JP2003072071A - Composite nozzle, liquid drop discharge apparatus, and method for manufacturing them - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a composite nozzle which can increase the discharge speed while holding the liquid drop position accuracy. SOLUTION: A laminated body 13 comprising a nozzle base body 24 and an adhesive layer 25 layered on the nozzle base body 24 is attached to a lower face plate 16 of a channel substrate 11. The composite nozzle 26 for discharging liquid drops is formed to a position of the nozzle base body 24 and the adhesion layer 25 corresponding to a channel terminal nozzle 16A formed to the lower face plate 16 which constitutes the channel base body 11. A discharge nozzle 24A for constituting a part of the composite nozzle 26 is formed to the nozzle base body 24. A ratio of a Young's modulus Ea of the adhesion layer 25 and a Young's modulus Es of the nozzle base body 24 (Es/Ea) is set to a range of 1.4-500. Since the adhesion layer absorbs vibrations of the nozzle base body in accordance with the discharge of liquid drops, a liquid drop meniscus can be stabilized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a compound nozzle for ejecting a minute volume of liquid droplets, a liquid droplet ejecting apparatus including the compound nozzle, and a method for manufacturing the same.

[0002]

2. Description of the Related Art As a conventional droplet discharge device, an adhesive film having nozzles formed individually and a nozzle base are laminated on a flow path base having a flow path for flowing a liquid.
It is formed so that the flow path of the flow path base, the nozzle of the adhesive film, and the nozzle of the nozzle base communicate with each other by adhesion. The droplet discharge device is provided with a micro pump composed of a piezoelectric / electrostrictive element, and a small amount of liquid is discharged from the nozzle portion by pressurizing with the micro pump. Such a droplet discharge device is used for forming spots in the manufacture of, for example, a DNA chip (DNA microarray).

As is well known, the progress in the method of analyzing the gene structure is remarkable, and many gene structures including human genes have been clarified. For analysis of such gene structure, several thousand to 10,000 or more different types of DNs are mounted on a substrate such as a microscope slide glass.
A DNA chip in which the A fragment is aligned and fixed as a spot is used.

[0004]

However, in the above-mentioned conventional droplet discharge device, when the nozzle base is adhered to the flow path base by the adhesive film, the periphery of the nozzle portion cannot be physically pressed, so that the adhesive film is not formed. There is a problem that defective adhesion such as minute peeling due to the inclusion of bubbles into the sheet is likely to occur.

Further, due to the difference in the amount of thermal expansion and the amount of thermal contraction between the flow path substrate and the nozzle substrate, there is a problem that the adhesive force is lowered due to residual stress, and the nozzle is likely to be deformed and displaced.

Further, since the nozzle base and the nozzle of the adhesive film are separately formed, when the adhesive film is adhered to the flow path base, the nozzle formed on the adhesive film is deformed, and the ejection direction of the liquid droplets is axial. It was difficult to manufacture a bilaterally symmetric nozzle.

In such a droplet discharge device, not only the positional accuracy of the nozzle portion must be ensured, but also a predetermined discharge speed must be secured so that the discharged droplets do not cause flight bending. However, because of the above-mentioned problems, increasing the ejection speed while maintaining the droplet position accuracy is
It was difficult.

Therefore, an object of the present invention is to provide a composite nozzle capable of increasing the ejection speed while maintaining the accuracy of the droplet position, a droplet ejection apparatus equipped with this composite nozzle, and a method of manufacturing these. .

[0009]

A first feature of the present invention is a composite nozzle, in which a nozzle base body having a discharge nozzle is formed on a flow path base body having a flow path formed therein with an adhesive layer interposed therebetween. The flow path and the discharge nozzle are attached so as to communicate with each other, and the ratio (Es / Ea) of the Young's modulus Ea of the adhesive layer to the Young's modulus Es of the nozzle base is 1.4 to 500. And

In the composite nozzle according to the first feature of the present invention having such a configuration, since the Young's modulus Ea of the adhesive layer is smaller than the Young's modulus Es of the nozzle base, the adhesive layer absorbs the vibration of the nozzle base and discharges it. The unevenness (meniscus) on the surface of the formed droplets is stabilized. If the Young's modulus Ea of the adhesive is too small, the pressure loss becomes large and it becomes difficult to eject the droplets. Therefore, the adhesive layer has an appropriate Young's modulus with respect to the nozzle substrate, that is, the Young's modulus of the adhesive layer. The ratio (Es / Ea) of Ea to the Young's modulus Es of the nozzle substrate is preferably in the range of 1.4 to 500.

A second feature of the present invention is a composite nozzle, which circulates along the inner surface at the downstream end of the flow path in which the fluid formed in the flow path substrate flows, and upstream of the flow path. And a discharge layer for discharging and dropping a fluid are formed, and the discharge nozzle has the downstream side end. And a nozzle base that is adhered to the lower surface of the flow path base via the adhesive layer so as to communicate with the section.

Further, according to the second feature of the present invention,
The ratio (Es / Ea) between the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle substrate is preferably 1.4 to 500.

Further, it is preferable that the opening diameter dimension between the inner side surface of the extended portion of the adhesive layer and the inner side surface of the discharge nozzle is changed so as to be constantly reduced in the discharge direction.

It is preferable that the adhesive constituting the adhesive layer has good wettability with respect to the flow path substrate in the molten state.

Further, it is preferable that a stopper portion for controlling the flow of the adhesive is formed on the flow path substrate.

Further, it is preferable that a slit is formed around the nozzle base and / or the discharge nozzle of the adhesive layer. It is preferable that the slit is formed perpendicularly to the direction in which the nozzle base and / or the adhesive layer undergoes large thermal deformation. Further, the slit is a first slit formed so as to be perpendicular to a direction of large thermal deformation of the nozzle base and / or the adhesive layer, and a second slit formed so as to be perpendicular to a direction of small thermal deformation. And the first slit is preferably set longer than the second slit.

