JP2003045093A - Inspection method for optical recording medium - Google Patents
Inspection method for optical recording mediumInfo
- Publication number
- JP2003045093A JP2003045093A JP2001227226A JP2001227226A JP2003045093A JP 2003045093 A JP2003045093 A JP 2003045093A JP 2001227226 A JP2001227226 A JP 2001227226A JP 2001227226 A JP2001227226 A JP 2001227226A JP 2003045093 A JP2003045093 A JP 2003045093A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- optical recording
- light reflectance
- layer
- load lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/002—Recording, reproducing or erasing systems characterised by the shape or form of the carrier
- G11B7/0037—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs
- G11B7/00375—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs arrangements for detection of physical defects, e.g. of recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ＤＶＤ−ＲＡＭ等
の光記録媒体の良否を判別する光記録媒体の検査方法に
関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical recording medium inspection method for determining the quality of an optical recording medium such as a DVD-RAM.
【０００２】[0002]
【従来の技術】近年、ＤＶＤ（Digital Versatile Dis
c）を使用した記録再生両用の光記録媒体（ＤＶＤ−Ｒ
ＡＭ）が製品化されている。この光記録媒体１は、図３
に示すように、少なくとも第１保護層２、記録層３、第
２保護層４および反射層５がこの順序で基板６上に成膜
形成されて構成され、その記録容量がＭＯ、ＣＤ−Ｒお
よびＣＤ−ＲＷなどの他の記録媒体の記録容量と比べて
圧倒的に大きいという特性を有している。その一方で、
この光記録媒体１では、製造後において記録層３と各保
護層２，４との間での各界面において、層と層とが剥離
する層間剥離（以下、「膜剥離」ともいう）が発生する
ことがあり、かかる場合には、書換回数の低下、ひいて
は信頼性の低下を引き起こすという特有の問題点を有し
ている。なお、本明細書における「層間剥離」には、上
記した層と層との剥離に限らず、水分などの浸透によっ
て層間に異物質が形成される状態も含まれる。2. Description of the Related Art In recent years, DVD (Digital Versatile Dis
c) Optical recording medium for both recording and reproduction (DVD-R
AM) has been commercialized. This optical recording medium 1 is shown in FIG.
As shown in FIG. 3, at least the first protective layer 2, the recording layer 3, the second protective layer 4, and the reflective layer 5 are formed in this order on the substrate 6, and their recording capacities are MO and CD-R. And has a characteristic that it is overwhelmingly larger than the recording capacity of other recording media such as CD-RW. On the other hand,
In this optical recording medium 1, delamination (hereinafter also referred to as “film delamination”) in which layers are separated from each other occurs at each interface between the recording layer 3 and the protective layers 2 and 4 after manufacturing. In such a case, there is a peculiar problem that the number of times of rewriting is reduced, and further, the reliability is reduced. It should be noted that the term “delamination” in the present specification is not limited to the above-described layer-to-layer separation, but also includes a state in which a foreign substance is formed between layers due to permeation of water or the like.
【０００３】そこで、発明者は、この膜剥離の原因につ
いて検討を重ね、記録層３と各保護層２，４との各層間
に存在する微少な水分の存在が膜剥離の発生に大きく関
係しているという事実、さらに詳細には、この各層間に
存在する水分の量が少ない程、膜剥離が起こり難くなる
という事実を見出した。具体的には、ＰＣ（ポリカーボ
ネート）等のプラスチック材料で構成された基板６は吸
湿性が高いという特質を有している。このため、基板６
は、スパッタリング処理を施す高真空槽内に搬入される
前段階において、まず大気中でアニールされて脱水処理
されると共に、さらに高真空槽の前室内において大気圧
から中真空状態（約５×１０−１Ｐａ）にまで排気され
ることによって脱水処理される。この場合において、発
明者は、この前室（ロードロック）での排気時間（以
下、「ロードロック時間」ともいう）を長くすることに
よって、記録層３と各保護層２，４との各界面における
膜剥離の発生を抑制することができるという事実を見出
した。Therefore, the inventor has repeatedly studied the cause of the film peeling, and the presence of minute water present between the recording layer 3 and the respective protective layers 2 and 4 has a great influence on the occurrence of the film peeling. It has been found that, more specifically, the smaller the amount of water present between the layers, the less likely film peeling occurs. Specifically, the substrate 6 made of a plastic material such as PC (polycarbonate) has a characteristic of high hygroscopicity. Therefore, the substrate 6
Is annealed in the atmosphere and dehydrated before being carried into a high vacuum chamber where a sputtering process is performed, and further, in a front chamber of the high vacuum chamber from atmospheric pressure to a medium vacuum state (about 5 × 10 5). It is dehydrated by being exhausted to -1 Pa). In this case, the inventor lengthens the evacuation time in the antechamber (load lock) (hereinafter, also referred to as “load lock time”), so that each interface between the recording layer 3 and each protective layer 2, 4 is increased. It was found that the occurrence of film peeling in the can be suppressed.
