JP2003043502A - Device and method for manufacturing liquid crystal device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent alignment failure of liquid crystal from occurring by controlling liquid crystal infiltration speed in a liquid crystal injection process. SOLUTION: The inside and outside of a liquid crystal panel 92 is evacuated of air in a vacuum chamber. In this state, the vacuum chamber 80 is released to the atmosphere by leaking air and the liquid crystal is made to infiltrate into the inside of the cell of the liquid crystal panel 92 by the atmospheric pressure difference between the inside and outside of the cell. A two-dimensional CCD 94 detects the state of the infiltration, and a liquid crystal infiltration speed detecting part 89 calculates a liquid crystal infiltration speed from changes in the state of the infiltration. A computer 88 controls an exhaust air control circuit 83 and a leakage control circuit 87 to control at least either an air volume to be evacuated from the vacuum chamber or a leakage volume of the sir, and thereby adjust a degree of vacuum in the vacuum chamber 80 to maintain the infiltration speed of the liquid crystal at an optimum value. In such a manner, alignment failure is prevented from being caused by streaming alignment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device manufacturing apparatus and a manufacturing method thereof for performing a liquid crystal injection step of injecting liquid crystal into a liquid crystal device.

[0002]

2. Description of the Related Art A liquid crystal device such as a liquid crystal light valve is constructed by enclosing a liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, for example, a thin film transistor (hereinafter, referred to as T
By arranging active elements such as FT) in a matrix, and arranging a counter electrode on the other substrate, and changing the optical characteristics of the liquid crystal layer sealed between both substrates according to an image signal,
Enables image display.

The TFT substrate on which the TFTs are arranged and the counter substrate opposed to the TFT substrate are manufactured separately.
After both substrates are bonded with high precision in the panel assembly process, liquid crystal is sealed.

In the panel assembling process, first, an alignment film is formed on the facing surfaces of the TFT substrate and the counter substrate manufactured in each substrate process, that is, on the surfaces of the counter substrate and the liquid crystal layer of the TFT substrate in contact with each other. Then, a rubbing process is performed. Next, a seal portion serving as an adhesive is formed on the edge of one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. A notch is provided in a part of the seal portion, and the liquid crystal is sealed through this notch.

By forming an alignment film and performing rubbing treatment, the alignment of liquid crystal molecules when no voltage is applied is determined. The alignment film is formed, for example, by applying polyimide to a thickness of about several tens of nanometers. By forming the alignment films on the surfaces of both substrates facing the liquid crystal layer, the liquid crystal molecules can be aligned along the surfaces of the substrates. The rubbing process is
By aligning the direction of polymer side chains in one direction, or by forming fine grooves on the surface of the alignment film to form a film with alignment anisotropy, by subjecting the alignment film to rubbing treatment in a fixed direction, the liquid crystal The sequence of the molecule can be defined.

That is, in the panel assembly process, the TFT substrate and the counter substrate manufactured in each substrate process are first subjected to the rubbing treatment by forming the alignment films on the opposing surfaces. Next, a seal portion serving as an adhesive is formed outside the display area on one of the substrates. The TFT substrate and the counter substrate are attached to each other using the seal portion, and pressure-bonded and cured while performing alignment. A notch forming a liquid crystal inlet is provided in a part of the seal portion, and the liquid crystal is sealed through this notch.

In the liquid crystal injecting process, it is necessary to uniformly fill the liquid crystal in a space (in the cell) of several microns sandwiched between two substrates. Therefore, a vacuum chamber is used to inject the liquid crystal. That is, the liquid crystal panel is placed in a vacuum chamber, the inside of the cell is evacuated, and the vacuum chamber is opened to the atmosphere while the liquid crystal is dropped on the inlet of the liquid crystal cell. Then, the liquid crystal permeates into the liquid crystal panel through the injection port due to the pressure difference between the inside and the outside of the cell.

[0008]

By the way, as the liquid crystal penetrates into the cell, the capacity of the liquid crystal in the cell increases. FIG. 12 is an explanatory diagram for explaining the permeation state of the liquid crystal in the liquid crystal cell. FIGS. 12A to 12D show the permeation state according to the passage of time. The arrow in FIG. 12 indicates the liquid crystal permeation direction.

FIG. 12A shows a state immediately after the liquid crystal has permeated. Further, as shown in FIGS. 12B, 12C, and 12D, the liquid crystal penetrates and the liquid crystal cell is filled with the liquid crystal. Immediately after permeation of the liquid crystal, as shown in FIG. 12A, the liquid crystal capacity in the cell is small, so that the liquid crystal permeates into the cell at a relatively high speed due to the pressure difference between the inside and outside of the cell. However, when the liquid crystal capacity in the cell is reduced to about half, the size of the arc formed by the tip side of the permeated liquid crystal becomes large (FIG. 12 (b)), and the permeation speed decreases. The flow direction of the liquid crystal is shown in FIG.
2 (c) and FIG. 12 (d).

That is, the injection speed becomes slower as time elapses from the start of the injection of the liquid crystal into the liquid crystal cell. When the liquid crystal velocity is high, the orientation of the polymer side chains provided by rubbing the alignment film is easily disturbed by the flow frictional force due to the liquid crystal injection. As a result, flow orientation is generated due to the flow trajectory, and display uniformity is degraded.

On the other hand, when the liquid crystal injection speed is slow, a stable flow orientation is formed by the flow of the liquid crystal,
The display uniformity is reduced.

In particular, when the deviation between the liquid crystal permeation direction (flow orientation direction) and the rubbing direction is large, these flow orientations become remarkable, and a streak-like pattern along the flow orientation is displayed on the screen. .

The present invention has been made in view of the above problems, and makes it possible to control the injection rate of liquid crystal that permeates into the liquid crystal cell, thereby causing the occurrence of defective liquid crystal alignment due to flow frictional force and flow alignment. An object of the present invention is to provide a manufacturing apparatus of a liquid crystal device and a manufacturing method thereof that can prevent the above.

[0014]

In a liquid crystal device manufacturing apparatus according to the present invention, an opening is provided for a liquid crystal cell in which an element substrate and a counter substrate are opposed and fixed to each other with an opening. Liquid crystal injecting means for injecting liquid crystal through the liquid crystal cell, permeation state detecting means for detecting the permeation state of the liquid crystal into the liquid crystal cell, and the liquid crystal into the liquid crystal cell based on the detection result of the permeation state detecting means. And a control means for controlling the permeation rate of the liquid crystal by the liquid crystal injecting means based on the permeation rate of the liquid crystal determined by the permeation rate detection means. To do.

