JP2002525851A5 - - Google Patents

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Publication number
JP2002525851A5
JP2002525851A5 JP2000570829A JP2000570829A JP2002525851A5 JP 2002525851 A5 JP2002525851 A5 JP 2002525851A5 JP 2000570829 A JP2000570829 A JP 2000570829A JP 2000570829 A JP2000570829 A JP 2000570829A JP 2002525851 A5 JP2002525851 A5 JP 2002525851A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000570829A
Other languages
Japanese (ja)
Other versions
JP2002525851A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP1999/006416 external-priority patent/WO2000016392A1/en
Publication of JP2002525851A publication Critical patent/JP2002525851A/ja
Publication of JP2002525851A5 publication Critical patent/JP2002525851A5/ja
Pending legal-status Critical Current

Links

JP2000570829A 1998-09-11 1999-08-31 バイポーラトランジスタを有する半導体デバイスを製造する方法 Pending JP2002525851A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP98203054 1998-09-11
EP98203054.6 1998-09-11
PCT/EP1999/006416 WO2000016392A1 (en) 1998-09-11 1999-08-31 Method of manufacturing a semiconductor device with a bipolar transistor

Publications (2)

Publication Number Publication Date
JP2002525851A JP2002525851A (ja) 2002-08-13
JP2002525851A5 true JP2002525851A5 (US20050276830A1-20051215-C00018.png) 2006-11-02

Family

ID=8234106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000570829A Pending JP2002525851A (ja) 1998-09-11 1999-08-31 バイポーラトランジスタを有する半導体デバイスを製造する方法

Country Status (5)

Country Link
US (1) US6150224A (US20050276830A1-20051215-C00018.png)
EP (1) EP1048066B1 (US20050276830A1-20051215-C00018.png)
JP (1) JP2002525851A (US20050276830A1-20051215-C00018.png)
DE (1) DE69935967T2 (US20050276830A1-20051215-C00018.png)
WO (1) WO2000016392A1 (US20050276830A1-20051215-C00018.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002531947A (ja) * 1998-11-13 2002-09-24 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ バイポーラトランジスタからなる半導体装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0378794A1 (en) * 1989-01-18 1990-07-25 International Business Machines Corporation Vertical bipolar transistor structure and method of manufacturing
US5117271A (en) * 1990-12-07 1992-05-26 International Business Machines Corporation Low capacitance bipolar junction transistor and fabrication process therfor
US5106767A (en) * 1990-12-07 1992-04-21 International Business Machines Corporation Process for fabricating low capacitance bipolar junction transistor
JP2582519B2 (ja) * 1992-07-13 1997-02-19 インターナショナル・ビジネス・マシーンズ・コーポレイション バイポーラ・トランジスタおよびその製造方法
DE19609933A1 (de) * 1996-03-14 1997-09-18 Daimler Benz Ag Verfahren zur Herstellung eines Heterobipolartransistors

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