JP2003035619A - Method for manufacturing semiconductor pressure detector and fluid injection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor pressure detector having output characteristics of high accuracy, and a fluid injection device capable of injecting a predetermined constant weight of a fluid. SOLUTION: An oil injection device 31 is equipped with a storage tank 32 for storing silicone oil S, and the silicone oil S is supplied to a dispenser 33 from the storage tank 32 through supply piping 35. When the CPU 39 of a control unit 34 inputs an input signal from a starter switch 43, the temperature of the oil S is detected by the temperature sensor 36 provided to the supply piping 35 according to the control program of an ROM 41. The CPU 39 controls the quantity of rotation of the motor 38 of the dispenser 33 on the basis of the detected temperature and a predetermined constant weight, and volume of the oil S is sent out to the recessed part 12d of a sensor housing 12 from the Mono pump 37 of the dispenser 33.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a semiconductor pressure detecting device and a fluid injection device.

[0002]

2. Description of the Related Art Conventionally, as a device for detecting the pressure of a fluid such as a gas or a liquid, a stainless diaphragm in contact with the fluid transmits the fluid pressure to a silicon diaphragm of a sensor chip through an incompressible fluid or the like, and the silicon diaphragm. There is known a double diaphragm type semiconductor pressure detecting device for detecting the pressure in.

In this semiconductor pressure detecting device, the incompressible fluid is filled in a closed space formed by the stainless diaphragm and the sensor chip. And the output characteristics of this semiconductor pressure detecting device are:
The relationship between the amount of incompressible fluid filled and the volume of the enclosed space has a great influence. Therefore, the filling amount of the incompressible fluid is always desired to be a constant amount with high accuracy if the semiconductor pressure detecting device of the same type is used.
It is common practice to fill the closed space with a constant volume of incompressible fluid using a highly accurate dispenser for constant volume injection.

[0004]

By the way, the volume of the incompressible fluid expands or contracts due to temperature change. Therefore, when the temperature of the incompressible fluid is high, even if the semiconductor pressure detecting device is filled with a constant volume using the above-mentioned constant volume injection dispenser, the filling weight will be less than the original filling weight. Conversely, when the temperature of the incompressible fluid is low, it will be greater than the original fill weight. As a result, when a temperature change occurs in the incompressible fluid, the weight of the incompressible fluid filled in the semiconductor pressure detecting device of the same type is different, and the stainless diaphragm is used even under the same temperature condition. There is a phenomenon of tension or dent. Therefore, there is a problem that the output characteristics vary even in the semiconductor pressure detecting devices of the same type.

It is an object of the present invention to provide a method of manufacturing a semiconductor pressure detecting device having highly accurate output characteristics, and a fluid injection device capable of injecting a constant weight of fluid.

[0006]

In order to solve the above problems, the invention according to claim 1 is a sensor chip which is disposed in a recess formed in a housing and detects pressure.
Semiconductor pressure including a diaphragm that seals the recess and forms a sealing chamber together with the recess, and an incompressible fluid that is sealed in the sealing chamber and transmits the pressure received by the diaphragm to the sensor chip. In the method for manufacturing a detection device, when the non-compressible fluid is sealed in the sealing chamber, a delivery means capable of delivering the non-compressible fluid having a volume proportional to the rotation amount of the motor is used, and the delivery means is used. Before injecting the incompressible fluid into the sealed chamber by means of, the temperature of the incompressible fluid is detected, and a volume corresponding to a predetermined weight of the incompressible fluid is determined based on the detected temperature. The amount of rotation of the motor of the delivery means is calculated based on the calculated volume, the motor is rotated by the calculated amount of rotation, and the non-weight of the predetermined weight is stored in the sealing chamber. Compressible fluid And summarized in that you to deliver.

