JP2003008150A - Optical output device and array thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a completely new optical output device which uses a VCSEL as a light source and is capable of easily and surely switching channels from one to another. SOLUTION: An optical output device is capable of selectively inputting a laser flux emitted from a VCSEL into a desired input port out of (n) (n>=2) input ports. The optical output device is equipped with a single VCSEL 10, a single lens device 20, and a lens element drive means 30 which rotates the lens device. The lens device 20 has a positive power lens plane 21 on its one surface located on a VCSEL side, and a plane 22 as the other plane at a prescribed angle to a surface vertical to the optical axis of the lens plane. A relative positional relation between the VCSEL 10 and the lens device 20 is so set as to satisfy that a divergent laser flux L emitted from the VCSEL 10 is diminished in diverging properties by the lens plane 21, and the laser flux L is projected from the plane 22. The lens device 20 is rotated around the light axis of the lens plane by the lens device drive means 30 so as to make the laser flux L impinge on the desired input port through the prcessional direction change of a laser flux projected from the plane 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light output element and a light output element array using a VCSEL as a light source.

[0002]

2. Description of the Related Art VCSEL (vertical cavity surface)
emitting laser) has a cross-sectional shape of a radiated laser beam that is close to a circular shape, has a high light density, and has a characteristic of operating in a single mode. Therefore, it is used in optical devices such as an optical pickup and optical fiber communication. It is intended for use as a light source.

In an optical output device using a VCSEL as a light source, an output laser beam to be output is input to an "input port" such as an incident end face of an optical fiber, but an output laser emitted from a single VCSEL. For luminous flux,
It is convenient to prepare a plurality of input ports and perform so-called "channel switching" for switching the input ports.

Meanwhile, in the VCSEL as well, there are variations in the intensity of the emitted laser beam due to temperature variations and deterioration of the characteristics of the VCSEL itself over time. Therefore, in order to stabilize the intensity of the laser light flux emitted from the VCSEL, it is necessary to monitor the intensity of the emitted laser light flux.

A normal semiconductor laser is capable of a monitor method for detecting the intensity of the back-emission laser light flux, but a VCS
Because of the structure of EL's "no backside emission", such a monitor system cannot be used.

Therefore, in the VCSEL, "a part of the laser beam emitted to the front side" is received for monitoring. As such a monitor system, JP-A-9-19
Those described in Japanese Patent No. 8707 and Japanese Patent Laid-Open No. 10-51067 are known.

In the monitor system described in these publications,
Part of the laser beam emitted to the front side of the VCSEL is V
The intensity of the laser light flux is detected by reflecting the light at the exit window of the CSEL package and receiving the light by the light receiving portion arranged in the package.

It is known that the laser light flux emitted from the VCSEL has "light emission fluctuation". The fluctuation of light emission is
This is a phenomenon in which the distribution of the light intensity on this plane temporally fluctuates when an imaginary plane orthogonal to the traveling direction is considered for the emitted laser beam. The light intensity distribution varies with time even if the total light intensity (the integral of the light intensity distribution in the plane) is constant with time.

Therefore, when "a part of the laser beam emitted to the front side of the VCSEL" is used as monitor light as in the monitor method described in the above publications, the total light energy of the emitted laser beam changes. However, there is a problem that the change in the monitor light intensity due to the light emission fluctuation is detected as a “change in total light energy”.

[0010]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
It is an object to realize a completely novel optical output element and optical output element array in which L is used as a light source and channel switching can be performed easily and surely.

The present invention is also a novel optical output element and optical output element array which can easily and surely switch channels and can surely detect monitor light without being affected by fluctuations in light emission. The realization of is another issue.

[0012]

An optical output element according to a first aspect of the present invention is characterized in that "a laser beam emitted from the VCSEL is n
An optical output element capable of selectively inputting to a desired input port of (≧ 2) input ports, which is a single VCSEL, a single lens element, and a lens element driving means. Have.

A "single VCSEL" emits a divergent laser beam as a light source. The intensity of this laser beam is modulated as necessary. The “lens element driving means” is a means for rotating the lens element.

The "single lens element" is a plane having a lens surface of positive power on the surface on the VCSEL side and the other surface inclined by a predetermined angle with respect to the surface of the lens surface orthogonal to the optical axis. , The relative positional relationship with respect to the VCSEL is determined so that the divergence of the divergent laser beam emitted from the VCSEL is weakened by (the positive power of) the lens surface and the light is emitted from the plane.

The channel switching is performed by "rotating the lens element by the lens element driving means". That is, by rotating the lens element "around the optical axis of the lens surface" by the lens element driving means, and "precessing direction change" of the laser beam emitted from the plane (refracted by the plane), A laser beam is made incident on a desired input port. The lens element driving means "rotates the lens element by an angle necessary for channel switching", and does not "rotate like a frame".

Since the lens surface of the lens element "weakens the divergence of the divergent laser light beam emitted from the VCSEL", the laser light beam affected by the lens surface becomes a parallel laser light beam or has a converging property. Can also be a laser beam of
Alternatively, it can be a divergent laser beam whose divergence at the time of radiation is weakened.

