JP2003045377A - Incandescent lamp - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an incandescent lamp composed of a plurality of tubular glass bulb arranged in parallel with each other without any dander of breaking a glass bulb when handling the lamp for mounting. SOLUTION: For the incandescent lamp composed of a plurality of tubular glass bulb arranged in parallel with each other, at least a chip part of a glass bulb is arranged toward the other glass bulb adjacent to a glass bulb, and the chip part contacts with the other glass bulb.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an incandescent lamp. In particular, the present invention relates to an incandescent lamp used as a heater lamp of a light source of a light irradiation type heating device for rapidly heating a work such as a semiconductor wafer.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, light including infrared light emitted from a filament lamp is used to perform processing such as film formation, diffusion and annealing on a semiconductor wafer.
A light irradiation type heating device for heat treatment is used. Although all of these processes heat-treat a semiconductor wafer at a high temperature, the semiconductor wafer can be rapidly heated when used in a light irradiation type heat treatment apparatus. The temperature can be raised to a temperature of ℃ or more. Further, if the light irradiation is stopped, it can be cooled rapidly.

For the rapid heating, a heater for an incandescent lamp having a plurality of glass bulbs is used. In the case of a heater having a plurality of glass bulbs, conventionally, the glass bulbs are in close contact with each other. This was to reduce the size of the heater and the strength of the lamp. However, in the case of a high output type heater composed of multiple glass bulbs, the temperature of the tube wall per glass bulb is high. Becomes hot. As a result, the impure gas occluded in the glass bulb is released, which causes blackening of the glass bulb, deformation of the heater due to melting of the glass bulb, and rupture of the glass bulb. In particular, in the case of an incandescent lamp used for heating a semiconductor wafer, a heater having a high output and a high load is required, so that the above problem is large.

Therefore, it is necessary to provide a gap between the glass bulbs to reduce the amount of heat stored in the glass bulbs by radiation and conduction, and to secure a passage for cooling air. This reduces the glass bulb temperature.

However, when a gap is provided between the glass bulbs, if the operator holds the glass bulb of the lamp by hand when mounting the lamp on a light irradiation type heating device, for example, the gap between the glass bulbs is There is a risk that the glass bulb may be bent and the glass bulb may be damaged or the tip portion may be damaged depending on the amount of force because there is a gap in the.

[0006]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an incandescent lamp in which a plurality of tubular glass bulbs are arranged side by side without danger of damage to the glass bulb during handling such as when the lamp is mounted. It is to be.

[0007]

In order to solve the above problems, the incandescent lamp of the present invention is an incandescent lamp in which a plurality of tubular glass bulbs are arranged in parallel, and the tip portion of the glass bulb is adjacent to the glass bulb. The incandescent lamp is characterized by being arranged toward another glass bulb.

The incandescent lamp according to claim 1, wherein the tip portion is in contact with the other glass bulb.

Further, the incandescent lamp according to claim 1 or 2, wherein the top of the chip portion is substantially flat.

The incandescent lamp according to any one of claims 1 to 3, wherein the plurality of tubular glass bulbs are a lamp unit sharing a base of a power feeding portion.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Here, embodiments of the present invention will be described. FIG. 1 is a schematic view of a U-shaped lamp according to the present invention. (A) is a view seen from above, (b) is a front view,
(C) is a side view. A glass bulb with an outer diameter of φ13 bent into a U shape with a pitch of 82 mm and a total length of 118 mm
A heater in which the glass bulb sealing ends are fixedly connected by a base 1 so that the glass bulbs are arranged in parallel with a gap of 2 mm and the chip portions 5 and 5'of the glass bulbs abut each other. A lamp, which is used, for example, for a light irradiation type heating device. Glass bulb 3,
Reference numeral 3'denotes a lamp unit in which the bases 1 and 1'of the power feeding portion are shared by both ends of the glass bulb. Four, four
′ Is a feeding electrode that is led out one by one from the bases 1 and 1 ′ of the feeding unit. In the figure, the filaments 2 and 2'are simply shown.

