JP2002359523A - Piezoelectric oscillator and method for manufacturing the same - Google Patents

Piezoelectric oscillator and method for manufacturing the same

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Publication number
JP2002359523A
JP2002359523A JP2001165654A JP2001165654A JP2002359523A JP 2002359523 A JP2002359523 A JP 2002359523A JP 2001165654 A JP2001165654 A JP 2001165654A JP 2001165654 A JP2001165654 A JP 2001165654A JP 2002359523 A JP2002359523 A JP 2002359523A
Authority
JP
Japan
Prior art keywords
semiconductor component
container
piezoelectric
oscillator
piezoelectric oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001165654A
Other languages
Japanese (ja)
Other versions
JP4685273B2 (en
Inventor
Hirokazu Kobayashi
宏和 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2001165654A priority Critical patent/JP4685273B2/en
Publication of JP2002359523A publication Critical patent/JP2002359523A/en
Application granted granted Critical
Publication of JP4685273B2 publication Critical patent/JP4685273B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric oscillator which realizes miniaturization, and aims at yield improvement and cost reduction. SOLUTION: In a piezoelectric oscillator, comprising a piezoelectric vibrator formed by housing a piezoelectric element plate in a case having a concave opening and a semiconductor component, a pattern for conduction is formed around the opening of the case having the concave opening, the pattern abuts an terminal of the semiconductor component to make electrical connection, and an airtightly sealed structure is formed as a lid of the case by the semiconductor component. Further, an oscillation circuit is incorporated only in what obtains satisfactory characteristic as a piezoelectric vibrator to configure a piezoelectric oscillator, thereby improving the yield, and still further, an oscillator is configured with only completed members, thereby reducing the cost.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】無線通信機器や携帯電話機な
どの移動体通信分野と、GPS、コンピュータ、音響製
品、ビデオデッキ、ビデオカメラ、家庭電化製品などを
はじめとするあらゆるクロック信号源に使用される発振
器を小型化できる圧電発振器の構造に関する。
The present invention is used in the field of mobile communication such as wireless communication equipment and mobile phones, and in all clock signal sources such as GPS, computers, audio products, video decks, video cameras, home appliances and the like. The present invention relates to a structure of a piezoelectric oscillator that can reduce the size of an oscillator.

【0002】[0002]

【従来の技術】図6の一例に示すように一般的な発振器
は、積層基板に発振回路用印刷パターンを配置したもの
や、単板基板に多層印刷を施し導通パターンを配置した
基板の同一平面上に発振回路を構成するコンデンサ、抵
抗、集積回路などの半導体部品と同一の雰囲気中に気密
封止された圧電振動子を搭載し発振器を構成していた。
2. Description of the Related Art As shown in an example of FIG. 6, a general oscillator is formed by arranging a printed pattern for an oscillation circuit on a laminated substrate, or a single-substrate substrate on which a multi-layer printing is performed and a conductive pattern is disposed on the same plane. An oscillator is formed by mounting a piezoelectric vibrator hermetically sealed in the same atmosphere as semiconductor components such as a capacitor, a resistor, and an integrated circuit that constitute an oscillation circuit.

【0003】[0003]

【発明が解決しようとする課題】発振器を構成する圧電
振動子は環境温度により周波数が変化する温度特性を持
っている。その一例としてATカットの水晶振動子で
は、中心周波数の変動が最も少ない温度を25℃近辺に
設定し、高温側と低温側では周波数変動が大きくなると
いうATカットの水晶振動子特有の温度特性を持ってい
ることが知られている。
The piezoelectric vibrator constituting the oscillator has a temperature characteristic in which the frequency changes depending on the environmental temperature. As an example, in the case of an AT-cut crystal unit, the temperature at which the center frequency fluctuates least is set to around 25 ° C, and the temperature characteristics peculiar to the AT-cut crystal unit are such that the frequency fluctuation becomes large on the high temperature side and low temperature side. It is known to have.