【０００４】したがって、記録層３と各保護層２，４と
の各界面において膜剥離の発生を回避でき信頼性の高い
光記録媒体１を製造するためには、前室でのロードロッ
ク時間をできる限り長時間に設定すればよい。Therefore, in order to avoid the occurrence of film peeling at the interfaces between the recording layer 3 and the protective layers 2 and 4, and to manufacture the highly reliable optical recording medium 1, the load lock time in the antechamber is set. It should be set as long as possible.
【０００５】[0005]
【発明が解決しようとする課題】ところが、ロードロッ
ク時間を長時間にすればする程、光記録媒体１の製造時
間が長時間化する結果、生産効率の低下に起因して光記
録媒体１の製造コストが高騰する。そこで、膜剥離の発
生を抑制しつつ、光記録媒体１の生産効率を向上させる
ためには、製造した光記録媒体１の膜剥離が発生しない
範囲内でロードロック時間をできる限り短時間に設定す
る必要がある。一方、ロードロック時間を膜剥離が発生
しないぎりぎりの程度まで短時間に設定した場合、各種
製造条件のばらつきに起因して膜剥離が発生する光記録
媒体１を出荷するおそれもある。したがって、このよう
な光記録媒体１の出荷を未然に防止するためには、製造
した光記録媒体１を使用し続けたときに将来的に膜剥離
が発生するか否かを見極める検査方法が重要なポイント
となる。この点、従来では、製造した光記録媒体１の１
ロット中から所定数を抜き出して、その所定数の光記録
媒体１に対して加速試験（例えば、温度８０度、湿度８
０％の雰囲気中で１２５時間放置）を実施し、この加速
試験の後に膜剥離が発生した光記録媒体１が存在したと
きには、そのロットに含まれる光記録媒体１のすべてを
不良品とし、光記録媒体１のすべてに膜剥離が発生して
いないときには、そのロットに含まれる光記録媒体１の
すべてを良品として扱う検査方法を採用している。However, the longer the load lock time is, the longer the manufacturing time of the optical recording medium 1 is. As a result, the production efficiency is lowered, so that the optical recording medium 1 is manufactured. Manufacturing cost rises. Therefore, in order to improve the production efficiency of the optical recording medium 1 while suppressing the occurrence of film peeling, the load lock time is set as short as possible within the range where the film peeling of the manufactured optical recording medium 1 does not occur. There is a need to. On the other hand, when the load lock time is set to a short time to the extent that film peeling does not occur, there is a risk of shipping the optical recording medium 1 in which film peeling occurs due to variations in various manufacturing conditions. Therefore, in order to prevent the shipment of such an optical recording medium 1 in advance, it is important to use an inspection method for determining whether film peeling will occur in the future when the manufactured optical recording medium 1 is continuously used. It will be a point. In this respect, the conventional optical recording medium 1
A predetermined number is extracted from the lot, and an acceleration test (for example, a temperature of 80 degrees and a humidity of 8 is performed on the predetermined number of optical recording media 1).
When left in an atmosphere of 0% for 125 hours) and there is an optical recording medium 1 in which film peeling has occurred after this acceleration test, all the optical recording media 1 included in the lot are regarded as defective products, and When film peeling does not occur on all the recording media 1, an inspection method is adopted in which all the optical recording media 1 included in the lot are treated as non-defective products.
【０００６】しかしながら、従来の加速試験による検査
方法は、その検査に長時間を要するため、光記録媒体１
の生産効率が低下し、これに起因して光記録媒体１の製
造コストが高騰しているという問題点がある。However, in the conventional inspection method based on the accelerated test, the inspection requires a long time, and therefore the optical recording medium 1
However, there is a problem that the production cost of the optical recording medium 1 is increased due to the decrease of the production efficiency.
