JP2003065729A - Method and device for measuring inside diameter of hole of ferrule or the like - Google Patents

Method and device for measuring inside diameter of hole of ferrule or the like

Info

Publication number
JP2003065729A
JP2003065729A JP2001260007A JP2001260007A JP2003065729A JP 2003065729 A JP2003065729 A JP 2003065729A JP 2001260007 A JP2001260007 A JP 2001260007A JP 2001260007 A JP2001260007 A JP 2001260007A JP 2003065729 A JP2003065729 A JP 2003065729A
Authority
JP
Japan
Prior art keywords
hole
image data
image
center
ferrule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001260007A
Other languages
Japanese (ja)
Other versions
JP4789097B2 (en
Inventor
Hiroto Fujiwara
寛仁 藤原
Shinichiro Ikezawa
信一郎 池沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2001260007A priority Critical patent/JP4789097B2/en
Publication of JP2003065729A publication Critical patent/JP2003065729A/en
Application granted granted Critical
Publication of JP4789097B2 publication Critical patent/JP4789097B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To accurately measure the inside diameter of a hole of ferrule from a photographed image by removing noise information because of dusts or the like attaching to the hole. SOLUTION: A virtual center 30 of the hole is obtained in the photographed image 10 (10-1, 10-2, 10-3) of the hole of ferrule by using the Hough transform, and a masking operation for a circular ring is carried out in the width between values of the design radius ±R from the center 30, and the least square method is used for a photographed image of hole 10-4 which is a portion in a region 40 being not masked in the photographed image 10 of the hole, and then the inside diameter and the center of the hole 70 are obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、光ファイバーコ
ネクタ等に使用されるフェルールのファイバー挿通孔に
代表される、微小な孔の内径測定方法および装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for measuring the inner diameter of a minute hole, which is represented by a fiber insertion hole of a ferrule used for an optical fiber connector or the like.

【0002】[0002]

【従来の技術】一般に、図4に示すように、ZrO2
の材料からなるフェルール100には、光ファイバーを
組み込むために、中心に直径125μm程の微小な孔2
00が開いている。この孔200の精度が光ファイバー
コネクタの性能を決定する。そのため、孔200の高精
度加工技術とともに、孔径の高精度測定技術が求められ
ている。
2. Description of the Related Art Generally, as shown in FIG. 4, a ferrule 100 made of a material such as ZrO.sub.2 has a small hole 2 with a diameter of 125 .mu.m at its center for incorporating an optical fiber.
00 is open. The accuracy of this hole 200 determines the performance of the fiber optic connector. Therefore, in addition to the high-precision processing technique for the hole 200, a high-precision measurement technique for the hole diameter is required.

【0003】孔径の測定は、通常、次の方法が用いられ
ている。
The following method is usually used to measure the pore size.

【0004】そのひとつの方法は、フェルール100を
正面から撮影し、撮像したフェルールの孔200の画像
データを得、この画像データから最小自乗法を用いて円
形の孔の中心と半径を算出して、これを孔径の測定値と
する方法である。撮像した孔画像に特別の欠陥がなく、
設計値に近い形状の孔画像である場合は、この最小自乗
法による孔径測定は精度がよく、±0.02μm程度の
ばらつきで測定が可能である。
One of the methods is to image the ferrule 100 from the front, obtain image data of the imaged hole 200 of the ferrule, and calculate the center and radius of the circular hole from this image data using the least square method. This is a method of using this as the measured value of the pore diameter. There is no special defect in the captured hole image,
In the case of a hole image having a shape close to the design value, the hole diameter measurement by the least square method has high accuracy and can be measured with a variation of about ± 0.02 μm.

【0005】ところで、フェルール100の孔加工工程
では、孔の縁の欠け(図3(a)の10−2)等による
孔ビツやゴミの付着(図3(a)の10−3)が発生す
ることがある。
By the way, in the hole forming process of the ferrule 100, hole bites and dust adherence (10-3 in FIG. 3A) are generated due to chipping of the edge of the hole (10-2 in FIG. 3A). I have something to do.

【0006】このような孔ビツ10−2やゴミの付着1
0−3がある場合は、撮像した画像に、図3(a)に示
すように、孔ビツやゴミの付着の像が加わり、いわゆる
雑音情報となって、正確な孔径の測定はできなくなると
いう問題がある。
[0006] Such a hole bit 10-2 and adhesion of dust 1
If there is 0-3, as shown in FIG. 3A, an image of hole bits or dust adhesion is added to the captured image, so-called noise information is given, and accurate measurement of the hole diameter is impossible. There's a problem.

