JP2003010619A - Gas filter device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas filter device capable of retaining an environment of high cleanliness by making a generation of dusts from a filter sheet even if a temperature is extremely varied. SOLUTION: In the gas filter device 10, the inside of a casing 40 is partitioned and formed to primary chambers 11 and secondary chambers 12 in the alternately superposed state by a filter plate 20. The gas filter device 10 has a flow-in port 13 at an upper surface side and a flow-out port 14 at a lower surface side. In the filter plate 20, a filter sheet 22 facing the primary chamber is backed-up by a support plate 21. The support plate 21 and spacers 25, 26 of the inlet port 13 and the outlet port 14 are formed by heat-resistant metals having a linear expansion coefficient of 10×10<-6> / deg.C at 0-400 deg.C.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas filter device for filtering a gas, and more particularly to a gas filter device that can be used under a high temperature condition with a large temperature fluctuation.

[0002]

2. Description of the Related Art As a heat-resistant gas filter device used at 250 ° C. or lower, a filter pack having a filter sheet made of zigzag-folded filter paper is housed in a frame, and the end portion of the filter sheet is made of an organic material. Alternatively, the one fixed to the frame with an inorganic adhesive is used. A metal material such as aluminum or stainless steel is used for a member such as a frame that contacts the filter sheet. The filter paper of this filter sheet is obtained by binding fibers such as glass fibers with an organic adhesive called a binder.

By the way, in Japanese Patent Laid-Open No. 2000-329472, a metal member such as a frame which is in contact with a filter sheet is made of ferritic heat-resistant steel which is excellent in oxidation resistance under high temperature conditions. It is described that by holding the sheet, rust (scale) is prevented from being generated even at a high temperature of about 500 ° C., and a decrease in cleanliness due to scale peeling is prevented.

[0004]

If this gas filter device is used in a high temperature range of 250 ° C. or higher, an organic substance such as a binder contained in the filter sheet or an organic adhesive for fixing the filter sheet to the frame body is used. Are carbonized, the fibers contained in the filter sheet scatter, and gas leaks from the joint between the filter sheet and the frame. Also,
For example, when the temperature inside the apparatus changes significantly when the operation of the apparatus is started or stopped, the two rub against each other due to the difference in the expansion coefficient between the metal member such as the frame and the filter sheet, Since the fine fibers contained in the filter sheet are remarkably scattered, it cannot be used in a high temperature range of 250 ° C. or higher. Further, even if an inorganic adhesive is used in place of the organic adhesive, the inorganic adhesive does not carbonize but has poor elasticity, and cracks may occur due to the difference in expansion coefficient with the metal member.

In the filter described in JP-A-2000-329472, even if the deterioration of cleanliness due to rusting can be prevented, the filter caused by the difference in thermal expansion between the ferritic steel and the filter when the temperature changes Dust cannot be prevented.

An object of the present invention is to provide a gas filter device which can prevent dust from being generated from the filter sheet and can realize a clean atmosphere even when it is used at a high temperature with a large temperature change. .

[0007]

A gas filter device according to the present invention has a metal flow path forming member having a flow path for passing a gas, and a filter sheet provided across the flow path. In the gas filter device, the linear expansion coefficient of at least a part of the metal member in contact with the filter sheet is 0 to
It is characterized in that it is 10 × 10 ⁻⁶ / ° C. or less at 400 ° C.

In such a gas filter device, since the linear expansion coefficient of at least a part of the metal member in contact with the filter sheet is 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C., the gas temperature is, for example, room temperature. Even if the temperature fluctuates significantly with a high temperature of more than 400 ° C., the amount of thermal expansion / contraction of the metal member due to this temperature change is extremely small. As a result, even if the gas filter device of the present invention is used under the high temperature condition with such a large temperature fluctuation, the sealing property between the filter sheet and the metal member in contact with the filter sheet is maintained. At the same time, the thermal expansion and contraction of the metal member prevents the filter sheet sandwiched by the metal members from being pulled, damaged, and generating dust.

In the gas filter device of the present invention, a gas-permeable metal support plate is laminated on the filter sheet, and the linear expansion coefficient of the metal support plate is 0 to 0.
It is preferably 10 × 10 ⁻⁶ / ° C. or less at 400 ° C.

With this structure, the filter sheet is strongly backed up by the support plate,
Even if a large amount of gas flows into the gas filter device,
The gas pressure does not blow or break the filter sheet. Moreover, since the linear expansion coefficient of this support plate is 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C., even if the gas temperature fluctuates significantly, the thermal expansion and contraction of the support plate due to this temperature change. The quantity is extremely small. Therefore, the support plate and the filter sheet are prevented from rubbing against each other and the fibers contained in the filter sheet are prevented from scattering as dust.

Further, in the gas filter device of the present invention, a corrugated metal spacer is provided at at least one of the inlet and the outlet of the gas passage, and the linear expansion coefficient of the spacer is 0 to 400 ° C. It is preferably 10 × 10 ⁻⁶ / ° C. or less.

Since this spacer has a corrugated plate shape, the edge of the filter sheet facing the peripheral edge of the gas inlet or outlet of the gas flow passage is elastically pressed against the flow passage forming member, Prevent gas leaks at the inlet and outlet.