【０００７】本発明は、上記の課題に鑑みてなされたも
のであり、製造した光記録媒体の良否を短時間で判別し
得る光記録媒体の検査方法を提供することを主目的とす
る。The present invention has been made in view of the above problems, and a main object of the present invention is to provide an inspection method for an optical recording medium, which can determine the quality of the manufactured optical recording medium in a short time.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成すべく本
発明に係る光記録媒体の検査方法は、少なくとも第１保
護層、記録層、第２保護層および反射層がこの順序で基
板上に形成された光記録媒体の良否を判別する光記録媒
体の検査方法であって、検査対象の前記光記録媒体にお
ける光反射率を測定し、予め規定した所定値と当該測定
した光反射率とを比較することによって前記光記録媒体
の良否を判別する。In order to achieve the above object, an inspection method for an optical recording medium according to the present invention is such that at least a first protective layer, a recording layer, a second protective layer and a reflective layer are provided in this order on a substrate. A method of inspecting an optical recording medium for determining the quality of an optical recording medium formed, measuring the light reflectance in the optical recording medium of the inspection target, a predetermined value defined in advance and the measured light reflectance. The quality of the optical recording medium is determined by comparison.
【０００９】この場合、層間剥離に関する検査結果が良
好となる前記光反射率を前記所定値として、前記測定し
た光反射率が当該所定値以上のときに前記光記録媒体が
良品と判別するのが好ましい。In this case, when the measured light reflectance is equal to or higher than the predetermined value, the optical recording medium is discriminated as a non-defective product, with the light reflectance that gives a good inspection result regarding delamination. preferable.
【００１０】また、前記所定値として、前記基板に対す
るロードロック時間と前記光記録媒体の光反射率との関
係、並びに前記ロードロック時間と前記記録層および前
記各保護層の間での層間剥離に関する検査結果との関係
に基づき、当該層間剥離に関する検査結果が良好となる
前記光反射率の下限値に規定するのが好ましい。Further, as the predetermined value, the relationship between the load lock time with respect to the substrate and the light reflectance of the optical recording medium, and the delamination between the load lock time and the recording layer and the protective layers are described. Based on the relationship with the inspection result, it is preferable to define the lower limit value of the light reflectance at which the inspection result regarding the delamination becomes good.
【００１１】[0011]
【発明の実施の形態】以下、添付図面を参照して、本発
明に係る光記録媒体の検査方法の好適な実施の形態につ
いて説明する。BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of an optical recording medium inspection method according to the present invention will be described below with reference to the accompanying drawings.
【００１２】最初に、本発明に係る光記録媒体の検査方
法に従って検査される光記録媒体１について説明する。
なお、従来例で説明した構成と同一の構成については同
一の符合を付し、重複する説明は省略する。First, the optical recording medium 1 to be inspected by the optical recording medium inspection method according to the present invention will be described.
The same components as those described in the conventional example are designated by the same reference numerals, and duplicate description will be omitted.
【００１３】光記録媒体（ＤＶＤ−ＲＡＭ）１は、図３
に示すように、少なくとも第１保護層２、記録層３、第
２保護層４および反射層５がこの順序で基板６上に形成
されて構成されている。この場合、第１保護層２および
第２保護層４は、ＺｎＳ−ＳｉＯ２等の誘電体材料を用
いて形成されている。記録層３は、Ｇｅ、Ｓｂ、Ｔｅを
主な構成元素として形成されている。なお、記録層３と
各保護層２，４との各界面（境界）部分には、記録層３
の結晶化速度を速め、かつ繰り返し書換回数を向上させ
るために、Ｇｅ、Ｃｒ、Ｎを主な構成元素とするバリア
層（図示せず）が形成されている。また、反射層５は、
一例としてＡｇやＡｌを主な構成元素として構成されて
いる。基板６は、プラスチック材料を用いて構成され、
射出成形によって製造される。この場合、プラスチック
材料としては、ＰＣ（ポリカーボネート）等、種々の材
料を採用することができるが、射出成形時の転写性（特
に、基板６の表面に形成されるグルーブの転写性）を考
慮した場合、ＰＣが好適である。なお、各層に用いられ
る材料は、上記の材料に限定されず、各種の材料を用い
ることができる。The optical recording medium (DVD-RAM) 1 is shown in FIG.
