JP2002371967A - Low vibration piezopump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce vibrations generated from a pump and a pipe connected to the pump repeating suction and discharge as a function of a pump and influencing on the pipe connected to the pump to generate vibration as the pump is downsized. SOLUTION: Two diaphragms by piezoelements are disposed in a pump chamber. When each of the diaphragm 5a and the diaphragm 5b is actuated, the diaphragm 5b conducts suction while the diaphragm 5a conducts discharge. By actuating each diaphragm with a phase difference of 180 deg., vibrations of the diaphragms are absorbed each other, and vibrations of the whole of the pump and the pipe connected to the pump are reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pump having a diaphragm using a piezo element in a pump and using a diaphragm driven by the piezo element for suction and discharge of the pump.

[0002]

2. Description of the Related Art A pump using a piezo element for a diaphragm vibrates a diaphragm by applying a voltage to the piezo element, and performs suction and discharge by changing the capacity in the pump. Also, the size can be reduced as compared with a pump using a motor or the like.

Further, as described in Japanese Patent Application Laid-Open No. H11-31184, a small-sized pump is provided in which a plurality of diaphragms are operated in cooperation to increase a discharge flow rate.

[0004]

The pump itself repeats suction and discharge due to its function. However, as the size of the pump is reduced as described above, the pipe connected to the pump is affected. To cause vibration. Further, if the discharge flow rate is increased as in the pump described in JP-A-11-31184, the effect is large. In the future, as pumps become smaller,
A device using the pump may be small, and vibration generated by the pump and a pipe connected to the pump becomes a problem.

An object of the present invention is to reduce vibration of a small pump using a diaphragm driven by a piezo element for suction and discharge of the pump.

[0006]

In order to achieve the above object, a small pump using a diaphragm which is provided with a diaphragm using a piezo element in the pump and which is driven by the piezo element for suction and discharge of the pump is provided. A plurality of diaphragms using piezo elements are arranged inside,
It is characterized in that each diaphragm has a suction valve and a discharge valve.

By operating each of the diaphragms out of phase, suction and discharge can be performed simultaneously, and vibration generated from the pump and a pipe connected to the pump can be reduced.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows an example of a pump using a piezo element.

FIG. 2 shows a case where two diaphragms each using a piezo element are arranged in the pump of the present embodiment.

FIG. 3 shows vibrations at the time of suction and discharge of the pumps shown in FIGS.

Conventionally, in a pump as shown in FIG. 1, vibration is generated at the time of suction and discharge as shown in FIG. In the present embodiment, as shown in FIG. 2, two diaphragms using piezo elements are arranged in the pump chamber in the pump chamber, and each of the diaphragms is provided with a suction valve and a discharge valve.

When the diaphragm 5a and the diaphragm 5b are operated, when the discharge is performed by the diaphragm 5a,
Suction is performed by the diaphragm 5b, and the diaphragm is operated with a phase difference of 180 degrees as shown in FIG. 3 (b) to absorb the mutual vibrations and reduce the vibrations of the entire pump and the pipe connected to the pump. Becomes possible.

[0014]

According to the present invention, vibrations generated from the pump and the pipe connected to the pump can be reduced without lowering the inherent performance of the pump.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of a small pump using a piezo element.

FIG. 2 is a diagram showing an example of an embodiment of the present invention.

FIG. 3 is a diagram illustrating vibration caused by suction and discharge of a pump.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Outlet, 2 ... Inlet, 3 ... Discharge valves (3a, 3b), 4
... Suction valves (4a, 4b), 5 ... Diaphragms (5a, 5)
b), 6 ... Pump chambers (6a, 6b).

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masahito Suzuki 810 Shimoimaizumi, Ebina-shi, Kanagawa Inside the Internet Platform Division of Hitachi, Ltd. (72) Inventor Kiyoyuki Nakamori 1 Ikegami, Haruokacho, Owariasahi-shi, Aichi Prefecture Address F-term in Hitachi Asahi Electronics Co., Ltd. (reference) 3H075 AA01 BB04 BB16 BB20 CC17 DA09 DB02 3H077 AA01 CC02 CC17 DD06 EE24 FF12 FF36

Claims (2)

[Claims] 1. A pump that includes a diaphragm using a piezo element in a pump and uses a diaphragm driven by the piezo element for suction and discharge of the pump, wherein a plurality of diaphragms using the piezo element are arranged in the pump, A pump having a suction valve and a discharge valve for each diaphragm. 2. A pump that includes a diaphragm using a piezo element in a pump and uses a diaphragm driven by the piezo element for suction and discharge of the pump, wherein the diaphragm uses a plurality of piezo elements arranged in the pump. The pump is characterized in that suction and discharge are performed simultaneously by shifting the operation phase of the pump and vibration generated from the pump and a pipe connected to the pump is reduced.