Moreover, this spacer has a linear expansion coefficient of 0.
Since it is made of a metal material having a temperature of 10 × 10 ⁻⁶ / ° C. or less at −400 ° C., its thermal expansion / contraction amount is extremely small even if the gas temperature fluctuates significantly. This prevents the spacers and the filter sheet from rubbing against each other and prevents dust from being generated from the filter sheet.

Further, in the gas filter device of the present invention,
The linear expansion coefficient at 0 to 400 ° C. is 10 × 10 ^{−6 in a} metal flow path constituent member, that is, a casing member described later.
It is preferable to use a low expansion material having a temperature of / ° C. By making this flow path forming member a low expansion material like the metal member in contact with the above-mentioned filter sheet, the coefficient of thermal expansion of the entire metal member used in this gas filter device becomes substantially uniform, and Gas leaks are effectively prevented.

Further, the casing member is kept at 0 to 400 ° C.
The linear expansion coefficient is 10 × 10^-6Use the one that exceeds
When used, the linear expansion coefficient is 10 x on the inner surface of the casing.
10 ^-6Attach a buffer plate made of low expansion material of less than ℃
Preferably. By using this buffer plate,
The same as when the casing member itself is made of the low expansion material.
However, it is possible to suppress the occurrence of gas leaks and dust generation.
Wear.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings, but the configuration of the gas filter device of the present invention is not limited to this embodiment.

FIG. 1 is a perspective view of a gas filter device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a casing of this gas filter device, and FIG. 3 is a top view of this gas filter device. FIG. 4 is a sectional view taken along the line IV-IV in FIG.
FIG. 5 is an enlarged view of V portion of FIG. 4, and FIG. 6 is VI of FIG.
-VI sectional view, FIG. 7 is a sectional view taken along the line VII-VII of FIG. 3, FIG. 8 is a sectional view taken along the line VIII-VIII of FIG. 3, and FIG. 9 is a sectional view of FIG. Enlarged view of IX, Fig. 10 is No. 9
FIG. 11 is an enlarged perspective view of a portion X in the figure, FIG. 11 is an exploded perspective view of a main part of the gas filter device in FIG. 1, and FIG. 12 is a sectional view taken along line XII-XII in FIG.

The gas filter device 10 includes first, third and third parts.
As shown in FIGS. 4 and 5, a casing 40 and an upper surface side (upper surface side in FIG. 1) formed in the casing 40. In the following description, the vertical direction is based on the vertical direction in FIG. A plurality of primary chambers 11 each having an open inlet 13 and a plurality of secondary chambers formed in the casing 40 and having an open outlet 14 on the lower surface side thereof. 12 and 12. These primary chambers 11
And the secondary chamber 12 through the filter plate 20,
In the casing 40, they are arranged alternately and continuously in a laminated form.

As shown in FIG. 2, the casing 40 comprises a pair of end plates 41, a pair of side plates 42, two top plates 43 and a frame-shaped bottom plate 44.

As shown in FIGS. 6 and 11, the primary chamber 11 has 1
It is surrounded by the next chamber frame 31. The primary chamber frame 31 is a U-shaped frame-shaped member having a pair of side portions and a lower side portion bridged to the lower end side of each side portion, with the upper side portion missing. By disposing the filter plate 20 so as to cover the frame surfaces on both sides of the primary chamber frame 31, the primary chamber 11 is partitioned and the inlet port 13 is provided above it.
Are formed. The side portions and the lower side portions have substantially rectangular cross sections in the direction orthogonal to the extending direction, and are configured such that the frame surfaces on both sides of the primary chamber frame 31 are flat and flush with each other.

The primary chamber frame 31 is composed of a pair of parallel side members 33, 33 and a lower side member 34 bridged between the lower end portions of the respective side members 33, for a total of three bars. It is formed in a U shape. Each of the members 33, 34 has a substantially rectangular cross section in the direction orthogonal to the extending direction, and is configured such that the frame surfaces on both sides of the primary chamber frame 31 are flat and flush. . When assembling the primary chamber frame 31 from these three members, both ends of the lower side member 34 are provided in the recesses 3 provided near the lower ends of the side members 33.
3a is engaged.

As shown in FIGS. 7 and 11, the secondary chamber 12 is surrounded by the secondary chamber frame 35. The secondary chamber frame 35 is a U-shaped frame-like member having a pair of side portions and an upper side portion bridged to the upper end side of each side portion, with the lower side portion missing. By disposing the filter plate 20 so as to cover the frame surfaces on both sides of the secondary chamber frame 35, the primary chamber 1
A secondary chamber 12 is defined in the same manner as 1, and the outlet 1
4 are formed. The side portions and the upper side portions each have a substantially rectangular cross section in a direction orthogonal to the extending direction, and are configured such that the frame surfaces on both sides of the secondary chamber frame 35 are flat and flush with each other.

In this embodiment, the secondary chamber frame 35 has a structure and dimensions in which the primary chamber frame 31 is vertically inverted.

That is, as shown in FIG. 7, the secondary chamber frame 35 includes a pair of side members 37, 37 and both side members by engaging both ends with a recess 37 a of the side member 37. It is assembled from a total of three bars of the upper side member 38 bridged between the upper end portions of 37.