A second aspect of the present invention is based on the method of manufacturing a semiconductor pressure detecting device according to the first aspect, wherein the delivery means is a mono pump. Claim 3
According to the invention described in (3), the delivery means capable of delivering a volume of fluid proportional to the rotation amount of the motor, a temperature sensor for detecting the temperature of the fluid, and the delivery means based on the temperature detected by the temperature sensor. The gist of the present invention is to provide a control means for controlling the rotation amount of the motor so that the fluid to be sent out has a predetermined weight volume.

A fourth aspect of the present invention provides the fluid injection device according to the third aspect, wherein the delivery means is a mono pump. According to a fifth aspect of the invention, in the fluid injection device according to the third or fourth aspect, the fluid is an incompressible fluid that is injected into the semiconductor pressure detection device,
The delivery means may deliver the incompressible fluid in a constant weight to a recess provided in the semiconductor pressure detecting device.

(Operation) According to the invention described in claim 1,
The temperature of the incompressible fluid before being injected into the sealed chamber of the semiconductor pressure detection device is detected, and the rotation amount of the motor that delivers the volume of the incompressible fluid with a predetermined weight is calculated based on the detected temperature. The motor was rotated by the amount of rotation to inject a fixed volume of incompressible fluid into the sealed chamber.

Therefore, when the incompressible fluid is injected into the semiconductor pressure detecting device, even if the incompressible fluid expands or contracts due to the temperature change, a constant weight of the incompressible fluid is always applied to the semiconductor pressure detecting device. Can be injected into. As a result, a semiconductor pressure detecting device having highly accurate output characteristics can be easily manufactured without controlling the temperature of the incompressible fluid.

According to the second aspect of the invention, the mono pump is used when the incompressible fluid is injected. Therefore, by using the mono pump, the incompressible fluid having a volume proportional to the rotation amount of the motor of the mono pump can be discharged with good response, and the weight of the incompressible fluid injected can be made constant. Is easy.

According to the third aspect of the invention, the control means detects the temperature of the incompressible fluid through the temperature sensor,
The rotation amount of the motor is controlled based on the detected temperature. As a result, the incompressible fluid delivered by the delivery means has a constant weight volume.

Therefore, when injecting a non-compressible fluid that is apt to change in volume due to temperature change, it is possible to inject with a constant weight regardless of volume change due to temperature change of the incompressible fluid.

According to the fourth aspect of the invention, the fluid of a volume proportional to the rotation amount of the motor is discharged with good response by the mohno pump, and the injected fluid has a constant weight volume.

Therefore, by controlling the rotation amount of the motor, the volume of the fluid to be discharged can be changed with good responsiveness, so that the weight of the fluid to be injected can be easily made constant.

According to the invention described in claim 5, the control means detects the temperature of the incompressible fluid through the temperature sensor,
The rotation amount of the motor is controlled based on the detected temperature. Then, the volume of the incompressible fluid injected from the delivery means into the recess of the semiconductor pressure detecting device was adjusted so that the weight was constant.

Therefore, when the incompressible fluid is injected into the semiconductor pressure detecting device, even if the incompressible fluid expands or contracts due to the temperature change, the incompressible fluid having a constant weight is always detected in the semiconductor pressure. Can be injected into the device. As a result, a semiconductor pressure detecting device having highly accurate output characteristics can be easily manufactured without controlling the temperature of the incompressible fluid.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIG.
Follow the instructions below. FIG. 1 is a side sectional view of a semiconductor pressure detecting device 11 according to this embodiment.

In FIG. 1, a semiconductor pressure detecting device 11
Includes a sensor housing 12 made of metal and a connector housing 13 as a housing made of synthetic resin. The connector housing 13 is the sensor housing 12.
On the other hand, the base end portion 13a is fitted, and the caulking piece 12a formed on the front end side of the sensor housing 12 is bent inward and pressed to be assembled. Less than,
In FIG. 1, the upper side on the paper surface is expressed as the leading end and the lower side is expressed as the base end.