According to this structure, the liquid crystal cell constituted by the element substrate and the counter substrate fixed to face each other has an opening for injecting liquid crystal. The liquid crystal injecting means injects liquid crystal through this opening. The permeation state detection means detects the permeation state of the liquid crystal into the liquid crystal cell. Based on the detection result, the permeation rate detecting means determines the permeation rate of the liquid crystal into the liquid crystal cell. The control means controls the permeation speed of the liquid crystal by the liquid crystal injection means based on the permeation speed of the liquid crystal obtained by the permeation speed detection means. The permeation rate of the liquid crystal is controlled by detecting the permeation state of the liquid crystal, and the liquid crystal permeation rate can be reliably controlled.

The permeation state detecting means captures an image of the light passing through the polarizing plate and the liquid crystal cell, which are disposed on the incident surface and the emission surface of the liquid crystal cell, and the permeation state of the liquid crystal is obtained according to the imaging result. And an image sensor for detecting the.

According to such a structure, in the liquid crystal cell portion where the liquid crystal has permeated, unlike other portions, for example, light is transmitted through the polarizing plate and the liquid crystal cell. The image sensor detects the light transmitted through the polarizing plate and the liquid crystal cell, and detects the permeation state based on the detection result. Thereby, the permeation state of the liquid crystal can be accurately detected.

The image pickup device is characterized in that the permeation state of the liquid crystal is detected by the number of pixels on the light receiving surface that receives the light passing through the polarizing plate and the liquid crystal cell.

According to such a configuration, the permeation state can be detected according to the resolution of the light receiving surface of the image pickup element, and the detection can be performed with extremely high accuracy.

The permeation rate detecting means is characterized in that the permeation rate of the liquid crystal is obtained based on a change in the detection result of the permeation state detecting means.

With such a structure, the permeation rate of the liquid crystal can be obtained by the change in the permeation state of the liquid crystal into the liquid crystal cell. This allows reliable detection of the permeation rate.

The liquid crystal injecting means includes a vacuum chamber in which the liquid crystal cell is arranged, and a vacuum degree control means for performing at least one of exhausting from the vacuum chamber and leaking to the vacuum chamber. Is controlling the vacuum degree control means based on the permeation rate of the liquid crystal obtained by the permeation rate detection means to adjust the pressure difference inside and outside the liquid crystal cell by controlling the vacuum degree inside the vacuum chamber. And controlling the permeation rate of the liquid crystal.

According to this structure, the vacuum degree control means first evacuates the vacuum chamber to create a vacuum inside and outside the liquid crystal cell in the vacuum chamber. Next, after the liquid crystal is dropped near the opening of the liquid crystal cell, air is leaked into the vacuum chamber to provide a pressure difference between the inside and outside of the liquid crystal cell so that the liquid crystal permeates into the cell through the opening. In this case, the control means controls the vacuum degree control means based on the permeation rate of the liquid crystal obtained by the permeation rate detection means to control the degree of vacuum in the vacuum chamber. That is, the permeation speed of the liquid crystal is controlled by adjusting the pressure difference between the inside and the outside of the liquid crystal cell. Thereby, the liquid crystal permeation rate can be surely controlled.

The liquid crystal injecting means includes temperature control means for cooling and / or heating the liquid crystal cell, and the control means is based on the permeation rate of the liquid crystal obtained by the permeation rate detecting means. The temperature control means is controlled to control the temperature environment of the liquid crystal cell, thereby adjusting the viscosity of the liquid crystal and controlling the permeation rate of the liquid crystal.

With this structure, the liquid crystal penetrates into the liquid crystal cell through the opening of the liquid crystal cell. In this case, the control means controls the temperature control means based on the permeation rate of the liquid crystal determined by the permeation rate detection means to adjust the temperature environment of the liquid crystal cell. Thereby, the permeation rate of the liquid crystal can be controlled reliably.

The temperature control means is characterized by comprising a high temperature tank in which the liquid crystal cell is arranged, and a blowing means for blowing at least one of cold air and warm air to the high temperature tank.

According to this structure, the temperature of the liquid crystal cell is lowered by blowing cool air to the high temperature tank, and the temperature of the liquid crystal cell is raised by blowing warm air to the high temperature tank. This makes it possible to adjust the viscosity of the liquid crystal that permeates the liquid crystal cell and reliably control the permeation rate of the liquid crystal.

The liquid crystal cell has an opening for injecting the liquid crystal and an opening for exhausting air from the liquid crystal cell, and the liquid crystal injecting means injects a predetermined amount of liquid crystal into the injecting opening. Injecting means for injecting with pressure, and exhaust means for exhausting the air in the liquid crystal cell from the exhaust opening with a predetermined exhaust volume, the control means, the liquid crystal determined by the permeation rate detecting means The liquid crystal permeation rate is controlled by controlling at least one of the injecting means and the evacuation means based on the permeating rate.

According to this structure, the liquid crystal cell has an opening for injecting liquid crystal and an opening for exhausting air from the liquid crystal cell. The injecting means injects the liquid crystal into the injecting opening with a predetermined injecting pressure, and the exhausting means exhausts the air in the liquid crystal cell from the exhausting opening with a predetermined exhaust amount. This allows
The liquid crystal near the injection opening enters the liquid crystal cell through the injection opening. By controlling the injection pressure and the exhaust volume based on the permeation rate of the liquid crystal determined by the permeation rate detection means,
The permeation rate of liquid crystal can be controlled accurately.

The liquid crystal cell is provided with an opening for injecting the liquid crystal and an opening for exhausting air from the liquid crystal cell, and the liquid crystal injecting means has a predetermined exhaust amount from the exhaust opening. The liquid crystal cell is provided with an exhaust means for exhausting air, and the control means controls the exhaust means based on the permeation rate of the liquid crystal obtained by the permeation rate detecting means, thereby permeating the liquid crystal. It is characterized by controlling the speed.

According to this structure, the liquid crystal cell has an opening for injecting liquid crystal and an opening for exhausting air from the liquid crystal cell. The exhaust unit exhausts the air in the liquid crystal cell from the exhaust opening with a predetermined exhaust amount. As a result, the liquid crystal near the injection opening enters the liquid crystal cell through the injection opening. By controlling the exhaust gas amount based on the permeation rate of the liquid crystal obtained by the permeation rate detection means, the permeation rate of the liquid crystal can be accurately controlled.