In the gas filter device 10, the primary chamber frame 31 and the secondary chamber frame 35 are alternately laminated with the filter plate 20 interposed therebetween, so that the primary chamber 11 and the secondary chamber 12 are formed. Are alternately formed so that the gas can flow. And these primary chamber frames 3
As shown in FIGS. 5, 8 and 9, the laminated body of the primary and secondary chamber frames 35 and the filter plate 20 is sandwiched and integrated by the end plates 41 from both end sides in the laminating direction.

The primary chamber frame 31 and the secondary chamber frame 35 are made of a material having high elasticity even under a high temperature condition, and when the surface thereof is pushed by another member, the member is pressed. It is elastically recessed to accept.

According to the primary chamber frame 31 and the secondary chamber frame 35 made of such materials, the laminated body of the primary chamber frame 31, the secondary chamber frame 35 and the filter plate 20 is casing. When the filter plate 20 is housed in the filter 40 and is strongly sandwiched by the end plates 41 in the stacking direction, the regions overlapping the peripheral edge portion of the filter plate 20 on the inner peripheral sides of the frame surfaces of the frames 31 and 35 are the filter plates. The edge of the filter plate 20 is embedded in the frame surface by deforming so as to be recessed along the contour of the
As shown in the drawings, the outer peripheral regions of the frame surface surrounding the filter plate 20 are airtightly overlapped with each other.

When the laminated body of the primary chamber frame 31, the secondary chamber frame 35 and the filter plate 20 is sandwiched between the end plates 41 of the casing 40, the upper surface side of the casing 40 and When a later-described top plate 43 and bottom plate 44 are attached to the lower surface sides, respectively, the upper end surface of the secondary chamber frame 35 and the upper end surface of the primary chamber frame 31 are pressed against the top plate 43. In addition, the lower end surface of the primary chamber frame 31 and 2
The lower end surface of the next chamber frame 35 is pressed against the bottom plate 44. At this time, the side portions of the frames 31 and 35 are compressed in the vertical direction, and the voids V remaining between these frame surfaces and the filter plate 20 are crushed to join the frame surfaces to the filter plate 20. The part will be airtightly closed.

As shown in FIG. 12, the primary chamber frame 31 and the secondary chamber frame 35 project above the upper ends of the side plates 42. Therefore, the top plate 43 is placed on the side plate 42, and the bolt 45 and the nut 46 are overlapped.
When tightened by, the upper portions of these frames 31, 35 are compressed downward. As a result, the minute void V generated between the frames 31 and 35 is crushed along the upper end surface of the filter plate 20. As a result, gas leakage through the void V is prevented. Also,
The recess 33a of the primary chamber frame 31 and the secondary chamber frame 3
The void formed in the concave portion 37a of No. 5 is also crushed in the same manner, and the airtightness is maintained.

Due to the elastic force of the frames 31, 35, the lower end surfaces of the side portions of the frames 31, 35 come into airtight contact with the bottom plate 44.

In this embodiment, each frame 3
1, 35 are separately assembled from the three bar members forming the both side portions and the upper and lower side portions, but of course, each side portion may be integrally formed.

The filter plate 20 is composed of a metal support plate 21 having air permeability, and a filter sheet 22 attached to one plate surface of the support plate 21. The filter sheet 22 has a gas filtering function.

In the present embodiment, the support plate 21 is a punching plate having a large number of small holes formed on its plate surface, and the primary chamber 11 and the secondary chamber 12 are connected through the small holes. Guarantee gas distribution between.

The support plate 21 is provided with a large amount of water from the inflow port 13.
Has enough strength to withstand the gas pressure even if gas flows in.
And a linear expansion coefficient of 10 × at 0 to 400 ° C.
10 ^-6It is composed of a metal material having a temperature of / ° C or less.
Examples of such metal materials include titanium and iron nickel cobalt.
Ruth alloy and the like. These titanium and iron nickel
Cobalt alloy composition and at each 0-400 ℃
Table 1 shows the linear expansion coefficient. In addition, in Table 1, the conventional
Widely used as a metal material for heat-resistant gas filter devices
Of stainless steel (SUS430 and SUS304)
The composition and coefficient of linear expansion are also shown.

[0035]

[Table 1]

As is clear from Table 1, titanium has a lower coefficient of linear expansion than stainless steel and the amount of thermal expansion and contraction due to temperature fluctuation is very small. Therefore, the metal material of the support plate 21 in contact with the filter sheet 22 is very small. Is suitable as Also,
The iron-nickel-cobalt alloy was developed for glass sealing, but has a linear expansion coefficient lower than that of titanium, so that the support plate 2 in contact with the filter sheet 22 is used.
It is also particularly suitable as the first metal material. The high temperature oxidation resistance of this iron-nickel-cobalt alloy is inferior to that of stainless steel, but it can be improved by applying a surface treatment such as application of a heat resistant paint.

By the way, as the material having a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C., other than such a metal material, a ceramic material can be used. Brittle compared to
A metal material is more suitable as the material of the support plate 21 because it has a problem of poor moldability.

However, when a member whose linear expansion coefficient at 0 to 400 ° C. exceeds 10 × 10 ⁻⁶ / ° C. is used as the casing member, the linear expansion coefficient is 10 × 10 on the inner surface thereof.
It is preferable to attach a ceramic plate of ^-6 / ° C or less. When the ceramic plate is combined with another member having excellent workability as described above, the low expansion of the ceramic plate can be effectively functioned.

