of a green sheet of the same material, laminated with the spacer plate 70, and integrated by firing. Good. Since the lid plate 7 and the spacer plate 70 including the drive unit are co-fired to form an integrated ceramic body, durability and cell rigidity are improved, and a micropump excellent in high-speed response can be obtained. In this case, the electrodes are formed by applying the electrode paste onto a soft green sheet, but care must be taken not to damage or deform the green sheet. It is also possible to circulate and apply an electrode paste to form an electrode after firing to complete the cell structure, but in that case, masking work is difficult and the electrode pattern that can be formed is limited. To be done.

After the manufacturing process described above, the slit (A) 5 is closed inside by the cover plate 7 and the communication plate 68 to obtain the actuator section 2 in which cells are formed, and then, although not shown,
An electrode is formed on the side wall surface of the cell 3 in the actuator portion 2 and a wiring for driving is installed. Then, the flow path portion 42 provided with the flow path 13 is joined to a predetermined position (see FIG. 1).
3 (a)). Then, the system fluid 31 is passed through the cell 3.
Replace with. As the system fluid 31, for example, an inert gas such as nitrogen or argon, or silicone oil can be used. In the micropump thus manufactured, the side wall 6 of the cell 3 is expanded or contracted by a predetermined signal to reduce or restore the volume in the cell 3 and is insoluble in the system fluid flowing in the flow path 13. Fluid 3
2 by changing the volume of the system fluid 31 entering
It is possible to selectively form a fluid flow path.

FIGS. 6A to 6E show a concrete method of the above-mentioned simultaneous punching and laminating, and the green sheet 16 is shown.
A die including a punch 10 and a die 12 in which a stripper 11 for performing a stacking operation (hereinafter, also simply referred to as a sheet) is arranged is used. FIG. 6A shows a state in which the first sheet 16a is placed on the die 12 before punching, and FIG.
Then, the punch 10 and the stripper 11 are lowered to punch the sheet 16 to form slits (first step).

Next, preparation for punching out the second sheet 16b is started. At this time, as shown in FIG. 6C, the first sheet 16a is brought into close contact with the stripper 11 and moved upward to move the die 12 Away from (second step). The method of bringing the sheet 16 into close contact with the stripper 11 can be carried out, for example, by forming suction holes in the stripper 11 and performing vacuum suction.

In order to prepare for punching the second sheet 16b, the punch 10 and the stripper 11 are pulled up from the die 12. During this pulling up, the tip of the punch 10 is first pulled up together. Sheet 1
It is desirable not to return it into the slit hole of 6a,
Also, when stopping, the first seat 16 pulled up together
It is important to stop when it is pulled in slightly from the bottom of a (third step). When the punch 10 is returned to the first hole of the sheet 16a or is completely stored in the stripper 11, the hole formed is deformed because the sheet 16 is soft, and the sheet 16 is obtained by stacking. When the slit is formed, the flatness of the side surface is deteriorated.

FIG. 6D shows a punching process of the second sheet 16 b, and by sticking the first sheet 16 a to the stripper 11, the second sheet 16 b can be easily placed on the die 12. It can be placed and punched out as in the step of FIG. 6B, and at the same time superposed on the first sheet 16a (fourth step).

Then, by repeating the steps of FIG. 6C and FIG. 6D, the first punched sheet 16a and the second punched sheet 16b are overlapped and pulled up by the stripper 11 (fifth step). Step) Preparation for punching out the third sheet 16c is started. However, also at this time, it is important to stop the sheet 16 when it is pulled in a little from the lowermost part of the sheet 16 (sixth step). After that, the steps from the fourth step to the sixth step are repeated to obtain the required number of sheets 1
Repeat punching and laminating of 6.

