JP2002540430A - 光励起型発振器の周波数変調による光ファイバー振動センサ - Google Patents
光励起型発振器の周波数変調による光ファイバー振動センサInfo
- Publication number
- JP2002540430A JP2002540430A JP2000608184A JP2000608184A JP2002540430A JP 2002540430 A JP2002540430 A JP 2002540430A JP 2000608184 A JP2000608184 A JP 2000608184A JP 2000608184 A JP2000608184 A JP 2000608184A JP 2002540430 A JP2002540430 A JP 2002540430A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- oscillator
- light
- frequency modulated
- modulated light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 239000000835 fiber Substances 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 6
- 230000001133 acceleration Effects 0.000 claims description 19
- 230000004044 response Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims 2
- 230000035945 sensitivity Effects 0.000 description 13
- 239000000725 suspension Substances 0.000 description 12
- 238000001228 spectrum Methods 0.000 description 10
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- 230000003287 optical effect Effects 0.000 description 5
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- 238000005259 measurement Methods 0.000 description 4
- 238000013016 damping Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001845 vibrational spectrum Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/281,388 | 1999-03-30 | ||
| US09/281,388 US6246638B1 (en) | 1999-03-30 | 1999-03-30 | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
| PCT/US2000/004495 WO2000058737A1 (en) | 1999-03-30 | 2000-02-22 | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002540430A true JP2002540430A (ja) | 2002-11-26 |
| JP2002540430A5 JP2002540430A5 (enExample) | 2006-12-21 |
Family
ID=23077089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000608184A Withdrawn JP2002540430A (ja) | 1999-03-30 | 2000-02-22 | 光励起型発振器の周波数変調による光ファイバー振動センサ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6246638B1 (enExample) |
| EP (1) | EP1166128A1 (enExample) |
| JP (1) | JP2002540430A (enExample) |
| CA (1) | CA2366971A1 (enExample) |
| WO (1) | WO2000058737A1 (enExample) |
Families Citing this family (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6246638B1 (en) * | 1999-03-30 | 2001-06-12 | Honeywell International Inc. | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
| US6341259B1 (en) * | 1999-06-04 | 2002-01-22 | Interscience, Inc. | Microsystems integrated testing and characterization system and method |
| US7073384B1 (en) * | 1999-08-23 | 2006-07-11 | Stevens Institute Of Technology | Method and apparatus for remote measurement of vibration and properties of objects |
| US7157649B2 (en) * | 1999-12-23 | 2007-01-02 | New Transducers Limited | Contact sensitive device |
| GB0116310D0 (en) * | 2001-07-04 | 2001-08-29 | New Transducers Ltd | Contact sensitive device |
| US6894787B2 (en) * | 2001-12-21 | 2005-05-17 | Honeywell International Inc. | Optical pressure sensor |
| US6871149B2 (en) * | 2002-12-06 | 2005-03-22 | New Transducers Limited | Contact sensitive device |
| US6873752B2 (en) * | 2003-08-08 | 2005-03-29 | Siemens Westinghouse Power Corporation | Tuneable fiber optic sensor |
| TWI233097B (en) * | 2003-09-04 | 2005-05-21 | Lite On It Corp | Device capable of detecting vibration/shock |
| WO2006034377A2 (en) * | 2004-09-22 | 2006-03-30 | The Board Of Trustees Of The University Of Illinois | Light powered microactuator, microfluidic dispenser and retinal prosthesis |
| US7499604B1 (en) | 2004-12-12 | 2009-03-03 | Burns David W | Optically coupled resonant pressure sensor and process |
| US7176048B1 (en) | 2004-12-12 | 2007-02-13 | Burns David W | Optically coupled sealed-cavity resonator and process |
| US7443509B1 (en) | 2004-12-12 | 2008-10-28 | Burns David W | Optical and electronic interface for optically coupled resonators |
| US7605391B2 (en) * | 2004-12-12 | 2009-10-20 | Burns David W | Optically coupled resonator |