The vertical and horizontal dimensions of the support plate 21 are 1
When the secondary chamber frame 31 and the secondary chamber frame 35 are overlapped with each other, the opening area is larger than the opening area of the frame-shaped body formed by the upper side portion, the lower side portion, and each side side portion, and the outside of the frame-shaped body. The size is such that it does not protrude from the peripheral portion.

The filter sheet 22 is made of, for example, HEPA, ULPA, which is made of paper containing ultrafine glass fibers, depending on the purpose of use of the gas filter device 10 and the type of object to be filtered.
Consists of various types of filter paper such as medium performance glass fiber filter paper, organic fiber filter paper, electret fiber filter paper with improved dust removal performance by charging organic fiber nonwoven fabric, chemical filter filter paper with a function of adsorbing harmful components . The filter sheet 22 may be composed of one type of filter paper, or may be composed of two or more types of filter paper so as to form a plurality of filtration layers having different filtration functions. At this time, when the frames 31 and 35 sandwiching the filter plate 20 are made of a material having a small elasticity and a relatively small elastic deformation amount, the filter sheet 2 is used to compensate for this.
It is preferable that 2 has elasticity in the thickness direction.

The filter sheet 22 may be of the same size as the support plate 21, or when it is attached to the support plate 21, its peripheral edge is slightly protruded from the peripheral edge of the support plate 21. May be. When the filter sheet 22 is slightly larger than the support plate 21, the filter plate 20 is laminated so as to be interposed between the frame surfaces of the primary chamber frame 31 and the secondary chamber frame 35 as described above, and these laminated bodies are formed. When strongly sandwiched from the stacking direction, the peripheral edge of the filter sheet 22 enters the boundary between the peripheral edge of the support plate 21 and the frame surfaces of the frames 31 and 35 to close the boundary. Even if the gas before the filtering process that has flowed into the primary chamber 11 side enters the boundary portion, the gas is filtered by the peripheral portion of the filter sheet 22 that closes the boundary portion, so that the boundary portion Unfiltered gas does not leak from the portion into the secondary chamber 12.

As shown in FIGS. 9, 10, and 11 and the like, when the filter plate 20 is interposed between the primary chamber frame 31 and the secondary chamber frame 35, the filter sheet 22 has the primary chamber. 11 side, the support plate 21 is the secondary chamber 1
It is arranged so as to face the second side, and the left and right edges thereof are sandwiched between both side portions of the frames 31, 35. At this time,
The upper edge of the filter plate 20 has a surface on the filter sheet 22 side facing the upper inlet 13 of the primary chamber 11, and a surface on the support plate 22 side overlaps the upper side of the secondary chamber frame 35. Further, in the lower edge portion of the filter plate 20, the surface on the filter sheet 22 side overlaps with the lower side portion of the primary chamber frame 31, and the surface on the support plate 22 side faces the outflow port 14 in the lower portion of the secondary chamber 12.

Between the primary chamber frame 31 and the filter plates 20 arranged on both frame surfaces of the primary chamber frame 31, the inlet 13 side is provided along the upper edge of each filter plate 20. A pair of band-shaped metal pressing plates 23 that overlap each other and press the upper edge of the secondary chamber frame 35 against the frame surface of the upper side of the secondary chamber frame 35 are provided. In addition, the secondary chamber frame 35
And the filter plates 20 arranged on both frame surfaces of the secondary chamber frame 35 respectively overlap along the lower edge portions of the filter plates 20 from the outlet 14 side, and the lower edge portions are A pair of band-shaped metal holding plates 24 which hold the lower chamber of the next chamber frame 31 are provided. Like the support plate 21, the pressing plates 23 and 24 have a coefficient of linear expansion of 0 to 4 such as titanium or iron-nickel-cobalt alloy.
It is composed of a metal material having a temperature of 10 × 10 ⁻⁶ / ° C. or less at 00 ° C.

The presser plate 23 on the inflow side forms a laminated body of the primary chamber frame 31, the secondary chamber frame 35 and the filter plate 20 from the primary chamber 11 side to the upper edge of the filter sheet 22 of the filter plate 20. The filter plate 20 is sandwiched between the primary chamber frame 31 and the secondary chamber frame 35 at both ends thereof.
At this time, the holding plate 23 is arranged so as to overlap the upper side portion of the secondary chamber frame 35 with the filter plate 20 interposed therebetween, and the upper edge portion of the filter plate 20 is placed on the frame surface of the upper side portion of the secondary chamber frame 35. Against airtight. As a result, the gas that has flowed in through the inflow port 13 and has not yet been subjected to the filtration process is filtered.
Leakage into the secondary chamber 12 from between the upper edge portion of 0 and the upper side portion of the secondary chamber frame 35 is prevented.

The holding plates 23 are arranged so as to face each other with the inlet 13 sandwiched from both sides of the primary chamber frame 31. A narrow corrugated metal inlet spacer 25 is sandwiched between the pressing plates 23. The inlet spacer 25 is made of a metal material such as the above-mentioned titanium or iron-nickel-cobalt alloy having a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C.

The inflow port spacer 25 is provided in the inflow port 13
Elastically abuts the presser plate 23 facing the
The pressing plates 23 are urged in a direction away from each other.