FIG. 6E shows a state in which punching has been completed. After punching and stacking the required number of sheets 16, the stripper 11 releases the holding of the sheets 16, and the punched and stacked sheets 16 can be separated from the stripper 11 and taken out. The separation from the stripper 11 can be reliably performed by providing a separation jig 17 on the lower surface of the stripper 11 as illustrated. The operation described above is performed in Japanese Patent Application No. 2000-280.
573 and the manufacturing method described in Japanese Patent Application No. 2001-131490 are applied, and a laminate having a predetermined thickness and a desired slit can be obtained by this operation.

As described above, when the slit holes are formed in the green sheet by using the punch and the die, the green sheets are stacked at the same time, and the punch itself is used as the stacking alignment axis of the green sheet to perform the punching process. Deformation of the slit holes punched by the punch is prevented, deformation of the slit holes does not occur, the amount of misalignment between green sheet stacks is suppressed to less than 5 μm, green sheets can be stacked with high accuracy, and slits with less unevenness It is possible to form a wall surface. Therefore, even if the slit width is about several tens of μm, a slit having a high aspect ratio of about 10 to 25 and forming a cell later and a slit between cells can be easily formed, which is excellent. It is possible to obtain a micropump having a characteristic actuator portion.

Further, since firing is performed after slit processing,
At the time of punching the sheet, the slit width is almost the same as the punching width of the die, but it shrinks during firing, so the width is 40 μm due to the combination of the thin-working slit and firing shrinkage.
It is possible to form fine slits of m or less,
Depending on the design of the punching die, such as changing the shape of the die,
Even if the slit is not straight, it can be easily formed, and an optimum shape can be realized according to the application.

FIG. 5A is a schematic diagram of FIGS. 6A to 6E.
In the case of obtaining the spacer plate 70 by the punching simultaneous laminating method shown in FIG. 5, an end view of the spacer plate 70 after firing shown in FIG. 3B viewed from P is shown, and FIG.
It shows a schematic cross-sectional view in which the M portion of the wall surface of the slit (A) 5 shown in (a) is enlarged.

According to the above-described method for manufacturing a micropump, the slit (A) is formed before firing, so that the side wall surface of the slit (A) that can later become a cell is formed by the fired surface. Therefore, no microcracks or intragranular destruction occur,
The state of crystal grains on the surface of the side wall forming the cell is substantially equal to 1% or less of the crystal grains that have undergone intragranular fracture, and the actuator part does not suffer from characteristic deterioration due to compressive residual stress, and is durable and reliable. It is possible to improve the sex.

As an example of the overlay accuracy of the green sheets according to the above manufacturing method, a green sheet having a thickness of 50 μm and a Young's modulus of 39 N / mm ² is formed with a slit (A) width of 50 μm and a slit (B) width. When punching out to 30 μm and laminating 10 sheets, the amount of misalignment between the layers after firing is 4 μm at maximum, and the surface roughness Rt is about 7
μm. The width of the slit (A) after firing was about 40 μm due to firing shrinkage.

A micro pump using the pump unit (B) and the pump unit (C) can also be manufactured according to the micro pump 130. For example,
Micro pump 14 provided with three pump units (B)
Also in 0, the actuator unit 2 is first manufactured by the method shown in FIGS. 3A to 3C and FIGS. 6A to 6E described above. Then, after applying the adhesive resin with screen printing or dispenser,
By bonding and integrating the separately manufactured silicon resin flow path portion 52, and by connecting the necessary wiring (not shown),
Obtain the micropump 140.

