JP2003032013A - Directional coupler - Google Patents

Directional coupler

Info

Publication number
JP2003032013A
JP2003032013A JP2001210461A JP2001210461A JP2003032013A JP 2003032013 A JP2003032013 A JP 2003032013A JP 2001210461 A JP2001210461 A JP 2001210461A JP 2001210461 A JP2001210461 A JP 2001210461A JP 2003032013 A JP2003032013 A JP 2003032013A
Authority
JP
Japan
Prior art keywords
line
directional coupler
coupling line
coupling
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001210461A
Other languages
Japanese (ja)
Inventor
Yoshikuni Fujihashi
芳邦 藤橋
Yuuji Oosumi
勇二 大炭
Hiroki Satou
祐己 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001210461A priority Critical patent/JP2003032013A/en
Publication of JP2003032013A publication Critical patent/JP2003032013A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a directional coupler that is configured to have a high directivity of 20 dB or more while eliminating the need for manual adjustment. SOLUTION: The directional coupler is configured to couple a coupling line formed on a base with a coaxial line in terms of high frequencies. A delay line whose length can be adjusted through trimming is also formed on the board, two paths extract an input signal from the opposite side, the signal on the one path is delayed on the delay line to bring the phase of the one signal into an opposite phase to the opposite signal so as to weaken the two signals, thereby configuring the directional coupler having the directivity improved by 20 dB or more to attain the purpose above.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、移動体通信の基地
局に用いられる方向性結合器に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a directional coupler used in a mobile communication base station.

【0002】[0002]

【従来の技術】従来の方向性結合器は、同軸線路の外部
導体に窓を開け、結合線路である副同軸線路の中心導体
をループ状にして同軸線路と高周波的に結合するように
構成していた。
2. Description of the Related Art A conventional directional coupler has a structure in which a window is opened in an outer conductor of a coaxial line and a central conductor of a sub-coaxial line which is a coupling line is formed into a loop shape to be coupled to the coaxial line at a high frequency. Was there.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、立体的
に構成したループ状の結合線路に、磁界によって誘導さ
れる電流の方向が、順方向から入力される信号と逆方向
から入力される信号で反対向きであることを利用して方
向性を確保しているので、ループの位置や形状の誤差に
よって特性の劣化が起こりやすく、20デシベル以上の
高い方向性が必要とされる移動体通信の基地局向けに用
いるためには、ループ位置や形状を人手によって調整す
る必要があるという課題を有していた。
However, the directions of the currents induced by the magnetic fields in the three-dimensionally formed loop-shaped coupling line are opposite to each other depending on the signal input from the forward direction and the signal input from the reverse direction. Since the directionality is secured by utilizing the direction, the characteristics of the loop are likely to deteriorate due to the error in the position and shape of the loop, and a base station for mobile communication that requires a high directionality of 20 dB or more. There is a problem that it is necessary to manually adjust the loop position and the shape in order to use it for facing.

【0004】本発明は上記従来の課題を解決するもの
で、人手による調整を不要とした、20デシベル以上の
方向性を有する方向性の高い方向性結合器を構成するこ
とを目的とするものである。
SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned conventional problems, and an object of the present invention is to construct a directional coupler having a high directional property having a directional property of 20 decibels or more, which does not require manual adjustment. is there.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に本発明は、結合線路を基板上に平面構成し、遅延線路
を用いたことによって20デシベル以上の高い方向性を
確保したものである。
In order to achieve the above object, the present invention secures a high directivity of 20 decibels or more by forming a coupling line in a plane on a substrate and using a delay line. .

【0006】結合線路および遅延線路を基板上に平面構
成したことにより、立体構成時に比較して構成時の位置
や寸法の誤差を少なくできる。遅延線路を用いて方向性
を確保しているので、遅延線路長のトリミングによって
方向性を調整でき、調整を自動化することができる。
By arranging the coupling line and the delay line in a plane on the substrate, it is possible to reduce the error in the position and the dimension in the structure as compared with the three-dimensional structure. Since the directionality is secured by using the delay line, the directionality can be adjusted by trimming the delay line length, and the adjustment can be automated.