【0004】最近の傾向として無線通信機器や携帯電話
機など移動体通信分野を中心に小型化、軽量化、低価格
化が急激な展開を見せている。そのため、これらの要求
に対応した温度補償発振器の小型化、低価格化を実現し
ようとすると、積層基板の同一平面上に半導体部品と気
密封止された圧電振動子とが搭載される構造になってい
るため、圧電振動子の気密容器構造分だけ搭載面積が必
要となり、小型化する上で制約を受けることになる。ま
た、仮に圧電振動子のみを気密封止せずに発振回路部品
と一体化して気密容器構造にし小型化すると、特に温度
補償型圧電発振器の場合では、温度補償発振器でありな
がら温度補償発振器を構成する半導体部品の発熱により
圧電振動子の周囲環境温度が変化してしまうため、温度
補償特性の維持が難しいのが現状である。
[0004] As a recent trend, miniaturization, weight reduction, and price reduction have been rapidly developed mainly in the field of mobile communication such as wireless communication equipment and mobile phones. Therefore, in order to reduce the size and cost of a temperature-compensated oscillator that meets these demands, a semiconductor component and a hermetically sealed piezoelectric vibrator are mounted on the same plane of a laminated substrate. Therefore, a mounting area is required for the structure of the airtight container of the piezoelectric vibrator, which imposes restrictions on miniaturization. Also, if the piezoelectric vibrator alone is not hermetically sealed and integrated with an oscillation circuit component to make it a hermetically sealed container structure, especially in the case of a temperature-compensated piezoelectric oscillator, a temperature-compensated oscillator is formed while being a temperature-compensated oscillator. At present, it is difficult to maintain temperature compensation characteristics because the ambient temperature around the piezoelectric vibrator changes due to heat generated by the semiconductor components.

【0005】一方、低価格化の実現については、温度補
償発振器を構成する圧電振動子と半導体部品とでは、圧
電振動子の費用に対し半導体部品の費用の方が高く、温
度補償発振器の不良の要因は圧電振動子の諸特性に起因
する場合が多いことから、組立前の圧電振動子の所望特
性を満足させることと、半導体部品の消耗を抑える必要
とが考えられ、更に低価格化を進める上では、圧電発振
器を構成する主要部品(容器、圧電振動子、半導体部
品)のコストダウンも重要となっている。
[0005] On the other hand, in order to reduce the cost, the cost of the semiconductor component is higher than the cost of the piezoelectric vibrator for the piezoelectric vibrator and the semiconductor component constituting the temperature compensated oscillator, and the failure of the temperature compensated oscillator is reduced. Since the factors are often caused by various characteristics of the piezoelectric vibrator, it is considered necessary to satisfy the desired characteristics of the piezoelectric vibrator before assembly and to reduce the consumption of semiconductor components, and further reduce the price. Above, it is also important to reduce the cost of the main components (container, piezoelectric vibrator, semiconductor component) constituting the piezoelectric oscillator.

【0006】[0006]

【課題を解決する手段】これらの課題を解決するために
本発明は、凹状の開口部を有する容器に、圧電素板を収
納して成る圧電振動子と、半導体部品とで構成する圧電
発振器において、該凹状の開口部を有する容器の開口部
周囲に導通用のパターンが形成され、該パターンと該半
導体部品の端子部とが当接して電気的な接続を行い、か
つ、該半導体部品により該容器のフタとして密閉容器構
造を形成することを特徴とする圧電発振器とすることに
より課題を解決するものである。
To solve these problems, the present invention relates to a piezoelectric oscillator comprising a piezoelectric vibrator in which a piezoelectric element plate is housed in a container having a concave opening, and a semiconductor component. A conductive pattern is formed around the opening of the container having the concave opening, and the pattern and the terminal of the semiconductor component come into contact with each other to make an electrical connection, and The problem is solved by a piezoelectric oscillator characterized in that a closed container structure is formed as a lid of the container.