The liquid crystal cell is provided with an opening for injecting the liquid crystal and an opening for exhausting air from the liquid crystal cell, and the liquid crystal injecting means applies a predetermined injection pressure from the opening for injecting liquid. Controlling the infusion rate of the liquid crystal by controlling the injecting means based on the permeation rate of the liquid crystal determined by the permeation rate detecting means. Is characterized by.

According to this structure, the injection means injects the liquid crystal at a predetermined pressure through the injection opening. By controlling the injection pressure based on the permeation rate of the liquid crystal obtained by the permeation rate detection means, the permeation rate of the liquid crystal can be accurately controlled.

The image pickup device is a two-dimensional CCD.

With such a structure, it is possible to accurately detect the permeation state of the liquid crystal.

The control means sets the permeation speed of the liquid crystal by the liquid crystal injection means to a different value for each region of the liquid crystal cell.

With this structure, the permeation rate can be controlled for each region of the liquid crystal cell, and the optimum permeation rate can be set in all the regions of the liquid crystal cell.

In the method of manufacturing a liquid crystal device according to the present invention, liquid crystal is injected through the opening into a liquid crystal cell constituted by an element substrate and a counter substrate fixed to each other with an opening. Liquid crystal injection processing, permeation state detection processing for detecting the permeation state of the liquid crystal into the liquid crystal cell, and permeation for determining the permeation rate of the liquid crystal into the liquid crystal cell based on the detection result of the permeation state detection processing. It is characterized by comprising a speed detection process and a process of controlling the permeation speed of the liquid crystal by the liquid crystal injection process based on the permeation speed of the liquid crystal obtained in the permeation speed detection process.

With this structure, the liquid crystal cell has an opening for injecting liquid crystal. Liquid crystal is injected through this opening by the liquid crystal injection process. The permeation state of the liquid crystal into the liquid crystal cell is detected, and the permeation rate of the liquid crystal into the liquid crystal cell is obtained based on the detection result. The permeation rate of the liquid crystal is controlled based on the obtained permeation rate of the liquid crystal. As a result, it is possible to reliably control the liquid crystal permeation rate.

[0040]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows the first of the present invention.
FIG. 4 is an explanatory diagram showing a manufacturing apparatus of a liquid crystal device according to the embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device. FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon, and FIG. 4 is an assembly process for bonding the element substrate and the counter substrate to enclose liquid crystal. It is sectional drawing which cuts and shows the liquid crystal device after completion | finish in the position of the HH 'line of FIG. FIG. 5 is a sectional view showing the liquid crystal device in detail.

In this embodiment, the permeation speed of the liquid crystal is set to an optimum speed by controlling the pressure difference inside and outside the liquid crystal cell.

First, the structure of the liquid crystal panel will be described with reference to FIGS.

As shown in FIGS. 3 and 4, the liquid crystal panel is constituted by enclosing the liquid crystal 50 between the element substrate 10 such as a TFT substrate and the counter substrate 20. Pixel electrodes that form pixels are arranged in a matrix on the element substrate 10. FIG. 2 shows an equivalent circuit of the elements on the element substrate 10 which form the pixels.

As shown in FIG. 2, in the pixel area,
The plurality of scanning lines 3a and the plurality of data lines 6a are arranged so as to intersect with each other, and the pixel electrodes 9a are arranged in a matrix in a region partitioned by the scanning lines 3a and the data lines 6a. A TFT 30 is provided corresponding to each intersection of the scanning line 3a and the data line 6a, and the pixel electrode 9a is connected to this TFT 30.

The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. This pixel electrode 9
A voltage between a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. Further, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 enables the voltage of the pixel electrode 9a to be retained for a time that is, for example, three digits longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.

FIG. 5 is a schematic sectional view of a liquid crystal panel focusing on one pixel.

The element substrate 10 made of glass or quartz is provided with an LD.
A TFT 30 having a D structure is provided. TFT30
Is provided with a scanning line 3a forming a gate electrode via an insulating film 2 in a semiconductor layer in which a channel region 1a, a source region 1d and a drain region 1e are formed. A data line 6a is laminated on the TFT 30 via the first interlayer insulating film 4,
The data line 6a is electrically connected to the source region 1d through the contact hole 5. A pixel electrode 9a is stacked on the data line 6a via a second interlayer insulating film 7, and the pixel electrode 9a is electrically connected to the drain region 1e via a contact hole 8.

When the ON signal is supplied to the scanning line 3a (gate electrode), the channel region 1a becomes conductive,
The source region 1d and the drain region 1e are connected to each other, and the image signal supplied to the data line 6a is applied to the pixel electrode 9a.

A storage capacitor electrode 1f extending from the drain region 1e is formed in the semiconductor layer. The storage capacitance electrode 1f is connected to the capacitance line 3b via the insulating film 2 which is a dielectric film.
Are arranged so as to face each other, and thereby a storage capacitor 70 is formed. An alignment film 16 made of a polyimide-based polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction.

On the other hand, the counter substrate 20 is provided with the first light-shielding film 23 in a region facing the data line 6a, the scanning line 3a and the TFT 30 forming region of the TFT array substrate, that is, in the non-display region of each pixel. . Due to the first light-shielding film 23, incident light from the counter substrate 20 side allows the channel region 1a, the source region 1d and the drain region 1e of the TFT 30 to be incident.
Is prevented from entering. A counter electrode (common electrode) 21 is formed on the first light-shielding film 23 over the entire surface of the substrate 20. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21 and rubbed in a predetermined direction.

Liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. As a result, the TFT3
0 writes the image signal supplied from the data line 6a to the pixel electrode 9a at a predetermined timing. Depending on the written potential difference between the pixel electrode 9a and the counter electrode 21, the orientation or order of the molecular assembly of the liquid crystal 50 is changed to modulate light and enable gradation display.

As shown in FIGS. 3 and 4, the counter substrate 20
A second light-shielding film 42 is provided as a frame for partitioning the display area. The second light shielding film 42 is, for example, the first light shielding film 2
It is made of the same or different light-shielding material as 3.

A sealing material 41 for enclosing the liquid crystal in a region outside the second light shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is arranged so as to substantially match the contour shape of the counter substrate 20, and fixes the element substrate 10 and the counter substrate 20 to each other. The sealing material 41 is the element substrate 1
A part of one side of 0 is missing, and the liquid crystal 5 is provided in a gap between the bonded element substrate 10 and counter substrate 20.
A liquid crystal injection port 78 for injecting 0 is formed. After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.