The holding plate 24 on the downstream side is the secondary chamber 12
Is provided so as to overlap the lower edge portion of the filter plate 20 from the side, and both ends thereof are sandwiched together with the filter plate 20 between the primary chamber frame 31 and the secondary chamber frame 35. The holding plate 24 is arranged so as to overlap the lower side of the primary chamber frame 31 with the filter plate 20 interposed therebetween, and presses the lower edge of the filter plate 20 against the frame surface of the lower side airtightly. As a result, the gas before the filtering process in the primary chamber 11 may leak to the secondary chamber 12 or the outlet 14 side from between the lower edge portion of the filter plate 20 and the lower side portion of the primary chamber frame 31. To be prevented.

The pressing plates 24 are arranged so as to face each other with the outflow port 14 interposed therebetween from both sides of the secondary chamber frame 35. A narrow corrugated plate-shaped outlet spacer 26 is sandwiched between the pressing plates 24. This outlet spacer 26 also has a linear expansion coefficient of 0.
It is composed of a metal material such as the above-mentioned titanium or iron-nickel-cobalt alloy which is 10 × 10 ⁻⁶ / ° C. or less at −400 ° C.

The outlet spacer 26 is provided in the outlet 14
Elastically abuts the pressing plate 24 facing the
The pressing plates 24 are urged in the directions away from each other.

The thickness of the pressing plates 23 and 24 is preferably as small as possible, and is preferably 2 mm or less.

As shown in FIGS. 5, 8 and 9, the end plates 41, 41 of the casing 40 are arranged at both ends of the stack of the frames 31, 35 and the filter plate 20 in the stacking direction, and the stack is strengthened. Sandwich these frames 3
1, 35 and the filter plate 20 are integrated. In this end plate 41, the left and right sides facing each other are 1
They are connected by a pair of side plates 42. Bolt insertion holes 41a and 42a are provided in the connecting portions of the end plates 41 and the side plates 42, respectively, and the end plates 41 and the side plate 42 are connected to the bolts 45 and the side plates 42 through the insertion holes 41a and 42a. It is connected by a nut 46.

The top plate 43 constitutes the upper surface of the casing 40, and the left and right side plates 42 are formed.
Extends along the upper edge of.

The top plate 43 presses the upper surface of the secondary chamber frame 35 and the upper end surface of the primary chamber frame 31 downward. The top plate 43 is fixed to the end plate 41 and the side plate 42 by bolts 45 and nuts 46 through the bolt insertion holes 43a.

The bottom plate 44 constitutes the bottom surface of the casing 40, and presses the lower end surface of the primary chamber frame 31 and the lower surface of the secondary chamber frame 35. The bottom plate 44 has a stud bolt 46 on its upper surface side.
a is projected, and the stud bolt 44a is inserted into the bolt insertion holes 41a and 42a provided along the lower sides of the end plates 41 and the side plates 42, and is tightened by a nut 46 to fix each plate 4
It is fixed to 1, 42.

The members constituting these casings are 0 to
It is preferably made of a metal material having a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. at 400 ° C. Since the casing is made of such a low expansion material, the thermal expansion coefficient of the entire metal member in the gas filter device becomes substantially uniform, and gas leakage is effective even when the gas filter device is used at a high temperature of 250 ° C. or higher. To be prevented. However,
When the iron-nickel-cobalt alloy described above is used as the low expansion material, it is preferable to carry out a surface treatment such as application of an acid resistant paint so that scale does not occur on the surface in a high temperature environment.

When this gas filter device 10 is used, gas is made to flow into the primary chamber 11 from the inflow port 13 thereof. The gas flowing into the primary chamber moves through the filter plate 20 into the secondary chamber 12. At this time, the filter plate 20
The gas that has passed through is filtered by the filter sheet 22. After that, the gas that has moved into the secondary chamber 12 has an outlet 14
From the outside. At this time, even if a large amount of gas flows in from the inflow port 13, the filter sheet 22 is firmly backed up by the support plate 21 and is not blown or broken by the gas pressure.

In this gas filter device 10, the support plate 21 and the pressing plate 2 which are in contact with the filter sheet 22 are connected.
3, 24, inlet spacer 25 and outlet spacer 26
Have a linear expansion coefficient of 10 × 1 at 0 to 400 ° C.
Since the gas filter device 10 is made of a metal material having a temperature of 0 ⁻⁶ / ° C. or less, the temperature of the gas filter device 10 may be room temperature or 40 ° C.
Even if the temperature fluctuates significantly above 0 ° C., the amount of thermal expansion / contraction of each metal member is very small. Therefore, even when the gas filter device 10 is used at a high temperature under a temperature condition with a large temperature change, it is possible to prevent the metal members from thermally expanding and contracting and rubbing against the filter sheet 22. Dust generation from the filter sheet 22 is prevented.

When assembling the gas filter device 10, the primary chamber frame 31 and the secondary chamber frame 35 are alternately laminated with the filter plate 20 interposed therebetween, and the laminated body is casing 40. Since they are integrated by being housed inside and strongly sandwiched in the stacking direction, the airtightness between these members is extremely high. Further, since each member is not bonded or a sealing material is not interposed during assembly, disassembly after assembly becomes easy, each member can be removed one by one at the time of disassembly, and members discarded after use can be easily separated. .

