JP2003057207A - Semiconductor particle-identifying apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor particle-identifying apparatus that utilizes a semiconductor particle composed of a plurality of types of semiconductor materials, that can individually identify particles, even if the types of a substance to be detected is very large without being affected by fluorescent signals for detecting organic substances in the detection of the organism substances, and can perform multiple analysis that can be applied to a very large number of affinity combinations. SOLUTION: The semiconductor particle-identifying apparatus comprises a pipeline that is passed through the inside of semiconductor particles, a magnetic field generation means for generating a magnetic field in the pipeline, and an eddy current detection means for detecting eddy currents that are generated in the semiconductor particles in the pipeline, and then identifies the semiconductor particles using the value of the eddy current that is detected by the eddy current detection means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for identifying semiconductor particles, which comprises semiconductor particles having different compositions and capable of adhering a genetic material or other target material to the surface thereof according to their resistance. The present invention relates to a semiconductor particle identification device that can be identified, separated, and applied to affinity binding.

[0002]

[Prior Art] In the evaluation of pharmaceutical, biological, and medical research,
Labeling, detection and analysis of biological materials such as DNA, cells, proteins and enzymes are very important.

In particular, detection and analysis have become indispensable in all recent medical diagnostics and pharmaceutical research, and chemically bind or attach various biochemical substances having selective labeling ability to the surface of substrates or particles. A general method is to optically detect / analyze a complex reaction product having affinity with a biochemical substance on the surface obtained by utilizing this substrate or particle in various mixing / reaction steps.

One limitation associated with current technology is that it can only perform separation detection based on one detected component at a time, potentially making multiple separations difficult, time consuming, and expensive. There is something to do.

This problem is common not only to biological research but also to drug delivery, diagnosis, and gene analysis. It is a simple, low-cost, large-scale parallel solution that solves the variety of biological detection types and amounts. A method capable of processing is desired.

Further, it is necessary to satisfy not only the high-speed analysis (or more information for each sample) and high sensitivity but also the needs for ease of use and low-cost assay.

For example, US Pat. 5,981,18
In 0, beads (also referred to as fine particles / particles) are individually labeled by combining a plurality of fluorescent dyes having different wavelengths and intensities, the fluorescence at each wavelength is measured, and the fluorescence caused by a biological substance reaction is detected. A technique has been disclosed in which an antigen-antibody reaction on the surface of each bead is detected while identifying each individual bead so that multiple analyzes can be performed on a plurality of types of biological substances at once.

[0008]

However, in the prior art as described above, a plurality of types of fluorescence detection are used for identification of individual beads, so that the fluorescence signal for bead identification is the fluorescence for biological substance detection. Since the signal becomes noise, it is not possible to support high-sensitivity measurement.

Further, in the above-mentioned conventional technique, since the wavelengths of the fluorescence signal for bead identification and the fluorescence signal for biological substance detection cannot be the same, the number of combinations of the wavelength types of the bead identification fluorescence signal is limited. There is a limit, and there is a problem that the number of multiple analyzes that can be performed at one time is limited.

The present invention has been made in view of the above circumstances, and utilizes semiconductor particles composed of a plurality of types of semiconductor materials, and does not affect the fluorescence signal for detecting a biological substance in the detection of a biological substance. An object of the present invention is to provide a semiconductor particle identification device capable of individually identifying particles even when the number of types of substances to be detected is very large, applicable to a huge number of affinity bonds and enabling multiple analysis. .

[0011]

According to the present invention, in order to solve the above-mentioned problems, (1) a conduit through which semiconductor particles pass, and a magnetic field generating means for generating a magnetic field inside the conduit. Eddy current detecting means for detecting an eddy current generated in the semiconductor particles in the conduit by the magnetic field generating means, and the semiconductor particles using the value of the eddy current detected by the eddy current detecting means. There is provided a semiconductor particle identification device characterized by identifying

(Corresponding Embodiment of the Invention) The embodiment relating to the present invention corresponds to the first and second embodiments described later.