According to the second aspect of the invention having such a structure, the extending portion of the adhesive layer is formed on the inner surface of the downstream end of the flow path of the flow path substrate so as to circulate along this inner surface. It is difficult to form a stepped portion between the flow path substrate and the adhesive layer, the pressure loss of the fluid between the flow path substrate and the adhesive layer can be reduced, and the drop position accuracy of droplets after ejection can be improved. it can. In particular, the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle substrate
By setting the ratio (Es / Ea) to 1.4 to 500, the adhesive layer can absorb the vibration of the nozzle substrate and stabilize the meniscus of the droplet.

It is to be noted that the extension diameter of the adhesive layer and the nozzle of the nozzle base are formed so that the diameter of the opening of the discharge nozzle is constantly reduced in the discharge direction (outlet direction) so that the flow is supplied from the flow path of the flow path base. The fluid to be formed can be a composite nozzle having a smooth inner surface formed by the extending portion and the discharge nozzle. By doing so, it is possible to suppress the reduction of the pressure loss of the fluid and to prevent the generation of turbulent flow in the composite nozzle portion to improve the accuracy of the droplet ejection direction.

Further, in the invention according to the second feature, the nozzle base is interposed via the adhesive layer by setting the wettability of the adhesive forming the adhesive layer in the molten state to be good with respect to the flow path base. Since the adhesive wets the inner surface of the downstream end of the flow channel when it is attached to the flow channel substrate by the adhesive, it is possible to automatically form the extended portion. In particular, by forming a stopper portion that controls the wetting of the adhesive at a predetermined position on the downstream end of the flow path, it is possible to reliably form the extended portion up to the predetermined position.

Further, according to the second aspect of the invention, a slit is formed around the discharge nozzle of the nozzle base and / or the adhesive layer, so that the slit is formed between the flow path base and the adhesive layer or between the adhesive layer and the nozzle. The slit absorbs the stress accumulated in the adhesive layer or the nozzle base due to the difference in thermal expansion and thermal contraction with the base, thereby reducing adhesion defects such as peeling of the joint surface and improving the durability. Further, since the stress applied to the discharge nozzle of the nozzle base is relaxed and released by the slit, it is possible to prevent the nozzle position from deviating from a predetermined position.

A third feature of the present invention is a droplet discharge device, which comprises an introduction path for introducing a liquid material and a pressurizing device provided with a micropump for pressurizing the liquid material introduced from the introduction path. Nozzle base in which a discharge nozzle is formed so as to communicate with the discharge passage in an apparatus main body having a chamber and a discharge passage through which the liquid material is discharged in response to pressurization by the micropump in the pressure chamber Is attached via an adhesive layer,
The gist is that the ratio (Es / Ea) between the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle substrate is set to 1.4 to 500.

In the third aspect of the present invention having such a structure, the liquid material discharged from the pressurizing chamber by the micro pump is discharged from the discharge nozzle of the nozzle base body through the discharge passage. At this time, the adhesive layer absorbs the vibration of the nozzle substrate due to the ejection of the liquid material and stabilizes the meniscus of the droplet.
Therefore, according to this droplet discharge device, it is possible to accurately drop the discharged droplet at a predetermined position.

A fourth feature of the present invention is a droplet discharge device, which comprises an introduction path for introducing a liquid material, and a pressurizing device provided with a micropump for pressurizing the liquid material introduced from the introduction path. A nozzle body in which a discharge nozzle is formed so as to communicate with the discharge passage in a device main body having a chamber and a discharge passage through which the liquid material is discharged along with pressurization by a micropump in the pressure chamber; The adhesive layer is adhered via an adhesive layer, the adhesive layer circulates along the inner surface of the lead-out path, and has a stretched portion, and the adhesive layer including the stretched portion and the nozzle base are combined. The gist is that the length in the ejection direction is longer than the sum of the thickness of the adhesive layer and the thickness of the nozzle base.

Further, in the invention according to the fourth feature, the opening diameter dimension between the inner side surface of the extending portion and the inner side surface of the discharge nozzle is changed so as to be constantly reduced toward the discharge direction. It is preferable. It is preferable that a slit is formed around the discharge nozzle in the nozzle base and / or the adhesive layer. Further, it is preferable that the slit is formed perpendicularly to a direction in which the nozzle base and / or the adhesive layer is largely deformed by heat, and the nozzle base and / or the adhesive layer in which the slit is formed is thermally deformed. The first slit is formed so as to be perpendicular to the larger direction, and the second slit is formed so as to be perpendicular to the smaller thermal deformation direction.
It is preferable that the slit is set longer than the second slit.

An invention according to a fifth feature of the present invention is a method for manufacturing a composite nozzle, wherein a plate-shaped nozzle base and an adhesive layer are attached to each other to produce a laminate, and then the adhesive layer side is applied. A gist is that a nozzle portion is formed in the laminated body by performing a perforating process, and the laminated body is attached so that the nozzle portion communicates with the flow passage of a flow passage base having a flow passage formed therein. .

The above-mentioned drilling process can be favorably carried out by irradiating a laser beam from the adhesive layer side of the laminate. The wettability of the adhesive forming the adhesive layer in the molten state is preferably good for the flow path substrate.

In the invention according to the fifth feature as described above, the opening diameter dimension can be gradually increased in the direction from the nozzle base to the adhesive layer by performing the punching process from the adhesive layer side. In particular, by irradiating the laser beam on the adhesive layer side, the adhesive layer is heated by the laser beam until the laser beam penetrates the nozzle base, and the opening diameter size is gradually increased from the nozzle base toward the adhesive layer. be able to.

Further, since the nozzles are formed in the laminated body composed of the adhesive layer and the nozzle base as described above, compared with the method of laminating and adhering the adhesive layer and the nozzle base on which the nozzles are formed separately, There is an advantage that the nozzles of the nozzle base do not shift from each other.

A sixth feature of the present invention is that after a plate-shaped nozzle base and an adhesive layer are attached to each other to produce a laminated body, a hole is processed from the adhesive layer side to form a nozzle portion in the laminated body. And a pressurizing chamber having a micropump for pressurizing the liquid introduced from the introducing passage, and an inlet passage through which the liquid is introduced, and with the pressurization by the micropump in the pressurizing chamber. The gist is that the laminated body is attached to a device body having a lead-out path through which the liquid material is led out so that the nozzle portion and the lead-out path communicate with each other.

Further, in the invention according to the sixth feature, it is preferable that the perforating process is performed by irradiating a laser beam from the adhesive layer side of the laminate.