In the above-described embodiment, the spacers 25 and 26 on the inlet 13 side and the outlet 14 side can be omitted if the holding plates 23 and 24 have high strength. Further, in the above-described embodiment, the spacers 25 and 26 are both corrugated plate-shaped and sandwiched between the holding plates 23 or between the holding plates 24. Is not limited to this.

Another structure of these spacers and holding plates will be illustrated below with reference to FIG. In addition, in FIG. 15, FIGS. 15A to 15D are perspective views showing configurations of the spacer and the pressing plate according to the embodiment, respectively.

Presser plate 80 shown in FIG. 15 (a)
Has a structure in which a pair of plate-like bodies 80a similar to the pressing plates 23 and 24 are integrally connected by a rectangular parallelepiped spacer 80b. Note that the pair of plate-shaped bodies 80a and the rectangular parallelepiped spacers 80b may be separately assembled when the gas filter is assembled without being integrated.

Presser plate 81 shown in FIG. 15 (b).
Is composed of a harmonica blower-shaped honeycomb structure.

Presser plate 82 shown in FIG. 15 (c).
Is an elongated member 8 having a U-shaped cross-section whose lower surface side is open.
2a is provided with an opening 82b for gas flow.

Presser plate 83 shown in FIG. 15 (d)
Has a structure in which a folding screen member 83b is sandwiched between a pair of plate-like members 83a similar to the pressing plates 23 and 24 and integrated.

The pair of plate-like members 83a and the folding screen member 8 are provided.
The gas filter device may be assembled separately without being integrated with 3b.

Presser plate 83 'shown in FIG. 15 (e)
Uses a folding screen-shaped member 83b 'bent in a rectangular shape instead of the folding screen-shaped member 83b in FIG. 15 (d). The folding screen-shaped member 83b ′ bent into the rectangle may be integrated with the pair of plate-shaped members or may be individually assembled.

In the present invention, the support plate 21 of the filter plate 20 is used.
When is made of a material having particularly high strength, 1
In stacking the secondary chamber frame 31, the secondary chamber frame 35 and the filter plate 20, the lower edge portion of the support plate 21 causes the filter sheet 22 to move to the primary chamber only by the sandwiching pressure from the frames 31 and 35 at both ends thereof. Since it will be pressed tightly against the lower side of the frame 31,
The pressing plate 24 for urging the lower edge of the support plate 21 toward the lower side of the primary chamber frame 31 can be omitted. In the case of such a configuration, even if the gas in the primary chamber 11 before the filtration process enters between the filter plate 20 and the lower side portion of the primary chamber frame 31, this gas is not supported by the support plates 21 and 1. Since the filtering process is performed reliably by passing through the filter sheet 22 that is interposed between the lower chamber side of the next chamber frame 31, there is no fear that the unfiltered gas leaks to the outside of the gas filter device 10.

At this time, although not shown, for example, when the support plate 21 is made of a punching plate having a very high strength, the support plate 21 is formed in the vicinity of a lower edge portion overlapping the lower side portion of the primary chamber frame 31 on the lower side thereof. It is preferable that the small edge is not provided, and the lower edge portion is flat so that the filter sheet 22 is evenly pressed against the lower edge portion of the primary chamber frame 31. As a result, the filter sheet 22 and the lower side portion of the primary chamber frame 31 are more closely joined.

When the support plate 21 of the filter plate 20 is made of a material having particularly high strength as described above, the upper edge portion of the support plate 21 has its upper and lower ends similarly to the lower edge portion. Since it is possible to sufficiently press the upper edge portion of the secondary chamber frame 35 against the upper side portion of the secondary chamber frame 35 only by the clamping pressure from each frame 31, 35 on the side, It is also possible to omit the pressing plate 23 for pressing against the section side.

In this case, as shown in FIGS. 13 and 14, on the upper edge side of the filter plate 20, the upper edge portion of the filter sheet 22 is secondary from the surface of the support plate 21 facing the primary chamber 11. The filter sheet 22 is extended to the surface facing the chamber 12, and the filter sheet 22 is attached to the upper edge of the support plate 21 and the secondary chamber frame 35.
It is preferable that the upper edge portion of the filter sheet 22 is interposed between the upper edge portion and the upper edge portion. This allows
Even if the gas before the filtering process that has flowed in from the inflow port 13 enters between the filter plate 20 and the upper side portion of the secondary chamber frame 35, the filter sheet 22 interposed between the support plate 21 and the upper side portion. Since it is reliably filtered through the passage, there is no possibility that unfiltered gas may enter the secondary chamber 12. Note that FIG. 13 is a perspective view of an essential part showing a configuration example of the filter plate according to the present embodiment,
FIG. 7A shows a situation in which the filter sheet 22 is attached to the support plate 21, and FIG. 8B is a sectional perspective view of the upper portion of the filter plate 20 after the filter sheet 22 is attached to the support plate 21. FIG. 14 is a cross-sectional perspective view of an essential part of a gas filter device showing the installation structure of this filter plate.

In the above embodiment, the filter plate 20 is used.
When the filter sheet 22 has sufficient strength against the stress in the direction perpendicular to the plate surface, the support plate 2
1 may be omitted.

The gas filter device of the above embodiment can provide a filter having high heat resistance. That is, for the dust removal filter used in a high temperature range exceeding 250 ° C., a method of sealing and fixing a filter having a normal structure to a filter frame with a liquid adhesive is used.
In the high temperature range exceeding ℃, the liquid adhesive is carbonized or burned and the sealing function is lost, whereas in the present invention, sufficient adhesiveness can be secured without using an adhesive. Never. In the present invention,
An inorganic adhesive may be used as long as it does not crack when heated.