Similarly, for the micro pump 150 including three pump units (C), first,
The actuator portions 2a and 2b are manufactured respectively. afterwards,
The displacement transmitting section 126 is adhered to the actuator section 2b, and the nozzle plate 9 having the fluid introduction opening 35 and the fluid discharge opening 36 is adhered thereon to form the flow path 13 and connect necessary wiring not shown. Then, the micro pump 150
To get

Materials used for the micropump of the present invention will be described below. First, the material of the piezoelectric / electrostrictive body or the antiferroelectric body used for the side wall of the cell of the actuator section which is the drive section will be described. Examples of the material used as the piezoelectric / electrostrictive body include lead zirconate,
Lead magnesium niobate, nickel nickel niobate, lead zinc niobate, lead manganese niobate, lead antimony stannate,
Ceramics containing one or more of lead titanate, barium titanate, lead magnesium tungstate, or lead cobalt niobate can be given. These ceramics are preferably the main components which account for 50% by weight or more in the ceramic components constituting the piezoelectric / electrostrictive body, and particularly, the main components are the ceramics containing lead zirconate.

Further, these ceramics containing one or more kinds of oxides such as lanthanum, calcium, strontium, molybdenum, tungsten, barium, niobium, zinc, nickel and manganese may be used. Among them, ceramics containing a lead magnesium niobate, lead zirconate, and lead titanate as a main component and containing at least one of lanthanum and strontium are preferable.

As the material of the antiferroelectric material, ceramics containing lead zirconate as a main component, ceramics containing lead zirconate and lead stannate as a main component, and lanthanum oxide containing lead zirconate as a main component are used. Preferred is added ceramics, or ceramics containing lead zirconate and lead stannate as main components and added with lead zirconate or lead niobate. Other materials of the piezoelectric / electrostrictive body include barium titanate, a ferroelectric ceramic containing barium titanate as a main component, and a polymer piezoelectric body represented by polyvinylidene fluoride (PVDF). , Or
Examples thereof include Bi-based ceramic piezoelectric bodies represented by (Bi _0.5 Na _0.5 ) TiO ₃ and Bi layered ceramics. Of course, it goes without saying that a mixture or solid solution of the above materials having improved piezoelectric / electrostrictive characteristics, or a material obtained by adding an additive to the above materials or the mixture of the above materials can be used. When the side wall of the cell is made of ceramics,
The average grain size of the crystal grains is preferably 0.05 to 2 μm in the design that attaches importance to the mechanical strength of the side wall that is the drive unit. This is because the mechanical strength of the side wall, which is the drive unit, is enhanced. In a design that emphasizes the expansion and contraction characteristics of the side wall that is the drive unit, the average grain size of the crystal grains is preferably 1 to 7 μm. This is because high piezoelectric / electrostrictive characteristics can be obtained.

The cell communication plate and the cover plate of the actuator section preferably have a coefficient of thermal expansion close to that of the material of the side wall. Particularly, it is preferably made of ceramics and integrated with the side wall by laminated firing. The same ceramic may be used, or different ceramics may be used. As the ceramics forming the communication plate and the cover plate of the cell, for example, stabilized zirconium oxide, aluminum oxide, magnesium oxide, titanium oxide, spinel, mullite, aluminum nitride, silicon nitride, glass, a mixture thereof, or the like is used. You can

The material of the electrode formed on the side wall is not particularly limited as long as it is a conductor that can withstand a high temperature oxidizing atmosphere, and it may be, for example, a simple metal or an alloy, and an insulating material. It does not matter even if it is a mixture of the basic ceramics and a simple metal or an alloy thereof. More preferably, platinum, palladium, high melting point noble metals such as rhodium, or silver-palladium, silver-platinum,
An electrode material containing an alloy such as platinum-palladium as a main component, or a cermet material of platinum and a base material or a piezoelectric / electrostrictive material is preferably used.

The displacement transmitting portion used in the pump unit (B) preferably has a hardness sufficient to directly transmit the expansion and contraction displacement of the side wall of the cell in the actuator portion. For example, rubber, organic resin, organic adhesive film, glass and the like are preferable, but the above-mentioned ceramics may be used. Most preferably, an epoxy-based, acrylic-based, silicone-based, or polyolefin-based organic resin, a mixture thereof, or an organic adhesive film is preferable. Further, it is also effective to add a filler to these to suppress curing shrinkage. When these are used, the material itself of the displacement transmitting portion can also serve as an adhesive when the displacement transmitting portion is adhered to the cell cover plate. Micro pump 1 listed as an example using the pump unit (C)
The same applies to the displacement transmission section that constitutes the input valve section and the output valve section of 50.