It is preferable that the "light emitting portion of the VCSEL" in the light output element according to claim 1 is located on the optical axis of the lens surface of the lens element (claim 2).
In this case, the light emitting portion of the VCSEL can be positioned at the "focal position of the lens surface of the lens element" (claim 3). By doing so, the action of the lens surface of the lens element becomes a collimating action for converting the divergent laser beam emitted from the VCSEL into a parallel laser beam. As described above, since the cross-sectional shape of the laser light flux emitted by the VCSEL is close to a circular shape, the collimated laser light flux becomes a parallel laser light flux having a substantially circular light flux cross section.

In this case, the laser light flux emitted from the VCSEL is collimated by the lens surface of the lens element and exits from the plane facing the lens surface. This plane is "a plane orthogonal to the optical axis of the lens surface". Since it is inclined with respect to the plane, it is refracted when it exits from a plane and has an angle with respect to the optical axis.

Therefore, when the lens element rotates around the optical axis of the lens surface, the collimated output laser luminous flux "precessively turns around the optical axis". By this direction change, the input port on which the output laser beam is incident is switched.

The optical output element according to claim 4 is the "VCSE
An optical output element capable of selectively inputting a laser beam emitted from L to a desired input port among n (≧ 2) input ports, which comprises a single VCSEL,
It has a single lens element, a lens element driving means, and n light receiving elements for monitoring.

A "single VCSEL" emits a divergent laser beam as a light source. The intensity of this laser beam is modulated as necessary. The “lens element driving means” is a means for rotating the lens element.

A "single lens element" is a plane having a lens surface of positive power on the surface on the VCSEL side and the other surface inclined by a predetermined angle with respect to the surface of the lens surface orthogonal to the optical axis. . In the VCSEL, the light emitting portion is arranged on the optical axis of the lens surface of the lens element, and the divergence of the divergent laser beam emitted from the light emitting portion is weakened by the lens surface and is emitted from the plane. A relative positional relationship with respect to is defined. In the light output element according to the fourth aspect, the action of "weakening the divergence of the divergent laser light flux emitted from the light emitting portion of the VCSEL" on the lens surface is to convert the divergent laser light flux into a "parallel laser light flux or This is a function of "focusing laser light flux", and the laser light flux whose divergence is weakened by the lens surface does not become "divergent laser light flux".

The "n light receiving elements for monitoring" are provided on the same side of the lens element as the VCSEL so as to have a one-to-one correspondence with the n input ports.

The channel switching is performed by rotating the lens element "around the optical axis of the lens surface" by the lens element driving means. That is, the divergence of the laser beam emitted from the VCSEL is weakened by the action of the lens surface and becomes a parallel laser beam or a focused laser beam,
When it is emitted from the plane facing the lens surface, it is refracted,
It becomes a light beam which is tilted with respect to the optical axis of the lens surface, and is precessed by the rotation of the lens element to be incident on a desired input port.

As described above, when the laser light flux is incident on the arbitrary input port, the laser light flux reflected by the plane is focused by the lens surface and is used as monitor light by the "light receiving element corresponding to the arbitrary input port". The arrangement of each light receiving element is determined so that the light is incident.

In the optical output element according to claim 4, VC
The light emitting portion of the SEL can be set to the “focal position of the lens surface of the lens element”, and the n light receiving elements and the VCSEL can be arranged on substantially the same surface of the supporting substrate (claim 5).

That is, in this case, the divergent laser beam emitted from the VCSEL becomes a parallel laser beam due to the action of the lens surface of the lens element. Then, after being reflected by a plane inclined with respect to a plane orthogonal to the optical axis of the lens surface, it is incident on the lens surface as a parallel laser light flux. It will shine. Therefore, the n light receiving elements and the VCSELs can be arranged on substantially the same surface of the support substrate.

Further, in the optical output element according to claim 4, the light emitting portion of the VCSEL is arranged away from the focal point of the lens surface of the lens element, and a step is formed on the support substrate supporting the VCSEL and the n light receiving elements. Established, VCSE
It is possible to dispose L at the bottom of the step and each light receiving element at the top of the step.

In this case, the divergent laser beam emitted from the VCSEL becomes a focused laser beam due to the action of the lens surface of the lens element and is reflected by the "plane inclined with respect to the plane orthogonal to the optical axis of the lens surface". After that, since it enters the lens surface as a focused laser beam, when it is acted on by the lens surface, it is condensed at a position closer to the lens surface than the focal surface of the lens surface. Therefore, the monitor light can be effectively received by disposing the n light-receiving elements above the step (closer to the lens surface) of the support substrate.

In the optical output element according to the sixth aspect, since the output laser light flux is a focused laser light flux, it can also be focused directly on the input port.

In the light output element according to any one of claims 4 to 6, the intensity of the monitor light is "on a plane inclined by a predetermined angle with respect to a plane orthogonal to the optical axis of the lens surface" in the lens element. In order to secure the above, a "reflection film having a desired reflectance" can be formed (claim 7).

In the light output element according to any one of claims 1 to 7, a plurality of (same) light output elements are arrayed one-dimensionally or two-dimensionally with this as one unit. A light output element array can be constructed (claim 8).

According to a ninth aspect of the present invention, there is provided a light output element array in which "m (≧ 2) VCSELs are linear on the same support substrate.
VCSs arranged in a grid or rotationally symmetrical radial pattern
It is an optical output element array capable of switching and inputting laser light flux emitted from each VCSEL of the EL array to n (≧ 2) input ports corresponding to each VCSEL at the same time. A lens element array and a lens element array driving means.

