JP2003014279A - Device for realizing high humidity space - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a clean and high humidity space capable of suppressing the generation of static electricity without providing a partition wall for partitioning a part of space in a room. SOLUTION: A device for realizing a high humidity space comprises an air curtain generating part 3 having air outlet ports 2 for forming air curtains 1 composed of horizontally flowing air for enclosing a part of space in the room and an air suction and exhaust part (pipe) 5 having an air suction and exhaust port 4 which exists within a part of space enclosed by the air curtains 1 and is disposed in the non-interfering position of the air supplied from the air outlet ports 2. Between the air suction and exhaust part 5 and the air curtain generating part 3, at least an air circulating pump 6, a gas-liquid contact device 7 and a filter member 8 for catching mist in the air are arranged and they communicate mutually.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for realizing a high humidity space, and more particularly, it realizes a high humidity space in which a partial space in a room can be realized as a clean and high humidity space without providing a partition wall. Regarding the device.

[0002]

2. Description of the Related Art In recent years, with the development of air conditioning technology such as an air conditioner, processing plants of various manufacturing industries are being filled with clean air, and the working environment thereof is being improved. On the other hand, it has been devised to remove contaminated air in a part of the indoor space and clean it.
Exhaust devices described in Japanese Patent No. 85340 and Japanese Patent Application Laid-Open No. 4-11769 have been proposed. What is further expected in the future is to realize a processing site that eliminates the generation of static electricity. This is particularly desired in semiconductor manufacturing factories. The reason is that static electricity is easily generated in the semiconductor manufacturing process, which may cause many products to be defective. To solve this, the current measures are to spray water on the floor of the processing plant, to install a curtain of a water shower in the processing plant, etc. The means to suppress the occurrence of

[0003]

However, with the above humidifying means, although the humidifying state of the entire processing chamber can be obtained, the surroundings of the humidifying means are flooded, and large-scale equipment is required. Has various problems such that it becomes a humidified state to an unnecessary space and it is difficult to keep a desired humidified state constant.

SUMMARY OF THE INVENTION The present invention has been made to solve all the problems of the above-mentioned conventional techniques, and humidifies only a part of a room where high humidity is required to a high humidity of a constant preferable condition. The present invention provides a high-humidity space embodying device in which a partition wall is eliminated and the space can be freely moved in and out.

[0005]

As a means for solving the above problems, the present invention provides an air curtain generator having an air outlet for forming an air curtain for horizontally flowing air for enclosing a partial space in a room. And an air suction / exhaust part having an air suction / exhaust port located in a partial space surrounded by the air curtain and arranged at a non-interference position of air blown out from the air blowout port. A high-humidity space characterized in that at least an air circulation pump, a gas-liquid contact means, and a filter member for trapping mist in the air are provided between the air conditioning section and the air curtain generating section, and these are in communication with each other. It is a device.

At this time, if the filter member is made of stainless steel cotton in the fixed frame, the excess mist contained in the air is captured and blown off by the gas-liquid contact means before the air is blown out. Since it can be dropped, the partial space can be embodied as a high humidity space without water drops.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in the drawings. FIG. 1 is a configuration explanatory view of a high-humidity space embodying apparatus Q showing an embodiment of the present invention, in which an air outlet 2 for forming an air curtain 1 for horizontally flowing air for enclosing a partial space in a room is formed. Air suction / exhaust having the air curtain generating part 3 and the air suction / exhaust port 4 arranged at a non-interference position of the air blown out from the air outlet 2 in a partial space surrounded by the air curtain 1. And a filter member 8 for trapping mist in the air. At least an air circulation pump 6, a gas-liquid contact device 7, and a filter member 8 are provided between the air suction / discharge unit 5 and the air curtain generation unit 3. They are arranged and communicate with each other.

In the present embodiment, the air outlet 2 is opened at one side of the four vertically extending air outlet pipes 9, and the air outlet pipe 9 releases the air blown out from the air outlets 2. When they are placed under interference with each other, they are arranged so that they rotate in the same direction. Further, an air converging hood 10 is provided at the upper end of the air blowing pipe 9 in the longitudinal direction, and an air suction port 4 of an air suction / exhaust portion 5 is provided substantially on the central axis of the converging hood 10.

The air-blowing pipe 9 has a cylindrical shape, and the air-blowing port 2 is open in a line from the upper part to the lower part. The lower end of each air blowing pipe 9 is shielded by the floor surface, and the upper end thereof is the air converging hood 10.
Is shielded by. Each of the air blowing pipes 9 is fixed by a floor surface and a converging hood 10 so that the air blowing port 2 faces the direction of the air blowing pipe 9 on the right side in FIG. Although each of the air blowing pipes 9 has a cylindrical shape in the present embodiment, the shape thereof is not limited and may be a rectangular tube shape. Also, the shape of the air outlet 2 is not limited, and if the air blown out from the air outlet 2 is evenly blown out in the longitudinal direction to form the air curtain 1, it is a small circular hole. May be an elongated cutout hole.

The air converging hood 10 has a substantially truncated cone shape, and the air suction port 4 is opened at the top thereof. Further, the suction port 4 is connected to the suction side of the air circulation pump 6 by an air suction / discharge portion (pipe) 5. The air sent to the air circulation pump 6 passes through a gas-liquid contact device 7 and a filter member 8 which will be described later, and is sent to the above-mentioned air blowing pipe 9 as high-humidity air from which mist has been blown off. The air curtain 1 is blown out from the outlet 2. As shown in FIGS. 2 and 3, the gas-liquid contact device 7 applied at this time is provided with a discharge port 11 at the upper end of the device body P having a vertically long rectangular tube shape, and captures mist at the lower position thereof. Filter for 12
(Shown in FIG. 3) is arranged in a horizontal posture, a water shower unit 13 is arranged below the filter 12, and a perforated plate 14 having a large number of small holes is arranged below it.
The air outlet 6a of the air circulation pump 6 is connected to the side of the apparatus body P at the lower position of the porous plate 14.

