JP2003026808A - Method for producing organosilicon polymer - Google Patents

Method for producing organosilicon polymer

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Publication number
JP2003026808A
JP2003026808A JP2001215115A JP2001215115A JP2003026808A JP 2003026808 A JP2003026808 A JP 2003026808A JP 2001215115 A JP2001215115 A JP 2001215115A JP 2001215115 A JP2001215115 A JP 2001215115A JP 2003026808 A JP2003026808 A JP 2003026808A
Authority
JP
Japan
Prior art keywords
organosilicon polymer
organosilicon
soluble
polymer
metal impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001215115A
Other languages
Japanese (ja)
Inventor
Yoshitaka Hamada
吉隆 濱田
Shigeru Mori
滋 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP2001215115A priority Critical patent/JP2003026808A/en
Publication of JP2003026808A publication Critical patent/JP2003026808A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To widen uses of an organosilicon polymer material in which metal impurities are reduced to such a level that the organosilicon polymer material can be applied to an electronic part without impairing essential properties of the organosilicon polymer including a polysilane. SOLUTION: In this method for organosilicon polymer purification, removing metal impurities, the organosilicon polymer or a solution of the organosilicon polymer in a nonpolar solvent is stirred in the presence of a water-soluble compound having complex formation ability of an equivalent or more based on the metal impurities at a room temperature-150 deg.C for >=5 minutes and cleaned with pure water.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、ポリシラン等の有
機ケイ素系ポリマー中の金属不純物を電子材料向けなど
に利用可能なレベルまで低減し、有機ケイ素系ポリマー
を精製する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for purifying an organosilicon polymer by reducing metal impurities in the organosilicon polymer such as polysilane to a level usable for electronic materials.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来よ
り、ポリシラン材料はその特異な化学的、光学的、電子
的性質が注目されており、導電性物質、光導電性物質、
非線形光学物質などとして期待されている。しかしなが
ら、ポリシランなどの有機ケイ素系ポリマーの基本骨格
であるSi−Si結合は、主に金属ナトリウムをはじめ
とするアルカリ金属によるクロロシラン類のウルツ反応
というイオン性の副生成物を多量に生成する条件で合成
されることが多く、これらの不純物の除去が不完全なた
めに電子材料用途への応用が制限されていた部分があ
る。
2. Description of the Related Art Conventionally, polysilane materials have been attracting attention for their unique chemical, optical, and electronic properties, such as conductive materials, photoconductive materials, and
It is expected as a non-linear optical material. However, the Si-Si bond, which is the basic skeleton of organosilicon-based polymers such as polysilane, is a condition under which a large amount of ionic by-products, such as the wurtz reaction of chlorosilanes with alkali metals such as metallic sodium, is generated. In many cases, they are synthesized, and the removal of these impurities is incomplete, which limits their application to electronic materials.

【0003】この場合、従来の精製方法としては有機ケ
イ素系ポリマーの溶液の酸性水溶液での繰り返し抽出す
る方法(特開平11−12362号公報)や有機ケイ素
系ポリマーの溶液を塩酸水で洗浄した後、超純水で洗浄
する(特開平11−199675号公報)などの方法が
知られていた。しかしながら、これらの方法は、簡便に
金属不純物の除去が可能な反面、有機ケイ素系ポリマー
の分解のおそれや、有機ケイ素系ポリマー中の塩素等酸
性成分の含有率を増加させる恐れがあった。
In this case, conventional purification methods include a method of repeatedly extracting an organic silicon-based polymer solution with an acidic aqueous solution (Japanese Patent Laid-Open No. 11-12362) or a method of washing the organic silicon-based polymer solution with hydrochloric acid water. Methods such as washing with ultrapure water (Japanese Patent Laid-Open No. 11-199675) have been known. However, while these methods can easily remove metal impurities, there is a risk of decomposition of the organosilicon polymer and an increase in the content of acidic components such as chlorine in the organosilicon polymer.