| US7379629B1 (en) | 2004-12-12 | 2008-05-27 | Burns David W | Optically coupled resonant pressure sensor |
| KR100755691B1 (ko) * | 2005-06-28 | 2007-09-05 | 삼성전자주식회사 | 이동 노드의 핸드오버 수행 방법 및 이를 위한 네트워크 시스템 |
| US8094841B2 (en) * | 2007-01-17 | 2012-01-10 | The Regents Of The University Of California | Apparatus and method using capacitive detection with inherent self-calibration |
| US20090062913A1 (en) * | 2007-08-30 | 2009-03-05 | Laxminarayana Saggere | Light powered microactuator, microfluidic dispenser and retinal prosthesis |
| US7589329B1 (en) | 2008-04-23 | 2009-09-15 | Honeywell International Inc. | Systems and methods for remote optical sensing |
| US8076737B2 (en) * | 2008-05-20 | 2011-12-13 | Honeywell International Inc. | Systems and methods for acoustic sensing |
| CN101893475B (zh) * | 2010-03-11 | 2015-11-25 | 上海华魏光纤传感技术有限公司 | 一种基于光纤延时线的分布式光纤振动传感系统 |
| US8899115B2 (en) * | 2011-04-20 | 2014-12-02 | United Technologies Corporation | Method and system for locating a laser vibrometer during non-contact scanning |
| US9226792B2 (en) | 2012-06-12 | 2016-01-05 | Medtronic Advanced Energy Llc | Debridement device and method |
| USD691718S1 (en) | 2012-08-23 | 2013-10-15 | Gyrus Acmi, Inc. | Microdebrider |
| US8956355B2 (en) | 2012-11-30 | 2015-02-17 | Gyrus Acmi, Inc. | Integrated blade assembly and identification circuit |
| US9358036B2 (en) | 2013-03-12 | 2016-06-07 | Gyrus Acmi, Inc. | Blade positioning device |
| US9404735B2 (en) | 2013-03-15 | 2016-08-02 | United Technologies Corporation | Multiple laser time of arrival probe |
| US9599504B2 (en) | 2013-07-30 | 2017-03-21 | Raytheon Company | Fiber optic vibration detection |
| US10107839B1 (en) * | 2014-06-12 | 2018-10-23 | Fiber Optic Sensor Systems Technology Corporation | Fiber optic sensor system for detection of electric currents and other phenomena associated with geomagnetic disturbances |
| US20170212273A1 (en) * | 2014-07-17 | 2017-07-27 | Schlumberger Technology Corporation | A borehole sensing seismic fiber optic tool |
| US9387050B2 (en) | 2014-09-15 | 2016-07-12 | Gyrus Acmi Inc. | Surgical system having detachable component and state detection circuit for detection of state of attachment of detachable component |
| US10188456B2 (en) | 2015-02-18 | 2019-01-29 | Medtronic Xomed, Inc. | Electrode assembly for RF energy enabled tissue debridement device |
| US10376302B2 (en) | 2015-02-18 | 2019-08-13 | Medtronic Xomed, Inc. | Rotating electrical connector for RF energy enabled tissue debridement device |
| US11207130B2 (en) | 2015-02-18 | 2021-12-28 | Medtronic Xomed, Inc. | RF energy enabled tissue debridement device |
| US9820825B2 (en) | 2015-02-20 | 2017-11-21 | Gyrus Acmi Inc. | Surgical system having plurality of detachably attachable components and circuit for detecting target states of detachably attachable components and performing control based on detected target states, and method for providing surgical system |
| EP3647795B1 (en) * | 2018-11-02 | 2021-07-14 | General Electric Company | Mems accelerometer with anti-reflective and reflective coatings |
| US11079227B2 (en) | 2019-04-01 | 2021-08-03 | Honeywell International Inc. | Accelerometer system enclosing gas |
| US11119116B2 (en) | 2019-04-01 | 2021-09-14 | Honeywell International Inc. | Accelerometer for determining an acceleration based on modulated optical signals |
| US10705112B1 (en) | 2019-04-22 | 2020-07-07 | Honeywell International Inc. | Noise rejection for optomechanical devices |
| US10956768B2 (en) | 2019-04-22 | 2021-03-23 | Honeywell International Inc. | Feedback cooling and detection for optomechanical devices |
| US11408911B2 (en) | 2019-07-17 | 2022-08-09 | Honeywell International Inc. | Optomechanical structure with corrugated edge |
| US11119114B2 (en) | 2019-07-17 | 2021-09-14 | Honeywell International Inc. | Anchor structure for securing optomechanical structure |