A data line driving circuit 61 and mounting terminals 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and along two sides adjacent to the one side. , A scanning line drive circuit 63 is provided. A plurality of wirings 64 for connecting the scanning line drive circuits 63 provided on both sides of the screen display area are provided on the remaining side of the element substrate 10. The element substrate 1 is provided at least at one corner of the counter substrate 20.
A conductive material 65 is provided to electrically connect 0 and the counter substrate 20.

Next, the panel assembly process will be described.
The element substrate 10 (TFT substrate) and the counter substrate 20 are manufactured separately. With respect to the TFT substrate and the counter substrate 20 respectively prepared, polyimide (P
Apply I). Next, the alignment film 16 on the surface of the element substrate 10
A rubbing process is performed on the alignment film 22 on the surface of the counter substrate 20.

Next, a cleaning process is performed. This washing process
It is for removing dust generated by the rubbing process. When the cleaning process is completed, the sealing material 41 and the conductive material 65 (see FIG. 3) are formed. Next, the element substrate 10
And the counter substrate 20 are bonded to each other and pressure-bonded while performing alignment to cure the sealing material 41. Finally, the liquid crystal is sealed from a notch provided in a part of the sealing material 41, and the notch is closed to seal the liquid crystal.

In the present embodiment, the liquid crystal filling step is performed by the apparatus shown in FIG.

In FIG. 1, a pipe 81 is attached to the vacuum chamber 80, and the pipe 81 is a valve 82.
Is connected to a vacuum pump (not shown).
The gas in the vacuum chamber 80 can be exhausted through the pipe 81 and the valve 82 by the vacuum pump to bring the inside of the vacuum chamber 80 into a vacuum state. The valve 82 enables suction from the vacuum chamber 80 by a vacuum pump and maintains the degree of vacuum in the vacuum chamber 80.

A pipe 85 is attached to the vacuum chamber 80, and the pipe 85 can leak atmospheric air into the vacuum chamber 80 via a valve 86. The valve 86 releases the vacuum in the vacuum chamber 80.

A support base (not shown) is provided in the vacuum chamber 80, and the liquid crystal panel 92 having the same structure as that of FIG. 3 after the laminating step is placed on the support base. Liquid crystal inlet 7 of the mounted liquid crystal panel 92
A liquid crystal, for example, a twisted nematic liquid crystal (TN liquid crystal) is dropped from the tip of a nozzle (not shown) near 8 (see FIG. 3).

A pair of polarizing plates 93a and 93b are arranged above and below the liquid crystal panel 92. In the case of TN liquid crystal, the polarization axes of the pair of polarizing plates 93a and 93b are arranged so as to be orthogonal to each other. The bottom surface of the vacuum chamber 80 is made of a light transmissive material so that light from the outside can be transmitted. A backlight (not shown) is disposed below the vacuum chamber 80, and the light from the backlight passes through the bottom surface of the vacuum chamber 80 and the polarizing plate 9
It is incident on the element substrate 10 side of the liquid crystal panel 92 via 3a. Further, the light that has entered the liquid crystal panel 92 passes through the liquid crystal layer and is emitted upward from the counter substrate 20 side through the polarizing plate 93b.

A two-dimensional CCD 94 is provided above the polarizing plate 93b.
The light receiving surface of is arranged. The two-dimensional CCD 94 outputs to the liquid crystal permeation rate detection unit 89 an output according to the distribution of the amount of light incident on the light receiving surface (light receiving distribution).
The liquid crystal permeation speed detection unit 89 detects the permeation speed of the liquid crystal into the liquid crystal cell and outputs the liquid crystal permeation speed to the computer 88 according to the change state of the light incident on the light receiving surface of the two-dimensional CCD 94.

The computer 88 outputs a control signal for controlling the liquid crystal permeation speed based on the liquid crystal permeation speed detected by the liquid crystal permeation speed detection unit 89. In the present embodiment, the computer 88 uses the vacuum chamber 80.
The permeation rate is controlled by controlling the atmospheric pressure (vacuum degree) inside. The exhaust control circuit 83
The opening / closing state of the exhaust valve 82 is controlled. The leak control circuit 87 controls the open / close state of the leak valve 86. The computer 88 outputs a control signal for controlling the exhaust control circuit 83 and the leak control circuit 87 to control the open / closed states of the valves 82 and 86, thereby controlling the degree of vacuum in the vacuum chamber 80. It can be set appropriately.

Next, the operation of the embodiment thus constructed will be described.

In the liquid crystal sealing / sealing process, first, the liquid crystal panel 92 is placed in the vacuum chamber 80, and
Polarizing plates 93a and 93b are arranged above and below the liquid crystal panel 92. Next, the valve 82 is opened, and the air in the chamber 80 is exhausted by a vacuum pump (not shown). When the inside of the vacuum chamber 80 reaches a sufficient degree of vacuum, the valve 82 is closed and the exhaust is stopped. In this case, the liquid crystal cell in the vacuum chamber 80 is also in a vacuum.

In the vacuum chamber 80 in a vacuum atmosphere having such a sufficiently high degree of vacuum, liquid crystal, for example, TN liquid crystal, is dropped near the liquid crystal inlet 78 of the liquid crystal panel 90.
Next, by opening the valve 86, air is leaked into the chamber 80, and the degree of vacuum in the chamber is lowered.

Then, the liquid crystal dripped near the liquid crystal inlet enters the liquid crystal cell due to the pressure difference between the inside and the outside of the liquid crystal cell.

In the present embodiment, the state of permeation of liquid crystal into the liquid crystal cell is detected by the two-dimensional CCD 94. That is, a backlight (not shown) is applied to the liquid crystal panel 92 via the polarizing plate 93a. For example, the polarizing plate 93a
When the polarization directions of the polarizing plate 93b and the polarizing plate 93b are different from each other by 90 degrees, in the portion of the display surface of the liquid crystal panel 92 where the liquid crystal has permeated, the light transmitted through the liquid crystal panel 92 is emitted upward from the polarizing plate 93b and permeates. The light that has passed through the liquid crystal panel 92 cannot pass through the polarizing plate 93b in the non-opened portion.

Therefore, the two-dimensional CCD 94 can detect the permeation state of the liquid crystal by the distribution of incident light incident on the light receiving surface. The two-dimensional CCD 94 outputs the detection result to the liquid crystal permeation rate detection unit 89. The liquid crystal permeation rate detector 89
The liquid crystal permeation rate is obtained from the output of the two-dimensional CCD 94. For example, the liquid crystal permeation rate detection unit 89 is a two-dimensional CCD.
The number of pixels that receive light among the pixels that configure the light receiving surface of 94 is obtained, and the permeation speed of the liquid crystal is calculated from the change in the number of pixels that receive light.