(Operation) When a magnetic field is formed inside the conduit through which the semiconductor particles pass, an eddy current is generated in the semiconductor particles by the magnetic field.

This eddy current further acts on the external magnetic field by the electromagnetic induction effect.

Since the magnitude of the eddy current depends on the resistance of the semiconductor particles, if the electrical change around the semiconductor particles caused by the eddy current can be detected, the semiconductor particles can be individually identified.

According to the present invention, in order to solve the above-mentioned problems, (2) resistance value calculating means for calculating the resistance value of the semiconductor particles using the eddy current detected by the eddy current detecting means. Further provided is the semiconductor particle identifying device described in (1), characterized in that the semiconductor particles are identified by using the resistance value of the semiconductor particles calculated by the resistance value calculating means.

(Corresponding Embodiment of the Invention) The embodiment relating to the present invention corresponds to the first and second embodiments described later.

(Operation) When the magnetic field generating means forms a magnetic field inside the conduit, the magnetic field generates an eddy current in the semiconductor particles.

This eddy current is an amount that depends on the resistance of the semiconductor particles, and further acts on the external magnetic field by the electromagnetic induction effect. Therefore, it is necessary to detect the electrical change around the semiconductor particles and calculate the resistance of the semiconductor particles. This makes it possible to individually identify a plurality of semiconductor particles from the calculated resistance value of each semiconductor particle.

Further, according to the present invention, in order to solve the above problems, (3) the magnetic field generating means is a high frequency coil for generating a magnetic field in the conduit, and the eddy current detecting means is the high frequency wave. The semiconductor particle identification device according to (2) is characterized in that the eddy current is detected by detecting a change in the resonance state of the coil.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first embodiment described later.

(Operation) Since the high-frequency coil is a part of the components of the resonance circuit, when the semiconductor particles are present in the magnetic field in the conduit, the presence of the semiconductor particles causes The composite impedance of the high frequency coil changes depending on the resistance value, and the resonance state changes accordingly.

Therefore, the resistance of the semiconductor particles can be detected by detecting the change in the resonance state of the high frequency coil.

Further, according to the present invention, in order to solve the above-mentioned problems, (4) the high-frequency coil is two high-frequency coils provided to face each other with the conduit interposed therebetween ( A semiconductor particle identification device according to 3) is provided.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first embodiment described later.

(Operation) Since the two high-frequency coils are arranged so as to sandwich the pipeline, a magnetic field that crosses the pipeline is generated.

Further, according to the present invention, in order to solve the above problems (5), the high frequency coil is two high frequency coils provided on the outer circumference of the conduit. A semiconductor particle identification device as described is provided.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first embodiment described later.

(Operation) Since the two high frequency coils are formed on the outer circumference of the conduit, a magnetic field is generated along the conduit.

Further, according to the present invention, in order to solve the above problems, (6) a voltage detecting means for detecting a voltage generated in the high frequency coil is provided (3).
A semiconductor particle identification device according to claim 1 is provided.

Further, according to the present invention, in order to solve the above problems (7), a frequency detecting means for detecting the resonance frequency of the high frequency coil is provided (3).
A semiconductor particle identification device according to claim 1 is provided.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first embodiment described later.

According to the present invention, in order to solve the above-mentioned problems, (8) the magnetic field generating means are magnets provided so as to face each other so as to sandwich the pipe line, and the eddy current detecting means is The semiconductor particle identification device according to (1) is characterized in that an induced current generated by the semiconductor particles is detected.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the second embodiment described later.

(Operation) Since the magnets are arranged so as to sandwich the duct, a difference in magnetic flux density occurs before and after the semiconductor particles in the traveling direction, and an eddy current is generated in the semiconductor particles.

As a result of the interaction between the eddy current and the magnetic field, electromotive force due to electromagnetic induction is further generated around the semiconductor particles.

Here, the eddy current is related to the resistance of the semiconductor particles.

Therefore, the resistance of the semiconductor particles can be detected by detecting the induced electromotive force.