【0007】要するに、発振回路である半導体部品をフ
タとして利用し、圧電振動子を収納する凹状の開口部を
有する容器を密閉構造とするもので、圧電振動子の電気
的な接続と半導体部品との電気的な接合方法は、フリッ
プチップボンディング、ワイヤーボンディング手法、異
方性導電部材が用いられており、容器と半導体部品との
当接面に導通用パターンを形成した構造を持つ圧電発振
器である。従って、発振回路を構成する半導体部品は圧
電振動子のフタとして露出する格好となるが、外的抗力
などから半導体部品の破損や短絡防止を行うために圧電
振動子のフタ上面全体を保護材で被うことも有効な手段
となる。
In short, a container having a concave opening for accommodating a piezoelectric vibrator has a sealed structure using a semiconductor component as an oscillation circuit as a lid. Is a piezoelectric oscillator that uses a flip chip bonding, a wire bonding method, and an anisotropic conductive member, and has a structure in which a conductive pattern is formed on a contact surface between a container and a semiconductor component. . Therefore, the semiconductor parts constituting the oscillation circuit are exposed as lids of the piezoelectric vibrator, but the entire top surface of the lid of the piezoelectric vibrator is protected by a protective material in order to prevent damage or short circuit of the semiconductor parts due to external drag. Covering is also an effective means.

【0008】また、コスト低減の手段のひとつとして半
導体部品の消耗を考慮するために、温度補償発振器にあ
っては、圧電振動子自体が所望の周波数特性を得たもの
のみに半導体部品を搭載し発振器を構成することによ
り、発振器全体の構成費比率を多く占める半導体部品の
消耗を抑えることを実現し、半導体部品をフタとして利
用することから圧電発振器を構成する主要部品数を実質
上減らすことにより、圧電発振器としてのコストダウン
も可能となる。
In order to consider the consumption of semiconductor components as one of the means for reducing costs, in the case of temperature-compensated oscillators, semiconductor components are mounted only on the piezoelectric vibrator itself having a desired frequency characteristic. By configuring the oscillator, it is possible to reduce the consumption of semiconductor components, which account for a large proportion of the total cost of the oscillator, and to reduce the number of main components that make up the piezoelectric oscillator by using the semiconductor components as a lid. Also, the cost as a piezoelectric oscillator can be reduced.

【0009】更には従来の発振器に対し、半導体部品を
フタとすることにより圧電発振器自体の特に高さ(厚
み)方向での低背化を実現することで実装空間が小さい
ものへの設置にも有利となる。なお、本発明の封止工程
については、真空環境の中で封止部材を硬化させること
も特徴となる。このとき封止工程で用いる封止部材に
は、樹脂、ガラス、セラミック材料などの絶縁材料ある
いは、異方性導電部材である。
[0009] Further, as compared with the conventional oscillator, the height of the piezoelectric oscillator itself is reduced particularly in the height (thickness) direction by using a semiconductor component as a lid, so that the piezoelectric oscillator itself can be installed in a small mounting space. This is advantageous. The sealing step of the present invention is also characterized by curing the sealing member in a vacuum environment. At this time, the sealing member used in the sealing step is an insulating material such as resin, glass, and ceramic material, or an anisotropic conductive member.

【0010】[0010]

【背景】昨今上述の圧電発振器は、特に圧電振動子やそ
れを収納する容器の外形寸法が非常に小さくなってきて
いる。それに対し、圧電発振器の温度補償回路部を担う
半導体部品は、三次関数発生回路から成るアナログ動作
の温度補償を行うことから、半導体部品の設計ルールや
回路構成から見ると、半導体部品そのものの外形寸法と
面積が、前述する容器外形に近づきつつある現状から、
本発明に記載する形態を持つ圧電発振器に至るものであ
る。
BACKGROUND ART In recent years, in the above-described piezoelectric oscillator, the external dimensions of a piezoelectric vibrator and a container for accommodating the piezoelectric vibrator have become extremely small. On the other hand, the semiconductor components, which are responsible for the temperature compensation circuit of the piezoelectric oscillator, perform temperature compensation for analog operation consisting of a cubic function generation circuit. And the area is approaching the container outline mentioned above,
This leads to a piezoelectric oscillator having the form described in the present invention.