【0007】[0007]

【発明の実施の形態】本発明の請求項1に記載の発明
は、中心導体および外部導体からなる同軸線路と、前記
中心導体に沿って前記同軸線路の平面部に設けられた窓
部と、前記窓部を覆うように設けられた結合線路用基板
と、前記結合線路用基板の前記窓部と対面する位置に設
けられるとともに前記窓部を介して前記同軸線路と高周
波的に結合するように設けられた結合線路と、前記結合
線路が設けられた反対面の前記結合線路用基板上に前記
結合線路と少なくとも2つのスルーホールを介して接続
された遅延線路と、前記結合線路用基板の両面に設けら
れるとともに電気的に接続されたグランド部と、前記ス
ルーホールの少なくとも1つとその中心導体が接続され
るとともにそのグランドが前記結合線路用基板のグラン
ド部と接続された取り出し用同軸線路とからなる方向性
結合器であり、人手による調整の不要な方向性の高い方
向性結合器を構成するという作用を有する。
BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention is a coaxial line comprising a central conductor and an outer conductor, and a window portion provided along the central conductor in a plane portion of the coaxial line, A coupling line substrate provided so as to cover the window portion, and a coupling line substrate which is provided at a position facing the window portion of the coupling line substrate and is coupled to the coaxial line through the window portion in a high frequency manner. Both sides of the coupling line provided, a delay line connected to the coupling line via at least two through holes on the coupling line substrate on the opposite side to which the coupling line is provided, At least one of the through holes and the central conductor thereof are connected to the ground portion which is electrically connected to the ground portion of the coupling line substrate. A directional coupler comprising a coaxial line for out has the effect that constitutes an unnecessary direction highly directional coupler manual adjustment.

【0008】本発明の請求項2に記載の発明は、結合線
路の長さをほぼ1/4λにするとともに、窓部の長さを
それ以上の長さにした請求項1記載の方向性結合器であ
り、人手による調整の不要な方向性の高い方向性結合器
を小型に構成するという作用を有する。
According to a second aspect of the present invention, the length of the coupling line is set to approximately 1 / 4λ and the length of the window portion is set to be longer than that. The directional coupler has a small size and does not require manual adjustment.

【0009】本発明の請求項3に記載の発明は、窓部を
中心導体に対して所定の角度で交差するように形成した
ことを特徴とする請求項1記載の方向性結合器であり、
人手による調整の不要な方向性の高い方向性結合器を構
成するという作用を有する。
The invention according to claim 3 of the present invention is the directional coupler according to claim 1, wherein the window portion is formed so as to intersect the central conductor at a predetermined angle.
It has the effect of constructing a directional coupler with high directivity that does not require manual adjustment.

【0010】本発明の請求項4に記載の発明は、結合線
路用基板の誘電率を高くすることにより、結合線路の長
さを1/4λよりも短くしたことを特徴とする請求項1
記載の方向性結合器であり、人手による調整の不要な方
向性の高い方向性結合器を小型に構成するという作用を
有する。
The invention according to claim 4 of the present invention is characterized in that the length of the coupled line is made shorter than 1 / 4λ by increasing the permittivity of the substrate for the coupled line.
The directional coupler described has an effect of configuring a directional coupler with high directivity that does not require manual adjustment in a small size.

【0011】本発明の請求項5に記載の発明は、結合線
路用基板上に結合線路を2つに分離して設けたことを特
徴とする請求項1記載の方向性結合器であり、人手によ
る調整の不要な方向性の高い方向性結合器を構成すると
いう作用を有する。
The invention according to claim 5 of the present invention is the directional coupler according to claim 1, characterized in that the coupling line is provided separately on the coupling line substrate. This has the effect of constructing a directional coupler with high directivity that does not require adjustment by.

【0012】本発明の請求項6に記載の発明は、取り出
し用同軸線路に代えて、スルーホールに取り出し線を接
続するとともに遅延線路に検波回路を接続したことを特
徴とする請求項1記載の方向性結合器であり、人手によ
る調整の不要な方向性の高い方向性結合器を構成すると
いう作用を有する。
According to a sixth aspect of the present invention, instead of the take-out coaxial line, a take-out line is connected to the through hole and a detection circuit is connected to the delay line. It is a directional coupler, and has the action of forming a directional coupler with high directivity that does not require manual adjustment.