Furthermore, the ratio (Es / Ea) of the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle substrate is 1.4 to 50.
It is preferably 0, and more preferably the wettability of the adhesive forming the adhesive layer in the molten state is good with respect to the inner wall of the lead-out path.

In the invention according to the sixth feature as described above, the opening diameter dimension can be gradually increased in the direction from the nozzle base to the adhesive layer by performing the punching process from the adhesive layer side. In particular, by irradiating the laser beam on the adhesive layer side, the adhesive layer is heated by the laser beam until the laser beam penetrates the nozzle base, and the opening diameter size is gradually increased from the nozzle base toward the adhesive layer. be able to. Further, since the nozzles are formed in the laminated body composed of the adhesive layer and the nozzle base in this way, compared with the method of laminating and adhering the adhesive layer and the nozzle base on which the nozzles are formed separately, There is an advantage that the nozzles do not shift from each other. Moreover, since the nozzle base and the adhesive layer are integrated, a smooth nozzle portion can be formed from the adhesive layer to the nozzle base, and rigidity can be secured. Therefore, the pressure loss generated in the micro pump can be reduced. Therefore, a large discharge amount and discharge speed can be obtained with a smaller displacement of the micropump, and the discharged liquid droplets can be accurately dropped at a predetermined position.

[0033]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a composite nozzle according to the present invention,
The details of the droplet discharge device and the manufacturing method thereof will be described based on an embodiment shown in the drawings. However, it should be noted that the drawings are schematic and the thicknesses and film thickness ratios of the respective material layers are different from actual ones. Therefore, the specific thickness and dimensions should be determined with reference to the following description. Moreover, it is needless to say that the drawings may include portions having different dimensional relationships and ratios.

First, the structure of a composite nozzle according to an embodiment of the present invention and a droplet discharge device having the same will be described. Note that FIG. 1 shows a droplet discharge device 1 according to this embodiment.
0 is a perspective view, FIG. 2 is a cross-sectional view showing a state of being cut through the micropipette portion in the x direction of FIG. 1, FIG. 3 is a plan view of the droplet discharge device 10, and FIG. The bottom view and FIG. 5 are cross-sectional views of the composite nozzle.

As shown in FIG. 1, the droplet discharge device 10 according to this embodiment has a flow path substrate 11 in which a flow path is formed.
An actuator portion 12 having a function of changing the volume inside the cavity as a pressurizing chamber by being assembled to the flow path substrate 11, and a laminated body 1 laminated on the lower surface of the flow path substrate 11.
3 and a liquid introducing portion 14 provided on one end side of the flow path substrate 11 and generally configured. As shown in FIGS. 1, 3 and 4, the droplet discharge device 10 according to the present embodiment is provided with a plurality of micropipette portions 15 at predetermined intervals along the y direction.

The flow channel substrate 11 has a lower surface plate 16 having the lower surface laminated with the laminate 13, an intermediate plate 17 laminated on the lower surface plate 16, and an upper surface plate 18 laminated on the intermediate plate 17. It has and. The lower surface plate 16, the intermediate plate 17, and the upper surface plate 18 are formed by laminating ceramic green sheets such as zirconia and integrally firing them.

A plurality of flow path terminating nozzles 16A as downstream end portions of the flow paths are provided on the lower plate 16 near one end in the x direction shown in FIG. 1 along the y direction shown in FIG. It is formed at intervals.

Channel end nozzle 16A in the intermediate plate 17
A nozzle 17A having an opening diameter dimension longer than that of the flow path terminating nozzle 16A is formed at a position above. This nozzle 17
A constitutes a part of the flow path. In addition, the nozzle 17A
The channel end nozzle 16A and the channel end nozzle 16A are coaxially arranged and communicate with each other. Further, an elongated hole 17B that forms the liquid reservoir channel 19 is formed behind each nozzle 17A in the intermediate plate 17 (on the other end side in the x direction shown in FIG. 1). The liquid reservoir flow path 19 is formed by the elongated hole 17B, the lower plate 16 and the upper plate 18.

A nozzle 18A communicating with the nozzle 17A is formed on the upper surface plate 18 at a position above the nozzle 17A of the intermediate plate 17. The nozzle 18A has a diameter dimension set longer than that of the nozzle 17A of the intermediate plate 17, and is arranged and formed coaxially with the nozzle 17A. Further, in the upper surface plate 18 located above the front end portion (the other side in the x direction shown in FIG. 1) of the elongated hole 17B of the intermediate plate 17,
The nozzle 18B is formed. Further, an introduction nozzle 18C for introducing the liquid into the liquid reservoir channel 19 is formed on the upper surface plate 18 located above the rear end portion (the other side in the x direction shown in FIG. 1) of the elongated hole 17B.

The lower plate 16, the intermediate plate 17, and the upper plate 18 are made of ceramics as described above, and for example, stabilized zirconia, partially stabilized zirconia, alumina, magnesia, silicon nitride, etc. are used. be able to. Among them, stabilized zirconia and partially stabilized zirconia are most preferably used because they have high mechanical strength and high toughness even in a thin plate.

The actuator portion 12 covers the front half of the top plate 18 in the x direction shown in FIG. 1, and the cavity bottom plate 20 laminated on the top plate 18 and the cavity bottom plate 20 laminated on the cavity bottom plate 20. Forming plate 21
And a thin diaphragm 22 that covers the cavity forming plate 21.
And a piezoelectric / electrostrictive element 23 as a micropump fixed on the vibration plate 22. The space formed by the cavity bottom plate 20, the cavity forming plate 21, and the vibrating plate 22 constitutes a cavity 27.

X shown in FIG. 1 in the cavity bottom plate 20
A nozzle 20A that communicates with the nozzle 18A of the upper surface plate 18 is formed at the front portion in the direction. This nozzle 20A
It is set to be longer than the diameter of the nozzle 18A of the top plate 18,
These nozzles 20A and 18A are arranged coaxially. Further, a nozzle 20B communicating with the nozzle 18B of the top plate 18 is formed at the rear portion of the cavity bottom plate 20 in the x direction shown in FIG. The nozzle 20B is set shorter than the diameter of the nozzle 18B. The nozzles 20B and 18B are coaxially arranged.