【0007】一方、雑音情報が含まれる画像から円を抽
出する方法として、一般に、ハフ(Hough)変換を
用いる方法が知られている。この方法では、上記のよう
な孔ビツ10−2やゴミの付着10−3がある孔200
の画像10−1から、孔ビツ10−2やゴミの付着10
−3による雑音情報を取り除いて、孔の中心、半径を求
めることができる。しかし、この方法では、画像となる
孔の全エッジ情報から孔の中心を求めることになるた
め、測定精度は測定装置の能力(分解能)に左右され、
最小自乗法による測定と同じ環境において、真円に近い
フェルールの孔を測定した場合でも、±0.5μm程度
のばらつきがでる、という問題がある。
On the other hand, as a method for extracting a circle from an image including noise information, a method using Hough transform is generally known. In this method, the hole 200 having the hole bits 10-2 and the dust adhesion 10-3 as described above is provided.
From the image 10-1 of the above, from the hole bit 10-2 and the adhesion of dust 10
By removing the noise information by -3, the center and radius of the hole can be obtained. However, in this method, since the center of the hole is obtained from all the edge information of the hole forming the image, the measurement accuracy depends on the ability (resolution) of the measuring device,
There is a problem that even if a hole of a ferrule close to a perfect circle is measured in the same environment as the measurement by the method of least squares, a variation of about ± 0.5 μm appears.

【0008】すなわち、部分的孔ビツやゴミの付着によ
る雑音情報がある場合、フェルールの孔の内径を±0.
02μm程度の高精度で測定することは不可能であっ
た。
That is, when there is noise information due to partial hole bits or dust adhesion, the inner diameter of the hole of the ferrule is ± 0.
It was impossible to measure with a high accuracy of about 02 μm.

【0009】[0009]

【発明が解決しようとする課題】この発明は、以上の課
題を解決するものであって、その目的は、孔ビツやゴミ
の付着のあるフェルール孔等の小径孔の内径を高精度で
測定可能なフェルール孔等の内径測定方法および装置を
提供するものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and its object is to measure the inner diameter of a small diameter hole such as a hole or a ferrule hole with dust adhering thereto with high accuracy. The present invention provides a method and an apparatus for measuring the inner diameter of a ferrule hole or the like.

【0010】[0010]

【課題を解決するための手段】上記目的を達成するため
に、この発明のフェルール孔の内径測定方法は、フェル
ールの孔を撮影し、この撮影した孔の画像データにハフ
変換を用いて上記孔の仮想中心を求め、上記孔の仮想中
心から上記孔の半径設計値に微小幅を持たせた円環以外
の領域をマスク領域として上記画像の画像データにマス
ク処理を行い、上記画像データのうち上記円環に入る画
像データを対象に最小自乗法を用いて孔径と中心を求め
るものである。
In order to achieve the above object, the method for measuring the inner diameter of a ferrule hole according to the present invention is such that the hole of a ferrule is photographed, and the Hough transformation is applied to the image data of the photographed hole. The virtual center of the hole is calculated, and the image data of the image is masked by using a region other than a ring having a small width in the radius design value of the hole from the virtual center of the hole as a mask region. The hole diameter and the center are obtained by using the least squares method for the image data contained in the ring.

【0011】また、この発明の小径の孔の内径測定方法
は、小径の孔を撮影し、この撮影した孔の画像データに
ハフ変換を用いて上記孔の仮想中心を求め、上記孔の仮
想中心から上記孔の半径設計値に微小幅を持たせた円環
以外の領域をマスク領域として上記画像の画像データに
マスク処理を行い、上記画像データのうち上記円環に入
る画像データを対象に最小自乗法を用いて孔径と中心を
求めるものである。
Further, according to the method of measuring the inner diameter of a small hole of the present invention, the small hole is photographed, the virtual center of the hole is obtained by using Hough transform on the image data of the photographed hole, and the virtual center of the hole is calculated. From the above, the image data of the above image is masked by using a region other than the ring having a small width in the radius design value of the hole as a mask region, and the minimum of the image data of the above image data that falls within the ring is targeted. The square method is used to find the hole diameter and center.