【0013】以下、本発明の実施の形態について、図1
および図2を用いて説明する。
FIG. 1 shows an embodiment of the present invention.
And it demonstrates using FIG.

【0014】(実施の形態1)図1は本発明の実施の形
態1における方向性結合器を示し、11は中心導体であ
り、12は外部導体であり、13は同軸線路であり中心
導体11および外部導体12とから構成され高周波信号
を伝播する。14は窓部であり中心導体11と並行に同
軸線路13に設けられ、15は誘電体を用いた結合線路
用基板であり窓部14を覆うように設けられ、16は結
合線路用基板15に設けられた結合線路であり高周波信
号のほぼ4分の1波長の長さを有し窓部14と対面する
位置に窓部14よりも短い長さで設けられ同軸線路13
と高周波的に結合する。
(Embodiment 1) FIG. 1 shows a directional coupler according to Embodiment 1 of the present invention, in which 11 is a center conductor, 12 is an outer conductor, 13 is a coaxial line, and a center conductor 11 And an outer conductor 12 to propagate a high frequency signal. Reference numeral 14 denotes a window portion provided on the coaxial line 13 in parallel with the central conductor 11, 15 denotes a coupling line substrate using a dielectric and is provided so as to cover the window portion 14, and 16 denotes a coupling line substrate 15. The coaxial line 13 is a provided coupling line having a length of about a quarter wavelength of a high frequency signal and provided at a position facing the window 14 with a length shorter than that of the window 14.
Coupled with high frequency.

【0015】17はスルーホールAであり、18はスル
ーホールBであり、19は遅延線路であり結合線路16
と反対面の結合線路用基板上に構成されトリミングによ
って長さ調整が可能であって、スルーホールA17およ
びスルーホールB18によって結合線路16と電気的に
接続される。20は結合線路用基板15の両面に設けら
れたグランド部であり、21は取り出し用同軸線路であ
り、その中心導体がスルーホールA17と接続されグラ
ンドがグランド部20と接続される。
Reference numeral 17 is a through hole A, 18 is a through hole B, 19 is a delay line, and the coupling line 16
It is formed on the substrate for the coupled line on the opposite side, and its length can be adjusted by trimming, and it is electrically connected to the coupled line 16 by the through hole A17 and the through hole B18. Reference numeral 20 is a ground portion provided on both surfaces of the coupling line substrate 15, 21 is a take-out coaxial line, the center conductor of which is connected to the through hole A17 and the ground is connected to the ground portion 20.

【0016】22は入力端であり、23は入力端22と
反対側に設けられた出力端である。入力端22から入力
された高周波信号は出力端23に出力されると共に、そ
の一部分が取り出し用同軸線路21に取り出される。入
力端22への入力電力と、取り出し用同軸線路21へ取
り出される電力の差が結合度である。出力端23から入
力された高周波信号は入力端22に出力されると共に、
その一部分が取り出し用同軸線路21に取り出される。
入力端22または出力端23に高周波信号が入力された
場合の、取り出し用同軸線路21へ取り出される高周波
信号電力の差が方向性である。
Reference numeral 22 is an input end, and 23 is an output end provided on the opposite side of the input end 22. The high-frequency signal input from the input end 22 is output to the output end 23, and a part of the high-frequency signal is output to the extraction coaxial line 21. The difference between the input power to the input end 22 and the power output to the extraction coaxial line 21 is the coupling degree. The high-frequency signal input from the output end 23 is output to the input end 22 and
A part thereof is taken out to the taking-out coaxial line 21.
When a high frequency signal is input to the input end 22 or the output end 23, the difference in the power of the high frequency signal extracted to the extraction coaxial line 21 is the directivity.