The cavity forming plate 21 has elongated holes 21A for communicating the nozzles 20A and 20B of the cavity bottom plate 20. Further, the diaphragm 22 is formed in a rectangular shape so as to cover the entire upper surface of the cavity forming plate 21.

The cavity bottom plate 20, the cavity forming plate 21, and the vibrating plate 22 are formed by firing a ceramic green sheet. Here, as the ceramics, for example, stabilized zirconia, partially stabilized zirconia, alumina, magnesia, silicon nitride or the like can be used. Among these, stabilized zirconia and partially stabilized zirconia are most preferably used because they have high mechanical strength even in a thin plate, high toughness, and low reactivity with piezoelectric films and electrode materials.
When stabilized / partially stabilized zirconia is used as the material of the vibration plate 22, at least the piezoelectric / electrostrictive element 23 is used.
It is preferable that an additive such as alumina or titania be contained in the portion where the is formed.

The piezoelectric / electrostrictive layer is made of piezoelectric ceramics such as lead zirconate, lead titanate, lead magnesium niobate, lead magnesium tantalate, lead nickel niobate, lead zinc niobate, lead manganese niobate. , Lead antimony stannate, lead manganese tungstate, lead cobalt niobate, barium titanate, and the like, and composite ceramics containing a component combining any of these can be used, but in the present invention, lead zirconate is used. A material containing a lead titanate and lead magnesium niobate as a main component is preferably used. these,
In addition to having a high electromechanical coupling coefficient and a piezoelectric constant, such a material has low reactivity during sintering of the piezoelectric film, and a material having a predetermined composition can be stably formed.

The liquid introducing section 14 is fixedly provided on one end side of the flow path substrate 11. The liquid introducing portion 14 has a substantially rectangular parallelepiped shape, and is integrally formed with the upper surface plate 18 on the upper surface plate 18 at the rear of the actuator portion 12. Then, in the liquid introduction part 14, liquid injection ports 14A communicating with a plurality of introduction nozzles 18C formed on the underlying upper surface plate 18 are formed at predetermined intervals along the y direction shown in FIG. The liquid injection port 14A constitutes a part of an introduction path into which the liquid is introduced. It should be noted that the liquid introducing section 14 is provided in the flow path substrate 11 and the actuator section 12.
It is made of the same ceramic material.

Next, the composite nozzle 2 according to this embodiment
The laminated body 13 in which 6 is formed will be described.

The laminated body 13 is composed of a nozzle base 24 and an adhesive layer 25 laminated on the nozzle base 24. The nozzle substrate 24 can be formed using, for example, a polyester (PET) film, stainless steel (SUS304), alumina, partially stabilized zirconia (PSZ), or the like. Further, the adhesive layer 25 can be formed using an epoxy adhesive film (thermosetting) or a polyethylene adhesive film (thermoplastic). The flow path substrate 11 is formed on the nozzle substrate 24 and the adhesive layer 25.
Flow path terminating nozzle 16 formed on the lower surface plate 16 constituting the
A composite nozzle 26 for ejecting a droplet is formed at a position corresponding to A. The nozzle base 24 is provided with a discharge nozzle 24A that forms a part of the composite nozzle 26.

In particular, in the present embodiment, the ratio (E) of the Young's modulus Ea of the adhesive layer 25 and the Young's modulus Es of the nozzle base 24 (E
s / Ea) is set in the range of 1.4 to 500.
Table 1 below shows the nozzle base 24, the adhesive layer 25, and the bottom plate 1.
The constituent materials of No. 6 and their Young's modulus (Gpa) are shown.

[0050]

[Table 1] When each material shown in Table 1 above is used, the ratio of the Young's modulus Ea of the adhesive layer 25 and the Young's modulus Es of the nozzle base 24 (E
By setting s / Ea) to be in the range of 1.4 to 500, the adhesive layer 25 absorbs the vibration of the nozzle base 24 due to the pressure applied when the liquid droplets are ejected from the composite nozzle 26, It has the effect of stabilizing the meniscus of the droplet. If the Young's modulus Ea of the adhesive layer becomes too small, the pressure loss becomes large, and it becomes difficult to eject liquid droplets. Therefore, the adhesive layer 25 needs to have a Young's modulus in the range that satisfies the above ratio. Becomes

In particular, the droplet discharge device 1 according to the present embodiment
When a sample solution containing a DNA fragment is discharged at 0 to produce a DNA chip (DNA microarray),
Since the viscosity of the sample solution containing the fragments is in the range of 3 cp to 10 cp, the Young's modulus of the nozzle substrate 24 is 4 GPa to 1
97 GPa, Young's modulus of the adhesive layer 25 is 0.4 GPa-2.
It is preferably 9 GPa. In this case, the adhesive layer 25
The ratio (Es / Ea) of the Young's modulus Ea to the Young's modulus Es of the nozzle substrate 24 is preferably in the range of 1.4 to 500, more preferably 1.4 to 200, and further 1.4. More preferably, it will be from 10 to 10.

Further, the droplet discharge device 1 according to the present embodiment
As shown in FIG. 5, the compound nozzle 26 of No. 0 is formed such that the diameter dimension thereof is constantly reduced in the ejection direction z of the central axis. That is, the inner surface of the composite nozzle 26 formed in the nozzle base 24 and the adhesive layer 25 is formed symmetrically with respect to the central axis and forms a smooth inclined surface.

On the upper part of the composite nozzle 26, an extending portion 25A, in which the adhesive layer 25 is extended along the flow path terminating nozzle 16A of the upper surface plate 16, is formed around. The extending portion 25A is formed so as to be flush with the inner surface of the nozzle of the adhesive layer 25 and the nozzle base 24, and has a diameter dimension in the discharge direction z of the central axis.
It is formed so as to constantly shrink toward. Since the extending portion 25A is thus formed in the flow path terminating nozzle 16A, it is possible to prevent a step from being formed at the boundary between the adhesive layer 25 and the top plate 16. Therefore, air bubbles do not accumulate at the boundary between the adhesive layer 25 and the top plate 16, and the liquid can be smoothly guided to the z direction in the ejection direction. Since bubbles do not accumulate at the boundary between the adhesive layer 25 and the upper surface plate 16, it is possible to suppress minute peeling of the adhesive layer 25. In addition, the adhesive layer 25 is formed along the inner surface of the top plate 16.
Since the extending portion 25A of the above is integrally bonded, the rigidity of the composite nozzle 26 can be secured. By thus ensuring the rigidity of the composite nozzle 26, it is possible to reduce the pressure loss generated in the piezoelectric / electrostrictive element 23.
Therefore, it is possible to obtain a large discharge amount and a large discharge speed with a smaller displacement of the piezoelectric / electrostrictive element 23, and it becomes easy to drop the liquid droplet at a desired position.