【0004】従って、本発明は有機ケイ素系ポリマーが
本来持っている特性を損なうことなく、有機ケイ素系ポ
リマー中の金属不純物を比較的簡単な操作で電子材料向
けなどに利用可能なレベルまで低減化することができる
有機ケイ素系ポリマーの精製方法を提供することを目的
とする。
Therefore, according to the present invention, the metal impurities in the organosilicon polymer can be reduced to a level usable for electronic materials by a relatively simple operation without impairing the inherent properties of the organosilicon polymer. It is an object of the present invention to provide a method for purifying an organosilicon polymer that can be used.

【0005】[0005]

【課題を解決するための手段及び発明の実施の形態】本
発明者らは、上記目的を達成するため鋭意検討を行った
結果、ウルツ反応により合成したポリシラン等のイオン
化されやすい金属不純物を含有する有機ケイ素系ポリマ
ーを精製する方法として、あらかじめゲル状の副生成物
がある場合には、好ましくはこれを取り除いた後に、必
要によりトルエンなどの非極性溶媒中にポリマーを溶解
させ、水溶性で錯形成能力のある化合物(錯形成剤)ま
たはその非水溶液を添加し、室温〜150℃の温度にて
5分以上撹拌を行い、ついで有機ケイ素系ポリマー溶液
に対して、好ましくは半量以上の電気抵抗10MΩ/c
m以上の純水による洗浄を2回以上繰り返すことによ
り、効率よく金属不純物の除去が達成されることを見い
だし、本発明に至った。
Means for Solving the Problems and Modes for Carrying Out the Invention As a result of intensive studies for achieving the above-mentioned object, the present inventors have found that it contains a metal impurity such as polysilane synthesized by the Wurtz reaction, which is easily ionized. As a method for purifying an organosilicon-based polymer, when a gel-like by-product is present in advance, it is preferable to remove the by-product and then dissolve the polymer in a non-polar solvent such as toluene if necessary to prepare a water-soluble complex. A compound having a forming ability (complexing agent) or a non-aqueous solution thereof is added, and the mixture is stirred at room temperature to 150 ° C for 5 minutes or more, and then preferably has an electric resistance of not less than half of the organosilicon polymer solution. 10 MΩ / c
It was found that the removal of metal impurities can be efficiently achieved by repeating washing with pure water of m or more twice or more, and the present invention has been accomplished.

【0006】即ち、本発明は、有機ケイ素系ポリマー中
の金属不純物を除去する方法において、有機ケイ素系ポ
リマーまたはその非極性溶媒の溶液を、金属不純物に対
して当量以上の水溶性で錯形成能力のある化合物共存下
で室温〜150℃の温度で5分以上撹拌した後、さらに
純水による洗浄を行うことを特徴とする有機ケイ素ポリ
マーの精製方法を提供する。
That is, the present invention relates to a method for removing metal impurities in an organosilicon polymer, wherein a solution of the organosilicon polymer or a non-polar solvent thereof is water-soluble in an amount equal to or more than the metal impurities and has a complexing ability. A method for purifying an organosilicon polymer, which comprises stirring at room temperature to 150 ° C. for 5 minutes or more in the coexistence of a certain compound, and further washing with pure water.

【0007】本発明によれば、有機ケイ素系ポリマーよ
り電子材料用途向けなどに利用可能なレベルまでイオン
性の不純物を低減させることができ、特に導電性物質、
光導電性物質、非線形光学物質などとして有用なポリシ
ラン等の有機ケイ素系ポリマーの特性を生かす上で障害
となるイオン性の不純物や金属不純物を酸性物質の混入
やポリマーの分解を抑えながら効率的に取り除くことが
できる。
According to the present invention, it is possible to reduce ionic impurities to a level at which it can be used for electronic material applications, etc., compared with organosilicon polymers, and particularly conductive materials,
Efficiently suppresses the mixing of acidic substances and polymer decomposition of ionic impurities and metal impurities that are obstacles to taking advantage of the properties of organosilicon polymers such as polysilane that are useful as photoconductive substances and nonlinear optical substances. Can be removed.

【0008】以下、本発明につきさらに詳しく説明す
る。
The present invention will be described in more detail below.