In the lamp of FIG. 1, the position of the tip portion is a position between the lamp fixing portion (base) and the bent portion of the lamp, and a distance of ½ or more of the length from the lamp fixed portion to the bent portion of the lamp. The position is separated from the fixed portion.

FIG. 2 is a schematic view of a straight tube type lamp according to the present invention. With the tip of the glass bulb with an outer diameter of φ6 facing inward,
It is a straight tube type heater lamp in which glass bulbs are arranged in parallel with each other in a gap of 2 mm so as to be in close contact with each other, and seal portions at both ends are fixedly connected by a base, and are used as a fixing heater for OA equipment, for example. . The tip parts 5, 5'of the glass bulb are fixedly connected to each other so as to abut against the glass bulb. The method of fixing and connecting may be fixing with cement, or fixing without using cement, covering with a base in a cap shape, welding the electrode part with lead wires, terminals, etc., and press-fitting. Glass bulbs 3 and 3'are the base 1 of the power supply unit
It is a shared lamp unit.

If the top portion of the tip portion is made substantially flat, the strength of the tip portion when the glass bulb and the tip portion are brought into contact with each other becomes stronger than when the tip portion is not made substantially flat.
As a method of flattening the top of the tip portion, for example, there is a method of flattening with a trowel or the like when the tip portion is fused and sealed with a burner or the like.

The method of bringing the glass bulb into contact with the tip portion of another glass bulb adjacent to the glass bulb is as follows: a method of fixing both end portions or a part of the glass bulb with a dimension ensuring a gap of the tip tube length, and a tip tube and There is a method of welding the glass bulbs that come into contact therewith.

In the case of a U-shaped lamp, the position of the tip portion is a position between the lamp fixing portion (base) and the bent portion of the lamp and is 1/2 or more of the length from the lamp fixing portion to the bent portion of the lamp. It is preferable that the position is separated from the fixed portion by a distance. Further, in the case of a straight pipe type, it is preferable that the lamp is located at the central portion in the longitudinal direction of the lamp or at a position that is divided into approximately three equal parts with respect to the lamp length.

In the above description, the visible light from the lamp
Although described with respect to heater lamp applications that use infrared radiation as heat, the invention is of course applicable to incandescent lamps for general lighting applications that use visible radiation from the lamp as a light source.

Further, in the embodiment, the glass bulb 2
I explained about the incandescent lamp of this set, but the glass bulb is 3
This is also an effective technical idea for an incandescent lamp used to bundle more glass bulbs such as four and four.

[0019]

According to the incandescent lamp of the present invention, by disposing at least one tip portion of a plurality of glass bulbs so as to oppose to the other adjacent glass bulb, it is possible to prevent obstacles on the outer peripheral surface of the lamp. There is no protrusion that hits directly. Therefore, when the incandescent lamp of the present invention is used as the heat source of the heat roller incorporated in the fixing device of the OA equipment, it can be smoothly inserted and installed in the heat roller.

Further, in the case of an industrial heater for heating semiconductors, the incandescent lamp of the present invention eliminates the risk of breakage due to the bending of the glass bulb during handling, and the glass bulb is damaged by hitting the tip part against another structure. There are no accidents and the handling is simple.

[Brief description of drawings]

FIG. 1 shows a schematic view of an incandescent lamp according to an embodiment of the present invention.

FIG. 2 shows a schematic view of an incandescent lamp according to another embodiment of the present invention.

[Explanation of symbols]

1 base 2, 2'filament 3,3 'glass bulb 4, 4'feeding electrode 5, 5'chip part

Claims (4)

[Claims] 1. An incandescent lamp in which a plurality of tubular glass bulbs are arranged in parallel, wherein the tip portion of the glass bulb is arranged toward another glass bulb adjacent to the glass bulb. 2. The incandescent lamp according to claim 1, wherein the tip portion is in contact with the other glass bulb. 3. The incandescent lamp according to claim 1, wherein a top portion of the chip portion is substantially flat. 4. The incandescent lamp according to claim 1, wherein the plurality of tubular glass bulbs are lamp units that share a base of a power feeding portion.