JP2003057025A - Position detection method for optical element and position detector therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure the positional relation of optical elements having a complicated shape at a high speed with high accuracy in a non-contact and non- destructive manner. SOLUTION: The position detector for the optical element is equipped with an interferometer 22 being a position detection means for detecting the position of one element of the optical element 23, a CCD detection part 21 being a separate position detection means for detecting the other element of the optical element 23, an optical element moving mechanism 27 arranged on an optical element holder 24 on which the optical element 23 is placed or the interferometer positioning mechanisms 29 arranged on a plurality of the position detection means, a CCD detection system positioning mechanism 25, the optical element alignment mechanism 28 arranged on the optical element holder 24 or a CCD detection system alignment mechanism 26 arranged on the CCD detection part 21 and a feedback means for feeding back the position data of both elements.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting method for an optical element and a position detecting apparatus therefor. In particular, a biconvex lens, an optical element having both a lens surface and a prism surface,
The present invention relates to a position detecting method and a position detecting device for clarifying a relative positional relationship of optical elements having a complicated shape such as an optical element having an array of lens surfaces and prism surfaces.

In order to develop and manufacture an optical element having such a complicated shape, the positional relationship between the optical elements is measured and inspected, and each optical element has a desired positional relationship.
It is necessary to judge whether it is within the desired shape specifications. The present device relates to a position detection method and a position detection device that clarify the positional relationship of each optical element, and such a position detection method can also be applied as an optical element inspection device or measurement device. More specifically, for example, a writing optical system and a reading optical system used inside a copying machine or a printer, specifically, a 1 × image forming element, an fθ lens, a microlens array used in a projector, and the like.
It can be applied to a position detecting device, an inspection device or a measuring device in a micro optical element used for optical communication equipment and the like.

[0003]

BACKGROUND OF THE INVENTION A position detecting method for an optical element and a position detecting apparatus therefor according to the present invention relate to a technique applicable to an optical element having a complicated special shape. Nothing closely related to the invention is found. Here, an example of a method of measuring an optical axis of a lens which is considered to be relatively close to the present invention will be described. That is, Japanese Patent No. 2769002 “Camera lens optical axis measurement method” (Fujitsu Limited) provides a method for easily making a rotation axis and an optical axis parallel to each other as an optical axis measurement method for a small camera lens. Is intended. That is, the step of forming parallel light, the step of parallelizing the parallel light and the rotation axis of the turntable on which the camera is mounted, and the step of making the rotation axis and the optical axis of the camera lens housed in the cylindrical lens holder parallel to each other. The step of setting and rotating the camera about the rotation axis, incident parallel rays on the camera lens, and based on the locus of image formation of the parallel rays on the imaging surface, the optical axis of the camera lens on the imaging surface. In the method of measuring the optical axis of a camera lens, which comprises the step of measuring the position, the step of setting the optical axis of the camera lens housed in the cylindrical lens holder in parallel with the rotational axis of the camera is centered on the rotational axis. While rotating, the displacements at the two sides of the cylindrical lens holder are measured,
It is composed of the steps of taking the difference between the displacements at various points and minimizing the difference amount.

However, the technique described in Japanese Patent No. 2769002 measures the lens optical axis in order to bring out the characteristics of the camera lens, but has the following four drawbacks. . That is, there are many setups and the measurement time is long. On the other hand, if an interferometer is used, it will be possible to perform alignment at one time since it will be surface measurement. In the two-optical axis measuring method, the smaller the object, the more difficult the measurement. In recent years, many micro optical elements having a size of 1 mm or less have appeared, and it seems difficult to deal with such micro optical elements.
3 Similarly, it is difficult to measure an optical element having a complicated shape. Particularly, as a micro optical element, recently, an optical element having a complicated shape has been introduced, and it seems that it is more difficult to deal with the micro optical element having a complicated shape. 4 Furthermore, the sensitivity of this optical axis measuring method is lower than that when an interferometer is used. The interferometer observes so-called interference fringes and has a very high sensitivity even for a minute displacement. Thus, it is possible to reliably detect displacement of a small area such as a minute optical element.

