JP2002365247A - Observation image controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To observe images of a plurality of different points by a simple operation in a short time. SOLUTION: There are provided an observation point-designating means 2 for designating at least one observation point on a display screen where a two-dimensional image obtained by two-dimensionally scanning an electron beam illumination is displayed, and for obtaining position data of the designated observation point; a scanning signal-forming means 5 for forming for each observation point, a scanning signal for the two-dimensional scanning centering the designated observation point on the basis of each position data, and an image tone-adjusting means 9 for adjusting an image tone of image data obtained for each observation point at each observation point. In the configuration, images of the plurality of different points are observed by designating a plurality of observation pints on the display screen, forming the scanning signal for two-dimensionally scanning each observation point with the use of position data of the designated observation points, and two-dimensionally scanning each observation point by each scanning signal. Image data of the plurality of observation points are obtained by one scanning operation by designating the plurality of observation points together, so that the image observation is carried out by the simple operation in a short time.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an observation image control device for displaying and observing a two-dimensional scanning image obtained by a scanning electron microscope or an electron beam microanalyzer.

[0002]

2. Description of the Related Art Scanning electron microscopes and electron beam microanalyzers irradiate a sample by two-dimensionally scanning an electron beam, detect secondary electrons and reflected electrons generated thereby, and display a two-dimensional image on a display screen. The observation of the sample is performed by displaying as, and the sample is analyzed. In this image observation, comparison is made between images at a plurality of different locations on the sample. Conventionally, when comparing images at a plurality of places, a two-dimensional image obtained according to the following procedure is displayed and compared.

First, a sample stage on which a sample is placed is moved or an irradiation position is adjusted to an electron beam to be irradiated so that a point to be observed is displayed at the center of a display screen for image display. After positioning the observation position, an appropriate magnification is set and a two-dimensional image is detected. A two-dimensional image detected by performing image tone adjustment such as contrast and brightness is displayed on a display screen, and the image data whose image tone has been adjusted is stored. After the above procedure is repeated for each observation position, the image data at a plurality of locations to be observed are stored, and all the stored image data are read out and displayed side by side on a display screen.

[0004]

As described above, conventionally, the observation images at a plurality of locations are compared by repeating the visual field movement operation, the image detection and the storage operation of the image data for positioning the observation position for each observation point. Therefore, there is a problem that the operation of image observation is complicated and requires a long time. Accordingly, it is an object of the present invention to solve the above-mentioned conventional problems and to perform image observation of a plurality of different places with a simple operation in a short time.

[0005]

According to the present invention, a plurality of observation points are designated on a display screen, and a scanning signal for two-dimensionally scanning each observation point is formed using position data of the designated observation points. By performing two-dimensional scanning of each observation point with each scanning signal, image observation at a plurality of different points is performed. A plurality of observation points are designated collectively and a plurality of observation points can be obtained by one scanning operation. By obtaining the image data of the above, image observation for a short time is performed by a simple operation.

The observation image control apparatus according to the present invention, as one configuration for performing the above operation, designates at least one observation point on a display screen for displaying a two-dimensional image obtained by two-dimensional scanning of electron beam irradiation. An observation point designating means for obtaining position data of a designated observation point, and a scanning signal forming means for forming a scanning signal for performing two-dimensional scanning with the designated observation point based on each position data as a scanning center for each observation point, A configuration is provided that includes image tone adjustment means for adjusting the image tone of image data obtained for each observation point for each observation point.

The observation point specifying means of the present invention specifies an observation point to be observed from a two-dimensional scan image displayed on a display screen, and obtains position data thereof. The number of designated observation points can be plural.

The scanning signal forming means of the present invention forms a scanning signal for performing two-dimensional scanning around the observation point designated by the observation point designating means for each observation point. One aspect of the scanning signal forming means is a method of shifting a base position of a reference scanning signal for each observation point based on each position data obtained by the observation point designating means, and performing two-dimensional scanning with the observation point as a scanning center. Form a signal.