As shown in, at least the first protective layer 2, the recording layer 3, the second protective layer 4, and the reflective layer 5 are formed on the substrate 6 in this order. In this case, the first protective layer 2 and the second protective layer 4 are formed using a dielectric material such as ZnS—SiO 2 . The recording layer 3 is formed with Ge, Sb, and Te as main constituent elements. The recording layer 3 is formed at each interface (boundary) between the recording layer 3 and the protective layers 2 and 4.
A barrier layer (not shown) containing Ge, Cr, and N as main constituent elements is formed in order to increase the crystallization speed and improve the number of times of rewriting repeatedly. In addition, the reflective layer 5 is
As an example, it is composed mainly of Ag and Al. The substrate 6 is made of a plastic material,
Manufactured by injection molding. In this case, various materials such as PC (polycarbonate) can be adopted as the plastic material, but transferability during injection molding (particularly, transferability of the groove formed on the surface of the substrate 6) is taken into consideration. In this case, PC is suitable. The material used for each layer is not limited to the above materials, and various materials can be used.
【００１４】次に、光記録媒体１の製造方法について、
その概要を説明する。まず、基板６をアニールして脱水
処理する。次いで、この基板６を前室（ロードロック）
に搬入し、その前室を所定のロードロック時間だけ中真
空状態下に維持することにより、基板６の水分をさらに
除去する。これらの脱水処理を施した後、この基板６を
高真空槽内に搬入し、この高真空槽を高真空状態に維持
しつつ、基板６の表面に、少なくとも第１保護層２、記
録層３、第２保護層４および反射層５をスパッタリング
やイオンプレーティング等の物理的蒸着法によって順次
成膜形成する。これにより、光記録媒体１が製造され
る。Next, regarding the manufacturing method of the optical recording medium 1,
The outline will be described. First, the substrate 6 is annealed and dehydrated. Next, the substrate 6 is placed in the front chamber (load lock)
Then, the water in the substrate 6 is further removed by keeping the front chamber in a vacuum state for a predetermined load lock time. After these dehydration treatments, the substrate 6 is loaded into a high vacuum tank, and while maintaining the high vacuum tank in a high vacuum state, at least the first protective layer 2 and the recording layer 3 are formed on the surface of the substrate 6. The second protective layer 4 and the reflective layer 5 are sequentially formed by a physical vapor deposition method such as sputtering or ion plating. Thereby, the optical recording medium 1 is manufactured.
【００１５】次いで、製造した光記録媒体１の膜剥離の
可能性有無について検査する検査方法について説明す
る。Next, an inspection method for inspecting the produced optical recording medium 1 for the possibility of film peeling will be described.
【００１６】まず、検査に先立ち、検査時に光記録媒体
１の良否判別に使用するための基準データを作成する。
この基準データ作成手順としては、最初に、上記の製造
方法に従い、ロードロック時間（以下、「ＬＬ時間」と
もいう）を変化させて複数の光記録媒体１を製造する。
次に、製造した各光記録媒体１に対して、基板６側から
光を照射して光記録媒体１の光反射率を測定することに
より、図１に示すロードロック時間と光記録媒体１の光
反射率との関係を求める。次いで、従来例で説明した加
速試験を実施して膜剥離の発生有無を検査することによ
り、図２に示すように、ロードロック時間と光記録媒体
１における膜剥離発生有無についての検査結果との関係
を求める。なお、図１において、光反射率は、一例とし
て、最も短いロードロック時間（１秒）における光反射
率を基準（１００％）としたときの各ロードロック時間
における相対的な光反射率をパーセンテージで表現し
た。次に、求めたこれら２つの関係に基づき、膜剥離の
検査結果が良となる光反射率の下限値を求め、この下限
値を基準データとする。First, prior to the inspection, reference data to be used for judging the quality of the optical recording medium 1 at the time of the inspection is prepared.
As the procedure for creating the reference data, first, a plurality of optical recording media 1 are manufactured by changing the load lock time (hereinafter, also referred to as “LL time”) according to the manufacturing method described above.