Further, according to the present invention, in order to solve the above-mentioned problems, (9) a pipe through which semiconductor particles pass, and a plurality of electrodes provided at spaced positions in the pipe are provided. Then, a semiconductor particle identification device characterized by identifying the semiconductor particles by detecting the resistance value between the plurality of electrodes is provided.

(Corresponding Embodiment of the Invention) An embodiment relating to the present invention corresponds to a third embodiment described later.

(Function) Apparently, when only the liquid is flowing in the conduit between the plurality of electrodes and when the semiconductor particles reach the conduit between the detection electrodes, The combined impedance between the electrodes changes.

Since the change in the combined impedance between the electrodes depends on the resistance of the semiconductor particles, the semiconductor particles can be individually identified by detecting the change in resistance.

According to the present invention, in order to solve the above-mentioned problems, (10) each of the semiconductor particles has a plurality of different resistance values which are made of a single semiconductor material or a combination of a plurality of semiconductor materials or semiconductor materials containing impurities. (1) to (9) characterized by being particles of
A semiconductor particle identification device according to any one of items 1 to 4 is provided.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first to third embodiments described later.

(Function) The resistance of the semiconductor particles can be varied in various ways depending on the type of semiconductor material, the type and content of impurities, the coating material on the particle surface, the particle size, and the like.

According to the present invention, in order to solve the above-mentioned problems, (11) the surface of each of the semiconductor particles is coated with a coating material of a different type, so that the semiconductor particles have a plurality of resistance values. There is provided a semiconductor particle identifying device according to any one of (1) to (9), characterized in that the semiconductor particle identifying device is a particle of a type.

Further, according to the present invention, in order to solve the above problems, (12) the semiconductor particles are a plurality of kinds of particles having different particle diameters and different resistance values. The semiconductor particle identification device according to any one of (1) to (9) is provided.

According to the present invention, in order to solve the above-mentioned problems, (13) the surface of the above-mentioned semiconductor particles is provided with DN.
A, a bio-related substance selected from A, RNA, gene, chromosome, cell membrane, virus, specific binding protein, antigen, antibody, lectin, hapten, hormone, receptor, enzyme, nucleic acid, etc. is immobilized (1) to (9)
The semiconductor particle identification device according to any one of the above 1 to 3.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first to third embodiments described later.

(Function) Since the biological substance fixed on the surface of the semiconductor particle is not limited, it is possible to perform an experiment with high customizability.

Further, according to the present invention, in order to solve the above-mentioned problems, (14) the above-mentioned semiconductor particles are labeled with a fluorescent reagent and a biorelevant substance or a reactive reagent for forming an affinity bond therewith. And further comprising fluorescence measuring means for detecting the fluorescent dye (1).
A semiconductor particle identification device according to any one of (9) to (9) is provided.

(Corresponding Embodiment of the Invention) The embodiment of the present invention corresponds to the first to third embodiments described later.

(Function) A biological substance reaction detector such as a flow cell, a flow cytometer, or a cell sorter moves a measured substance by a fluid and detects a fluorescent emission site of a biological substance or a reaction reagent labeled with a fluorescent dye. Since the affinity binding result can be measured by detecting, the affinity binding result can be obtained in a short time.

[0054]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a semiconductor particle identifying device according to the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 is a diagram showing a basic configuration of a first embodiment of a semiconductor particle identifying apparatus according to the present invention.

The semiconductor particle identifying device according to the first embodiment of the present invention is constructed as follows.

That is, as shown in FIG. 1, the flow (pipe) path 11 is filled with an immiscible liquid, and the semiconductor particles 12 having a specific resistance are individually isolated in this liquid. Exists in the state of being.

Here, the semiconductor particles 12 are several μm to several 1
It is composed of a semiconductor material such as silicon or gallium-arsenide with a grain size of about 00 μm.

The cross-sectional shape and cross-sectional area of the flow (pipe) channel 11 can be arbitrarily set within a range in which the liquid and the semiconductor particles 12 can sufficiently flow, but here, the flow (pipe) channel 11 is transparent. It is made of a material, and its cross-sectional shape is circular and the diameter of the circular tube is several tens of μm to several mm.