In the connector housing 13, a total of three terminal pins, that is, power supply terminal pins 14 and 15 for supplying power and signal terminal pins for transmitting signals (not shown) are insert-molded in the longitudinal direction.
(In FIG. 1, only two are shown.) At the central portion of the connector housing 13 in the axial direction,
Metal plate 16 for reinforcing the connector housing 13
Is provided. A substantially conical recess 13b is provided at the base end of the connector housing 13, and a chip storing portion 13c is further provided at the center bottom of the recess 13b. A sensor chip 21 is fixed to the chip storage portion 13c with an adhesive, and the sensor chip 21 is wire-bonded to three aluminum wires W1 and W2 (only two wires are shown in the figure. (Not shown)
The corresponding terminal pins 14,
15 and a signal terminal pin (not shown). The power supply terminal pins 14 and 15 and the signal terminal pins extend to the tip side of the connector housing 13.

In addition, a pressure introducing hole 12b is formed coaxially in the central portion of the inside of the sensor housing 12 so as to have a circular cross section. A step-like step portion 12c is formed in an expanded manner on the tip side of the pressure introducing hole 12b, and the diaphragm 17 and a metal pressing member (not shown) are both airtightly joined to the step portion 12c by laser welding or the like. ing.

When the connector housing 13 is assembled to the sensor housing 12, the recess 13b on the base end side of the connector housing 13 and the diaphragm 17 of the sensor housing 12 serve as a sealing chamber. The oil enclosure chamber 19 is formed. Silicone oil S as an incompressible fluid is enclosed in the oil enclosure chamber 19, and the connector housing 1
3 and an O-ring 20 provided on the outer periphery of the base end portion 13a
With the diaphragm 17 etc., the silicone oil S
Is sealed.

The silicone oil S in the oil enclosure 19 is injected into the recess 12d of the sensor housing 12 before the connector housing 13 is assembled to the sensor housing 12. More specifically, the silicone-based oil S is injected into the recess 12d of the sensor housing 12 fixed so that the recess 12d faces upward, and then the connector housing 13 is assembled to the sensor housing 12. As a result, the silicone oil S is sealed in the oil sealing chamber 19.

With the above structure, the pressure input from the pressure introducing hole 12b is transmitted to the silicone oil S in the oil sealing chamber 19. This pressure is applied to the sensor chip 2
1, the pressure is detected by the sensor chip 21, and an electric signal according to the magnitude of the pressure is output to the signal terminal pin.

Next, an oil injecting device 31 as an incompressible fluid injecting device for injecting the silicone oil S into the semiconductor pressure detecting device 11 configured as described above will be described with reference to FIG.

FIG. 2 is a schematic configuration diagram of the oil injection device 31 in this embodiment. As shown in FIG. 2, the oil injection device 31 includes a storage tank 32 for storing the silicone oil S, a dispenser 33 for injecting the oil S into the recess 12d of the sensor housing 12, and a control device 34 as a control means. Equipped with.

The silicone oil S stored in the storage tank 32 is supplied to the dispenser 33 through the supply pipe 35. A temperature sensor 36 is provided in the supply pipe 35, and the temperature sensor 36 detects the temperature of the silicone-based oil S flowing in the supply pipe 35 and outputs it to the control device 34.

The dispenser 33 comprises a rotary pump type mono pump 37 having a uniaxial eccentric screw structure (for example, see Japanese Patent Laid-Open No. 2000-64966), and the mono pump 3.
The motor 38 as a drive source for the motor 7 is integrally formed. The mono pump 37 is connected to the supply pipe 35, and the silicone oil S supplied from the supply pipe 35 is delivered by the rotation of a rotor (not shown) and discharged from a nozzle 37 a provided at the tip of the mono pump 37. And in this mono pump 37,
The volume of the silicone-based oil S discharged from the nozzle 37a per one rotation of the rotor is constant, and by adjusting the rotation amount of the motor 38, the weight of the silicone-based oil S discharged from the nozzle 37a is consequently adjusted. It is possible to do.

The silicone oil S discharged from the nozzle 37a is fixed with the caulking piece 12a (recess 12d) facing upward.
It is adapted to be injected into the recess 12d.