The operation and operation in the case of producing a DNA chip by ejecting a sample solution containing a DNA fragment using the droplet ejection device 10 having such a configuration will be described.

First, the fluid introducing portion 14 of the droplet discharge device 10
A predetermined amount of a buffer solution, which is a replacement solution, is filled in each of the liquid injection ports 14A formed in the above, and the sample solutions containing different DNA fragments are injected into the liquid injection ports 14A. Then, the piezoelectric / electrostrictive element 23 is driven to eject the buffer solution previously filled from the composite nozzle 26,
The entire flow path including 7 is replaced with the sample solution in a laminar flow.

After such replacement of the buffer solution is completed,
It is driven under the driving condition of the piezoelectric / electrostrictive element 23 corresponding to the droplet amount corresponding to the required spot diameter of the DNA chip, and the spotting is repeated to form the sample spots in a predetermined array to manufacture the DNA chip. Complete.

In this droplet discharge device 10, the ratio (Es / Ea) between the Young's modulus Ea of the adhesive layer 25 and the Young's modulus Es of the nozzle base 24 is set to be in the range of 1.4 to 500. Therefore, when the sample liquid is pressurized by the piezoelectric / electrostrictive element 23 of the actuator section 12, the composite nozzle 26
Even if the nozzle portion of the nozzle substrate 24 in FIG. 2 receives the pressure of the sample liquid, the adhesive layer 25 has an action of absorbing the pressure.
Therefore, the vibration of the nozzle substrate 24 can be suppressed, and the meniscus of the droplet of the sample liquid passing through this portion can be stabilized. Since the meniscus of the liquid droplets is stabilized in this way, the discharged liquid droplets can be dropped at a desired position.

Further, in the composite nozzle 26, the stretching portion 2
Since 5A is formed, the total area where the adhesive layer 25 forming the composite nozzle 26 adheres to the lower surface plate 16 becomes large, and the strength for fixing the nozzle base 24 forming the composite nozzle 26 can be increased. Therefore, the composite nozzle 2
The rigidity of the members constituting 6 increases, and the piezoelectric / electrostrictive element 2
3 has the effect of reducing the loss of pressure generated. Therefore, even if the displacement of the piezoelectric / electrostrictive element 23 is small, it is possible to obtain the discharge amount and the discharge speed of the sample liquid, and it becomes easy to drop the liquid droplet to be discharged at a desired position. Then, since the total area where the adhesive layer 25 forming the composite nozzle 26 adheres to the lower surface plate 16 is increased, peeling of the adhesive layer 25 and adhesion failure can be reduced.

Further, since the extending portion 25A is formed, there is no step at the boundary between the lower plate 16 and the adhesive layer 25, and the inner wall surface of the composite nozzle 26 is smooth, so that air bubbles do not accumulate. . Further, since the diameter of the composite nozzle 26 is formed so as to be constantly reduced along the central axis in the ejection direction, it is possible to eject the liquid droplets along the central axis of the composite nozzle 26. . Therefore, DN
The positional accuracy of the sample spot on the A chip can be improved.

Next, a method of manufacturing the composite nozzle 26 and the droplet discharge device 10 according to this embodiment will be described with reference to FIGS.

First, as shown in FIG. 6, a plate-shaped nozzle base 24 and a film-shaped adhesive layer 25 having good wettability to the lower surface plate 16 of the droplet discharge device 10 in a molten state.
Are laminated to produce a laminated body 13.

Next, as shown in FIGS. 7 and 8, a plurality of composite nozzles 26 are formed in the adhesive layer 25 and the nozzle base 24 by spot-irradiating a laser beam having a predetermined diameter dimension from the adhesive layer 25 side. The composite nozzle 26 formed in this way
Has a shape in which the diameter dimension is constantly reduced from the upper surface of the adhesive layer 25 to the lower surface of the nozzle base 24.

Thereafter, as shown in FIG. 9, the flow path substrate 1
1, the device body 10A of the droplet discharge device 10 including the actuator portion 12 and the fluid introduction portion 14, and the composite nozzle 26.
The laminated body 13 in which is formed is attached. Specifically, the adhesive layer 25 is attached to the lower surface of the lower surface plate 16 so that the flow path terminating nozzle 16A formed on the lower surface plate 16 of the apparatus main body 10A and the composite nozzle 26 of the laminated body 13 match. At this time, the adhesive layer 25 is heated in advance so as to be in a molten state. At this time, the adhesive layer 25 in a molten state
Since the opening of the composite nozzle 26 wets along the inner wall of the flow path end nozzle 16A of the lower surface plate 16, the extending portion 25A is formed around the inner surface of the flow path end nozzle 16A as shown in FIG. To be done. After that, the adhesive forming the adhesive layer 25 is solidified to complete the droplet discharge device 10 as shown in FIGS. 1 and 2.

According to such a manufacturing method, since the compound nozzle 26 is irradiated with the laser beam once,
As compared with a method in which nozzles are separately formed in the nozzle base 24 and the adhesive layer 25 and these are bonded together, bilaterally symmetric nozzles with the droplet discharge direction as an axis can be easily formed. Further, since the inner surface of the composite nozzle 26 can be formed smoothly by irradiating the laser beam, the meniscus of the ejected droplet can be stabilized. By stabilizing the meniscus of the droplets in this manner, the ejection direction of the droplets can be stabilized and the accuracy of the droplet dropping position can be improved.

Next, the composite nozzle 26 according to the present embodiment.
Another example of the method of manufacturing the droplet discharge device 10 including the same will be described. In this description, the same reference numerals are used for the respective members made of ceramics and the same reference numerals for the pre-fired compacts (green sheets) of the respective members.