【0011】[0011]

【本発明の実施の形態】以下、添付図面に従ってこの発
明の実施例を説明する。なお、各図において同一の符号
は同様の対象を示すものとする。図1に本発明の圧電発
振器3の断面図を示す。図1において圧電発振器3は容
器6内部に圧電振動子1を搭載し、圧電振動子1を電気
的に接続した容器6に封止部材8として導電性接着剤や
はんだなどの金属バンプを用いたフリップチップボンデ
ィングや、ワイヤーボンディング、異方性導電部材とい
った材料で接合する半導体部品2(フタとした)により
密閉容器構造にした圧電発振器3である。
Embodiments of the present invention will be described below with reference to the accompanying drawings. In each drawing, the same reference numeral indicates the same object. FIG. 1 shows a sectional view of a piezoelectric oscillator 3 according to the present invention. In FIG. 1, a piezoelectric oscillator 3 has a piezoelectric vibrator 1 mounted inside a container 6, and a metal bump such as a conductive adhesive or solder is used as a sealing member 8 for the container 6 to which the piezoelectric vibrator 1 is electrically connected. A piezoelectric oscillator 3 having a sealed container structure formed by a semiconductor component 2 (used as a lid) joined by a material such as flip chip bonding, wire bonding, or an anisotropic conductive member.

【0012】従って容器6内部の詳細な配線についは図
示していないが、フタとなる半導体部品2と容器6との
接合面には半導体部品2と電気的に導通できるように導
通パターン5が形成されている。これらの導通パターン
5の一部と、容器6に収納される圧電振動子1とが電気
的に接続されていて、また更には容器外部の電極部7と
電気的な接続により、圧電発振器3からの周波数出力が
基準クロックとして利用されるものである。
Accordingly, although detailed wiring inside the container 6 is not shown, a conductive pattern 5 is formed on the joint surface between the semiconductor component 2 serving as a lid and the container 6 so as to be electrically conductive with the semiconductor component 2. Have been. A part of these conductive patterns 5 and the piezoelectric vibrator 1 housed in the container 6 are electrically connected, and furthermore, the piezoelectric vibrator 3 is electrically connected to the electrode 7 outside the container. Is used as a reference clock.

【0013】要するに、図2に示す半導体部品2(裏
面)側から見た図のように、容器6と半導体部品2とで
密閉容器を構成し、その内部に圧電振動子1を収納し
た、いわゆる圧電発振器3で、圧電振動子1を収納する
容器6と半導体部品2とを付加し、圧電振動子1と電気
的に導通を行うことにより圧電発振器3を構成するもの
で、圧電発振器3の高さ方向の厚みは、半導体部品2を
フタとすることにより小型化することができる。
In short, as shown in FIG. 2 as viewed from the semiconductor component 2 (back side) side, a container 6 and the semiconductor component 2 constitute a hermetically sealed container in which the piezoelectric vibrator 1 is housed. The piezoelectric oscillator 3 is configured by adding a container 6 for accommodating the piezoelectric vibrator 1 and the semiconductor component 2 and electrically connecting the piezoelectric vibrator 1 to the piezoelectric vibrator 1. The thickness in the vertical direction can be reduced by using the semiconductor component 2 as a lid.

【0014】従って、半導体部品2により気密封止され
た容器6と、容器内部に収納される圧電振動子1とから
構成する圧電発振器3で、容器内部に圧電振動子1を搭
載しフタとして半導体部品2を被せて密閉構造にして圧
電発振器3を得ることにより、発振回路を構成し圧電発
振器3を得る。
Accordingly, the piezoelectric oscillator 3 is composed of the container 6 hermetically sealed by the semiconductor component 2 and the piezoelectric vibrator 1 housed in the container. The piezoelectric oscillator 3 is obtained by placing the component 2 in a hermetically sealed structure, thereby forming an oscillation circuit and obtaining the piezoelectric oscillator 3.

【0015】この場合、フタとして半導体部品2が露出
する格好となるが、外的抗力などから半導体部品2の破
損や短絡防止を行うために半導体部品2全体を保護材で
被うことも有効な手段のひとつとなる。本発明では、容
器の材質はセラミック材料、樹脂材料を用いており半導
体部品2と容器との接合と導通を確保するために、容器
接合面には金属蒸着やメタライズ処理により形成するこ
とも有効性がある。
In this case, the semiconductor component 2 is exposed as a lid, but it is also effective to cover the entire semiconductor component 2 with a protective material in order to prevent damage or short circuit of the semiconductor component 2 due to external drag. It is one of the means. In the present invention, the material of the container is a ceramic material or a resin material. In order to secure the connection and conduction between the semiconductor component 2 and the container, it is also effective to form the container joint surface by metal vapor deposition or metallization. There is.