[0005]

Conventionally, when detecting the positional relationship of each element of an optical element having a complicated shape, that is, for example, an element forming a lens surface and an element forming a prism surface are used. In the case of measuring the relative displacement of the lens surface optical axis of the optical element having both surfaces and the prism surface ridge line, the measurement target has a complicated shape,
Often, it is a micro optical element.
Even alignment was difficult, and it was difficult to measure the positional relationship between each element. Therefore, a so-called destructive inspection is often performed, in which the micro optical element having such a complicated shape is cut at a certain cross section and the cross section is measured and evaluated by a microscope.

However, in the case of the destructive inspection, the optical element that has been inspected cannot be restored to its original state, so that continuous evaluation of the optical characteristics of the optical element cannot be performed. Further, even if the deformation of the optical element due to the heat at the time of cutting at the time of destructive inspection or the edge of the cut surface varies, even if the position of the optical element is detected by destructive inspection,
There was a limit to the improvement of the measurement accuracy of the position detection.

The position detecting method and the position detecting device for an optical element according to the present invention have been made in view of such circumstances, and whether or not the optical elements having a complicated shape are arranged individually or in an array. No contact, high speed,
In addition, the positional relationship of each element forming each shape of the optical element with high accuracy and non-destructive method (hereinafter, simply described as the positional relationship of the optical element for simplification of description) It makes it possible to measure. Below, the "purpose" and "effect" of each claim according to the present invention
Will be described.

(Object of the Invention of Claim 1) A position detecting method for clarifying a positional relationship between optical elements having a plurality of shape characteristics or a positional relationship between an optical element and another optical element different from the optical element. Is to get. (Advantageous Effects of the Invention of Claim 1) According to the position detecting method of the present invention, it is possible to grasp the relative positional relationship of the optical elements having a complicated shape.

(Object of the second aspect of the invention) A position detecting device for clarifying a positional relationship between optical elements having a plurality of shape characteristics or a positional relationship between an optical element and an optical element different from the optical element. Is to get. (Advantageous Effects of the Invention of Claim 2) According to the position detecting device of the present invention, an optical element having a complicated shape, for example, a lens-prism optical element has a relative lens element-prism element element. If the optical elements are misaligned or arrayed, it is possible to grasp the positional relationship of the optical elements such as an arrangement error between the plurality of optical elements.

An object of the present invention is to detect an optical characteristic amount of a certain element forming an optical element, for example, a spatial position such as an optical axis. (Advantageous Effects of the Invention of Claim 3) According to the position detecting device of the present invention, by using the interferometer, the positional relationship of the optical elements can be detected in a non-contact manner, with high sensitivity, and at high speed. . Alternatively, by using the measurement probe, it is possible to detect the positional relationship of the optical elements at a relatively low cost, although the measurement time is required. Alternatively, by using the electrostatic capacity type sensor, the positional relationship of the optical elements can be detected in a non-contact manner and relatively inexpensively. Further, if the measurement target can be coated with a metal, the reaction surface can be formed depending on the presence or absence of the coating, so that the detection points can be limited and highly sensitive measurement becomes possible.

(Object of Claim 4) If a certain element forming an optical element has a spherical shape, it is to detect the center of curvature of the optical element. Furthermore, if the observation image area is larger than the element image and the element forming the optical element has a spherical shape, it is possible to detect the vicinity of the cat's eye position and the focus position to detect the observation optical axis. , Detecting the optical axis of the device. According to the position detecting device of the present invention, by detecting the cat's eye position,
It is possible to specify the center of curvature, which is an important item as the positional relationship between the optical elements. Alternatively, by detecting the focus position, the center of curvature, which is an important item as the positional relationship of the optical elements, can be specified. The center of curvature can be specified by detecting the cat's eye position, but when detecting the focus position, the outer diameter of the optical element can also be observed. In some cases, or when the optical elements are combined within the observation field of view by a combination of lens systems, more accurate alignment is possible. In addition, the positional relationship of the optical elements can be detected with higher accuracy by projecting the elements forming the optical elements.

