JP2002365190A - Hardness tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hardness tester equipped with a sample moving means having extremely little possibility of exerting an influence on measurement even when loading the heavy weight. SOLUTION: This hardness tester 1 for measuring the hardness of a sample based on formation of an impression on the sample surface by an indenter 7 is equipped with a sample moving stand 101 for loading the sample on its upper surface part, having a smooth lower surface part 101a, a sample stand base 102 having a smooth upper surface part 102a in surface contact with the lower surface part of the sample moving stand, and a moving means 106 for sliding and moving the sample moving stand on the upper surface part of the sample stand base.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a method for forming a dent by applying a load to a sample surface by an indenter.
The present invention relates to a hardness tester for measuring the hardness of a sample.

[0002]

2. Description of the Related Art Conventionally, a Vickers hardness tester, a micro Vickers hardness tester, Alternatively, a hardness tester such as a Rockwell hardness tester is known.

[0003] In such a hardness tester, when it is desired to change the formation position of the indentation and set another position as a measurement point, the hardness tester requires a sample moving means. In a Vickers hardness tester or a micro Vickers hardness tester, the sample moving means is generally equipped, for example, a sample stage base having a concave portion under a sample stage having an inverted convex portion. Are provided, and the two are fitted with a bearing or the like interposed therebetween. In such a mechanism, the measurer manually moves the sample table with a micrometer head or the like or automatically drives the sample table to move the sample table to a desired position in the horizontal direction.

[0004]

However, in the Rockwell hardness tester, the load to be applied is extremely large as compared with a Vickers hardness tester or the like. Therefore, the load is applied by providing the sample moving means as described above. In this case, a large load is applied to the sample stage and the sample stage base. Accordingly, at this time, stress concentration occurs at a point contacting with a bearing or the like, and the stress concentration causes a problem that the deformation characteristics of the sample stage and the sample stage base have hysteresis and affect the measurement. . Therefore, it is difficult to provide the Rockwell hardness tester with the above-mentioned sample moving means, and there has been no sample moving means provided so far. Therefore,
When the sample moving means is required, a device such as a robot must be added from the outside, and the sample must be moved by this, which is complicated.

The present invention has been made in order to solve the above problems, and provides a hardness tester provided with a sample moving means which has a very small influence on the measurement even when a large load is applied. The purpose is to do.

[0006]

Means for Solving the Problems In order to solve the above problems, the invention according to claim 1 is based on forming an indentation on a sample surface by an indenter 7 as shown in FIGS. A hardness tester 1 for measuring the hardness of a sample by placing the sample on an upper surface and making a surface contact with the lower surface of the sample movable table 101 and a sample movable table 101 having a smooth lower surface 101a. A sample stage base 102 having a smooth upper surface portion 102a, and moving means (for example, a micrometer head 106) for sliding the sample moving stage on the upper surface portion of the sample stage base. It is characterized by being.

According to the first aspect of the present invention, since the sample moving table is slid on the upper surface of the sample table base by the moving means, the sample moving table can be moved even when a large load is applied. , And only two parts of the sample stage base receive a load in a plane, the rigidity of the sample stage and the sample stage base is secured, and the deformation characteristics of the sample stage and the sample stage base are linear, And it can be made to have no hysteresis. Therefore, even when a large load is applied, the risk of influencing the measurement is extremely reduced as compared with a conventional sample moving unit such as a conventional sample moving unit that makes point contact with the sample stage base.

According to a second aspect of the present invention, in the hardness tester of the first aspect, the moving means is a first moving means (for example, the micrometer head 106) for moving the sample moving table in one direction. And second moving means (for example, the micrometer head 109) for moving the sample moving table in a direction perpendicular to the moving direction of moving the sample moving table by the first moving means.

According to the second aspect of the invention, it is needless to say that the same effect as the first aspect of the invention can be obtained. In particular, the sample moving table is moved in one direction by the first moving means. Further, the sample moving table is moved by the second moving means in a direction orthogonal to the moving direction moved by the first moving means, so that the sample moving table can be moved over a wider range without waste.