Next, by irradiating each manufactured optical recording medium 1 with light from the substrate 6 side and measuring the light reflectance of the optical recording medium 1, the load lock time and the optical recording medium 1 shown in FIG. Find the relationship with the light reflectance. Next, the accelerated test described in the conventional example is performed to inspect whether or not film peeling has occurred, and thus, as shown in FIG. 2, the load lock time and the inspection result regarding whether or not film peeling has occurred in the optical recording medium 1 are compared. Seek a relationship. In FIG. 1, the light reflectance is, as an example, a relative light reflectance as a percentage at each load lock time when the light reflectance at the shortest load lock time (1 second) is used as a reference (100%). Expressed in. Next, based on the obtained two relations, the lower limit value of the light reflectance at which the film peeling inspection result is good is obtained, and this lower limit value is used as the reference data.
【００１７】具体的には、図１に示す関係から、ロード
ロック時間を長くすればする程、光記録媒体１の光反射
率が増加するという関係が明らかとなる。これは、ロー
ドロック時間を長くすればする程、光記録媒体１内部で
の光屈折率が小さくなる結果、光反射率が増加するもの
と考えられる。一方、図２に示す関係から、ロードロッ
ク時間を所定時間（一例として５．３秒）以上に規定す
ることにより、膜剥離に関する検査結果が良となること
が明らかである。そこで、図１に示す関係からロードロ
ック時間が所定時間のときの光反射率（所定値：約１０
２．３％）を求めることにより、測定した光反射率が所
定値以上のときには、膜剥離に関する検査結果が良とな
ると推測して光記録媒体１の良否を判別することができ
る。つまり、この所定値（約１０２．３％）は、膜剥離
の検査結果が良となる光反射率の下限値を意味し、この
下限値が基準データとして用いられる。なお、最も短い
ロードロック時間（１秒）における絶対的な光反射率を
基準データとし、この基準データと、各ロードロック時
間における絶対的な光反射率とを比較することもでき
る。Specifically, from the relationship shown in FIG. 1, it becomes clear that the longer the load lock time, the greater the light reflectance of the optical recording medium 1. It is considered that the longer the load lock time is, the smaller the optical refractive index inside the optical recording medium 1 is, and the optical reflectance is increased. On the other hand, from the relationship shown in FIG. 2, it is clear that the inspection result regarding the film peeling becomes good by defining the load lock time to a predetermined time (5.3 seconds as an example) or more. Therefore, from the relationship shown in FIG. 1, the light reflectance when the load lock time is a predetermined time (predetermined value: about 10
2.3%), it is possible to judge whether the optical recording medium 1 is good or bad by inferring that the inspection result regarding film peeling is good when the measured light reflectance is equal to or higher than a predetermined value. That is, this predetermined value (about 102.3%) means the lower limit value of the light reflectance at which the inspection result of the film peeling is good, and this lower limit value is used as the reference data. It is also possible to use the absolute light reflectance in the shortest load lock time (1 second) as reference data and compare this reference data with the absolute light reflectance in each load lock time.
【００１８】次に、製造した光記録媒体１に対する検査
方法について説明する。この検査方法では、まず、製造
した各光記録媒体１に対して、上記基準データを作成し
た条件と同一条件下で、その光反射率を測定する。次
に、測定した光反射率と基準データとを比較して、測定
した光反射率が基準データ（約１０２．３％）以上の光
反射率のときには、前室において水分が十分に除去され
ているため、残存する水分によって膜剥離が引き起こさ
れる可能性が極めて低く、その光記録媒体１が良品であ
ると判別する。一方、測定した光反射率が基準データよ
りも小さいときには、前室における水分除去が不十分の
ため、残存する水分によって膜剥離が引き起こされる可
能性が高く、その光記録媒体１が不良品であると判別す
る。Next, an inspection method for the manufactured optical recording medium 1 will be described. In this inspection method, first, the optical reflectance of each manufactured optical recording medium 1 is measured under the same conditions as the conditions for creating the above-mentioned reference data. Next, the measured light reflectance is compared with the reference data, and when the measured light reflectance is equal to or higher than the reference data (about 102.3%), water is sufficiently removed in the front chamber. Therefore, it is extremely unlikely that film peeling will be caused by residual moisture, and the optical recording medium 1 is determined to be a good product. On the other hand, when the measured light reflectance is smaller than the reference data, the removal of water in the front chamber is insufficient, and therefore the remaining water is likely to cause film peeling, and the optical recording medium 1 is a defective product. To determine.