The detection result from the liquid crystal permeation rate detection unit 89 is supplied to the computer 88. Computer 88
Based on the detection result of the liquid crystal permeation rate, a control signal for controlling the liquid crystal permeation rate is generated for each region in the cell of the liquid crystal panel 92. That is, for example, when the computer 88 determines that the liquid crystal permeation speed is higher than the predetermined set speed, the computer 88 increases the vacuum degree of the vacuum chamber 80 so as to reduce the pressure difference between the inside and outside of the liquid crystal cell. That is,
The exhaust control circuit 83 is controlled to increase the opening of the valve 82 to increase the exhaust amount, and the leak control circuit 87 is controlled to change the valve 86 in the closing direction to reduce the air leak amount.

On the contrary, when it is judged that the liquid crystal permeation speed is slower than the predetermined set speed, the computer 88
The vacuum degree of the vacuum chamber 80 is lowered so as to increase the pressure difference between the inside and the outside of the liquid crystal cell. That is, the exhaust control circuit 83
Is controlled to change the valve 82 in the closing direction to reduce the exhaust amount, and the leak control circuit 87 is controlled to change the valve 86 in the opening direction to increase the air leakage amount.

For example, immediately after the start of the permeation of the liquid crystal into the liquid crystal cell, the degree of vacuum in the vacuum chamber 80 is controlled to be high so that the permeation speed of the liquid crystal is adjusted not to become too fast, and the liquid crystal into the liquid crystal cell is adjusted. As the time elapses from the start of permeation of the liquid crystal, the degree of vacuum in the vacuum chamber 80 is controlled to be low so that the liquid crystal permeation speed is adjusted not to become too slow. As a result, the optimum injection rate (penetration rate) is always obtained in all regions in the cell.

The computer 88 may control only the opening / closing of one of the valves 82 and 86 so that a desired liquid crystal permeation rate can be obtained.

When the liquid crystal injection is completed, finally, the sealing agent 7
9 is applied to the liquid crystal injection port 78 and cured to seal the liquid crystal in the cell.

As described above, in the present embodiment, the permeation rate of the liquid crystal into the liquid crystal cell is detected by the two-dimensional CCD 94, and at least one of the exhaust amount and the leak amount of the vacuum chamber 80 is detected according to the detection result. By controlling the pressure difference between the inside and outside of the liquid crystal cell, the permeation speed of the liquid crystal into the liquid crystal cell can always be maintained at an optimum injection speed within a predetermined set speed range.

As a result, it is possible to suppress the flow orientation that occurs when the liquid crystal permeation rate is high or low, and it is possible to improve the screen quality.

It is obvious that the polarizing plate 93b may be attached to the entrance surface of the two-dimensional CCD.

FIG. 6 is an explanatory view showing the second embodiment of the present invention. 6, the same components as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

In FIG. 6, the constant temperature bath 100 has the same function as a vacuum chamber as in FIG. That is, the constant temperature bath 1
00 is the same pipe 81, 85, valve 82,
86 (not shown) and the like, the inside can be made vacuum by a vacuum pump, and the inside can be opened to the atmosphere by leaking the atmosphere. Further, the constant temperature bath 100 has a bottom surface made of a material that transmits light.

Further, a pipe 101 is attached to the constant temperature bath 100, and the pipe 101 is connected to a cooling device (not shown) via a valve 102. Cooling air is blown into the constant temperature bath 100 through the valve 102 and the pipe 101 by the cooling device. A pipe 103 is attached to the constant temperature bath 100, and the pipe 103 is connected to a heating device (not shown) via a valve 104. By the heating device, warm air is blown into the constant temperature bath 100 through the valve 104 and the pipe 103.

The computer 88 outputs a control signal for controlling the liquid crystal permeation speed based on the liquid crystal permeation speed detected by the liquid crystal permeation speed detection unit 89. In the present embodiment, the computer 88 controls the temperature environment in the constant temperature bath 100 to control the permeation rate. The cold air control circuit 105 controls the open / closed state of the cold air valve 102. The warm air control circuit 106 controls the open / close state of the warm air valve 104. The computer 88 outputs a control signal for controlling the cold air control circuit 105 and the hot air control circuit 106 to control the open / closed states of the valves 102 and 104, and thereby the temperature environment in the constant temperature bath 100. Can be set appropriately.

Next, the operation of the embodiment thus constructed will be described.

Also in the present embodiment, during the liquid crystal encapsulation / sealing process, first, the liquid crystal panel 92 is placed in the constant temperature bath 100, and the polarizing plates 93 are arranged above and below the liquid crystal panel 92.
a and 93b are arranged. Then, the air in the constant temperature bath 100 is exhausted by a vacuum pump (not shown). When the inside of the constant temperature bath 100 has a sufficient degree of vacuum, the evacuation is stopped.
In this case, the liquid crystal cell in the constant temperature bath 100 is also evacuated.

The liquid crystal is dropped near the liquid crystal injection port 78 of the liquid crystal panel 90 in the constant temperature bath 100 in a vacuum atmosphere having such a sufficiently high degree of vacuum. Next, air is placed in a constant temperature bath 1.
00 to reduce the degree of vacuum in the chamber. Then, the liquid crystal dripped near the liquid crystal inlet enters the liquid crystal cell due to the pressure difference between the inside and outside of the liquid crystal cell.

Also in the present embodiment, the state of permeation of liquid crystal into the liquid crystal cell is detected by the two-dimensional CCD 94. The two-dimensional CCD 94 outputs the detection result of the incident light distribution incident on the light receiving surface to the liquid crystal permeation speed detection unit 89. The liquid crystal permeation rate detection unit 89 obtains the number of pixels that have received light among the pixels forming the light receiving surface of the two-dimensional CCD 94, and calculates the permeation rate of the liquid crystal from the change in the number of pixels that have received light.

The detection result from the liquid crystal permeation rate detection unit 89 is supplied to the computer 88. Computer 88
A control signal for controlling the liquid crystal permeation rate is generated based on the detection result of the liquid crystal permeation rate. That is, for example, when the computer 88 determines that the liquid crystal permeation speed is higher than a predetermined set speed, the computer 88 lowers the temperature of the constant temperature bath 100 so as to lower the liquid crystal temperature and increase the viscosity. That is, the cold air control circuit 105 is controlled to control the valve 10
2 is increased to increase the amount of cold air sent, and the warm air control circuit 106 is controlled to change the valve 104 in the closing direction to reduce the amount of warm air sent.

