JP2003043384A5 - - Google Patents

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Publication number
JP2003043384A5
JP2003043384A5 JP2002192121A JP2002192121A JP2003043384A5 JP 2003043384 A5 JP2003043384 A5 JP 2003043384A5 JP 2002192121 A JP2002192121 A JP 2002192121A JP 2002192121 A JP2002192121 A JP 2002192121A JP 2003043384 A5 JP2003043384 A5 JP 2003043384A5
Authority
JP
Japan
Prior art keywords
mems
mems device
micromirrors
angle
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002192121A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003043384A (ja
JP4167013B2 (ja
Filing date
Publication date
Priority claimed from US09/896,085 external-priority patent/US6882770B2/en
Application filed filed Critical
Publication of JP2003043384A publication Critical patent/JP2003043384A/ja
Publication of JP2003043384A5 publication Critical patent/JP2003043384A5/ja
Application granted granted Critical
Publication of JP4167013B2 publication Critical patent/JP4167013B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002192121A 2001-06-29 2002-07-01 Ｍｅｍｓ光学装置を利用するための結像技術 Expired - Lifetime JP4167013B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/896,085 US6882770B2 (en) 2001-06-29 2001-06-29 Imaging technique for use with optical MEMS devices
US09/896085 2001-06-29

Publications (3)

Publication Number Publication Date
JP2003043384A JP2003043384A (ja) 2003-02-13
JP2003043384A5 true JP2003043384A5 (enExample) 2005-08-04
JP4167013B2 JP4167013B2 (ja) 2008-10-15

Family

ID=25405600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002192121A Expired - Lifetime JP4167013B2 (ja) 2001-06-29 2002-07-01 Ｍｅｍｓ光学装置を利用するための結像技術

Country Status (6)

Country Link
US (1) US6882770B2 (enExample)
EP (1) EP1271203B1 (enExample)
JP (1) JP4167013B2 (enExample)
CN (1) CN1281988C (enExample)
CA (1) CA2384172C (enExample)
DE (1) DE60200860T2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781691B2 (en) * 2001-02-02 2004-08-24 Tidal Photonics, Inc. Apparatus and methods relating to wavelength conditioning of illumination
GB2403022C (en) * 2003-06-19 2008-10-30 Polatis Ltd Flexible increase to optical switch capacity
US8639069B1 (en) 2003-06-30 2014-01-28 Calient Technologies, Inc. Wavelength dependent optical switch
US7254293B1 (en) * 2003-06-30 2007-08-07 Calient Networks, Inc. Wavelength routing optical switch
CA2581656A1 (en) * 2003-09-26 2005-04-07 Tidal Photonics, Inc. Apparatus and methods relating to color imaging endoscope systems
CA2581735A1 (en) * 2003-09-26 2005-04-07 Tidal Photonics, Inc. Apparatus and methods relating to enhanced spectral measurement systems
WO2005031436A1 (en) * 2003-09-26 2005-04-07 Tidal Photonics, Inc. Apparatus and methods relating to expanded dynamic range imaging endoscope systems
US20080260242A1 (en) * 2006-06-22 2008-10-23 Tidal Photonics Inc. Apparatus and methods for measuring and controlling illumination for imaging objects, performances and the like
AU2013237061B2 (en) 2012-03-22 2015-11-26 Apple Inc. Gimbaled scanning mirror array
US9715107B2 (en) 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
CN102879903B (zh) * 2012-10-18 2019-02-01 无锡微奥科技有限公司 一种集成倾角可控mems微镜的器件
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
JP7097718B2 (ja) * 2018-02-27 2022-07-08 シスメックス株式会社 粒子測定装置および粒子測定方法
WO2021034371A1 (en) 2019-08-18 2021-02-25 Apple Inc. Force-balanced micromirror with electromagnetic actuation
US12372658B2 (en) 2020-10-12 2025-07-29 Raytheon Company Negative obstacle detector using micro-electro-mechanical system (MEMS) micro-mirror array (MMA) beam steering
US11477350B2 (en) * 2021-01-15 2022-10-18 Raytheon Company Active imaging using a micro-electro-mechanical system (MEMS) micro-mirror array (MMA)
US12066574B2 (en) 2021-01-15 2024-08-20 Raytheon Company Optical system for object detection and location using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) beamsteering device
US11550146B2 (en) 2021-01-19 2023-01-10 Raytheon Company Small angle optical beam steering using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29618818U1 (de) * 1996-10-29 1996-12-12 CMS Mikrosysteme GmbH Chemnitz, 09577 Niederwiesa Mikromechanische optische Schalteinheit
US6097859A (en) * 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
AU7982100A (en) * 1999-06-17 2001-01-09 Mustafa A.G. Abushagur Optical switch
CA2325611C (en) 1999-12-01 2004-04-20 Lucent Technologies Inc. An optical cross connect employing a curved optical component
US6253001B1 (en) * 2000-01-20 2001-06-26 Agilent Technologies, Inc. Optical switches using dual axis micromirrors
US6330102B1 (en) 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics

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