| US11372019B2 (en) | 2019-08-13 | 2022-06-28 | Honeywell International Inc. | Optomechanical resonator stabilization for optomechanical devices |
| US11408912B2 (en) | 2019-08-13 | 2022-08-09 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices |
| US11150264B2 (en) | 2019-08-13 | 2021-10-19 | Honeywell International Inc. | Feedthrough rejection for optomechanical devices using elements |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE414672B (sv) | 1978-11-16 | 1980-08-11 | Asea Ab | Fiberoptiskt don for metning av fysikaliska storheter sasom kraft, tojning, tryck, acceleration och temperatur |
| US4446543A (en) * | 1979-07-02 | 1984-05-01 | The United States Of America As Represented By The Secretary Of The Navy | Optical resonator single-mode fiber hydrophone |
| US4743752A (en) * | 1984-05-07 | 1988-05-10 | The Foxboro Company | Fiber optic remote sensor |
| GB8530809D0 (en) * | 1985-12-13 | 1986-01-22 | Gen Electric Co Plc | Sensor |
| US4892406A (en) * | 1988-01-11 | 1990-01-09 | United Technologies Corporation | Method of and arrangement for measuring vibrations |
| US4928527A (en) * | 1988-04-29 | 1990-05-29 | At&T Bell Laboratories | Method and device for nondestructive evaluation |
| US4972076A (en) * | 1988-09-29 | 1990-11-20 | Schlumberger Industries Limited | Solid state sensor with dual resonant vibratable members |
| GB9105799D0 (en) | 1991-03-19 | 1991-06-12 | Lucas Ind Plc | Vibrating sensor |
| FR2680574B1 (fr) * | 1991-08-23 | 1996-04-12 | Schlumberger Ind Sa | Microcapteur a poutre vibrante compense en temperature. |
| WO1994011708A1 (en) * | 1992-11-06 | 1994-05-26 | Martin Marietta Corporation | Interferometric optical sensor read-out system |
| US5379639A (en) | 1992-12-10 | 1995-01-10 | Alliedsignal Inc. | Combined force transducer and temperature sensor |
| US5396798A (en) | 1993-04-15 | 1995-03-14 | Honeywell Inc. | Mechanical resonance, silicon accelerometer |
| US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
| US5581930A (en) | 1993-07-13 | 1996-12-10 | Langer; Alexander G. | Remote activity sensing system |
| US5589937A (en) | 1994-10-31 | 1996-12-31 | The United States Of America As Represented By The Secretary Of The Navy | Fiber optic self-multiplexing amplified ring transducer and force transfer sensor with pressure compensation |
| DE19514852C2 (de) * | 1995-04-26 | 1997-07-03 | Deutsche Forsch Luft Raumfahrt | Verfahren und Anordnung zur Beschleunigungs- und Vibrationsmessung |
| US5808210A (en) | 1996-12-31 | 1998-09-15 | Honeywell Inc. | Thin film resonant microbeam absolute pressure sensor |
| US5917226A (en) | 1997-10-24 | 1999-06-29 | Stmicroelectronics, Inc. | Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods |
| US6031944A (en) * | 1997-12-30 | 2000-02-29 | Honeywell Inc. | High temperature resonant integrated microstructure sensor |
| US6246638B1 (en) * | 1999-03-30 | 2001-06-12 | Honeywell International Inc. | Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators |
-
1999
- 1999-03-30 US US09/281,388 patent/US6246638B1/en not_active Expired - Fee Related
-
2000
- 2000-02-22 EP EP00915830A patent/EP1166128A1/en not_active Withdrawn
- 2000-02-22 JP JP2000608184A patent/JP2002540430A/ja not_active Withdrawn
- 2000-02-22 WO PCT/US2000/004495 patent/WO2000058737A1/en not_active Ceased
- 2000-02-22 CA CA002366971A patent/CA2366971A1/en not_active Abandoned
- 2000-10-25 US US09/695,584 patent/US6763723B1/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2000058737A1 (en) | 2000-10-05 |
| US6763723B1 (en) | 2004-07-20 |
| EP1166128A1 (en) | 2002-01-02 |
| CA2366971A1 (en) | 2000-10-05 |
| US6246638B1 (en) | 2001-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061017 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061017 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20081001 |