According to a third aspect of the present invention, in the hardness tester according to the second aspect, the frame 103 provided around the sample moving table and the frame are guided along the upper surface of the sample table base. And a guide mechanism (for example, a linear guide 108) for moving the sample moving table along the inner surface of the frame.
The second moving means moves the sample moving table together with the frame by the guide mechanism.

According to the third aspect of the invention, it is needless to say that the same effect as that of the second aspect of the invention can be obtained. In particular, the sample moving table is mounted on the inner surface of the frame by the first moving means. The sample moving table can be moved along with the frame, and the upper surface of the sample table can be moved while being guided by the guide mechanism together with the frame by the second moving means. Therefore, the moving of the sample moving table can be easily performed with a simple configuration.

According to a fourth aspect of the present invention, in the hardness tester of the third aspect, the guide mechanism is slidable on the guide rail 107 provided on the upper surface of the sample table base. And a linear guide 108 that supports the frame body.

According to the fourth aspect of the invention, it is needless to say that the same effect as that of the third aspect of the invention can be obtained. In particular, the guide mechanism is such that the linear guide for supporting the frame is provided on the sample base base. Since it slides on the guide rail provided on the upper surface, the sample moving table can be easily and smoothly moved.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a hardness tester according to the present invention will be described below in detail with reference to FIGS. FIG. 1 is a side view of a hardness tester 1 according to the present invention.

The hardness tester 1 of the present embodiment has a feature in a portion of a sample table 100, and the configuration of other portions is as follows.
It is the same as a conventional general Rockwell hardness tester. Accordingly, in the following description, the characteristic portions of the present invention will be described in detail with reference to FIGS.

First, as shown in FIG. 1, a hardness tester 1 according to the present invention mainly comprises a sample table 100, a weight 2, a load lever 3, a cam 4, a load shaft 5, an indenter shaft 6, an indenter 7, Vertical axis 8
The sample stage 100 is attached to the main body of the hardness tester 1 by a vertical shaft 8 provided on the lower surface of the sample stage 100 so as to be vertically movable.

The sample stage 100 mainly comprises a sample stage 101,
It is composed of a sample stage base 102 and the like. Sample transfer table 10
The lower surface portion 101a of the sample base 1 and the upper surface portion 102a of the sample stage base 102 are manufactured so as to have extremely high surface accuracy, and the sample moving stage 101 is supported by surface contact with the upper surface portion 102a of the sample stage base 102. Is done.

The sample moving table 101 is a plate-like body having a substantially square shape in plan view of FIG. 2, and the sample table base 102 is provided with a frame 103 surrounding the sample moving table 101. Along the left and right sides of the sample moving table 101 shown in FIG.
A total of three bearings 104 are installed between the sample moving table 101 and the frame 103, and the sample moving table 101 is supported by the frame 103 at three points.

At the center of the front end of the sample moving table 101 (located at the center of the lower end in the drawing), the sample moving table 101 is located.
The spindle 106c of the micrometer head 106 for performing the position adjustment is fixed.
A spindle 109c of the micrometer head 109 for adjusting the position of the frame 103 is fixed.

A spring mounting portion 105 is fixed to the rear end (located at the upper end in the drawing) of the sample moving table 101 by a bolt 105a. The spring mounting portion 105 is a plate-like body having substantially the same length as one side of the sample moving table 101, and comes into contact with substantially the center of the side surface of the sample moving table 101 as shown in the sectional view of FIG. ing.

At both ends of the spring mounting portion 105, a frame 103 is provided.
The arm 105b is provided with a long hole 10 formed inside the frame 103.
3g, a recess 1 formed in the outer surface of the frame 103 via
It protrudes to 03h. Inside the concave portion 103h, one end of a later-described spring 103i is fixed to the arm 105b.