On the contrary, when it is judged that the liquid crystal permeation speed is slower than the predetermined set speed, the computer 88
The temperature of the constant temperature bath 100 is raised so that the temperature of the liquid crystal is raised to lower the viscosity. That is, the computer 88
Controls the cold air control circuit 105 to change it in the closing direction of the valve 102 to reduce the amount of cold air sent,
The warm air control circuit 106 is controlled to change the valve 104 in the opening direction to increase the amount of warm air sent.

For example, immediately after the start of liquid crystal permeation into the liquid crystal cell, the temperature inside the thermostatic chamber 100 is controlled to be relatively low so that the liquid crystal permeation speed is adjusted so as not to become too fast. As the time elapses from the start of permeation of the liquid crystal, the temperature in the constant temperature bath 100 is controlled to be increased so that the permeation rate of the liquid crystal is adjusted not to become too slow. As a result, the optimum injection rate (penetration rate) is always obtained in all regions in the cell.

The computer 88 may control only the opening and closing of one of the valves 102 and 104 so that the desired liquid crystal permeation rate can be obtained. When the liquid crystal injection is completed, finally, the sealant 79 is applied to the liquid crystal injection port 78 and cured to seal the liquid crystal in the cell.

As described above, in the present embodiment, the permeation rate of the liquid crystal into the liquid crystal cell is detected by the two-dimensional CCD 94, and the cold air and the warm air are sent to the constant temperature chamber 100 according to the detection result. By controlling at least one of the amounts, the temperature of the liquid crystal is adjusted, so that the permeation rate of the liquid crystal into the liquid crystal cell can always be maintained at an optimum injection rate within a predetermined set speed range.

As a result, the flow orientation that occurs when the liquid crystal permeation rate is high or low can be suppressed, and the screen quality can be improved.

In the present embodiment, the constant temperature bath 1
Although 00 has been described as having the same function as the vacuum chamber 80 in FIG. 1, it may have only the function as a constant temperature bath. That is, in this case, by taking out the liquid crystal panel from the vacuum chamber and setting it in the constant temperature bath,
The same effect can be obtained.

Further, it is obvious that the structure may be such that the hot air or the cold air is blown directly to the liquid crystal panel which is permeating the liquid crystal. Further, it is obvious that the same effect can be obtained by directly controlling the temperature of the liquid crystal panel by a hot plate or a cold plate.

7 and 8 relate to the third embodiment of the present invention, FIG. 7 is an explanatory view showing the embodiment, and FIG. 8 is an explanatory view for explaining the state of liquid crystal penetration. 7, the same components as those in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted.

The present embodiment is an example in which a liquid crystal panel having two openings for liquid crystal filling is adopted. The liquid crystal panel 111 has substantially the same configuration as that of the liquid crystal panel shown in FIGS. 2 to 5, except that two notches are provided in the sealing material. That is, as shown in FIG. 8, the element substrate 112 and the counter substrate 113 are attached to each other by a sealing material except for the openings 114 and 115 formed at substantially diagonal positions. For example, the opening 114 constitutes a liquid crystal inlet, and the opening 115 constitutes an exhaust port.

During the liquid crystal filling step, the inlet mounting portion 116 is mounted on the liquid crystal panel 111 so as to close the opening 114, and the inlet mounting portion 116 is mounted.
Opens the liquid crystal flowing in through the pipe 118 into the opening 114.
It is possible to penetrate into the cell through. Further, during the liquid crystal filling process, the exhaust port mounting portion 117 is mounted on the liquid crystal panel 111 so as to close the opening 115, and the exhaust port mounting portion 117 is mounted.
The air inside the liquid crystal cell can be exhausted through the pipe 119.

A pressure unit 120 is attached to the pipe 118. The pressure unit 120 is the liquid crystal injection pressure control circuit 1
Controlled by 23, the liquid crystal can be made to flow out to the pipe 118 and the inlet mounting portion 116 side with a predetermined pressure. A pump 121 is attached to the pipe 119. The pump 121 is controlled by the exhaust control circuit 124 so that the air in the liquid crystal cell can be exhausted through the exhaust port mounting portion 117 and the pipe 119.

The computer 88 outputs a control signal for controlling the liquid crystal permeation speed based on the liquid crystal permeation speed detected by the liquid crystal permeation speed detection unit 89. In the present embodiment, the computer 88 controls the permeation rate by controlling the pressure of liquid crystal injection and the exhaust of liquid crystal cells. Liquid crystal injection pressure control circuit 1
Reference numeral 23 controls the pressure unit 120 for injecting the liquid crystal. Also,
The exhaust control circuit 124 is a pump 1 for exhausting gas from the liquid crystal cell.
21 is controlled. Computer 88
Outputs a control signal for controlling the liquid crystal injection pressurization control circuit 123 and the exhaust control circuit 124 to control the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell,
As a result, the liquid crystal permeation rate can be set appropriately.

Next, the operation of the embodiment thus constructed will be described.

In this embodiment, no vacuum chamber is used in the liquid crystal encapsulation / sealing process. The liquid crystal panel 92 is placed on a predetermined support (not shown), and the liquid crystal panel 9
Polarizing plates 93a and 93b are arranged above and below the No. 2 plate. Also in this embodiment, the state of permeation of liquid crystal into the liquid crystal cell is 2
It is detected by the dimensional CCD 94. Two-dimensional CCD94
Outputs the detection result of the incident light distribution incident on the light receiving surface to the liquid crystal permeation rate detection unit 89. Liquid crystal permeation rate detector 89
Calculates the number of pixels that received light among the pixels that form the light receiving surface of the two-dimensional CCD 94, and calculates the permeation speed of the liquid crystal from the change in the number of pixels that received light.

In this embodiment, the computer 8
Controlled by 8, the liquid crystal injection pressure control circuit 123 controls the pressure unit 120 to allow the liquid crystal to permeate into the liquid crystal cell from the opening 114 through the pipe 118 and the injection port mounting unit 116, and to control the exhaust. The circuit 124 controls the pump 121 to move the air in the liquid crystal cell from the opening 115 to the pipe 11.
Exhaust to the outside through 9.

