JP2002523764A - 干渉法光測定に基づく薄膜ひずみセンサ - Google Patents
干渉法光測定に基づく薄膜ひずみセンサInfo
- Publication number
- JP2002523764A JP2002523764A JP2000567901A JP2000567901A JP2002523764A JP 2002523764 A JP2002523764 A JP 2002523764A JP 2000567901 A JP2000567901 A JP 2000567901A JP 2000567901 A JP2000567901 A JP 2000567901A JP 2002523764 A JP2002523764 A JP 2002523764A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- layer
- strain
- sensor according
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract description 11
- 238000005259 measurement Methods 0.000 title description 6
- -1 polysiloxane Polymers 0.000 claims abstract description 24
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 16
- 239000004642 Polyimide Substances 0.000 claims abstract description 14
- 229920001721 polyimide Polymers 0.000 claims abstract description 14
- 239000002245 particle Substances 0.000 claims abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 6
- 239000002033 PVDF binder Substances 0.000 claims description 4
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 4
- 239000004809 Teflon Substances 0.000 claims description 4
- 229920006362 Teflon® Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 229920000515 polycarbonate Polymers 0.000 claims description 4
- 229920000728 polyester Polymers 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 229920001155 polypropylene Polymers 0.000 claims description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 4
- 239000002861 polymer material Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 239000011521 glass Substances 0.000 abstract description 2
- 239000000945 filler Substances 0.000 abstract 1
- 230000004044 response Effects 0.000 description 16
- 238000002835 absorbance Methods 0.000 description 7
- 239000000835 fiber Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9798998P | 1998-08-26 | 1998-08-26 | |
| US60/097,989 | 1998-08-26 | ||
| PCT/US1999/019601 WO2000012960A1 (en) | 1998-08-26 | 1999-08-25 | Thin film strain sensors based on interferometric optical measurements |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002523764A true JP2002523764A (ja) | 2002-07-30 |
Family
ID=22266087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000567901A Pending JP2002523764A (ja) | 1998-08-26 | 1999-08-25 | 干渉法光測定に基づく薄膜ひずみセンサ |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1135667A1 (ko) |
| JP (1) | JP2002523764A (ko) |
| KR (1) | KR20010072920A (ko) |
| CN (1) | CN1314990A (ko) |
| AU (1) | AU745103B2 (ko) |
| CA (1) | CA2341166A1 (ko) |
| WO (1) | WO2000012960A1 (ko) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003025035A2 (de) | 2001-09-14 | 2003-03-27 | Merck Patent Gmbh | Formkörper aus kern-mantel-partikeln |
| DE10204339A1 (de) | 2002-02-01 | 2003-08-07 | Merck Patent Gmbh | Dehnungs- und Stauchungssensor |
| DE10227071A1 (de) | 2002-06-17 | 2003-12-24 | Merck Patent Gmbh | Verbundmaterial enthaltend Kern-Mantel-Partikel |
| US7645422B2 (en) * | 2003-04-11 | 2010-01-12 | Therm-O-Disc, Incorporated | Vapor sensor and materials therefor |
| CN100442007C (zh) * | 2003-08-21 | 2008-12-10 | 台达电子工业股份有限公司 | 量测薄膜应变的方法及其装置 |
| CN101198851B (zh) * | 2005-05-25 | 2010-04-14 | 皇家墨尔本理工大学 | 聚合物应变传感器 |
| ITBO20070587A1 (it) * | 2007-08-13 | 2009-02-14 | Portu Goffredo De | Metodo per misurare tensioni in una struttura o in un componente di una struttura in esercizio |
| WO2016161104A1 (en) | 2015-04-01 | 2016-10-06 | Vayavision, Ltd. | Generating 3-dimensional maps of a scene using passive and active measurements |
| ITUA20162508A1 (it) * | 2016-04-12 | 2017-10-12 | Safecertifiedstructure Ingegneria S R L | Metodo e dispositivo d’indagine per la misurazione di tensioni in una struttura di agglomerato |
| US10445928B2 (en) | 2017-02-11 | 2019-10-15 | Vayavision Ltd. | Method and system for generating multidimensional maps of a scene using a plurality of sensors of various types |
| CN110307921B (zh) * | 2019-07-02 | 2021-01-22 | 运城学院 | 一种压力传感器 |
| CA3125618C (en) | 2020-07-21 | 2023-05-23 | Leddartech Inc. | Beam-steering device particularly for lidar systems |
| CA3125716C (en) | 2020-07-21 | 2024-04-09 | Leddartech Inc. | Systems and methods for wide-angle lidar using non-uniform magnification optics |
| WO2022016276A1 (en) | 2020-07-21 | 2022-01-27 | Leddartech Inc. | Beam-steering device particularly for lidar systems |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224502A (ja) * | 1988-07-12 | 1990-01-26 | Dainippon Screen Mfg Co Ltd | 膜厚測定方法 |
-
1999
- 1999-08-25 EP EP99943961A patent/EP1135667A1/en not_active Withdrawn
- 1999-08-25 JP JP2000567901A patent/JP2002523764A/ja active Pending
- 1999-08-25 CA CA002341166A patent/CA2341166A1/en not_active Abandoned
- 1999-08-25 AU AU56949/99A patent/AU745103B2/en not_active Ceased
- 1999-08-25 CN CN99810062A patent/CN1314990A/zh active Pending
- 1999-08-25 KR KR1020017002341A patent/KR20010072920A/ko not_active Application Discontinuation
- 1999-08-25 WO PCT/US1999/019601 patent/WO2000012960A1/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1135667A1 (en) | 2001-09-26 |
| AU745103B2 (en) | 2002-03-14 |
| WO2000012960A1 (en) | 2000-03-09 |
| CA2341166A1 (en) | 2000-03-09 |
| AU5694999A (en) | 2000-03-21 |
| KR20010072920A (ko) | 2001-07-31 |
| CN1314990A (zh) | 2001-09-26 |
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