(Object of the fifth aspect of the invention) For detecting the position of the other element forming the optical element, a CCD or CMO is used.
By using S, the feature amount of the optical element is detected as an image. (Advantageous Effects of the Invention of Claim 5) According to the position detecting device of the present invention, it is possible to detect an image of an optical element image, for example, a ridgeline of a prism or an outer diameter of a lens. Further, when the CMOS is used, the image can be detected relatively inexpensively.

(Object of Claim 6) The light source for detecting the position of the other element forming the optical element is a CCD or CMO.
This is the case when the contrast is improved by the coaxial incident light that is coaxial with S or by the background light from the rear side of the optical element, and when the optical element is small, the amount of light received by the imaging device such as CCD or CMOS decreases. However, it is to be able to detect the positional relationship of the optical elements. (Advantageous Effects of the Invention of Claim 6) According to the position detecting device of the present invention, the contrast is improved, and, for example, the ridge line of the prism surface becomes brighter or darker than the surroundings, and thus the position of the optical element. The detection accuracy of the relationship is improved.
Further, even in a device such as a CMOS which is relatively dark, the device whose imaging performance is deteriorated can be used.

[0014]

According to a first aspect of the invention, an optical element composed of an element having a plurality of shape characteristics, or an optical element composed of an element having a plurality of shape characteristics is one-dimensional or An optical element position detecting method for detecting the positions of optical elements integrated in a two-dimensional array relates to a positioning mechanism installed in an optical element holder on which the optical elements are mounted or a plurality of shapes of the optical elements. Positioning is performed by a positioning mechanism installed in each of a plurality of position detecting means for detecting position information, one element of the optical element is position-detected by one position detecting means of the position detecting means, and the element is Position detection of the other other element by the other position detection means of the position detection means, by feeding back the position information of both elements, Serial by the optical element holder or said plurality of position detecting means alignment mechanism installed in each of mounting the optical element, performs an optimal alignment adjustment to best detection error is reduced,
By detecting the position of one element and the other element other than the element, an optical element position detection method is provided which reveals the relative positional relationship between the two elements. is there.

According to a second aspect of the present invention, an optical element composed of an element having a plurality of shape characteristics, or an optical element composed of an element having a plurality of shape characteristics is formed into a one-dimensional or two-dimensional array. In an optical element position detecting device for detecting the position of an integrated optical element, a position detecting means for detecting the position of one element and another position detecting means for detecting the position of another element different from the element. And a positioning mechanism installed on the optical element holder on which the optical element is mounted or a positioning mechanism installed on each of the plurality of position detecting means, and an alignment installed on the optical element holder on which the optical element is mounted. Mechanism or an alignment mechanism installed in each of the plurality of position detecting means, and a feedback mechanism for feeding back relative position information of the elements of both. It is characterized in that the position detecting device of an optical element having a means.

According to a third aspect of the present invention, in the optical element position detecting device according to the second aspect, an interferometer, a measuring probe or a capacitance type sensor is used as the position detecting means of the one element. The above-mentioned optical element position detecting device is used.

According to a fourth aspect of the present invention, in the optical element position detecting device according to the third aspect, in the interferometer, if the element to be measured has a spherical shape,
By detecting the cat's eye position or the focus position, or by detecting the focus position near the spherical shape and the cat eye position, the optical element of the optical axis that passes the optical axis of the element with respect to the optical axis of the interferometer is detected. It is characterized by being a position detecting device.

According to a fifth aspect of the present invention, in the position detecting device for an optical element according to the second aspect, a CCD or CMOS is used as the position detecting means for the other element.
It is characterized in that it is a position detecting device for an optical element using the.

According to a sixth aspect of the present invention, in the position detecting device of the optical element according to the fifth aspect, as the light source of the position detecting means, coaxial incident light coaxial with the CCD or CMOS or the CCD or The position detecting device for an optical element uses background light from the rear side of the optical element when viewed from the CMOS.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a position detecting method and a position detecting device for an optical element according to the present invention will be described below with reference to the drawings. First, an embodiment of the invention according to any one of claims 1 to 3 and claims 5 and 6 will be described with reference to FIGS. 1 to 3 and 6. Here, FIG. 1 is a configuration diagram showing a configuration of an optical element having a lens surface and a prism surface, and FIG.
4 is a configuration diagram in which the optical elements shown in FIG. 3 are arranged in an array, and FIG. 3 is a configuration diagram showing a configuration of an optical element in which two prism surfaces having different shapes are joined. Further, FIG. 6 is a configuration diagram showing an example of the configuration of the optical element position detection device according to the present invention.