A conventional two-dimensional scanning signal is a signal for causing the electron beam to oscillate in the positive and negative directions with the center of the irradiation surface of the electron beam as an observation point and the x-axis and the y-axis passing through this point as base positions. Thus, the entire surface is two-dimensionally scanned by one scanning operation to obtain image data of one observation point. On the other hand, the scanning signal forming means of the present invention performs two-dimensional scanning around a designated observation point in one scanning operation to obtain image data at a plurality of different locations.

With the observation point designating means and the scanning signal forming means of the present invention, a plurality of different places can be designated by one operation, and image data of a plurality of different places can be obtained in one scanning operation. Can be displayed.

Further, the image tone adjusting means of the present invention adjusts the image tone such as contrast and brightness when displaying image data at a plurality of different places. The image data obtained in synchronization with the two-dimensional scanning timing is adjusted.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings. 1 and 2 are schematic diagrams for explaining the outline of the observation image control device of the present invention. The observation image control device 1 includes an observation point specifying unit 2 for determining an observation point on the display screen and obtaining the position data, a position data storage unit 3 for storing the position data obtained by the observation point specifying unit 2, a two-dimensional reference. Two-dimensional scanning signal generating means 4 for forming a scanning signal; scanning signal forming means 5 for shifting a reference two-dimensional scanning signal based on position data of each observation point to form a scanning signal for each observation point; A scanning coil 6 (6x, 6y) for oscillating an electron beam based on a signal, detection means 7 for detecting secondary electrons and reflected electrons generated by irradiation of the electron beam, and image data based on a detection signal of the detection means 7 A signal processing unit 8 to be formed; an image adjustment unit 9 for adjusting the image tone such as contrast and brightness of an image for each observation point; a storage unit 10 for storing image data after the image adjustment;
A display unit 11 for displaying image data is provided.

An operation example of the observation image control apparatus 1 will be described below with reference to a flowchart of FIG. 2, a display screen example of FIG. 3, a schematic diagram for explaining a scanning operation of each observation point of FIG. 4, and a scanning signal of FIG. This will be described with reference to a signal diagram.

First, a sample is irradiated with an electron beam to perform two-dimensional scanning to obtain two-dimensional image data, and an image is displayed on the display screen A. The magnification at this time is a predetermined set magnification.
FIG. 3A shows an observation image B displayed on a display screen A by the two-dimensional scanning. In addition, the part outside the display screen A in the observation image B is tentatively shown, and the image that can be observed is only the part inside the display screen 2. Therefore, when there are observation points a, b, c, and d in the observation image B, only the observation points b and d are confirmed in the observation image B initially displayed, and the observation points outside the display area of the display screen 2 are observed. Points a and c are not identified. Here, as observation points, a, b,
Although the case of four points c and d is shown, the number of observation points is not limited to four, and may be only one point or an arbitrary plurality of points (step S1, step S2). .

Therefore, for the observation points a and c, the magnification is adjusted and the steps S1 and S2 are performed, so that the entire observation area including all the observation points a, b, c and d is displayed on the display screen A.
Display above. FIG. 3B shows a display screen A after adjusting the magnification.
The observation image C displayed above is shown (step S3,
4).

The observation image C is displayed on the display screen A to search for and designate a point to be observed. In the following, the observation points a, b, c,
The case where d is specified will be described as an example. The specification of the observation point can be performed, for example, by the marker D moving on the display screen A. The marker D is moved on the display screen A by a pointing device such as a mouse, for example.
Position data on the moving position can be captured by a switch operation or the like. For example, observation points a and b shown in FIG.
The position data of b, c and d are (Xa, Ya),
(Xb, Yb), (Xc, Yc), and (Xd, Yd).

The position data specified by the observation point specifying means 2 is stored in the position data storage means 3. A plurality of sets of observation point position data can be stored for each display screen. By this, the position data of a plurality of observation points are stored in advance for each display screen, and by reading out the position data and performing two-dimensional scanning, the operation of designating the observation point and the operation of performing two-dimensional scanning can be performed. Separation can improve operability (step S5).