A water storage tank 15 is provided at a lower position inside the apparatus main body P to receive and store the water falling from the small holes of the perforated plate 14. A water discharge port 16 is opened at the lower bottom of the water storage tank 15, and the water storage tank 15 and the water shower section 13 are provided in the middle of the pump device 1.
7 are connected by piping (not shown).

As shown in FIG. 3, an example of the filter 12 is that a square-shaped frame 18 made of a material having a high corrosion resistance such as stainless steel is provided with grid-like meshes 19 on the upper and lower surfaces thereof, and the inside thereof is provided. The stainless cotton 20 is stored in the above to capture the mist. In the water shower unit 13, a plurality of fountain pipes are arranged side by side, and each fountain pipe is provided with a large number of nozzles for injecting water downward. One embodiment of the present invention has the above-described configuration.

[0013]

Next, the operation of the above embodiment will be described. When the air circulation pump 6 is driven, the air curtains 1, 1 that surround a partial space in the room from the air outlet 2 of the air outlet pipe 9
Is formed, and at the same time, air is sucked from the discharge port 4 of the air suction / discharge portion 5 arranged above this partial space and is sent to the lower side of the porous plate 14 of the gas-liquid contact device 7. On the other hand, the water tank 1 is driven by driving the water circulation pump 17 of the gas-liquid contact device 7.
The water in 5 is pumped up and sent to the water shower unit 13,
The water is branched into each fountain pipe and jetted downward from the nozzle.

The air sent to the gas-liquid contact device 7 by the air circulation pump 6 comes into contact with water droplets or the like which are jetted from the water shower section 13 and fall from the small holes of the perforated plate 14, and while passing through this. Moreover, the relative humidity of air becomes 99% or more. While the air having a humidity of 99% or more passes through the filter member 8, excess mist is removed by the stainless cotton 20 and is sent to the air blowing pipes 9, 9 ... And the air curtains 1, 1.・ Encloses a part of the room.

In a part of the space, air is sucked from the discharge port 4 above it, so that the air curtains 1, 1 ...
The air blown out as a part of the air changes its flow inward in a part of the space and gradually becomes a spiral shape, and eventually becomes a tornado-shaped flow 21 with the discharge port 4 as the apex.
And is circulated to the gas-liquid contact device 7. By the way, when the humidity in a part of the space and the humidity in the outer space about 1 m away from the air curtain 1, 1, ... During this air circulation were measured, the relative humidity in the part of the space was 99%. The relative humidity of the inner and outer peripheries of the partial space was 67%. This means that the air curtain 1,1 ...
This proves that the space surrounded by and the other indoor spaces can be compatible as spaces with completely different humidity environments.

That is, since the space surrounded by the air curtains 1, 1, ... Is brought into contact with the water area of the gas-liquid contact device 7 for circulating air, dirt such as dust and dust in the air is also purified. It is maintained as a clean space with high humidity.

[0017]

As described above, according to the present invention, the air humidified to a high humidity through the gas-liquid contact device is supplied as an air curtain so as to surround a partial space in the room, and the supplied air is supplied. Since the air is sucked and discharged from the upper part of the space and circulated again to the gas-liquid contact device, the amount of air supplied and the amount of air discharged in the part of space become equal, and the air does not go out of the enclosure of the air curtain. The interior space can always be maintained at high humidity. Therefore, if the present invention is used in a place where it is desired to suppress static electricity generation, it is possible to embody only that place as a high humidity space, that is, as a static electricity generation suppression space, without adversely affecting the surrounding indoor environment. Therefore, it is extremely effective when used in a semiconductor manufacturing process or the like.

[Brief description of drawings]

FIG. 1 is a configuration explanatory view showing an embodiment of the present invention.

FIG. 2 is a front view showing an embodiment of a gas-liquid contact device according to the present invention.

FIG. 3 is a perspective view of the filter member in FIG.

[Explanation of symbols]

1 air curtain 2 Air outlet 3 Air curtain generator 4 Air suction port 5 Air suction and discharge pipe 6 Air circulation pump 7 Gas-liquid contact device 8 Filter member 9 Air blowing pipe 10 Air convergence hood 11 exhaust port 12 filters 13 Water shower section 14 Perforated plate 15 water tank 16 Water outlet 17 Water circulation pump 18 frame 19 mesh 20 stainless cotton 21 tornado style Q High humidity space embodying device P Gas-liquid contact device body

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) F24F 7/06 F24F 7/06 C // B01D 46/30 B01D 46/30 B

Claims (2)

[Claims] 1. An air curtain generating portion having an air outlet for forming an air curtain by horizontally flowing air for enclosing a partial space in a room, and present in the partial space surrounded by the air curtain, An air suction / exhaust section having an air suction / exhaust section arranged at a non-interference position of the air blown from the air outlet, and at least an air circulation pump between the air suction / exhaust section and the air curtain generating section. And a gas-liquid contact device and a filter member for capturing mist in the air, which are communicated with each other. 2. The high humidity space embodying apparatus according to claim 1, wherein the filter member has a fixed frame and stainless steel cotton embedded therein.