That is, in the optical output element array according to the ninth aspect, a plurality (n) of input ports are prepared corresponding to each of the plurality (m) of VCSELs, and m output laser beams are simultaneously emitted. You can switch channels.

The "VCSEL array" is an array of m VCSELs arranged linearly, in a grid pattern or in a rotationally symmetrical radial pattern on the same support substrate. The grid pattern is "square matrix" or "rectangular matrix (in the row and column directions,
Matrix with different arrangement intervals) ".

The "lens element array" is formed by arranging m equivalent lens elements on the same transparent plate according to the arrangement of the VCSELs. “The array of lens elements“ follows the array of VCSELs ”” means that the array of VCSELs is “congruent with the array of lens elements”.

The "lens element array driving means" is means for rotating the lens element array, but the "rotation" here does not mean rotating the lens element array like "rotation of the frame". From the state where the arrangement of the lens elements in the lens element array and the arrangement of the VCSELs in the VCSEL array overlap with each other when viewed from the direction of the rotation axis of the lens element array (perpendicular to the arrangement surface of the lens elements), the lens element array is set to “360 The lens array and the VCSEL array are newly overlapped with each other by rotating the lens array by an angle smaller than “degree”.

Each of the m lens elements in the lens element array has a lens surface of positive power on the surface on the VCSEL side (equal to each other), and the other surface is a surface orthogonal to the optical axis of the lens surface. Is a plane inclined by a predetermined angle. The lens element array has a relative positional relationship with respect to the VCSEL array such that “the divergence of the divergent laser beam emitted from each VCSEL is weakened by the corresponding lens surface and emitted from the above plane”.

By the lens element array driving means, the lens element array is rotated by a predetermined angle around a predetermined rotation axis orthogonal to the array surface of the lens elements, and the laser beam emitted from each of the above planes is precessively changed in direction. By this, the input port for inputting the laser beam can be switched simultaneously for all the laser beams.

In the optical output element array according to the present invention, "each VCSEL is mounted on a supporting substrate of the VCSEL array.
N light receiving elements are arranged corresponding to the above, the lens element array is rotated by a predetermined angle around the rotation axis, and the laser light flux reflected by the plane of each lens element corresponds each time the input port is switched. The arrangement of a maximum of m · n light receiving elements can be set so that the light receiving elements that are focused and incident on the lens surface are switched.

In the light output element array according to the tenth aspect of the present invention, "the light emitting portion of each VCSEL of the VCSEL array is
It is possible to set the focus position of the lens surface of the corresponding lens element of the lens element array and arrange all the VCSELs and the light receiving elements on substantially the same surface of the support substrate ”(claim 11).

Further, in the light output element array according to the tenth aspect, "the light emitting portion of each VCSEL of the VCSEL array is arranged so as to be away from the focal point of the lens surface of the corresponding lens element of the lens element array, and m VCSs are arranged.
It is possible to form a step between the EL and a support substrate that supports at most m · n light receiving elements, and arrange each VCSEL at the bottom of the step and each light receiving element at the top of the step ”.
2).

Supplementing the explanation to some extent, the above-mentioned claim 10
In the light output element array described in any one of 1 to 12, "1 VCSEL
, N VCSELs are made to correspond to each other, and the VCSELs are arranged in an array with respect to each other, so that the light receiving elements are arranged accordingly.

At this time, one light receiving element can be "common to two adjacent VCSELs". Therefore, if a plurality of VCSELs "share the same light receiving element" in this way, the number of light receiving elements arranged on the support substrate is less than m.n for an array arrangement of m VCSELs. It will be less.

In the light output element array according to any one of claims 10 to 12, "a desired flat surface of each lens element in the lens element array is inclined by a predetermined angle with respect to a surface orthogonal to the optical axis of the lens surface. It is possible to form a reflective film having the reflectivity of (claim 13).

In the light output element array according to any one of claims 9 to 13, "V in the VCSEL array
The CSEL array arrangement and the lens element array arrangement in the lens element array are linear or cross-shaped, and the lens element array is rotated 180 degrees around the rotation axis to switch the input port. " (Claim 14).

Further, in the light output element array according to any one of claims 9 to 13, "The array arrangement of VCSELs in the VCSEL array and the array arrangement of lens elements in the lens element array are in a square matrix grid pattern. , The lens element array is rotated by 90 degrees around the rotation axis to switch the input port "(claim 15).

Other than the above array arrangement, various rotationally symmetric radial arrangements are possible, for example, a radial arrangement having a rotational angle of 60 degrees and a radial angle of 60 degrees.

In the light output element array according to claim 14 or 15, when the array arrangement of the VCSELs and the lens elements is a grid pattern, the other surface of each lens element corresponding to the lens surface is a "grid pattern". It is possible to "commonize" for each row or each column of the lens elements arranged in "(claim 16)".

The material of the lens element / lens element array is
It may be glass, quartz glass, transparent resin, or the like. When glass or quartz glass is used, the positive power lens surface of the lens element and the flat surface inclined with respect to the surface of the lens surface orthogonal to the optical axis can be formed by photolithography and etching.