The sample stage base 102 is a plate-like body having a substantially rectangular shape in a plan view of FIG. 3, and has a flat sample stage moving portion A located on the left side of the drawing and a sample stage moving portion A located on the right side. It consists of a micrometer head mounting part B which is slightly thicker. A plurality of grooves 102b are formed in the center of the sample stage moving section A, and thereby the sample stage 10
1 can reduce the contact area between the lower surface portion 101a and the upper surface portion 102a of the sample stage base 102. Therefore, when the sample movable stage 101 slides on the upper surface portion 102a of the sample stage base 102, the sample movable stage 101 and Sample table base 10
2 is less likely to cause an adsorption phenomenon.

The sample table moving section A is provided with guide rails 107 along the front and rear ends (located at the upper and lower ends in the drawing) in FIG.
Two linear guides 108 are slidably fitted on each of the reference numerals 07.

The micrometer head mounting portion B has
A mounting groove 102d for mounting the micrometer head 109 is formed. A mounting hole 102e is formed between the mounting groove 102d and the sample stage moving section A to allow the spindle 109c to pass therethrough. Further, the micrometer head mounting portion B is provided at a position sandwiching the mounting groove 102d,
Spring attachment portion 10 facing spring attachment portion 103j (described later)
2c is provided.

The frame 103 shown in FIG. 2 has a vertical frame 103a,
103a, and horizontal frames 103b and 103b, which are fixed to the linear guides 108 with bolts 103c.
03b is further fixed to the vertical frame 103a with bolts 103d. Therefore, the frame body 103 is
08 makes it possible to move on the guide rail 107.

The horizontal frame 103b on the front end (located at the lower end in the drawing) of FIG.
A mounting hole 103f for mounting the mounting hole 6 is formed. The micrometer head 106 includes a thimble 106
a, a sleeve 106b, and a spindle 106c. The thimble 106 is inserted into the sleeve 106b while the spindle 106c is inserted through the mounting hole 103f, and the tip of the spindle 106c is fixed to the sample moving table 101.
a is fixed to the horizontal frame 103b.

When the thimble 106a is turned, a screw (not shown) in the thimble 106a rotates and the spindle 106c expands and contracts, and the value is digitally displayed on a display window 106d provided on the sleeve 106b. It is supposed to be.

As shown in FIG. 4, the vertical frame 10
On the inner surface of 3a, an elongated hole 103g is formed in a lateral direction at a position corresponding to the spring mounting portion 105. A concave portion 103h is formed on the outer surface of the vertical frame 103a over substantially the entire length.
03i is stored. One end of the spring 103i has a recess 10
3h, and the other end is recessed 1 through a long hole 103g.
It is fixed to the arm 105b of the spring mounting portion 105 protruding at 03h.

Therefore, the sample moving table 101 shown in FIG.
It moves in the front-rear direction (located in the up-down direction in the drawing) via 04. At this time, the spring mounting portion 105 fixed to the sample moving table 101 also moves in the same manner as the sample moving table 101.
The spring 103i fixed to is expanded and contracted in the concave portion 103h with the movement of the spring mounting portion 105, and the free movement of the sample moving table 101 in the vertical frame 103a direction is restricted by the force of the spring 103i.

On the outer surface of the vertical frame 103a facing the micrometer head 109, a spring mounting portion 103j is fixed with bolts 103k. As shown in FIG.
The spring mounting portion 103j is a plate-like body having substantially the same height as the vertical frame 103a, and has a concave portion 103 at the center of the vertical frame 103a.
h. The spindle 1 of the micrometer head 109 is provided at the center of the spring mounting portion 103j.
09c is fixed. The spring mounting portion 103j has arms 103l at both ends. One end of a spring 103e is fixed to the arm 103l, and the other end of the spring 103e is connected to the spring mounting portion 102 of the micrometer head mounting portion B.
fixed to c.