Examples of the constituent material of the casing include glass, quartz, plastics such as acrylic, ceramics and the like, or metal and the like. The casing is preferably one that is unlikely to be corroded by the fluid with which it comes into contact. When it comes into contact with the displacement transmitting part, it is preferable that the displacement transmitting part has a hardness that does not cause deformation.

[0106]

As described above, according to the micropump of the present invention, the micropump is small and thin, and the discharge amount (movement amount) of the fluid is increased and the response speed is increased. Can be done.

[Brief description of drawings]

1 is a cross-sectional view showing an embodiment of a micropump according to the present invention, FIG. 1 (a) shows a stopped state, and FIG.
(B) shows a driving state.

FIG. 2 is a sectional view showing an embodiment of a conventional pump.

FIG. 3 is a schematic process explanatory view showing an example of a method for manufacturing a micropump according to the present invention.

FIG. 4 is a schematic process explanatory view showing another example of the method for manufacturing a micropump according to the present invention.

5A and 5B show a method for manufacturing a micropump including simultaneous punching and laminating according to the present invention, wherein FIG.
FIG. 5B is a view end view, and FIG. 5B is an enlarged schematic cross-sectional view of the M portion in FIG.

6A and 6B are process explanatory views showing an example of a method of performing simultaneous punching and laminating in the slit hole punching and laminating of the green sheet shown in FIG. 3A, and FIG. FIG. 6 shows the first sheet preparation process with the sheet placed.
FIG. 6B shows the first green sheet punching step, and FIG. 6C shows the second green sheet 2
FIG. 6 (d) shows a second green sheet punching step, and FIG. 6 (e) shows punching and stacking of all the sheets to release the stacked green sheets with a stripper. It is a figure which shows a punching completion process.

7A and 7B are cross-sectional views showing another embodiment of the micropump according to the present invention, FIG. 7A shows a stopped state, and FIG. 7B shows a driven state.

8A and 8B are cross-sectional views showing still another embodiment of the micropump according to the present invention, FIG. 8A shows a stopped state, and FIG. 8B shows a driven state.

FIG. 9 is a sectional view showing another embodiment of the micropump according to the present invention.

FIG. 10 is a cross-sectional view showing an embodiment of a micropump according to the present invention.

FIG. 11 is a cross-sectional view showing another embodiment of the micropump according to the present invention.

FIG. 12 is a sectional view showing still another embodiment of the micropump according to the present invention.

FIG. 13 is a cross-sectional view showing an embodiment of the micropump according to the present invention, FIG. 13 (a) shows a vertical cross section,
FIG. 13B shows a horizontal section.

14A and 14B are cross-sectional views showing another embodiment of the micropump according to the present invention, wherein FIG. 14A shows a vertical cross section and FIG. 14B shows a horizontal cross section.

15A and 15B are cross-sectional views showing still another embodiment of the micropump according to the present invention, FIG. 15A shows a vertical cross section, and FIG. 15B shows a horizontal cross section.

FIG. 16 is an explanatory diagram showing the operation of the micropump according to the present invention.

[Explanation of symbols]