The control device 34 includes a CPU 39 and a ROM 4
1, a RAM 42, a starter switch 43, and a motor drive circuit 44. The CPU 39 is connected to the temperature sensor 36, and receives the temperature detection signal of the silicone oil S output from the temperature sensor 36.
The CPU 39 is connected to the motor 38 of the dispenser 33 via a motor drive circuit 44, and outputs a drive control signal to the motor drive circuit 44 so that the motor 38 rotates by the rotation amount calculated by the CPU 39. It is like this. The motor drive circuit 44 supplies drive power to the motor on the basis of a drive control signal from the CPU 39, and rotationally drives the motor 38 to rotate by the calculated rotation amount.

The ROM 41 is a memory in which the control program and the correction formula F referred to when executing the control program are stored. The RAM 42 temporarily stores various data and calculation results used when the CPU 39 performs calculation processing. The starter switch 43 is a switch that sends a start signal to the CPU 39 to start the injection of the silicone oil S into the sensor housing 12.

The CPU 39 uses the starter switch 4
When it receives the start signal from No. 3, it operates according to the control program stored in the ROM 41.
That is, the control program causes the CPU 39 to detect the temperature of the oil S, and based on the detected temperature, the motor 3
8 is a program for calculating the rotation amount of 8 and sending a fixed weight of oil S from the mono pump 37. More specifically, the mohno pump 37 driven by the motor 38 has different delivery (discharge) weights even if the volume of the oil S discharged per one rotation of the rotor is the same. Therefore, in the control program, even if the volume of the oil S changes due to expansion or contraction depending on the temperature, in order to always deliver (discharge) a predetermined constant discharge weight m, the temperature of the oil S at that time The CPU 39 calculates the amount of rotation of the motor 38, and the motor 38 is rotated by the calculated amount of rotation.

That is, the CPU 39 uses the starter switch 4
When the start signal is received from 3, the temperature of the silicone oil S in the supply pipe 35 is detected via the temperature sensor 36 according to the control program. Then, based on the detected temperature, the correction amount F stored in the ROM 41 is used to calculate the rotation amount of the motor 38 for delivering a predetermined constant weight of the oil S. Then, the CPU 39 transmits a drive control signal to the motor drive circuit 44 so that the motor 38 rotates by the calculated rotation amount. The motor 38 rotates by the rotation amount calculated by the CPU 39 and injects an appropriate amount of silicone oil S into the connector housing 13.

The correction formula F stored in the ROM 41 rotates the motor 38 so that a volume of silicone oil S corresponding to a predetermined discharge weight m can be injected based on the detected temperature. It is for correcting the amount, and is expressed by the following equation 1. In Expression 1, n represents the rotation amount of the motor 38 for injecting the oil S having a predetermined discharge weight m, and t represents the detected temperature. A and B are coefficients, T is an ideal temperature of the silicone oil S, N is an ideal rotation amount of the motor 38 at the ideal temperature T, and the coefficients A and B, the ideal temperature T and the ideal rotation amount N are respectively. Is a known numerical value obtained in advance by experiments or the like.

N = (A × T + B) × N / (A × t + B) [Equation 1] Then, the coefficients A and B in the above Equation 1 are values obtained experimentally, and in the present embodiment, Thus, it is obtained and stored in the ROM 41.

Dispenser 33 at ideal rotation amount N
The relationship between the discharge weight m and the temperature t is as shown in the following Expression 2 using the coefficients A and B. m = A × t + B [Equation 2] Further, FIG. 3 shows the dispenser 3 at the ideal rotation amount N.
The graph which experimentally calculated | required the relationship between the discharge weight m of 3 and temperature t is shown. The relationship between the discharge weight m and the temperature t can be approximated as an approximate straight line P, and the approximate expression of the approximate straight line P is as shown in the following Expression 3.

M = −4.7942 × t + 425.64 [Equation 3] Therefore, the coefficients A and B in the present embodiment are as shown in the following Equation 4 and Equation 5.

A = -4.7942 [Equation 4] B = 425.64 [Equation 5] Next, the operation of the oil injection device 31 configured as described above will be described with reference to the flowchart shown in FIG.