That is, a photoresist layer is formed on the surface of a transparent glass plate which is the material of the lens element / lens element array, and the lens surface / lens surface array or “the optical axis of the lens surface is selected depending on the spatial distribution of the exposure amount. Exposure is performed according to "a plane / planar array tilted with respect to an orthogonal plane", development is performed to form a shape corresponding to a lens surface or a flat surface on a photoresist, and the above shape is anisotropically etched. By transferring to a transparent glass plate, a desired lens element / lens element array can be obtained. When a resin material is used as the material for the lens element / lens element array, the lens surface, the above flat surface, or the like can be formed by embossing or injection molding.

[0052]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram for explaining one embodiment of a light output element according to claim 1. The optical output element of this embodiment is an optical output element capable of selectively inputting a laser beam emitted from a VCSEL to a desired input port of the two input ports P1 and P2, Single VCSEL 10 and single lens element 2
0 and a lens element driving means 30 for rotating this lens element.

A single VCSEL 10 is provided on the support substrate 1. The lens element 20 has a lens surface 21 of positive power on the surface on the VCSEL 10 side, and the other surface is a flat surface 22 inclined by a predetermined angle with respect to the surface of the lens surface 21 orthogonal to the optical axis AX. The relative positional relationship with respect to the VCSEL 10 is determined so that the divergence of the “divergent laser light flux L” is weakened by the lens surface 21 and emitted from the plane 22.

In the embodiment of FIG. 1, the VCSEL 10
On the optical axis of the lens element 20, the relative positional relationship with respect to the lens element 20 is determined so that the light emitting portion is aligned with the focal position of the lens surface 21. That is, the lens element 20 is held by the holding means (not shown) so as to realize the above positional relationship.

The divergent laser light flux L emitted from the VCSEL 10 is weakened in divergence by the lens surface 21, becomes a substantially parallel laser light flux, and is incident on the plane 22.
Since the plane 22 is inclined with respect to the plane orthogonal to the optical axis AX, the parallel laser light flux is refracted when emitted from the plane 22 and forms an angle θ with the optical axis AX.

The lens element driving means 30 is constructed as shown in FIG. 1 (d). That is, the lens element driving means 30 includes a gear 202 integrated on the outer periphery of a holder 201 that holds the lens element 20, a gear 301 that meshes with the gear 202, and a stepping motor 302 (reference numeral 302 in the figure) that drives the gear 301. Represents the drive shaft of the stepping motor) and the lens element 20.
Can be rotationally driven around the optical axis AX.

When the lens element driving means 30 rotates the lens element 20 around the optical axis AX while the laser beam is emitted from the VCSEL 10 and emitted from the plane 22, the laser beam emitted from the plane 22 is The angle: θ with respect to the optical axis AX is maintained, and the lens rotates “precessively” around the optical axis AX.

In FIGS. 1B and 1C, reference symbols P1,
P2 indicates an input port. Two input ports P
1 and P2 are arranged symmetrically to each other with the optical axis AX in between.

In FIG. 1B, the laser light flux L emitted from the VCSEL 20 is input to the input port P1. From this state, when the lens element 20 is rotated 180 degrees around the optical axis AX by the lens element driving means 30,
The posture of the lens element 20 is as shown in (c), and the laser light flux L is input to the input port P2.

That is, the lens element driving means 30 rotates the lens element 20 around the optical axis AX of the lens surface 21, and the laser beam emitted from the plane 22 is precessed to change the laser beam L. Desired input port (P1
Alternatively, it can be incident on P2).

That is, the optical output element described in the above embodiment is an optical output element capable of selectively inputting the laser beam emitted from the VCSEL 10 to a desired input port of the two input ports. And a single VCSE
L10, a single lens element 20, and this lens element 2
And a lens element driving means 30 for rotating 0.

The lens element 20 has a lens surface 21 of positive power on the surface on the VCSEL side, and the other surface has the lens surface 2
The VCSEL 10 is a plane 22 that is inclined by a predetermined angle with respect to the plane orthogonal to the optical axis of 1, and the divergence of the divergent laser light flux L emitted from the VCSEL 10 is weakened by the lens surface 21 and emitted from the plane 22. The relative positional relationship with respect to is defined.

The lens element driving means 30 rotates the lens element 20 around the optical axis AX of the lens surface 21, and the laser beam emitted from the plane 22 is precessed to change the laser beam to a desired one. The input port (P1 or P2) can be made incident (claim 1).

The light emitting portion of the VCSEL 10 is located on the optical axis AX of the lens surface 21 of the lens element 20 (claim 2), and the light emitting portion of the VCSEL 10 is at the focal position of the lens surface 22 of the lens element 20. (Claim 3).

Although the number of input ports: n = 2 in the embodiment of FIG. 1, the number of input ports: n is 3
It goes without saying that the above can be done. For example, in place of the two input ports shown in FIG. 1, four input ports are arranged such that their centers are located at the four corners of the square when viewed from the direction of the optical axis AX.
By rotating each 90 degrees by 90 degrees, the input port on which the laser beam enters can be selected from the four input ports.

Alternatively, the centers of the three input ports are "positioned at the vertices of an equilateral triangle when viewed from the direction of the optical axis AX".
In this way, by rotating the lens element 20 by 60 degrees, the input port into which the laser light flux enters can be selected from the three input ports.