【0009】本発明による精製方法は、ポリシラン、特
にウルツ反応によるポリシランや、ウルツ反応を利用す
るポリカルボシランなどはもちろん、開環重合法やアニ
オン重合法による有機ケイ素系ポリマー等、除去すべき
イオン性の金属不純物を含むいずれのポリマーに対して
も、適用可能である。これらのポリマーは、有機溶媒に
可溶であれば、直鎖状であっても枝分かれ構造を持つポ
リマーであってもよい。本発明によれば、主鎖のSi−
Si結合や、ケイ素上のフェニル基、水素基などの強酸
による分解が懸念される側鎖基を含有するポリマーに対
しても適用可能である。なお、上記ポリマーの重合度は
特に制限されないが、Si−連鎖は2個以上であること
が好ましく、また重量平均分子量500〜500,00
0程度のものを用いることができるが、重合度、分子量
はこれに限定されるものではない。
The purification method according to the present invention includes polysilanes, particularly polysilanes produced by the Wurtz reaction, polycarbosilanes produced by the Wurtz reaction, as well as organic silicon-based polymers produced by the ring-opening polymerization method or the anion polymerization method. It is applicable to any polymer containing a polar metallic impurity. These polymers may be linear or branched polymers as long as they are soluble in an organic solvent. According to the invention, the main chain Si-
It is also applicable to a polymer containing a Si bond or a side chain group such as a phenyl group or hydrogen group on silicon, which may be decomposed by a strong acid. The degree of polymerization of the above-mentioned polymer is not particularly limited, but it is preferable that the number of Si-chains is 2 or more, and the weight average molecular weight is 500 to 500,000.
Although the thing of about 0 can be used, a polymerization degree and a molecular weight are not limited to this.

【0010】本発明においては、有機ケイ素系ポリマー
が液状のものはそのまま、好ましくは非極性有機溶媒に
溶解、希釈して使用に供し、固体状のものは非極性有機
溶媒に溶解して使用に供する。有機溶媒は有機ケイ素系
ポリマーを溶解させるものであればいずれのものでも良
く、たとえばトルエン、キシレン等をあげることができ
る。有機ケイ素系ポリマーの有機溶媒中の濃度は適宜選
定されるが、3〜50重量%、好ましくは5〜30重量
%、より好ましくは10〜20重量%である。
In the present invention, the liquid organosilicon polymer is used as it is, preferably dissolved in a nonpolar organic solvent and diluted before use, and the solid one is dissolved in a nonpolar organic solvent before use. To serve. Any organic solvent may be used as long as it can dissolve the organosilicon polymer, and examples thereof include toluene and xylene. Although the concentration of the organosilicon polymer in the organic solvent is appropriately selected, it is 3 to 50% by weight, preferably 5 to 30% by weight, more preferably 10 to 20% by weight.

【0011】本発明では、まず上記有機ケイ素系ポリマ
ー溶液に水溶性で錯形成能力のある化合物(錯形成剤)
を添加し、室温ないし加熱条件で撹拌を行うもので、均
一系の反応でイオン化されやすい金属不純物についても
金属塩または錯塩として不溶化あるいは水溶性とし、続
いて行われる純水による水洗で除去しやすくするもので
ある。本発明に使用される錯形成剤としては、酢酸、プ
ロピオン酸などのモノカルボン酸類の他に、シュウ酸、
マロン酸、琥珀酸、リンゴ酸、クエン酸などの多価カル
ボン酸類や、グリシン、アラニンなどのアミノ酸類、E
DTA(エチレンジアミン四酢酸)やacac(アセチ
ルアセトン)などのキレート剤、シクロデキストリンな
どの包接格子化合物なども選択することができる。これ
らの水溶性で錯形成能力のある化合物(錯形成剤)は有
機溶媒への溶解性、金属塩の水溶性、pKa、金属との
錯形成能力などを考慮して選択し、単独または組み合わ
せて使用することができるが、多価カルボン酸が好まし
く、たとえば鉄などの除去にはクエン酸の使用が効果的
である。
In the present invention, first, a compound (complexing agent) which is water-soluble and has a complex-forming ability in the above-mentioned organosilicon polymer solution.
Is added, and the mixture is stirred at room temperature or under heating conditions.Metal impurities that are easily ionized in a homogeneous reaction are insolubilized or made water-soluble as a metal salt or complex salt, and then easily removed by washing with pure water. Is what you do. As the complexing agent used in the present invention, acetic acid, in addition to monocarboxylic acids such as propionic acid, oxalic acid,
Polycarboxylic acids such as malonic acid, succinic acid, malic acid and citric acid, amino acids such as glycine and alanine, E
A chelating agent such as DTA (ethylenediaminetetraacetic acid) or acac (acetylacetone), an inclusion lattice compound such as cyclodextrin, or the like can also be selected. These water-soluble and complex-forming compounds (complexing agents) are selected in consideration of solubility in organic solvents, water-solubility of metal salts, pKa, ability to form complexes with metals, and the like, alone or in combination. Although they can be used, polycarboxylic acids are preferable, and citric acid is effective for removing iron and the like.