2 ... Actuator part, 3 ... Cell, 5 ... Slit (A), 6 ... Side wall, 7 ... Lid plate, 8 ... Nozzle, 9 ... Nozzle plate, 10 ... Punch, 11 ... Stripper, 12 ... Die, 1
3, 13a, 13b ... Flow path, 14 ... Casing, 15 ...
Slit holes, 16, 16a to 16c ... Green sheet,
17 ... Separation jig, 25 ... Slit hole, 26 ... Displacement transmitting part, 31 ... System fluid, 32 ... Fluid, 33 ... Introducing channel, 34 ... Discharging channel, 35 ... Fluid introducing opening, 36 ... Fluid discharging Opening part, 37 ... Check valve, 38 ... Pressure loss forming part,
42 ... Flow path part, 44 ... Pump unit (A), 45 ... Slit (B), 52 ... Flow path part, 54 ... Pump unit (B), 62 ... Flow path part, 64 ... Pump unit (C),
68 ... Communication plate, 70 ... Spacer plate, 72 ... Communication opening,
73 ... Communication hole, 74 ... Through hole, 83 ... Input valve part, 84 ...
Pump part, 85 ... Output valve part, 93 ... Input valve part, 94 ... Pump part, 95 ... Output valve part, 101 ... Micro pump, 1
03 ... Input valve section, 104 ... Pump section, 105 ... Output valve section, 107 ... Micro pump, 109 ... Micro pump, 110 ... Pump, 112 ... Pump body, 114 ... Casing, 116 ... Pump section, 118 ... Input valve section , 12
0 ... Output valve section, 126 ... Displacement transmission section, 130 ... Micro pump, 140 ... Micro pump, 142 ... Vibration section, 1
50 ... Micro pump.

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 41/09 H01L 41/08 U (72) Inventor Hiroyuki Tsuji 2-56 Suda-cho, Mizuho-ku, Nagoya-shi, Aichi Nihon Insulator Co., Ltd. (72) Inventor Kazumasa Kitamura 2-56, Sudacho, Mizuho-ku, Nagoya, Aichi Prefecture F-term in Nihon Insulator Co., Ltd. (reference) 3H075 AA09 BB01 BB16 BB30 CC10 CC32 CC34 DB02 EE14 3H077 AA08 BB10 DD06 EE01 EE34 EE36 FF03 FF14 FF22 FF36

Claims (35)