【0017】本方向性結合器において、同軸線路13の
出力端23から入力された高周波信号は、結合線路16
と高周波的に結合し、スルーホールA17およびスルー
ホールB18を介して2つの経路にて取り出し用同軸線
路21に取り出される。その際、スルーホールB18を
介して取り出される高周波信号は、結合線路用基板15
が誘電体を用いて構成されているため遅延線路19にて
遅延が生じ、スルーホールA17を介して取り出される
高周波信号に対して位相が反転し、信号を弱めあって2
0デシベル以上減衰して取り出し用同軸線路21に取り
出される。結合線路用基板15の位置や寸法誤差によっ
て方向性が低下した場合には、遅延線路19の長さをト
リミングして遅延量を調整し、方向性を20デシベル以
上に高めることができる。
In this directional coupler, the high frequency signal inputted from the output end 23 of the coaxial line 13 is coupled to the coupled line 16.
And is taken out to the take-out coaxial line 21 by two paths through the through hole A17 and the through hole B18. At that time, the high-frequency signal taken out through the through hole B18 is coupled to the coupling line substrate 15
Since it is composed of a dielectric material, a delay occurs in the delay line 19 and the phase is inverted with respect to the high frequency signal taken out through the through hole A17, and the signals weaken each other.
It is attenuated by 0 decibels or more and taken out to the taking-out coaxial line 21. When the directivity is lowered due to the position or dimension error of the coupling line substrate 15, the delay amount can be adjusted by trimming the length of the delay line 19 to increase the directivity to 20 decibels or more.

【0018】一方、同軸線路13の入力端22から入力
された高周波信号は、結合線路16と高周波的に結合
し、スルーホールA17およびスルーホールB18を介
して2つの経路にて取り出し用同軸線路21に取り出さ
れる。スルーホールB18から取り出される高周波信号
は、同軸線路13上を伝播し、スルーホールB18を介
して遅延線路19上を戻ってくるので、出力端23から
高周波信号が入力された場合と異なり、スルーホールA
17を介して取り出される高周波信号に対して位相が反
転にならないので、1デシベル以内の減衰で取り出し用
同軸線路21に取り出される。
On the other hand, the high-frequency signal input from the input end 22 of the coaxial line 13 is coupled to the coupling line 16 in a high frequency manner, and the extraction coaxial line 21 is taken out through two paths via the through hole A17 and the through hole B18. Taken out. The high frequency signal extracted from the through hole B18 propagates on the coaxial line 13 and returns on the delay line 19 via the through hole B18. Therefore, unlike the case where the high frequency signal is input from the output end 23, A
Since the phase is not inverted with respect to the high frequency signal taken out via 17, it is taken out to the taking-out coaxial line 21 with attenuation within 1 decibel.

【0019】なお、本発明の実施の形態1では窓部14
を中心導体11に並行に設けたが、所定の角度で交差す
るように設けても同様の効果を得ることができる。
In the first embodiment of the present invention, the window portion 14
Are provided in parallel with the central conductor 11, but the same effect can be obtained even if they are provided so as to intersect at a predetermined angle.

【0020】なお、本発明の実施の形態1では結合線路
16の長さを、高周波信号のほぼ4分の1波長の長さに
したが、結合線路用基板15の誘電率を高めて遅延線路
19の波長短縮率を高めることによって、高周波信号の
ほぼ4分の1波長よりも短くしても同様の効果を得るこ
とができる。
In the first embodiment of the present invention, the length of the coupling line 16 is set to be about a quarter wavelength of the high frequency signal. However, the dielectric constant of the coupling line substrate 15 is increased to delay the delay line. By increasing the wavelength shortening rate of 19, the same effect can be obtained even if the wavelength is shorter than about one quarter wavelength of the high frequency signal.

【0021】なお、本発明の実施の形態1では結合線路
16を1つのみ設けたが、2つ以上に分離して設けても
同様の効果を得ることができる。
Although only one coupling line 16 is provided in the first embodiment of the present invention, the same effect can be obtained even if two or more coupling lines 16 are provided separately.

【0022】なお、本発明の実施の形態1では、用途を
移動体通信の基地局として説明したが、他用途の方向性
結合器に用いても同様の効果を得ることができる。
In the first embodiment of the present invention, the application has been described as a base station for mobile communication, but the same effect can be obtained by using it as a directional coupler for other applications.

【0023】(実施の形態2)実施の形態2は結合線路
用基板15に検波回路を設けてスルーホールBから高周
波信号を直流にて取り出す以外は実施の形態1と同じ構
成なので、同一構成部分には同一番号を付して詳細な説
明を省略する。
(Second Embodiment) The second embodiment has the same configuration as that of the first embodiment except that a detection circuit is provided on the coupling line substrate 15 and a high frequency signal is taken out from the through hole B as a direct current. Are denoted by the same reference numerals and detailed description thereof will be omitted.