The flow (pipe) path 11 has this flow (pipe) path 11
Liquid transfer mechanism 13 for moving the internal fluid at a predetermined speed
Is equipped with.

Outside the flow (pipe) path 11, this flow (pipe) is provided.
A particle characteristic detector 14 for measuring the resistance of the semiconductor particles 12 inside the passage 11 is provided, the detailed configuration of which is shown in FIG.

The particle characteristic detector 14 has a flow (pipe) path 1
Two high-frequency coils L1 and L2 that are sandwiched by 1
And an LC resonance circuit 15 including a capacitor C connected in parallel with the high frequency coils L1 and L2, and this L resonance circuit 15.
It is composed of a voltmeter 16 for measuring the resonance voltage of the C resonance circuit 15, and a resistance measuring device (resistance value calculator) 17 for receiving the voltage signal from the voltmeter 16 and calculating the resistance of the semiconductor particles 12. .

Here, it is assumed that the high frequency coils L1 and L2 are made to have a size equal to or larger than that of the semiconductor particles 12.

Next, the operation of the semiconductor particle identification device according to the first embodiment will be described.

Now, the liquid transfer mechanism 13 causes a flow (tube).
The immiscible liquid in the passage 11 is assumed to be moving at a predetermined speed.

Although not shown in the figure, the semiconductor particles 12 in the liquid are isolated upstream from the flow (pipe) path 11 (from the agglomerated state to a state where they are individually dispersed and individually moved). Because of the particle isolation mechanism, the semiconductor particles 12 are individually isolated and introduced into the flow (pipe) passage 11 from the introduction mechanism.

After the introduction, each semiconductor particle 12 flows into the flow (pipe) channel 1.
1 Flows at the same speed as a liquid with the inside isolated.

In the particle characteristic detector 14, the flow (tube)
Two high-frequency coils L1 and L configured to sandwich the path 11
2 If only liquid is flowing below (resistance Ro), LC
The resonant circuit resonates at a certain constant voltage Vo.

At this time, a magnetic field is generated in the flow (pipe) path 11 in the portion sandwiched between the two high frequency coils L1 and L2.

In this state, when the semiconductor particles 12 moved by the liquid transfer mechanism 13 reach the portion of the flow (pipe) path 11 sandwiched between the two high frequency coils L1 and L2 as shown in FIG. Eddy current flows through the semiconductor particles 12, and the combined inductance of the two high frequency coils L1 and L2 changes.

The resistance of the semiconductor particles 12 at this time is Rx,
When the voltage is Vx, the relational expression is Rx = Ro (Vx / Vo) (1).

By defining the equation (1) in the resistance measuring device (resistance value calculating device) 17, when the resistance Ro of the liquid is known, the voltages Vx and Vo are measured by the voltmeter 16 to obtain the semiconductor particles 12 The resistance Rx of is obtained.

For example, as shown in FIG.
The surface of the semiconductor particle has a resistance Rm, and the inside has a resistance Rs of silicon.
Is a relational expression such as (1 / Rx) = (1 / RM) + (1 / Rs) (2).

The resistance Rx of the semiconductor particles 12 is determined by the type of semiconductor material and the type and content of impurities,
It is possible to make various changes depending on the coating material on the particle surface, the particle size, and the like.

Generally, at least 1 / in terms of resistivity
A change of about 100 to several kΩ · cm can be given.

That is, according to the first embodiment of the present invention, even if the number of types of semiconductor particles 12 moving in a liquid is very large, the resistance measuring device (resistance value calculation) in the particle characteristic detector 14 is used. If the equation (1) is defined in the container) 17, the resistance Rx of the semiconductor particles 12 can be calculated by the particle characteristic detector 14 from the voltage signal measured by the voltmeter 16 and the known resistance Ro. Therefore, it is possible to identify the individual semiconductor particles 12.

Furthermore, since the semiconductor particles 12 do not have autofluorescence, high sensitivity measurement is possible when measuring affinity binding of a biological substance such as DNA immobilized on the particle surface by fluorescence.

The respective configurations of the first embodiment of the present invention can of course be modified or changed in various ways.