【0012】本発明に使用される錯形成剤は一般的に酸
としての強度が弱く、有機ケイ素系ポリマーの骨格を分
解する作用が少ないが、均一系での処理により効率的に
金属、金属イオンを捕捉することができる。また、同じ
錯形成剤を使用した処理の場合、有機ケイ素系ポリマー
溶液に添加、加熱した場合の方が単に錯形成剤溶液によ
る洗浄操作を行った場合に比べて、いずれの場合も金属
不純物の除去効果は高い。
The complexing agent used in the present invention generally has a weak strength as an acid and a small action of decomposing the skeleton of the organosilicon polymer, but the treatment with a homogeneous system allows the metal and the metal ion to be efficiently treated. Can be captured. Further, in the case of the treatment using the same complex-forming agent, in the case of adding to the organic silicon-based polymer solution and heating, compared with the case of simply performing the washing operation with the complex-forming agent solution, metal impurities The removal effect is high.

【0013】錯形成剤の使用量は特に制限はないが、ポ
リマー溶液100重量部に対して0.01〜10重量部
とすることが好ましい。この錯形成剤をそのままあるい
はアルコールなど非水系の溶液として添加し、使用する
ことができる。この際、反応液は均一であることが好ま
しいが、不均一であっても特に問題はない。また、反応
温度は室温(20℃)〜150℃であり、室温または加
熱して行うことができるが、有機溶媒に希釈又は溶解し
た場合は有機ケイ素系ポリマー分子の運動がより大きく
なる還流条件で行うことが好ましい。反応時間は5分以
上であり、好ましくは15分から3時間程度行うことが
できるが、特に制限されるものではない。本反応が通
常、弱酸の反応であることを考慮すれば、金属分の低減
化には、塩酸洗浄法などに比べてある程度の反応時間が
必要である。
The amount of the complexing agent used is not particularly limited, but is preferably 0.01 to 10 parts by weight with respect to 100 parts by weight of the polymer solution. This complex-forming agent can be used as it is or as a non-aqueous solution such as alcohol. At this time, it is preferable that the reaction solution is uniform, but even if it is non-uniform, there is no particular problem. The reaction temperature is room temperature (20 ° C.) to 150 ° C., and the reaction can be performed at room temperature or by heating, but under a reflux condition where the movement of the organosilicon-based polymer molecule becomes larger when diluted or dissolved in an organic solvent. It is preferable to carry out. The reaction time is 5 minutes or longer, preferably 15 minutes to 3 hours, but is not particularly limited. Considering that this reaction is usually a weak acid reaction, a certain reaction time is required to reduce the metal content as compared with the hydrochloric acid washing method.