【0016】一方、半導体部品2により気密容器を実現
することから、ユーザ側の搭載回路基板にはんだなどの
搭載工程時を考慮すると、回路基板への搭載時のはんだ
熱により気密容器内の圧が高くなり気密構造を維持する
のが難しくなることから、本発明の封止工程について
は、真空環境の中で封止部材を硬化させることにより容
器内圧の上昇を抑えることができる。このとき封止工程
で用いる封止部材には、樹脂、ガラス、セラミック材料
などの絶縁材料あるいは、異方性導電部材である。
On the other hand, since the airtight container is realized by the semiconductor component 2, the pressure in the airtight container is reduced due to the heat of the solder at the time of mounting on the circuit board in consideration of the step of mounting solder or the like on the mounting circuit board on the user side. Since it becomes difficult to maintain the airtight structure, the sealing step of the present invention can suppress the rise in the internal pressure of the container by curing the sealing member in a vacuum environment. At this time, the sealing member used in the sealing step is an insulating material such as resin, glass, and ceramic material, or an anisotropic conductive member.

【0017】なお、本実施例では、容器のフタとして半
導体部品2により容器を密閉構造としており、搭載回路
基板との接続電極部7の形状については、容器裏面から
見た図3あるいは図4に示す実施形態が考えられる。図
3では電極部7の形状として、容器の対向する一辺(7
7)が連続した凸部形状であり、図4については電極部
7が独立した凸部形態であることを示すものである。な
お、ここでは図示していないが、図3と図4を組み合わ
せて、一方の辺が連続した凸部形状で他方が分離した凸
部形態であっても、またその他の組合せであっても構わ
ない。
In this embodiment, the container is hermetically sealed by the semiconductor component 2 as a lid of the container, and the shape of the connection electrode portion 7 with the mounting circuit board is shown in FIG. 3 or FIG. The embodiments shown are possible. In FIG. 3, the shape of the electrode portion 7 is one side (7
7) is a continuous convex shape, and FIG. 4 shows that the electrode portion 7 is an independent convex shape. Although not shown here, FIG. 3 and FIG. 4 may be combined to form a convex shape in which one side is continuous and the other is separated, or may be another combination. Absent.

【0018】本発明の実施例では搭載回路基板側に開口
部4がありフタである半導体部品2を配置した形態で説
明しているが、図5に図示するように、開口部4が搭載
回路基板側とは反対の位置関係(図5(a))であった
り、半導体部品2開口部4に埋まっていない状態(図5
(b))であったり、半導体部品2の電気的な接続にワ
イヤーボンディング工法(図5(c))を用いたもので
も、その形態を問うものではない。
In the embodiment of the present invention, an opening 4 is provided on the mounting circuit board side and the semiconductor component 2 as a lid is described. However, as shown in FIG. The position is opposite to that of the substrate side (FIG. 5A) or is not buried in the opening 4 of the semiconductor component 2 (FIG.
(B)) or a method using a wire bonding method (FIG. 5 (c)) for electrical connection of the semiconductor component 2 does not matter.

【0019】また、本発明ではコスト低減の手段のひと
つとして半導体部品2の消耗を考慮するために、温度補
償発振器にあっては、圧電振動子1自体が所望の周波数
特性を得たもののみに半導体部品2を搭載し、かつ、フ
タとして圧電発振器3を構成することにより、発振器全
体の構成費比率を多く占める半導体部品2の消耗を抑え
ることを実現できる。従って従来の圧電発振器3に対
し、特に厚み(高さ)方向の占有容積を抑えて小型化す
ることを実現できたことと、圧電発振器3全体に対する
圧電振動子1と半導体部品2の投入量といった歩留まり
を向上することによりコストの削減も実現することがで
きる。
Further, in the present invention, in order to consider the consumption of the semiconductor component 2 as one of the means for reducing the cost, in the case of the temperature-compensated oscillator, only the piezoelectric vibrator 1 itself having the desired frequency characteristics has been obtained. By mounting the semiconductor component 2 and configuring the piezoelectric oscillator 3 as a lid, it is possible to suppress the consumption of the semiconductor component 2 which accounts for a large proportion of the total cost of the oscillator. Accordingly, the size of the conventional piezoelectric oscillator 3 can be reduced by suppressing the occupied volume in the thickness (height) direction, and the amount of the piezoelectric vibrator 1 and the semiconductor component 2 with respect to the entire piezoelectric oscillator 3 can be reduced. The cost can be reduced by improving the yield.