FIG. 2 is a diagram for explaining one embodiment of the light output element according to the fourth aspect. To avoid complications,
The same reference numerals as those in FIG. 1 are used in the following drawings for those which are not considered to be confused.

The optical output element shown in FIG. 2 selectively inputs the laser beam emitted from the VCSEL to a desired input port of the two input ports (first and second input ports). It is a light output element capable of performing, and has a single VCSEL 10, a single lens element 20, a lens element driving means for rotating the lens element 20, and two light receiving elements 41 and 42 for monitoring. .

The lens element 20 has a lens surface 21 of positive power on the surface on the VCSEL 10 side, and the other surface is a flat surface 22 inclined by a predetermined angle with respect to the surface of the lens surface 21 orthogonal to the optical axis AX.

VCSEL 10 provided on support substrate 1
Has its light emitting portion arranged on the optical axis AX of the lens surface 21 of the lens element 20, and the divergence of the divergent laser light flux L emitted from the light emitting portion is weakened by the lens surface 21 and emitted from the plane 22. As described above, the relative positional relationship with respect to the lens element 20 is defined.

The two light-receiving elements 41 and 42 for monitoring are “light-receiving elements” and are the lens surface 21 of the lens element 20.
Are provided so as to have a one-to-one correspondence with two input ports (first and second input ports (not shown)).

"Lens element driving means (not shown in FIG. 1)
(Similar to that shown in (d)) ", the lens element 20 is rotated around the optical axis AX of the lens surface 21, and the" precessional direction change "of the laser light flux L emitted from the plane 22. Allows the laser beam L to pass through the desired input port (first,
Second input port), and when the laser light flux is incident on any input port, the laser light flux reflected by the plane 22 is focused by the lens surface 21 and the above-mentioned arbitrary input port The arrangement of each light receiving element is determined so that the light is incident as the monitor light LM on the light receiving element (light receiving element 41 or 42) corresponding to.

That is, the light receiving element 41 is arranged at a position where the monitor light LM can be received when the laser light flux L enters the first input port.
Is located at a position where the monitor light LM can be received when the light enters the first input port. Light receiving element 41, 4
2 receives the monitor light LM and converts it into an electric signal.

In addition, in the light output element of FIG.
The light emitting unit 10 has a lens surface 21 in the lens element 20.
Is set to the focus position of the two light receiving elements 41, 42 and V
The CSEL 10 is arranged on substantially the same surface of the support substrate 1 (claim 5).

The "channel switching" for switching the input ports (first and second input ports) to which the laser beam should enter is performed in exactly the same way as in the embodiment of FIG.

In the embodiment of FIG. 2, the laser light flux L emitted from the VCSEL 10 becomes a substantially parallel laser light flux by the lens surface 21, and the component reflected by the plane 22 is a parallel laser light flux on the lens surface 21. Receives lens action. Therefore, since the monitor light LM is focused on the focal plane of the lens surface 21, the two light receiving elements 41,
42 and the VCSEL 10 can be arranged on substantially the same surface of the support substrate 1.

The embodiment shown in FIG. 3 relates to a light output element according to claim 6. A feature of this light output element is that the light emitting portion of the VCSEL 10 is arranged away from the focus of the lens surface 21 of the lens element 20, and the VCSEL 10 and the two light receiving elements 41, 42 are arranged.
The support substrate 1A for supporting the
Is arranged at the bottom of the step, and the light receiving elements 41, 42 are arranged at the “top of the step (side closer to the lens element 20)”. Since the VCSEL 10 is provided on the optical axis AX of the lens surface 21 at a position farther from the lens surface 21 than the focal position, the divergent laser light flux L emitted from the VCSEL 10 is the lens as shown by the solid line. Face 21
To the focused laser beam by the positive power of the lens surface 21, travels in the optical axis AX direction, and is incident on the plane 22.

Since the laser light flux reflected as the monitor light LM by the plane 22 is incident on the lens surface 21 in a focused state, when it is subjected to the positive power of the lens surface 21, V
The light is condensed at a position closer to the lens surface 21 than the surface on which the CSEL 10 is arranged. The light receiving elements 41 and 42 are arranged at this condensing position. Upon receiving the monitor light LM, the light receiving elements 41 and 42 convert the monitor light LM into an electric signal.

In the embodiment shown in FIGS. 2 and 3, the plane 22 on the exit side of the lens element 20 reflects "the total luminous flux of the incident laser luminous flux L with a predetermined ratio of reflectance".
This reflectance depends on the refractive index of the material of the lens element 20 and the plane 22.
Is determined by the angle formed with the optical axis AX. If the reflectance of the plane 22 is K, the total light energy of the laser light flux L incident on the plane 22 is I, and the light energy of K · I is VCSEL1.
It will be reflected to the 0 side.

Therefore, the total light energy transmitted through the lens element 20 is I · (1-K). Light receiving element 41, 42
Is the monitor light LM reflected by the plane 22 while the laser light flux L is incident on the corresponding input port.
Is received (almost all). That is, the light energy received by the light receiving elements 41 and 42 is the above-mentioned “K · I”. Since the total light energy: I “does not change depending on the light emission fluctuation”, the change of the monitor light LM corresponds to the change of the light emission intensity (light energy) of the VCSEL 10 and is not affected by the “light emission fluctuation”.