The micrometer head 109 has the same configuration as the above-described micrometer head 106, and includes a thimble 109a, a sleeve 109b and a spindle 109c, and a sleeve 109b for supporting the thimble 109a.
Is attached to the mounting groove 102d from the outside, and is inserted into the sleeve 109b through the mounting hole 102e formed in the micrometer head mounting portion B.
c is fixed to the spring mounting portion 103j.

When the thimble 109a is turned, a screw (not shown) in the thimble 109a rotates so that the spindle 109c expands and contracts, and the value is digitally displayed on a display window 109d provided on the sleeve 109b. It is supposed to be.

Accordingly, the spring mounting portion 103j and the frame 103 to which the spring mounting portion 103j is fixed as shown in FIG. Move to the left and right in the drawing. At this time, the spring 103e, one end of which is fixed to the arm 103l of the spring mounting portion 103j, expands and contracts with the movement of the spring mounting portion 103j and the frame 103, and the force of the spring 103e causes the frame to move in the horizontal frame 103b direction. Restrict free movement of body 103.

The sample moving table 101 is connected to the sample table base 10.
When sliding on the upper surface 102a of the sample base 2, an adsorption phenomenon may occur.
In order to prevent this besides b, a piezoelectric element 110 is attached to the end of the back surface of the sample base 102.

The piezoelectric element 110 is connected to a piezoelectric element driving circuit (not shown). When the piezoelectric element driving circuit is turned on and an alternating current flows, a high-frequency voltage is applied to the piezoelectric element 110 and the piezoelectric element 110 Vibration is generated by repeating the stretching operation. Therefore, when the piezoelectric element driving circuit is ON, the vibration by the piezoelectric element 110 is transmitted to the sample stage base 102, and thereby the sample stage 10 is moved.
1 and the sample stage base 102 are prevented from being attracted, and the sample stage 101 can be smoothly moved.

On the back surface of the sample stage base 102 located almost directly below the sample moving stage 101, there are provided a cylindrically projecting table leg 102f and a hollow cylindrical mounting ring 102g surrounding the same. Leg 102f
Is fitted and fixed in a fixing hole 102i formed in the center of the vertical shaft 8, so that the sample table 100 is positioned and attached to the hardness tester 1. The mounting ring 102g has a protruding portion 102h that protrudes inward, and a flange portion 111a of a fixing nut 111 screwed to an upper portion of the vertical shaft 8 is accommodated in a gap formed above the protruding portion 102h. Have been.

When the fixing nut 111 is tightened, the lower surface of the flange portion 111a is
2h, the sample table base 1
02 and the vertical shaft 8 are fastened and integrated, so that the sample stage base 102 does not rotate with respect to the vertical shaft 8. Further, since no gap is generated between the sample stage base 102 and the vertical shaft 8, hysteresis hardly occurs in the deformation characteristics of the sample stage 100 when a load is applied.

Next, an outline of a measuring operation in the hardness tester 1 and a sample moving operation in the sample stage 100 will be described. First, in the hardness tester 1, a predetermined weight 2 is hung on the tip of the load lever 3, and the rotation of the cam 4 lowers the load lever 3. Then, a predetermined test force acts on the load shaft 5, and the test force is transmitted to the indenter 7 via the indenter shaft 6,
When the indenter 7 moves downward, the sample stage 100
An impression is formed on the sample placed on the sample. The penetration depth of the indenter 7 is measured from the shape of the indentation, and the hardness value of the sample is determined based on the measurement result.

In the measurement of such a hardness value, it is necessary to move the sample when it is desired to measure a position different from the once measured position. In the hardness tester 1, the following operation is performed, and the sample is moved. Move.

First, when moving the sample, a piezoelectric element driving circuit (not shown) is turned on, and a high-frequency voltage is applied to the piezoelectric element 110. When the piezoelectric element 110 generates vibration, the vibration is transmitted to the sample stage base 102 to which the piezoelectric element 110 is attached, so that the sample stage base 102 also vibrates. The vibration prevents the adsorption phenomenon when the sample moving table 101 slides.