The position data is read from the position data storage means 3 at the observation point stored in step S5, and a scanning signal for each observation point is formed using the position data (step S6). The scanning signal for each observation point is formed using the position data read by the scanning signal forming means 5 and the reference scanning signal from the two-dimensional scanning signal generating means 4.

FIG. 4A shows a state of two-dimensional scanning at the observation point. Here, x around each observation point
An example is shown in which scanning is performed with a scanning width of X / 4 in the direction and scanning with a scanning width of Y in the y direction. Therefore, for example, for the observation point a (position data is (Xa, Ya), scanning is performed in the range of (Xa−X / 8) to (Xa + X / 8) in the x direction, and (Ya−Y / 2) in the y direction. ) To (Ya + Y / 2)
Scan in the range of Note that the width of the display screen in the x direction is X and the width in the y direction is Y.

Similarly, observation points b, c, and d are position data (Xb, Yb), (Xc, Yc), (Xd, Y
d), x-direction (Xb−X / 8) and (X
b + X / 8), (Xc−X / 8) and (Xc + X /
8), and (Xd-X / 4) and (Xd + X / 4)
, And in the y direction, (Yb−Y / 4) and (Yb
+ Y8), (Yc−Y / 8) and (Yc + Y / 8)
And (Yd−Y / 8) and (Yd + Y / 8).

FIG. 4B shows another example of two-dimensional scanning at the observation point. In this scanning example, an example is shown in which scanning is performed in the x direction with a scanning width of X / 4 around each observation point, and scanning is also performed in the y direction with a scanning width of Y / 4. Observation point a (position data of (Xa, Ya) is scanned in the range of (Xa−X / 8) to (Xa + X / 8) in the x direction, and (Ya−Y / 8) to (Ya + Y) in the y direction. /
Scan in the range of 8).

A scanning signal for performing scanning around each of the observation points is usually in the x direction and y around the base position.
It can be formed by shifting a reference scanning signal that causes a voltage to swing in the positive direction and the negative direction by the position data of the observation point.

FIG. 5 shows an example of scanning signals at observation points a, b, c, and d. FIG. 5A shows an example of a scanning signal in the x direction, and FIGS. 5B and 5C show examples of a scanning signal in the y direction. In addition, a, b, c, and d attached in FIG. 5 indicate scanning signals of the observation points a, b, c, and d. In the x-direction scanning signal shown in FIG. 5A, the scanning signal at each observation point a is obtained by increasing the voltage corresponding to the amplitude width X / 4 from the base position of 0 (V) to the position data xa. The voltage is shifted. Also, the scanning signals of the observation points b, c, and d are voltages obtained by shifting the corresponding voltage of the amplitude width X / 4 from the base position of 0 (V) by the position data xb, xc, and xd. .

Here, assuming that one moving time in the x direction of the display screen in FIG. 4 is T, the amplitude width in the x direction of the four observation points is X / 4, so that the total time during the time T is obtained. The movement of the observation point in the x direction can be completed.

The scanning signal in the y direction shown in FIG. 5B corresponds to the scanning example shown in FIG. The scanning signal of each observation point a shifts the voltage corresponding to the amplitude Y from the base position of 0 (V) by the voltage corresponding to the position data Ya. Also, with respect to the scanning signals of the observation points b, c, and d, the voltage corresponding to the amplitude width Y / 2 is shifted from the base position of 0 (V) by the voltage corresponding to the position data Yb, Yc, and Yd, and x It shifts sequentially for each movement in the direction, and finally moves by Y.

FIG. 6 (a) is a view similar to FIG. 4 (a) and FIG.
5A is a display screen example obtained by the scanning shown in FIGS. 5A and 5B, and each observation point a,
The display images of b, c, and d are displayed. FIG. 6 (b)
Are the x, y directions obtained by the scanning shown in FIG.
It is an image example of each observation point a, b, c, and d obtained by dividing. These images are displayed side by side in the x direction as shown in FIG. 6 (c), or enlarged in the x and y directions as shown in FIG. 6 (d) and displayed in an arbitrary arrangement on the display screen. You can also. Thus, a scanning signal for performing two-dimensional scanning with each observation point as a scan can be formed (Step S).
7).