[Claims] 1. A micropump comprising at least one pump unit capable of sending a fluid by the action of pressure, wherein the pump unit is composed of a pump unit, and the pump unit causes pressure fluctuation. The actuator unit includes at least one actuator unit and a flow channel unit through which a fluid flows. The actuator unit has two sidewalls made of a piezoelectric / electrostrictive body or an antiferroelectric body arranged on a communication plate. , The surface facing the communication plate is covered with a lid plate to form a cell, and the displacement of the cell caused by the expansion and contraction of the side wall causes a change in pressure in the flow path portion to cause a fluid flow. A micropump characterized by being capable of selectively forming a passage. 2. In the pump unit, an electrode film is formed on both surfaces of a side wall of the actuator portion, and a voltage is applied to the electrode film, whereby the side wall expands and contracts in the vertical direction according to a driving electric field. Item 2. The micropump according to Item 1. 3. The micropump according to claim 1, wherein, in the pump unit, a polarization electric field and a driving electric field of a piezoelectric body that can form a side wall of the actuator portion have the same electric field direction. 4. The crystal grain state on the surface of the side wall of the actuator portion in the pump unit is 1% or less of crystal grains that have undergone intragranular fracture. Micro pump. 5. The micropump according to claim 1, wherein in the pump unit, the contour of the cell surface of the actuator portion is approximately 8 μm or less. 6. In the pump unit, the ratio of the inner width and the height of the cell of the actuator portion is approximately 1: 2 to 2.
It is 1:40, The micro pump as described in any one of Claims 1-5. 7. The micropump according to claim 1, wherein in the pump unit, an inner width of a cell of the actuator portion is about 60 μm or less. 8. The micropump according to claim 1, wherein in the pump unit, a surface roughness Rt of a side wall of the actuator portion is about 10 μm or less. 9. The actuator according to claim 1, wherein in the actuator portion of the pump unit, the communication plate is made of a piezoelectric / electrostrictive body or an antiferroelectric body and is integrally formed with the side wall. Micro pump. 10. The actuator unit of the pump unit, wherein the lid plate is made of a piezoelectric / electrostrictive body or an antiferroelectric body, and is integrally molded with the side wall. Micro pump. 11. The pump unit of the pump unit, wherein a cell of an actuator section is filled with a system fluid, and a channel in which a fluid insoluble to the system fluid flows is formed in advance, the cell and the channel. Is communicated via a communication hole, the flow path is at least approximately the same width as the diameter of the communication hole where the communication hole communicates with the flow path, by the vertical expansion and contraction of the side wall forming the cell, A pump unit (A) capable of selectively forming a fluid flow path by changing a volume of the system fluid filled in the cell from the communication hole to the flow path side, the pump unit (A) ) Is used as a pump unit, and at least one pump unit is provided.
The micropump according to any one of 1. 12. The pump unit includes a displacement transmitting portion having a flow passage portion bonded to at least a part of a cover plate of a cell of the actuator portion, and a portion of the displacement transmitting portion on a side opposite to the actuator portion. A casing facing each other with a flow path sandwiched between the surfaces, and the displacement of the displacement transmitting section approaching / separating from a part of the surface of the casing facing by the vertical expansion / contraction of the side wall forming the cell. A pump unit (B) capable of selectively forming a fluid flow path through the pump unit, wherein the pump unit (B) is used as a pump unit, and at least one pump unit is provided.
The micropump according to any one of 1. 13. In the pump unit (B),
The micropump according to claim 12, wherein a through hole passing through the inside of the cell and the outside of the cell is formed. 14. In the pump unit (B),
The displacement transmission part and the casing are in contact with each other when the flow path is potentially present and comes closest to a surface of a part of the casing facing the displacement transmission part. Micro pump. 15. In the pump unit (B),
The micropump according to any one of claims 12 to 14, wherein a plurality of actuator parts are assigned corresponding to the displacement transmission parts of the flow path part. 16. The plurality of actuator portions of the pump unit (B) have a ratio of a distance between cells and an adjacent cell to a height of the cells is about 1: 2 to 1:40. The micropump described in. 17. The micropump according to claim 15 or 16, wherein in the plurality of actuator portions of the pump unit (B), the distance between adjacent cells is about 50 μm or less. 18. The plurality of actuator parts of the pump unit (B) according to claim 15, wherein an inner width of a cell or a distance between a cell and an adjacent cell has at least two types of lengths. The micropump according to claim 1. 19. In the actuator part of the pump unit (B), the same material as that of the displacement transmitting part of the flow path part is filled outside the cell, and the actuator part and the flow path part are integrated. Formed by