(1) First, as shown in FIG. 10, a ceramic substrate 30 of a predetermined size made of an oxide such as zirconia, alumina or magnesia is prepared. The ceramic substrate 30 has a function as a screen printing base and a function as a firing substrate.

(2) On this ceramic substrate 30,
For example, using a metal screen, carbon powder or theobromine powder dispersion paste (not shown) is printed and dried to form a vanishing film. The disappearing film disappears by firing in a later step, and serves to facilitate peeling of the fired flow path substrate 11 and the like from the ceramic substrate 30.

(3) Next, as shown in FIG. 10, the bottom plate 1 formed by molding and drying a partially stabilized zirconia (PSZ) paste so that the flow path end nozzle 16A is formed.
The pre-fired compact 16 of 6 is placed on the ceramic substrate 30.

(4) Thereafter, as shown in FIG. 10, a pre-fired compact of the intermediate plate 17 formed by molding and drying a partially stabilized zirconia (PSZ) paste so that the nozzle 17A and the elongated hole 17B are formed. 17 is placed on the pre-fired compact 16.

(5) Further, as shown in FIG. 10, before firing the top plate 18 obtained by molding and drying the partially stabilized zirconia (PSZ) paste so that the nozzles 18A, 18B and the introduction nozzle 18C are formed. The molded body 18 is placed on the molded body 17 before firing.

(6) Next, as shown in FIG. 10, the pre-fired molded body 14 of the fluid introducing portion 14 in which the liquid injection port 14A is formed is placed on the pre-fired molded body 18.

(7) Thereafter, in the state shown in FIG. 10, the temperature is raised at such a rate that the organic content of each material layer and the disappeared film do not remain, and firing is performed at the maximum temperature of 1100 ° C. to 1300 ° C. As a result, as shown in FIG. 11, the vanishing film disappears, and the flow path substrate 11 including the fluid introducing portion 14 can be easily separated from the ceramic substrate 30.

(8) Next, as shown in FIG. 12, the lower surface plate 16 of the flow path substrate 11 having the fluid introducing portion 14 that has been fired.
The nozzle base 24 is attached to the lower surface of the nozzle via an adhesive layer 25 made of an adhesive film. The adhesive forming the adhesive layer 25 has a good wettability with respect to the partially stabilized zirconia forming the lower plate 16, for example, an epoxy adhesive (thermosetting) or a polyethylene adhesive (thermoplastic). (9) Next, as shown in FIG. 13, the nozzles 18A, 17A and the flow path terminating nozzle 16 from the upper side of the flow path base 11 are used.
A laser beam L having a predetermined diameter is irradiated so as to pass through the center of A, and a nozzle having a desired diameter and cross-sectional shape is formed in the adhesive layer 25 and the nozzle base 24. As a result, nozzle formation progresses from the adhesive layer 25 toward the nozzle base 24 to form the composite nozzle 26. At this time,
The adhesive layer 25 is melted by the laser beam L to be in a low viscosity state. Then, as the melted adhesive gets wet along the inner wall of the flow path terminating nozzle 16A, as shown in FIG.
It is formed longer than the total length t1 of the thickness ts of No. 4 and the thickness ta of the adhesive layer 25.

(10) Next, as shown in FIG. 14, the actuator section 12 prepared in advance is attached to the upper surface plate 18 with an adhesive. At this time, the cavity bottom plate 20
Nozzles 20A of the cavity bottom plate 20 are arranged so as to be coaxial with the nozzles 18A of the top plate 18.
B is arranged so as to be coaxial with the nozzle 18B of the top plate 18. The actuator portion 12 is formed by stacking a cavity bottom plate 20, a cavity forming plate 21, a vibrating plate 22, and a piezoelectric / electrostrictive element 23, which are each made of ceramics, in a green sheet state and firing them integrally. Has been done.

According to such a manufacturing method, since the composite nozzle 26 is formed after the nozzle base 24 and the adhesive layer 25 are attached to the flow path base 11, the positional accuracy of the composite nozzle 26 can be improved. it can. Further, according to the above-described manufacturing method, since the composite nozzle 26 is irradiated with the laser beam once, compared to a method in which nozzles are separately formed in the nozzle base 24 and the adhesive layer 25 and these are bonded together. It is possible to easily form bilaterally symmetric nozzles with the droplet discharge direction as an axis. Further, since the inner surface of the composite nozzle 26 can be formed smoothly by irradiating the laser beam, the meniscus of the ejected droplet can be stabilized. By stabilizing the meniscus of the droplets in this manner, the ejection direction of the droplets can be stabilized and the accuracy of the droplet dropping position can be improved. Particularly, by irradiating the laser with the adhesive layer 25 attached to the lower surface plate 16,
The melted adhesive wets the inner surface of the flow path terminating nozzle 16A of the lower surface plate 16 to increase the length of the composite nozzle 26.

(Other Embodiments) It should not be understood that the description and drawings forming part of the disclosure of the above-described embodiments of the present invention limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

For example, in the above-described embodiment, the composite nozzle 26 is formed with the adhesive layer 25 laminated on the nozzle base 24.
However, the nozzle base 24 may be attached to the lower surface of the flow path base 11 via an adhesive after the nozzle is opened in the nozzle base 24. At this time, it is preferable that the ratio (Es / Ea) between the Young's modulus Ea of the adhesive and the Young's modulus Es of the nozzle base 24 is in the range of 1.4 to 500.

Further, in the above-described embodiment, only the composite nozzle 26 for ejecting droplets is formed on the nozzle base 24 and the adhesive layer 25. However, the heat of the nozzle base 24 and the adhesive layer 25 is formed around the composite nozzle 26. A slit that absorbs the deformation may be formed. FIG. 15 shows four slits 31A, 31A, 31B, 31B around the four sides of the compound nozzle 26.
Is a modified example in which is formed. 16 is a cross-sectional view taken along the line AA of FIG. In this modified example, as shown in FIG. 15, the slits 31A and 31A as the first slits that are paired in the a direction with the compound nozzle 26 interposed therebetween are formed so as to be perpendicular to the a direction. Slits 31B and 31B as a second slit forming a pair arranged in the b direction with 26 in between are formed so as to be perpendicular to the b direction. Also, the slit 31A is set to be long,
The slit 31B is set to be short. This variation is
When the nozzle base 24 and the adhesive layer 25 have large thermal deformation in the a direction and small thermal deformation in the b direction, they have an effect of preventing distortion of the composite nozzle 26.