【0020】[0020]

【発明の効果】本発明により発振回路を構成する半導体
部品と圧電振動子を搭載するが、半導体部品を利用して
圧電振動子を密閉構造にするためのフタとすることによ
り、圧電発振器自体の容積を少なくすることにより発振
器全体を小型化することができた。
According to the present invention, the semiconductor component and the piezoelectric vibrator constituting the oscillation circuit are mounted. By using the semiconductor component as a lid for making the piezoelectric vibrator a hermetically sealed structure, the piezoelectric oscillator itself is formed. By reducing the volume, the entire oscillator could be downsized.

【図面の簡単な説明】[Brief description of the drawings] 【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.

【図2】本発明の圧電発振器を裏面から見た平面図であ
る。
FIG. 2 is a plan view of the piezoelectric oscillator of the present invention as viewed from the back.

【図3】本発明の電極部形状を示す斜視図である。FIG. 3 is a perspective view showing the shape of an electrode portion of the present invention.

【図4】本発明の他の電極部形状を示す斜視図である。FIG. 4 is a perspective view showing another shape of an electrode portion of the present invention.

【図5】本発明の他の実施例を示す断面図である。FIG. 5 is a sectional view showing another embodiment of the present invention.

【図6】従来の圧電発振器を示す斜視図である。FIG. 6 is a perspective view showing a conventional piezoelectric oscillator.

【符号の説明】[Explanation of symbols]

1 圧電振動子 2 半導体部品 3 圧電発振器 4 開口部 5 パターン 8 封止部材 DESCRIPTION OF SYMBOLS 1 Piezoelectric vibrator 2 Semiconductor component 3 Piezoelectric oscillator 4 Opening 5 Pattern 8 Sealing member

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 容器に圧電素板を収納して成る圧電振動
子と、半導体部品とで構成する圧電発振器において、 該容器の開口部周囲に導通用のパターンが形成され、該
パターンと該半導体部品の端子部とが当接して電気的な
接続を行い、かつ、該半導体部品により該容器のフタと
して密閉容器構造を形成することを特徴とする圧電発振
器。
1. A piezoelectric oscillator comprising a piezoelectric vibrator comprising a piezoelectric element stored in a container and a semiconductor component, wherein a conductive pattern is formed around an opening of the container, and the pattern and the semiconductor A piezoelectric oscillator in which a terminal portion of a component abuts to make an electrical connection, and the semiconductor component forms a closed container structure as a lid of the container.
【請求項2】 請求項1記載の容器とは、半導体部品が
搭載される側に開口を持つ凹状部形状を有するであるこ
とを特徴とする圧電発振器。
2. The piezoelectric oscillator according to claim 1, wherein the container has a concave shape having an opening on a side on which the semiconductor component is mounted.
【請求項3】 容器に圧電素板を収納して成る圧電振動
子と、半導体部品とで構成する圧電発振器の製造方法に
おいて、 該容器の開口部周囲の導通用のパターンと該半導体部品
の端子部とが当接して電気的な接続を行い、かつ、該半
導体部品により該容器のフタとして密閉容器構造を形成
するための封止工程は、真空環境の中で封止部材を硬化
させることにより封止することを特徴とする圧電発振器
の製造方法。
3. A method for manufacturing a piezoelectric oscillator comprising a piezoelectric vibrator in which a piezoelectric element is housed in a container and a semiconductor component, comprising: a conductive pattern around an opening of the container; and a terminal of the semiconductor component. The part is in contact with and makes electrical connection, and the sealing step for forming a closed container structure as a lid of the container by the semiconductor component is performed by curing the sealing member in a vacuum environment. A method for manufacturing a piezoelectric oscillator, characterized by sealing.
【請求項4】 請求項3記載の封止部材は、樹脂、ガラ
ス、セラミック材料であることを特徴とする圧電発振器
の製造方法。
4. The method for manufacturing a piezoelectric oscillator according to claim 3, wherein the sealing member is made of a resin, glass, or ceramic material.
【請求項5】 請求項1と請求項3における該半導体部
品と該容器の封止部材に異方性導電部材を用いることを
特徴とする圧電発振器とその製造方法。
5. A piezoelectric oscillator and a method for manufacturing the same, wherein an anisotropic conductive member is used as a sealing member of the semiconductor component and the container according to claim 1.
JP2001165654A 2001-05-31 2001-05-31 Piezoelectric oscillator and manufacturing method thereof Expired - Fee Related JP4685273B2 (en)

