|
US6450755B1
(en)
*
|
1998-07-10 |
2002-09-17 |
Equipe Technologies |
Dual arm substrate handling robot with a batch loader
|
|
US6350097B1
(en)
*
|
1999-04-19 |
2002-02-26 |
Applied Materials, Inc. |
Method and apparatus for processing wafers
|
|
US6663333B2
(en)
*
|
2001-07-13 |
2003-12-16 |
Axcelis Technologies, Inc. |
Wafer transport apparatus
|
|
US20030202865A1
(en)
*
|
2002-04-25 |
2003-10-30 |
Applied Materials, Inc. |
Substrate transfer apparatus
|
|
US7891935B2
(en)
|
2002-05-09 |
2011-02-22 |
Brooks Automation, Inc. |
Dual arm robot
|
|
US6789793B2
(en)
*
|
2002-05-24 |
2004-09-14 |
Heidelberger Druckmaschinen Ag |
Rotary signature transport device
|
|
US7384907B2
(en)
*
|
2002-12-13 |
2008-06-10 |
Duke University |
Method of treating infection with ABl tyrosine kinase inhibitors
|
|
US7458763B2
(en)
|
2003-11-10 |
2008-12-02 |
Blueshift Technologies, Inc. |
Mid-entry load lock for semiconductor handling system
|
|
WO2005048313A2
(en)
*
|
2003-11-10 |
2005-05-26 |
Blueshift Technologies, Inc. |
Methods and systems for handling workpieces in a vacuum-based semiconductor handling system
|
|
US10086511B2
(en)
|
2003-11-10 |
2018-10-02 |
Brooks Automation, Inc. |
Semiconductor manufacturing systems
|
|
US20070269297A1
(en)
|
2003-11-10 |
2007-11-22 |
Meulen Peter V D |
Semiconductor wafer handling and transport
|
|
US20050255953A1
(en)
*
|
2004-05-12 |
2005-11-17 |
Timothy Puckett |
Band Drive System for Telescopes, LIDAR and Other Instruments
|
|
CN101023429B
(zh)
*
|
2004-07-02 |
2010-09-01 |
斯特拉斯鲍公司 |
用于处理晶片的方法和系统
|
|
US8052030B2
(en)
|
2005-01-24 |
2011-11-08 |
The Boeing Company |
Apparatus for friction stir welding using spindle-in-spindle
|
|
US20100108709A1
(en)
|
2004-12-30 |
2010-05-06 |
Plas-Pak Industries |
Cartridge delivery system utilizing film bags
|
|
US9517488B2
(en)
|
2004-12-30 |
2016-12-13 |
Plas-Pak Industries, Inc. |
Component delivery system utilizing film bags
|
|
US8167522B2
(en)
*
|
2005-03-30 |
2012-05-01 |
Brooks Automation, Inc. |
Substrate transport apparatus with active edge gripper
|
|
TWI342597B
(en)
*
|
2005-11-21 |
2011-05-21 |
Applied Materials Inc |
Methods and apparatus for transferring substrates during electronic device manufacturing
|
|
US7946800B2
(en)
*
|
2007-04-06 |
2011-05-24 |
Brooks Automation, Inc. |
Substrate transport apparatus with multiple independently movable articulated arms
|
|
SG147353A1
(en)
|
2007-05-07 |
2008-11-28 |
Mfg Integration Technology Ltd |
Apparatus for object processing
|
|
CN103476551B
(zh)
|
2010-11-10 |
2016-08-10 |
布鲁克斯自动化公司 |
双臂机器人
|
|
WO2012125572A2
(en)
*
|
2011-03-11 |
2012-09-20 |
Brooks Automation, Inc. |
Substrate processing tool
|
|
CN104428884B
(zh)
*
|
2012-07-05 |
2017-10-24 |
应用材料公司 |
吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法
|
|
KR102503229B1
(ko)
*
|
2013-01-18 |
2023-02-23 |
퍼시몬 테크놀로지스 코포레이션 |
이송 장치
|
|
US10224232B2
(en)
|
2013-01-18 |
2019-03-05 |
Persimmon Technologies Corporation |
Robot having two arms with unequal link lengths
|
|
US9149936B2
(en)
|
2013-01-18 |
2015-10-06 |
Persimmon Technologies, Corp. |
Robot having arm with unequal link lengths
|
|
ES2431263B1
(es)
*
|
2013-04-23 |
2014-09-10 |
Barnizados Industriales, S.A. |
Placa para falso techo o pared, procedimiento de fabricación de dicha placa
|
|
TWI672191B
(zh)
*
|
2013-10-16 |
2019-09-21 |
美商應用材料股份有限公司 |
帶有裝設樞紐手臂之化學機械拋光機的系統及方法
|
|
CN104795347B
(zh)
*
|
2014-01-22 |
2018-05-04 |
北京北方华创微电子装备有限公司 |
晶圆支撑装置和去气工艺腔室
|
|
KR102567510B1
(ko)
|
2015-03-12 |
2023-08-17 |
퍼시몬 테크놀로지스 코포레이션 |
종속화된 엔드 이펙터 움직임을 가진 로봇
|
|
US10103046B2
(en)
*
|
2015-04-20 |
2018-10-16 |
Applied Materials, Inc. |
Buffer chamber wafer heating mechanism and supporting robot
|
|
KR20240095478A
(ko)
*
|
2017-02-15 |
2024-06-25 |
퍼시몬 테크놀로지스 코포레이션 |
다수의 엔드-이펙터로써 재료를 핸들링하는 장치
|
|
US10629472B2
(en)
|
2017-08-17 |
2020-04-21 |
Persimmon Technologies Corporation |
Material handling robot
|
|
CN107717959B
(zh)
*
|
2017-11-07 |
2020-08-14 |
大连理工大学 |
一种部分解耦的scara高速并联机械手
|
|
CN110652357B
(zh)
|
2019-09-19 |
2020-06-12 |
中国科学院自动化研究所 |
双导丝或球囊的血管介入器械操控装置
|
|
US11679046B2
(en)
|
2019-11-04 |
2023-06-20 |
GE Precision Healthcare LLC |
Method and system for providing dual axes motions using a single drive
|
|
US11235935B2
(en)
|
2020-01-23 |
2022-02-01 |
Brooks Automation, Inc. |
Substrate transport apparatus
|
|
TWI767556B
(zh)
*
|
2021-02-08 |
2022-06-11 |
鴻勁精密股份有限公司 |
載具機構及其應用之作業設備
|