Conventionally, many optical elements have a relatively simple shape such as a convex lens, a concave lens, a mirror, and a prism. However, recently, an optical element having a complicated shape or a small shape has also appeared. For example, an optical element having a lens surface 1 and a prism surface 2 as shown in the configuration diagram of FIG. 1, or an array of lens surfaces and prism surfaces as shown in FIG. 1 as shown in the configuration diagram of FIG. An optical element having an array-shaped lens surface 3 and an array-shaped prism surface 4, or a prism surface 15 and a prism surface 2 having different shapes as shown in the configuration diagram of FIG.
Recently, many optical elements such as 6, which are composed of a plurality of prism surfaces, or those in which the optical elements shown in FIG. 3 are miniaturized and arranged in an array, have become popular. .

It has been difficult in the prior art to grasp the positional relationship of optical elements having complicated shapes as shown in FIGS. 1 to 3. For example, in the case of FIG. 1, it is difficult to measure the center of curvature of the spherical lens surface 1, the positional relationship between the optical axis of the spherical lens surface 1 and the prism ridge of the prism surface 2, and the like. It was In particular, the smaller the optical element, the more difficult it is to perform such a measurement with the measurement target as it is.
In some cases, destructive inspection is performed in which a characteristic surface is cut and the cut surface is observed with a microscope.

However, not only the optical element may be deformed at the time of cutting, but also a destructive inspection is performed to measure the positional relationship of the optical element as described above. There is also a side effect that development efficiency deteriorates because the positional relationship of optical elements cannot be measured until the elements are measured. The present invention is
Position detection of an optical element that can measure the positional relationship of the optical element, even if the optical element has a minute or complicated shape, without using a destruction means for the optical element that is the measurement object. It realizes the device.

A method for detecting the position of an optical element according to the present invention using the position detecting device for an optical element according to the present invention shown in FIG. 6 will be described below. Here, the case where the optical element 23 as the measurement object is an optical element having a plurality of forming characteristics having a spherical lens surface and a prism surface as shown in FIG. 1 will be described as an example. Of course, the range of the optical element applied in the present invention is not limited to the shape of such an optical element, the optical element to be measured is composed of only a plurality of prism surfaces having different shapes, It does not matter even if it has a plurality of convex surfaces.

As shown in FIG. 6, the optical element position detecting apparatus according to the present invention has an optical element 23, which is an object to be measured, placed on a vibration isolation table (not shown). An optical element holder 24, an optical element moving mechanism 27, an optical element alignment mechanism 28, which constitute an optical element jig, an interferometer 22, an interferometer positioning mechanism 29, which constitutes an interferometer detection system which is one position detecting means, A CCD detection unit 21, a CCD detection system positioning mechanism 25, and a CCD detection system alignment mechanism 26, which constitute a CCD detection system serving as the other position detection means, are installed.

First, the optical element 23 to be measured is set on the optical element holder 24 and attached to the optical element measuring jig. In order to measure the positional relationship of the optical elements 23 having a plurality of shapes, for example, consider the case where the center of curvature of a spherical lens surface that is an element forming one shape of the optical element 23 is determined. In the case where the interferometer 22 is used as the position detecting means of the element, if the certain positional relationship such as the cat's eye position and the focus position is known, it is easy to detect the center of curvature of the spherical shape. Therefore, the optical element moving mechanism 27, which is a positioning mechanism for one of the elements, moves the position of the optical element 23 to be measured, and positions it near the cat's eye position or near the focus position. At this time, since the positional relationship between the optical element 23 and the interferometer 22 may be determined, conversely, instead of moving the optical element 23 by the optical element moving mechanism 27, the interferometer 22 may be moved. Absent. Thus, the positional relationship between the optical elements can be detected by using the interferometer 22. (Invention of Claim 3)