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JP2007300394A (en) * 2006-04-28 2007-11-15 Kyocera Kinseki Corp Piezoelectric oscillator
JP2008187751A (en) * 2008-05-07 2008-08-14 Kyocera Corp Surface mount piezoelectric oscillator
JP2009089437A (en) * 2009-01-13 2009-04-23 Kyocera Corp Surface-mounting piezoelectric oscillator
JP2010153966A (en) * 2008-12-24 2010-07-08 Nippon Dempa Kogyo Co Ltd Surface mount crystal oscillator
JP2011211746A (en) * 2011-06-09 2011-10-20 Seiko Epson Corp Semiconductor device, method of manufacturing the same, electronic component, circuit board, and electronic apparatus
US8673767B2 (en) 2005-06-08 2014-03-18 Seiko Epson Corporation Manufacturing method for semiconductor device

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JP2000013170A (en) * 1998-06-24 2000-01-14 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2000134037A (en) * 1998-10-21 2000-05-12 Nippon Dempa Kogyo Co Ltd Surface mount crystal oscillator
JP2001007646A (en) * 1999-06-23 2001-01-12 Toyo Commun Equip Co Ltd Piezoelectric oscillator

Patent Citations (3)

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JP2000013170A (en) * 1998-06-24 2000-01-14 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2000134037A (en) * 1998-10-21 2000-05-12 Nippon Dempa Kogyo Co Ltd Surface mount crystal oscillator
JP2001007646A (en) * 1999-06-23 2001-01-12 Toyo Commun Equip Co Ltd Piezoelectric oscillator

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US10312182B2 (en) 2005-06-08 2019-06-04 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US10361144B2 (en) 2005-06-08 2019-07-23 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US11205608B2 (en) 2005-06-08 2021-12-21 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US10727166B2 (en) 2005-06-08 2020-07-28 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US10636726B2 (en) 2005-06-08 2020-04-28 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US8673767B2 (en) 2005-06-08 2014-03-18 Seiko Epson Corporation Manufacturing method for semiconductor device
US10424533B1 (en) 2005-06-08 2019-09-24 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US10283438B2 (en) 2005-06-08 2019-05-07 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US8896104B2 (en) 2005-06-08 2014-11-25 Seiko Epson Corporation Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
US10262923B2 (en) 2005-06-08 2019-04-16 Advanced Interconnect Systems Limited Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
JP2007300394A (en) * 2006-04-28 2007-11-15 Kyocera Kinseki Corp Piezoelectric oscillator
JP2008187751A (en) * 2008-05-07 2008-08-14 Kyocera Corp Surface mount piezoelectric oscillator
JP2010153966A (en) * 2008-12-24 2010-07-08 Nippon Dempa Kogyo Co Ltd Surface mount crystal oscillator
JP2009089437A (en) * 2009-01-13 2009-04-23 Kyocera Corp Surface-mounting piezoelectric oscillator
JP2011211746A (en) * 2011-06-09 2011-10-20 Seiko Epson Corp Semiconductor device, method of manufacturing the same, electronic component, circuit board, and electronic apparatus

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