Further, in the above modification, the nozzle base 24
Although the slits 31A and 31B are formed in the adhesive layer 25, the slit 32 may be formed only in the nozzle base 24 as shown in FIG. 17, or the slit 33 may be formed only in the adhesive layer 25 as shown in FIG. May be formed. The slits 31A, 31B, 32, and 33 described above are set to have the same length even if the slits 31A, 31B, 32, and 33 have different lengths around the composite nozzle 26 depending on the thermal deformation characteristics of the nozzle base 24 and the adhesive layer 25. You may.

Further, in the above-mentioned embodiment, the piezoelectric / electrostrictive element 23 is applied as the micro pump, but it is of course possible to use other driving means for changing the pressure in the cavity 27.

In the above-mentioned embodiment, the adhesive layer 2
The adhesive No. 5 wets up on the inner surface of the flow path terminating nozzle 16A of the lower surface plate 16 to form the extended portion 25A, but it goes without saying that the present invention is applied even when the extended portion 25A is not formed.

Further, as shown in FIG. 19, the bottom plate 16
In the lower part of the inner wall of the flow path terminating nozzle 16A, a stepped stopper portion 16B may be formed in advance so as to circulate in order to control the wet-up position of the adhesive.

Although the flow path substrate 11 and the actuator section 12 are formed by using three ceramic layers in the above-described embodiments, these structures are not limited to this.

[0084]

According to the present invention, the Young's modulus Ea of the adhesive layer is
The Young's modulus Ea of the adhesive layer is lower than the Young's modulus Es of the nozzle base by setting the ratio (Es / Ea) of the nozzle base to the Young's modulus Es of the nozzle base to be 1.4 to 500, and the droplet ejection is accompanied. Thus, the adhesive layer absorbs the vibration of the nozzle substrate, and thus has the effect of stabilizing the meniscus of the droplet. Therefore, according to the present invention, the meniscus of the liquid droplets is stabilized, so that there is an effect of improving the precision of the liquid droplets to be ejected.

Further, according to the present invention, since the melted adhesive in the adhesive layer is made of a material having a good wettability with respect to the flow channel substrate, the protruding adhesive is part of the smooth composite nozzle in the flow channel substrate. Forming a stretched part. Since the stretched portion is formed in the flow channel substrate in this manner, the pressure loss between the flow channel substrate and the adhesive layer can be reduced, and the discharged droplets can be accurately dropped at a predetermined position. Since the joint area between the flow path substrate and the adhesive layer can be increased, the strength and rigidity of the composite nozzle can be increased, and the droplet discharge speed and the droplet discharge position accuracy can be increased.

Further, according to the present invention, since the nozzles are formed on the nozzle base and the adhesive layer at the same time, the nozzles of the nozzle base and the nozzles of the adhesive layer are not displaced from each other, and the ejection direction of the liquid droplets is the axis. A bilaterally symmetric compound nozzle can be easily manufactured.

Further, according to the droplet discharge device of the present invention, since the discharge direction of the droplets can be accurately defined, for example, when the droplets are dropped to form the droplet spots of the predetermined arrangement, the positional accuracy can be improved. A high droplet spot can be formed.

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view of a droplet discharge device showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a droplet discharge device showing an embodiment of the present invention.

FIG. 3 is a plan view of a droplet discharge device showing an embodiment of the present invention.

FIG. 4 is a bottom view of the droplet discharge device showing the embodiment of the present invention.

FIG. 5 is a cross-sectional view of a composite nozzle showing an embodiment of the present invention.

FIG. 6 is a process cross-sectional view showing a manufacturing process of the composite nozzle according to the embodiment of the present invention.

FIG. 7 is a process cross-sectional view showing a manufacturing process of the composite nozzle according to the embodiment of the present invention.

FIG. 8 is a process cross-sectional view illustrating a manufacturing process of the composite nozzle according to the embodiment of the present invention.

FIG. 9 is a cross-sectional view showing the method of manufacturing the droplet discharge device according to the embodiment of the present invention.

FIG. 10 is a process cross-sectional view showing another manufacturing method of the droplet discharge device showing the embodiment of the invention.

FIG. 11 is a process cross-sectional view showing another manufacturing method of the droplet discharge device showing the embodiment of the invention.

FIG. 12 is a process cross-sectional view showing another manufacturing method of the droplet discharge device showing the embodiment of the invention.

FIG. 13 is a process cross-sectional view showing another manufacturing method of the droplet discharge device showing the embodiment of the invention.

FIG. 14 is a process cross-sectional view showing another manufacturing method of the droplet discharge device showing the embodiment of the invention.

FIG. 15 is a bottom view showing another embodiment of the compound nozzle according to the present invention.

16 is a cross-sectional view taken along the line AA of FIG.

FIG. 17 is a sectional view showing a modified example of another embodiment of the compound nozzle according to the present invention.

FIG. 18 is a cross-sectional view showing a modified example of another embodiment of the compound nozzle according to the present invention.

FIG. 19 is a sectional view showing a modified example of the embodiment of the composite nozzle according to the present invention.