Next, the sample moving table 101 is moved in the vertical direction in FIG. Specifically, when the thimble 106a of the micrometer head 106 is turned and the screw in the thimble 106a is rotated, the spindle 10
6c expands and contracts. As a result, the sample moving table 101 moves up and down via the bearings 104, while, on the other hand,
A spring 103i having one end fixed to the arm 105b of the spring mounting portion 105 expands and contracts with the movement of the sample moving table 101. Then, the display window 1 of the micrometer head 106
The sample moving table 101 is moved to a desired position while referring to the numerical value displayed at 06d, and the vertical movement is completed.

Further, the sample moving table 101 and the frame 103 surrounding the sample moving table 101 are moved in the horizontal direction in FIG. 2, and the thimble 109 of the micrometer head 109 is moved similarly to the micrometer head 106.
Turn a and rotate the screw in thimble 109a.
The spindle 109c expands and contracts. As a result, the spring mounting portion 103j and the frame 103 to which the spring mounting portion 103j is fixed are mounted together with the sample moving table 101 on the guide rail 1.
07 is moved in the left-right direction by the linear guide 108, while one end of the arm 1 of the spring mounting portion 103j is
The spring 103e fixed to 03l expands and contracts with the movement of the frame 103. Then, the micrometer head 10
By moving the frame 103 to a desired position while referring to the numerical value displayed in the display window 109d of No. 9, the movement in the left-right direction is completed.

After the movement of the sample is completed, the piezoelectric element driving circuit is turned off, the vibration of the piezoelectric element 110 is stopped, and the positioning operation is completed. At this position, a normal hardness measurement is performed. The forming operation is the same as the operation in a normal hardness tester, and will not be described.

As described above, according to the hardness tester 1 of the present embodiment, the sample moving table 101 slides on the upper surface portion 102a of the sample table base 102 which makes surface contact, so that the measurement location can be changed. When the test load is applied to the sample, the sample moving table 101 and the sample table base 1
During the period of 02, the occurrence of stress concentration that causes hysteresis is eliminated. Therefore, the indenter 7
When pushing the sample, the rigidity of the sample moving table 101 and the sample table base 102 can be secured, and the characteristics of these deformations can be made linear and have no hysteresis, which may affect the measurement. And the sample can be easily moved.

The micrometer heads 106 and 1
09, the sample moving table 101 is moved, so that the display windows 106d of the micrometer heads 106 and 109,
With reference to the numerical values displayed in steps 109 and 109d, it is possible to easily and accurately change and adjust the measurement location. Furthermore,
Groove 102b of sample stage base 102 and piezoelectric element 110
Is provided, the sample moving table 1 at the time of moving the sample
Since the adsorption phenomenon between the lower surface portion 101a of the sample base 101 and the upper surface portion 102a of the sample stage base 102 is prevented, the sample moving stage 101 can be smoothly moved by the micrometer heads 106 and 109.

In the above embodiment, one embodiment of the hardness tester according to the present invention has been described. However, the present invention is not limited to the above embodiment, and various modifications are possible. Needless to say. For example,
In the present embodiment, the hardness tester 1 is a Rockwell hardness tester, but is not limited thereto, and may be a universal hardness tester or a hardness tester such as a Vickers hardness tester. May be.

Although the piezoelectric elements 110 are arranged at one place, the number of the piezoelectric elements 110 may be any number, and the arrangement place is not limited to the back surface of the sample base 102, but may be on the upper surface of the sample moving base 101 or the like. It can be changed as appropriate. Further, as long as vibration is applied, an ultrasonic generator or the like can be used instead of the piezoelectric element 110.

The micrometer heads 106 and 1
Although 09 is operated manually, it is also possible to drive the sample table 100 as an electric stage by driving with a motor or using a built-in motor type micrometer head. Further, it is also possible to adopt a configuration in which the amount of movement of the sample stage 100 is obtained by the data output of the micrometer heads 106 and 109, and based on this, the positioning feedback of the sample stage 100 is performed.

