JP2003002673A - Apparatus for producing silica glass molding - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus capable of obtaining high-quality mass-produced silica glass moldings at low cost in high yield. SOLUTION: The apparatus for producing the silica glass moldings comprises a silica glass-fusing furnace body for fusing and storing raw material particles of silica glass, an oxyhydrogen flame burner for fusing the raw material of silica glass with the oxyhydrogen flame having its tip part facing into the silica glass-fusing furnace body, a molding nozzle comprising a discharge opening for molding the fused silica glass into a shape of a desired cross section, a dummy member in contact with the fused silica glass at the tip of the discharge opening, and a dummy member-drive mechanism for pulling down the dummy member in the axis direction of the molding nozzle and pulling out a molded fused silica glass. The connection of the molding nozzle to the bottom of the silica glass-fusing furnace body is adapted to be tapered in diameter such that it reduces toward the discharge opening of the molding nozzle.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a quartz glass molded body, and more particularly, to a quartz glass raw material which is made into fused quartz glass by an oxyhydrogen flame melting method, and is continuously transparent to this fused quartz vitrification. The present invention relates to a device capable of manufacturing a quartz glass molded body.

[0002]

2. Description of the Related Art In an optical lithography technique for exposing and transferring a fine pattern of an integrated circuit onto, for example, a silicon wafer, an exposure device called a stepper is used.
As the optical material used for the illumination system or the projection system lens of the stepper, synthetic quartz glass is used because high transmittance in a short wavelength range and ultraviolet resistance are required.

Further, in fine patterning, an etching means having a high aspect ratio is required, and for this reason, high density plasma is being used. That is, a physical / chemical dry etching apparatus using high-density plasma is used as a semiconductor manufacturing means. In addition,
As a film forming means, an ECR plasma CVD apparatus utilizing a physical / chemical action by high density plasma is also known. Further, in an apparatus using this type of plasma, plasma resistance and high purification are required for members exposed to plasma. For this reason, a high-purity quartz glass member, a polysilicon member, or the like is used as the inner wall member of the processing chamber that serves as the plasma irradiation unit.

By the way, a transparent quartz glass member is usually manufactured by means of oxyhydrogen flame melting means. The first means is to use a Bernoulli furnace and drop quartz glass powder from the center of a quartz glass oxyhydrogen burner at a constant speed,
Molten glass is formed while being deposited on the target surface to produce a bullet-shaped quartz glass ingot. After that, the quartz glass ingot is remelted by an electric furnace or the like, and then formed into a prismatic shape or a cylindrical shape, and the formed body is sliced into a required thickness.

The second means is, for example, a silicon compound gas (including a carrier gas of a silicon compound) which is a raw material for forming quartz glass such as silicon tetrachloride, and a combustion gas (oxygen gas and hydrogen gas) for heating / reaction. Is discharged and supplied from the synthesis burner to form glass particles (silica glass particles), and these glass particles are deposited and melted on the target (heat-resistant base material) surface for ingot formation in a flame to form transparent glass. It is a direct synthetic means for producing ingots.
After that, the quartz glass ingot is remelted by an electric furnace or the like, and then formed into a prismatic shape or a cylindrical shape, and the formed body is sliced into a required thickness.

In addition, as an electric melting means, (a) a quartz glass raw material powder or an ingot is melted in an electric furnace in a vacuum or under an inert gas, and the fused quartz glass is injected and filled into a refractory mold. After forming into a prismatic shape or a cylindrical shape, the molded body is sliced into a required thickness. Alternatively, (b) in a refractory melting furnace containing zirconia as a main component, the quartz glass raw material powder or ingot is melted, and the pulling device arranged at the bottom of the melting furnace is lowered, and the fused quartz glass is melted by this pulling operation. There is also a means for pulling out the quartz glass molded body while molding it into a cross-sectional shape corresponding to the bottom opening of the furnace.

[0007]

However, the above
The conventional means for producing a quartz glass molded body has the following practical disadvantages. That is, in the case of the Bernoulli method in the oxyhydrogen flame melting method, the shell-shaped ingot is re-melted in an electric melting furnace, molded into a block shape using a mold, and the molded body is sliced to the required thickness. Therefore, the process up to the quartz glass molded body is complicated, and the manufacturing cost is increased.

Further, also in the case of the flame hydrolysis synthesis method (direct method), a means of producing an ingot of synthetic quartz glass and slicing the ingot to a required thickness can be adopted.
Therefore, as in the case of other means, as a result, problems such as complicated operation, reduced productivity, and increased cost are raised.