【0024】図2は本発明の実施の形態2における方向
性結合器を示し、24は検波回路であり、25は取り出
し線でありリード線で構成される。スルーホールB18
から出力される高周波信号を検波回路24で検波して、
取り出し線25から直流として取り出される。
FIG. 2 shows a directional coupler according to the second embodiment of the present invention, in which 24 is a detection circuit, 25 is an extraction line and is composed of a lead line. Through hole B18
The high frequency signal output from is detected by the detection circuit 24,
It is taken out from the lead wire 25 as direct current.

【0025】なお、本発明の実施の形態2では取り出し
線25にリード線を用いたが、同軸線路を用いても同様
の効果を得ることができる。
Although the lead wire is used as the lead wire 25 in the second embodiment of the present invention, the same effect can be obtained by using a coaxial line.

【0026】[0026]

【発明の効果】以上のように本発明によれば、人手によ
る調整を不要とした、20デシベル以上の方向性を有す
る方向性の高い方向性結合器を構成することができる。
As described above, according to the present invention, it is possible to construct a highly directional coupler having a directivity of 20 decibels or more, which does not require manual adjustment.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施の形態1における方向性結合器の
斜視図
FIG. 1 is a perspective view of a directional coupler according to a first embodiment of the present invention.

【図2】本発明の実施の形態2における方向性結合器の
斜視図
FIG. 2 is a perspective view of a directional coupler according to a second embodiment of the present invention.

【符号の説明】[Explanation of symbols]

11 中心導体 12 外部導体 13 同軸線路 14 窓部 15 結合線路用基板 16 結合線路 17 スルーホールA 18 スルーホールB 19 遅延線路 20 グランド部 21 取り出し用同軸線路 22 入力端 23 出力端 24 検波回路 25 取り出し線 11 center conductor 12 outer conductor 13 coaxial line 14 windows 15 Coupling line substrate 16 coupled lines 17 Through hole A 18 through hole B 19 delay lines 20 ground section 21 Extraction coaxial line 22 Input end 23 Output end 24 Detection circuit 25 Take-out line

───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐藤 祐己 大阪府門真市大字門真1006番地 松下電器 産業株式会社内   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yuki Sato             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd.

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 中心導体および外部導体からなる同軸線
路と、前記中心導体に沿って前記同軸線路の平面部に設
けられた窓部と、前記窓部を覆うように設けられた結合
線路用基板と、前記結合線路用基板の前記窓部と対面す
る位置に設けられるとともに前記窓部を介して前記同軸
線路と高周波的に結合するように設けられた結合線路
と、前記結合線路が設けられた反対面の前記結合線路用
基板上に前記結合線路と少なくとも2つのスルーホール
を介して接続された遅延線路と、前記結合線路用基板の
両面に設けられるとともに電気的に接続されたグランド
部と、前記スルーホールの少なくとも1つとその中心導
体が接続されるとともにそのグランドが前記結合線路用
基板のグランド部と接続された取り出し用同軸線路とか
らなる方向性結合器。
1. A coaxial line composed of a central conductor and an outer conductor, a window portion provided along the central conductor in a plane portion of the coaxial line, and a coupling line substrate provided so as to cover the window portion. And a coupling line which is provided at a position facing the window portion of the coupling line substrate and which is provided so as to be coupled to the coaxial line through the window portion in a high frequency manner, and the coupling line. A delay line connected to the coupling line via at least two through holes on the opposite side of the coupling line substrate; and a ground portion provided on both sides of the coupling line substrate and electrically connected to each other. A directional coupler comprising at least one of the through holes and a center conductor thereof, and a take-out coaxial line whose ground is connected to a ground portion of the coupling line substrate.
【請求項2】 結合線路の長さをほぼ1/4λにすると
ともに、窓部の長さをそれ以上の長さにした請求項1記
載の方向性結合器。
2. The directional coupler according to claim 1, wherein the length of the coupled line is set to approximately 1 / 4λ and the length of the window portion is set to be longer than that.
【請求項3】 窓部を中心導体に対して所定の角度で交
差するように形成したことを特徴とする請求項1記載の
方向性結合器。
3. The directional coupler according to claim 1, wherein the window portion is formed so as to intersect the center conductor at a predetermined angle.
【請求項4】 結合線路用基板の誘電率を高くすること
により、結合線路の長さを1/4λよりも短くしたこと
を特徴とする請求項1記載の方向性結合器。
4. The directional coupler according to claim 1, wherein the length of the coupling line is made shorter than 1 / 4λ by increasing the permittivity of the coupling line substrate.
【請求項5】 結合線路用基板上に結合線路を2つに分
離して設けたことを特徴とする請求項1記載の方向性結
合器。
5. The directional coupler according to claim 1, wherein the coupling line is provided separately on the coupling line substrate.
【請求項6】 取り出し用同軸線路に代えて、スルーホ
ールに取り出し線を接続するとともに遅延線路に検波回
路を接続したことを特徴とする請求項1記載の方向性結
合器。
6. The directional coupler according to claim 1, wherein a lead-out line is connected to the through hole and a detection circuit is connected to the delay line instead of the lead-out coaxial line.
JP2001210461A 2001-07-11 2001-07-11 Directional coupler Pending JP2003032013A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001210461A JP2003032013A (en) 2001-07-11 2001-07-11 Directional coupler