First, the sensor housing 12 to which the silicone oil S has not been injected is replaced by the silicone oil S.
Is placed in the oil injecting device 31 in a state where it can be injected. That is, the nozzle 37a of the dispenser 33 and the recess 12d of the sensor housing 12 are vertically opposed to each other (see FIG. 2). And the sensor housing 12
Is confirmed to be in a predetermined position by the operator's eyes or the like, and the worker or the like inputs the starter switch 43 in order to inject a predetermined constant weight (discharge weight) m of oil S into the sensor housing 12 ( Step S11).

The input signal of the starter switch 43 is the CPU
39, and the CPU 39 responds to the input signal according to the control program stored in the ROM 41.
The temperature t of the silicone oil S in the supply pipe 35 is detected via the temperature sensor 36 (step S12).

Next, the CPU 39 calculates the rotation amount n of the motor 38 from the correction formula F stored in the ROM 41 using the detected temperature t according to the control program (step S13). Then, the CPU 39 outputs a drive control signal to the motor drive circuit 44 so that the motor 38 rotates by the calculated rotation amount n. The motor drive circuit 44 rotates the motor 38 by the rotation amount n based on the drive control signal, and the silicone oil S having a constant discharge weight m is injected into the recess 12d of the sensor housing 12 (step S14).

According to the above embodiment, the following features can be obtained. (1) In the above embodiment, the control device 34 detects the temperature t of the silicone oil S via the temperature sensor 36,
The rotation amount n of the motor 38 of the dispenser 33 is controlled based on the detected temperature t. Then, the volume was adjusted so that the silicone-based oil S delivered from the mohno pump 37 to the recess 12d had a predetermined weight.

Therefore, when the silicone-based oil S is injected into the semiconductor pressure detecting device 11, due to the temperature change,
Even if the silicone-based oil S has expanded or contracted, the silicone-based oil S having a constant discharge weight m can be constantly injected into the semiconductor pressure detection device 11. As a result, the semiconductor pressure detecting device 11 having highly accurate output characteristics can be easily manufactured without temperature control such as providing a heat insulating device to prevent expansion and contraction of the silicone oil S due to temperature change. .

(2) In the above embodiment, the mono pump 37 of the dispenser 33 is used to discharge the silicone oil S of a volume proportional to the rotation amount of the motor 38, and the silicone oil S is injected into the recess 12d of the semiconductor pressure detecting device 11. The silicone oil S had a volume corresponding to a certain weight.

Therefore, by changing the rotation amount of the motor 38, the volume of the silicone-based oil S discharged from the mono pump 37 can be changed with good response, and the weight of the injected silicone-based oil S can be kept constant. Easy to do.

(3) In the above embodiment, the silicone oil S is filled in the recess 12d of the semiconductor pressure detecting device 11. Therefore, the sensor chip 21 provided in the recess 12d is not corroded.

The above embodiment may be modified as follows. In the above-described embodiment, the silicone-based oil S as the incompressible fluid is filled so as to fill the recess 12d of the semiconductor pressure detection device 11, but an incompressible fluid other than the silicone-based oil S, for example, It may be filled with silicone gel, fluorosilicone oil, fluorine oil or the like.

In the above embodiment, the oil injecting device 31 as the incompressible fluid injecting device is configured as a device for filling the recess 12d of the semiconductor pressure detecting device 11 with the silicone oil S at a constant weight. It may be used for the above purpose. For example, it may be used when injecting a non-compressible fluid whose volume changes with temperature or other fluids, such as water, liquid chemicals, liquid foods, oil, etc., at a constant weight into a container or the like.

In the above embodiment, the mono pump 37 is used as the delivery means, but the motor 3
Other delivery means capable of delivering a volume of incompressible fluid proportional to the amount of rotation of 8, such as a piston pump, a gear pump, a vane pump, a screw pump, a two-leaf pump, etc. may be used.