【0014】本発明において、次いで行われる純水によ
る洗浄は、錯形成剤との反応で形成された金属塩を溶解
除去、あるいは有機ケイ素系ポリマーが含まれる有機溶
媒中より抽出除去を目的とするものである。純水として
は電気抵抗10MΩ/cm以上のものを使用することが
好ましく、洗浄方法としては液体洗浄の公知の方法を採
用することができ、たとえば分液ロートを使用する方
法、振盪機を使用する方法等を採用することができる。
また、純水の1回洗浄時の使用量はポリマー溶液100
重量部に対して30〜300重量部、特に50〜200
重量部とすることができる。
In the present invention, the subsequent washing with pure water is intended to dissolve and remove the metal salt formed by the reaction with the complex-forming agent, or to extract and remove it from the organic solvent containing the organosilicon polymer. It is a thing. As the pure water, it is preferable to use one having an electric resistance of 10 MΩ / cm or more, and as the cleaning method, a known method of liquid cleaning can be adopted. For example, a method using a separating funnel or a shaker is used. A method etc. can be adopted.
In addition, the amount of pure water used for one washing is 100% polymer solution.
30 to 300 parts by weight, especially 50 to 200 parts by weight
It can be part by weight.

【0015】水道水による洗浄を純水洗浄の前に行って
もよいが、水道水に含まれる不純物の混入もあり、その
後の純水洗浄は不可欠である。洗浄回数は、好ましくは
2回以上、更に好ましくは3回以上繰り返すことが望ま
しい。
The washing with tap water may be performed before the pure water washing, but the impurities contained in the tap water may be mixed, and the subsequent pure water washing is indispensable. The number of times of washing is preferably twice or more, more preferably three times or more.

【0016】[0016]

【発明の効果】本発明により、ポリシランをはじめとす
る有機ケイ素系ポリマー本来の特性を損ねることなく、
電子材料への応用が可能なレベルまで金属不純物の除去
を行うことができ、有機ケイ素系ポリマー材料の用途を
広げることができる。
EFFECTS OF THE INVENTION According to the present invention, without impairing the original properties of organosilicon polymers such as polysilane,
The metal impurities can be removed to a level where it can be applied to electronic materials, and the applications of organosilicon polymer materials can be expanded.

【0017】[0017]

【実施例】以下に実施例及び比較例を示し、本発明をよ
り詳細に説明するが、本実施例は本発明を制限するもの
ではない。
EXAMPLES The present invention will be described in more detail with reference to the following examples and comparative examples, but the examples do not limit the present invention.

【0018】[実施例1〜5]重量平均分子量62,00
0、数平均分子量17,000のポリ(フェニルメチル
シラン)の10%トルエン溶液50mlに対して、錯形
成剤2.5gまたは相当量のメタノール溶液を5ml添
加し、加熱し、2時間にわたり還流条件下撹拌を行っ
た。その溶液を分液ロートに移し、電気抵抗10MΩ/
cm以上の純水100mlによる洗浄を3回繰り返し
た。洗浄後の溶液よりメタノール再沈によりポリ(フェ
ニルメチルシラン)を析出させ、乾燥することにより精
製品を得た。この操作により各錯形成剤により金属に対
する特異性がみられるものの、主要な金属不純物の含有
量は表1のように減少した。
[Examples 1 to 5] Weight average molecular weight 62,000
To 5 ml of a 10% toluene solution of poly (phenylmethylsilane) having a number average molecular weight of 17,000, 2.5 g of a complexing agent or 5 ml of a corresponding methanol solution was added, heated and refluxed for 2 hours. The mixture was stirred underneath. Transfer the solution to a separatory funnel and have an electric resistance of 10 MΩ /
The washing with 100 ml of pure water of cm or more was repeated 3 times. Methanol was reprecipitated from the washed solution to precipitate poly (phenylmethylsilane), which was then dried to obtain a purified product. By this operation, although each complexing agent showed specificity to the metal, the content of major metal impurities was reduced as shown in Table 1.

【0019】[比較例]実施例で使用したものと同じポリ
(フェニルメチルシラン)の10%トルエン溶液50m
lに対して、20%シュウ酸溶液50mlで2回洗浄
し、ついで電気抵抗10MΩ/cm以上の純水100m
lによる洗浄を3回繰り返した。洗浄後の溶液よりメタ
ノール再沈によりポリ(フェニルメチルシラン)を析出
させ、乾燥することにより精製品を得た。この結果を実
施例1〜5と併せて表1に示す。
[Comparative Example] 50 m of a 10% toluene solution of the same poly (phenylmethylsilane) as that used in the Examples
l, washed twice with 50 ml of 20% oxalic acid solution, and then 100 m of pure water with an electric resistance of 10 MΩ / cm or more
The washing with 1 was repeated 3 times. Methanol was reprecipitated from the washed solution to precipitate poly (phenylmethylsilane), which was then dried to obtain a purified product. The results are shown in Table 1 together with Examples 1 to 5.