Further, when the members are not adhered to each other, there is a degree of freedom of movement between the materials, and even in the case of materials having different thermal expansion coefficients between the frame members, the positional relationship is slightly deviated and the filter sheet 22 is broken. There is nothing to do.

When the gas filter device of the present invention is applied to a high-performance high-temperature filter having a medium to HEPA temperature range up to 500 ° C., a C glass used for a normal dust removing filter sheet. It is preferable to use felts containing ultrafine fibers of E glass or S glass, which have higher heat resistance than the above composition, as the frames 31 and 35. As the filter sheet 22, it is preferable to use the filter plate 20 in which paper containing ultrafine fibers of E glass or S glass is used as a filter layer and punching metal is used as the support plate 21. At this time, the pressing plate 24 can be omitted by substituting a punching plate, and the pressing plate 23 also uses the filter sheet as the support plate 21 and the frame 3.
It can be omitted by folding between 5.

Further, when the gas filter device of the present invention is used in a high-performance filter for high performance in the medium to HEPA range for temperatures up to 800 ° C., ultrafine fibers of silica glass having higher heat resistance. It is preferable to use a felt containing F as the frame 31, 35. As the filter plate 20, it is preferable to use paper containing ultrafine silica glass fibers as the filter sheet 22.

In the present invention, silica cloth is provided instead of the metal support plate 21, and a corrugated metal plate (having a linear expansion coefficient of 0 to 0) is provided in the secondary chamber 12 so as to back up the silica cloth. (10 × 10 ⁻⁶ / ° C. or less at 400 ° C.) may be arranged. As the metal plate, titanium or iron nickel cobalt alloy is preferable.

In the present invention, the filter plate 20 may be only the filter sheet 22 and the reinforcing layer may be built in the secondary chamber frame. For example, a punching plate as a reinforcing layer may be joined to the secondary chamber frame in the same plane as the contact surface of the filter sheet. Further, a backup corrugated plate may be arranged in the secondary chamber. At this time, the reinforcing layer such as the punching plate or the corrugated plate is preferably composed of a metal material such as titanium or iron-nickel-cobalt alloy having a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C. .

In the above embodiment, the support plate 21, the pressing plates 23, 24, the inlet spacer 25, and the outlet spacer 26, which are in contact with the filter sheet 21, have a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. at a linear expansion coefficient of 0 to 400 ° C. Although it is made of the following metal material such as titanium or iron-nickel-cobalt alloy, the casing 40 may also be made of such a metal material. Further, the casing 40 is made of normal stainless steel or the like, and the thermal expansion of the casing 40 can be achieved by stacking a low expansion material having a small plate thickness inside the casing 40.
The influence of heat shrinkage on the filter medium is suppressed, and dust generation from the filter sheet can be prevented.

The present invention can also be applied to gas filter devices having configurations other than the above.

For example, the metal member in contact with the filter sheet is made of stainless steel as in the conventional case, and only the casing member has a coefficient of linear expansion of 10 × 10 ⁻⁶ / ° C. at 0 to 400 ° C.
The following low expansion materials may be used. In this case, the difference in thermal expansion between the casing member and the primary chamber frame and the secondary chamber frame that are in direct contact with the casing member is reduced, and the occurrence of gas leak and dust generation at the contact points are suppressed. In addition, the casing member has a linear expansion coefficient of 10 × 1 at 0 to 400 ° C.
In the case of using a material exceeding 0 ⁻⁶ / ° C., a buffer plate made of the low expansion material may be arranged on the inner surface of the casing member to achieve the similar effect.
In this case, the degree of effect is inferior to the case where the casing member itself is made of a low expansion material, but the occurrence of gas leak and dust generation can be suppressed to some extent. As such a buffer plate, not only an iron-cobalt-nickel alloy but also a ceramic plate can be used. The ceramic plate has a difficulty in workability, but has a very low linear expansion coefficient, and can be effectively used as a constituent member of the present invention when combined with another member capable of compensating for the low workability. The means for attaching the ceramic plate to the inner side surface of the casing member is not particularly limited. For example, in the assembly process of the casing, the ceramic plate is previously arranged on the inner side surface of the casing member, and the primary chamber frame and There is a method of superimposing the secondary chamber frame. With this method, when the casing is assembled and bolted,
Since the secondary chamber frame and the secondary chamber frame are deformed and the gap between the casing, the ceramic plate, the primary chamber frame and the secondary chamber frame is completely crushed, the occurrence of air leak can be prevented.

[0081]

EXAMPLES Example 1 As a metal material of the support plate 21, the pressing plates 23, 24, the inlet spacer 25, and the outlet spacer 26, as shown in Table 1 above.
Using the iron-nickel-cobalt alloy shown in, casing 4
The gas filter device 10 shown in FIGS. 1 to 12 was manufactured by using stainless steel (SUS430) as the No. 0 metal material.

This gas filter device 10 was installed in a duct, and a fixed amount of heated clean air was blown, and particles of 0.3 μm or more were measured downstream of the filter with a particle counter (KC-01B manufactured by Rion Co.). Table 2 shows the amount of dust generated from the filter when the temperature in the measurement system was changed from room temperature to 450 ° C to room temperature.