[Explanation of symbols]

10 Droplet ejection device 11 Flow path substrate 12 Actuator part 14 Fluid introduction part 14A liquid inlet 15 Micro Pipette 16 Bottom plate 16A fluid end nozzle 23 Piezoelectric / electrostrictive element 24 nozzle substrate 24A discharge nozzle 25 Adhesive layer 26 compound nozzle 31A, 31B, 32, 33 slits

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hirofumi Mizuno             2-56, Sudacho, Mizuho-ku, Nagoya-shi, Aichi             Inside Hon insulator Co., Ltd. (72) Inventor, Juichi Hirota             2-56, Sudacho, Mizuho-ku, Nagoya-shi, Aichi             Inside Hon insulator Co., Ltd. F-term (reference) 2C057 AF09 AF30 AF41 AG02 AG33                       AG44 AP12 AP13 AP23 AP25                       AQ03 AQ06 BA03 BA14

Claims (23)

[Claims] 1. A nozzle base having a discharge nozzle formed thereon is attached to a flow passage base having a flow passage so that the flow passage and the discharge nozzle communicate with each other via an adhesive layer, A composite nozzle characterized in that a ratio (Es / Ea) of the Young's modulus Ea of the layer and the Young's modulus Es of the nozzle base is 1.4 to 500. 2. A flow path base is provided with an extending portion that circulates along an inner surface and extends toward the upstream side of the flow path at the downstream end of the flow path in which the fluid flows, An adhesive layer adhered along the lower surface of the flow path base and a discharge nozzle for discharging and dropping a fluid are formed, and the discharge nozzle is connected via the adhesive layer so as to communicate with the downstream end. A composite nozzle comprising: a nozzle base adhered to a lower surface of a flow path base. 3. The composite nozzle according to claim 2, wherein the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle base.
A composite nozzle having a ratio (Es / Ea) of 1.4 to 500. 4. The composite nozzle according to claim 2 or 3, wherein the opening diameter dimension changes from the extending portion toward the discharge nozzle so as to be constantly reduced along the discharge direction. A composite nozzle characterized by 5. The composite nozzle according to claim 1, wherein the adhesive forming the adhesive layer has good wettability in a molten state with respect to the flow path substrate. A composite nozzle. 6. The composite nozzle according to claim 5, wherein a stopper portion that controls the flow of the adhesive is formed in the flow path substrate. 7. The composite nozzle according to claim 6, wherein a slit is formed around the discharge nozzle of the nozzle base and / or the adhesive layer. 8. The composite nozzle according to claim 7, wherein the slit is formed perpendicularly to a direction in which thermal deformation of the nozzle base and / or the adhesive layer is large. nozzle. 9. The composite nozzle according to claim 7, wherein the slit has a first slit formed to be perpendicular to a direction in which the nozzle base and / or the adhesive layer has large thermal deformation, and the slit has thermal deformation. A second slit formed so as to be perpendicular to the smaller direction, and the first slit is set to be longer than the second slit. 10. An introducing path for introducing a liquid material, a pressurizing chamber provided with a micropump for pressurizing the liquid material introduced from the introducing path, and pressurization by the micropump in the pressurizing chamber. A nozzle base having a discharge nozzle formed so as to communicate with the outlet passage is attached to an apparatus main body having an outlet passage through which the liquid material is led out via an adhesive layer, and the adhesive A droplet discharge device characterized in that a ratio (Es / Ea) of Young's modulus Ea of the layer and Young's modulus Es of the nozzle substrate is 1.4 to 500. 11. An introducing path for introducing a liquid material, a pressurizing chamber provided with a micropump for pressurizing the liquid material introduced from the introducing path, and a pressurization by a micropump in the pressurizing chamber. A nozzle base having a discharge nozzle formed so as to communicate with the discharge path is attached to an apparatus main body having a discharge path through which the liquid material is discharged, and an adhesive layer is formed. A droplet discharge device having an extending portion that extends along the inner surface of the lead-out path and is extended. 12. The droplet discharge device according to claim 11, wherein the opening diameter dimension between the inner side surface of the extending portion and the inner side surface of the discharge nozzle is constantly reduced toward the discharge direction. A droplet discharge device characterized in that it is changing. 13. The liquid droplet ejection apparatus according to claim 10, wherein a slit is formed around the ejection nozzle in the nozzle base and / or the adhesive layer. A droplet discharge device characterized by: 14. The droplet discharge device according to claim 13, wherein the slit is formed perpendicularly to a direction in which thermal deformation of the nozzle base body and / or the adhesive layer in which the slit is formed is large. A droplet discharge device characterized in that. 15. The liquid droplet ejecting apparatus according to claim 13, wherein the slit is formed so as to be perpendicular to a direction in which the nozzle base and / or the adhesive layer in which the slit is formed has large thermal deformation. Droplets comprising: a first slit and a second slit formed so as to be perpendicular to a direction in which thermal deformation is small, and the first slit is set to be longer than the second slit. Discharge device. 16. A laminated body is produced by laminating a plate-shaped nozzle base and an adhesive layer, and then punching is performed from the adhesive layer side to form a nozzle portion in the laminated body, and the laminated body is formed. Is bonded so that the nozzle portion communicates with the flow channel of the flow channel substrate having the flow channel formed therein. 17. The method of manufacturing a composite nozzle according to claim 16, wherein the punching is performed by irradiating a laser from the adhesive layer side of the laminate. 18. The method of manufacturing a composite nozzle according to claim 16 or 17, wherein the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle base.
And the ratio (Es / Ea) is 1.4 to 500. 19. The method for manufacturing a composite nozzle according to claim 16, wherein the adhesive constituting the adhesive layer has a wettability in a molten state with respect to the flow path substrate. A method of manufacturing a composite nozzle, which is characterized in that 20. A plate-shaped nozzle base and an adhesive layer are attached to each other to form a laminated body, and then a hole is processed from the adhesive layer side to form a nozzle portion on the laminated body. An introduction path to be introduced, a pressurization chamber provided with a micropump for pressurizing the liquid material introduced from the introduction path, and the liquid material is drawn out by pressurization by the micropump in the pressurization chamber. A method for manufacturing a droplet discharge device, characterized in that the laminated body is bonded to an apparatus main body having a lead-out path so that the nozzle portion and the lead-out path communicate with each other. 21. The method of manufacturing a droplet discharge device according to claim 20, wherein in the drilling process, laser irradiation is performed from the adhesive layer side of the laminate. Production method. 22. A method of manufacturing a droplet discharge device according to claim 20 or 21, wherein the Young's modulus Ea of the adhesive layer and the Young's modulus Es of the nozzle base body.
And a ratio (Es / Ea) thereof is 1.4 to 500. 23. The method of manufacturing a droplet discharge device according to claim 20, wherein the adhesive forming the adhesive layer has a wettability in a molten state of the lead-out path. A method for manufacturing a droplet discharge device, which is good for the inner wall.