【００１９】このように、本発明に係る光記録媒体の検
査方法によれば、製造した光記録媒体１の光反射率を測
定し、測定した光反射率と予め規定した光反射率の下限
値（基準データ）とを比較することにより、製造した光
記録媒体１の良否を短時間で判別することができる。こ
のため、すべての光記録媒体に対して加速試験を行う従
来の検査方法と比較して、検査に要する検査時間を格段
に短縮することができる。したがって、生産性の向上を
図ることができるため、検査コストを低減することがで
きる結果、光記録媒体１の信頼性を確保しつつ製造コス
トを十分に低減することができる。また、基準データを
光反射率の下限値に規定し、その基準データと測定した
光反射率とを比較することによって光記録媒体１の良否
を判別することにより、短時間でしかも正確に光記録媒
体１の良否を判別することができる。As described above, according to the optical recording medium inspection method of the present invention, the optical reflectance of the manufactured optical recording medium 1 is measured, and the measured optical reflectance and the lower limit of the predetermined optical reflectance are measured. The quality of the manufactured optical recording medium 1 can be determined in a short time by comparing with (reference data). Therefore, the inspection time required for the inspection can be significantly shortened as compared with the conventional inspection method in which the acceleration test is performed on all the optical recording media. Therefore, since the productivity can be improved and the inspection cost can be reduced, the manufacturing cost can be sufficiently reduced while ensuring the reliability of the optical recording medium 1. Further, by defining the reference data as the lower limit value of the light reflectance and comparing the reference data with the measured light reflectance to judge the quality of the optical recording medium 1, the optical recording can be performed accurately in a short time. The quality of the medium 1 can be determined.
【００２０】なお、本発明は、上記した発明の実施の形
態に限らず、適宜変更が可能である。例えば、ＤＶＤ−
ＲＡＭ以外の光記録媒体（ＤＶＤ−ＲＯＭ等）に対する
検査にも適用することができる。The present invention is not limited to the above-described embodiments of the invention, and can be modified as appropriate. For example, DVD-
It can also be applied to an inspection for an optical recording medium (DVD-ROM, etc.) other than RAM.
【００２１】[0021]
【発明の効果】以上のように、本発明に係る光記録媒体
の検査方法によれば、検査対象の光記録媒体における光
反射率を測定し、予め規定した所定値と測定した光反射
率とを比較することによって光記録媒体の良否を判別す
ることにより、製造した光記録媒体の良否を短時間で判
別することができる。したがって、検査工程に要する時
間を十分に短縮することができる結果、高い信頼性を確
保しつつ、光記録媒体の製造コストを十分に低減するこ
とができる。また、基板に対するロードロック時間と光
記録媒体の光反射率との関係、並びにロードロック時間
と記録層および各保護層の間での層間剥離に関する検査
結果との関係に基づき、層間剥離に関する検査結果が良
好となる光反射率の下限値に所定値を規定し、その所定
値と測定した光反射率とを比較して光記録媒体の良否を
判別することにより、短時間でしかも正確に光記録媒体
の良否を判別することができる。As described above, according to the optical recording medium inspection method of the present invention, the optical reflectance of the optical recording medium to be inspected is measured, and the predetermined value and the predetermined optical reflectance are measured. The quality of the manufactured optical recording medium can be determined in a short time by determining the quality of the optical recording medium by comparing the above. Therefore, the time required for the inspection process can be sufficiently shortened, and as a result, it is possible to sufficiently reduce the manufacturing cost of the optical recording medium while ensuring high reliability. Also, based on the relationship between the load-lock time for the substrate and the optical reflectance of the optical recording medium, and the relationship between the load-lock time and the inspection result for the inter-layer peeling between the recording layer and each protective layer, the inspection result for the inter-layer peeling By setting a predetermined value for the lower limit of the light reflectance that makes the optical recording medium good, and comparing the predetermined value with the measured light reflectance to determine the quality of the optical recording medium, the optical recording can be performed accurately in a short time. The quality of the medium can be determined.
【図１】光記録媒体１のロードロック時間（ＬＬ時間）
に対する相対的な光反射率の特性を示す特性図である。FIG. 1 is a load lock time (LL time) of an optical recording medium 1.
It is a characteristic view which shows the characteristic of the relative light reflectance with respect to.