On the other hand, when the quartz raw material powder is electrically melted under vacuum or the like, the block-shaped ingot is melted and the fused quartz glass is cast into the mold, so that the cost of the material such as the mold is increased. . In addition, the complexity of the work due to the structure of the melting furnace and the incorporation of the casting operation, etc. was added, and the productivity was greatly impaired.
Not suitable for production.

Further, in the case of another electric melting means, the opening of the bottom of the melting furnace which acts to form a molded body takes a form in which the internal shape of the cross section of the melting furnace is extended as it is. That is,
Since the open end of the melting furnace that forms the fused silica glass reservoir functions as a mold as it is, contact resistance of the side wall surface of the melting furnace body easily acts on the fused silica glass, and It exhibits a tendency to stay compared to the flow of fused silica glass. The retention of the fused silica glass on the side wall surface of the melting furnace body tends to cause foaming and bubbles to remain, and to mix impurities into the molded quartz glass. That is, an inhomogeneous quartz glass molded body containing bubbles and pulsating flow is obtained, and there is a problem in terms of quality and yield. As described above, each of the conventional means has problems in production cost, mass productivity, quality, and the like of synthetic quartz glass, and cannot be said to be practically effective means.

The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a manufacturing apparatus capable of obtaining a high-quality quartz glass molded body at a low cost and with a high yield.

[0012]

According to a first aspect of the present invention, there is provided a quartz glass melting furnace main body for melting and storing quartz glass raw material particles, and a quartz glass raw material whose front end is fed into the quartz glass melting furnace main body. A oxyhydrogen flame burner for forming fused silica glass with an oxyhydrogen flame, and a molding nozzle provided with a discharge opening that is connected to the bottom of the quartz glass melting furnace body and forms the fused silica glass into a desired cross-sectional shape. And a dummy member facing the discharge opening end face of the molding nozzle and in contact with the fused silica glass at the discharge opening end, and a dummy that pulls down the dummy member in the axial direction of the molding nozzle to form the fused quartz glass into a molded body. A manufacturing apparatus of a quartz glass molded body having a member driving mechanism, wherein the molding nozzle is connected to the bottom of the quartz glass melting furnace body at a discharge opening side of the molding nozzle. It is a manufacturing apparatus of the quartz glass molded body, characterized in that made in tapered reduced in diameter.

According to a second aspect of the present invention, in the apparatus for producing a quartz glass molded body according to the first aspect, the inner diameter of the fused silica glass storage portion of the quartz glass melting furnace body is 60 to 100 mm with respect to the discharge opening diameter of the molding nozzle. It is characterized by being set large.

According to a third aspect of the present invention, in the apparatus for producing a quartz glass molded body according to the first or second aspect, an oxyhydrogen flame burner for melting and vitrifying a raw material powder of natural quartz glass for melting and vitrifying an oxyhydrogen flame. It is a burner.

According to a fourth aspect of the present invention, in the apparatus for producing a quartz glass molded body according to the first or second aspect, an oxyhydrogen flame burner for melting and vitrifying causes a gaseous quartz glass raw material to be hydrolyzed and produced. It is characterized by being an oxyhydrogen flame synthesis burner that melts and vitrifies silica glass particles.

According to the first to fourth aspects of the present invention, the fused silica glass material is made into fused silica glass by the oxyhydrogen flame melting means, and the formed body is formed in the process in which the fused silica glass passes through the forming nozzle. It is characterized in that it can be configured. That is, the quartz glass raw material is melted in the melting furnace main body by the oxyhydrogen flame melting means, and the inside of the melting furnace main body is used as a reservoir portion (reserving portion) for the molten quartz glass. On the other hand, a molding nozzle having a desired cross-sectional shape is arranged at the bottom of the reservoir via a tapered connecting portion. The outline is that the accumulated fused silica glass is smoothly flown and is drawn out while being formed into a predetermined cross-sectional shape at the stage of discharging and passing through the forming nozzle opening.

More specifically, the fused silica glass in the melting furnace main body is smoothly connected from the reservoir to the nozzle opening for molding because the reservoir and the molding nozzle for forming a molded body are connected with a taper. Flow. Since the opening of the molding nozzle is selected and set to have a desired cross-sectional shape corresponding to a desired molded product, for example, a prismatic shape, a cylindrical shape, or a plate shape, the desired cross-sectional shape is obtained when the molding nozzle is pulled out. Is molded into. That is, the manufacturing apparatus continuously melts and prepares the quartz glass and molds the quartz glass molded body,
Alternatively, it can be collectively performed.