The micropump according to any one of to 18. 20. In the pump unit, a fluid introduction opening and a fluid discharge opening are formed in a cell of an actuator portion, and a flow passage including an introduction passage and a discharge passage is formed in a passage portion in advance. The introduction flow path communicates with the fluid introduction opening of the cell, the discharge flow path communicates with the fluid discharge opening of the cell, and by expansion and contraction in the vertical direction of the side wall forming the cell, A pump unit (C) capable of selectively forming a fluid flow path by changing a volume to generate a pressure in the cell, wherein the pump unit (C) is used as a pump portion, and at least one pump is provided. 1 to 10 comprising a part
The micropump according to any one of 1. 21. A pressure loss forming portion is provided on the introduction side and the discharge side of the flow path, and the pressure loss ΔP1 when flowing in the introduction direction of the fluid in the introduction side pressure loss forming portion and the fluid are introduced. Pressure loss ΔP2 when flowing in the direction opposite to the direction, pressure loss ΔP3 when flowing in the direction of discharging the fluid in the discharge side pressure loss forming part, and flowing in the direction opposite to the direction of discharging the fluid 21. The micropump according to any one of claims 1 to 20, wherein the pressure loss ΔP4 at time satisfies the following two expressions, ΔP1 <ΔP4 ΔP2> ΔP3. 22. The introduction-side pressure loss forming portion has a taper shape in which a cross-sectional area continuously decreases in a direction of introducing a fluid, and the discharge-side pressure loss forming portion extends in a direction of discharging a fluid. 22. The micropump according to claim 21, wherein the micropump has a taper shape that becomes smaller continuously. 23. The micropump according to claim 21, wherein the pressure loss forming portions on the introduction side and the discharge side are check valves. 24. The micropump according to claim 11, wherein a plurality of the pump parts are provided and at least one set of series connection is provided. 25. The micropump according to any one of claims 11 to 23, wherein a plurality of the pump parts are provided and are connected in any combination of series connection and parallel connection. 26. Among the plurality of pump parts, at least one set of two pump parts adjacent in series shifts the phases of pressure fluctuations generated in the flow path part from each other, whereby A flow controllable device according to claim 24 or 2.
5. The micro pump according to item 5. 27. The micropump according to any one of claims 24 to 26, wherein the pump units of the plurality of pump units are the same type of pump unit. 28. Of the pump unit (A), the pump unit (B), and the pump unit (C) according to any one of claims 11 to 23, between the at least one adjacent pump parts in the plurality of pump parts. 25. The valve part comprised from either pump unit is interposed.
27. The micro pump according to any one of 27. 29. The micropump according to claim 28, wherein the pump unit of the pump section and the pump unit of the valve section are the same type of pump unit. 30. The method according to claim 11, wherein the introduction side of the pump portion is provided.
30. The pump unit (A) according to claim 23, the pump unit (B), and at least one input valve portion configured from any pump unit of the pump unit (C). The micropump according to item 1. 31. The micropump according to claim 30, wherein the pump unit of the pump section and the pump unit of the input valve section are the same type of pump unit. 32. The method according to claim 11, wherein the discharge side of the pump portion is provided.
23. The pump unit (A) according to claim 23, a pump unit (B), and at least one output valve unit configured from any pump unit of the pump unit (C). The micropump according to item 1. 33. The micropump according to claim 32, wherein the pump unit of the pump unit and the pump unit of the output valve unit are the same type of pump unit. 34. An actuator portion of the pump unit is formed of a piezoelectric / electrostrictive body or an antiferroelectric body and has a plurality of slits (A) formed therein, and the spacer plate is superposed on one side of the spacer plate. A slit plate that covers the slit (A), and a communication plate that overlaps the other side of the spacer plate and covers the slit (A), and includes a slit (A) adjacent to the slit (A). The micropump according to any one of claims 1 to 33, wherein a slit (B) penetrating the cover plate and the spacer plate is formed between the micropumps. 35. A cell is formed by arranging two side walls made of a piezoelectric / electrostrictive body or an antiferroelectric body on a communication plate, and closing a surface of the side wall facing the communication plate with a cover plate. Tena,
A method for manufacturing a micropump having an actuator portion in which the side wall expands and contracts to cause displacement in the cell, using a punch and a die, wherein a plurality of green sheets made of a piezoelectric / electrostrictive material or an antiferroelectric material is prepared. Then, the first step of forming a first slit hole in the first green sheet by the punch, and the first green sheet is closely attached to the stripper in a state where the punch is not pulled out from the first slit hole. A second step of pulling the punch so that the tip of the punch is slightly pulled in from the lowermost portion of the pulled first green sheet, and a second step of pulling the punch by the second step. A fourth step of forming a second slit hole in the green sheet, and a step of removing the second slit hole from the second slit hole without removing the punch from the second slit hole. A fifth step of pulling up the punch sheet together with the first green sheet, and a sixth step of pulling up the punch to such an extent that the punch tip portion is slightly pulled in from the lowermost portion of the pulled up second green sheet, , A micropump including a step of stacking a plurality of green sheets by repeating the fourth to sixth steps to form a piezoelectric / electrostrictive body or an antiferroelectric body having a plurality of slits. Manufacturing method.