Next, as will be described in detail later, while observing the state of the interference fringes of the interferometer 22, the interferometer 22 is positioned at the cat's eye position or the focus position. The center of curvature of the spherical lens surface, which is one of the optical elements 23 to be measured, can be detected depending on the formation state of the interference fringes. In the above description, the case where the interferometer 22 is used has been described. However, instead of the interferometer 22, an inexpensive measurement probe or a capacitance type sensor is used, and the spherical surface, which is one of the optical elements 23, is used. The position of the center of curvature of the shaped lens surface or the position of the optical axis of the spherical lens surface may be determined. Particularly, in the case of a capacitance type sensor, depending on the coating material of the optical element, it is possible to create a reactive site and a non-reactive site as in the case of using a metal coating, and an optical element having a complicated shape. It is possible to more reliably detect the positional relationship of. (Invention of Claim 3)

Next, the case of measuring the positional relationship of the prism surface, which is the other element of the optical element 23 to be measured, will be described. For example, when the center of the prism is determined by detecting the ridgeline of the prism surface, the CCD detecting unit 21 which is the position detecting means of the other element detects the position from the front of the prism surface which is the other element of the optical element 23. To detect. However, depending on the optical element, there is a case where the spherical lens surface that is one of the elements is not necessarily arranged in a straight line with the prism surface that is the other element. In such a case, the CCD detection system positioning mechanism 25 which is the positioning mechanism of the other element and the CCD detection system alignment mechanism 26 which is the alignment mechanism of the other element are moved to detect the CCD so that the prism surface can be detected. Align part 21.

Thus, even if the spherical lens surface which is one element is not linearly arranged with the prism surface which is the other element, for example, about 45.
Even if it is tilted, the CCD detector 21 which is the position detecting means of the other element is also arranged at a position which is tilted about 45 degrees with respect to the optical axis of the interferometer 22 which is the position detecting means of the other element. Therefore, it is possible to detect the position of the prism surface forming the other element different from the spherical lens surface that is one element. Further, the image of the optical element 23 captured by the CCD of the CCD detector 21 is subjected to image processing using an image processing device (not shown), whereby the ridgeline of the imaged prism surface is detected, and The relative positional relationship between the optical axis of the spherical lens surface, which is one element, and the ridgeline of the prism surface, which is the other element, can be clarified. . (Invention of Claim 5)

At this time, instead of picking up the image of the optical element 23 by the CCD of the CCD detector 21, an inexpensive CMOS may be used to pick up the image of the optical element 23. (Invention of Claim 5)

Further, in the image processing, it is possible to improve reproducibility and position detection accuracy if the feature amount and the surrounding contrast are clear. Therefore,
By adding coaxial incident light (not shown) that is coaxial with the CCD of the CCD detection unit 21 as a light source, the ridge line portion of the prism surface, which is the other element, becomes the bright portion, and the periphery thereof becomes the dark portion, and the contrast is increased. Can be improved. Therefore, the reproducibility of the positional relationship of the optical elements and the position detection accuracy can be further improved. (Invention according to claim 6)

Further, instead of additionally using coaxial incident light that is coaxial with the CCD of the CCD detector 21, the background light emitted from the position behind the optical element 23 as seen from the CCD of the CCD detector 21 is used. When used as a light source, the prism ridge line portion, which is the other element, is a dark portion and the periphery thereof is a bright portion, which is the opposite of the case of the coaxial incident light described above, but the contrast can be similarly improved. Therefore, the reproducibility of the positional relationship of the optical elements and the position detection accuracy can be further improved. (Invention of Claim 6) Further, CC
When CMOS is used as the imaging device instead of D, the sensitivity is low, which may cause a decrease in accuracy. However, as described above, by adding the light from the light source due to the coaxial incident light or the background light, It is possible to improve the reproducibility of the positional relationship of the elements and the position detection accuracy.