【0012】また、この発明のフェルール孔の内径測定
装置は、フェルールの孔を撮影する撮像手段と、この撮
像手段により撮影した孔の画像データにハフ変換を用い
て上記孔の仮想中心を算出する仮想中心算出手段と、こ
の仮想中心算出手段により得た孔の仮想中心から上記孔
の半径設計値に微小幅を持たせた円環データを算出する
円環データ算出手段と、この円環データ算出手段により
得た円環データ以外の領域をマスク領域として上記画像
データにマスク処理を行う、マスク処理手段と、上記画
像データのうち上記円環データに含まれる画像データを
対象に最小自乗法を用いて孔径と中心を算出する内径算
出手段とを具備するものである。
Further, the ferrule hole inner diameter measuring device of the present invention calculates the virtual center of the hole by using image pickup means for photographing the hole of the ferrule and Hough transform on the image data of the hole photographed by the image pickup means. A virtual center calculating means, a ring data calculating means for calculating ring data in which the radius design value of the hole is given a small width from the virtual center of the hole obtained by the virtual center calculating means, and the ring data calculating A mask processing means is used for masking the image data by using an area other than the ring data obtained by the means as a mask area, and a least square method is used for the image data included in the ring data among the image data. And an inner diameter calculating means for calculating the hole diameter and the center.

【0013】この発明においては、画像処理による孔の
内径測定において、ゴミや、部分的欠損等の雑音情報を
受けずに高精度の内径が得られる。
According to the present invention, when measuring the inner diameter of a hole by image processing, a highly accurate inner diameter can be obtained without receiving noise information such as dust and partial defects.

【0014】[0014]

【発明の実施の形態】この発明のフェルール孔の内径測
定に実施した一実施形態を図面を参照して説明する。
BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention for measuring the inner diameter of a ferrule hole will be described with reference to the drawings.

【0015】図1は、この発明のフェルール孔の内径測
定方法を示すフローチャート、図2は、この発明のフェ
ルール孔の内径測定装置の構成を示すブロック図、図3
は、この発明のフェルール孔の内径測定方法による測定
プロセスを説明する説明図である。
FIG. 1 is a flow chart showing a method for measuring the inner diameter of a ferrule hole according to the present invention, and FIG. 2 is a block diagram showing the structure of an inner diameter measuring device for a ferrule hole according to the present invention.
FIG. 4 is an explanatory view illustrating a measurement process by the method for measuring the inner diameter of a ferrule hole according to the present invention.

【0016】フェルール孔200の内径測定を行うに
は、先ず、フェルールを測定台上に載置し、その正面か
ら孔200のエッジ10−1をCCDカメラ等の撮像手
段1により撮影する(ステップ101、孔の画像撮
像)。
In order to measure the inner diameter of the ferrule hole 200, first, the ferrule is placed on the measuring table, and the edge 10-1 of the hole 200 is photographed from its front by the image pickup means 1 such as a CCD camera (step 101). , Hole image pickup).

【0017】次に、ステップ102で、孔仮想中心算出
手段2により、この撮影した孔200の画像データにハ
フ変換を用いて孔の仮想中心を求める。すなわち、ステ
ップ102では、この実施形態では、5画素×5画素を
単位としたメッシュで、撮影した孔の画像を分割し、孔
の画像の線分が存在する全てのメッシュmijについて、
その線分の法線を算出し、予め設定した設計上の孔の中
心付近の仮想中心サーチ領域内のひとつひとつのメッシ
ュについて、そこを通過する上記法線の数(法線通過頻
度)kxyを計数する。
Next, at step 102, the virtual center of the hole is calculated by the virtual hole center calculating means 2 using Hough transform on the image data of the photographed hole 200. That is, in step 102, in this embodiment, the image of the photographed hole is divided with a mesh of 5 pixels × 5 pixels as a unit, and all the meshes m ij in which the line segment of the hole image exists
The normal line of the line segment is calculated, and for each mesh in the virtual center search area near the center of the preset design hole, the number of normal lines passing therethrough (normal line passing frequency) k xy is calculated. Count.