In the embodiments shown in FIGS. 2 and 3, the number of input ports capable of channel switching: n is set to 2. However, as described above, the lens element can be rotated by 60 degrees or 90 degrees. It goes without saying that the channels can be switched by rotating the input ports of n = 3 or more.

In such a case, it will be easily understood that the arrangement of the n light receiving elements (light receiving elements) becomes similar to the arrangement of the n input ports.

In the embodiment shown in FIGS. 2 and 3, the lens element 20 is used to secure the intensity required for the monitor light LM.
The "reflective film having a desired reflectance" can be formed on the flat surface 22 which is inclined by a predetermined angle with respect to the surface of the lens surface orthogonal to the optical axis (claim 7).

In FIG. 4, reference numeral 50 indicates "a light output element having the same structure". The specific configuration of the light output element 50 is
For example, it is as shown in FIGS. The plurality of light output elements 50 are arrayed one-dimensionally or two-dimensionally (held by a common holder 60 and integrated).

That is, the array arrangement of the light output elements 50 in FIG. 5 is one embodiment of the "light output element array according to claim 8". Reference numerals P1 and P2 in the figure denote two input ports corresponding to each light output element. The channel can be switched between the two input ports P1 and P2 independently for each light output element 50. Of course, it is needless to say that the number of input ports for which channel switching should be performed: n can be 3 or more.

FIG. 5 shows a first embodiment of the light output element array according to the ninth and following aspects. In this embodiment, a large number of VCSELs 10 are provided on the same support substrate 100.
(In order to avoid complication, each VCSEL is not individually given a separate code, and each VCSEL is represented by the code 10) is in a grid pattern (in this embodiment, "square matrix shape")
Of each VCSE of the VCSEL array 1000 arranged in
Laser beam L emitted from L10 is “simultaneously” for each VC
It is an optical output element array capable of switching and inputting to four input ports (not shown) corresponding to SEL.

The VCSEL array 1000 comprises a large number of VCSELs 10 arranged in a grid pattern on the same support substrate 100. In the lens element array 2000, a large number of “lens elements equivalent to each other” (V
(Equal to the number of arrayed VCSELs 10 in the CSEL array 1000) and the arrayed VCSELs 10.

"Lens element array driving means (similar to that described with reference to FIG. 1D)" not shown
Rotates the lens element array 2000.

Each of the lens elements of the lens element array 2000 has a lens surface of positive power (not shown in the drawing) on the surface on the VCSEL 10 side, and the other surface is a surface orthogonal to the optical axis of the lens surface. On a plane inclined by a predetermined angle with respect to each V
The positional relationship with respect to the VCSEL array 1000 is determined so that the divergence of the divergent laser beam L emitted from the CSEL 10 is weakened by the corresponding lens surface and emitted from the above plane.

By a lens element driving means (not shown),
When the lens element array 2000 is rotated by a predetermined angle (90 degrees in this embodiment) about a predetermined rotation axis AX0 that is orthogonal to the array surface of the lens elements, the precessional direction of the laser light flux emitted from each plane. By the conversion, it is possible to switch the input port to which each laser light flux L is to be input "at the same time for all laser light fluxes".

The light output element array of FIG.
Each VCSEL is mounted on the supporting substrate 100 of the L array 1000.
4 light receiving elements (which are light receiving elements) corresponding to 10
1, 42, 43, 44 are arranged. These, each V
The four light receiving elements for each CSEL are the lens element array 2
000 is rotated by 90 degrees about the rotation axis AX0, and every time the input port is switched, the laser light flux (monitor light LM) reflected by the plane of each lens element is focused on the corresponding lens surface and is incident. The arrangement is set so that the light receiving elements to be switched are switched (claim 10). When the detection of the monitor light is performed by another suitable method, each light receiving element 41
~ 44 can be omitted.

Further, each VC of the VCSEL array 1000 is
The light emitting unit of the SEL 10 is set at the focal position of the lens surface of the corresponding lens element of the lens element array 2000, and all the VCSELs 10 and the light receiving elements 41 to 44 are
They are arranged on substantially the same surface of the support substrate 100 (claim 11).

Further, the array arrangement of the VCSELs 10 in the VCSEL array 1000 and the array arrangement of the lens elements in the lens element array 2000 are in a grid pattern, and the lens element array is rotated by 90 degrees around the rotation axis to input the input ports. Is configured to be switched (claim 15).

The other surface of each lens element in the lens element array 2000 corresponding to the lens surface (the upper surface of the lens element array 2000 shown in the drawing, the surface orthogonal to the optical axis of the lens surface of each lens element) The plane that is tilted against)
The lens elements arranged in a grid pattern are shared by each row (depth direction in the drawing) to form a strip-shaped inclined surface 220 (claim 16). This makes it easier to form a common strip-shaped surface and reduces the manufacturing cost of the lens element array, as compared with the case where each plane is formed individually.

As a modification of FIG. 5, the light emitting portion of each VCSEL 10 of the VCSEL array is replaced by the “lens element array 200”.
0 away from the focal point of the lens surface of the corresponding lens element 0 ”, and each VCSEL 10 and the light receiving element 4
Steps may be formed on the support substrate that supports 1 to 44, each VCSEL 10 may be arranged at the bottom of the step, and each light receiving element 41 to 44 may be arranged above the step as in the embodiment of FIG. (Claim 12).