The scanning coil 6 (x-direction scanning coil 6x, y
The direction scanning coil 6y) scans the electron beam according to the scanning signal generated by the scanning forming unit 5. The two-dimensional image data at the observation point by the two-dimensional scanning can be obtained by the detection signal detected by the detection means 7 at the time of this scanning (step S8). The two-dimensional image data is processed by the signal processing means 8
Performs image processing. Image processing includes image adjustment of contrast and brightness. This image tone adjustment is set for each observation point by the image tone adjusting means 9 according to the strength of the detection signal and the like (step S9).

The adjusted two-dimensional image data is stored in the storage means 10 for each observation point (step S10). The stored two-dimensional image data is read out from the storage unit 10 and displayed on the display unit 11. As shown in FIG.
(C) and (d) are display examples. In addition to displaying the display screen and the scanning area at the same size ratio when designating the observation point, the scanning area is enlarged and displayed. You can also. When the display is enlarged, the scale of the display can be shown.

In this display, various display modes can be adopted. For example, all of the observation points specified on the same display screen or selected observation points can be displayed side by side, or can be selected from observation points specified on different display screens and displayed side by side. In addition, together with the scan image of each observation point, the entire image when the observation point is designated can be displayed (step S11).

Hereinafter, a detailed configuration example of the observation image control device 1 will be described with reference to the schematic configuration diagram of FIG. 7 and the signal diagram of FIG. 7, an X-direction scanning converter 20X and a Y-direction scanning converter 20Y correspond to the two-dimensional scanning signal generating means 4, and form a reference scanning signal by a clock signal (in FIGS. 8 and 9). X direction scanning converter 2
0X has a counter for counting clock signals. By counting the counter value set from the DATA line, the counter sends an x-END signal indicating that the end in the x direction has been reached to the Y-direction scanning converter 20Y to form a scanning signal in the y-direction. The code signal (in FIGS. 8 and 9) corresponding to the designated observation point is sent to the X-direction shift control unit 23X, the Y-direction shift control unit 23Y, the contrast control unit 27, and the brightness control unit 28.

This code signal specifies an observation point to be scanned. For example, when four observation points are designated, at least four types of code signals for specifying each of the four observation points are output. When the number of observation points increases, several types of code signals corresponding to the number of observation points are output. Each X-direction shift control means 23X, Y-direction shift control means 23Y, contrast control means 27, and brightness control means 28
Recognizes observation points during scanning based on code signals, and performs shift control, contrast control, and brightness control of scanning signals corresponding to each observation point.

The X-direction scanning converters 20X and 20X
The directional scanning converter 20Y forms a scanning signal having a scanning speed determined according to the frequency of the clock signal, and outputs an X-directional scanning D / A converter 21X and a Y-directional scanning D / A converter 21Y.
Send to This scanning signal is supplied to the X-direction scanning D / A converter 21.
Scanning analog signals (in FIGS. 8 and 9) are converted by the X / Y-direction scanning D / A converter 21Y, and further, the scanning amplitude such as magnification setting is set by the X-direction voltage controller 22X and the Y-direction voltage controller 22Y. Control is performed. The signals subjected to the scanning amplitude control are an X-direction scanning power supply 25X and a Y-direction scanning power supply 25Y.
, And output to the X-direction scanning coil 26X and the Y-direction scanning power supply 26Y to perform electron beam scanning.

On the other hand, X-direction shift control means 23X, Y-direction shift control means 23Y, contrast control means 27,
The brightness control means 28 performs DATA switching at the timing of the code signal. X direction shift control means 2
A shift amount for shifting the scanning voltage corresponding to the position of each observation point is formed by the 3X and Y direction shift control means 23Y, and the X direction shift D / A converter 24X and the Y direction shift D / A converter 24Y The signals are converted into signals (in FIGS. 8 and 9), output to the X-direction scanning coil 26X and the Y-direction scanning power supply 26Y, and scan the electron beam.