【0018】図3(a)の加工された正規のエッジ部分
10−1の法線は、仮想中心サーチ領域内の中央付近に
集まる。また、欠損部分10−2の大部分の法線は、仮
想中心サーチ領域を通過せず、図のゴミ付着部分10−
3の法線は、図に示した形状のゴミの場合は、互いに平
行線に近くなり、仮想中心サーチ領域内を通過しても、
その中で1点に集中することがない。従って、法線通過
頻度kxyは、エッジ部分10−1の法線が集中する部分
で最大値を示すことになる。欠損部分10−2やゴミ付
着部分10−3の形状によっては、これらの法線が仮想
中心サーチ領域内で別の場所に集中して法線通過頻度k
xyの極大値を示すことはあるが、最大値はエッジ部分1
0−1の法線が集中する部分となる。
The normal line of the processed regular edge portion 10-1 of FIG. 3 (a) gathers near the center in the virtual center search area. Further, most of the normal line of the defective portion 10-2 does not pass through the virtual center search area, and the dust adhering portion 10-
In the case of dust having the shape shown in the figure, the normal line 3 is close to parallel lines, and even if it passes through the virtual center search area,
There is no focus on one point. Therefore, the normal passage frequency k xy has the maximum value in the portion where the normals of the edge portion 10-1 are concentrated. Depending on the shapes of the defective portion 10-2 and the dust adhering portion 10-3, these normals are concentrated at another place in the virtual center search area and the normal passage frequency k.
It may show the maximum value of xy , but the maximum value is edge part 1
It becomes a part where the normal line of 0-1 is concentrated.

【0019】そこで、法線通過頻度kxyが最大値となっ
たメッシュの中心をハフ変換による仮想中心30(図3
(b))とする。
Therefore, the center of the mesh having the maximum normal passage frequency k xy is the virtual center 30 by the Hough transform (see FIG. 3).
(B)).

【0020】この仮想中心30は、孔200の実際の中
心に近いけれども、従来の技術で説明したように、±
0.5μm程度のばらつきがでて、正確な中心とはずれ
ていることが多い。そこで、次のプロセスを経て、より
精度の高い内径測定を行う。
Although the virtual center 30 is close to the actual center of the hole 200, as described in the prior art, ±
In many cases, there is a variation of about 0.5 μm, which is deviated from the accurate center. Therefore, the inner diameter is measured with higher accuracy through the following process.

【0021】加工された孔200の半径は、設計半径に
近似しているはずである。そこで、この発明では、孔の
画像データのうち、上記仮想中心から設計半径に近い画
像データのみを採用して、この設計半径に近い画像デー
タから最小自乗法で孔200の中心と半径を求めるので
ある。その方法を、以下に詳細に説明する。
The radius of the machined hole 200 should be close to the design radius. Therefore, in the present invention, of the image data of the hole, only the image data close to the design radius from the virtual center is adopted, and the center and radius of the hole 200 are obtained from the image data close to the design radius by the least square method. is there. The method will be described in detail below.

【0022】一般に、撮像による内径測定装置の測定精
度の限界は、その撮像装置の分解能により定まり、被測
定物のセッティングの再現性等によっても影響を受け
る。フェルール内径測定の場合、現在の測定レベルで
は、最小自乗法を用いた場合で、±0.02μm程度が
限界となっている。
Generally, the limit of the measurement accuracy of the inner diameter measuring device by imaging is determined by the resolution of the imaging device and is also affected by the reproducibility of the setting of the object to be measured. In the case of the ferrule inner diameter measurement, at the current measurement level, the limit is about ± 0.02 μm when the least square method is used.

【0023】上記の最小自乗法処理の対象とする画像デ
ータは、設計半径に極く近い範囲のものに絞るのが、精
度向上のためには好ましいものであるけれども、ハフ変
換で求められる精度が±0.5μmであり、±0.5μ
m程度のばらつきが生じるので、これよりも狭い範囲に
まで絞っても、上記した測定精度の限界から、実際上無
意味となる。
Although it is preferable to narrow down the image data to be subjected to the above least squares method processing to a range very close to the design radius in order to improve the accuracy, the accuracy required by the Hough transform is high. ± 0.5μm, ± 0.5μ
Since a variation of about m occurs, even if the range is narrowed to a narrower range, it is practically meaningless due to the above-mentioned limit of measurement accuracy.

【0024】そこで、この発明では、使用する測定装置
の精度限界、すなわち、測定精度を確認しておき、この
測定精度よりもやや大きい値、例えば、±0.5〜0.
7μm(±R)を予め設定しておく。そして、図2の円
環データ算出手段3において、孔仮想中心算出手段2に
より求められた仮想中心30と、上記±Rと、孔200
の半径設計値4とから、孔200の半径設計値4に微小
幅2Rを持たせた円環データを算出する(図1のステッ
プ103、マスクパターン算出)。
Therefore, in the present invention, the accuracy limit of the measuring device used, that is, the measurement accuracy is confirmed, and a value slightly larger than this measurement accuracy, for example, ± 0.5 to 0.
7 μm (± R) is preset. Then, in the ring data calculation means 3 of FIG. 2, the virtual center 30 obtained by the virtual hole center calculation means 2, the above ± R, and the hole 200.
From the radius design value 4 of the above, the ring design data in which the radius design value 4 of the hole 200 has a minute width 2R is calculated (step 103 in FIG. 1, mask pattern calculation).