For example, the semiconductor particles 12 may be composed of one or more semiconductors or impurities out of semiconductor materials containing gallium-arsenic, germanium, indium, phosphorus, etc., in addition to silicon, and platinum, gold, aluminum, etc. A metal film layer, an oxide film layer, a nitride film layer, or the like can be provided.

Further, a polymer coating such as polystyrene may be provided.

Further, what fills the inside of the flow (pipe) path 11 may be gas or vacuum other than liquid.

Further, the high frequency coils L1 and L2 may be configured to be larger than the semiconductor particles 12 moving inside the flow (pipe) path 11.

Further, the LC resonance circuit 15 may be composed of a Colpitts oscillation circuit, a Hartley oscillation circuit, etc. other than this embodiment.

Further, in order to measure the change in the resonance of the LC resonance circuit 15 or the like, a frequency counter for detecting the change in the resonance frequency may be provided instead of the voltmeter 16.

Further, as shown in FIG. 6, the two high frequency coils L1 and L2 may be separately provided upstream and downstream so as to circulate outside along the flow (pipe) path 11.

On the other hand, on the surface of the semiconductor particles 12, in addition to DNA, biological substances such as RNA, gene, chromosome, cell membrane virus, specific binding protein antigen, antibody, lectin, hapten, hormone, receptor, enzyme, nucleic acid, etc. May be fixed.

Furthermore, such a bio-related substance D
As a means for measuring the affinity binding of NA, as shown in FIG. 4, a flow cytometer, a flow cell, a cell sorter 10 and the like are connected downstream of a flow (pipe) channel 11, and the resistance Rx of the semiconductor particles 12 causes the semiconductor particles 12 to flow. It may be configured such that which DNA reacts with which reagent DNA can be individually detected while identifying the type of DNA on the surface of each semiconductor particle 12 by individually identifying.

Further, as shown in FIG. 4, a semiconductor particle extracting mechanism 9 capable of extracting necessary particles depending on the type of the identified semiconductor particles 12 may be provided downstream of the flow (pipe) passage 11. .

In FIG. 4, a waste liquid flow (pipe) passage 7 and a reservoir 8 are provided at the most downstream side of the flow (pipe) passage 11.

(Second Embodiment) FIG. 5 is a diagram showing a basic structure of a second embodiment of the semiconductor particle identifying apparatus according to the present invention.

The semiconductor particle identifying device according to the second embodiment of the present invention is constructed as follows.

That is, as shown in FIG. 5, an incompatible liquid is filled in a circular tubular flow (pipe) passage 11 made of a transparent material and having a diameter of several tens of μm to several mm, and a specific liquid is contained in the liquid. A semiconductor particle 1 having a resistance of several μm to several 100 μm.
2 exists in an individually isolated state.

Although not shown here, the flow (tube) is not shown.
A liquid transfer mechanism for moving the fluid inside the flow (pipe) passage 11 at a predetermined speed is provided upstream of the passage 11.

Outside the flow (pipe) channel 11, the flow (pipe) channel 1 is provided.
A particle characteristic detector 14 for measuring the resistance of the semiconductor particles 12 in the inside 1 is provided.

The particle characteristic detector 14 is provided in the two magnets 18 forming a magnetic field across the flow path, and in the magnetic field region of the magnets 18 and on the downstream side of the flow (pipe) path 11. Detecting coil 19, an ammeter 20 for detecting an induced current generated in the detecting coil 19, and a resistance measuring device (resistance value calculator for receiving the current signal from the ammeter 20 to calculate the resistance of the semiconductor particles 12). ) 17 and.

Next, the operation of the semiconductor particle identifying apparatus according to the second embodiment of the present invention will be described.

Now, with the liquid transfer mechanism, the flow (pipe) path 1
The immiscible liquid in 1 is assumed to be moving at a predetermined speed.

Although not shown in the figure, the semiconductor particles 12 in the liquid are isolated upstream from the flow (pipe) channel 11 (from the agglomerated state to a state where they are individually dispersed and individually moved). Due to the particle isolation mechanism, the semiconductor particles 12 are individually isolated and introduced into the flow (pipe) passage 11 from the introduction mechanism.