In the invention of claims 1 to 4, since the melting furnace body and the molding nozzle are required to have heat resistance for fused silica glass, they are made of, for example, zirconia or silicon carbide. In addition, it is preferable that the melting furnace main body which also serves as a reservoir for the fused silica glass has a cross-sectional shape of, for example, a square, a circle, a rectangle or the like, corresponding to the quartz glass molded body to be manufactured. Further, the molding nozzle may be integrally formed and arranged by extending the bottom surface side of the melting furnace main body, or may be separately manufactured and incorporated into the bottom surface side of the melting furnace main body.

However, in any case, the connecting portion between the bottom surface side of the melting furnace main body and the molding nozzle has a taper that is reduced in diameter toward the molding nozzle in order to promote or ensure a smooth flow of the fused silica glass. Is formed. In addition, the inner diameter of the melting furnace main body also serving as a reservoir of the fused quartz glass,
If the opening diameter or width of the molding nozzle is set to be about 60 to 100 mm larger, the flowability of the fused silica glass is facilitated more easily, and the quality of the molded product free of residual bubbles can be improved.

In the invention according to any one of claims 1 to 4, the driving mechanism which is arranged to face the discharge opening end face of the molding nozzle and which contributes to pulling down (or descending) the dummy member in contact with the fused silica glass at the discharge opening end of the molding nozzle is For example, it is an air cylinder or an oil cylinder, and the descending amount or stroke is selected and controlled according to the length of the molded body. Also, the lowering speed (lowering speed) of the dummy member
Is a state in which the volume of the fused silica glass is kept almost constant at all times, for example, in the state of maintaining a 1: 1 relationship, the supply amount of the silica glass raw material powder into the oxyhydrogen flame or the oxyhydrogen flame It is performed in conjunction with the generation, supply, and melting amount of silica fine particles by the hydrolysis of.

According to the first to fourth aspects of the invention, the apparatus for producing a quartz glass molded body is provided with the above-described reduced-diameter molding nozzle, tapered connection with the bottom side of the melting furnace body, and melting in the melting furnace body. Except for points such as a quartz glass reservoir, it basically has the same configuration as that of the conventional oxyhydrogen flame melting means. That is, the oxyhydrogen flame burner that faces the tip in the melting furnace body, and melts the silica glass particles produced by flame hydrolysis by supplying natural quartz glass raw material powder or gaseous quartz glass forming raw material, It has a heat source or a heat insulating means for holding the molten state of the fused quartz glass, and has a configuration similar to that of the oxyhydrogen flame melting type quartz glass manufacturing apparatus.

In the first to fourth inventions, silica particles obtained by hydrolyzing a gaseous quartz glass forming raw material such as silicon tetrachloride (SiCl ₄ ) in an oxyhydrogen flame, or natural quartz glass raw material particles The (powder) is vitrified into vitrified silica in the melting furnace body by an oxyhydrogen flame.
On the other hand, this fused quartz glass is temporarily stored in the melting furnace main body, and is drawn out through an opening that is narrower (diameter reduced) than the melting furnace main body, whereby molding is performed. That is, since the fused silica glass is formed into a molded body in the process of being drawn out through the molding nozzle, the fused silica glass and the molded body are continuously and collectively formed.

[0023]

DETAILED DESCRIPTION OF THE INVENTION Hereinafter, FIG. 1, FIG. 2 (a), (b),
An embodiment will be described with reference to FIGS. 3 and 4A and 4B.

FIG. 1 is a sectional view showing the schematic arrangement of a quartz glass molded body manufacturing apparatus according to the first embodiment. In FIG. 1, 1 is a melting furnace body, 2 is a molding nozzle connected to the bottom surface side of the melting furnace body 1, and 3 is fitly arranged on the outer peripheral surfaces of the melting furnace body 1 and the molding nozzle 2. Is a heat insulating member.