【0025】この円環データを使用して、孔画像マスク
処理手段6では、図3(c)のように、円環40以外の
領域をマスク領域50、60として上記画像の画像デー
タにマスク処理を行う。これにより、マスクされない円
環領域40内に、設計上の円20に近い部分の円弧で構
成される孔10−4の画像データが得られる。
Using this ring data, the hole image mask processing means 6 masks the image data of the image as the mask regions 50 and 60, except for the ring 40, as shown in FIG. 3C. I do. As a result, the image data of the hole 10-4 constituted by the arc of the portion close to the designed circle 20 is obtained in the unmasked annular region 40.

【0026】この円環40に入る画像データは、ゴミ等
の雑音情報を取り除いたことにより一部欠けていること
が多いが、孔算出手段(内径算出手段)7において、こ
れを対象に最小自乗法を用いて±0.02μm程の精度
のよい孔径と中心を求めることができる(図1のステッ
プ105、マスクされずに残った孔の画像から最小自乗
法で孔を算出)。
The image data that enters the ring 40 is often partly missing due to the removal of noise information such as dust. In the hole calculating means (inner diameter calculating means) 7, the minimum data is targeted for this. By using the multiplication method, it is possible to obtain the accurate hole diameter and center of about ± 0.02 μm (step 105 in FIG. 1, the hole is calculated by the least square method from the image of the holes left unmasked).

【0027】上述の実施の形態では、フェルールの孔の
内径測定について説明したが、この発明は、その他の直
径0.1〜1mm程度の小径の孔の内径測定にも適用し
て、ゴミ等による画像データの雑音情報を除去して高精
度の測定を行うことができる。
In the above embodiment, the measurement of the inner diameter of the hole of the ferrule has been described. However, the present invention is also applicable to the measurement of the inner diameter of other small holes having a diameter of about 0.1 to 1 mm, which may be caused by dust or the like. It is possible to remove noise information of image data and perform highly accurate measurement.

【0028】[0028]

【発明の効果】以上の説明により明らかなように、この
発明は、フェルールの孔等の微小な孔を撮影し、この撮
影した孔の画像データにハフ変換を用いて上記孔の仮想
中心を求め、上記孔の仮想中心から上記孔の半径設計値
に微小幅を持たせた円環以外の領域をマスク領域として
上記画像の画像データにマスク処理を行い、上記画像デ
ータのうち上記円環に入る画像データを対象に最小自乗
法を用いて孔径と中心を求めるようにしたから、ゴミの
付着などによる雑音情報を除去して、微小孔の高精度な
内径測定が可能となった。
As is apparent from the above description, according to the present invention, a minute hole such as a hole of a ferrule is photographed and the virtual center of the hole is obtained by using Hough transform on the image data of the photographed hole. The image data of the image is masked by using a region other than a ring having a small design radius of the hole from the virtual center of the hole as a mask region, and enters the ring of the image data. Since the hole diameter and the center are obtained by using the least squares method for the image data, it is possible to remove the noise information due to dust adhesion and to measure the inner diameter of the minute hole with high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明のフェルール孔の内径測定方法を示す
フローチャート。
FIG. 1 is a flowchart showing a method for measuring the inner diameter of a ferrule hole according to the present invention.

【図2】この発明のフェルール孔の内径測定装置の構成
を示すブロック図。
FIG. 2 is a block diagram showing the configuration of a ferrule hole inner diameter measuring device according to the present invention.

【図3】(a)〜(d)は、この発明のフェルール孔の
内径測定方法による測定プロセスを説明する説明図。
3 (a) to 3 (d) are explanatory views for explaining a measurement process by the method for measuring the inner diameter of a ferrule hole according to the present invention.

【図4】一般的なフェルールを示し、(a)は縦断面
図、(b)は正面図。
FIG. 4 shows a general ferrule, in which (a) is a longitudinal sectional view and (b) is a front view.