【0020】[0020]

【表1】 [Table 1]

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 有機ケイ素系ポリマー中の金属不純物を
除去する方法において、有機ケイ素系ポリマーまたはそ
の非極性溶媒の溶液を、金属不純物に対して当量以上の
水溶性で錯形成能力のある化合物共存下で室温〜150
℃の温度で5分以上撹拌した後、さらに純水による洗浄
を行うことを特徴とする有機ケイ素系ポリマーの精製方
法。
1. A method for removing metal impurities in an organosilicon polymer, wherein a solution of the organosilicon polymer or a non-polar solvent thereof is present in a water-soluble amount equal to or more than the metal impurities and capable of forming a complex. Room temperature under ~ 150
A method for purifying an organosilicon polymer, which comprises stirring at a temperature of ° C for 5 minutes or more and further washing with pure water.
【請求項2】 有機ケイ素系ポリマーが直鎖状または枝
分かれ構造を有する有機溶媒可溶なポリシランであるこ
とを特徴とする請求項1記載の精製方法。
2. The purification method according to claim 1, wherein the organosilicon polymer is an organic solvent-soluble polysilane having a linear or branched structure.
【請求項3】 有機ケイ素系ポリマーが直鎖状または枝
分かれ構造を有する有機溶媒可溶なケイ素−ケイ素結合
を含有するポリカルボシランであることを特徴とする請
求項1記載の精製方法。
3. The method according to claim 1, wherein the organosilicon-based polymer is polycarbosilane containing an organic solvent-soluble silicon-silicon bond having a linear or branched structure.
【請求項4】 有機ケイ素系ポリマーが直鎖状または枝
分かれ構造を有する有機溶媒可溶なケイ素−ケイ素結合
を含有するポリシロキサンであることを特徴とする請求
項1記載の精製方法。
4. The purification method according to claim 1, wherein the organosilicon-based polymer is a polysiloxane containing a silicon-silicon bond soluble in an organic solvent and having a linear or branched structure.
【請求項5】 水溶性で錯形成能力のある化合物が有機
溶媒可溶の多価カルボン酸であることを特徴とする請求
項1乃至4のいずれか1項記載の精製方法。
5. The purification method according to claim 1, wherein the water-soluble compound having a complex-forming ability is an organic solvent-soluble polycarboxylic acid.
【請求項6】 洗浄に使用する純水が電気抵抗10MΩ
/cm以上であることを特徴とする請求項1乃至5のい
ずれか1項記載の精製方法。
6. Pure water used for cleaning has an electric resistance of 10 MΩ.
/ Cm or more, the purification method according to any one of claims 1 to 5.
JP2001215115A 2001-07-16 2001-07-16 Method for producing organosilicon polymer Pending JP2003026808A (en)

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Application Number Priority Date Filing Date Title
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Publication Number Publication Date
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Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007077197A (en) * 2005-09-12 2007-03-29 Osaka Gas Co Ltd Method for purifying polysilane
WO2009142161A1 (en) * 2008-05-20 2009-11-26 日本曹達株式会社 Process for production of polysilane compound
JP2011162792A (en) * 2011-04-18 2011-08-25 Osaka Gas Co Ltd Purifying method of polysilane

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007077197A (en) * 2005-09-12 2007-03-29 Osaka Gas Co Ltd Method for purifying polysilane
WO2009142161A1 (en) * 2008-05-20 2009-11-26 日本曹達株式会社 Process for production of polysilane compound
US8829139B2 (en) 2008-05-20 2014-09-09 Nippon Soda Co., Ltd. Process for production of polysilane compound
JP2011162792A (en) * 2011-04-18 2011-08-25 Osaka Gas Co Ltd Purifying method of polysilane

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