Further, each lens element in the lens element array 2000 has a plane inclined by a predetermined angle with respect to a plane orthogonal to the optical axis of the lens surface (in the embodiment shown in FIG. 5, the lens element array is commonly used for each row). Thus, a "reflection film having a desired reflectance" can be formed on the strip-shaped inclined surface 220 (claim 13).

In the embodiment of FIG. 5, each VCSEL
Of the four light receiving elements 41 to 44 corresponding to the two light receiving elements (light receiving elements 41 and 4) diagonally corresponding to each other.
3, or the light receiving elements 42 and 44) are removed, the lens element array 2000 is rotated 180 degrees about the rotation axis, and the input ports are switched (the laser light flux L from all the VCSELs is simultaneously input into two input ports for each VCSEL. It is also possible to configure so as to perform channel switching between them (claim 14).

In the embodiment shown in FIG. 5, one VC is used.
Four light receiving elements 41 to 44 are arranged corresponding to the SEL 10, and accordingly, the arrayed VCSEs are arranged.
If there are m L10s, the number of light receiving elements is 4m.
Become individual.

Consider "a VCSEL and a VCSEL adjacent thereto" in FIG. For example, in FIG. 5, among the “four light receiving elements provided corresponding to two VCSELs adjacent to each other in the left-right direction”, the light receiving elements 42 and 44 are adjacent to each other. Of the “four light-receiving elements provided corresponding to two VCSELs adjacent to each other in the depth direction of FIG. 5,” light-receiving elements 41 and 43
And are next to each other.

In such a case, if the array arrangement of the VCSEL 10 is a square matrix, the "light-receiving elements 42 and 44" are provided for two adjacent VCSELs in the left-right direction.
Can be made into a single light receiving element. ”, Instead of using the light receiving elements 41 and 44 for two VCSELs adjacent to each other in the depth direction in FIG. It may be a single light receiving element ”.

By making the light receiving elements common to a plurality of VCSELs in this way, the number of light receiving elements provided on the support substrate 100 can be reduced.

Above, as a light output element array, a VCS
The case where the ELs are arranged in a square matrix has been described.
The EL array can be linear (in this case, the lens element array is rotated 180 degrees for channel switching), and the VCSELs are radially arrayed so that the lens element array has a predetermined angle (for example, 60 degrees). It is also clear that it can be configured so that the channels are switched by rotating each one.

[0103]

As described above, according to the present invention, a novel light output element and a new light output element array can be realized. In the light output element and the light output element array of the present invention, as described above, "the VCSEL is used as the light source and the channel can be switched easily and surely". Particularly, in the light output element array according to the ninth to sixteenth aspects, it is possible to simultaneously perform channel switching for laser light fluxes from a plurality of VCSELs.

Further, in the light output elements according to claims 4 to 6 and the light output element array according to claim 10, channel switching can be performed easily and surely, and moreover, without being affected by the light emission fluctuation, the light output element is surely performed. The monitor light can be detected.

[Brief description of drawings]

FIG. 1 is a diagram for explaining one embodiment of a light output element.

FIG. 2 is a diagram for explaining another embodiment of the light output element.

FIG. 3 is a diagram for explaining another embodiment of the light output element.

FIG. 4 is a diagram for explaining one embodiment of a light output element array.

FIG. 5 is a diagram for explaining another embodiment of the light output element array.

[Explanation of symbols]

10 VCSEL 20 lens element 21 lens surface 22 plane inclined with respect to a surface of the lens surface orthogonal to the optical axis AX

Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01S 5/022 H01S 5/022

Claims (16)