【符号の説明】[Explanation of symbols]

1 撮像手段 2 孔過疎中心算出手段 3 円環データ算出手段 6 孔画像マスク処理手段 7 孔算出手段 10 孔画像 10−1 加工された孔のエッジ画像 10−2 欠損部の画像 10−3 ゴミ付着部の画像 10−4 マスクされない領域内の孔画像 20 設計上の円(内径) 30 仮想中心 40 マスクされない円環領域 50、60 マスク領域 70 (最小自乗法により)算出された孔 100 フェルール 200 孔 1 Imaging means 2 hole depopulation center calculation means 3 Circle data calculation means 6 hole image mask processing means 7 hole calculation means 10 hole image 10-1 Edge image of processed hole 10-2 Image of missing part 10-3 Image of dust adhesion part 10-4 Hole image in unmasked area 20 Design circle (inner diameter) 30 virtual center 40 Unmasked circular region 50, 60 mask area 70 calculated hole (by least squares method) 100 ferrules 200 holes

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F065 AA17 AA27 BB08 CC23 DD13 FF04 FF61 JJ03 JJ26 QQ18 QQ21 QQ29 QQ31 QQ37 RR08 2H036 QA12    ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F065 AA17 AA27 BB08 CC23 DD13                       FF04 FF61 JJ03 JJ26 QQ18                       QQ21 QQ29 QQ31 QQ37 RR08                 2H036 QA12

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 フェルールの孔を撮影し、 この撮影した孔の画像データにハフ変換を用いて上記孔
の仮想中心を求め、 上記孔の仮想中心から上記孔の半径設計値に微小幅を持
たせた円環以外の領域をマスク領域として上記画像の画
像データにマスク処理を行い、 上記画像データのうち上記円環に入る画像データを対象
に最小自乗法を用いて孔径と中心を求めるフェルール孔
の内径測定方法。
1. An image of a hole of a ferrule is taken, a virtual center of the hole is obtained by using Hough transform on image data of the taken hole, and a design radius of the hole has a minute width from the virtual center of the hole. The image data of the above image is masked using a region other than the circle formed as a mask region, and the hole diameter and center are obtained by using the least squares method for the image data that falls within the circle of the above image data. Inner diameter measurement method.
【請求項2】 小径の孔を撮影し、 この撮影した孔の画像データにハフ変換を用いて上記孔
の仮想中心を求め、 上記孔の仮想中心から上記孔の半径設計値に微小幅を持
たせた円環以外の領域をマスク領域として上記画像の画
像データにマスク処理を行い、 上記画像データのうち上記円環に入る画像データを対象
に最小自乗法を用いて孔径と中心を求める小径の孔の内
径測定方法。
2. A small-diameter hole is photographed, the virtual center of the hole is obtained by using Hough transformation on the image data of the photographed hole, and the radius design value of the hole has a minute width from the virtual center of the hole. The image data of the image is masked by using a region other than the circle formed as a mask region, and the hole diameter and the center of the image data of the image data that falls within the circle are obtained by using the least square method. How to measure the inner diameter of a hole.
【請求項3】 フェルールの孔を撮影する撮像手段と、 この撮像手段により撮影した孔の画像データにハフ変換
を用いて上記孔の仮想中心を算出する仮想中心算出手段
と、 この仮想中心算出手段により得た孔の仮想中心から上記
孔の半径設計値に微小幅を持たせた円環データを算出す
る円環データ算出手段と、 この円環データ算出手段により得た円環データ以外の領
域をマスク領域として上記画像データにマスク処理を行
う、マスク処理手段と、 上記画像データのうち上記円環データに含まれる画像デ
ータを対象に最小自乗法を用いて孔径と中心を算出する
内径算出手段とを具備するフェルール孔の内径測定装
置。
3. An image pickup means for photographing a hole of a ferrule, a virtual center calculation means for calculating a virtual center of the hole by using Hough transform on image data of the hole photographed by the image pickup means, and a virtual center calculation means. A ring data calculation means for calculating ring data in which the radius design value of the hole is given a minute width from the virtual center of the hole obtained by, and an area other than the ring data obtained by this ring data calculation means. Masking means for performing a masking process on the image data as a mask area, and an inner diameter calculating means for calculating the hole diameter and the center using the least square method for the image data included in the ring data of the image data. An inner diameter measuring device for a ferrule hole, comprising:
JP2001260007A 2001-08-29 2001-08-29 Method and apparatus for measuring inner diameter of ferrule hole, etc. Expired - Fee Related JP4789097B2 (en)

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