The obtained detection signal is adjusted by a contrast adjuster 29 by a control signal from a contrast control means 27, and an adjustment signal of a brightness adjuster 30 by a control signal from a brightness control means 28 is added. (In FIGS. 8 and 9). The obtained image data is converted into a digital signal by the A / D converter 31 and stored in the storage unit 32. After the image data stored in the storage unit 32 is read out, it is converted into an analog signal by the D / A converter 33 and displayed on the display unit 34.

In the examples shown in FIGS. 4 and 6, the amplitude width obtained by dividing the width of the display screen by the number of observation points is set as the scanning width at each observation point. The setting of the scanning width is not limited to this, and can be determined by another setting method.

FIG. 9 shows another example of setting the scanning width. The example of FIG. 9 is an example in which the scanning width of each observation point is set to half the width of the display screen as shown in FIG. According to this example, it is possible to arrange on the display screen the size of the obtained scanned image without enlarging it as in the above example.

[0037]

As described above, according to the observation image control apparatus of the present invention, it is possible to perform image observation of a plurality of different places by a simple operation in a short time.

[Brief description of the drawings]

FIG. 1 is a schematic diagram for explaining an overview of an observation image control device of the present invention.

FIG. 2 is a flowchart for explaining an operation example by the observation image control device of the present invention.

FIG. 3 is a diagram illustrating an example of a display screen by the observation image control device of the present invention.

FIG. 4 is a schematic diagram illustrating a scanning operation of each observation point of the observation image control device of the present invention.

FIG. 5 is a signal diagram illustrating a scanning signal of the observation image control device of the present invention.

FIG. 6 is a diagram for explaining a display example by the observation image control device of the present invention.

FIG. 7 is a schematic diagram for explaining a detailed configuration example of the observation image control device of the present invention.

FIG. 8 is a signal diagram illustrating a detailed configuration example of an observation image control device according to the present invention.

FIG. 9 is a schematic diagram illustrating another scanning operation of each observation point of the observation image control device of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Observation image control apparatus, 2 ... Observation point designation means, 3 ... Position data storage means, 4 ... Two-dimensional scanning signal generation means, 5 ... Scanning signal formation means, 6 ... Scanning coil, 7 ... Detection means, 8 ... Signal Processing means, 9: image tone adjustment means, 10: storage means, 11
... Display means, 20X ... X-direction scanning converter, 20Y ...
Y direction scanning converter, 21X ... X direction scanning D / A converter, 21Y ... Y direction scanning D / A converter, 22X ... X direction voltage controller, 22Y ... Y direction voltage controller, 23X ... X direction shift control means , 23Y ... Y-direction shift control means, 2
4X: X direction shift D / A converter, 24Y: Y direction shift D / A converter, 25X: X direction scanning power supply, 25Y: Y
Direction scanning power supply, 26X ... X direction scanning coil, 26Y ... Y
Directional scanning power supply, 27: contrast control means, 28: brightness control means, 29: contrast adjuster, 30
... brightness adjuster, 31 ... A / D converter, 32 ... storage means, 33 ... D / A converter, 34 ... display means, A ... display screen, B, C ... observation image, D ... mark.

Claims (3)

[Claims] An observation point designating means for designating at least one observation point on a display screen for displaying a two-dimensional image obtained by two-dimensional scanning of electron beam irradiation, and obtaining position data of the designated observation point, Scanning signal forming means for forming, for each of the observation points, a scanning signal for performing two-dimensional scanning with the observation point designated based on each of the position data as a scanning center; and obtaining the image data obtained for each of the observation points for each of the observation points. An observation image control apparatus, comprising: an image tone adjusting unit that adjusts image tone for each image. 2. A scanning signal for two-dimensionally scanning the observation point as a scanning center by shifting a base position of a reference scanning signal for each of the observation points based on the position data. The observation image control device according to claim 1, wherein 3. The image adjusting apparatus according to claim 1, wherein the image adjusting means adjusts the image of the image data obtained in synchronization with the timing of the two-dimensional scanning about the designated observation point center. Observation image control device.