[Claims] 1. A laser beam emitted from a VCSEL,
A light output element capable of selectively inputting to a desired input port among n (≧ 2) input ports, wherein a single VCSEL, a single lens element, and this lens element are rotated. The lens element has a lens surface of positive power on the surface on the VCSEL side, and the other surface is inclined at a predetermined angle with respect to a surface orthogonal to the optical axis of the lens surface. And the VCS above
In order that the divergence of the divergent laser beam emitted from the EL is weakened by the lens surface and emitted from the plane,
A relative positional relationship with respect to the VCSEL is determined, and the lens element driving means rotates the lens element around the optical axis of the lens surface to precessively change the direction of the laser light flux emitted from the plane. The optical output element is configured so that the laser beam can be incident on a desired input port. 2. The light output element according to claim 1, wherein the light emitting portion of the VCSEL is located on the optical axis of the lens surface of the lens element. 3. The light output element according to claim 2, wherein the light emitting portion of the VCSEL is located at the focal position of the lens surface of the lens element. 4. A laser beam emitted from the VCSEL,
A light output element capable of selectively inputting to a desired input port among n (≧ 2) input ports, wherein a single VCSEL, a single lens element, and this lens element are rotated. Lens element driving means and n light receiving elements for monitoring, the lens element has a lens surface of positive power on the surface on the VCSEL side, and the other surface has an optical axis of the lens surface. The VCSEL has a plane inclined by a predetermined angle with respect to the plane, and the light emitting portion of the VCSEL is arranged on the optical axis of the lens surface of the lens element, and the divergent laser light flux emitted from the light emitting portion. The relative positional relationship with respect to the lens element is determined so that the divergence is weakened by the lens surface and emerges from the plane, and the n light-receiving elements for monitoring are closer to the VCSEL than the lens element. ,Up It is provided so as to have a one-to-one correspondence with the n input ports, and the lens element driving means causes the lens element to rotate around the optical axis of the lens surface, so that the laser light flux emitted from the plane is aged. The laser light flux reflected by the plane is changed so that the laser light flux can be incident on a desired input port by differential motion direction change and when the laser light flux is incident on an arbitrary input port. The light output element is characterized in that the arrangement of the respective light receiving elements is determined so that the light is converged by the light receiving element and is incident on the light receiving element corresponding to the arbitrary input port as monitor light. 5. The light output element according to claim 4, wherein the light emitting portion of the VCSEL is set at a focal position of a lens surface of the lens element, and the n light receiving elements and the VCSEL are arranged on substantially the same surface of the support substrate. An optical output element characterized by being processed. 6. The light output element according to claim 4, wherein the light emitting portion of the VCSEL is arranged away from the focal point of the lens surface of the lens element, and the support substrate supporting the VCSEL and the n light receiving elements forms a step. And the VCSEL is located at the bottom of the step,
A light output element, wherein each light receiving element is arranged above the step. 7. The light output element according to any one of claims 4 to 6, wherein the lens element has a desired reflectance on a plane inclined by a predetermined angle with respect to a surface of the lens surface orthogonal to the optical axis. A light output element having a film formed thereon. 8. A light comprising a plurality of units of light output elements arranged in a one-dimensional or two-dimensional array with the light output element according to any one of claims 1 to 7 as one unit. Output element array. 9. m (≧ 2) VCSs on the same supporting substrate.
Laser beams emitted from the respective VCSELs of the VCSEL array in which ELs are linearly arranged, in a grid pattern, or radially symmetric with respect to the rotational symmetry are simultaneously assigned to n corresponding to the respective VCSELs.
A light output element array capable of switching and inputting to (≧ 2) input ports, in which m VCSELs are arranged linearly, in a grid pattern or in a rotationally symmetric radial pattern on the same support substrate. The same VCSEL array and m lens elements equivalent to each other on the same transparent plate,
The lens element array has an array formed according to the array of CSELs, and a lens element array drive means for rotating the lens element array. In the lens element array, each of the m lens elements is the VCSEL. The divergence of the divergent laser beam emitted from each VCSEL has a positive power lens surface on the side surface and the other surface is a plane inclined by a predetermined angle with respect to the surface orthogonal to the optical axis of the lens surface. The VCSEL to emit light from the above plane by weakening the lightness by the corresponding lens surface.
The positional relationship with respect to the array is determined, and the lens element array driving means rotates the lens element array by a predetermined angle around a predetermined rotation axis orthogonal to the array surface of the lens elements, and the laser light flux emitted from each of the planes. An optical output element array, characterized in that the input port to which the laser light flux is to be input can be switched simultaneously for all the laser light fluxes by precessional direction change. 10. The light output element array according to claim 9, wherein n light receiving elements are arranged corresponding to each VCSEL on a support substrate of the VCSEL array, and the lens element array is arranged at a predetermined angle around a rotation axis. Rotate it
Each time the input port is switched, the maximum of m · is set so that the laser light flux reflected by the plane of each lens element is focused on the corresponding lens surface and the incident light receiving element is switched.
An optical output element array, in which the arrangement of n light receiving elements is set. 11. The light output element array according to claim 10, wherein the light emitting portion of each VCSEL of the VCSEL array is set at the focal position of the lens surface of the corresponding lens element of the lens element array, and all the VCSELs and the light receiving elements. And a light output element, which are arranged on substantially the same surface of the support substrate. 12. The light output element array according to claim 10, wherein the light emitting portion of each VCSEL of the VCSEL array is arranged away from the focal point of the lens surface of the corresponding lens element of the lens element array, and m VCSELs are arranged. And a support substrate supporting at most m · n light receiving elements has a step, each VCSEL is arranged at the bottom of the step, and each light receiving element is arranged at the top of the step. Light output element array. 13. The light output element array according to any one of claims 10 to 12, wherein each lens element in the lens element array has a plane inclined by a predetermined angle with respect to a plane orthogonal to the optical axis of the lens surface. An optical output element array having a reflective film having a desired reflectance. 14. The optical output element array according to any one of claims 9 to 13, wherein the array of VCSELs in the VCSEL array and the array of lens elements in the lens element array are linear or cross-shaped. An optical output element array, characterized in that the lens element array is rotated by 180 degrees around a rotation axis to switch the input port. 15. The optical output element array according to any one of claims 9 to 13, wherein the VCSEL array array in the VCSEL array and the lens element array array in the lens element array are in a square matrix. The optical output element array is configured to rotate the lens element array by 90 degrees around the rotation axis to switch the input port. 16. The light output element array according to claim 14 or 15, wherein the other surface of each lens element in the lens element array corresponding to the lens surface is arranged in each row of the lens elements arranged in a grid pattern. Alternatively, the light output element array is characterized in that it is shared for each column.