Here, the melting furnace body 1 and the molding nozzle 2
Are made of zirconia, and each has a rectangular cross-sectional configuration whose top surface is shown in FIG. 2 (a) and whose cross section is shown in FIG. 2 (b). That is, the melting furnace main body 1 has an inner diameter of 670 × 260 mm, a wall thickness of about 65 mm, and a length of 5 mm.
00 mm, and the molding nozzle 2 has a total length of 80 mm,
One end surface side (30 mm) has a discharge opening (molding portion) 2a having an inner diameter of 610 × 200 mm, and the other end surface side (50 mm).
mm) has an inner diameter of 670 × 260 mm and is formed with a tapered taper 2b on the discharge opening (molding portion) 2a side.

Further, 4 is an oxyhydrogen burner whose front end faces the inside of the melting furnace body 1 and which drops and supplies natural silica glass raw material powder at a constant speed to form fused silica vitreous, and 5 is the silica glass raw material powder. Opening mechanism 6 for the raw material tank
Is controlled to control the supply of the natural quartz glass raw material powder to the oxyhydrogen burner 4. That is, the basic configuration itself is the same as that of the conventional oxyhydrogen flame melting type quartz glass manufacturing apparatus.

Furthermore, 7 is opposed to the discharge opening (molding portion) 2a of the molding nozzle 2 and contributes to the function as a closing body for accumulating the fused silica glass 8 in the melting furnace body 1, while The dummy member 9 which is separated from the discharge opening 2a and contributes to the action of pulling out the fused silica glass 8 while molding the molten quartz glass 8 is the discharge opening 2 of the molding nozzle 2.
a drive mechanism for separating / contacting the dummy member 7 with respect to a,
For example, a uniaxial cylinder.

Here, the dummy member 7 has a thickness of 5 for example.
It is a rectangular plate having a size of 0 mm and about 610 × 200 mm, and it is desirable that it has the same quality as fused silica glass from the viewpoint that the function as the closing body and the core function of forming the molded body are expected. That is, when the dummy member 7 is made of quartz glass, since the coefficient of thermal expansion is the same, it is possible to avoid peeling or detachment due to a temperature drop during pulling (pulling), and it is possible to easily stabilize the operation.

Next, an example of manufacturing a quartz glass molded body by the above manufacturing apparatus will be described. First, the melting furnace body 1 of the manufacturing apparatus
While the internal temperature was set to about 1850 ° C., a natural silica glass raw material powder was supplied at a rate of 2.0 kg / h and fused silica vitrified by oxyhydrogen flame melting. Thus
At a stage where a certain amount of fused silica glass 8 was stored in the molten glass storage portion in the melting furnace body 1, the dummy member 7 was pulled down by the drive mechanism 9 at a speed of 0.12 mm / min, and the cross-sectional area of 610 × 200 mm. A high quality plate-shaped quartz glass molded body was obtained. Then, a plate having a thickness of about 19 mm was cut out from this quartz glass molded body, and the surface was polished to be processed into a member for semiconductor. As a result, a quartz glass plate with a high yield and high purity was obtained.

That is, the discharge opening 2a of the molding nozzle 7
When the fused silica glass 8 spreads over the entire area and is fused with the dummy member 7, the dummy member 7 is lowered so that the cross-sectional shape is restricted to the shape and size of the discharge opening 2a of the molding nozzle 7, and A plate-shaped quartz glass having good quality without residual fatigue or pulsation was obtained. Here, the length of the compact is determined by the selection / control of the descending amount (or stroke) by the drive mechanism 9.

Further, the lowering speed (lowering speed) of the dummy member 7 is such that the amount of the molten quartz vitrification of the raw material powder of natural quartz glass by oxyhydrogen flame melting is always constant so that the amount of the molten quartz glass 8 accumulated is almost constant. It is done in conjunction with. In the case of this embodiment, the storage amount of the fused silica glass 8 (the height of the fused silica glass 8 of the melting furnace body 1) is 150 to 200 mm.
I kept it around. That is, if the amount of the reservoir exceeds 200 mm, the temperature of the molding nozzle 2 is lowered, the viscous fluidity is lowered, and the pulling operation becomes difficult.
If it is less than m, it tends to be difficult to form a desired shape due to insufficient storage amount.

FIG. 3 is a top view showing the construction of the melting furnace body 1 and the molding nozzle 2 of the apparatus for manufacturing a quartz glass molded body according to the second embodiment. That is, the structure is basically the same as that of the first embodiment except that the melting furnace main body 1 and the molding nozzle 2 are formed in a cylindrical shape. Specifically, the melting furnace body 1 has an inner diameter of 360 mm, a wall thickness of about 65 mm, a length of 500 mm, and the molding nozzle 2
Has a total length of 80 mm and one end surface side (30 mm) has an inner diameter of 30
The discharge opening (molding portion) 2a is opened to 0 mm, the other end surface side (50 mm) is opened to an inner diameter of 360 mm, and the discharge opening (molding portion) 2a side is formed with a tapered taper 2b. .