After the introduction, each semiconductor particle 12 flows at the same speed as the liquid while the inside of the flow (pipe) path 11 is isolated.

In the particle characteristic detector 14, a magnetic field is generated in the flow (pipe) path 11 between the two magnets 18, and only liquid is flowing in this magnetic field ( A certain constant induced current Ao is generated in the resistance Ro) and the detection coil 19.

Here, when the semiconductor particles 12 moved by the liquid transport mechanism reach the portion of the flow (pipe) path 11 sandwiched by the magnets 18 as shown in FIG. 5, an eddy current flows through the semiconductor particles 12. As a result, the apparent combined inductance of the detection coil 19 changes, so that the induced current of the detection coil 19 changes to Ax.

Since the induced current Ax depends on the resistance value Rx of the semiconductor particle 12, the resistance value Rx of the semiconductor particle 12 is measured by measuring the induced currents Ax and Ao when the resistance Ro is known. Is obtained.

The semiconductor particles 12 have various resistance values Rx depending on the type of semiconductor material and the type and content of impurities, the coating material on the particle surface, the particle size, and the like. It is generally known that it is possible.

That is, according to the second embodiment of the present invention, the resistance measuring device in the particle characteristic detector 14 can be used even when the semiconductor particles 12 of a very large number are moving in the liquid. (Resistance calculator) 17, ammeter 2
Induced current Ax measured at 0 and known liquid resistance R
Since the resistance value Rx of the semiconductor particles 12 can be calculated from o, it is possible to identify the individual semiconductor particles 12.

Further, since the semiconductor particles 12 do not have autofluorescence, high sensitivity measurement is possible when measuring affinity binding of a biological substance such as DNA immobilized on the particle surface by fluorescence.

Incidentally, each structure of the second embodiment of the present invention can of course be modified or changed in various ways.

For example, the detection coil 19 is provided in the flow (pipe) path 11
May be provided on the side wall outside the flow (pipe) path 11 inside the magnetic field.

Further, the cross-sectional shape and cross-sectional area of the flow (pipe) passage 11 can be arbitrarily set within a range in which the liquid and the semiconductor particles 12 can sufficiently flow.

The material of the flow (pipe) path 11 does not have to be limited to a transparent material, and the magnet 18 may be a superconducting magnet, an electromagnet or the like other than the permanent magnet.

Further, the induced voltage may be measured instead of the induced current. In that case, instead of the ammeter 20, the voltmeter 16 may be used as in the first embodiment. Good.

(Third Embodiment) FIG. 7 is a diagram showing the basic structure of a third embodiment of the semiconductor particle identifying apparatus according to the present invention.

The semiconductor particle identifying apparatus according to the third embodiment of the present invention is constructed as follows.

That is, as shown in FIG.
An incompatible liquid is filled in the circular tubular flow path of μm to several mm, and this liquid has a specific resistance of several μm to several 1
Semiconductor particles having a particle size of about 00 μm exist in a state of being individually isolated.

Although not shown here, the flow (tube) is not shown.
A liquid transfer mechanism for moving the fluid inside the flow (pipe) passage 11 at a predetermined speed is provided upstream of the passage 11.

A particle characteristic detector 14 for measuring the resistance of the semiconductor particles 12 is provided in the flow (pipe) path 11.

The particle characteristic detector 14 has a flow (pipe) path 1
1. Two detection electrodes 21 that are arranged to face each other while ensuring a space through which the semiconductor particles 12 pass, and a resistance measuring device (resistance value calculator) 17 that is connected to the detection electrodes 21 and detects a resistance change. It is configured.

Next, the operation of the semiconductor particle identification device according to the third embodiment of the present invention will be described.

Now, it is assumed that the immiscible liquid in the flow (pipe) path 11 is moving at a predetermined speed by the liquid transport mechanism.