In the above embodiment, the CPU 39
Is configured to control the rotation amount of the motor 38. In addition, the position of the dispenser 33 can be controlled to be raised and lowered, and the dispenser 33 is lowered to the vicinity of the connector housing 13 before the injection, and the injection is completed. You may make it raise to an original position later.

In the above-described embodiment, the CPU 39 operates according to the control program after receiving the input signal of the starter switch 43 by the worker or the like, but the timer automatically starts the operation. Is also good. Alternatively, the operation may be started by detecting the position of the connector housing 13.

In the above-described embodiment, the CPU 39 calculates the amount of rotation of the motor 38 using the correction formula F (formula 1) stored in the ROM 41, but other formulas obtained experimentally You may make it calculate by.

In the above embodiment, the rotation amount n is obtained by using the correction formula F, but the rotation amount n for each temperature t is tabulated and stored in, for example, the ROM 41. Then, the rotation amount n with respect to the temperature t at each time may be read from the table.

[0054]

As described above in detail, according to the first and second aspects of the present invention, the semiconductor pressure detecting device can have highly accurate output characteristics.

In addition, according to the invention described in claims 3 and 4, it is possible to inject a fluid whose volume changes due to temperature change with a constant weight.

[Brief description of drawings]

FIG. 1 is a side sectional view of a semiconductor pressure detecting device according to this embodiment.

FIG. 2 is likewise a schematic configuration diagram of an oil injection device.

FIG. 3 is a graph showing the relationship between the oil temperature and the discharge weight of the dispenser.

FIG. 4 is likewise a flow chart for explaining the operation of the oil injection device.

[Explanation of symbols]

S ... Silicone oil, m ... Weight, n ... Rotation amount, t ...
Temperature, 11 ... Semiconductor pressure detecting device, 12d ... Recess, 1
3 ... Connector housing as housing, 13b ...
Recesses, 17 ... Diaphragm, 19 ... Oil filling chamber as sealing chamber, 21 ... Sensor chip, 34 ... Control device as control means, 36 ... Temperature sensor, 37 ... Mono pump,
38 ... Motor.

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F055 AA40 BB20 CC60 DD04 EE40                       GG01 GG25 HH03 HH08                 4M112 AA01 CA01 FA05 GA01

Claims (5)

[Claims] 1. A sensor chip disposed in a recess formed in a housing for detecting pressure, a diaphragm sealing the recess and forming a sealing chamber together with the recess, and sealing in the sealing chamber. In the method for manufacturing a semiconductor pressure detecting device including an incompressible fluid that transmits the pressure received by the diaphragm to the sensor chip, when the incompressible fluid is sealed in the sealing chamber, A delivery means capable of delivering a volume of the incompressible fluid proportional to the amount of rotation is used, and the temperature of the incompressible fluid is adjusted before the incompressible fluid is injected into the sealed chamber by the delivery means. The volume corresponding to the predetermined weight of the incompressible fluid is calculated based on the detected temperature, the rotation amount of the motor of the delivery means is calculated based on the calculated volume, and the calculation is performed. And by the rotation amount by rotating the motor, a method of manufacturing a semiconductor pressure detecting device, characterized in that so as to deliver the predetermined weight of the incompressible fluid into the sealing chamber. 2. The method for manufacturing a semiconductor pressure detecting device according to claim 1, wherein the delivery means is a mono pump. 3. A delivery means capable of delivering a volume of fluid proportional to the amount of rotation of a motor, a temperature sensor for detecting the temperature of the fluid, and a delivery means for delivering the temperature based on the temperature detected by the temperature sensor. A fluid injection device, comprising: a control unit that controls the rotation amount of the motor so that the fluid to be delivered has a predetermined weight volume. 4. The fluid injection device according to claim 3, wherein the delivery means is a mono pump. 5. The fluid injection device according to claim 3 or 4, wherein the fluid is an incompressible fluid injected into the semiconductor pressure detection device, and the delivery means is a recess formed in the semiconductor pressure detection device. A fluid injecting device, wherein the incompressible fluid is delivered at a constant weight.