Publications (1)

Publication Number Publication Date
JP2003032013A true JP2003032013A (en) 2003-01-31

Family

ID=19045934

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004055937A1 (en) * 2002-12-14 2004-07-01 Kmw Inc. Directional coupler integrated with connectors
WO2005114777A1 (en) * 2004-05-21 2005-12-01 Murata Manufacturing Co., Ltd. Microstrip line type directional coupler and communication device using it
CN100373688C (en) * 2005-12-06 2008-03-05 电子科技大学 Adjustable single hole coaxial output directional coupler
KR101614367B1 (en) 2016-03-10 2016-04-21 정재웅 Directional coupler
US10547095B2 (en) 2016-11-29 2020-01-28 Kabushiki Kaisha Toshiba Method of manufacturing directional coupler
CN113193324A (en) * 2020-01-29 2021-07-30 东京毅力科创株式会社 Directional coupler, apparatus for processing substrate and method for processing substrate

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004055937A1 (en) * 2002-12-14 2004-07-01 Kmw Inc. Directional coupler integrated with connectors
US7234948B2 (en) 2002-12-14 2007-06-26 Kmw Inc Directional coupler integrated with connectors
WO2005114777A1 (en) * 2004-05-21 2005-12-01 Murata Manufacturing Co., Ltd. Microstrip line type directional coupler and communication device using it
US7595707B2 (en) 2004-05-21 2009-09-29 Murata Manufacturing Co., Ltd. Microstripline type directional coupler and communication device using the same
CN100373688C (en) * 2005-12-06 2008-03-05 电子科技大学 Adjustable single hole coaxial output directional coupler
KR101614367B1 (en) 2016-03-10 2016-04-21 정재웅 Directional coupler
US10547095B2 (en) 2016-11-29 2020-01-28 Kabushiki Kaisha Toshiba Method of manufacturing directional coupler
CN113193324A (en) * 2020-01-29 2021-07-30 东京毅力科创株式会社 Directional coupler, apparatus for processing substrate and method for processing substrate
KR20210097026A (en) 2020-01-29 2021-08-06 도쿄엘렉트론가부시키가이샤 Directional coupler, substrate processing apparatus, and substrate processing method
JP2021118513A (en) * 2020-01-29 2021-08-10 東京エレクトロン株式会社 Directional coupler, device for processing substrate, and method for processing substrate
KR102465595B1 (en) 2020-01-29 2022-11-10 도쿄엘렉트론가부시키가이샤 Directional coupler, substrate processing apparatus, and substrate processing method
US11569558B2 (en) 2020-01-29 2023-01-31 Tokyo Electron Limited Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate
JP7331717B2 (en) 2020-01-29 2023-08-23 東京エレクトロン株式会社 Directional coupler, apparatus for processing substrates, and method for processing substrates

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