Although not shown in the figure, the semiconductor particles 12 in the liquid are isolated upstream of the flow (pipe) path 11 (from the agglomerated state to a state in which they are individually dispersed and individually moved). Because of the particle isolation mechanism, the semiconductor particles 12 are individually isolated and introduced into the flow (pipe) passage 11 from the introduction mechanism.

After the introduction, each semiconductor particle 12 is allowed to flow through the flow channel 1
1 Flows at the same speed as a liquid with the inside isolated.

In the particle characteristic detector 14, when only the liquid is flowing in the flow (pipe) path 11 between the two detection electrodes 21, there is a certain resistance component between the detection electrodes 21. Ro exists.

Here, the flow path 1 in which the semiconductor particles 12 moved by the liquid transport mechanism are sandwiched between the detection electrodes 21.
When reaching part 1, the apparent composite impedance between the detection electrodes 21 changes due to the resistance Rx of the semiconductor particles 12, so that the detection value of the resistance measuring device (resistance calculator) 17 changes from Ro to R ′. And changes.

Since this resistance R ′ depends on the resistance value Rx of the semiconductor particles 12, the resistance measuring device (resistance value calculating device) 17 detects the difference between the resistance Ro and the resistance R ′, and Rx is obtained.

The semiconductor particles 12 can have various resistances Rx of the semiconductor particles depending on the kind of semiconductor material, kind and content of impurities, coating material on the particle surface, particle size and the like. It is generally known that

That is, according to the third embodiment of the present invention, the resistance measuring device in the particle characteristic detector 14 can be used even when the semiconductor particles 12 of a very large variety are moving in the liquid. Since the (resistance calculator) 17 can calculate the resistance Rx of the semiconductor particles 12 from the difference between the resistances R ′ and Ro, it is possible to identify the individual semiconductor particles 12.

Furthermore, since the semiconductor particles 12 do not have autofluorescence, high sensitivity measurement is possible when measuring affinity binding of a biological substance such as DNA immobilized on the particle surface by fluorescence.

Incidentally, each structure of the third embodiment of the present invention can of course be modified and changed in various ways.

For example, the detection electrode 21 is connected to the flow (pipe) channel 11
In addition to being configured to face each other, they may be provided in the form of being separated in the inner traveling direction of the flow (pipe) path 11, as shown in FIG.

Further, the cross-sectional shape and cross-sectional area of the flow (pipe) channel 11 can be arbitrarily set within a range in which the liquid and the semiconductor particles 12 can sufficiently flow.

[0130]

As described above, according to the present invention, semiconductor particles composed of a plurality of types of semiconductor materials are used, and the fluorescence signal for detecting the biological substance is not affected in the detection of the biological substance. It is possible to provide a semiconductor particle identification device that can identify particles individually even when the number of types of substances to be detected is very large, can be applied to a huge number of affinity bonds, and can perform multiple analysis.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic configuration of a first embodiment of a semiconductor particle identification device according to the present invention.

2 is a detailed view of the particle characteristic detector 14 provided in FIG. 1 outside the flow (pipe) channel 11 for measuring the resistance of the semiconductor particles 12 inside the flow (pipe) channel 11; It is a figure which shows a simple structure.

3 shows an example of the semiconductor particles 12 in FIG. 1 whose surface is a metal coating having a resistance RM and whose inside is a resistance R.
It is sectional drawing which shows the semiconductor particle comprised from s of silicon.

FIG. 4 is a diagram showing a configuration of a modified example of the first embodiment of the semiconductor particle identifying device according to the present invention.

FIG. 5 is a diagram showing a basic configuration of a second embodiment of a semiconductor particle identifying device according to the present invention.

FIG. 6 is a diagram showing a configuration of a modified example of the first embodiment of the semiconductor particle identifying device according to the present invention.

FIG. 7 is a diagram showing a basic configuration of a third embodiment of a semiconductor particle identifying device according to the present invention.

FIG. 8 is a diagram showing a configuration of a modified example of the third embodiment of the semiconductor particle identifying device according to the present invention.