The temperature inside the melting furnace body 1 of this manufacturing apparatus is set to 1
While setting the temperature to about 850 ° C., the quartz glass raw material powder was supplied at a rate of 3.0 kg / h, and fused quartz vitrified by oxygen flame melting. In this way, when a certain amount of the fused silica glass 8 is stored in the molten glass accumulating portion in the melting furnace body 1, the dummy member 7 is pulled down at a speed of 0.22 mm / min by the driving of the driving mechanism 9, A high quality cylindrical quartz glass molded body having a diameter of 300 mm was obtained.

That is, the discharge opening 2a of the molding nozzle 7
When the fused silica glass spreads over and is fused with the dummy member 7, the dummy member 7 is lowered to have a cross-sectional shape regulated to the shape and size of the discharge opening 2a of the molding nozzle 7, and A good-quality cylindrical quartz glass without residual fatigue or pulsation was obtained. Then, a plate having a thickness of about 19 mm was cut out from this quartz glass molded body, and the surface was polished to be processed into a member for semiconductor. As a result, a quartz glass plate with a high yield and high purity was obtained.

FIGS. 4 (a) and 4 (b) are a top view and a cross-sectional view showing the structures of the melting furnace body 1 and the molding nozzle 2 of the quartz glass molded body manufacturing apparatus according to the third embodiment. That is, the melting furnace main body 1 and the molding nozzle 2 are configured in a rectangular tube shape, and basically have the same structure as in the case of the first embodiment. Specifically, the melting furnace body 1 has an inner diameter of 570 × 80 mm, a wall thickness of about 65 mm, and a length of 500.
mm, the total length of the molding nozzle 2 is 80 mm, and one end surface side (30 mm) is a discharge opening (molding portion) 2a having an inner diameter of 510 × 20 mm, and the other end surface side (50 mm).
Has an inner diameter of 570 × 80 and a discharge opening (molding part)
It is formed with a taper 2b having a reduced diameter on the 2a side.

The temperature in the melting furnace body 1 of this manufacturing apparatus is set to 18
The quartz glass raw material powder is set to about 50 ° C.
It is supplied at a rate of 4 kg / h and by oxyhydrogen flame melting,
It was made into fused quartz glass. In this way, when a certain amount of fused silica glass 8 is stored in the molten glass storage portion in the melting furnace body 1, the dummy member 7 is driven by the drive mechanism 9.
At a speed of 1.8 mm / min to reduce the cross-sectional area to 5
A plate-shaped quartz glass molded body having a length of 10 × 20 mm and a length of 1000 mm was obtained.

That is, when the fused silica glass spreads over the discharge opening 2a of the molding nozzle 7 and fuses with the dummy member 7, the dummy member 7 is lowered to
A plate-shaped quartz glass having a cross-sectional shape restricted by the shape and size of the discharge opening 2a of the molding nozzle 7 and having good quality without residual fatigue or pulsating flow was obtained. Then, when the surface of this quartz glass plate was polished and processed into a member for semiconductor, a quartz glass plate having a high yield and maintaining high purity was obtained.

In the above description, the manufacturing apparatus according to each of the embodiments has been described with reference to an example of manufacturing a quartz glass molded body by the so-called Bernoulli method, but a direct method of oxyhydrogen melting means can also be carried out. That is, while the temperature in the melting furnace body 1 is set to about 1850 ° C., a glass forming raw material (SiCl ₄ ) is supplied and hydrolyzed in an oxyhydrogen flame, and the generated silica particles are melted at a constant rate. Turn into Thus
When a certain amount of the fused silica glass 8 is stored in the molten glass accumulating portion in the melting furnace main body 1, the dummy member 7 is pulled down at a constant speed by driving the driving mechanism 9 to open the opening of the molding nozzle 2. A quartz glass molded body having a cross section corresponding to 2a can be obtained.