【図２】光記録媒体１のロードロック時間に対する膜剥
離の検査結果を示す説明図である。FIG. 2 is an explanatory diagram showing an inspection result of film peeling with respect to a load lock time of the optical recording medium 1.
【図３】光記録媒体１の構造を説明するための説明図で
ある。3 is an explanatory diagram for explaining the structure of the optical recording medium 1. FIG.
１ 光記録媒体 ２ 第１保護層 ３ 記録層 ４ 第２保護層 ５ 反射層 ６ 基板 1 Optical recording medium 2 First protective layer 3 recording layers 4 Second protective layer 5 Reflective layer 6 substrate
Claims (3)
護層および反射層がこの順序で基板上に形成された光記
録媒体の良否を判別する光記録媒体の検査方法であっ
て、 検査対象の前記光記録媒体における光反射率を測定し、
予め規定した所定値と当該測定した光反射率とを比較す
ることによって前記光記録媒体の良否を判別する光記録
媒体の検査方法。1. A method for inspecting an optical recording medium, comprising at least a first protective layer, a recording layer, a second protective layer and a reflective layer formed in this order on a substrate to determine the quality of the optical recording medium. Measuring the light reflectance in the optical recording medium of interest,
A method of inspecting an optical recording medium, comprising determining whether the optical recording medium is good or bad by comparing a predetermined value defined in advance and the measured light reflectance.
前記光反射率を前記所定値として、前記測定した光反射
率が当該所定値以上のときに前記光記録媒体が良品と判
別する請求項１記載の光記録媒体の検査方法。2. The optical recording medium is determined to be non-defective when the measured light reflectance is equal to or higher than the predetermined value, with the light reflectance that gives a good inspection result regarding delamination. A method for inspecting an optical recording medium as described above.
ロック時間と前記光記録媒体の光反射率との関係、並び
に前記ロードロック時間と前記記録層および前記各保護
層の間での層間剥離に関する検査結果との関係に基づ
き、当該層間剥離に関する検査結果が良好となる前記光
反射率の下限値に規定されている請求項１または２記載
の光記録媒体の検査方法。3. The predetermined value relates to a relationship between a load lock time with respect to the substrate and a light reflectance of the optical recording medium, and delamination between the load lock time and the recording layer and each of the protective layers. 3. The method for inspecting an optical recording medium according to claim 1, wherein the lower limit of the optical reflectance is defined so that the inspection result regarding the delamination becomes good based on the relationship with the inspection result.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001227226A JP2003045093A (en) | 2001-07-27 | 2001-07-27 | Inspection method for optical recording medium |
| PCT/JP2002/007510 WO2003010764A1 (en) | 2001-07-27 | 2002-07-24 | Optical recording medium inspecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001227226A JP2003045093A (en) | 2001-07-27 | 2001-07-27 | Inspection method for optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003045093A true JP2003045093A (en) | 2003-02-14 |
Family
ID=19059922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001227226A Withdrawn JP2003045093A (en) | 2001-07-27 | 2001-07-27 | Inspection method for optical recording medium |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2003045093A (en) |
| WO (1) | WO2003010764A1 (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07176049A (en) * | 1993-12-20 | 1995-07-14 | Idemitsu Material Kk | Detection and detector of defect of disk-shaped recording medium |
| JP3402026B2 (en) * | 1995-11-24 | 2003-04-28 | 松下電器産業株式会社 | Manufacturing method and evaluation method of optical information recording medium |
| JP3732894B2 (en) * | 1996-06-26 | 2006-01-11 | 松下電器産業株式会社 | Method for measuring film thickness of multilayer thin film, method for manufacturing optical information recording medium using the method, and apparatus for manufacturing optical information recording medium |
| JPH1131380A (en) * | 1997-07-10 | 1999-02-02 | Ekisupaato Magnetics Kk | Cd-r testing device |
| JP2000331346A (en) * | 1999-05-20 | 2000-11-30 | Victor Co Of Japan Ltd | Method for initializing optical information recording medium and initialized optical information recording medium |
-
2001
- 2001-07-27 JP JP2001227226A patent/JP2003045093A/en not_active Withdrawn
-
2002
- 2002-07-24 WO PCT/JP2002/007510 patent/WO2003010764A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003010764A1 (en) | 2003-02-06 |
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