As a result, as shown by the arrow in FIG. 8, the liquid crystal that has permeated from the opening 114 side flows toward the opening 115 (exhaust port) side while spreading in the liquid crystal cell, and fills the liquid crystal cell. To be done. The liquid crystal permeation rate detector 89 detects the permeation rate of the liquid crystal. The detection result is supplied to the computer 88, and the computer 88 generates a control signal for controlling the liquid crystal permeation rate based on the detection result of the liquid crystal permeation rate.

That is, for example, when the computer 88 determines that the liquid crystal permeation speed is faster than a predetermined set speed, the liquid crystal is less likely to enter the liquid crystal cell.
The liquid crystal injection pressure and the exhaust amount from the liquid crystal cell are reduced. That is, the exhaust control circuit 124 is controlled to reduce the exhaust amount of the pump 121, and the liquid crystal injection pressurization control circuit 1
By controlling 23, the liquid crystal injection pressure by the pressure unit 120 is reduced.

On the contrary, when it is determined that the liquid crystal permeation speed is lower than the predetermined set speed, the computer 88
The liquid crystal injection pressure and the exhaust amount from the liquid crystal cell are increased so that the liquid crystal easily enters the liquid crystal cell. That is, the exhaust control circuit 124 is controlled to increase the exhaust amount of the pump 121, and the liquid crystal injection pressurization control circuit 123 is controlled to increase the liquid crystal injection pressure of the pressurizing unit 12.

For example, immediately after the start of the permeation of the liquid crystal into the liquid crystal cell, the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell are reduced so that the permeation rate of the liquid crystal does not become too fast. As the time elapses from the start of permeation of the liquid crystal, the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell are increased so that the permeation speed of the liquid crystal is not too slow. As a result, the optimum injection rate (penetration rate) is always obtained in all regions in the cell.

The computer 88 may control only one of the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell so that the desired liquid crystal permeation rate can be obtained.

When the liquid crystal injection is completed, finally, a sealant is applied to the openings 114 and 115 and cured to seal the liquid crystal in the cell.

As described above, in the present embodiment, the permeation rate of the liquid crystal into the liquid crystal cell is detected by the two-dimensional CCD 94, and at least one of the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell is detected according to the detection result. The liquid crystal injecting speed is controlled by controlling the above, and the permeating speed of the liquid crystal into the liquid crystal cell can always be maintained at the optimum injecting speed within the predetermined set speed range. As a result, the flow orientation that occurs when the liquid crystal permeation rate is high or low can be suppressed, and the screen quality can be improved.

FIG. 9 is an explanatory view showing the fourth embodiment of the present invention. In FIG. 9, the same components as those of FIG. 8 are designated by the same reference numerals and the description thereof will be omitted.

In the third embodiment, the liquid crystal infiltration speed is controlled to the optimum speed by controlling the liquid crystal injection pressure and the exhaust amount from the liquid crystal cell. On the other hand, in the present embodiment, the liquid crystal permeation speed is controlled only by controlling the exhaust amount from the liquid crystal cell.

In this embodiment, the liquid crystal injection pressure control circuit 12 is used.
3, pressurizing section 120, pipe 118, and inlet mounting section 11
The point that 6 is omitted is different from the embodiment of FIG.

In the embodiment configured as described above, the opening 1 is formed by utilizing the liquid crystal injection pressurization control circuit 123, the pressurizing section 120, the pipe 118 and the injection port mounting section 116.
Instead of injecting liquid crystal under pressure, the opening 1
This is different from the third embodiment in that the liquid crystal is dropped in the vicinity of 14.

The shaded area 131 in FIG. 9 represents the liquid crystal dropped near the opening 114. In this state, the exhaust control circuit 124 (see FIG. 7) controls the pump 121 to exhaust the liquid crystal cell. Then, the opening 11
The liquid crystal dripped near 4 penetrates into the liquid crystal cell as shown by the arrow. The point that the two-dimensional CCD 94 and the liquid crystal permeation rate detector 89 detect the permeation rate is the same as in the third embodiment.

The computer 88 controls the exhaust control circuit 124 based on the detection result of the liquid crystal permeation rate to appropriately set the exhaust amount from the liquid crystal cell and maintain the liquid crystal permeation rate at the optimum value.

The other actions are similar to those of the third embodiment.

As described above, also in the present embodiment, it is possible to obtain the same effects as those in the above-mentioned respective embodiments.

Further, in the above embodiment, a method of arranging the incident surface of the liquid crystal panel in the vertical direction and immersing it in the liquid crystal tank may be adopted. 10 and 11 are explanatory diagrams for explaining this method.

In FIG. 10, the liquid crystal panel 135 has an opening 115 at the end and the center of the sides facing each other.
138 is provided. The liquid crystal 137 is in the liquid crystal tank 136.
Is filled. During the liquid crystal filling step, the liquid crystal panel 135 is arranged so that one opening 138 is immersed in the liquid crystal 137. In this state, the exhaust control circuit 124
(See FIG. 7) drives the pump 121 to exhaust the air in the liquid crystal panel 135. Then, the liquid crystal 137 penetrates into the liquid crystal cell through the opening 138.

Other configurations and actions such as liquid crystal permeation rate detection are similar to those of the fourth embodiment.

Further, FIG. 11 shows the exhaust control circuit 12 of FIG.
4, instead of the pump 121 and the exhaust port mounting portion 117,
An example in which a vacuum chamber 144 is adopted is shown.

The liquid crystal panel 141 is provided with openings 138 and 142 at the central portions of the sides facing each other. The liquid crystal tank 136 is filled with the liquid crystal 137, and the liquid crystal tank 136 is arranged in the vacuum chamber 144. During the liquid crystal filling step, the liquid crystal panel 141 is arranged so that one opening 138 is immersed in the liquid crystal 137.

In this state, the air in the vacuum chamber 144 is exhausted to the outside through the pipe 146 and the valve 145. Then, the liquid crystal 137 penetrates into the liquid crystal cell through the opening 138.

Other configurations and actions such as liquid crystal permeation rate are similar to those of the fourth embodiment.

It is obvious that the third and fourth embodiments can be applied to the second embodiment.

[0125]

As described above, according to the present invention, it is possible to prevent the occurrence of liquid crystal alignment defects due to flow frictional force and flow alignment by making it possible to control the liquid crystal injection speed that permeates into the liquid crystal cell. It has the effect that

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a manufacturing apparatus of a liquid crystal device according to a first embodiment of the invention.

FIG. 2 is an equivalent circuit diagram of various elements, wirings, and the like in a plurality of pixels forming a pixel region of a liquid crystal device.

FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with the constituent elements formed thereon.

FIG. 4 is a cross-sectional view showing the liquid crystal device after the assembly process in which the element substrate and the counter substrate are attached to each other and the liquid crystal is sealed, taken along line HH ′ in FIG.

FIG. 5 is a cross-sectional view showing a liquid crystal device in detail.

FIG. 6 is an explanatory diagram showing a second embodiment of the present invention.

FIG. 7 is an explanatory diagram showing a third embodiment of the invention.

FIG. 8 is an explanatory diagram for explaining how liquid crystal permeates in the third embodiment.

FIG. 9 is an explanatory diagram showing a fourth embodiment of the present invention.

FIG. 10 is an explanatory diagram showing a modified example of the fourth embodiment.

FIG. 11 is an explanatory diagram showing a modified example of the fourth embodiment.

FIG. 12 is an explanatory diagram for explaining a permeation state of liquid crystal in a liquid crystal cell.

[Explanation of symbols]

80 ... Vacuum chamber 83 ... Exhaust control circuit 87 ... Leak control circuit 88 ... Computer 89 ... Liquid crystal permeation rate detector 92 ... Liquid crystal panel 93a, 93b ... Polarizing plates 94 ... Two-dimensional CCD

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2H089 NA25 NA29 NA31 NA33 NA60                       QA15 TA04                 2H090 LA03 MB13 MB14

Claims (13)

[Claims] 1. A liquid crystal injecting means for injecting liquid crystal through the opening to a liquid crystal cell constituted by an element substrate and a counter substrate being fixedly opposed to each other with an opening, and the inside of the liquid crystal cell. A permeation state detecting means for detecting a permeation state of the liquid crystal into the liquid crystal; a permeation rate detecting means for obtaining a permeation rate of the liquid crystal into the liquid crystal cell based on a detection result of the permeation state detecting means; A device for manufacturing a liquid crystal device, comprising: a control unit that controls a liquid crystal permeation rate by the liquid crystal injection unit based on the liquid crystal permeation rate obtained by the unit. 2. The permeation state detection means images a polarizing plate disposed on an incident surface and an emitting surface of the liquid crystal cell and light that has passed through the polarizing plate and the liquid crystal cell, and detects the liquid crystal according to an imaging result. The liquid crystal device manufacturing apparatus according to claim 1, further comprising: an image pickup element that detects a permeation state. 3. The liquid crystal according to claim 1, wherein the image sensor detects the permeation state of the liquid crystal by the number of pixels on the light receiving surface that receives the light that has passed through the polarizing plate and the liquid crystal cell. Equipment manufacturing equipment. 4. The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the permeation rate detecting means determines the permeation rate of the liquid crystal based on a change in the detection result of the permeation state detecting means. 5. The liquid crystal injecting means comprises a vacuum chamber in which the liquid crystal cell is disposed, and a vacuum degree control means for performing at least one of exhausting from the vacuum chamber and leaking to the vacuum chamber, The control means controls the vacuum degree control means based on the permeation rate of the liquid crystal obtained by the permeation rate detection means, and controls the degree of vacuum in the vacuum chamber to control the pressure difference between the inside and outside of the liquid crystal cell. The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the permeation rate of the liquid crystal is adjusted to control the permeation rate. 6. The liquid crystal injecting means comprises a temperature control means for cooling and / or heating the liquid crystal cell, wherein the control means is based on the permeation rate of the liquid crystal obtained by the permeation rate detecting means. The liquid crystal according to claim 1, wherein the temperature control means is controlled to control the temperature environment of the liquid crystal cell to adjust the viscosity of the liquid crystal to control the permeation rate of the liquid crystal. Equipment manufacturing equipment. 7. The temperature control means comprises a high temperature tank in which the liquid crystal cell is disposed, and a blowing means for blowing at least one of cold air and warm air to the high temperature tank. An apparatus for manufacturing a liquid crystal device according to item 1. 8. The liquid crystal cell comprises an opening for injecting the liquid crystal, and an opening for exhausting air from the liquid crystal cell, and the liquid crystal injecting means predetermines liquid crystal in the injecting opening. Injection means for injecting at an injection pressure of, and exhaust means for exhausting the air in the liquid crystal cell at a predetermined exhaust volume from the exhaust opening, the control means is determined by the permeation rate detection means The liquid crystal device manufacturing apparatus according to claim 1, wherein the liquid crystal permeation rate is controlled by controlling at least one of the injection unit and the exhaust unit based on the liquid crystal permeation rate. 9. The liquid crystal cell comprises an opening for injecting the liquid crystal, and an opening for exhausting air from the liquid crystal cell, and the liquid crystal injecting means provides a predetermined exhaust gas through the exhaust opening. The liquid crystal cell is provided with an exhaust means for exhausting the air in the liquid crystal cell, and the control means controls the exhaust means based on the permeation rate of the liquid crystal obtained by the permeation rate detection means to control the liquid crystal. 2. The liquid crystal device manufacturing apparatus according to claim 1, wherein the permeation rate of the liquid crystal is controlled. 10. The liquid crystal cell includes an opening for injecting the liquid crystal, and an opening for exhausting air from the liquid crystal cell, wherein the liquid crystal injecting means injects a predetermined amount from the opening for injecting. The injection means for injecting the liquid crystal by pressure, the control means controls the infiltration speed of the liquid crystal by controlling the injection means based on the infiltration speed of the liquid crystal determined by the infiltration speed detecting means. The apparatus for manufacturing a liquid crystal device according to claim 1, wherein: 11. The liquid crystal device manufacturing apparatus according to claim 2, wherein the image sensor is a two-dimensional CCD. 12. The liquid crystal device manufacturing apparatus according to claim 1, wherein the control unit sets the permeation speed of the liquid crystal by the liquid crystal injection unit to a different value for each region of the liquid crystal cell. 13. A liquid crystal injecting process of injecting liquid crystal through the opening to a liquid crystal cell constituted by an element substrate and a counter substrate being fixedly opposed to each other with an opening, and in the liquid crystal cell Permeation state detection processing for detecting the permeation state of the liquid crystal into the liquid crystal, permeation rate detection processing for obtaining the permeation rate of the liquid crystal into the liquid crystal cell based on the detection result of the permeation state detection processing, and the permeation rate detection A method for controlling the permeation rate of the liquid crystal by the liquid crystal injection processing based on the permeation rate of the liquid crystal obtained in the processing.