For comparison, in the quartz glass molded body manufacturing apparatus according to the first embodiment, the discharge opening 2a of the molding nozzle 2 is set to have the same size and shape as the inner diameter of the melting furnace body 1, When a quartz glass molded body was manufactured under the same conditions as in the example, the drawn glass was stretched, and a plate-shaped body having a predetermined cross-sectional shape could not be obtained. That is, in this case, the elongation of the glass became violent with the elapse of the pulling down time, and finally, the fused silica glass could not be formed into a pull-down molded body. When the inner diameter of the melting furnace body 1 (the diameter of the molten glass reservoir) is set to be significantly larger than the discharge opening 2a of the molding nozzle 2, streak-like bubbles tend to be generated in the down-molded glass. is there.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention. For example, the structure / material, size / shape, etc. of the melting furnace main body and the molding nozzle can be arbitrarily selected and set according to the production capacity of the quartz glass molded body.

[0041]

According to the inventions of claims 1 to 4, the production and melting of quartz glass and the forming of the fused quartz glass into a molded body can be carried out by a minimum process. It is possible to obtain a quartz glass molded body by an integral and continuous process of melting the raw material particles of the quartz glass and further pulling down and passing through the molding nozzle functioning as a mold for the molten quartz glass.

That is, although the shape of the discharge opening of the molding nozzle is restricted, productivity is improved by eliminating the need for complicated furnaces and setup work, and by greatly simplifying the quartz glass manufacturing and molding process. And the cost can be easily reduced. Moreover, since the molded body maintains high purity and the generation of residual bubbles and pulsating flow is eliminated, it is possible to provide a high-quality quartz glass molded body suitable for a semiconductor manufacturing member with a high yield.

[Brief description of drawings]

FIG. 1 is a sectional view showing a schematic configuration of a quartz glass molded body manufacturing apparatus according to a first embodiment.

FIG. 2 shows a configuration of a melting furnace main body and a molding nozzle of a quartz glass molded body manufacturing apparatus according to a first embodiment,
(A) is a top view and (b) is a sectional view.

FIG. 3 is a top view showing a configuration of a melting furnace main body and a molding nozzle of another quartz glass molded body manufacturing apparatus according to the second embodiment.

FIG. 4 shows the configurations of a melting furnace body and a molding nozzle of a quartz glass molded body manufacturing apparatus according to a third embodiment,
(A) is a top view and (b) is a sectional view.

[Explanation of symbols]

1 ... Main body of melting furnace 2 ... Molding nozzle 2a ... Discharge opening 2b ... taper 3 ... Insulation material 4 oxyhydrogen flame burner 5 ... Quartz glass raw material tank 6 ... Opening / closing mechanism 7: Dummy member 8: Dummy member drive mechanism

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) G02B 1/00 G02B 1/00 F term (reference) 4G014 AH12 AH15 AH16 4K046 AA04 BA08 CD07 CE09 DA09 4K055 AA04 BA05 JA00 JA13

Claims (4)

[Claims] 1. A quartz glass melting furnace main body for melting and storing quartz glass raw material particles, and an acid for melting and vitrifying a quartz glass raw material whose front end is fed into the quartz glass melting furnace main body with an oxyhydrogen flame. A hydrogen flame burner, a molding nozzle connected to the bottom of the quartz glass melting furnace body and having a discharge opening for shaping the fused silica glass into a desired cross-sectional shape, and a discharge opening end face of the molding nozzle. A quartz glass molded body having a dummy member which is arranged oppositely and is in contact with the molten quartz glass at the discharge opening end, and a dummy member drive mechanism which pulls down the dummy member in the axial direction of the molding nozzle to draw the molten quartz glass into a molded body. In the manufacturing apparatus, the molding nozzle is connected to the bottom of the quartz glass melting furnace body with a taper that reduces the diameter toward the discharge opening side of the molding nozzle. An apparatus for the production of a silica glass shaped body characterized in that there. 2. The fused silica glass reservoir inner diameter of the quartz glass melting furnace main body is 60 to the discharge opening diameter of the molding nozzle.
The apparatus for manufacturing a quartz glass molded body according to claim 1, wherein the size is set to be 100 mm larger. 3. The production of the quartz glass molding according to claim 1, wherein the oxyhydrogen flame burner for melting and vitrifying is an oxyhydrogen flame burner for melting and vitrifying natural quartz glass raw material powder. apparatus. 4. The molten hydrogenated oxyhydrogen flame burner is an oxyhydrogen flame synthesis burner which hydrolyzes a silica glass raw material in a gaseous state to melt and vitrify the produced silica glass particles. The apparatus for manufacturing a quartz glass molded body according to claim 1 or 2.