[Explanation of symbols]

7 ... Waste liquid flow (pipe) path, 8 ... Reservoir, 9 ... Semiconductor particle extraction mechanism, 10 ... Flow cytometer, flow cell, cell sorter, etc. 11 ... Flow (pipe) path, 12 ... Semiconductor particles, 13 ... Liquid transfer mechanism , 14 ... Particle characteristic detector, L1, L2 ... High frequency coil, C ... Capacitor, 15 ... LC resonance circuit, 16 ... Voltmeter, 17 ... Resistance measuring device (resistance value calculator), 18 ... Magnet, 19 ... Detection coil , 20 ... Ammeter, 21 ... Detection electrode.

Continued front page    F term (reference) 2G045 CB01 DA13 DA36 FB07 FB12                       GC20                 2G053 AA21 AB21 BA08 BA13 BA19                       BC02 CA03 DA01 DA02 DB02                 2G060 AA19 AD06 AF07 AG11 GA01                       KA09                 4B029 AA07 AA23 AA27 BB01 BB15                       BB20 CC03 FA01 FA15

Claims (14)

[Claims] 1. A conduit for passing semiconductor particles therein, a magnetic field generating means for generating a magnetic field inside the conduit, and an eddy current generated in the semiconductor particles in the conduit by the magnetic field generating means. And an eddy current detecting unit for identifying the semiconductor particles by using the value of the eddy current detected by the eddy current detecting unit. 2. The semiconductor particle further includes resistance value calculating means for calculating a resistance value of the semiconductor particle by using the eddy current detected by the eddy current detecting means, and the semiconductor particle calculated by the resistance value calculating means. The semiconductor particle identifying device according to claim 1, wherein the semiconductor particles are identified using the resistance value of. 3. The magnetic field generating means is a high frequency coil for generating a magnetic field in the conduit, and the eddy current detecting means detects the change in the resonance state of the high frequency coil to generate the eddy current. The semiconductor particle identification device according to claim 2, wherein the detection is performed. 4. The semiconductor particle identification device according to claim 3, wherein the high-frequency coil is two high-frequency coils that are provided to face each other with the conduit interposed therebetween. 5. The semiconductor particle identifying device according to claim 3, wherein the high-frequency coil is two high-frequency coils provided on the outer circumference of the conduit. 6. The semiconductor particle identifying device according to claim 3, further comprising voltage detecting means for detecting a voltage generated in the high frequency coil. 7. The semiconductor particle identifying device according to claim 3, further comprising frequency detecting means for detecting a resonance frequency of the high frequency coil. 8. The magnetic field generating means is a magnet provided so as to face each other so as to sandwich the conduit, and the eddy current detecting means detects an induced current generated by the semiconductor particles. The semiconductor particle identification device according to claim 1. 9. A method comprising: a conduit for allowing semiconductor particles to pass therethrough; and a plurality of electrodes provided at spaced positions in the conduit, wherein the resistance value between the plurality of electrodes is detected. A semiconductor particle identification device characterized by identifying semiconductor particles. 10. The semiconductor particles are a plurality of kinds of particles having different resistance values, each of which is made of a single material or a plurality of semiconductor materials or a combination of semiconductor materials containing impurities. The semiconductor particle identification device according to any one of 1. 11. The semiconductor particles are a plurality of types of particles having different resistance values, respectively, by coating the surfaces of the semiconductor particles with different types of coating materials. The semiconductor particle identification device according to any one of claims. 12. The semiconductor according to claim 1, wherein each of the semiconductor particles is a plurality of types of particles having different particle diameters and different resistance values. Particle identification device. 13. DNA, R on the surface of the semiconductor particles.
A biologically relevant substance selected from NA, gene, chromosome, cell membrane / virus, specific binding protein, antigen, antibody, lectin, hapten, hormone, receptor, enzyme, nucleic acid, etc. is immobilized. The semiconductor particle identification device according to any one of 1 to 9. 14. The semiconductor particle is labeled with a fluorescent dye for a biologically-relevant substance or a reactive reagent for forming an affinity bond with the biological-related substance, and further provided with a fluorescence measuring means for detecting the fluorescent dye. The semiconductor particle identification device according to claim 1, wherein the identification device is a semiconductor particle identification device.