Further, the element forming one shape of the optical element 23 measured by the interferometer 22 which is the position detecting means of one element, for example, a spherical lens surface, and the position detecting means of the other element are used. The optical element 23 is provided with a feedback means for feeding back relative positional information of an element forming the other shape of the optical element 23, which is measured by a certain CCD detector 21, for example, a prism surface. Optical element alignment mechanism 28 or CC installed in the optical element holder 24 for mounting
The CCD detection system alignment mechanism 26 installed in the D detection system can perform optimum alignment adjustment so that the detection error is minimized. (Inventions according to claims 1 and 2)

Next, an embodiment relating to the invention described in claim 4 will be described with reference to FIGS. 4 to 6. Here, FIG. 4 is an example of a screen showing the observation result of the spherical lens surface of the optical element by the interferometer, and FIG. 4A shows the case near the cat's eye position, and FIG. Shows the case in the cat's eye position. FIG. 5 is another screen example showing the observation result of the spherical lens surface of the optical element by the interferometer, FIG. 5A shows the case near the focus position, and FIG. The case where the focus position is set is shown.

As shown in FIG. 4, for example, the optical element 23
The spherical lens surface, which is one element of the
When observed by, a so-called striped interference fringe appears in the vicinity 10 of the cat's eye position. Here, when the optical element alignment mechanism 28 shown in FIG. 6, which is the alignment mechanism of one element, is moved and adjusted to the optimum position, the screen called the cat's eye position 11 causes the entire lens surface to be covered with almost bright or dark interference fringes. Be seen. This position is a state in which the reference wave of the interferometer 22 is converged on the surface of the lens surface of the optical element 23, and indicates the position of the center of curvature of the spherical lens surface that is one of the elements of the optical element 23. .

As described above, the center of curvature of the spherical lens surface can also be obtained by detecting the cat's eye position 11, but as shown in FIG. Similarly, the center of curvature of the spherical lens surface can be obtained by detecting the position. As shown in FIG. 5 (A), in the case of being in the vicinity of the focus position 12, similar to the case of being in the vicinity of the cat's eye position 10 in FIG. 4 (A), a striped interference fringe is generated. When the optical element alignment mechanism 28, which is the element alignment mechanism, is moved and adjusted to the optimum position, a screen called the focus position 13 covers almost the entire lens surface with almost bright or dark interference fringes as shown in FIG. 5B. Be seen. This position is a state in which the reference wave of the interferometer 22 is converged on the surface of the lens surface of the optical element 23, and indicates the position of the center of curvature of the spherical lens surface that is one of the elements of the optical element 23. .

Further, in the case of measuring the focus position, if the observation image feasible region is larger than the image of the optical element 23 and the entire view of the optical element 23 can be displayed on the monitor, the optical element can be displayed. It is also possible to check the outer diameter line 23 of 23. Therefore, alignment is easier in the case of detecting the focus position than in the case of the cat's eye position, and it is easy to align the optical axis of the interferometer 22 with the optical axis of the optical element 23. It becomes possible.

The optical axis of the interferometer 22 is moved by moving it in the optical axis direction of the interferometer 22 which is the position detecting means of one element, and finely adjusting the alignment alternately between the cat's eye position and the focus position. On the other hand, it is possible to match the optical axis of the spherical surface formed by the lens surface of the optical element 23. Such an operation also allows the optical axis of the interferometer 22 to pass by detecting the vicinity of the cat's eye position or the vicinity of the focus position of the spherical surface formed by the lens surface which is one of the elements of the optical element 23. Therefore, when the optical element 23 has an array shape, it is effective when it is desired to know the inclination with respect to the adjacent optical element.
Thus, from the center of curvature of the spherical surface formed by the lens surface, which is one of the optical elements 23, to the optical axis, and further, when the optical element 23 has an array shape, an alignment error with an adjacent optical element, etc. Can also be asked.

[0039]

According to the position detecting method and the position detecting device for an optical element according to the present invention, an optical element having a complicated shape,
For example, a lens-a lens surface in a prism optical element-
Relative displacement of each element consisting of a prism surface, and array type optical elements, such as alignment error between multiple optical elements, should be measured without using destructive inspection. You can Further, by using the interferometer, the positional relationship between the optical elements can be detected in a non-contact manner, with high sensitivity, and at high speed.

Further, according to the position detecting device of the optical device according to the present invention, by detecting the cat's eye position or the focus position, the center of curvature of the spherical shape and the optical axis which are important items as the positional relationship of the optical element are detected. The position of can be specified. Furthermore, if the observation image area is larger than the element image and the element forming the optical element has a spherical shape, it is possible to detect the vicinity of the cat's eye position and the focus position to detect the observation optical axis. The optical axis of the element can be detected, and the positional relationship of the optical element can be detected with higher accuracy.