Comparative Example 1 In Example 1, the supporting plate 21, the holding plates 23, 2
4, a gas filter device was manufactured in the same manner except that stainless steel (SUS430) was used as the metal material of the inlet spacer 25 and the outlet spacer 26.

This gas filter device was installed in a duct in the same manner as in Example 1, ventilated from the filter sheet 22 when the temperature in the measurement system was changed from room temperature to 450 ° C. to room temperature by ventilating under the same conditions. The amount of dust was measured. This measurement result is shown in Table 2.
Shown in.

Example 2 In the assembly process of the casing 40 of Comparative Example 1, the inner surface of the end plate 41 facing each other has a thickness of 0.3 m.
A gas filter device was manufactured in the same manner except that a thin plate of iron-nickel-cobalt alloy of m was arranged. The dust generation amount of this gas filter device was measured in the same manner as in Comparative Example 1. The measurement results are also shown in Table 2.

[0086]

[Table 2]

As is clear from Table 2, the filter sheet 2
Example 1 in which the support plate 21, the pressing plates 23 and 24, the inflow port spacer 25, and the outflow port spacer 26 that contact the 2 are made of a metal material having a linear expansion coefficient of 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C. Compared with the gas filter device of Comparative Example 1 in which the above-mentioned members are made of stainless steel, the gas filter device of FIG. , The amount of dust emitted from the filter sheet is extremely small.

Further, it can be seen that the gas filter device of the second embodiment produces a smaller amount of dust than the gas filter device of the first comparative example although the gas filter device is less than the gas filter device of the first embodiment. From this, the linear expansion coefficient at 0 to 400 ° C. is 10 ×
It can be understood that the dust generation amount of the gas filter device can be suppressed even under the severe condition that the temperature difference between the upper and lower sides is large, only by using the low expansion material of 10 ⁻⁶ / ° C. or less only inside the flow path forming member.

[0089]

As described above in detail, according to the present invention, by using a metal material having a smaller linear expansion coefficient than stainless steel conventionally used for a metal member in contact with a filter sheet, a large temperature fluctuation can be achieved. Even if there is, the dust generated from the filter sheet can be significantly reduced, and it is possible to maintain a clean environment.

[Brief description of drawings]

FIG. 1 is a perspective view of a gas filter device according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of a casing of the gas filter device of FIG.

3 is a top view of the gas filter device in FIG. 1. FIG.

FIG. 4 is a sectional view taken along the line IV-IV in FIG.

5 is an enlarged view of a V portion of FIG.

6 is a sectional view taken along line VI-VI in FIG.

7 is a sectional view taken along line VII-VII in FIG.

8 is a sectional view taken along the line VIII-VIII in FIG.

FIG. 9 is an enlarged view of a portion IX in FIG.

FIG. 10 is an enlarged view of a portion X in FIG.

FIG. 11 is an exploded perspective view of a main part of the gas filter device of FIG.

12 is a sectional view taken along line XII-XII in FIG.

FIG. 13 is an explanatory diagram showing a configuration of a filter plate according to the embodiment.

14 is a cross-sectional perspective view of an essential part showing the installation structure of the filter plate of FIG.

FIG. 15 is an explanatory diagram showing another example of the spacer according to the embodiment.

[Explanation of symbols]

10 Gas filter device 11 Primary room 12 Secondary room 13 Inlet 14 Outlet 20 filter plate 21 Support plate 22 Filter sheet 25 Inlet spacer 26 Outlet spacer 31 Primary chamber frame 35 Secondary chamber frame 40 cases 41 top plate 42 Side plate 43 top plate 44 bottom plate

Claims (6)

[Claims] 1. A gas filter device comprising a metal flow path forming member having a flow path for allowing gas to pass therethrough, and a filter sheet provided across the flow path, at least one of which is in contact with the filter sheet. The linear expansion coefficient of the metal member of the part is 10 × 10 ⁻⁶ / ° C. or less at 0 to 400 ° C., the gas filter device. 2. A according to claim 1, wherein the filter sheet metal support plate having air permeability have been superimposed on the linear expansion coefficient of the metal support plate is 0 to 400 ° C. in 10 × 10 ^- A gas filter device having a temperature of ⁶ / ° C. or less. 3. The corrugated metal spacer according to claim 1, wherein at least one of the inlet and the outlet of the flow path is provided with a corrugated metal spacer having a linear expansion coefficient of 0 to 4.
A gas filter device having a temperature of 10 × 10 ⁻⁶ / ° C. or less at 00 ° C. 4. The method according to claim 1, wherein
At least a part of the metal flow path constituting member is 0 to 400.
A gas filter device having a coefficient of linear expansion at 10C of 10 x ^10-6 / C or less. 5. The linear expansion coefficient at 0 to 400 ° C. of at least a part of the metal flow path constituting member is 10 × 10 ^−6.
/ ° C or less, a gas filter device. 6. A gas filter device comprising a metal flow path constituent member having a flow path for allowing gas to pass therethrough, and a filter sheet provided across the flow path. on the sides, the linear expansion coefficient at 0 to 400 ° C. is 10 × 10 - gas filter apparatus characterized in that a ^{6 /} ° C. or less of the buffer plate.