As means for moving the sample moving table 101, a motor and a ball screw may be used instead of the micrometer heads 106 and 109.
Further, the guide rail 107, the linear guide 108, the groove 102b of the sample stage base 102, and the like need not always be provided, and the upper surface 102a of the sample stage base 102 is completely flat, and the sample stage 101 is simply slid to move. It is also possible to adopt a configuration in which it is performed.

[0050]

According to the first aspect of the present invention, since the sample moving table is slid and moved on the upper surface of the sample table base by the moving means, even when a large load is applied,
Only two parts, the sample stage and the sample stage base, receive a load in a plane, and the rigidity of the sample stage and the sample stage base is secured, and the deformation characteristics of the sample stage and the sample stage base Can be made linear and have no hysteresis. Therefore, even when a large load is applied, the risk of influencing the measurement is extremely reduced as compared with a conventional sample moving unit such as a conventional sample moving unit that makes point contact with the sample stage base.

According to the second aspect of the invention, it is needless to say that the same effect as the first aspect of the invention can be obtained. In particular, the sample moving table is moved in one direction by the first moving means. Further, the sample moving table is moved by the second moving means in a direction orthogonal to the moving direction moved by the first moving means, so that the sample moving table can be moved over a wider range without waste.

According to the third aspect of the invention, it is needless to say that the same effect as that of the second aspect of the invention can be obtained. In particular, the sample moving table is mounted on the inner surface of the frame by the first moving means. The sample moving table can be moved along with the frame, and the upper surface of the sample table can be moved while being guided by the guide mechanism together with the frame by the second moving means. Therefore, the moving of the sample moving table can be easily performed with a simple configuration.

According to the fourth aspect of the invention, it is needless to say that the same effect as that of the third aspect of the invention can be obtained. In particular, the guide mechanism is such that the linear guide supporting the frame is a base of the sample base. Since it slides on the guide rail provided on the upper surface, the sample moving table can be easily and smoothly moved.

[Brief description of the drawings]

FIG. 1 is a side view of a hardness tester according to the present invention.

FIG. 2 is a plan view of the sample stage shown in FIG.

FIG. 3 is a plan view of the sample stage base shown in FIG. 2;

FIG. 4 is a sectional view taken along the line AA in FIG. 2;

FIG. 5 is a side view showing the sample stage from a direction B in FIG. 2;

[Explanation of symbols]

 Reference Signs List 1 hardness tester 101 sample moving table 101a lower surface 102 sample table base 102a upper surface 103 frame 106 micrometer head (first moving means) 107 guide rail 108 linear guide (guide mechanism) 109 micrometer head (second) 7) Indenter

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Mitsuru Oda 2-7-1, Hironodai, Zama-shi, Kanagawa Inside Akashi Sagami Factory Co., Ltd.

Claims (4)

[Claims] 1. A hardness tester for measuring hardness of a sample based on forming an indentation on the surface of the sample by an indenter, wherein the sample is placed on an upper surface, and the lower surface is smooth. A stage, a sample stage base having a smooth upper surface that is in surface contact with the lower surface of the sample stage, and a moving unit that slides and moves the sample stage on the upper surface of the sample stage base. A hardness tester comprising: 2. The hardness tester according to claim 1, wherein the moving means is a first moving means for moving the sample moving table in one direction, and the sample moving table is moved by the first moving means. A second moving means for moving in a direction orthogonal to the moving direction of the moving, a hardness tester comprising: 3. The hardness tester according to claim 2, wherein: a frame provided surrounding the sample moving table; and a guide mechanism for moving the frame while guiding the frame along an upper surface of the sample table base. The first moving means moves the sample moving table along the inner surface of the frame, and the second moving means moves the sample moving table together with the frame by the guide mechanism. A hardness tester characterized by the following. 4. The hardness tester according to claim 3, wherein the guide mechanism is slidably fitted to a guide rail provided on the upper surface of the sample base, and the frame is slidably fitted to the guide rail. A hardness tester comprising: a linear guide that supports a body;