Further, according to the position detecting device of the present invention, by utilizing the CCD or the CMOS, the image of the optical element image, for example, the ridge line of the prism, the outer diameter of the lens, or the like can be detected. it can.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of an optical element having a lens surface and a prism surface.

FIG. 2 is a configuration diagram in which the optical elements shown in FIG. 1 are arranged in an array.

FIG. 3 is a configuration diagram showing a configuration of an optical element in which two prism surfaces having different shapes are joined.

FIG. 4 is an example of a screen showing an observation result of a spherical lens surface of an optical element by an interferometer.

FIG. 5 is another screen example showing an observation result of a spherical lens surface of an optical element by an interferometer.

FIG. 6 is a configuration diagram showing an example of a configuration of an optical element position detection device according to the present invention.

[Explanation of symbols]

1 ... Lens surface, 2 ... Prism surface, 3 ... Array lens surface, 4 ... Array prism surface, 5 ... Prism surface 1, 6 ...
Prism surfaces 2, 10 ... Near cat's eye position, 11 ... Near cat position, 12 ... Near focus position, 13 ... Focus position, 21 ... CCD detector, 22 ... Interferometer, 2
3 ... Optical element, 24 ... Optical element holder, 25 ... CCD detection system positioning mechanism, 26 ... CCD detection system alignment mechanism, 27 ... Optical element moving mechanism, 28 ... Optical element alignment mechanism, 29 ... Interferometer positioning mechanism.

Claims (6)

[Claims] 1. A position of an optical element composed of elements having a plurality of shape characteristics, or an optical element in which optical elements composed of an element having a plurality of shape characteristics are integrated in a one-dimensional or two-dimensional array. In a method for detecting the position of an optical element for detecting, a positioning mechanism installed in an optical element holder on which the optical element is mounted or a plurality of position detecting means for detecting position information about each of a plurality of shapes of the optical element are installed. The position of one of the optical elements is detected by the position detecting means of the position detecting means, and the other element other than the element is detected by the other position detecting means. The optical element holder on which the optical element is mounted by detecting the position by the position detecting means and feeding back the positional information of both elements. Alternatively, the alignment mechanism installed in each of the plurality of position detecting means performs the optimum alignment adjustment so that the detection error is minimized, and detects the position of one element and the other element other than the element. A method for detecting the position of an optical element is characterized by clarifying the relative positional relationship between the two elements. 2. A position of an optical element composed of elements having a plurality of shape characteristics, or a position of an optical element in which optical elements composed of elements having a plurality of shape characteristics are integrated in a one-dimensional or two-dimensional array. In an optical element position detecting device for detecting, a position detecting means for detecting a position of one element, another position detecting means for detecting a position of another element different from the element, and the optical element are mounted. Positioning mechanism installed on the optical element holder to be placed or positioning mechanism installed on each of the plurality of position detecting means, and alignment mechanism installed on the optical element holder on which the optical element is mounted, or a plurality of the position detecting devices It has an alignment mechanism installed in each of the means and a feedback means for feeding back relative positional information of the elements of both. Characteristic optical element position detection device. 3. The optical element position detecting device according to claim 2, wherein an interferometer, a measuring probe, or a capacitance type sensor is used as the position detecting means for the one element. Position detection device. 4. The position detecting apparatus for an optical element according to claim 3, wherein in the interferometer, if the element to be measured has a spherical shape, the cat's eye position or the focus position is detected, or A position detecting device for an optical element, which detects the vicinity of a focus position and the vicinity of a cat's eye position of the spherical shape so as to pass the optical axis of the element with respect to the optical axis of the interferometer. 5. The position detecting device for an optical element according to claim 2, wherein a CCD or a CMOS is used as a position detecting means for the other element. 6. The position detecting device for an optical element according to claim 5, wherein the CC is used as a light source of the position detecting means.
Coaxial incident light coaxial with D or CMOS or the above C
A position detecting device for an optical element, characterized in that background light from the back side of the optical element as viewed from the CD or the CMOS is used.